CN110475394A - A kind of heating device applied in vacuum equipment - Google Patents
A kind of heating device applied in vacuum equipment Download PDFInfo
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- CN110475394A CN110475394A CN201910786094.2A CN201910786094A CN110475394A CN 110475394 A CN110475394 A CN 110475394A CN 201910786094 A CN201910786094 A CN 201910786094A CN 110475394 A CN110475394 A CN 110475394A
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- heating
- heat
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- radiation shield
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 167
- 239000000919 ceramic Substances 0.000 claims abstract description 163
- 230000005855 radiation Effects 0.000 claims abstract description 106
- 238000009413 insulation Methods 0.000 claims abstract description 34
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000010935 stainless steel Substances 0.000 claims abstract description 28
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 28
- 230000002401 inhibitory effect Effects 0.000 claims abstract description 5
- 238000005485 electric heating Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 229910052573 porcelain Inorganic materials 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000006641 stabilisation Effects 0.000 claims description 3
- 238000011105 stabilization Methods 0.000 claims description 3
- 230000006978 adaptation Effects 0.000 claims description 2
- 230000005619 thermoelectricity Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 6
- 238000010894 electron beam technology Methods 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 20
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- 229910052759 nickel Inorganic materials 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910001080 W alloy Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 230000003471 anti-radiation Effects 0.000 description 2
- 229910001566 austenite Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000000342 Monte Carlo simulation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
- H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
Landscapes
- Control Of Resistance Heating (AREA)
Abstract
The invention discloses a kind of heating device applied in vacuum equipment, it is related to heating sample field in vacuum equipment.The heating device includes: heating element, and the heating element is double heat source heating elements, for heating to sample to be heated；Heat insulating member, the heat insulating member, which includes three layers, the heat-insulated radiation shielding structure in top and ceramic insulation pedestal, for being thermally insulated；Support member, the support member are stainless steel base seat, are used to support heating element and heat insulating member；Thermoelectron inhibits system, and the thermoelectron inhibits system for inhibiting the thermionic evolution of sample surfaces to be heated.The present invention is suitable for applying vacuum preparation, especially in scanning electron microscope.The device is with small in size, heating efficiency is high, quick heating, heat source closing good heat-insulation effect, effective influence for controlling thermoelectron to scanning electron microscope electron beam, high temperature image clearly, the normal use for not influencing the other attachment functions of scanning electron microscope.
Description
Technical field
The present invention relates to sample field is heated in vacuum equipment, it is related specifically to desk type scanning electronic microscope, scanning electricity
One of sub- microscope is applied to the heating device in vacuum equipment.
Background technique
When material is on active service at high operating temperatures, microstructure unstability is one of the key reason for leading to military service performance failure.
This point is especially prominent for the metal material being on active service under hot conditions.It is micro- when being on active service at high operating temperatures for research material
Structure evolution mechanism, in some studied development and applications of material Monte Carlo method experimental provision under studying the quasi- condition of high temperature.Light
It learns microscope (OM), especially scanning electron microscope (SEM) is that test analysis research metal material Research of microstructure is mainly divided
Analyzer device, this pushes the In Situ Heating sampling device in scanning electron microscope to be rapidly developed, Duo Jia electron microscope factory
Family and electron microscope accessory quotient are proposed add in-place thermal station with scanning electron microscope attachment version.These add in-place thermal station because
The defects of volume is big, overweight, heating ramp rate is slow, heat insulation is poor, the radiation of the thermoelectron of sample is serious, seriously affects scanning
The normal use of electron microscope needs to research and develop the heating device that the rate of heat addition is fast, small in size, light-weight, function is complete.
Summary of the invention
In order to solve problem above, the present invention provides one kind and is applied in vacuum preparation, especially scanning electron microscope
In small-sized heating device.The device is with small in size, heating efficiency is high, quick heating, heat source closing good heat-insulation effect, effectively control
Heat that influence of the electronics to scanning electron microscope electron beam, high temperature image clearly, not influence scanning electron microscope other attached
The normal use of part function.
To achieve the goals above, heating device of the present invention provides following solution.
A kind of heating device applied in vacuum equipment, which is characterized in that the heating device includes:
Heating element, the heating element is double heat source heating elements, for heating to sample to be heated；
Heat insulating member, the heat insulating member, which includes three layers, the heat-insulated radiation shielding structure in top and ceramic insulation pedestal, is used for
It is thermally insulated；
Support member, the support member are stainless steel base seat, are used to support heating element and heat insulating member；
Thermoelectron inhibits system, and the thermoelectron inhibits system for inhibiting the thermionic evolution of sample surfaces to be heated.
Further, the heating element includes heater, thermocouple, and the heater includes heating ceramic core, heating
Porcelain bushing, the first heater strip, the second heater strip and ceramic heat insulating coating, the heating ceramic core coaxial package is in the heating
On porcelain bushing, heating ceramic core center is equipped with the through-hole for importing thermocouple, the upper end band of the heating ceramic core
There is ceramic cap, the ceramic cap, which is equipped with, is embedded in the groove that sample to be heated is heated.
Further, first heating wire and second heating wire are with reverse double-helix loop structure respectively described
The side surface uniform winding of the side surface of heating ceramic core and the heating ceramic casing, provides heat source jointly.
Further, first heating wire and the second electric heating wire material are tungsten alloy or nichrome or platinum.
Further, first heating wire and second heating wire surface are coated with heat insulating ceramic coat.
Further, the Efficiency Calculation formula of first heating wire and/or second heating wire:
Q=I2Rt
Wherein, Q is heat caused by heating wire；I is the electric current that heating wire passes through；R is the resistance of heating wire；T is institute
State the conduction time of heating wire.
Further, heating ceramic core center is equipped with the through-hole for importing thermocouple, the heating ceramic core
Upper end has ceramic cap, and the ceramic cap, which is equipped with, is embedded in the groove that sample to be heated is heated.
Further, the through-hole that the thermocouple passes through heating ceramic core center goes directly the groove of the ceramic cap,
Detect sample underlaying surface temperature to be heated.
Further, it includes the be mounted on the heating ceramic casing that described three layers, which have the heat-insulated radiation shielding structure in top,
One heat-insulated radiation shield, the second heat-insulated radiation shield being mounted on the ceramic insulation pedestal and it is mounted on stainless steel
The heat-insulated radiation shield of third on pedestal, the first heat-insulated radiation shield, the second heat-insulated radiation shield and third
Heat-insulated radiation shield is the cylindrical structure for having top.
Further, the height of the described first heat-insulated radiation shield and the first electric heating wire and/or the second electric heating wire
Highly identical, the first heat-insulated radiation shield upper end opening diameter dimension is identical as heater outer diameter；Second heat-insulated radiation shield
The height of layer is identical as the upper level of heating ceramic core, the second heat-insulated radiation shield upper end opening diameter dimension and heating
Ceramic core outer diameter is identical；The height of the heat-insulated radiation shield of third is higher than upper surface 0.5-5 millimeters of heating ceramic core, and third is heat-insulated
The diameter dimension of radiation shield upper end opening is heater outer diameter
Further, the material of the described first heat-insulated radiation shield is nickel sheet, the material of the second heat-insulated radiation shield
For the nickel sheet for being coated with gold or copper coating, the material of the heat-insulated radiation shield of third is austenite stainless steel disc.
Further, the heater diameter, the first heat-insulated radiation shield, the second heat-insulated radiation shield and
The diameter dimension ratio of three heat-insulated radiation shields is 1:1.5:3:5.
Further, the described first heat-insulated radiation shield, the second heat-insulated radiation shield and/or the heat-insulated radiation shield of third
Cover the heat transfer calculation formula of layer:
DQ=λ dAdt/dn
T is the time, and Q is the heat of dt instantaneously transmitted；A is heat-conducting area；Dt/dn is temperature gradient；λ is thermally conductive system
Number.The thermal coefficient of pure nickel is 90W/m.k.
Further, the described first heat-insulated radiation shield, the second heat-insulated radiation shield or the heat-insulated radiation shield of third
The reflectivity calculation formula of layer:
R=(n1-n2)2/(n1+n2)2
R is reflectivity, n1、n2It is the true refractive index of two media respectively.
Further, the ceramic insulation pedestal central upper portion set there are three be mutually 120 ° distribution threaded holes, it is described plus
Thermal Ceramics cover ceramic bolt fastening that effective three pieces are cased with hollow ceramic column on these three threaded holes, the ceramic insulation pedestal
Middle position be equipped with and adapt to the annular groove of the second heat-insulated radiation shield, and set from center exterior surface that there are three parallel
Semicolumn groove, place the coupled respectively with power supply line positive and negative anodes for first heater strip, the second heater strip respectively
One ceramic wire barrel and third ceramics wire barrel, and place the second pottery coupled for the thermocouple with thermocouple compensation
The bottom of porcelain wire barrel, the second thermal stabilization shield layer and the heat-insulated radiation shield of third is respectively provided with three and adapts to first respectively
The aperture of ceramic wire barrel, the second ceramic wire barrel and third ceramics wire barrel.
Further, the ceramic insulation pedestal lower central is equipped with the cylinder boss being adapted to the stainless steel base seat.
Further, first electric heating wire and the second electric heating wire pass through ceramic wire barrel and positive-negative power line respectively
Connection, the thermocouple are coupled with thermocouple compensation by ceramic wire barrel, and the ceramics wire barrel passes through the second heat screen
Cover layer and the heat-insulated radiation shield of third.
Further, the stainless steel base seat central upper portion is equipped with the circle for adapting to ceramic insulation pedestal lower part
The cylindrical groove of column boss, the ceramic insulation pedestal are mounted in the stainless steel base seat, side bolt fastening, and described
Three heat-insulated radiation shields are bolted to the stainless steel base seat outer.
Further, the stainless steel side of base is provided with dovetail groove, for the heating device is fixed on vacuum
In space.
Further, it between sample to be heated and the heat-insulated radiation shield of third, introduces 0.5-50 volt DC voltage and makees
Inhibit system for thermoelectron.
Further, the thermoelectron inhibits the DC voltage electrode of system to couple sample to be heated, and cathode couples third
Heat-insulated radiation shield.
Further, the calculation formula of thermionic work function:
Wherein, kBIt is Boltzmann constant, h is that Planck is measured, and m is the quality of electronics, and e is the charge of electronics, and T is
Temperature when cathode works, W is the height of the cathode surface potential barrier determined by Fermi-Dirac distribution function, J0It is cathode
Zero-field emission current density.
Further, the lower part of the ceramic insulation pedestal is equipped with semiconductor cooling system.
Beneficial effects of the present invention:
The technical characterstic that small-sized heating device provided by the invention has are as follows: 1. rates of heat addition are fast；2. heated current is adding
Zero magnetic field is formed on hot device；3. heater can work in general aerobic environment；4. good heat-insulation effect；5. volume minimizes；
6. operating temperature is high, temperature control is accurate, sample temperature measurement is accurate；7. inhibiting the thermionic evolution of high temp samples.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that drawings in the following description are only some embodiments of the invention, general for this field
For logical technical staff, without any creative labor, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the heating device of the embodiment of the present invention.
Fig. 2 is the semi-section view of the heating device of the embodiment of the present invention.
Fig. 3 is that the heating device removal of the embodiment of the present invention has the schematic diagram of internal structure after pushing up heat-insulated radiation sleeve.
Fig. 4 is the cross section view of heater in the heating device of the embodiment of the present invention.
Wherein, 1, stainless steel base seat；101, cylindrical groove；102, dovetail groove；2, thermal insulation ceramics pedestal；201, annular is recessed
Slot；202, cylinder boss；203, the first semicolumn groove；204, the second semicolumn groove；205, third semicolumn groove；3,
One heat-insulated radiation shield；4, the second heat-insulated radiation shield；5, the heat-insulated radiation shield of third；6, heating ceramic core；601,
Ceramic cap；602, ceramic cap groove；603, centre bore；7, heating ceramic casing；8, the first heating wire；9, the second heating wire；10,
S type thermocouple；11, hollow ceramic column；12, ceramic bolt；13, the first ceramic wire barrel；14, the second ceramic wire barrel；15,
Three ceramic wire barrels.
Specific embodiment
Here is completely described to the technology path of the invention implemented, scheme.Based on to the technology of the present invention and reality
Apply description, this field or other staff every other embodiment obtained without making creative work, all
Belong to the scope of protection of the invention.
The present invention provides a kind of heating device in vacuum equipment, including heater, thermocouple, has the heat-insulated radiation in top to cover
Cylinder, ceramic insulation pedestal, stainless steel base seat and thermoelectron inhibit system.
Heater includes heating ceramic core, heating ceramic casing, heater strip and ceramic heat insulating coating.
The upper end of heating ceramic core has ceramic cap, and center is equipped with the through-hole for importing thermocouple, and the ceramic cap is set
There is the groove of insertion sample heating；The heating ceramic casing is flanged fitting structure, outer diameter and the heating ceramic core
Ceramic cap diameter is identical；The heating ceramic core coaxial package is on the heating ceramic casing.
Heater strip includes the first heating wire and the second heating wire, and it is reversed double that material, which is tungsten alloy or nichrome or platinum,
Helical loop structure, first heating wire and second heating wire respectively heating ceramic core side surface and it is described plus
Thermal Ceramics casing side surface uniform winding, provides heat source jointly.Current direction in reverse double-helix loop heating silk exists
Be in double-spiral structure it is reverse each other, form two field pole polarity on the contrary, the zero strength that magnetic field strength offsets electromagnetism
Induced magnetic field.
The heating wire surface for being wound in heating ceramic core side surface and heating ceramic casing side surface is coated with
There is heat insulating ceramic coat, fix heater strip and prevent heater strip by dioxygen oxidation remaining in vacuum, heater can also be made to exist
It is used in air environment.
Thermocouple passes through the heating ceramic core centre bore and goes directly ceramic cap groove surfaces on the heating ceramic core.
Having the heat-insulated radiation sleeve in top includes 3 layers of heat-insulated radiation shield for having top layer, plays antiradiation, heat-insulated effect.3
Successively set structure is coaxial with the heater on the outside of the heater from inside to outside for the heat-insulated radiation shield of layer.Production first
The material of heat-insulated radiation shield is the lower nickel sheet of thermal conductivity coefficient；Make substrate used in the material of the second heat-insulated radiation shield
It is also nickel sheet, inner wall is coated with the high copper of reflectivity or the coats of metal such as gold or chromium；Make the material of the heat-insulated radiation shield of third
Material is austenite stainless steel disc.First heat-insulated radiation shield is mounted on the heating ceramic casing, the second heat-insulated radiation shield
It covers layer to be mounted on the ceramic insulation pedestal, the heat-insulated radiation shield of third is mounted in the stainless steel base seat.First every
Heat radiation screening layer height is identical as heater strip height；The height of second heat-insulated radiation shield and the upper surface of ceramic heating core
It is highly identical；The height of the heat-insulated radiation shield of third is higher than upper surface 0.5-5 millimeters of the heating ceramic core.
According to the size, heating temperature and heating efficiency of sample to be heated, according to the thermal efficiency formula of electric heating wire, vacuum
Heat radiation calculation formula, the thermal conductivity of selected materials calculate separately out heater, the first heat-insulated radiation shield, second heat-insulated
The diameter dimension ratio 1:1.5:3:5 of radiation shield and the heat-insulated radiation shield of third.
First heat-insulated radiation shield upper end opening diameter dimension is identical as heater outer diameter；Second heat-insulated radiation shield
The diameter dimension of upper end opening is identical as heating ceramic core outer diameter；The diameter dimension of the heat-insulated radiation shield upper end opening of third according to
It is determined according to secondary electron in practical application and by the path of reflective electron and angle.
Ceramic insulation pedestal central upper portion is equipped with 3 threaded holes for being mutually 120 ° of distributions, the effective three pieces of sets of heating ceramic set
There is the ceramic bolt fastening of hollow ceramics pole on these three threaded holes；Middle position is equipped with one for installing among described the
The annular groove of heat-insulated radiation shield；3 parallel semicolumn grooves, the first semicolumn groove are equipped with from center exterior surface
With the first ceramic wire barrel coupled for the heater strip with power supply line and third are placed on third semicolumn groove respectively
Ceramic wire barrel is placed with the second ceramics coupled for the thermocouple with thermocouple compensation on the second semicolumn groove and connects
Spool.The bottom of second thermal stabilization shield layer and the heat-insulated radiation shield of third is respectively provided with 3 and adapts to the first ceramic wiring respectively
The aperture of pipe, the second ceramic wire barrel and third ceramics wire barrel.Ceramic insulation pedestal lower central is equipped with and the stainless steel
The boss of pedestal adaptation.
Stainless steel base seat central upper portion is equipped with a cylindrical groove, and ceramic insulation pedestal is installed by the cylinder boss of lower part
On the cylindrical groove of the stainless steel base seat, side bolt fastening.The heat-insulated radiation shield of third is bolted to not
Rust steel base seat outer.Stainless steel side of base is provided with a dovetail groove, for heating device to be fixed in vacuum space.Heat
It is the introducing 0.5-50 volt DC voltage between the heat-insulated radiation shield of the outermost layer and sample that electronics, which inhibits system,.
It works long hours if necessary to heating device, increases semiconductor cooling system below the ceramic base.
Embodiment
The present invention provides a kind of heating device in vacuum equipment, including heater, S type thermocouple 10, has top heat-insulated
It radiates sleeve, ceramic insulation pedestal 2, stainless steel base seat and thermoelectron and inhibits system.
Heater includes heating ceramic core 6, heating ceramic casing 7, heater strip and ceramic heat insulating coating.Heating ceramic core 6
Upper end have ceramic cap 601, center is equipped with through-hole 603 for importing S type thermocouple 10, and ceramic cap 601 is equipped with insertion sample
The groove 602 of product heating；Heating ceramic casing 7 is flanged fitting structure, and the ceramic cap 601 of outer diameter and heating ceramic core 6 is straight
Diameter is identical；6 coaxial package of heating ceramic core is on heating ceramic casing 7.Heater strip includes the first heating wire 8 and the second heating wire
9, material is tungsten alloy, is reverse double-helix loop structure, the first heating wire 8 and the second heating wire 9 are respectively in heating ceramic core 6
7 side surface uniform winding of side surface and heating ceramic casing, provides heat source jointly.Heater uses two sets of reverse double-helixes
The coaxial heater strip of loop structure heats, and the screw diameter ratio of two sets of heater strips is to calculate knot according to ceramic heat transfer formula
Fruit design, greatly improves the rate of heat addition and heating efficiency；Heater strip is in reverse double-helix loop structure in ceramic core and pottery
The outer layer uniform winding of porcelain tube forms identical two magnetic field of mutual magnetic pole opposite magnetic fields intensity, cancels out each other, heated current is adding
Zero magnetic field is formed on hot device；Two sets of heater strip constructions can obtain higher heating temperature on the basis of heater miniaturization
Degree, the operating temperature of heater can reach 1200 degrees Celsius.
S type thermocouple 10 passes through 6 centre bore 603 of heating ceramic core and goes directly 602 table of ceramic cap groove on heating ceramic core 6
Face makes thermocouple 10 be close to sample lower surface, the temperature of precise measurement sample.
Be wound in 7 side surface of 6 side surface of heating ceramic core and heating ceramic casing heating wire surface be coated with it is heat-insulated
Ceramic coating fixes heater strip and prevents heater strip by dioxygen oxidation remaining in vacuum, heater can also be made in air ring
It is used in border.
Having the heat-insulated radiation sleeve in top includes 3 layers of heat-insulated radiation shield for having top layer, and successively set structure is heating from inside to outside
It is coaxial with heater on the outside of device.First heat-insulated radiation shield 3 is mounted on heating ceramic casing 7, the second heat-insulated radiation shield
Layer 4 is mounted on ceramic insulation pedestal 2, and the heat-insulated radiation shield 5 of third is mounted in stainless steel base seat 1.First heat-insulated radiation
3 height of shielded layer is identical as the heater strip height of heater；The height of second heat-insulated radiation shield 4 is upper with heating ceramic core
Apparent height is identical；The height of the heat-insulated radiation shield 5 of third is higher than 2.5 millimeters of 6 upper surface of heating ceramic core.First heat-insulated spoke
It is identical as heater outer diameter to penetrate 3 upper end opening diameter dimension of shielded layer；The diameter ruler of second heat-insulated radiation shield upper end opening
It is very little identical as 6 outer diameter of heating ceramic core；The diameter dimension of heat-insulated 5 upper end opening of radiation shield of third is heater outer diameterThe material for making the first heat-insulated radiation shield 3 is the lower nickel sheet of thermal conductivity coefficient；Make the second heat-insulated radiation shield 4
Material used in substrate be also nickel sheet, inner wall is coated with the high copper coating of reflectivity；Make the material of the heat-insulated radiation shield 5 of third
Material is anti-oxidation and heat-insulated 304 good stainless steel substrates.Three layers of different materials make thermal insulation layer, to heat transfer in a vacuum, heat
Radiation is able to carry out effective isolation, good heat-insulation effect.
2 central upper portion of ceramic insulation pedestal is equipped with 3 threaded holes for being mutually 120 ° of distributions, and heating ceramic casing 7 is with three pieces
The ceramic bolt 12 for being cased with hollow ceramic column 11 is fastened on these three threaded holes；Middle position is equipped with one for installing second
The annular groove 201 of heat-insulated radiation shield 4；3 parallel semicolumn grooves, the first semicolumn are equipped with from center exterior surface
The the first ceramic wire barrel coupled for heater strip with power supply line is placed on groove 203 and third semicolumn groove 205 respectively
13 and third ceramics wire barrel 15, it is placed on the second semicolumn groove 204 and joins for S type thermocouple 10 and thermocouple compensation
The ceramic wire barrel 14 of second connect.The bottom of second heat-insulated radiation shield 4 and the heat-insulated radiation shield 5 of third is respectively provided with 3
The aperture of the first ceramic wire barrel 13, second ceramic wire barrel 14 and third ceramics wire barrel 15 is adapted to respectively.Ceramic insulation
2 lower central of pedestal is equipped with the cylinder boss 202 being adapted to stainless steel base seat 1.
Stainless 1 central upper portion of steel base seat is equipped with a cylindrical groove 101, and ceramic insulation pedestal 2 is convex by the cylinder of lower part
Platform 202 is mounted on the cylindrical groove 101 of stainless steel base seat 1, side bolt fastening.The heat-insulated radiation shield 5 of third uses spiral shell
Bolt is fixed on stainless 1 outer of steel base seat.Stainless 1 side of steel base seat is provided with a dovetail groove 102, for fixing heating device
In in vacuum space.
It is the introducing 0.5-50 volt direct current between the heat-insulated radiation shield 5 of third and sample that thermoelectron, which inhibits system,
Pressure inhibits the thermionic evolution of sample surfaces.
Small-sized heating device provided by the invention in vacuum equipment, using two sets of reverse double-helix loop structure electric heating
Silk is wound on the outside of heating ceramic core respectively and heating ceramic outside of sleeve, provides heat source.There is the heat-insulated radiation sleeve packet in top
3 layers of heat-insulated radiation shield for having top layer are included, antiradiation, heat-insulated effect are played.Size, heating temperature according to heating sample
And heating efficiency, the thermal conductivity of formula, selected materials is calculated according to the thermal efficiency formula of electric heating wire, vacuum bolometer, respectively
It calculates heating ceramic core, heating ceramic casing, ceramic thermal barrier layer, ceramic heat insulating coating, have the diameter for pushing up heat-insulated radiation sleeve
With axial height size.Heating device provided by the invention has the special feature that: double heat source heating efficiencies are high, when being easy to control heating
Thermal inertia, volume miniaturization, in vacuum environment sample temperature is accurately controlled, while not influencing functions of the equipments just
It is often used.
Although several embodiments of the present invention are had been presented for herein, it will be appreciated by those of skill in the art that In
Without departing from the spirit of the invention, the embodiments herein can be changed.Above-described embodiment is only exemplary, no
It should be using the embodiments herein as the restriction of interest field of the present invention.
Claims (10)
1. a kind of heating device applied in vacuum equipment, which is characterized in that the heating device includes:
Heating element, the heating element is double heat source heating elements, for heating to sample to be heated；
Heat insulating member, the heat insulating member, which includes three layers, the heat-insulated radiation shielding structure in top and ceramic insulation pedestal, for carrying out
Heat-insulated processing；
Support member, the support member are stainless steel base seat, are used to support heating element and heat insulating member；
Thermoelectron inhibits system, and the thermoelectron inhibits system for inhibiting the thermionic evolution of sample surfaces to be heated.
2. heating device according to claim 1, which is characterized in that
The heating element includes heater, thermocouple, and the heater includes heating ceramic core, heating ceramic casing, first
Heater strip, the second heater strip and ceramic heat insulating coating, the heating ceramic core coaxial package is on the heating ceramic casing, institute
Heating ceramic core center is stated equipped with the through-hole for importing thermocouple, the upper end of the heating ceramic core has ceramic cap, described
Ceramic cap, which is equipped with, is embedded in the groove that sample to be heated is heated.
3. heating device according to claim 2, which is characterized in that first heating wire and second heating wire with
Reverse double-helix loop structure is uniform in the side surface of the side surface of the heating ceramic core and the heating ceramic casing respectively
Winding, provides heat source jointly.
4. heating device according to claim 2, which is characterized in that described three layers have the heat-insulated radiation shielding structure in top to include
The first heat-insulated radiation shield for being mounted on the heating ceramic casing, second be mounted on the ceramic insulation pedestal every
Thermal radiation shield and the heat-insulated radiation shield of the third being mounted in stainless steel base seat, the first heat-insulated radiation shield
Layer, the second heat-insulated radiation shield and the heat-insulated radiation shield of third are the cylindrical structure for having top.
5. heating device according to claim 4, which is characterized in that the height of the first heat-insulated radiation shield and the
One electric heating wire and/or the second electric heating wire height are identical, the first heat-insulated radiation shield upper end opening diameter dimension and heating
Device outer diameter is identical；The height of second heat-insulated radiation shield is identical as the upper level of heating ceramic core, the second heat-insulated radiation
Shielded layer upper end opening diameter dimension is identical as heating ceramic core outer diameter；The height of the heat-insulated radiation shield of third is higher than heating pottery
0.5-5 millimeters of porcelain core upper surface, the diameter dimension of the heat-insulated radiation shield upper end opening of third are heater outer diameter
6. heating device according to claim 4, which is characterized in that the heater diameter, the first heat-insulated radiation
The diameter dimension ratio of shielded layer, the second heat-insulated radiation shield and the heat-insulated radiation shield of third is 1:1.5:3:5.
7. heating device according to claim 4, which is characterized in that there are three the ceramic insulation pedestal central upper portion is set
Be mutually the threaded holes of 120 ° of distributions, the heating ceramic cover ceramic bolt fastening that effective three pieces are cased with hollow ceramic column this three
On a threaded hole, the middle position of the ceramic insulation pedestal is equipped with the annular groove for adapting to the second heat-insulated radiation shield,
And set from center exterior surface there are three parallel semicolumn groove, it is placed respectively for first heater strip, the second heating
The the first ceramic wire barrel and third ceramics wire barrel that silk couples with power supply line positive and negative anodes respectively, and place and be used for the thermoelectricity
Even the second ceramic wire barrel coupled with thermocouple compensation, the second thermal stabilization shield layer and the heat-insulated radiation shield of third
Bottom is respectively provided with three apertures for adapting to the first ceramic wire barrel, the second ceramic wire barrel and third ceramics wire barrel respectively.
8. heating device according to claim 4, which is characterized in that the ceramic insulation pedestal lower central is equipped with and institute
The cylinder boss of stainless steel base seat adaptation is stated, the stainless steel base seat central upper portion is equipped with one and adapts to the ceramic insulation bottom
The cylindrical groove of the cylinder boss of seat lower part, the ceramic insulation pedestal are mounted in the stainless steel base seat, side bolt
Fastening, the heat-insulated radiation shield of third are bolted to the stainless steel base seat outer.
9. heating device according to claim 4, which is characterized in that sample to be heated and the heat-insulated radiation shield of third it
Between, 0.5-50 volt DC voltage is introduced as thermoelectron and inhibits system, and the thermoelectron is inhibiting the DC voltage of system just
Pole couples sample to be heated, and cathode couples the heat-insulated radiation shield of third.
10. heating device according to any one of claim 1 to 9, which is characterized in that under the ceramic insulation pedestal
Portion is equipped with semiconductor cooling system.
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| CN114286461A (en) * | 2022-01-04 | 2022-04-05 | 中国科学技术大学 | A heater for substrate heating in vacuum equipment |
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