CN110530903A - A kind of arch (bridge) type motion platform for x-ray detection device - Google Patents
A kind of arch (bridge) type motion platform for x-ray detection device Download PDFInfo
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Abstract
The invention discloses a kind of arch (bridge) type motion platforms for x-ray detection device, including platform frame, three axis straight-line motion mechanisms and Liang Zhou rotary motion mechanism；Platform frame includes arch bridge type frame, horizontal shore and vertical support frame；There are two horizontal shore settings, and horizontal shore upper wall is fixed with arch bridge type frame both ends respectively；It is provided with vertical support frame between horizontal shore two sidewalls and its side wall is fixed with vertical support frame both ends；Three axis straight-line motion mechanisms are fixed on the inside of vertical support frame；Liang Zhou rotary motion mechanism is fixed on the downside of arch bridge type frame frame top.The setting that the present invention passes through arch bridge type frame, arch bridge type frame is opposite with square frame in the prior art, the distribution of its internal stress is more uniform, so that frame mode vibration shape amplitude is smaller, to increase the resonance frequency of frame, influence of the ambient vibration to motion platform is reduced, three axis straight-line motion mechanisms and two axis swing mechanisms is made to keep stablizing.
Description
Technical field
The present invention relates to motion platform field, specially a kind of arch (bridge) type motion platform for x-ray detection device.
Background technique
X-ray detection device is mainly directed towards the detection of integrated antenna package reliability, checks that circuit and its encapsulation are scarce to check
The reason of sunken presence is to determine defect has important application in semiconductor packages detection field.The hair of integrated circuit technique
Exhibition proposes following requirement: 1) motion platform high stability to for x-ray detection device, to improve details resolving power.
The resonance frequency and ambient vibration isolation for improving x-ray detection device motion platform, inhibit ambient vibration excitation, penetrate to reduce
Vibration at spool, work top and detector face；2) multiaxial motion allows detector to carry out opposite turn in several planes
It is dynamic, realize the dip sweeping detection function of object；Testee can be around three axial-movements, to change magnifying power, and object
Body is maintained in the visual field of detector；3) center amplification ratio is constant, and when carrying out dip sweeping detection to sample, X-ray is generated
Point light source be constantly on the centre of sphere of detector spheric motion；4) central region is constant, during vertical lift, sample view
The Yezhong heart is constant, it is desirable that the X-axis and Y-axis of motion platform are vertical with Z axis；5) X-ray tube needs periodic maintenance, motion platform structure
It should be easy to the maintenance of X-ray tube.
2005, U.S. NordsonDage disclosed a kind of X-ray executor (US7497617B2), technical characteristic:
Objective table can moved along X, Y and Z-direction, and detector is moved along upswept frame, and arch both ends are pivotally installed by bearing,
And it is equipped with counterweight.Defect existing for the technology is as follows: the stability dependency counterweight size of upswept frame, stability are poor.
2019, No.38 Inst., China Electronic Sci. & Tech. Group Co. proposed a kind of based on 5-axis movement platform
X-ray detection device (application number: 201910592325.6), it is characterised in that: two axis turn-around machines are equipped with above square frame frame
Structure and middle lower section are equipped with three axis straight-line motion mechanisms.Defect existing for the technology is as follows: the resonance frequency of 5-axis movement platform compared with
It is low, poor anti jamming capability, vulnerable to external environment vibrational excitation；Cantilever design causes the error of perpendicularity of X, Y-axis and Z axis larger,
Central region in sample lifting process is caused to change.
Summary of the invention
Technical problem to be solved by the present invention lies in provide the X-ray that is used for that a kind of stability is good, resonance frequency is high to examine
Survey the arch (bridge) type motion platform of device.
The present invention is realized by following technological means solves above-mentioned technical problem:
A kind of arch (bridge) type motion platform for x-ray detection device, including platform frame, three axis linear motion machine
Structure and Liang Zhou rotary motion mechanism；The platform frame includes arch bridge type frame, horizontal shore and vertical support frame；Institute
It states there are two horizontal shore settings, the horizontal shore upper wall is fixed with the arch bridge type frame both ends respectively；The water
It is provided with vertical support frame between flat support frame two sidewalls and its side wall is fixed with the vertical support frame both ends, the vertical branch
Support is the frame structure of " inverted trapezoidal "；X-ray source assembly is fixed on the vertical support frame top middle portion；
The three axis straight-line motion mechanism is fixed on the inside of the vertical support frame；Liang Zhou rotary motion mechanism
It is fixed on the downside of arch bridge type frame frame top；Detector is fixed on two axis rotary motion actuator bases；The present invention passes through
The setting of arch bridge type frame, for arch bridge type frame relatively with square frame in the prior art, internal stress distribution is more uniform, makes
It is smaller to obtain frame mode vibration shape amplitude, to increase the resonance frequency of frame, reduces ambient vibration to the shadow of motion platform
It rings, three axis straight-line motion mechanisms and two axis swing mechanisms is made to keep stablizing, guarantee that X-ray tube, work top and detector are kept
Stablize, to improve the details recognition capability of X-ray.
It preferably, further include balance weight mechanism and vibration isolator, the balance weight mechanism includes leveling balance weight assembly and gravity compensation
Balance weight assembly；The leveling balance weight assembly and gravity compensation balance weight assembly are provided with two groups, level balance weight assembly described in two groups
It is symmetricly set on the front side wall of arch bridge type frame framework both ends；Gravity compensation balance weight assembly described in two groups is symmetricly set on institute
It states on the front and rear wall of arch bridge type frame framework both ends；
The vibration isolator is air supporting vibration isolation or rubber vibration isolation, and the vibration isolator is fixed at two vertical support frames
Frame body rear and front end bottom；By the effect of vibration isolator, it can effectively reduce the mode vibration shape width of arch bridge type frame, reduce
Influence of the ambient vibration to motion platform.
Preferably, the leveling balance weight assembly includes first pulley, the first traction rope, first connecting rod and the first counterweight
Block；The first pulley is symmetrically fixed on the front side wall of arch bridge type frame framework both ends, and first traction rope, which passes through, to be slided
Wheel one end is connected on first connecting rod, and the other end is connected on the first clump weight, the first connecting rod other end connection three
Axis straight-line motion mechanism front end；
The gravity compensation balance weight assembly includes second pulley, the second traction rope, the second connecting rod and the second clump weight；Institute
It states second pulley to be symmetrically fixed on the rear wall of arch bridge type frame framework both ends, second traction rope passes through pulley one end
It is connected in the second connecting rod, the other end is connected on the second clump weight, and the second connecting rod other end connects three axis straight lines
Movement mechanism rear end；
The weight of first clump weight and the second clump weight differs；
The simple double quality blocks symmetrical structure of structure is formed by pulley, traction rope, clump weight and connecting rod, compensates three axis
Straight-line motion mechanism realizes the characteristic that sample central region is constant during vertical lift because of the error of perpendicularity caused by cantilever；
It is designed simultaneously in motor driven direction using double quality blocks symmetrical structure, compensates the gravity of three axis straight-line motion mechanisms, from
And motion homogeneous is steady during driving lifting, and motion platform is made to obtain higher kinematic accuracy.
Preferably, the three axis straight-line motion mechanism includes Z axis moving parts, X-axis moving parts and Y-axis moving parts；
The Z axis moving parts are fixed on the inside of the vertical support frame, and the X-axis moving parts are fixed at the Z axis
Moving parts upper end, the Y-axis moving parts are fixed at X-axis moving parts upper end；
Three axis straight-line motion mechanisms of the invention are integrally in " Γ " type, and the installation of x-ray source assembly is unobstructed, for ease of maintenaince.
Preferably, the Z axis moving parts include the first motor, Z axis slide rail, nut and slide holder；Described
One motor is mounted in the middle part of the vertical support frame lower end by motor mounting plate, and the lead screw of the first motor passes through nut
It is fixed in the middle part of the slide holder；
First motor is symmetrically mounted on " trapezoidal " stringcourse of the vertical support frame；The slide holder two
The sliding shoe of side is slidably matched in its longitudinal direction with the Z axis slide rail；The top of the slide holder and the X-axis are transported
Dynamic component lower end is fixed.
Preferably, the X-axis moving parts include the first braced frame, X-axis slide rail and the second motor；Described first
Support frame frame is rectangular frame structure, the top of framework the bottom left and right sides and the slide holder of first braced frame
Two sides are fixed；The upper surface of the first braced frame X-direction framework is arranged in the X-axis slide rail；Second motor
It is mounted on the side of the first braced frame Y direction framework；The lead screw of second motor passes through internal screw thread block and institute
It states Y-axis moving parts lower end to fix, and guarantees that length direction sliding of the Y-axis moving parts with the X-axis slide rail at it is matched
It closes.
Preferably, the Y-axis moving parts include the second braced frame, Y-axis sliding rail, third motor and movable plate；Institute
Stating the second braced frame is rectangular frame structure, and second braced frame bottom and the lead screw of third motor pass through internal screw thread
Block is fixed；The upper surface of the second braced frame Y direction framework is arranged in the Y-axis sliding rail；The third motor peace
Mounted in the side of the second braced frame X-direction framework；The lead screw of the movable plate and the third motor passes through interior
Threaded block is fixed, and guarantees that the movable plate is slidably matched in its longitudinal direction with the Y-axis sliding rail.
Preferably, Liang Zhou rotary motion mechanism includes horizontal rotation device and device in arch movement；Described horizontal time
Rotary device is fixed on the downside of arch bridge type frame frame top；The device in arch movement is fixed at the horizontal rotation device
Downside；The axis of x-ray source assembly is overlapped with the vertical axis of Liang Zhou rotary motion mechanism；What the x-ray source assembly generated
Point light source is overlapped with the horizontal axis of Liang Zhou rotary motion mechanism；
The axis of x-ray source assembly is overlapped with the vertical axis of Liang Zhou rotary motion mechanism, the point light source of generation and two axis
The horizontal axis of rotary motion mechanism is overlapped, to keep center amplification ratio constant；Therefore the present invention takes into account high stability, easy-maintaining
Property, the multifrequency natures such as 5-axis movement, central region is constant, center amplification ratio is constant.
Preferably, the horizontal rotation device includes upper mounting plate, lower supporting plate, circular sliding slopes plate, turning motor, revolution
Support frame and swiveling gear；The arch bridge type frame frame is opened equipped with mounting groove, and the upper mounting plate is fixedly mounted in slot；It is described
Revolving support frame is bearing, is provided with internal tooth, the axis of the revolving support frame on the inside of the bearing inner ring of the revolving support frame
It holds and is fixed on the upper mounting plate bottom at the top of inner ring；
The lower supporting plate is fixed on the outer race bottom of the revolving support frame, is located at turn around on the lower supporting plate
Position on the inside of the bearing inner ring of support frame is provided with multiple equally distributed through-holes；The turning motor installs the lower support
The output shaft in board bottom portion, the turning motor is fixed through through-hole and with the shaft core position of the swiveling gear；The rotary teeth
Wheel is connect with the interior tooth engagement on the bearing inner ring of the revolving support frame；Circular sliding slopes plate top and the lower supporting plate
Bottom surface in the middle part of it is fixed, circular sliding slopes plate lower end is arc structure；The device in arch movement is fixed on the circular arc and connects
On fishplate bar；
By the setting of horizontal rotation device, horizontal rotation device is mounted on arch bridge type frame frame top, so that horizontal
Slewing equipment keeps stablizing, while the rotation of device in arch movement is driven using the rotation of horizontal rotation device, and then drives and visit
Device is surveyed to be moved along the circumferencial direction of horizontal rotation device, it can be achieved that object to be imaged does circumferential scanning inspection in the horizontal plane
It surveys.
Preferably, the device in arch movement includes arc guide rail, arc guide rail sliding block, detector mounting plate, movement electricity
Machine and movement gear；It is fixed at the top of the circular arc of the arc guide rail with the circular sliding slopes plate arc end, the arc guide rail
Inner arc is provided with internal tooth on face；The arc guide rail sliding block is arranged on the arc guide rail and exists with the arc guide rail
It is slidably matched on its arc length direction；
The detector mounting plate is " L " type connecting board structure, and the vertical plate upper end of the detector mounting plate is fixed on
On the arc guide rail sliding block；The motion motor is mounted on the transverse slat of the detector mounting plate；The movement gear is solid
It is scheduled on the output shaft of the motion motor, the movement gear is connect with the interior tooth engagement of the arc guide rail；Detector peace
Mounted in detector mounting plate bottom；
By the setting of device in arch movement, will be fixed at the top of the circular arc of arc guide rail with circular sliding slopes plate, so that circular arc
Telecontrol equipment keeps stablizing, while driving detector mounting plate, detector to slide along arc guide rail using motion motor, can be real
2.5 dimension wide-angle tilt Scanning Detctions of existing object to be imaged.
The present invention has the advantages that
1, the present invention is by the setting of arch bridge type frame, and arch bridge type frame is opposite with square frame in the prior art,
Internal stress distribution is more uniform, so that frame mode vibration shape amplitude is smaller, to increase the resonance frequency of frame, reduces ring
Border vibrates the influence to motion platform, and three axis straight-line motion mechanisms and two axis swing mechanisms is made to keep stablizing, guarantee X-ray tube,
Work top and detector keep stablizing, to improve the details recognition capability of X-ray.
2, the present invention forms the simple double quality blocks symmetrical structure of structure by pulley, traction rope, clump weight and connecting rod,
Three axis straight-line motion mechanisms are compensated because of the error of perpendicularity caused by cantilever, sample central region is constant during realizing vertical lift
Characteristic；It is designed simultaneously in motor driven direction using double quality blocks symmetrical structure, compensates the gravity of three axis straight-line motion mechanisms
Effect makes motion platform obtain higher kinematic accuracy so that motion homogeneous is steady during driving lifting.
3, three axis straight-line motion mechanisms of the invention are integrally in " Γ " type, and the installation of x-ray source assembly is unobstructed, are easy to tie up
It repairs.
4, the axis of x-ray source assembly of the invention is overlapped with the vertical axis of Liang Zhou rotary motion mechanism, the point of generation
Light source is overlapped with the horizontal axis of Liang Zhou rotary motion mechanism, to keep center amplification ratio constant；Therefore the present invention takes into account high steady
The multifrequency natures such as qualitative, reliability, maintainability, safety and human factors, 5-axis movement, central region are constant, center amplification ratio is constant.
Detailed description of the invention
Fig. 1 is a kind of structural representation of arch (bridge) type motion platform for x-ray detection device of the embodiment of the present invention one
Figure；
Fig. 2 is the structural schematic diagram of the platform frame of the embodiment of the present invention one；
Fig. 3 is the X-ray assembly of the embodiment of the present invention one and the structural schematic diagram of detector installation；
Fig. 4 is the structural schematic diagram of three axis straight-line motion mechanisms of the embodiment of the present invention one；
Fig. 5 is the slide holder of the embodiment of the present invention one and the structural schematic diagram of the first braced frame；
Fig. 6 is the structural schematic diagram of the Liang Zhou rotary motion mechanism of the embodiment of the present invention one；
Fig. 7 is the horizontal rotation device of the embodiment of the present invention one and the structural schematic diagram of device in arch movement；
Fig. 8 is facing for the arch (bridge) type motion platform for x-ray detection device of the embodiment of the present invention two, embodiment three
Structural schematic diagram；
Fig. 9 is the positive structure diagram of the leveling balance weight assembly of the embodiment of the present invention two；
Figure 10 is the positive structure diagram of the gravity compensation balance weight assembly of the embodiment of the present invention two；
Figure 11 is the flat balance weight assembly of the embodiment of the present invention two and the structural schematic diagram of gravity compensation balance weight assembly.
Drawing reference numeral explanation:
1, platform frame；11, arch bridge type frame；12, horizontal shore；13, vertical support frame；2, three axis straight lines are transported
Motivation structure；21, Z axis moving parts；211, the first motor；212, Z axis slide rail；213, nut；214, slide holder；22,X
Axis moving parts；221, the first braced frame；222, X-axis slide rail；223, the second motor；23, Y-axis moving parts；231,
Two braced frames；232, Y-axis sliding rail；233, third motor；234, movable plate；3, Liang Zhou rotary motion mechanism；31, horizontal to return
Rotary device；311, upper mounting plate；312, lower supporting plate；313, circular sliding slopes plate；314, turning motor；315, revolving support frame；
316, swiveling gear；32, device in arch movement；321, arc guide rail；322, arc guide rail sliding block；323, detector mounting plate；
324, motion motor；325, gear is moved；4, balance weight mechanism；41, balance weight assembly is leveled；411, first pulley；412, it first leads
Messenger；413, first connecting rod；414, the first clump weight；42, gravity compensation balance weight assembly；421, second pulley；422, second
Traction rope；423, the second connecting rod；424, the second clump weight；5, vibration isolator.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention,
Technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is the present invention one
Divide embodiment, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making
Every other embodiment obtained, shall fall within the protection scope of the present invention under the premise of creative work.
Embodiment one
As shown in Figure 1 and Figure 2, present embodiment discloses a kind of arch (bridge) type motion platform for x-ray detection device, packets
Include platform frame 1, three axis straight-line motion mechanisms 2 and Liang Zhou rotary motion mechanism 3；The platform frame 1 includes arch
Bridge-type frame 11, horizontal shore 12 and vertical support frame 13；There are two the settings of horizontal shore 12, described horizontally-supported
12 upper wall of frame is fixed with 11 both ends of arch bridge type frame respectively；Vertical branch is provided between 12 two sidewalls of horizontal shore
Support 13 and its side wall is fixed with 12 both ends of vertical support frame；The vertical support frame 13 is the frame knot of " inverted trapezoidal "
Structure；
As shown in figure 3, x-ray source assembly is fixed on 13 top middle portion of vertical support frame；The three axis linear motion
Mechanism 2 is fixed at 13 inside of vertical support frame；Liang Zhou rotary motion mechanism 3 is fixed at the arch (bridge) type
On the downside of 11 frame top of frame；Detector is fixed on 23 bottom of Liang Zhou rotary motion mechanism；The present invention is set by arch bridge type frame 13
It sets, for arch bridge type frame 13 relatively with square frame in the prior art, internal stress distribution is more uniform, so that frame mode is shaken
Shape amplitude is smaller, to increase the resonance frequency of frame, reduces influence of the ambient vibration to motion platform, makes three axis straight lines
Movement mechanism 2 and two axis swing mechanisms 3 keep stablizing, and guarantee that X-ray tube, work top and detector keep stablizing, to mention
The details recognition capability of high X-ray.
As shown in Figure 4, Figure 5, the three axis straight-line motion mechanism 2 includes Z axis moving parts 21, X-axis moving parts 22 and Y
Axis moving parts 23；The Z axis moving parts 21 are fixed at 13 inside of vertical support frame, the X-axis moving parts
22 are fixed at 21 upper end of Z axis moving parts, and the Y-axis moving parts 23 are fixed at the X-axis moving parts
22 upper ends；The whole three axis straight-line motion mechanism 2 of the present embodiment is in " Γ " type, and the installation of x-ray source assembly is unobstructed, is easy to tie up
It repairs.
The Z axis moving parts 21 include the first motor 211, Z axis slide rail 212, nut 213 and slide holder 214；
First motor 211 is mounted in the middle part of 13 lower end of vertical support frame by motor mounting plate, the first motor 211
Lead screw pass through it is fixed in the middle part of nut 213 and the slide holder 214；
First motor 211 is symmetrically mounted on " trapezoidal " stringcourse of the vertical support frame 13；The sliding branch
The sliding shoe of 214 two sides of support is slidably matched in its longitudinal direction with the Z axis slide rail 212；The slide holder 214
Top is fixed with 22 lower end of X-axis moving parts.
The X-axis moving parts 22 include the first braced frame 221, X-axis slide rail 222 and the second motor 223；Described
One braced frame 221 is rectangular frame structure, the framework bottom left and right sides and the sliding branch of first braced frame 221
The top two sides of support 214 are fixed；The X-direction framework of first braced frame 221 is arranged in the X-axis slide rail 222
Upper surface；Second motor 223 is mounted on the side of the Y direction framework of first braced frame 221；Described second
The lead screw of motor 223 is fixed by internal screw thread block and 23 lower end of Y-axis moving parts, and guarantees the Y-axis moving parts
23 are slidably matched with the X-axis slide rail 222 in its length direction.
The Y-axis moving parts 23 include the second braced frame 231, Y-axis sliding rail 232, third motor 233 and movable plate
234；Second braced frame 231 is rectangular frame structure, 231 bottom of the second braced frame and third motor 233
Lead screw fixed by internal screw thread block；The Y direction framework of second braced frame 231 is arranged in the Y-axis sliding rail 232
Upper surface；The third motor 233 is mounted on the side of the X-direction framework of second braced frame 231；The activity
Plate 234 and the lead screw of the third motor 233 are fixed by internal screw thread block, and guarantee that the movable plate 234 and the Y-axis are sliding
Rail 232 is slidably matched in its longitudinal direction.
As shown in Figure 6, Figure 7, Liang Zhou rotary motion mechanism 3 includes horizontal rotation device 31 and device in arch movement
32；The horizontal rotation device 231 is fixed on the downside of the 11 frame top of arch bridge type frame；The fixation of device in arch movement 32 is set
It sets in 261 downside of horizontal rotation device；The axis of x-ray source assembly and the vertical axis weight of Liang Zhou rotary motion mechanism 3
It closes；The point light source that the x-ray source assembly generates is overlapped with the horizontal axis of Liang Zhou rotary motion mechanism 3；
The axis of x-ray source assembly is overlapped with the vertical axis of Liang Zhou rotary motion mechanism 3, the point light source of generation and two axis
The horizontal axis of rotary motion mechanism 3 is overlapped, to keep center amplification ratio constant；Therefore the present invention takes into account high stability, Yi Wei
The multifrequency natures such as repairing property, 5-axis movement, central region are constant, center amplification ratio is constant.
The horizontal rotation device 31 includes upper mounting plate 311, lower supporting plate 312, circular sliding slopes plate 313, turning motor
314, revolving support frame 315 and swiveling gear 316；11 frame of arch bridge type frame is opened equipped with mounting groove, the upper mounting plate
311 are fixedly mounted in slot；The revolving support frame 315 is bearing, and the inside of the bearing inner ring of the revolving support frame 315 is arranged
There is internal tooth, 311 bottom of upper mounting plate is fixed at the top of the bearing inner ring of the revolving support frame 315；
The lower supporting plate 312 is fixed on the outer race bottom of the revolving support frame 315, the lower supporting plate 312
The upper position on the inside of the bearing inner ring of revolving support frame 315 is provided with multiple equally distributed through-holes；The turning motor
314 installation 312 bottoms of lower supporting plate, the output shaft of the turning motor 314 through through-hole and with the swiveling gear 316
Shaft core position fix；The swiveling gear 316 is connect with the interior tooth engagement on the bearing inner ring of the revolving support frame 315；
Fixed in the middle part of 313 top of circular sliding slopes plate and the bottom surface of the lower supporting plate 312,312 lower end of circular sliding slopes plate is
Arc structure；The device in arch movement 32 is fixed on the circular sliding slopes plate 313；
By the setting of horizontal rotation device 31, horizontal rotation device 31 is mounted on 11 frame top of arch bridge type frame, is made
It obtains horizontal rotation device 31 to keep stablizing, while being turned using the rotation drive device in arch movement 32 of horizontal rotation device 31
It is dynamic, so drive detector to move along the circumferencial direction of horizontal rotation device 31, it can be achieved that object to be imaged in the horizontal plane
Do circumferential Scanning Detction.
The device in arch movement 32 includes arc guide rail 321, arc guide rail sliding block 322, detector mounting plate 323, fortune
Dynamic motor 324 and movement gear 325；It is solid with 313 arc end of circular sliding slopes plate at the top of the circular arc of the arc guide rail 321
It is fixed, internal tooth is provided on the inner arc face of the arc guide rail 321；The arc guide rail sliding block 322 is arranged in the circular arc
It is slidably matched on its arc length direction on guide rail 321 and with the arc guide rail 321；
The detector mounting plate 323 is " L " type connecting board structure, the vertical plate upper end of the detector mounting plate 323
It is fixed on the arc guide rail sliding block 322；The motion motor 324 is mounted on the transverse slat of the detector mounting plate 323；
The movement gear 325 is fixed on the output shaft of the motion motor 324, the movement gear 325 and the arc guide rail
321 interior tooth engagement connection；Detector is mounted on 323 bottom of detector mounting plate；
, will be fixed with circular sliding slopes plate 313 at the top of the circular arc of arc guide rail 321 by the setting of device in arch movement 32,
So that device in arch movement 321 keep stablize, while using motion motor 324 drive detector mounting plate 323, detector along
Arc guide rail 321 slides the 2.5 dimension wide-angle tilt Scanning Detctions, it can be achieved that object to be imaged.
The working principle of the present embodiment is: a kind of arch (bridge) type movement for x-ray detection device provided by the invention is flat
X-ray source assembly is mounted on 13 middle inside upper end of vertical support frame, and x-ray source assembly first in working condition by platform
The ray of transmitting runs through movable plate 234 and is located in the center of arc guide rail 321, guarantees to be imaged in progress dip sweeping
Cheng Zhong, central region minutia position and its amplification ratio do not change with angle change；Then three axis straight lines fortune is controlled
Motivation structure 2 moves, and three axis straight-line motion mechanisms 2 can make movable plate 234 in three mutually perpendicular flat in-plane movings, to change
Magnifying power, runs the first motor 211 first, and the lead screw of the first motor 211 drives slide holder 214 along Z axis slide rail
212 move up and down, and then the first braced frame 221, the second braced frame 231, movable plate 234 is driven to move along Z-direction, position
It can be moved along Z-direction in the testee on movable plate 234；Then the second motor 223 is run, the second motor 223
Lead screw drives the second braced frame 231, movable plate 234 to move along X-direction, and the testee on movable plate 234 can
It moves in the X-axis direction；And then third motor 233 is run, the lead screw of third motor 233 drives movable plate 234 along Y-axis
Direction is mobile, and the testee on movable plate 234 can move in the X-axis direction；Further, so that detector planar
Relatively rotate and circular arc rotates, realizes the dip sweeping detection function of object；Run turning motor 314, turning motor 314
Output shaft drive swiveling gear 316 along revolving support frame 315 bearing inner ring rotate, and then drive lower supporting plate 312 do
Rotary motion, lower supporting plate 312 move while device in arch movement 32 being driven to do rotary motion, are mounted on circular arc fortune to drive
Detector on dynamic device 32 does rotary motion；Motion motor 324 is finally run, the output shaft of motion motor 324 drives movement
Gear 325 carries out arcuate movement along arc guide rail 321, and arc guide rail sliding block 322 drives detector mounting plate 323 to carry out arc
Movement, and then the detector being mounted on detector mounting plate 323 does arcuate movement, and then realizes the wide-angle of object to be imaged
Dip sweeping detection.
Embodiment two
As shown in figure 8, the present embodiment is what is different from the first embodiment is that further include balance weight mechanism 4, the balance weight mechanism 4 wraps
Include leveling balance weight assembly 41 and gravity compensation balance weight assembly 42；The leveling balance weight assembly 41 and gravity compensation balance weight assembly 42 are equal
Two groups are provided with, leveling balance weight assembly 41 described in two groups is symmetricly set on the 11 framework both ends front side wall of arch bridge type frame；
Gravity compensation balance weight assembly 42 described in two groups is symmetricly set on the 11 framework both ends front and rear wall of arch bridge type frame；
As shown in Fig. 9, Figure 11, the leveling balance weight assembly 41 includes first pulley 411, the first traction rope 412, first company
Extension bar 413 and the first clump weight 414；The first pulley 411 is symmetrically fixed on front side of the 11 framework both ends of arch bridge type frame
On wall, first traction rope 412 passes through 411 one end of pulley and is connected on first connecting rod 413, and the other end is connected to first and matches
On pouring weight 414,413 other end of first connecting rod connects three axis straight-line motion mechanisms, 2 front end；
As shown in Figure 10, Figure 11, the gravity compensation balance weight assembly 42 include second pulley 421, the second traction rope 422,
Second connecting rod 423 and the second clump weight 424；The second pulley 421 is symmetrically fixed on 11 framework two of arch bridge type frame
It holds on rear wall, second traction rope 422 passes through 421 one end of pulley and is connected in the second connecting rod 423, and the other end is connected to
On second clump weight 424,423 other end of the second connecting rod connects three axis straight-line motion mechanisms, 2 rear end；
The weight of first clump weight 414 and the second clump weight 424 differs；
The simple double quality blocks symmetrical structure of structure is formed by pulley, traction rope, clump weight and connecting rod, compensates three axis
Straight-line motion mechanism 2 realizes the characteristic that sample central region is constant during vertical lift because of the error of perpendicularity caused by cantilever；
It is designed simultaneously in motor driven direction using double quality blocks symmetrical structure, compensates the gravity of three axis straight-line motion mechanisms 2, from
And motion homogeneous is steady during driving lifting, and motion platform is made to obtain higher kinematic accuracy.
Embodiment three
As shown in figure 8, the present embodiment is unlike embodiment one, embodiment two, the present embodiment is additionally provided with vibration isolator
5, the vibration isolator 5 is air supporting vibration isolation or rubber vibration isolation, and the vibration isolator 5 is fixed at two vertical support frames 13
The bottom of frame body rear and front end；By the effect of vibration isolator 5, it can effectively reduce the mode vibration shape width of arch bridge type frame 11, reduce
Influence of the ambient vibration to motion platform.
The vertical support frame 13 of the present embodiment may be arranged as two groups, and two groups of vertical support frames 13 are symmetrically fixed on two
Between horizontal shore 12, and three axis straight-line motion mechanisms, 2 two sides are fixed with two groups of vertical support frames 12 respectively, by three axis
The two sides of straight-line motion mechanism 2 are supported fixation, can further improve the stationarity of three axis straight-line motion mechanisms 2.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these modification or
Replacement, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of arch (bridge) type motion platform for x-ray detection device, it is characterised in that: including platform frame, three axis
Straight-line motion mechanism and Liang Zhou rotary motion mechanism；The platform frame includes arch bridge type frame, horizontal shore and erects
Allotment support；There are two horizontal shore settings, the horizontal shore upper wall respectively with the arch bridge type frame both ends
It is fixed；It is provided with vertical support frame between the horizontal shore two sidewalls and its side wall and the vertical support frame both ends are solid
It is fixed；
The three axis straight-line motion mechanism is fixed on the inside of the vertical support frame；Liang Zhou rotary motion mechanism is fixed
It is arranged on the downside of arch bridge type frame frame top.
2. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 1, it is characterised in that: also
Including balance weight mechanism and vibration isolator, the balance weight mechanism includes leveling balance weight assembly and gravity compensation balance weight assembly；The leveling
Balance weight assembly and gravity compensation balance weight assembly are provided with two groups, and leveling balance weight assembly described in two groups is symmetricly set on the arch bridge
On the front side wall of formula frame framework both ends；Gravity compensation balance weight assembly described in two groups is symmetricly set on the arch bridge type frame framework two
It holds on front and rear wall；
The vibration isolator is air supporting vibration isolation or rubber vibration isolation, and the vibration isolator is fixed at the frame of two vertical support frames
The bottom of body rear and front end.
3. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 2, it is characterised in that: institute
Stating leveling balance weight assembly includes first pulley, the first traction rope, first connecting rod and the first clump weight；The first pulley is symmetrical
It is fixed on the front side wall of arch bridge type frame framework both ends, first traction rope passes through pulley one end and is connected to the first connection
On bar, the other end is connected on the first clump weight, and the first connecting rod other end connects three axis straight-line motion mechanism front ends；
The gravity compensation balance weight assembly includes second pulley, the second traction rope, the second connecting rod and the second clump weight；Described
Two pulleys are symmetrically fixed on the rear wall of arch bridge type frame framework both ends, and second traction rope is connected across pulley one end
In the second connecting rod, the other end is connected on the second clump weight, and the second connecting rod other end connects three axis linear motion
Mechanism rear end.
4. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 1, it is characterised in that: institute
Stating three axis straight-line motion mechanisms includes Z axis moving parts, X-axis moving parts and Y-axis moving parts；The Z axis moving parts are solid
Fixed to be arranged on the inside of the vertical support frame, the X-axis moving parts are fixed at Z axis moving parts upper end, the Y
Axis moving parts are fixed at X-axis moving parts upper end.
5. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 4, it is characterised in that: institute
Stating Z axis moving parts includes the first motor, Z axis slide rail, nut and slide holder；First motor passes through motor
Mounting plate is mounted in the middle part of the vertical support frame lower end, and the lead screw of the first motor passes through in nut and the slide holder
Portion is fixed；
First motor is symmetrically mounted in the vertical support frame；The sliding shoe of the slide holder two sides with it is described
Z axis slide rail is slidably matched in its longitudinal direction；The top of the slide holder is fixed with X-axis moving parts lower end.
6. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 5, it is characterised in that: institute
Stating X-axis moving parts includes the first braced frame, X-axis slide rail and the second motor；First braced frame is rectangular frame
Structure, the framework bottom left and right sides of first braced frame and the top two sides of the slide holder are fixed；The X-axis
The upper surface of the first braced frame X-direction framework is arranged in sliding rail；Second motor is mounted on described first
The side of support frame frame Y direction framework；The lead screw of second motor passes through internal screw thread block and Y-axis moving parts lower end
It is fixed, and guarantee that length direction of the Y-axis moving parts with the X-axis slide rail at it is slidably matched.
7. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 6, it is characterised in that: Y-axis
Moving parts include the second braced frame, Y-axis sliding rail, third motor and movable plate；Second braced frame is rectangle frame
Frame structure, second braced frame bottom and the lead screw of third motor are fixed by internal screw thread block；The Y-axis sliding rail setting
In the upper surface of the second braced frame Y direction framework；The third motor is mounted on the second braced frame X-axis
The side of direction framework；The lead screw of the movable plate and the third motor is fixed by internal screw thread block, and guarantees the work
Movable plate is slidably matched in its longitudinal direction with the Y-axis sliding rail.
8. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 1, it is characterised in that: institute
Shu Liangzhou rotary motion mechanism includes horizontal rotation device and device in arch movement；The horizontal rotation device is fixed on the arch
On the downside of bridge-type frame frame top；The device in arch movement is fixed on the downside of the horizontal rotation device.
9. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 8, it is characterised in that: institute
Stating horizontal rotation device includes upper mounting plate, lower supporting plate, circular sliding slopes plate, turning motor, revolving support frame and swiveling gear；
The arch bridge type frame frame is opened equipped with mounting groove, and the upper mounting plate is fixedly mounted in slot；The revolving support frame is bearing,
It is provided with internal tooth on the inside of the bearing inner ring of the revolving support frame, is fixed at the top of the bearing inner ring of the revolving support frame
The upper mounting plate bottom；
The lower supporting plate is fixed on the outer race bottom of the revolving support frame, is located at revolving support on the lower supporting plate
Position on the inside of the bearing inner ring of frame is provided with multiple equally distributed through-holes；The turning motor installs the lower supporting plate bottom
The output shaft in portion, the turning motor is fixed through through-hole and with the shaft core position of the swiveling gear；The swiveling gear with
Interior tooth engagement connection on the bearing inner ring of the revolving support frame；The bottom on circular sliding slopes plate top and the lower supporting plate
Middle face is fixed, and circular sliding slopes plate lower end is arc structure；The device in arch movement is fixed on the circular sliding slopes plate
On.
10. a kind of arch (bridge) type motion platform for x-ray detection device according to claim 9, it is characterised in that: institute
Stating device in arch movement includes arc guide rail, arc guide rail sliding block, detector mounting plate, motion motor and movement gear；It is described
It fixes at the top of the circular arc of arc guide rail with the circular sliding slopes plate arc end, is provided on the inner arc face of the arc guide rail
Internal tooth；The arc guide rail sliding block is arranged on the arc guide rail and slides up with the arc guide rail in its arc length side
Dynamic cooperation；
The detector mounting plate is " L " type connecting board structure, and the vertical plate upper end of the detector mounting plate is fixed on described
On arc guide rail sliding block；The motion motor is mounted on the transverse slat of the detector mounting plate；The movement gear is fixed on
On the output shaft of the motion motor, the movement gear is connect with the interior tooth engagement of the arc guide rail.
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| CN201910826548.4A CN110530903B (en) | 2019-09-03 | 2019-09-03 | Arch bridge type moving platform for X-ray detection device |
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| CN201910826548.4A CN110530903B (en) | 2019-09-03 | 2019-09-03 | Arch bridge type moving platform for X-ray detection device |
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| CN116642912A (en) * | 2023-07-27 | 2023-08-25 | 北京机械工业自动化研究所有限公司 | Horizontal industrial non-destructive testing device and system |
| CN116642912B (en) * | 2023-07-27 | 2024-02-20 | 北京机械工业自动化研究所有限公司 | Horizontal industrial non-destructive testing equipment and systems |
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