CN110549223B - Water jet machining device - Google Patents

Abstract

Provided is a water jet machining device, wherein the installed spray nozzle can be identified even after the spray nozzle is installed in the water jet machining device. The water jet machining device comprises: an ejection unit having an ejection nozzle that ejects pressurized liquid to a workpiece; and a nozzle determination unit that determines the diameter or area of the ejection nozzle, the ejection unit having a pump that pressurizes the liquid in accordance with the rotation speed of the motor, the nozzle determination unit having: a motor rotation speed storage unit that stores a rotation speed of a motor required to eject liquid from an ejection opening of the ejection nozzle at a predetermined pressure, in accordance with a diameter or an area of the ejection opening of the ejection nozzle; a determination unit that determines the diameter or area of an ejection opening of the ejection nozzle that ejects the liquid, based on the rotational speed of the motor when the liquid is ejected from the ejection nozzle at a predetermined pressure; and a notification unit that notifies the determination result of the determination unit.

Description

Water jet processing device

technical field

The present invention relates to a water jet processing device for processing a workpiece by spraying pressurized liquid.

Background technique

For plate-shaped workpieces such as packaging substrates in which device chips placed on a substrate are covered with a sealing material (molding resin) made of resin, and semiconductor wafers on which multiple devices are formed, etc. For division, a cutting device equipped with an annular cutting blade is mainly used. With the workpiece held on the chuck table included in the cutting device, the cutting blade is rotated to cut into the workpiece, thereby cutting the workpiece.

When the workpiece contains metal, when the workpiece is cut with a cutting tool, the metal may be elongated in contact with the cutting tool, and whisker-like flashes may be generated. Since the burrs cause a decrease in the quality of chips obtained by dividing the workpiece, it is desired to suppress the generation of burrs as much as possible when dividing the workpiece.

In order to suppress generation of burrs, a method of dividing a workpiece using a water jet processing device has been proposed. This water jet processing apparatus pressurizes water with a pump and sprays it toward a workpiece to perform processing such as removing a part of the workpiece. Patent Document 1 and Patent Document 2 disclose a method of dividing a package substrate into a plurality of chips by spraying high-pressure water along the lanes (planned dividing lines) of the package substrate.

In addition, there has been proposed a method of removing burrs generated by cutting with a water jet while using a cutting tool during cutting of a workpiece. Patent Document 3 discloses a machining device in which a deburring nozzle that sprays high-pressure water is provided at a position adjacent to a cutting tool, and the deburring nozzle is directed toward a workpiece formed by cutting a workpiece with a cutting tool. The cutting groove sprays high-pressure water to remove the flash.

Patent Document 1: Japanese Patent Laid-Open No. 2004-130401

Patent Document 2: Japanese Patent Laid-Open No. 2012-109327

Patent Document 3: Japanese Patent Laid-Open No. 2016-157722

A spray nozzle that sprays high-pressure water from a spray port toward a workpiece is attached to the water jet processing device. The shape and diameter of the injection port of the injection nozzle are set according to various processing conditions such as the size of the processing area, the shape of the processing area, and the material of the workpiece. Therefore, when the processing conditions change, the injection nozzle needs to be replaced.

The replacement of this spray nozzle is carried out by the operator who operates the water jet processing device, but if the operator mistakenly installs the spray nozzle, the processing will be performed with the wrong spray nozzle, and it may not be possible to properly process the spray nozzle. Processed products are processed to produce defective products. Therefore, it is preferable to check whether or not an appropriate spray nozzle is attached to the water jet processing apparatus after exchanging the spray nozzle, so as to prevent processing with a wrong spray nozzle.

However, the spray nozzle is mounted inside a water jet processing device in which a plurality of components are arranged in a complicated manner. Therefore, once the spray nozzle is attached to the water jet processing apparatus, it is difficult to confirm the type of the spray nozzle, the diameter of the spray port, and the like thereafter.

Contents of the invention

The present invention has been made in view of this problem, and an object of the present invention is to provide a water jet processing device capable of specifying the mounted spray nozzle even after the spray nozzle is mounted on the water jet processing device.

According to one aspect of the present invention, there is provided a water jet processing device, wherein the water jet processing device has: a spray unit detachably mounted with a spray nozzle for spraying a pressurized liquid onto the object to be processed; The workpiece held on the chuck table holding the object; the moving unit that relatively moves the chuck table and the injection nozzle; and the nozzle determination unit that evaluates the diameter or area of the injection nozzle It is determined that the injection unit has a pump that pressurizes the liquid according to the rotation speed of the motor, and the nozzle determination unit has: a motor rotation speed storage unit that stores information according to the diameter or area of the injection port of the injection nozzle. The rotation speed of the motor required to inject the liquid from the injection port of the injection nozzle at a predetermined pressure; the rotation speed of the motor to determine the diameter or area of the injection port of the injection nozzle that injects the liquid; and a notification unit that notifies the determination result of the determination unit.

In addition, it is preferable that the injection nozzle determination unit further has a nozzle type storage unit that stores the type of the injection nozzle according to the diameter or area of the injection port of the injection nozzle, and that the determination unit refers to the nozzle type storage unit. The information of the injection nozzle further determines the type of the nozzle based on the diameter or area of the injection nozzle of the injection nozzle that has been determined based on the rotation speed of the motor, and the notification unit notifies the type of the nozzle determined by the determination unit. .

In addition, it is preferable that the water jet processing apparatus further includes a cutting unit that cuts the workpiece held on the chuck table with a cutting tool.

In addition, it is preferable that the pump is a plunger pump, and the rotation speed of the motor when the liquid is injected from the injection nozzle at a predetermined pressure is the rotation speed of the motor specified by a signal input to an inverter connected to the motor or The rotational speed of the motor detected by the encoder connected to the motor.

A water jet processing device according to one aspect of the present invention includes a nozzle determination unit for specifying a spray nozzle mounted on the water jet processing device based on the rotation speed of a motor connected to a pump that pressurizes liquid. Thereby, it is possible to confirm whether or not an appropriate spray nozzle is attached to the water jet processing apparatus, and it is possible to prevent processing defects caused by processing a workpiece with a wrong spray nozzle.

Description of drawings

FIG. 1 is a perspective view showing a water jet processing device.

FIG. 2(A) is a perspective view showing a frame unit, and FIG. 2(B) is an enlarged perspective view showing a workpiece.

Fig. 3 is a partially cutaway side view showing the water jet unit.

4(A) and 4(B) are front views showing the spray nozzle.

FIG. 5 is a graph showing the relationship between the pressure of the liquid injected from the injection nozzle and the rotational speed of the motor.

Fig. 6 is a perspective view showing the appearance of the water jet processing device.

Fig. 7 is a partially cutaway front view showing a state of machining by a cutting unit.

Fig. 8 is a partially cutaway front view showing the state of processing by the water jet unit.

Label description

2: Water jet processing device; 4: Abutment; 4a: Opening; 4b: Opening; 4c: Opening; 6: Box supporting platform; 8: Box; 10: X-axis moving mechanism; Dust drip-proof cover; 16: Temporary release mechanism; 16a, 16b: Guide rail; 18: Chuck table; 18a: Holding surface; 20: Fixture; 22: Cutting unit; 24: Water jet unit; 26: Supporting structure; 28a , 28b: moving unit; 30: Y-axis guide rail; 32a, 32b: Y-axis moving plate; 34a, 34b: Y-axis ball screw; 36: Y-axis pulse motor; 38a, 38b: Z-axis guide rail; 40a, 40b: Z-axis moving plate; 42a, 42b: Z-axis ball screw; 44: Z-axis pulse motor; 46a, 46b: shooting unit; 48: cleaning unit; 50: injection nozzle; 50a: injection port; 52: liquid; 54: Cover; 54a: opening; 54b: rim; 54c: opening; 56: tube; 60: pump unit; 62: pump; 64: flow control unit; 66: motor; 68: inverter; 70: encoder; 72: Liquid supply source; 80: control unit; 82: flow rate control unit; 84: pressurization control unit; 90: nozzle determination unit; 92: motor speed storage unit; 94: nozzle type storage unit; 96: determination unit; 98: notification 100: injection nozzle; 100a: injection port; 100b: flow path; 102: injection nozzle; 102a: injection port; 102b: flow path; 110: cover; 112: monitor; 114: display lamp; 120: spindle; 122: cutting tool; 11: workpiece; 11a: cutting groove; 13: substrate; 13a: front; 13b: back; 15: resin layer; 15a: front; 15b: recess; 17: adhesive tape; 19: ring shape frame; 21: frame unit; 23: spacer.

Detailed ways

Hereinafter, this embodiment will be described with reference to the drawings. FIG. 1 is a perspective view showing a water jet processing device 2 according to this embodiment. The water jet machining apparatus 2 cuts a workpiece with a cutting tool and sprays a pressurized liquid onto the workpiece to process the workpiece. In addition, in FIG. 1, a part of the structure of the water jet processing apparatus 2 is shown with a block.

The water jet processing device 2 has a base 4 that supports each component constituting the water jet processing device 2 . An opening 4a is formed at a front corner of the base 4, and a cartridge support stand 6 that is raised and lowered by a lift mechanism (not shown) is provided in the opening 4a. A cassette 8 for accommodating a plurality of workpieces is mounted on the upper surface of the cassette support table 6 . In addition, in FIG. 1, only the outline of the cartridge 8 is shown for convenience of explanation.

The workpiece is accommodated in the cassette 8 in a state supported by the ring frame. (A) of FIG. 2 is a perspective view showing the frame unit 21 supporting the workpiece 11 by the annular frame 19 .

The workpiece 11 is a package substrate including a substrate 13 formed in a planar rectangular plate shape and a plurality of device chips (not shown) arranged on the front surface 13 a side of the substrate 13 . A resin layer (molding resin) 15 for sealing a plurality of device chips is formed on the front surface 13 a side of the substrate 13 . In addition, here, as an example, a case where the object to be processed 11 is a package substrate will be described, but the type of object to be processed 11 is not limited. For example, the workpiece 11 may be a semiconductor wafer or the like on which devices such as an IC (Integrated Circuit) are formed on the front surface.

A circular adhesive tape 17 having a diameter capable of covering the entire back surface 13 b of the substrate 13 is attached to the back surface 13 b side of the substrate 13 . A ring-shaped frame 19 is attached along the outer periphery of the adhesive tape 17, and the back surface 13b side of the substrate 13 is attached to the central portion of the adhesive tape 17, thereby forming a structure consisting of the workpiece 11, the adhesive tape 17, and the ring-shaped frame 19. In the formed frame unit 21 , the workpiece 11 is supported by the annular frame 19 in a state where the resin layer 15 is exposed upward. However, the resin layer 15 may be bonded to the adhesive tape 17 so that the back surface 13b side of the substrate 13 is exposed upward.

(B) of FIG. 2 is an enlarged perspective view showing the workpiece 11 . The workpiece 11 is divided into a plurality of regions by a plurality of partition lanes (planned dividing lines) 23 arranged in a grid pattern so as to intersect each other. The workpiece 11 is divided into pieces along the lanes 23 to obtain a plurality of packaged devices each including a device chip.

Also, on the front surface 15 a side of the resin layer 15 , a plurality of concave portions (cavities) 15 b in an elliptical planar view are formed along the partitions 23 . The recessed portion 15 b is arranged such that its major axis direction is along a direction perpendicular to the longitudinal direction of the spacer 23 , and the depth of the recessed portion 15 b is smaller than the thickness of the resin layer 15 .

Metal (electrode) connected to the device chip covered by the resin layer 15 is disposed inside the resin layer 15, and when the recess 15b is formed on the front surface 15a side of the resin layer 15, the metal is exposed on the inner wall and bottom of the recess 15b. When the workpiece 11 is divided into a plurality of packaged devices and each packaged device is mounted on another mounting board, the exposed metal functions as a connection electrode connected to a terminal formed on the mounting board side.

A rectangular opening 4 b is formed on the side of the cartridge support table 6 shown in FIG. 1 so that the longitudinal direction is along the X-axis direction (front-rear direction, machining feed direction). A ball screw type X-axis moving mechanism 10 , and a table cover 12 and a dust-proof and drip-proof cover 14 covering the upper part of the X-axis moving mechanism 10 are arranged in the opening 4 b. The X-axis moving mechanism 10 has an X-axis moving table (not shown) covered by a table cover 12 , and moves the X-axis moving table in the X-axis direction.

A temporary storage mechanism 16 for temporarily storing the workpiece 11 is provided at a position close to the side of the cassette support table 6 . The temporary release mechanism 16 includes, for example, a pair of guide rails 16a, 16b that approach and separate from each other while maintaining a state parallel to the Y-axis direction (left-right direction, index feed direction). The pair of guide rails 16a and 16b clamp and align the workpiece 11 pulled out from the cassette 8 at a predetermined position in the X-axis direction.

A chuck table 18 for sucking and holding the workpiece 11 is provided on the upper surface of the X-axis movable table so as to be exposed from the table cover 12 . The chuck table 18 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotational axis substantially parallel to the Z-axis direction (vertical direction). In addition, the chuck table 18 is moved in the X-axis direction by the X-axis moving mechanism 10 together with the X-axis moving table and the table cover 12 .

The upper surface of the chuck table 18 constitutes a holding surface 18 a for sucking and holding the workpiece 11 . The holding surface 18 a is formed substantially parallel to the X-axis direction and the Y-axis direction, and is connected to a suction source (not shown) such as an ejector via a suction path (not shown) provided inside the chuck table 18 .

Four clamps 20 are provided around the chuck table 18, and the four clamps 20 fix the ring frame 19 (see FIG. 2(A) ) supporting the workpiece 11 from four sides. In addition, a transfer unit (not shown) for transferring the workpiece 11 to the chuck table 18 and the like is arranged in a region adjacent to the opening 4b.

Above the chuck table 18 are provided: a cutting unit 22 that cuts the workpiece 11 with a ring-shaped cutting tool; and a water jet unit 24 that sprays pressurized liquid onto the workpiece 11 . In addition, a door-shaped support structure 26 for supporting the cutting unit 22 and the water jet unit 24 is arranged on the upper surface of the base 4 so as to straddle the opening 4 b.

On the upper part of the front surface of the support structure 26, there are provided a moving unit 28a that moves the cutting unit 22 in the Y-axis direction and the Z-axis direction; and a moving unit 28b that moves the water jet unit 24 in the Y-axis direction and the Z-axis direction. move up.

The moving unit 28a has a Y-axis moving plate 32a, and the moving unit 28b has a Y-axis moving plate 32b. The Y-axis moving plate 32 a and the Y-axis moving plate 32 b are slidably attached to a pair of Y-axis guide rails 30 arranged on the front surface of the support structure 26 along the Y-axis direction.

A nut part (not shown) is provided on the back side (rear side) of the Y-axis moving plate 32a, and a Y-axis ball screw 34a is screwed into the nut part. The Y-axis ball screw 34a is arranged along the opposite A direction substantially parallel to the Y-axis guide rail 30 . In addition, a nut part (not shown) is provided on the back side (rear side) of the Y-axis moving plate 32b, and a Y-axis ball screw 34b is screwed into the nut part, and the Y-axis ball screw 34b is provided along the The direction is substantially parallel to the Y-axis guide rail 30 .

Y-axis pulse motors 36 are connected to one ends of the Y-axis ball screws 34a and 34b, respectively. The Y-axis ball screw 34 a is rotated by the Y-axis pulse motor 36 connected to the Y-axis ball screw 34 a, so that the Y-axis moving plate 32 a moves in the Y-axis direction along the Y-axis guide rail 30 . In addition, the Y-axis ball screw 34 b is rotated by the Y-axis pulse motor 36 connected to the Y-axis ball screw 34 b, so that the Y-axis moving plate 32 b moves in the Y-axis direction along the Y-axis guide rail 30 .

A pair of Z-axis guide rails 38a are provided along the Z-axis direction on the front (front surface) side of the Y-axis moving plate 32a, and a pair of Z-axis guide rails are provided along the Z-axis direction on the front (front surface) side of the Y-axis moving plate 32b. 38b. In addition, a Z-axis moving plate 40a is slidably attached to the pair of Z-axis guide rails 38a, and a Z-axis moving plate 40b is slidably attached to the pair of Z-axis guide rails 38b.

A nut part (not shown) is provided on the back side (rear side) of the Z-axis moving plate 40a, and a Z-axis ball screw 42a is screwed into the nut part. The Z-axis ball screw 42a is arranged along the opposite in a direction substantially parallel to the Z-axis guide rail 38a. A Z-axis pulse motor 44 is connected to one end of the Z-axis ball screw 42a, and the Z-axis pulse motor 44 rotates the Z-axis ball screw 42a so that the Z-axis moving plate 40a moves along the Z-axis guide rail 38a in the Z-axis. direction to move.

A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 40b, and a Z-axis ball screw 42b is screwed into the nut portion. The Z-axis ball screw 42b is arranged along the opposite in a direction substantially parallel to the Z-axis guide rail 38b. A Z-axis pulse motor 44 is connected to one end of the Z-axis ball screw 42b, and the Z-axis pulse motor 44 rotates the Z-axis ball screw 42b so that the Z-axis moving plate 40b moves along the Z-axis guide rail 38b on the Z-axis. direction to move.

A cutting unit 22 is provided at a lower portion of the Z-axis moving plate 40a. An imaging unit (camera) 46 a for imaging the workpiece 11 and the like sucked and held by the chuck table 18 is provided at a position adjacent to the cutting unit 22 . Moreover, the water jet unit 24 is provided in the lower part of the Z-axis moving plate 40b. An imaging unit (camera) 46 b for imaging the workpiece 11 and the like sucked and held by the chuck table 18 is provided at a position adjacent to the water jet unit 24 .

The positions in the Y-axis direction and the Z-axis direction of the cutting unit 22 and the imaging unit 46a are controlled by the moving unit 28a, and the positions in the Y-axis direction and the Z-axis direction of the water jet unit 24 and the imaging unit 46b are controlled by the moving unit 28b . That is, the position of the cutting unit 22 and the position of the water jet unit 24 are controlled independently, respectively.

An opening 4c is formed in a region on the side of the opening 4b and opposite to the opening 4a. A cleaning unit 48 for cleaning the workpiece 11 is arranged in the opening 4c, and the workpiece 11 subjected to predetermined processing on the chuck table 18 is cleaned by the cleaning unit 48 .

The workpiece 11 can be cut by rotating an annular cutting tool (not shown) attached to the cutting unit 22 to cut into the workpiece 11 . Specifically, the cutting unit 22 has a main shaft having an axis in a direction substantially parallel to the holding surface 18 a of the chuck table 18 , and a ring-shaped cutting tool is attached to the front end of the main shaft. The cutting tool is constituted by, for example, an electroformed grinder in which diamond abrasive grains are fixed by nickel plating.

The main shaft is connected to a rotational drive source such as a motor, and the cutting tool attached to the main shaft is rotated by force transmitted from the rotational drive source. The cutting tool is rotated to cut into the workpiece 11 held by the chuck table 18, and the workpiece 11 and the cutting tool are relatively moved along the X-axis direction (machining feed direction), thereby cutting the workpiece 11 For cutting.

In addition, by spraying the pressurized liquid from the water jet unit 24 toward the workpiece 11 , processing such as removal of a part of the workpiece 11 and removal of metal burrs formed on the workpiece 11 can be performed. In addition, the removal of burrs using the water jet unit 24 will be described later.

FIG. 3 is a partially cutaway side view showing the water jet unit 24 . A detachable spray nozzle 50 for spraying a pressurized liquid 52 downward is attached to the water jet unit 24 . The spray nozzle 50 is connected to a pump unit 60 (see FIG. 1 ) provided for pressurizing the liquid, and the liquid supplied from the pump unit 60 is sprayed toward the workpiece 11 from the spray port 50 a of the spray nozzle 50 , thereby spraying the workpiece 11 for processing.

Moreover, the water jet unit 24 has the cover 54 which covers the lower part of the spray nozzle 50. As shown in FIG. The cover 54 is formed in a hemispherical shape (bowl shape) with a hollow inside, and an opening 54 a is provided in a central region (top) of the cover 54 in plan view. The injection nozzle 50 is inserted into the opening 54 a, and the cover 54 is attached to the injection nozzle 50 so that the annular edge 54 b faces the holding surface 18 a of the chuck table 18 .

As shown in FIG. 3 , when the workpiece 11 is processed by spraying the liquid 52 from the spray nozzle 50 , the cover 54 is positioned so as to cover the processed region of the workpiece 11 . Therefore, the cover 54 prevents mist and machining chips from being scattered due to machining. In addition, the shape of the cover 54 can be changed suitably as long as it can prevent scattering of mist and processing chips. For example, the cover 54 may be formed in a hollow conical shape.

In addition, in the cover 54 , an opening 54 c is formed at a position different from the opening 54 a, and the opening 54 c is connected to one end of a tube 56 provided outside the cover 54 . The other end of the tube 56 is connected to a suction source (not shown), and mist or processing chips generated inside the cover 54 by processing the workpiece 11 are sucked and removed through the tube 56 .

In addition, the position of the spray nozzle 50 can be controlled by the moving means 28b shown in FIG. 1 . By controlling the moving unit 28b, the chuck table 18 and the spray nozzle 50 can be relatively moved.

As shown in FIG. 1 , the water jet unit 24 is connected to a pump unit 60 . The pump unit 60 pressurizes liquid such as water and supplies it to the spray nozzle 50 of the water jet unit 24 . In addition, the pump unit 60 is connected to the control unit 80 , and the operation of the pump unit 60 is controlled by the control unit 80 .

The pump unit 60 has a pump 62 that pressurizes the liquid. The pump 62 is connected to a liquid supply source 72 constituted by a container or the like, and liquid such as water supplied from the liquid supply source 72 is pressurized by the pump 62 .

In addition, the pump 62 is connected to a liquid supply source 72 via a flow control unit 64 , and the flow rate of the liquid supplied from the liquid supply source 72 to the pump 62 is controlled by the flow control unit 64 . The flow control unit 64 is connected to the control unit 80 , and the operation of the flow control unit 64 is controlled by the control unit 80 .

Specifically, the control unit 80 has a flow control unit 82 connected to the flow control unit 64 . The flow control unit 82 controls the operation of the flow control unit 64 so that the liquid is supplied from the liquid supply source 72 to the pump 62 at a predetermined flow rate. In addition, whether or not to supply the liquid from the liquid supply source 72 to the pump 62 can also be controlled by the flow rate control unit 64 .

In addition, the pump 62 is connected to the motor 66 and controls the pressure of the liquid supplied from the flow rate control unit 64 according to the rotation speed of the motor 66 . As the pump 62 that pressurizes the liquid according to the rotation speed of the motor 66 in this way, a plunger pump can be used, for example.

In addition, an inverter 68 is connected to the electric motor 66 , and the inverter 68 controls the rotation speed of the electric motor 66 according to a signal output from the control unit 80 . Specifically, the control unit 80 has a pressurization control unit 84 connected to the inverter 68 , and the pressurization control unit 84 outputs a signal designating the rotational speed (frequency) of the electric motor 66 to the inverter 68 . When this signal is input to the inverter 68 , the inverter 68 rotates the motor 66 at the rotation speed (command frequency) specified by the pressurization control unit 84 .

Then, the pump 62 pressurizes the liquid to a predetermined pressure according to the rotation speed of the motor 66 controlled by the inverter 68 . As a result, the liquid at a predetermined pressure is supplied to the spray nozzle 50 (see FIG. 3 ) of the water jet unit 24 , and the liquid 52 is sprayed toward the workpiece 11 from the spray port 50 a.

In addition, an encoder 70 is connected to the motor 66 , and the rotation speed of the motor 66 is detected by the encoder 70 . The rotational speed of the motor 66 detected by the encoder 70 is output to the control unit 80 .

When the pressurized liquid 52 is sprayed from the water jet unit 24 to the workpiece 11 , first, the liquid at a predetermined flow rate is supplied from the liquid supply source 72 to the pump 62 through the flow rate control unit 64 , and the liquid is supplied to the motor 66 through the inverter 68 . speed control. The pump 62 then pressurizes the liquid to a pressure corresponding to the rotational speed of the motor 66 . In addition, the rotational speed of the motor 66 at this time is detected by the encoder 70 and output to the control unit 80 . The liquid pressurized to a predetermined pressure is then supplied to the water jet unit 24 by the pump 62 .

In this manner, the water jet unit 24 and the pump unit 60 constitute a unit (spray unit) that pressurizes the liquid supplied from the liquid supply source 72 to spray the liquid onto the workpiece 11 held on the chuck table 18 .

In addition, an elevating mechanism for elevating and descending the cartridge support table 6, an X-axis moving mechanism 10, a chuck table 18, a transport unit (not shown), a cutting unit 22, moving units 28a, 28b, imaging units 46a, 46b, and a cleaning unit Components such as 48 are also connected to the control unit 80, and their operations are controlled by the control unit 80.

When the workpiece 11 is processed by the water jet unit 24, it may be necessary to change the shape of the injection port 50a of the injection nozzle 50 according to the processing conditions (size of the processing area, shape of the processing area, material of the workpiece 11, etc.). ,diameter. In this case, the operator replaces the spray nozzle 50 . However, if the operator mistakenly attaches the spray nozzle 50 , the workpiece 11 is processed by the wrong spray nozzle 50 , and processing failure may occur.

The water jet processing device 2 of the present embodiment includes a nozzle determination unit 90 for discriminating the type of the spray nozzle 50 attached to the water jet unit 24 . After the spray nozzle 50 is replaced, the type of the spray nozzle 50 installed in the water jet unit 24 can be confirmed by the nozzle determination part 90, thereby preventing the workpiece 11 from being processed by the wrong spray nozzle 50 and causing processing. bad.

The type of the injection nozzle 50 can be distinguished, for example, by the diameter or area of the injection port 50 a of the injection nozzle 50 . 4(A) is a front view showing a spray nozzle 100 as an example of the spray nozzle 50 , and FIG. 4(B) is a front view showing a spray nozzle 102 as another example of the spray nozzle 50 . The diameters of the injection ports of the injection nozzle 100 and the injection nozzle 102 are different.

The injection nozzle 100 has a circular injection port 100 a for injecting liquid, and the injection port 100 a is connected to the pump unit 60 (see FIG. 1 ) via a flow path 100 b formed inside the injection nozzle 100 . The injection nozzle 102 similarly has a circular injection port 102 a for injecting liquid, and the injection port 102 a is connected to the pump unit 60 (see FIG. 1 ) via a flow path 102 b formed inside the injection nozzle 102 .

的圆形，喷射口102a形成为直径

的圆形。The diameter of the injection port 102 a of the injection nozzle 102 is larger than the diameter of the injection port 100 a of the injection nozzle 100 . Specifically, the injection port 100a is formed to have a diameter

The circular shape, the injection port 102a is formed with a diameter of

of round shape.

The pressure of the liquid sprayed from the spray nozzle is determined by the degree to which the pump 62 included in the pump unit 60 pressurizes the liquid, and the pressurization of the pump 62 is controlled by the rotation speed of the motor 66 . That is, in order to inject liquid of a predetermined pressure from the ejection nozzle, it is necessary to rotate the motor 66 at a predetermined rotational speed corresponding to the pressure. Here, the relationship between the pressure of the liquid sprayed from the spray nozzle and the rotation speed of the motor 66 differs depending on the type of the spray nozzle.

的喷射口100a的喷射喷嘴100和具有直径

的喷射口102a的喷射喷嘴102分别示出从喷射喷嘴喷射的液体的压力与电动机66的转速(频率)的关系的图表。在图5中示出为了从喷射喷嘴按照规定的压力(0MPa至70MPa)喷射液体所需的电动机66的转速。Figure 5 is for a diameter

The injection nozzle 100 of the injection port 100a and has a diameter of

Each of the injection nozzles 102 of the injection port 102a in the figure shows the relationship between the pressure of the liquid injected from the injection nozzle and the rotation speed (frequency) of the motor 66 . FIG. 5 shows the rotation speed of the motor 66 required to spray the liquid from the spray nozzle at a predetermined pressure (0 MPa to 70 MPa).

As shown in FIG. 5 , the relationship between the pressure of the liquid injected from the injection nozzle and the rotation speed of the motor 66 differs depending on the diameter of the injection port of the injection nozzle. Therefore, the relationship between the pressure of the liquid ejected from the ejection nozzle and the rotational speed of the motor 66 is recorded in advance according to the diameter of the ejection port. The rotation speed is detected, so that the diameter of the injection port can be determined and the type of the injection nozzle can be determined.

In addition, the type of the injection nozzle may be determined based on parameters other than the diameter of the injection nozzle. For example, the relationship between the pressure of the liquid sprayed from the spray nozzle and the rotation speed of the motor 66 is recorded in advance according to the area of the spray port, and the type of the spray nozzle can also be determined by specifying the area of the spray port of the spray nozzle.

The control unit 80 shown in FIG. 1 has a nozzle determination unit 90 for determining the type of the spray nozzle 50 attached to the water jet unit 24 . And, the nozzle judging part 90 determines the diameter or area of the injection port 50a according to the rotation speed of the motor 66 when the liquid is injected from the injection port 50a of the injection nozzle 50 installed in the water jet unit 24 at a predetermined pressure, so that the injection nozzle 50 type is judged. Specifically, the nozzle determination unit 90 has a motor rotational speed storage unit 92 that stores the relationship between the pressure of the liquid sprayed from the spray nozzle and the rotational speed of the motor 66 , and a nozzle type storage unit 94 that stores the type of the spray nozzle.

The motor rotation speed storage unit 92 stores the rotation speed of the motor 66 required to inject liquid from the injection nozzle at a predetermined pressure for each diameter or area of the injection nozzle. That is, the relationship between the pressure of the liquid and the rotational speed of the motor 66 as shown in FIG. 5 is stored in the motor rotational speed storage unit 92 . The data stored in the motor rotational speed storage unit 92 is acquired, for example, by performing an experiment in advance of injecting liquid from a plurality of injection nozzles having different diameters or areas of injection ports, and recording the pressure of the liquid and the rotational speed of the motor 66 at that time.

The nozzle type storage unit 94 stores the diameters or areas of the injection ports of the plurality of injection nozzles and the types of injection nozzles having the diameters or areas. As the type of the spray nozzle, for example, the name of the spray nozzle, an identification symbol, a classification symbol, and the like can be used. In addition, in FIG. 1 , the motor rotation speed storage unit 92 and the nozzle type storage unit 94 are independently provided, but the motor rotation speed storage unit 92 and the nozzle type storage unit 94 may be constituted by a single storage unit.

In addition, the nozzle determination unit 90 has a determination unit 96 that refers to the information stored in the motor rotational speed storage unit 92 and the nozzle type storage unit 94, and evaluates the diameter of the injection port 50a of the injection nozzle 50 attached to the water jet unit 24. Or the area and the type of the spray nozzle 50 are judged.

The rotation speed (input rotation speed) of the motor 66 when the liquid is injected from the injection nozzle 50 attached to the water jet unit 24 at a predetermined pressure (specified pressure) is input to the determination unit 96 . The input rotational speed is input to the determination unit 96 from the pressurization control unit 84 , for example. In addition, the input rotation speed is the same as the rotation speed (command frequency) of the electric motor 66 specified by the signal input from the pressurization control unit 84 to the inverter 68 .

In addition, whether or not the liquid is ejected from the ejection nozzle 50 at a predetermined pressure (specified pressure) can be confirmed by measuring, for example, the pressure of the liquid pressurized by the pump 62 using a pressure gauge. This pressure measuring device is provided, for example, on the flow path of the liquid from the pump 62 to the injection port 50 a of the injection nozzle 50 . Further, the determination unit 96 determines the diameter or area of the injection nozzle 50 based on the input rotational speed, referring to the information stored in the motor rotational speed storage unit 92 .

For example, consider that the relationship between the pressure and the rotational speed of the motor shown in FIG. 5 is stored in the motor rotational speed storage unit 92 . When discriminating the type of the spray nozzle 50 attached to the water jet unit 24, the determination unit 96 refers to the information stored in the motor rotational speed storage unit 92 and determines the spray nozzle 50 according to the input rotational speed input from the pressurization control unit 84. Which one of the two types of injection nozzles shown in FIG. 5 is it?

Specifically, for the two types of injection nozzles shown in FIG. 5 , the rotation speed (reference rotation speed) of the motor required to inject the liquid supplied at a constant flow rate from the liquid supply source 72 at a predetermined pressure is referred to. And, it is judged whether the two kinds of reference rotation speeds are consistent with the input rotation speed (or whether the difference between the two reference rotation speeds and the input rotation speed is below a certain value), so as to determine that the spray nozzle 50 installed in the water jet unit 24 is two kinds of spray nozzles. Which of the spray nozzles. Thus, the diameter of the injection port 50a of the injection nozzle 50 is determined by the determination unit 96 (first determination step).

In addition, the rotation speed of the motor 66 detected by the encoder 70 connected to the motor 66 is input to the determination unit 96 . The determination unit 96 may determine the diameter or area of the injection port 50 a using the rotation speed of the motor 66 detected by the encoder 70 instead of the rotation speed of the motor 66 output from the pressurization control unit 84 . In this case, the diameter or area of the injection port 50 a is determined based on the actual rotation speed of the motor 66 , and input of the rotation speed of the motor 66 from the pressurization control unit 84 to the determination unit 96 can be omitted.

Next, the determination unit 96 determines the type of the injection nozzle 50 based on the diameter or area of the injection port 50a determined in the first determination step, referring to the information stored in the nozzle type storage unit 94 (second determination step). For example, in the nozzle type storage unit 94 , the diameters or areas of the injection ports of the plurality of injection nozzles are stored in association with the identification marks of these injection nozzles. In this case, the determination unit 96 compares the diameter or area of the injection port 50a determined in the first determination step with the diameters or areas of the injection ports of the plurality of injection nozzles stored in the nozzle type storage unit 94 .

Then, the judging unit 96 specifies the jetting nozzle (or the ratio of the diameter or the area) whose diameter or area coincides with the diameter or the area of the jetting port 50a judged in the first judging step among the plurality of jetting nozzles stored in the nozzle type storage unit 94. The jetting nozzle whose difference is a certain value or less), and the type (identification mark) of the jetting nozzle is identified. Thereby, the type of the spray nozzle 50 attached to the water jet unit 24 is determined.

The type of the injection nozzle 50 determined by the determination unit 96 is output from the determination unit 96 to the notification unit 98 , and the notification unit 98 notifies the operator. The notification unit 98 is constituted by, for example, a monitor provided in the water jet processing apparatus 2 .

FIG. 6 is a perspective view showing the appearance of the water jet processing device 2 . As shown in FIG. 6 , some components of the water jet processing apparatus 2 are covered by a cover 110 , and a touch panel monitor 112 as a user interface is provided on the side surface of the cover 110 . The operation of the monitor 112 is controlled by the control unit 80 (see FIG. 1 ).

The type of the injection nozzle 50 determined by the determination unit 96 is displayed on the monitor 112 . Thereby, the operator can confirm the type of the spray nozzle 50 attached to the water jet unit 24 .

In addition, above, the case where the type of the injection nozzle 50 is displayed on the notification unit 98 has been described, but the diameter or area of the injection port 50 a of the injection nozzle 50 may be displayed on the notification unit 98 . In this case, the determination unit 96 outputs information on the diameter or area of the injection port 50a to the notification unit 98 after performing the first determination step, and the notification unit 98 displays the diameter or area of the injection port 50a. In this way, when the notification unit 98 displays the diameter or area of the injection port 50a, the nozzle type storage unit 94 and the second determination step can be omitted.

In addition, a device other than the monitor 112 may be used as the notification unit 98 . For example, the display lamp 114 provided on the upper surface side of the cover 110 can notify the type of the spray nozzle 50 . In this case, the type of the spray nozzle 50 is indicated by the lighting color or lighting pattern of the display lamp 114 . In addition, the operation of the display lamp 114 is controlled by the control unit 80 (see FIG. 1 ).

As described above, the water jet processing device 2 of the present embodiment has the nozzle determination unit 90 that determines the number of nozzles installed in the water jet unit 24 based on the rotation speed of the motor 66 connected to the pump 62 that pressurizes the liquid. Spray nozzle 50 . Thereby, it is possible to confirm whether or not an appropriate spray nozzle 50 is attached to the water jet unit 24 , and it is possible to prevent processing defects caused by processing the workpiece 11 with a wrong spray nozzle 50 .

The above-mentioned water jet unit 24 provided in the water jet processing device 2 can process the workpiece 11 alone, or can process the workpiece 11 together with the cutting unit 22 . Hereinafter, an example in which the workpiece 11 shown in FIG. 2(B) is processed using both the cutting unit 22 and the water jet unit 24 will be described.

FIG. 7 is a partially cutaway front view showing the state of machining by the cutting unit 22 . The upper surface of the chuck table 18 constitutes a holding surface 18a for sucking and holding the workpiece 11, and the holding surface 18a is connected to a suction source (not shown) via a suction path (not shown) or the like provided inside the chuck table 18. icon) connection.

A cutting unit 22 for cutting the workpiece 11 is arranged above the chuck table 18 . The cutting unit 22 has a main shaft 120 having an axis in a direction substantially parallel to the holding surface 18 a , and a ring-shaped cutting tool 122 is attached to the front end of the main shaft 120 . In addition, the main shaft 120 is connected to a rotational drive source (not shown) such as a motor, and the cutting tool 122 attached to the main shaft 120 is rotated by force transmitted from the rotational drive source.

When processing the workpiece 11 , first, the workpiece 11 is placed on the holding surface 18 a of the chuck table 18 with the adhesive tape 17 interposed therebetween, and the ring frame 19 is fixed by the jig 20 . In this state, negative pressure from the suction source is applied to the holding surface 18 a, whereby the workpiece 11 is sucked and held by the chuck table 18 through the adhesive tape 17 .

Next, the main shaft 120 is rotated, and the cutting blade 122 is cut into the front surface 15 a side of the resin layer 15 . Then, the chuck table 18 is moved in a direction (machining feed direction) substantially parallel to the holding surface 18a and substantially perpendicular to the axis of the main shaft 120, so that the workpiece 11 and the cutting tool 122 are moved along the spaced path 23 (Refer to FIG. 2(B)) Relatively move. As a result, linear cutting grooves 11 a are formed on the workpiece 11 along the streets 23 .

Further, on the front surface 15a side of the resin layer 15, a recess 15b is formed along the street 23, and metal connected to a device chip (not shown) covered by the resin layer 15 is exposed inside the recess 15b. In addition, the cutting blade 122 is positioned such that its lower end is disposed below the bottom of the recessed portion 15 b and above the rear surface 13 b of the substrate 13 . Therefore, the depth of the cutting groove 11 a is larger than the depth of the recessed portion 15 b and smaller than the thickness of the workpiece 11 , and the workpiece 11 is not completely cut.

When the workpiece 11 is cut along the spacer 23 in this way, the metal exposed inside the concave portion 15b contacts the cutting tool 122 and is elongated, and the surface (cutting surface) generated by cutting the workpiece 11 may be cut. ) produces whisker-like flashes formed of metal. If the burrs remain inside the concave portion 15b, it will become an obstacle when the metal exposed inside the concave portion 15b is connected to other metals (connecting terminals of the mounting board, etc.) in a subsequent process, so it is preferable to remove the burrs. . Therefore, after the workpiece 11 is cut by the cutting tool 122 , the burrs remaining inside the cutting groove 11 a are removed by the water jet unit 24 .

FIG. 8 is a partially cutaway front view showing the state of processing by the water jet unit 24 . After the cutting groove 11a is formed in the workpiece 11, as shown in FIG. 8, the injection nozzle 50 included in the water jet unit 24 is positioned so that the injection port 50a is arranged on the cutting groove 11a. Then, the pressurized liquid is supplied to the water jet unit 24 from the pump unit 60 (see FIG. 1 ), and the liquid 52 is injected from the injection port 50a toward the cutting groove 11a at a predetermined pressure.

As a result, the burrs remaining inside the concave portion 15b are blown away by the liquid 52 and removed. In addition, the removal of burrs by the water jet unit 24 is performed without completely cutting the workpiece 11 . Therefore, it is possible to prevent individual pieces of the workpiece 11 from coming off the adhesive tape 17 due to the injection of the pressurized liquid 52 .

The movement of the water jet unit 24 is controlled independently of the cutting unit 22 by a movement unit 28b (see FIG. 1 ). Therefore, the position where the pressurized liquid 52 is sprayed can be freely set. For example, after one cutting groove 11c is formed by the cutting tool 122, the water jet unit 24 is relatively moved along the cutting groove 11c, and the liquid 52 is sprayed on the cutting groove 11c to remove burrs.

However, the timing at which flash removal is performed is not limited to the above-mentioned timing. For example, after the cutting grooves 11a are formed along all the partitions 23, the burrs may be removed together. In addition, while cutting one cutting groove 11c with the cutting unit 22, the water jet unit 24 may be relatively moved along the other already formed cutting groove 11c to remove burrs. In this case, cutting of the workpiece 11 and removal of burrs can be performed simultaneously.

After the flash is removed by the water jet unit 24 , the workpiece 11 is further cut by the cutting unit 22 along the spacer 23 . At this time, the cutting blade 122 is positioned so that its lower end is located below the back surface 13 b of the substrate 13 . As a result, the workpiece 11 is divided along the partition lanes 23 . This cutting is performed along all the lanes 23 to divide the workpiece 11 into a plurality of packaged devices.

In addition, when removing burrs by the water jet unit 24 , an appropriate spray nozzle 50 is selected and attached to the water jet unit 24 according to the material and thickness of the workpiece 11 , the shape and depth of the cutting groove 11 c , and the like. At this time, it is possible to appropriately remove burrs by checking whether or not an appropriate spray nozzle 50 is attached by the nozzle judging unit 90 shown in FIG. 1 .

In addition, the structure, method, etc. of the above-mentioned embodiment can be suitably changed and implemented as long as it does not deviate from the scope of the objective of this invention.

Claims (3)

1. A water jet machining apparatus, wherein,

the water jet machining device comprises:

a spray unit to which a spray nozzle for spraying pressurized liquid to a workpiece held on a chuck table for holding the workpiece is detachably attached;

a moving unit relatively moving the chuck table and the spray nozzle; and

a nozzle determination unit which determines the diameter or area of the injection nozzle,

the injection unit has a pump that pressurizes the liquid according to the rotation speed of the motor,

the nozzle determination unit includes:

a motor rotation speed storage unit that stores a rotation speed of the motor required to eject the liquid from the ejection opening of the ejection nozzle at a predetermined pressure in accordance with a diameter or an area of the ejection opening of the ejection nozzle;

a nozzle type storage unit for storing the type of the injection nozzle according to the diameter or area of the injection port of the injection nozzle;

a determination unit that determines the diameter or area of the ejection opening of the ejection nozzle that has ejected the liquid based on the rotation speed of the motor when the liquid has been ejected from the ejection nozzle at a predetermined pressure with reference to the information stored in the motor rotation speed storage unit, and then further determines the type of the nozzle based on the diameter or area of the ejection opening of the ejection nozzle that has been determined based on the rotation speed of the motor with reference to the information stored in the nozzle type storage unit; and

and a notification unit configured to notify the type of the nozzle determined by the determination unit.

2. The water jet machining apparatus according to claim 1,

the water jet machining apparatus further includes a cutting unit that cuts the workpiece held on the chuck table with a cutting tool.

3. The water jet machining apparatus according to claim 1 or 2,

the pump is a plunger pump and the pump is,

the rotation speed of the motor when the liquid is ejected from the ejection nozzle at a predetermined pressure is a rotation speed of the motor specified by a signal input to an inverter connected to the motor or a rotation speed of the motor detected by an encoder connected to the motor.

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