CN110449413A - A kind of laser chamber endoparticle inspection arranging device - Google Patents

Abstract

The invention relates to the field of laser technology, and discloses a device for detecting and discharging particles in a laser cavity. The device includes: an ultraviolet lamp, a suction nozzle and a vacuum cleaner; The front end of the suction nozzle is irradiated, and the rear end of the suction nozzle is connected with the vacuum cleaner. The suction nozzle is elongated. There is a first channel inside the suction nozzle. The suction port of the vacuum cleaner is connected. The invention provides a device for detecting and discharging particles in the laser cavity, which is equipped with an ultraviolet lamp to generate fluorescence in the cavity, and the micro particles in the cavity can be found by visual inspection with the naked eye; the suction nozzle can be set to go deep into the narrow space, and the micro particles on the surface of the device can be detected at close range Strong suction exclusion; by irradiating ultraviolet light on the front end of the suction nozzle, the suction nozzle can accurately reach the microparticles for precise exclusion, improving the inspection effect; thus ensuring the cleanliness of the laser cavity and ensuring the reliability of the laser.

Description

Particle detection and discharge device in laser cavity

technical field

The invention relates to the technical field of lasers, in particular to a device for detecting and discharging particles in a laser cavity.

Background technique

At present, high-power (ultra-high-power) lasers are more and more widely used in the industrial and military fields, because of their high cost, complex structure and long maintenance period, so the reliability index of high-power lasers is becoming more and more important. However, the surface of the optical device in a high-power laser carries a very high laser power density. When the surface of the optical device absorbs the microparticles in the cavity of the laser, it will cause local heat to accumulate sharply, resulting in damage to the coating on the surface of the optical device or damage to the beam. The quality deteriorates, reducing the reliability of high-power lasers.

Existing laser intracavity microparticle removal technologies mainly include: vacuum cleaner removal technology, which uses a strong wind vacuum cleaner to remove laser intracavity microparticles; high-purity gas replacement technology, which uses high-purity gas (such as nitrogen) to replace laser intracavity gas removal. Suspended microparticles; install auxiliary exclusion equipment technology, install static electricity and other devices in the laser cavity to exclude microparticles in the laser cavity.

However, for high-power (ultra-high-power) lasers, there are deficiencies in the above-mentioned intracavity microparticle exclusion technology of existing lasers: first, because high-power lasers have many intracavity devices, complex structures, narrow spaces, and adhesions on the surface of some devices However, the existing technology cannot extend to the surface of some devices for short-distance strong attraction, which makes it difficult to remove some intracavity microparticles; It is those micro-particles that are invisible to the naked eye that cannot be intuitively ensured to be completely eliminated. During the use of high-power lasers, those micro-particles in the cavity that have not been completely eliminated have a certain probability of being adsorbed on the film coated on the surface of the optical device after random movement. In the case of adsorption to the film coated on the surface of the optical device, the reliability of the laser is difficult to guarantee.

Most of the existing microparticle removal technologies in the high-power (ultra-high-power) laser cavity have the technical problem of being unable to perform close-range strong attraction on the surface of the internal device to remove microparticles, and cannot visually inspect to ensure that the microparticles in the cavity are completely removed. technical problem.

Contents of the invention

(1) Technical problems to be solved

The object of the present invention is to provide a particle detection and discharge device in the laser cavity, which is used to solve or partially solve the problem that most of the existing micro-particle removal technologies in the high-power (ultra-high-power) laser cavity cannot perform close-range inspection on the surface of the internal device. Strong suction to exclude microparticles, and technical problems that cannot be visually inspected to ensure that microparticles in the cavity are completely excluded.

(2) Technical solutions

In order to solve the above technical problems, the present invention provides a device for detecting and discharging particles in the laser cavity, which includes: an ultraviolet lamp, a suction nozzle and a vacuum cleaner; the ultraviolet lamp emits ultraviolet light for visual inspection of the particles in the cavity, and the The light of the ultraviolet lamp is irradiated on the front end of the suction nozzle, and the rear end of the suction nozzle is connected with the vacuum cleaner. The suction nozzle is elongated. There is a first channel inside the suction nozzle, and the first channel The suction nozzle runs through the suction nozzle from the front end to the rear end, and the first channel communicates with the suction port of the vacuum cleaner.

On the basis of the above scheme, the vacuum cleaner is a mixed vacuum cleaner of wind force and electrostatic force, which is used to remove particles in the fixed laser cavity. An electric exhaust fan and a high-voltage electric field are arranged inside the vacuum cleaner, and the electric exhaust fan is used to generate strong wind attraction. , the high-voltage electric field is used to generate electrostatic attraction.

On the basis of the above solution, a low-efficiency filter mesh structure is arranged inside the vacuum cleaner, and the low-efficiency filter mesh structure is used to filter and intercept attracted particles.

On the basis of the above solution, a particle detection and discharge device in the laser cavity also includes: an operating handle; one end of the operating handle is connected to the rear end of the suction nozzle, and the other end of the operating handle is connected to the The vacuum cleaner is connected, the operating handle has a second channel inside, and the first channel, the second channel and the hose are connected.

On the basis of the above solution, a support block is fixedly arranged on the outer side wall of the operating handle, an end surface of the support block away from the operating handle is an inclined plane, and a groove parallel to the inclined plane is arranged on the inclined plane , the ultraviolet lamp is placed in the groove so that the light of the ultraviolet lamp is irradiated on the front end of the suction nozzle.

On the basis of the above scheme, a protrusion is provided at the light-emitting end of the ultraviolet lamp and in the groove, and the protrusion is located at the lower edge of the light-emitting hole of the ultraviolet lamp. Lights are supported and positioned.

On the basis of the above solution, at least one fixing hole is arranged in the groove, and the fixing hole is used for installing and fixing the ultraviolet lamp.

On the basis of the above solution, the suction nozzle is magnetic; the suction nozzle is made of flexible material.

On the basis of the above scheme, the first channel and the second channel are circular, and the diameters of the first channel and the second channel are both: 0.2mm-20mm; the inner diameter of the hose It is: 0.2mm-20mm; the distance between the intersection point of the light of the ultraviolet lamp and the axis of the suction nozzle and the front end surface of the suction nozzle is: 1mm-10mm.

On the basis of the above scheme, the suction nozzle, the operating handle, the hose and the vacuum cleaner are connected in sequence and are detachably connected by threaded fasteners at the joints, and an O-ring seal is set at the interface of the threaded fasteners .

(3) Beneficial effects

The invention provides a device for detecting and discharging particles in the laser cavity, which is equipped with an ultraviolet lamp, which can generate fluorescence in the cavity, making the micro particles visible to the naked eye, and the micro particles in the cavity can be found by visual inspection with the naked eye, avoiding the blindness of the existing blind exclusion technology The suction nozzle can be set to go deep into the narrow space, and the micro particles on the surface of the device can be excluded by close-range strong attraction; the ultraviolet lamp is set at a special angle, so that the ultraviolet light can be irradiated on the front end of the suction nozzle, so that the suction nozzle can reach accurately Precisely eliminate the position of the microparticles to improve the detection effect.

The detection device makes the micro-particles in the cavity nowhere to hide, ensures the cleanliness of the high-power laser, prevents the micro-particles in the cavity from being adsorbed to the coating film on the surface of the optical device, and avoids the resulting damage to the optical device film or deterioration of the beam quality, thereby ensuring The reliability of high-power lasers saves maintenance time and economic costs.

Description of drawings

FIG. 1 is a schematic diagram of the overall structure of a particle detection and discharge device in a laser cavity according to an embodiment of the present invention;

Fig. 2 is a front view of an operating handle in a particle detection and discharge device in a laser cavity according to an embodiment of the present invention;

3 is a cross-sectional view of an operating handle in a particle detection and discharge device in a laser cavity according to an embodiment of the present invention;

4 is a schematic structural view of a suction nozzle in a particle detection and discharge device in a laser cavity according to an embodiment of the present invention;

Fig. 5 is a schematic structural diagram of a hose in a device for detecting and discharging particles in a laser cavity according to an embodiment of the present invention.

Explanation of reference signs:

1—ultraviolet lamp; 2—vacuum cleaner; 3—hose;

4—operating handle; 5—suction nozzle; 6—pedal switch;

7—Slope.

Detailed ways

The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

According to the present invention, this embodiment provides a device for detecting and discharging particles in a laser cavity. Referring to FIG. 1, the device includes: an ultraviolet lamp 1, a suction nozzle 5, and a vacuum cleaner 2; The particles in the cavity, the light of the ultraviolet lamp 1 is irradiated on the front end of the suction nozzle 5, the rear end of the suction nozzle 5 is connected with the vacuum cleaner 2, the suction nozzle 5 is elongated, and the suction nozzle 5 has a first channel inside, the first channel runs through the suction nozzle 5 from the front end to the rear end of the suction nozzle 5 , and the first channel communicates with the suction port of the vacuum cleaner 2 .

This embodiment provides a device for detecting and discharging particles in a laser cavity, which is provided with an ultraviolet lamp 1 for visually inspecting and finding microparticles in the cavity. The suction nozzle 5 is set to extend into the narrow space to reach the position of the microparticles found in the cavity, so as to realize the exclusion of close-range strong suction.

The UV lamp 1 is set at a special angle, and the UV lamp 1 and the suction nozzle 5 should meet a special position angle relationship, so that the light emitted by the UV lamp 1 irradiates the front end of the suction nozzle 5, that is, it just irradiates a certain distance directly in front of the suction nozzle 5 place.

Irradiating the ultraviolet lamp 1 into the laser cavity can generate fluorescence, so that the micro particles in the cavity can be seen by naked eyes.

The light of the ultraviolet lamp 1 is irradiated to the front end range of the suction nozzle 5, so that when the microparticles are removed by the suction nozzle 5, the microparticles are visible to the naked eye under the irradiation of ultraviolet light at the front end range of the suction nozzle 5, and can be clearly seen. The position of clearing the fine particles is convenient for the suction nozzle 5 to directly reach the position of the fine particles, improving the effect of detection and discharge.

The suction nozzle 5 is connected with the vacuum cleaner 2 through the hose 3 . The vacuum cleaner 2 generates an attraction force for the microparticles, and sucks the microparticles from the cavity into the vacuum cleaner 2 through the suction nozzle 5 and the hose 3 . A first passage is provided inside the suction nozzle 5 , the first passage runs through the suction nozzle 5 , and the first passage is arranged along a direction from the front end to the rear end of the suction nozzle 5 . The first channel is connected with the hose 3 , so that the particles at the front end of the suction nozzle 5 flow through the first channel and the hose 3 to the vacuum cleaner 2 under the suction force of the vacuum cleaner 2 .

The rear end of the suction nozzle 5 can also be connected with the vacuum cleaner 2 through any other connecting pipe, in order to realize the communication between the first channel and the suction port of the vacuum cleaner 2, which is not limited.

The suction nozzle 5 is set in an elongated shape to adapt to the environment where there are many devices in the high-power laser cavity, the structure is complex, the space is narrow, and the surface of some devices has adhesion. The slender suction nozzle 5 is convenient for extending into the cavity and between the devices to effectively remove the microparticles at a short distance.

This embodiment provides a particle detection and discharge device in the laser cavity, which is equipped with an ultraviolet lamp 1, which can generate fluorescence in the cavity, making the micro particles visible to the naked eye, and the micro particles in the cavity can be found by visual inspection with the naked eye, avoiding the existing blind exclusion technology blindness; the suction nozzle 5 can be set to go deep into the narrow space, and the micro particles on the surface of the device can be excluded by close-range strong attraction; the ultraviolet lamp 1 is set at a special angle so that the ultraviolet light is irradiated on the front end of the suction nozzle 5, which can make the The suction nozzle 5 accurately arrives at the location of the microparticles for precise removal, improving the efficiency and effect of detection and removal.

The detection device makes the micro-particles in the cavity nowhere to hide, ensures the cleanliness of the high-power laser, prevents the micro-particles in the cavity from being adsorbed to the coating film on the surface of the optical device, and avoids the resulting damage to the optical device film or deterioration of the beam quality, thereby ensuring The reliability of high-power lasers saves maintenance time and economic costs.

Further, the wavelength of ultraviolet light generated by the ultraviolet lamp 1 may be 295nm-420nm. For microparticles, it is often difficult to find them under normal light, and it is even more difficult to observe them with the naked eye. It has been verified by experiments that the laser cavity can clearly display the microparticles under the irradiation of ultraviolet light fluorescence, and realize direct visibility to the naked eye. Therefore, this embodiment sets up the ultraviolet lamp 1 based on the experimental verification, thereby avoiding the need to set up other microparticles. The complex components make the structure of the inspection and discharge device simple and easy to implement.

For the purpose of using the ultraviolet light to visually inspect the microparticles, the wavelength of the ultraviolet light is preferably 295nm-420nm.

On the basis of the above-mentioned embodiments, further, the vacuum cleaner 2 is a mixed vacuum cleaner 2 of wind force and electrostatic force, which is used to remove particles in a fixed cavity. An electric exhaust fan and a high-voltage electric field are arranged inside the vacuum cleaner 2. The electric exhaust fan It is used to generate strong wind attraction, and the high-voltage electric field is used to generate electrostatic adsorption.

On the basis of the above embodiments, further, a low-efficiency filter mesh structure is provided inside the vacuum cleaner 2, and the low-efficiency filter mesh structure is used to filter and intercept attracted particles.

In this embodiment, the installation of the vacuum cleaner 2 has been described based on the above-mentioned embodiments. The vacuum cleaner 2 is used to generate attraction to the microparticles, and remove them from the chamber for fixation. In the detection and discharge device provided in this embodiment, a vacuum cleaner 2 mixed with wind force and electrostatic force is used to generate both wind force attraction and electrostatic adsorption force for micro particles.

Wind and electrostatic force mixed vacuum cleaner 2, used to remove fine particles in the fixed laser cavity; can generate strong wind attraction and strong electrostatic adsorption mixed force, in which the strong wind attraction is generated by rotating the electric exhaust fan at high speed, and is used to eliminate the particles that have been visually inspected The microparticles found in the cavity; the microparticles in the cavity excluded by the strong wind force flow through the suction nozzle 5 and the hose 3, and then are transported to the microparticle collector of the hybrid vacuum cleaner 2.

The electrostatic adsorption force is generated by setting a high-voltage electric field in the vacuum cleaner 2, and the electrostatic adsorption force is generated on the micro-particles in the vacuum cleaner 2, which is used to firmly fix the smaller and lighter micro-particles that are excluded and transported by the strong wind attraction, preventing smaller The lighter microparticles spill into the open space and float again into the high-power laser cavity.

Further, a low-efficiency filter mesh structure is arranged inside the vacuum cleaner 2, and the low-efficiency filter mesh structure is arranged perpendicular to the wind flow direction. The heavier and larger particles are filtered and intercepted by the low-efficiency filter mesh structure. Block the heavier and larger particles at the low-efficiency filter mesh structure, which facilitates the collection and removal of these impurities.

The low-efficiency filter mesh structure is a filter mesh structure with larger mesh, which is mainly used to intercept and block the passage of larger and heavier particles. If a relatively dense filter mesh structure is set, micro particles will accumulate at the filter mesh structure, which will form resistance to wind flow, thereby increasing wind resistance and reducing the attraction to micro particles in the laser cavity.

Further, a pedal switch 6 is connected to the vacuum cleaner 2, and the pedal switch 6 is used to control the start and stop of the vacuum cleaner 2. The pedal switch 6 is provided to facilitate the operator to control the vacuum cleaner 2 .

On the basis of the above embodiments, further, with reference to FIG. 1 , a device for detecting and discharging particles in a laser cavity further includes: an operating handle 4; one end of the operating handle 4 is connected to the rear end of the suction nozzle 5, so The other end of the operating handle 4 is connected to the vacuum cleaner 2 through a hose 3 , the operating handle 4 has a second channel inside, and the first channel, the second channel and the hose 3 are in communication.

This embodiment is based on the above-mentioned embodiment, and an operating handle 4 is provided, which can be held by the staff, so that it is convenient to control the suction nozzle 5 to reach the particles. The operating handle 4 is arranged between the suction nozzle 5 and the hose 3 . Two ends of the operating handle 4 are respectively connected with the rear end of the suction nozzle 5 and one end of the hose 3 .

And there should be a second channel inside the operating handle 4 , and the second channel runs through the operating handle 4 . And the first passage, the second passage and the hose 3 are connected in sequence to form a connected passage. The operating handle 4 can be in any shape for the purpose of being convenient for the operator to hold, which is not limited.

On the basis of the above embodiment, further, with reference to Fig. 2, a support block is fixedly arranged on the outer side wall of the operating handle 4, and an end surface of the support block away from the operating handle 4 is an inclined plane 7, and the inclined plane 7 is provided with a groove parallel to the slope 7 , the ultraviolet lamp 1 is placed in the groove so that the light of the ultraviolet lamp 1 is irradiated on the front end of the suction nozzle 5 .

This embodiment further describes the structure and application of the operating handle 4 based on the above embodiments. The ultraviolet lamp 1 can be fixed by the operating handle 4 and satisfies a special angular position relationship.

The outer wall of the operating handle 4 is fixedly connected with a support block. One end surface of the support block is fixedly connected with the outer side wall of the operating handle 4 . The other end surface of the support block opposite to the end surface, that is, the end surface facing away from the operating handle 4 is an inclined surface 7 with an inclination.

A groove is provided on the end face of the support block away from the operating handle 4 . The groove is arranged along the slope 7 and has the same inclination as the slope 7 on which it is located. The ultraviolet lamp 1 is placed in the groove, and the light exit hole of the ultraviolet lamp 1 is set toward the suction nozzle 5 .

The angle of the support block slope 7 is consistent with the angle of the groove and the angle of the ultraviolet lamp 1 . The slope 7 and the angle of the groove should be designed to meet the special angular position relationship, so that the light of the ultraviolet lamp 1 should meet the above-mentioned irradiation within the front end of the suction nozzle 5 .

Specifically, the inclination of the ultraviolet lamp 1 changes according to the length of the suction nozzle 5 , so that the ultraviolet light is always irradiated within a certain range at the front end of the suction nozzle 5 .

On the basis of the above embodiment, further, with reference to FIG. 3 , a bump is provided at the light-emitting end of the ultraviolet lamp 1 and in the groove, and the bump is located at the lower edge of the light-emitting hole of the ultraviolet lamp 1 . The bumps are used to support and position the ultraviolet lamp 1 .

On the basis of the above embodiments, further, at least one fixing hole is provided in the groove, and the fixing hole is used for installing and fixing the ultraviolet lamp 1 .

Further, a protrusion higher than the bottom of the groove is provided at one end of the groove. The bump is located at the light-emitting end of the ultraviolet lamp 1 . The protrusion can be located at the lower edge of the light exit hole of the ultraviolet lamp 1 to support the light exit hole, thereby supporting and fixing the ultraviolet lamp 1 . The protrusions are set to support the ultraviolet lamp 1, which can keep the ultraviolet lamp 1 stable and make the emitted light more stable.

Further, at least one installation hole can be provided in the groove, and the ultraviolet lamp 1 can be fixed by means of screw thread or the like at the installation hole, so that the ultraviolet lamp 1 is more stable. The installation hole may be a blind hole arranged in the groove, which is not limited.

On the basis of the above embodiments, further, the suction nozzle 5 is magnetic; the suction nozzle 5 is made of flexible material.

The suction nozzle 5 is set to be magnetic, and the suction nozzle 5 can attract metal particles produced by screwing during the process of installing and adjusting the high-power laser. The suction nozzle 5 can be made of magnetic material, and can also be made magnetic through magnetization treatment, which is not limited.

The suction nozzle 5 should be flexible and can be deformed to a certain extent. Preferably, the degree of flexibility of the suction nozzle 5 is such that an adult can deform the suction nozzle 5 by exerting force with both hands, so as to adapt to different narrow space conditions.

On the basis of the above embodiments, further, the first channel and the second channel are circular, and the diameters of the first channel and the second channel are both: 0.2mm-20mm; The inner diameter of the hose 3 is: 0.2mm-20mm; the distance between the intersection point of the light of the ultraviolet lamp 1 and the axis of the suction nozzle 5 and the front end surface of the suction nozzle 5 is: 1mm-10mm.

In this embodiment, based on the above-mentioned embodiments, the size of each component in the inspection and sorting device is specifically described. The first channel and the second channel may be circular channels. And the diameter of the first channel and the second channel may be 0.2mm-20mm in diameter. The inner wall of the hose 3 is circular, and its diameter can be 0.2mm-20mm.

Referring to FIG. 4 , the suction nozzle 5 can be an elongated cylinder as a whole, and the diameter of the outer wall of the section of the suction nozzle 5 close to the operating handle 4 is larger than the diameter of the outer wall of the section of the suction nozzle 5 away from the operating handle 4 . The outer diameter of the connection part between the suction nozzle 5 and the operating handle 4 may be 5mm-22mm, while the outer diameter of the remaining part may be 0.5-22mm. And the front part of the suction nozzle 5 is smooth, which is convenient for stretching into the narrow space.

The ultraviolet lamp 1 and the suction nozzle 5 satisfy a special angular positional relationship, so that after installation, the optical axis of the ultraviolet lamp 1 intersects with the axis of the suction nozzle 5 within a distance of 1mm-10mm from the front end of the suction nozzle 5.

Further, the first channel, the second channel and the hose 3 can be coaxially connected to form a channel.

Further, the first channel can be directly connected with the hose 3 to form a channel. At this time, the suction nozzle 5 and the hose 3 can be connected to the side of the operating handle 4, that is, a channel for particle removal can be formed. At the same time, it can be set The operating handle 4 is convenient for manual operation, which is not limited.

Referring to FIG. 5 , the hose 3 is a tubular structure with connectors at both ends. One end of the hose 3 is connected with the operating handle 4 or directly with the suction nozzle 5 , and the other end of the hose 3 is connected with the vacuum cleaner 2 .

On the basis of the above-mentioned embodiments, further, the suction nozzle 5, the operating handle 4, the hose 3 and the vacuum cleaner 2 are connected in sequence and detachably connected by threaded fasteners at the joints, and the threaded fastening The interface part of the parts is provided with an O-ring seal.

The connection between the rear end of the suction nozzle 5 and the operating handle 4 , the connection between the operating handle 4 and the hose 3 and the connection between the hose 3 and the vacuum cleaner 2 can all be connected by threaded fasteners. And an O-ring is set at the interface of the threaded fastener for sealing, so as to ensure the suction effect of the wind force and prevent particles from overflowing and flying.

Example 1:

On the basis of the above embodiments, further, a particle detection and discharge device in the laser cavity includes an ultraviolet lamp 1, a wind and electrostatic hybrid vacuum cleaner 2, a dust suction hose 3, an operating handle 4, a magnetic suction nozzle 5 and a pedal switch 6.

The ultraviolet lamp 1 is used for visual inspection to find microparticles in the cavity; the ultraviolet lamp 1 is installed on the oblique groove on the operating handle 4 to meet the special position and angle relationship. The upper surface of the oblique groove is tangent to the side of the housing of the ultraviolet lamp 1 . The oblique groove leaves a bump near the light-emitting end of the ultraviolet lamp 1, and the height of the bump is lower than the lower edge of the light-emitting hole of the ultraviolet lamp 1. The height of the protrusion is 1.5mm, which is used for positioning and supporting the ultraviolet lamp 1 .

There are 4 fixing M3 screw holes in the oblique groove, the depth of the screw holes is 10mm, which are used to fix the UV lamp 1. The ultraviolet lamp 1 emits light and irradiates the front end range of the magnetic suction nozzle 5 . After installation, the optical axis of the ultraviolet lamp 1 intersects the axis of the magnetic suction nozzle 5 at a position 5 mm from the front end of the magnetic suction nozzle 5 .

Ultraviolet light is irradiated into the high-power laser cavity to generate fluorescence, making the microparticles in the cavity visible to the naked eye, so that the operator can realize the visual inspection of the microparticles in the cavity, avoiding the existing blind exclusion technology; at the same time, it ensures that the microparticles in the cavity are attracted are transmitted away during the exclusion process. The wavelength of ultraviolet light is 295nm-420nm, the radiation power is greater than 0.1mW, and the beam divergence angle is better than 100mrad.

The vacuum cleaner 2 mixed with wind force and electrostatic force is used to remove the fine particles in the fixed laser cavity. The hybrid vacuum cleaner 2 can generate a mixed force of strong wind attraction and strong electrostatic adsorption; wherein the strong wind attraction is generated by rotating the electric exhaust fan at a high speed, and the rotation speed is greater than 400 revolutions per second. The microparticles in the cavity found by visual inspection are excluded by the magnetic suction nozzle 5 . The microparticles in the chamber that are excluded by the strong wind force flow through the magnetic suction nozzle 5, the operating handle 4, and the suction hose 3, and then are transported to the microparticle collector of the hybrid vacuum cleaner 2.

In order to reduce the influence of wind resistance on the attraction of strong winds, a two-stage filter interception method is adopted inside the vacuum cleaner 2: firstly, a low-efficiency filter mesh structure is used for filter interception to intercept heavier and large particles; then, a strong electrostatic adsorption is used The lighter and smaller particles are filtered and intercepted, and firmly fixed to prevent the particles from overflowing into the open space and floating into the high-power laser cavity again; and the strong electrostatic adsorption force is generated by the built-in high-voltage electric field.

The operating handle 4 can be held by the staff, which is convenient for the staff to operate. The operating handle 4 is also used to install the ultraviolet lamp 1, the dust suction hose 3 and the magnetic suction nozzle 5 at a special position angle. There is a circular second channel inside the operating handle 4, and the diameter of the second channel is 2mm.

The magnetic suction nozzle 5 is magnetic, which can attract the metal particles produced by screwing the screws in the process of installing and adjusting the high-power laser. There is a circular first channel inside the magnetic suction nozzle 5, and the diameter of the first channel is 2mm. The outer diameter of the connecting part between the suction nozzle 5 and the operating handle 4 is 5 mm, while the outer diameter of the rest is 3 mm, and the front end part is smooth; the magnetic suction nozzle 5 can be deformed by using both hands of an adult to adapt to different narrow space conditions.

The pedal switch 6 is used to control the start and stop of the vacuum cleaner 2 mixed with wind force and electrostatic force.

The connection parts of wind and electrostatic force hybrid vacuum cleaner 2, dust suction hose 3, operating handle 4, and magnetic suction nozzle 5 are fixed with threaded fasteners, the thread specification is M5×0.75, and O-ring seals are set at the interface. The inner diameter of the O ring is φ3, the thickness is 1.8mm, and the material is silicone rubber. The first passage, the second passage and the hose 3 are coaxially connected to form a passage.

The particle detection and discharge device in the laser cavity of this embodiment is used to solve the technical problem that the existing exclusion technology cannot reach the surface of the device, which leads to the difficulty in the removal of some micro-particles in the cavity, and to solve the problem that the existing exclusion technology is a kind of blind Excluded, it is impossible to visually detect and find the micro-particles in the cavity of the laser to completely eliminate technical problems, thereby ensuring the reliability of high-power (ultra-high-power) lasers.

The detection device adopts the ultraviolet light emitted by the operating handle 4 that satisfies the special position and angle relationship to irradiate the high-power laser cavity to generate fluorescence, so that the micro-particles in the cavity are visible to the naked eye, and the micro-particles in the cavity can be found by visual inspection with the naked eye; further through The wind and electrostatic hybrid vacuum cleaner 2 combined with the specially designed magnetic suction nozzle 5 can accurately remove and fix the fine particles in the cavity that have been found by visual inspection.

The detection and discharge device can be used to visually inspect and eliminate the microparticles in the cavity of the fixed high-power laser, so that the microparticles in the cavity have nowhere to hide, ensure the cleanliness of the high-power laser cavity, and prevent the microparticles in the cavity from being adsorbed to the optical device The rapid accumulation of heat on the film will cause the film damage of the optical device of the high-power laser or the deterioration of the beam quality, so as to ensure the reliability of the high-power laser.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of the present invention. within the scope of protection.

Claims (10)

1. a kind of laser chamber endoparticle examines arranging device characterized by comprising ultraviolet lamp, suction nozzle and dust catcher；It is described ultraviolet Lamp issues ultraviolet light and finds intracavitary particle for naked eyes macroscopic examination, before the light of the ultraviolet lamp is radiated at the suction nozzle End, the rear end of the suction nozzle are connected with the dust catcher, and the suction nozzle is in elongate shape, have first passage inside the suction nozzle, The first passage runs through the suction nozzle, the sucking of the first passage and the dust catcher from the front end of the suction nozzle to rear end Mouth is connected.

2. laser chamber endoparticle according to claim 1 examines arranging device, which is characterized in that the dust catcher be wind-force with Electrostatic force mixing dust catcher, for excluding the intracavitary particle of fixed laser, setting electric exhaust fan and height inside the dust catcher Piezoelectric field, the electric exhaust fan is for generating high wind attraction, and the high voltage electric field is for generating electrostatic adsorption force.

3. laser chamber endoparticle according to claim 2 examines arranging device, which is characterized in that setting inside the dust catcher Inefficient filtering reticular structure, the inefficient filtering reticular structure is for being filtered interception to the particle of attraction.

4. laser chamber endoparticle according to claim 1 or 2 or 3 examines arranging device, which is characterized in that further include: operation Handle；One end of the operation handle is connected with the rear end of the suction nozzle, and the other end of the operation handle passes through hose and institute It states dust catcher to be connected, there is second channel inside the operation handle, the first passage, second channel and hose are connected It is logical.

5. laser chamber endoparticle according to claim 4 examines arranging device, which is characterized in that the outside of the operation handle A supporting block is fixedly installed on wall, the supporting block is inclined-plane away from an end face of the operation handle, is arranged on the inclined-plane One groove parallel with the inclined-plane, the ultraviolet lamp are placed in the groove and the light of the ultraviolet lamp are radiated at The front end of the suction nozzle.

6. laser chamber endoparticle according to claim 5 examines arranging device, which is characterized in that go out light in the ultraviolet lamp Convex block is set in end, the groove, and the convex block is located at the lower edge of the ultraviolet lamp light hole, and the convex block is used for described Ultraviolet lamp is supported and positions.

7. laser chamber endoparticle according to claim 6 examines arranging device, which is characterized in that be arranged at least in the groove One fixation hole, the fixation hole is for carrying out installation fixation to the ultraviolet lamp.

8. laser chamber endoparticle according to claim 1 or 2 or 3 examines arranging device, which is characterized in that the suction nozzle has It is magnetic；The suction nozzle is fabricated from a flexible material.

9. laser chamber endoparticle according to claim 4 examines arranging device, which is characterized in that the first passage and described Second channel is circle, and the diameter of the first passage and the second channel is equal are as follows: 0.2mm-20mm；The hose it is interior Diameter are as follows: 0.2mm-20mm；The axis crosspoint of the light of the ultraviolet lamp and the suction nozzle and the suction nozzle front end surface away from From are as follows: 1mm-10mm.

10. laser chamber endoparticle according to claim 4 examines arranging device, which is characterized in that the suction nozzle, manipulator Handle, hose and dust catcher are sequentially connected and pass through threaded fastener respectively in junction and be detachably connected, in the spiral shell The interface position setting O of line fastener encloses sealing.