CN110578143B - Method for preparing Al-ZrO2/Y2O3 composite coating material by atmospheric plasma spraying - Google Patents
Method for preparing Al-ZrO2/Y2O3 composite coating material by atmospheric plasma spraying Download PDFInfo
- Publication number
- CN110578143B CN110578143B CN201910939250.4A CN201910939250A CN110578143B CN 110578143 B CN110578143 B CN 110578143B CN 201910939250 A CN201910939250 A CN 201910939250A CN 110578143 B CN110578143 B CN 110578143B
- Authority
- CN
- China
- Prior art keywords
- zro
- powder
- coating
- spraying
- atmospheric plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 79
- 239000011248 coating agent Substances 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000007750 plasma spraying Methods 0.000 title claims abstract description 25
- 239000002131 composite material Substances 0.000 title claims abstract description 17
- 239000000463 material Substances 0.000 title claims abstract description 17
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 title claims description 41
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 title claims description 32
- 239000000843 powder Substances 0.000 claims abstract description 54
- 238000005507 spraying Methods 0.000 claims abstract description 41
- 238000005516 engineering process Methods 0.000 claims abstract description 18
- 239000007787 solid Substances 0.000 claims abstract description 10
- 230000008021 deposition Effects 0.000 claims abstract description 7
- 238000002156 mixing Methods 0.000 claims abstract description 7
- 239000007921 spray Substances 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 25
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 22
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 238000010288 cold spraying Methods 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 8
- 239000002737 fuel gas Substances 0.000 claims description 8
- 239000001294 propane Substances 0.000 claims description 8
- 238000013329 compounding Methods 0.000 claims description 7
- 229910052593 corundum Inorganic materials 0.000 claims description 7
- 239000010431 corundum Substances 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 238000005488 sandblasting Methods 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000005303 weighing Methods 0.000 claims description 5
- 238000005238 degreasing Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 11
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 7
- 238000002360 preparation method Methods 0.000 abstract description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 4
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/324—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal matrix material layer comprising a mixture of at least two metals or metal phases or a metal-matrix material with hard embedded particles, e.g. WC-Me
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
- C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Ceramic Engineering (AREA)
- Coating By Spraying Or Casting (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
本发明公开了一种利用大气等离子喷涂技术制备Al‑ZrO2/Y2O3复合涂层材料的方法，属于涂层制备技术领域。该方法包括：(1)将Al粉和ZrO2粉末进行配比并均匀混合；采用冷喷涂固态沉积技术在基体表面进行喷涂，制备Al‑ZrO2打底涂层；(2)通过大气等离子喷涂技术在Al‑ZrO2涂层之上制备高纯Y2O3涂层，最终形成Al‑ZrO2/Y2O3复合涂层，该涂层结构致密、孔隙率低，涂层与铝合金基体之间结合良好，结合强度达到20‑80MPa。The invention discloses a method for preparing an Al-ZrO 2 /Y 2 O 3 composite coating material by utilizing atmospheric plasma spraying technology, and belongs to the technical field of coating preparation. The method comprises: (1) proportioning and uniformly mixing Al powder and ZrO 2 powder; spraying on the surface of a substrate by using a cold spray solid state deposition technology to prepare an Al-ZrO 2 primer; (2) spraying by atmospheric plasma technology to prepare high-purity Y 2 O 3 coating on top of Al-ZrO 2 coating, and finally form Al-ZrO 2 /Y 2 O 3 composite coating, which has dense structure and low porosity, and the coating is closely related to aluminum alloy. The matrices are well bonded, and the bonding strength reaches 20-80MPa.
Description
Technical Field
The invention relates to the technical field of coating preparation, in particular to Al-ZrO prepared by atmospheric plasma spraying2/Y2O3A method for preparing composite coating material.
Background
Y2O3And ZrO2The ceramic material has wide application in the fields of protection of IC equipment key parts and high-temperature oxidation resistance of metal materials. Taking the reaction chamber of the etching machine as an example, the etching uses the bombardment of high-energy plasma of strong corrosive gas to generate a high-strength corrosion environment, metal parts in the high-strength corrosion environment can be seriously corroded, and gold is releasedThe ions or particles pollute the cavity, and the circuit of the chip is short-circuited. In this case, a high purity dense oxide ceramic material is an ideal protective material.
The traditional IC equipment parts are protected by an anodic aluminum oxide coating. Because the parts are in a strong corrosive environment and an ion bombardment interaction state, once metal ions generated by corrosion dissolve out to cause system pollution, the loss cannot be estimated. Research shows that the yttrium oxide coating has better plasma erosion resistance and longer service life than aluminum oxide, so that the yttrium oxide coating becomes a novel coating for protecting IC equipment parts. Besides etchers, yttria coatings have great application value in other IC equipment components. However, yttrium is a precious metal and the yield of yttrium oxide, an oxide, is limited. The zirconium oxide can be used as a substitute of yttrium oxide, has similar antioxidant and protective effects, and can be used at a lower cost. Therefore, zirconia coatings and yttria-stabilized zirconia coatings are also the focus of research in this field.
The cold spraying solid deposition technology is a novel spraying technology which takes compressed gas (nitrogen, helium, air or mixed gas and the like) as an accelerating medium to drive metal particles to collide a substrate at a very high speed in a solid state, so that the particles are subjected to strong plastic deformation to deposit and form a coating. The atmospheric plasma spraying technology is to burn hydrocarbon gas such as propane, propylene and the like or liquid fuel such as aviation kerosene, alcohol and the like and high-pressure oxygen in a combustion chamber or a special nozzle to generate high-temperature and high-pressure flame flow, the temperature of the flame flow can reach 3200 ℃, the speed of the flame flow can reach more than 1500m/s, powder is axially or radially fed into plasma to generate molten or semi-molten particles, and the molten or semi-molten particles impact the surface of a substrate at high speed to form a coating. The bond strength, density and hardness of the sprayed coating are very high due to the spray particles impinging on the substrate surface at supersonic flight. ZrO (ZrO)2And Y2O3And the ceramic material is a more common ceramic material and has wider application in corrosive environments such as high-temperature oxidation and plasma erosion resistance. At the same time, ZrO2Is less costly than Y2O3Low, resources are comparativelyIs rich in Y and can replace Y in some use environments2O3The ceramic material achieves similar protection effect. At present, no atmosphere plasma spraying method for preparing Al-ZrO exists in China2/Y2O3Research on composite coating materials reports that work on high purity, high density Al-ZrO2/Y2O3The research on the composite coating material has important significance.
Disclosure of Invention
The invention aims to provide a method for preparing Al-ZrO by using atmospheric plasma spraying2/Y2O3Method for preparing Al-ZrO on inner surface of IC equipment key parts by using composite coating material2/Y2O3And (4) protective coating.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
Al-ZrO prepared by using atmospheric plasma spraying technology2/Y2O3A method of compounding a coating material comprising the steps of:
(1) preparing Al powder and ZrO powder with purity of more than 99.9%2Powder and Y2O3The powder is taken as a raw material;
(2) the surface of the base material is pretreated, wherein the pretreatment comprises degreasing, derusting and sand blasting;
(3) weighing Al powder and ZrO powder in required proportion2Mixing the powder until the powder is uniformly mixed; then spraying on the surface of the matrix by adopting a cold spraying solid deposition technology to obtain Al-ZrO deposited on the matrix2Coating;
(4) by atmospheric plasma spraying on Al-ZrO2Spraying Y on the surface of the coating2O3Coating to obtain Al-ZrO2/Y2O3And (4) composite coating.
In the step (1), the Al powder and ZrO2Powder and Y2O3The particle size of the powder is in the range of 3-60 μm.
In the above step (3), the Al powder and ZrO2The mass ratio of the powder is 1:9-9: 1.
In the step (2), the degreasing is performed by cleaning with acetone and alcohol; the rust removal and sand blasting treatment are carried out by using white corundum, and the granularity range of the white corundum is 20-100 mu m.
In the step (3), in the cold spraying solid deposition technique, compressed air (which may be nitrogen, argon, or a mixture thereof) is used as the working gas, the spraying distance is 15-40mm, the spraying pressure is 1.5-3.0MPa, and the spraying temperature is 200-650 ℃. Prepared Al-ZrO2The thickness of the coating is 10-50 μm.
In the step (4), in the atmospheric plasma spraying technology, the spraying distance is 5-50mm, the used fuel gas is propane, the combustion-supporting gas is oxygen, the powder feeding gas is nitrogen, and the gas flow rates of the fuel gas, the combustion-supporting gas and the powder feeding gas are respectively 20-80mL/min, 200-400mL/min and 20-80 mL/min; in the presence of Al-ZrO2Y prepared on the coating2O3The thickness of the coating is 80-200 μm.
The spraying distance of the used atmosphere plasma spraying equipment is 40-120mm, and the length of a spray pipe is 60-200 mm.
Compared with the prior art, the invention has the following beneficial effects:
Al-ZrO produced by the invention2/Y2O3The coating has compact structure and low porosity which reaches 0.5 to 4 percent; the binding force between the coating and the substrate reaches 20-80MPa, and is higher than that of the common plasma spraying and cold spraying coatings. Therefore, the Al-ZrO prepared by the atmospheric plasma spraying of the invention2/Y2O3The coating has more excellent mechanical properties.
Drawings
FIG. 1 shows the preparation of Al-ZrO by the present invention2/Y2O3A process flow chart of the composite coating.
Detailed Description
For a further understanding of the present invention, the following description is given in conjunction with the examples which are set forth to illustrate, but are not to be construed to limit the present invention, features and advantages.
Example 1:
the embodiment provides a method for preparing an Al-ZrO2/Y2O3 coating by atmospheric plasma spraying (the flow is shown in figure 1), which specifically comprises the following steps:
(1) preparing Al powder and Y with purity of more than 99.9%2O3Powder and ZrO2The powder has the granularity range of 5-60 mu m and a single cubic structure;
(2) pretreating key aluminum alloy parts of the IC equipment, cleaning the key aluminum alloy parts by using acetone and alcohol, and then performing rust removal and sand blasting treatment by using white corundum with the granularity of 50-100 mu m;
(3) weighing the following components in a weight ratio of 1: 1.5 of Al powder and ZrO2Mixing the powder until the powder is uniformly mixed; spraying Al-ZrO on the surface of the matrix by adopting a cold spraying solid deposition technology to deposit2And (4) coating. In the deposition process: compressed air is used as working gas, the spraying distance is 30mm, the spraying pressure is 2.0MPa, and the spraying temperature is 600 ℃.
Al-ZrO produced on the surface of substrates2The coating thickness reached 30 μm.
(4) Applying atmosphere plasma spraying technology to Al-ZrO2Spraying Y on the surface of the coating2O3Coating to obtain Al-ZrO2/Y2O3A composite coating; in the spraying process, the used fuel gas is propane, the flow rate of the propane is 40mL/min, the combustion-supporting gas is oxygen, the flow rate of the oxygen is 180mL/min, the powder feeding gas is nitrogen, the flow rate of the nitrogen is 80mL/min, the spraying distance is 90mm, and the length of the spraying pipe is 60 mm. Preparation of Y2O3The coating thickness was 150. mu.m.
As detected, Al-ZrO produced in this example2/Y2O3The porosity of the composite coating is 2.5%, the bonding force between the coating and the substrate is 35MPa, and the overall thickness of the coating is 180 mu m. .
Example 2:
this example provides an atmospheric plasma spray process for preparing Al-ZrO2/Y2O3The coating method specifically comprises the following steps:
(1) selecting Al powder and Y2O3Powder and ZrO2Powder, granules thereofThe degree ranges from 20 to 40 mu m;
(2) pretreating key aluminum alloy parts of the IC equipment, cleaning the key aluminum alloy parts by using acetone and alcohol, and then performing rust removal and sand blasting treatment by using white corundum with the granularity of 50-100 mu m;
(3) weighing the following components in a weight ratio of 1: 1.5 of Al powder and ZrO2Mixing the powder until the powder is uniformly mixed; and spraying the Al-ZrO2 coating on the surface of the matrix by adopting a cold spraying solid deposition technology. In the deposition process: compressed air is used as working gas, the spraying distance is 35mm, the spraying pressure is 1.8MPa, and the spraying temperature is 600 ℃.
Al-ZrO produced on the surface of substrates2The coating thickness reached 30 μm.
(4) Applying atmosphere plasma spraying technology to Al-ZrO2Spraying Y on the surface of the coating2O3Coating to obtain Al-ZrO2/Y2O3A composite coating; in the spraying process, the used fuel gas is propane, the flow rate of the propane is 60mL/min, the combustion-supporting gas is oxygen, the flow rate of the oxygen is 180mL/min, the powder feeding gas is nitrogen, the flow rate of the nitrogen is 70mL/min, the spraying distance is 100mm, and the length of the spraying pipe is 60 mm.
Preparation of Y2O3The coating thickness was 120. mu.m.
As detected, Al-ZrO produced in this example2/Y2O3The porosity of the composite coating is 1.2%, the bonding force between the coating and the substrate is 45MPa, and the overall thickness of the coating reaches 150-160 mu m. .
Example 3:
this example provides an atmospheric plasma spray process for preparing Al-ZrO2/Y2O3The coating method specifically comprises the following steps:
(1) al powder, Y2O3Powder and ZrO2Powder with the granularity ranging from 40 to 60 mu m;
(2) pretreating key aluminum alloy parts of the IC equipment, cleaning the key aluminum alloy parts by using acetone and alcohol, and then performing rust removal and sand blasting treatment by using white corundum with the granularity of 50-100 mu m;
(3) weighing the following components in a weight ratio of 1: 1.5 of Al powder and ZrO2Mixing the powder until the powder is uniformly mixed; spraying Al-ZrO on the surface of the matrix by adopting a cold spraying solid deposition technology to deposit2And (4) coating. In the deposition process: compressed air (nitrogen, argon or their mixture) is used as working gas, the spraying distance is 30mm, the spraying pressure is 2.0MPa, and the spraying temperature is 550 ℃.
Al-ZrO produced on the surface of substrates2The coating thickness reached 30 μm.
(4) Al-ZrO cold spraying by adopting atmospheric plasma spraying technology2Priming coating surface spraying Y2O3Coating to obtain Al-ZrO2/Y2O3A composite coating; in the spraying process, the used fuel gas is propane, the fuel gas flow is 35mL/min, the combustion-supporting gas is oxygen, the oxygen flow is 150mL/min, the powder feeding gas is nitrogen, the nitrogen flow is 40mL/min, the spraying distance is 80mm, and the length of the spraying pipe is 60 mm. Preparation of Y2O3The coating thickness was 170. mu.m.
As detected, Al-ZrO produced in this example2/Y2O3The porosity of the composite coating is 0.5%, the bonding force between the coating and the substrate is 40MPa, and the overall thickness of the coating is 200 microns.
Claims (6)
1. Al-ZrO prepared by using atmospheric plasma spraying technology2/Y2O3A method of compounding a coating material, characterized by: the method comprises the following steps:
(1) preparing Al powder and ZrO powder with purity of more than 99.9%2Powder and Y2O3The powder is taken as a raw material;
(2) the surface of the base material is pretreated, wherein the pretreatment comprises degreasing, derusting and sand blasting;
(3) weighing Al powder and ZrO powder in required proportion2Mixing the powders until uniformly mixing the Al powder and the ZrO powder2The mass ratio of the powder is 1:9-9: 1; then spraying on the surface of the matrix by adopting a cold spraying solid deposition technology to obtain Al-ZrO deposited on the matrix2Coating; in the cold spray solid state deposition technique, theCompressed air is used as working gas, the spraying distance is 15-40mm, the spraying pressure is 1.5-3.0MPa, and the spraying temperature is 200-; the Al-ZrO2The thickness of the coating is 10-50 μm;
(4) by atmospheric plasma spraying on Al-ZrO2Spraying Y on the surface of the coating2O3Coating to obtain Al-ZrO2/Y2O3And (4) composite coating.
2. The method of claim 1, wherein the Al-ZrO is prepared by using an atmospheric plasma spraying technique2/Y2O3A method of compounding a coating material, characterized by: in the step (1), the Al powder and ZrO2Powder and Y2O3The particle size of the powder is in the range of 3-60 μm.
3. The method of claim 1, wherein the Al-ZrO is prepared by using an atmospheric plasma spraying technique2/Y2O3A method of compounding a coating material, characterized by: in the step (2), the degreasing is carried out by cleaning with acetone and alcohol; the derusting and the sand blasting are carried out by using white corundum, and the granularity range of the white corundum is 20-100 mu m.
4. The method of claim 1, wherein the Al-ZrO is prepared by using an atmospheric plasma spraying technique2/Y2O3A method of compounding a coating material, characterized by: in the step (4), in the atmospheric plasma spraying technology, the spraying distance is 5-50mm, the used fuel gas is propane, the combustion-supporting gas is oxygen, the powder feeding gas is nitrogen, and the gas flow rates of the fuel gas, the combustion-supporting gas and the powder feeding gas are respectively 20-80mL/min, 200-400mL/min and 20-80 mL/min.
5. The Al-ZrO produced by the atmospheric plasma spraying technique according to claim 1 or 42/Y2O3A method of compounding a coating material, characterized by: in step (4), in Al-ZrO2Y prepared on the coating2O3The thickness of the coating is 80-200 μm.
6. The Al-ZrO prepared by the atmospheric plasma spraying technique according to claim 42/Y2O3A method of compounding a coating material, characterized by: the spraying distance of the used atmosphere plasma spraying equipment is 40-120mm, and the length of a spray pipe is 60-200 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910939250.4A CN110578143B (en) | 2019-09-30 | 2019-09-30 | Method for preparing Al-ZrO2/Y2O3 composite coating material by atmospheric plasma spraying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910939250.4A CN110578143B (en) | 2019-09-30 | 2019-09-30 | Method for preparing Al-ZrO2/Y2O3 composite coating material by atmospheric plasma spraying |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110578143A CN110578143A (en) | 2019-12-17 |
| CN110578143B true CN110578143B (en) | 2021-10-22 |
Family
ID=68814046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910939250.4A Active CN110578143B (en) | 2019-09-30 | 2019-09-30 | Method for preparing Al-ZrO2/Y2O3 composite coating material by atmospheric plasma spraying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110578143B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111424273A (en) * | 2020-03-30 | 2020-07-17 | 沈阳富创精密设备有限公司 | Method for preparing high-cleanliness coating |
| CN114574857B (en) * | 2022-04-28 | 2022-07-08 | 中南大学湘雅医院 | A coating material and its application in the field of surgical tools |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102491639A (en) * | 2011-12-01 | 2012-06-13 | 安徽禹恒材料技术有限公司 | Nanometer aluminum oxide composite ceramic coating layer and preparation method thereof |
| CN103282536A (en) * | 2010-07-09 | 2013-09-04 | Vtt科技研究中心 | Thermally sprayed completely amorphic oxide coating |
| CN104364887A (en) * | 2012-05-22 | 2015-02-18 | 株式会社东芝 | Component for plasma processing apparatus, and method for manufacturing component for plasma processing apparatus |
| CN106591820A (en) * | 2015-10-15 | 2017-04-26 | 沈阳富创精密设备有限公司 | Preparation method of high-purity yttrium oxide coating for IC equipment critical parts |
| CN106702303A (en) * | 2015-08-19 | 2017-05-24 | 宁波瑞隆表面技术有限公司 | Nano-zirconia thermal barrier coating material on stainless steel surface, and preparation process thereof |
| CN108330467A (en) * | 2017-01-20 | 2018-07-27 | 应用材料公司 | The multilayer plasma resistant coating obtained by atomic layer deposition |
| CN109957748A (en) * | 2019-04-02 | 2019-07-02 | 沈阳富创精密设备有限公司 | A kind of preparation method of IC equipment key components and parts surface protection coating |
| CN110004393A (en) * | 2019-04-08 | 2019-07-12 | 中国科学院金属研究所 | A method for preparing Y2O3 ceramic coating by supersonic flame spraying technology |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060110609A1 (en) * | 2004-11-19 | 2006-05-25 | Eaton Harry E | Protective coatings |
| DE102006027728A1 (en) * | 2006-06-16 | 2007-12-20 | Mtu Aero Engines Gmbh | thermal barrier |
| JP2008196040A (en) * | 2007-02-16 | 2008-08-28 | Toshiba Corp | Heat resistant member |
| JP4591722B2 (en) * | 2008-01-24 | 2010-12-01 | 信越化学工業株式会社 | Manufacturing method of ceramic sprayed member |
| US20110217568A1 (en) * | 2010-03-05 | 2011-09-08 | Vinod Kumar Pareek | Layered article |
| KR101466967B1 (en) * | 2012-06-13 | 2014-12-15 | 한국과학기술연구원 | Multi-component ceramic coating material for thermal spray and fabrication method and coating method thereof |
-
2019
- 2019-09-30 CN CN201910939250.4A patent/CN110578143B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103282536A (en) * | 2010-07-09 | 2013-09-04 | Vtt科技研究中心 | Thermally sprayed completely amorphic oxide coating |
| CN102491639A (en) * | 2011-12-01 | 2012-06-13 | 安徽禹恒材料技术有限公司 | Nanometer aluminum oxide composite ceramic coating layer and preparation method thereof |
| CN104364887A (en) * | 2012-05-22 | 2015-02-18 | 株式会社东芝 | Component for plasma processing apparatus, and method for manufacturing component for plasma processing apparatus |
| CN106702303A (en) * | 2015-08-19 | 2017-05-24 | 宁波瑞隆表面技术有限公司 | Nano-zirconia thermal barrier coating material on stainless steel surface, and preparation process thereof |
| CN106591820A (en) * | 2015-10-15 | 2017-04-26 | 沈阳富创精密设备有限公司 | Preparation method of high-purity yttrium oxide coating for IC equipment critical parts |
| CN108330467A (en) * | 2017-01-20 | 2018-07-27 | 应用材料公司 | The multilayer plasma resistant coating obtained by atomic layer deposition |
| CN109957748A (en) * | 2019-04-02 | 2019-07-02 | 沈阳富创精密设备有限公司 | A kind of preparation method of IC equipment key components and parts surface protection coating |
| CN110004393A (en) * | 2019-04-08 | 2019-07-12 | 中国科学院金属研究所 | A method for preparing Y2O3 ceramic coating by supersonic flame spraying technology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110578143A (en) | 2019-12-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11834748B2 (en) | Method for preparing a protective coating on a surface of key components and parts of IC devices based on plasma spraying technology and cold spraying technology | |
| CN105648296B (en) | A kind of high temperature resistance tungsten carbide-base metal-ceramic composite powder end, coating and its preparation process containing Re | |
| CN103540890B (en) | Preparation method of boron carbide-silicon carbide composite coating | |
| CN111593287B (en) | Method for forming ceramic core aluminum oxide coating by supersonic plasma spraying | |
| CN105483597B (en) | A kind of preparation method of the thermal barrier coating of zirconic acid lanthanum fiber doping zirconic acid lanthanum | |
| CN110578143B (en) | Method for preparing Al-ZrO2/Y2O3 composite coating material by atmospheric plasma spraying | |
| CN108468011A (en) | Double ceramic layer Interface compositions are in continuously varying gradient thermal barrier coating and preparation method thereof | |
| CN112279682A (en) | Silicon-based composite coating, preparation method and application thereof, and aircraft engine | |
| CN110643929A (en) | A kind of anti-stick coating on the surface of cemented carbide sintered boat and preparation method thereof | |
| CN105401116A (en) | A kind of preparation method of titanium alloy TiAl3-Al composite coating | |
| CN102392208B (en) | Method for spraying aluminum coating on surface of magnesium alloy | |
| CN113860920A (en) | Environmental barrier coating with excellent CMAS corrosion resistance and preparation method thereof | |
| Bhuyan et al. | Sensitivity of process parameters in atmospheric plasma spray coating | |
| WO2020207089A1 (en) | Method for preparing y2o3 ceramic coating by supersonic flame spraying technology | |
| CN115516124A (en) | Slurry composition for suspension plasma thermal spraying, method for producing same, and suspension plasma thermal spraying coating film | |
| CN110616397A (en) | Preparation of Al/(Y) by atmospheric plasma spraying2O3-ZrO2) Method for composite coating | |
| CN107287552A (en) | The preparation method of chromium boride base coating | |
| CN113584421A (en) | Method for enhancing bonding strength of yttrium oxide coating and substrate surface | |
| CN113186484A (en) | High-bonding same/heterogeneous multi-interface millimeter-scale thick thermal barrier coating and preparation method thereof | |
| CN114752881B (en) | Preparation method of CMAS corrosion resistant thermal barrier coating and thermal barrier coating obtained by preparation method | |
| CN109957748B (en) | Preparation method of surface protective coating for IC equipment key parts | |
| CN114438432A (en) | A kind of preparation method of anti-oxidation adhesive layer and thermal barrier coating thereof | |
| CN114592164A (en) | DVC thermal barrier coating and its preparation method and application | |
| CN118222967B (en) | Preparation method of high-density plasma erosion resistant coating | |
| CN113862598A (en) | CMAS-resistant protective layer for TBCs or EBCs, preparation method thereof and protective structure obtained by CMAS-resistant protective layer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |