CN110442907A - The Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics - Google Patents
The Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics Download PDFInfo
- Publication number
- CN110442907A CN110442907A CN201910587590.5A CN201910587590A CN110442907A CN 110442907 A CN110442907 A CN 110442907A CN 201910587590 A CN201910587590 A CN 201910587590A CN 110442907 A CN110442907 A CN 110442907A
- Authority
- CN
- China
- Prior art keywords
- loudspeaker
- piezoelectric
- frequency
- under
- acoustics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R29/00—Monitoring arrangements; Testing arrangements
- H04R29/001—Monitoring arrangements; Testing arrangements for loudspeakers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
The invention discloses the Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics, this method including the following steps: 1) establishes MEMS loudspeaker emulation geometrical model；2) physical field and boundary condition are set, it, which is included in " Solid Mechanics ", " electric field ", " pressure acoustics; frequency domain " and " thermal viscosity acoustics, frequency domain " physical field, is respectively set material model, piezoelectricity constitutive relation, damping, constraint condition, impedance boundary and voltage load etc.；3) definition material parameter；4) trellis-type and size, and grid division are set.5) it solves and calculates: " frequency domain " and " characteristic frequency " research is respectively adopted, the finite element model is solved；6) result post-processes: by post-processing variation relation, vibration component upper stress/strain/displacement/speed/acceleration size and distribution map and the MEMS loudspeaker resonant frequency and the vibration shape of sound pressure level frequency response curve, acoustic pressure and the sound pressure level distribution map, capacitance that obtain piezoelectric type MEMS loudspeaker with frequency.
Description
Technical field
It is that one kind is related to MEMS (MEMS), piezoelectric effect, structure the invention belongs to MEMS loudspeaker design field
The Numerical Simulation Analysis method of mechanics, electric field and sound field.Using Numerical Simulation Analysis method disclosed by the invention, MEMS can be obtained
The sound pressure level frequency response curve of loudspeaker, acoustic pressure and sound pressure level distribution, capacitance on the variation relation of frequency, vibration component with answering
Power/strain/displacement/speed/acceleration size and distribution map and the MEMS loudspeaker resonant frequency and the vibration shape.These
Simulation analysis result can be used for instructing the structure of MEMS loudspeaker to design and improve, to promote its performance.
Background technique
MEMS loudspeaker is a kind of New-type loudspeaker designed in conjunction with energy converter theory and MEMS technology.It has body
The advantages such as product is small, light-weight, low in energy consumption, easy and acoustic equipment is integrated.Piezoelectric type MEMS loudspeaker is using piezoelectric cantilever
Structure design, also have stable structure, consistency is good, is easy to the advantages such as mass production.
Piezoelectric type MEMS loudspeaker is a kind of New-type loudspeaker just occurred in recent years, is also deposited in research and development and design at present
In following problems: 1) design theory is not perfect, and design threshold is high.This is because theoretical (equivalent using traditional loudspeaker design
Circuit) it is difficult adequately to meet its design requirement, it is typically only capable to rely on sample preparation and test repeatedly；2) sample preparation is at high cost, test
Difficulty is big.This is because the manufacture craft of MEMS loudspeaker is still immature, and the change of working principle, make its test with it is traditional
There is some difference for coil-moving speaker, and difficulty of test increases.
Summary of the invention
The object of the present invention is to provide a kind of Numerical Simulation Analysis methods of piezoelectric type MEMS loudspeaker fundamental characteristics, it is solved
The problems such as existing MEMS product design theory of having determined is not perfect, design threshold is high, development cost is high.
The present invention can be calculated the MEMS and raise by establishing the Finite Element Simulation Analysis model of piezoelectric type MEMS loudspeaker
Sound pressure level frequency response curve, acoustic pressure and sound pressure level distribution map, the vibration component upper stress/strain/displacement/speed/acceleration of sound device
Size and distribution map and loudspeaker resonant frequency and the vibration shape.The MEMS can be estimated by these simulation analysis results to raise
The fundamental characteristics of sound device instructs the structure of MEMS loudspeaker to design and improve.
The Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics disclosed in this invention, has used " pressure
Acoustics, frequency domain ", " thermal viscosity acoustics, frequency domain ", " electric field " and " Solid Mechanics " physical field interface, and " piezoelectric material ", " sound-
Structure boundary " and " sound-thermal viscosity acoustic boundary " multiple physical field coupling interface.The Numerical Simulation Analysis method mainly include with
Lower step:
(1) finite element model is established
1) geometrical model of piezoelectric type MEMS loudspeaker fundamental characteristics simulation analysis is established, specific modeling procedure is as follows:
A. it establishes loudspeaker geometrical model: MEMS loudspeaker geometrical model is imported into finite element analysis software, the loudspeaker
Geometrical model using the three-dimensional drawing Software on Drawing loudspeaker geometrical model or using finite element analysis software carry it is " several
What " function foundation, after establishing geometrical model, point, line, surface and body extra in cleaning model are needed, also to improve geometrical model
Quality；
B. establish 711 coupler operatic tunes equivalent models: the sound pressure level frequency response curve of MEMS loudspeaker is usually in 711 couplers
Middle test: to make simulating analysis have more versatility, the operatic tunes equivalent model (containing connecting tube) of 711 couplers is established, and is made
Correctly connect with loudspeaker；711 couplers refer to human ear simulator；
2) physical field is set and boundary condition, detailed step are as follows:
A. select " pressure acoustics, frequency domain " corresponding domain, i.e., it is non-narrow in loudspeaker front and back chamber air-shed and 711 couplers
The air-shed in area；
B. it under " pressure acoustics, frequency domain ", using " series coupled RCL impedance boundary ", is surveyed in 711 coupler of simulation analysis
The acoustic impedance on microphone surface is tried, R is equivalent acoustic resistance here, and C is that equivalent sound is suitable, and L is equivalent acoustic inertia；
C. under " pressure acoustics, frequency domain ", using " user defines impedance boundary ", pressure is flat in the simulation analysis loudspeaker
Weigh hole (balance hole it is small-sized, about 10-1Mm magnitude) to air radiation sound wave when acoustic impedance；
D. under " pressure acoustics, frequency domain ", the plane of symmetry that air-shed is arranged is " symmetrical " boundary condition；
E. " thermal viscosity acoustics, frequency domain " corresponding domain, i.e. stenosis area air-shed in 711 coupler operatic tunes models are selected；
F. under " thermal viscosity acoustics, frequency domain ", temperature value is set, which will affect the thermal viscosity parameter of air；
G. under " thermal viscosity acoustics, frequency domain ", the plane of symmetry of setting stenosis area air-shed is " symmetrical " boundary condition；
H. " Solid Mechanics " corresponding domain, i.e. piezoelectric cantilever and vibrating diaphragm domain are selected；
I. under " Solid Mechanics ", set " linear elastic materials " for piezoelectric cantilever and vibrating diaphragm domain, and its damping is set
Type and damping value；
J. under " Solid Mechanics ", " piezoelectric material " functional interface is added, and is applied to piezoelectric material domain, connect at this
Mouth setting piezoelectric material model and piezoelectric material polarization direction；
K. under " Solid Mechanics ", the built-in edge of piezoelectric cantilever and vibrating diaphragm that the loudspeaker is arranged is " fixed constraint "
Boundary condition；
L. under " Solid Mechanics ", the plane of symmetry of the vibration components such as setting piezoelectric cantilever is " symmetrical " boundary condition；
M. " electric field " corresponding domain, i.e. piezoelectric material domain are selected；
N. it under " electric field ", adds " charge conservation, piezoelectricity ", and be applied to piezoelectric material；
O. under " electric field ", using " terminal " and " ground connection " functional interface, it is arranged on the electrode surface of piezoelectric material specified
Voltage value；
P. under " multiple physical field " interface, " piezoelectric effect ", " sound-structure boundary " and " sound-thermal viscosity acoustics is respectively set
Boundary ".
3) definition material parameter: material parameter needed for limit element artificial module and physical field, material model and perimeter strip
Part is related, needs exist for being respectively set vibrating diaphragm, top dome, the material parameter of piezoelectric cantilever in the MEMS loudspeaker, mainly includes
Young's modulus, density, Poisson's ratio, damping, the velocity of sound and piezoelectric material elastic matrix, coupling matrix and relative dielectric constant
Matrix.
4) grid division: specified grid cell type and size, and grid division；There is also the need to pass through setting grid list
The size of member, progress Local grid refinement appropriate keep calculated result more accurate.
(2) it solves and result post-processes
1) it solves: in the simulation analysis of piezoelectric type MEMS loudspeaker fundamental characteristics, " frequency domain " and " feature is respectively adopted
Frequency " research solves finite element model；, described " frequency domain " and " characteristic frequency " research is built in finite element software
Research method, algorithm of the calculating process as built in software complete；
2) result post-processes: post-processing operation is used after the completion of solving, and can obtain the fundamental characteristics of the MEMS loudspeaker, it
Specifically include that the A. MEMS loudspeaker 711 couplers test environment under sound pressure level frequency response curve；B. the MEMS loudspeaker
Under any working frequency, loudspeaker and acoustic pressure and sound pressure level distribution in the 711 coupler operatic tunes；C. the electricity of the MEMS loudspeaker
Capacitance with frequency change curve；D. the MEMS loudspeaker is under any working frequency, answering in the structures such as vibrating diaphragm and cantilever beam
Power, strain, displacement, velocity and acceleration distribution map；E. the resonant frequency and the vibration shape of the MEMS loudspeaker.The post-processing
Operation is the routine operation that finite element software obtains result；The loudspeaker fundamental characteristics A-D is after being carried out using " frequency domain "
Manage obtaining as a result, E is the result post-processed using " characteristic frequency ".
The geometrical model of the MEMS loudspeaker simulation analysis is the model after Rational Simplification.The simplification method of model is very
It is more, it both can complete to simplify using the three-dimensional drawing software (such as SolidWorks, ProE) of profession, finite element can also be used
It is simplified to carry out implementation model for " geometry " correlation function in software.
The finite element analysis software is COMSOL Multiphysics (abbreviation COMSOL), it is a more physics
Field simulation analysis software, major function include establishing geometrical model, grid dividing, physical field setting and solution, result images
Display etc..
Advantages of the present invention: 1) the complete simulation analysis model of MEMS loudspeaker is established, can more fully consider piezoelectricity
Piezoelectric effect, structural mechanics, electric field and the sound field characteristic of formula MEMS loudspeaker are conducive to instruct loadspeaker structure design and excellent
Change；2) deficiency for compensating for MEMS loudspeaker design theory, reduces the threshold of engineer application；3) Numerical Simulation Analysis pair is used
The characteristic of MEMS loudspeaker is estimated, and sample preparation and testing time are reduced, and improves development efficiency, saves cost.
Detailed description of the invention
Fig. 1 is implementation flow chart of the invention.
Fig. 2 is a piezoelectric type MEMS loudspeaker appearance schematic diagram.
Fig. 3 is the structure chart of the equivalent operatic tunes of 711 couplers.
Fig. 4 is piezoelectric type MEMS loadspeaker structure explosive view.
Fig. 5 is Piezoelectric Cantilever Beams figure.
Fig. 6 is piezoelectric type MEMS loudspeaker fundamental characteristics simulation analysis geometrical model.
Air-shed corresponding physical field setting when Fig. 7 is simulation analysis.
Vibration component corresponding physical field setting when Fig. 8 is simulation analysis.
Fig. 9 is the acoustic impedance that microphone surface in 711 couplers is arranged.
Figure 10 is the acoustic impedance that pressure balance hole surface is arranged.
The material parameter value that Figure 11 is inputted when being simulation analysis.
Figure 12 is the elastic matrix of piezoelectric material (PZT4).
Figure 13 is the coupling matrix of piezoelectric material (PZT4).
Figure 14 is the relative dielectric constant of piezoelectric material (PZT4).
Figure 15 is that piezoelectric type MEMS loudspeaker fundamental characteristics emulates finite element mesh model.
Figure 16 is the sound pressure level frequency response curve of piezoelectric type MEMS loudspeaker.
Figure 17 is the acoustic pressure distribution map in air-shed.
Figure 18 is sound pressure level distribution map in air-shed.
Figure 19 is variation of the piezoelectric type MEMS loudspeaker capacitance with frequency.
Figure 20 is piezoelectric cantilever upper stress distribution map.
Figure 21 is diagram of strains on piezoelectric cantilever.
Figure 22 is to be displaced distribution map on vibrating diaphragm.
Figure 23 is velocity contour on vibrating diaphragm.
Figure 24 is acceleration profile on vibrating diaphragm.
Figure 25 is the resonant frequency and the vibration shape of the loudspeaker vibration component.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
By taking a piezoelectric type MEMS loudspeaker as an example, the loudspeaker is analyzed in electricity with numerical value emulation method disclosed by the invention
Fundamental characteristics in field, structural mechanics and sound field.Fig. 1 is implementation flow chart of the invention, and specific implementation step is as follows:
(1) prepare
Fig. 2 and Fig. 3 be respectively piezoelectric type MEMS loudspeaker (simplified structure, size be about 6.5mm × 4.5mm ×
1.5mm) and the tomograph of the equivalent operatic tunes of 711 couplers.Fig. 4 is the explosive view of the MEMS loadspeaker structure, the loudspeaking
Device includes preceding cavity shell (1), vibrating diaphragm (2), piezoelectric cantilever (3) and rear cavity shell (4).Fig. 5 is the piezoelectric cantilever of the loudspeaker
Girder construction, it includes silicon materials substrate (5), piezoelectric material (6) and H-type connector (7), and H-type connector (7) is used for connecting cantilever
Beam and vibrating diaphragm, and play the role of the high vibrating diaphragm of frame (preventing wiping when speaker operation between vibrating diaphragm and cantilever beam from touching).MEMS is raised
The professional three-dimensional drawing Software on Drawing such as SolidWorks can be used in sound device and 711 coupler acoustical cavities, can also use
" geometry " draw in COMSOL software.
(2) finite element model is established
1) Spatial Dimension, physical field interface and research type are added: opening COMSOL software, installation space dimension is " three
Dimension ", successively selects and adds " pressure acoustics, frequency domain ", " thermal viscosity acoustics, frequency domain ", " electric field " and " Solid Mechanics " physical field,
Selecting research type is " frequency domain ".
2) simulation analysis geometrical model is established, as shown in Figure 6.Modeling process is as follows:
A. the geometrical model of the MEMS loudspeaker fundamental characteristics simulation analysis is established: using " importing " function under " geometry "
Can, the 3D assembly digital-to-analogue that will shift to an earlier date ready MEMS loudspeaker and the 711 coupler operatic tunes (including connecting tube (8)) imports emulation
Analyze program.Since the influences of the structures to loudspeaker performance such as flexible electrode in the MEMS loudspeaker are smaller, so, it adopts here
Calculating speed is improved with the loudspeaker model simplified to reduce calculation amount；In view of the symmetry that has of the structure, therefore imitative
1/2 symmetry model is additionally used when true analysis, to be further reduced calculation amount, improves calculating speed；
B. GTD model: using GTD model function " geometry " operation is lower, clear up point, line, surface extra in model with
Body.
3) physical field and boundary condition are set.Detailed setting steps are as follows:
A. corresponding domain (9) is selected in " pressure acoustics, frequency domain " physical field interface, it includes cavity space before and after MEMS loudspeaker
The air-shed of non-stenosis area, is shown in Fig. 7 in gas domain and the 711 coupler operatic tunes；
B. corresponding domain (10) is selected in " thermal viscosity acoustics, frequency domain " physical field interface, it includes in the 711 coupler operatic tunes
Stenosis area air-shed, is shown in Fig. 7；
C. select corresponding domain (11) in " Solid Mechanics " physical field interface, it include piezoelectric cantilever (piezoelectric material domain,
Silicon substrate and H-type connector) and vibrating diaphragm, see Fig. 8；
D. corresponding domain (12) is selected in " electric field " physical field interface, it includes all piezoelectric material domains, sees Fig. 8；
E. under " pressure acoustics, frequency domain ", the face (13) where 711 couplers of setting test microphone is " impedance " side
Fig. 9 is seen on boundary." series coupled RCL " impedance model is selected, and equivalent acoustic resistance R=1.19e8 [kg/ (m is respectively set4S)], etc.
Imitate acoustic compliance C=6.2e-14 [m4·s2/ kg] and equivalent sound the moment of inertia L=710 [kg/m4]；
F. under " pressure acoustics, frequency domain ", setting pressure compensation opening outer surface (14) is " impedance " boundary, sees Figure 10.Choosing
Select " user's definition " impedance model, and nominal impedance value Zi=30 [Pas/m]；
G. under " pressure acoustics, frequency domain ", it is " symmetrical " boundary that the plane of symmetry in air-shed, which is arranged,；
H. under " thermal viscosity acoustics, frequency domain " physical field, it is " symmetrical " boundary that the plane of symmetry in the air-shed of stenosis area, which is arranged,；
It I. is " linear elastic materials " addition " damping " under " Solid Mechanics " physical field, setting damper type is " Ruili resistance
Buddhist nun ", and Tuned mass damper parameter alpha=0 and stiffness and damp parameters β=2/ (2 × pi × 1400 [Hz]) are set；
J. under " Solid Mechanics ", " piezoelectric material " functional interface is added, and is applied to piezoelectric material domain, connect at this
Mouth setting piezoelectric material constitutive relation is " stress-charge type ", and piezoelectric material is along Y-axis polarization (the i.e. thickness side of piezoelectric material
To)；
K. under " Solid Mechanics " physical field, the plane of symmetry that the loudspeaker vibration component is arranged is " symmetrical " boundary；
L. under " Solid Mechanics " physical field, the outer ledge that piezoelectric cantilever and vibrating diaphragm is arranged is " fixation " boundary；
M. it under " electric field ", adds " charge conservation, piezoelectricity ", and be applied to piezoelectric material；
N. under " electric field ", using " terminal " and " ground connection " boundary condition, upper and lower surface in each piezoelectric material domain is set
Potential.The upper surface " ground connection " of piezoelectric material in this example, lower surface uses " terminal ", and loads the voltage of 15V (peak value)；
O. under " multiple physical field " interface, " piezoelectric effect ", " sound-structure boundary " and " sound-thermal viscosity acoustics are added respectively
Boundary "." piezoelectric effect " is set and is applied to piezoelectric material, coupling is established between " electric field " and " Solid Mechanics " physical field and is closed
System；The contact surface that " sound-structure boundary " is applied to vibration component and air is set, in " Solid Mechanics " and " pressure acoustics, frequency
Coupled relation is established between the physical field of domain "；" sound-thermal viscosity acoustic boundary " is set and is applied to narrow air domain and general air-shed
Interface, establish coupled relation between " pressure acoustics, frequency domain " and " thermal viscosity acoustics, frequency domain " physical field.
4) definition material parameter.Using " material " relevant operation, to piezoelectric material in simulation analysis model (PZT4), silicon
Base, vibrating diaphragm, connector and air material parameter be configured.Material parameter value defined in this example is respectively such as the institute of Figure 11~14
Show.
5) grid division.Figure 15 is the finite element mesh model used in this example, and steps are as follows for the grid dividing:
A. the grid in narrow air domain is divided: firstly, addition " mapping ", carries out net to the upper surface in each narrow air domain
Lattice divide, and the size of mesh opening of upper surface is controlled by " distribution "；Then, " sweeping " is added, grid is carried out to narrow air domain and is drawn
Point, the number of grid on the thickness direction of narrow air domain is controlled by " distribution "；In this example, for reduction " thermal viscosity acoustics " calculating
Error, setting thickness direction " unit number distribution " are 4.Finally, addition " conversion ", by " be inserted into side opposite the angle " by narrow zone side
Quadrilateral units in boundary are converted into triangular element, to guarantee the compatibility with free tetrahedral grid；
B. the grid of the vibration components such as vibrating diaphragm: addition " free tetrahedral grid ", manual definition size of mesh opening is divided；This
Outside, since the vibration components such as vibrating diaphragm are relatively thin, its size in a thickness direction is much smaller than its lateral dimension, needs in grid dividing
It is stretched through setting thickness direction, to improve thickness direction mesh quality；In this example, manual definition grid " largest unit size "
For 0.06mm, thickness direction " stretch ratio " is 5；
C. the grid in normal air domain: addition " free tetrahedral grid ", manual definition size of mesh opening is divided.In pressure sound
It learns in problem solving, to guarantee that computational accuracy, the largest unit size of grid need to meet no more than λ/6, here, λ is to solve frequency
The minimum wavelength of sound wave within the scope of rate.In this example, the largest unit of grid is sized to 0.8mm.
(3) it solves and post-processes
1) " frequency domain " is studied
A. setting " frequency domain " study 1 frequency range (unit Hz) be 10^ range (log10 (20), 1/21, log10
(20000))}；
B. the finite element model is solved after being provided with, calculating process is completed as the algorithm built in COMSOL software.
2) " characteristic frequency " is studied
A. addition " characteristic frequency " research 2；Prohibit in " physical field and the configuration of variables choice > modification research step model "
With " pressure acoustics, frequency domain ", " thermal viscosity acoustics, frequency domain ", " damping ", " sound-structure boundary " and " sound-thermal viscosity acoustics side
Boundary "；
B. the finite element model is solved after being provided with, calculating process is completed as the algorithm built in COMSOL software.
3) it post-processes.It is as follows by post-processing the result that can be checked:
A. sound pressure level frequency response curve: firstly, adding " three-dimensional section " under " data set ", point in microphone surface is inputted
The coordinate set, and it is the data set for studying 1 that " data set ", which is arranged,；Then, " one-dimensional drawing group > point diagram " is added, " data is set
Collection " is " three-dimensional section ", the sound pressure level expression formula " acpr.Lp " under input pressure acoustics, and drafting obtains the MEMS loudspeaker
Sound pressure level frequency response curve is as shown in figure 16；
B. acoustic pressure is distributed: adding " three-dimensional drawing group > body 1 and body 2 " respectively, the data set of Selecting research 1 and the frequency checked
Rate point, respectively the acoustic pressure expression at the acoustic pressure expression formula acpr.p_t and thermal viscosity acoustics under 2 input pressure acoustics of body 1 and body
Formula ta.p_t, it is as shown in figure 17 that drafting obtains acoustic pressure distribution；
C. acoustic pressure is distributed: adding " three-dimensional drawing group > body 1 and body 2 " respectively, the data set of Selecting research 1 and the frequency checked
Rate point, respectively the acoustic pressure table under the acoustic pressure expression formula acpr.Lp and thermal viscosity acoustics in body 1 and body 2 under input pressure acoustics
Up to formula ta.Lp, it is as shown in figure 18 that drafting obtains acoustic pressure distribution；
D. capacitance changes with frequency: addition " one-dimensional drawing group > overall situation ", and the data set of Selecting research 1 inputs expression formula
(es.Q0_1/es.V0_1) * 2, draw obtain the capacitance of the MEMS loudspeaker with frequency variation as shown in figure 19 here,
Es.Q0_1 is the quantity of electric charge on piezoelectric material, and es.V0_1 is the voltage value on piezoelectric material；
E. piezoelectric cantilever upper stress be distributed: addition " three-dimensional drawing group > body ", the data set of research 1 and check frequency
Rate point inputs stress expression formula solid.mises, and right click " body " is added " selection ", selects cantilever beam domain, and drafting obtains cantilever
The distribution of beam upper stress is as shown in figure 20；
F. Strain Distribution on piezoelectric cantilever: addition " three-dimensional drawing group > body " and checks frequency at the data set of research 1
Rate point, input strain expression formula solid.evol, right click " body " are added " selection ", select cantilever beam domain, drafting obtains cantilever beam
Upper Strain Distribution is as shown in figure 21；
G. Displacements Distribution on vibrating diaphragm: addition " three-dimensional drawing group > body " and checks Frequency point at the data set of research 1, defeated
Enter the expression formula solid.disp of displacement, right click " body " is added " selection ", selects vibrating diaphragm corresponding domain, it is upper that drafting obtains vibrating diaphragm
It is as shown in figure 22 to move distribution；
H. VELOCITY DISTRIBUTION on vibrating diaphragm: addition " three-dimensional drawing group > body " and checks Frequency point at the data set of research 1, defeated
Enter velocity expression solid.vel, right click " body " is added " selection ", and vibrating diaphragm corresponding domain is selected, and drafting obtains speed point on vibrating diaphragm
Cloth is as shown in figure 23；
I. acceleration profile on vibrating diaphragm: addition " three-dimensional drawing group > body " and checks Frequency point at the data set of research 1,
Input acceleration expression formula solid.acc, right click " body " are added " selection ", and vibrating diaphragm corresponding domain is selected, and drafting obtains adding on vibrating diaphragm
VELOCITY DISTRIBUTION is as shown in figure 24；
J. the resonant frequency of vibration component: " three-dimensional drawing group > surface > deformation " successively is added, the data set of research 2
With minimum frequency point, input displacement expression formula solid.disp, drafting obtains the first order resonant of the MEMS speaker vibration system
The mode of (fundamental frequency) is as shown in figure 25, resonance frequency value 2725.7Hz.
The above case study on implementation is merely to illustrate realization process of the invention and is not intended to limit the present invention described technical solution.
Although this specification is referring to above-mentioned each implementation steps, invention is explained in detail, the ordinary skill of this field
Member is it should be understood that still can modify to the present invention or equivalence replacement, and all do not depart from spirit and scope of the invention
Technical solution and its improvement, should all be covered by the scope of the present invention.
Claims (4)
1. a kind of Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics, it is characterised in that the method use
" pressure acoustics, frequency domain ", " thermal viscosity acoustics, frequency domain ", " electric field " and " Solid Mechanics " physical field interface, and " piezoresistive material
Material ", " sound-structure boundary " and " sound-thermal viscosity acoustic boundary " multiple physical field coupling interface；The Numerical Simulation Analysis method is at least
The following steps are included:
(1) finite element model is established
1) geometrical model is established
A. it establishes loudspeaker geometrical model: the MEMS loudspeaker geometrical model is imported into finite element analysis software, the loudspeaker
Geometrical model is established using three-dimensional drawing Software on Drawing or using " geometry " function that finite element analysis software carries, and establishes geometry
After model, point, line, surface and body extra in cleaning model are needed, also to improve the quality of geometrical model；
B. establish the operatic tunes equivalent model of 711 couplers: the sound pressure level frequency response curve of MEMS loudspeaker is usually in 711 couplers
Test, to make simulating analysis have more versatility, establishes the operatic tunes equivalent model of 711 couplers, including connecting tube, and be allowed to
It is correctly connect with loudspeaker；
2) physical field and boundary condition are set
A. " pressure acoustics, frequency domain " corresponding domain, i.e., non-stenosis area in loudspeaker front and back chamber air-shed and 711 couplers are selected
Air-shed；
B. under " pressure acoustics, frequency domain ", using " series coupled RCL impedance boundary ", wheat is tested in 711 coupler of simulation analysis
The acoustic impedance on gram wind surface, R is equivalent acoustic resistance here, and C is that equivalent sound is suitable, and L is equivalent acoustic inertia；
C. under " pressure acoustics, frequency domain ", using " user defines impedance boundary ", pressure compensation opening in the simulation analysis loudspeaker
Acoustic impedance when to air radiation sound wave；The size of the balance hole about 10-1Mm magnitude；
D. under " pressure acoustics, frequency domain ", the plane of symmetry that air-shed is arranged is " symmetrical " boundary condition；
E. " thermal viscosity acoustics, frequency domain " corresponding domain, i.e. stenosis area air-shed in 711 coupler operatic tunes models are selected；
F. under " thermal viscosity acoustics, frequency domain ", temperature value is set, which will affect the thermal viscosity parameter of air；
G. under " thermal viscosity acoustics, frequency domain ", the plane of symmetry of setting stenosis area air-shed is " symmetrical " boundary condition；
H. " Solid Mechanics " corresponding domain, i.e. piezoelectric cantilever and vibrating diaphragm domain are selected；
I. under " Solid Mechanics ", set " linear elastic materials " for piezoelectric cantilever and vibrating diaphragm domain, and its damper type is set
And damping value；
J. under " Solid Mechanics ", " piezoelectric material " functional interface is added, and be applied to piezoelectric material domain, is set in the interface
Set piezoelectric material model and piezoelectric material polarization direction；
K. under " Solid Mechanics ", the built-in edge of piezoelectric cantilever and vibrating diaphragm that the loudspeaker is arranged is " fixed constraint " boundary
Condition；
L. under " Solid Mechanics ", the plane of symmetry of the vibration components such as setting piezoelectric cantilever is " symmetrical " boundary condition；
M. " electric field " corresponding domain, i.e. piezoelectric material domain are selected；
N. it under " electric field ", adds " charge conservation, piezoelectricity ", and be applied to piezoelectric material；
O. under " electric field ", using " terminal " and " ground connection " functional interface, given voltage is set on the electrode surface of piezoelectric material
Value；
P. under " multiple physical field " interface, " piezoelectric effect ", " sound-structure boundary " and " sound-thermal viscosity acoustics side is respectively set
Boundary ".
3) definition material parameter: material parameter needed for limit element artificial module and physical field, material model and boundary condition are equal
It is related, need exist for being respectively set vibrating diaphragm, top dome, the material parameter of piezoelectric cantilever, material parameter master in the MEMS loudspeaker
It to include the elastic matrix, coupling matrix and opposite Jie of Young's modulus, density, Poisson's ratio, damping, the velocity of sound and piezoelectric material
Electric constant matrix；
4) grid division: specified grid cell type and size, and grid division；There is also the need to pass through setting grid cell
Size suitably carries out Local grid refinement, keeps calculated result more accurate；
(2) it solves and result post-processes
1) it solves: " frequency domain " and " characteristic frequency " research is respectively adopted, above-mentioned finite element model is solved；
2) result post-processes: using post-processing operation after the completion of calculating, obtains the fundamental characteristics of the MEMS loudspeaker, they are main
It include: sound pressure level frequency response curve of the A. MEMS loudspeaker under 711 couplers test environment；B. the MEMS loudspeaker is any
Under working frequency, loudspeaker and acoustic pressure and sound pressure level distribution in the 711 coupler operatic tunes；C. the capacitance of the MEMS loudspeaker with
The change curve of frequency；D. the MEMS loudspeaker is under any working frequency, and stress in the structures such as vibrating diaphragm and cantilever beam is answered
Become, be displaced, the distribution map of velocity and acceleration；E. the resonant frequency and the vibration shape of the MEMS loudspeaker.
2. the Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics according to claim 1, feature exist
In the simulation analysis condition be the geometric dimension of the known loudspeaker, the material category of each component material therefor of the loudspeaker
Property, the constraint condition of the loudspeaker and load-up condition.
3. the Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics according to claim 1, feature exist
It is a piezo-electric loudspeaker in the MEMS loudspeaker, it drives diaphragm oscillations using Piezoelectric Cantilever Beams.
4. the Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics according to claim 1, feature exist
In the finite simulation element analysis software include COMSOL or ANSYS finite simulation element analysis software；The three-dimensional drawing
Software includes SolidWorks or ProE mapping software.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910587590.5A CN110442907B (en) | 2019-07-02 | 2019-07-02 | Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910587590.5A CN110442907B (en) | 2019-07-02 | 2019-07-02 | Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110442907A true CN110442907A (en) | 2019-11-12 |
| CN110442907B CN110442907B (en) | 2023-04-28 |
Family
ID=68428880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910587590.5A Active CN110442907B (en) | 2019-07-02 | 2019-07-02 | Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110442907B (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111814262A (en) * | 2020-09-02 | 2020-10-23 | 广州汽车集团股份有限公司 | Simulation analysis method, platform and computer storage medium of low frequency sound field in vehicle |
| CN111931370A (en) * | 2020-08-06 | 2020-11-13 | 天津大学 | Research of ceramic insulator flash firing technology based on COMSOL |
| CN112231958A (en) * | 2020-10-23 | 2021-01-15 | 浙江中科电声研发中心 | Numerical simulation analysis method for acoustic impedance of sound-transmitting film |
| CN112487679A (en) * | 2020-11-20 | 2021-03-12 | 四川湖山电器股份有限公司 | Method, system, terminal and medium for simulating acoustic characteristics of sound box by numerical values |
| CN112924012A (en) * | 2021-01-25 | 2021-06-08 | 中航华东光电（上海）有限公司 | Method for measuring acoustic parameters of closed small space |
| CN113343462A (en) * | 2021-06-07 | 2021-09-03 | 西安交通大学 | High-order isogeometric multi-oil-cavity dynamic and static pressure sliding bearing oil film characteristic simulation method |
| CN113361224A (en) * | 2021-06-25 | 2021-09-07 | 南京大学 | Piezoelectric MEMS loudspeaker modeling method containing multilayer cantilever driver |
| CN113630686A (en) * | 2021-08-13 | 2021-11-09 | 南京工程学院 | A high-intensity Helmholtz sound source design method based on pattern recognition |
| CN113993049A (en) * | 2021-08-26 | 2022-01-28 | 地球山(北京)科技有限公司 | MEMS digital loudspeaker design method |
| CN114528806A (en) * | 2022-02-17 | 2022-05-24 | 苏州浪潮智能科技有限公司 | Superconducting quantum circuit chip-level simulation method based on Comsol |
| CN115563838A (en) * | 2022-11-10 | 2023-01-03 | 北京工业大学 | A method for band structure and frequency domain analysis of seismic metamaterials based on COMSOL |
| CN115577603A (en) * | 2022-12-06 | 2023-01-06 | 深圳飞骧科技股份有限公司 | Simulation method and system for reducing unit matrix dimension and related equipment |
| CN116127887A (en) * | 2023-04-17 | 2023-05-16 | 东南大学 | A MEMS Device Macromodel Modeling Method Based on System Identification Method |
| WO2024099045A1 (en) * | 2022-11-08 | 2024-05-16 | 深圳市韶音科技有限公司 | Loudspeaker |
| WO2024131284A1 (en) * | 2022-12-22 | 2024-06-27 | 苏州上声电子股份有限公司 | Method for determining mounting position of speaker |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102004823A (en) * | 2010-11-11 | 2011-04-06 | 浙江中科电声研发中心 | Numerical value simulation method of vibration and acoustic characteristics of speaker |
| CN104252559A (en) * | 2014-08-29 | 2014-12-31 | 浙江中科电声研发中心 | Numerical simulation analysis method for multi-field coupling of loudspeaker |
| CN104408227A (en) * | 2014-10-28 | 2015-03-11 | 浙江中科电声研发中心 | Loudspeaker distortion feature value simulation analysis method |
| CN107515972A (en) * | 2017-08-10 | 2017-12-26 | 苏州上声电子有限公司 | A kind of Numerical Simulation Analysis method of loudspeaker falling process |
| CN109145514A (en) * | 2018-09-30 | 2019-01-04 | 浙江中科电声研发中心 | A kind of Numerical Simulation Analysis method of loudspeaker distortions |
| CN109362020A (en) * | 2018-09-30 | 2019-02-19 | 浙江中科电声研发中心 | A kind of Numerical Simulation Analysis method of speaker frame dynamic stiffness |
-
2019
- 2019-07-02 CN CN201910587590.5A patent/CN110442907B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102004823A (en) * | 2010-11-11 | 2011-04-06 | 浙江中科电声研发中心 | Numerical value simulation method of vibration and acoustic characteristics of speaker |
| CN104252559A (en) * | 2014-08-29 | 2014-12-31 | 浙江中科电声研发中心 | Numerical simulation analysis method for multi-field coupling of loudspeaker |
| CN104408227A (en) * | 2014-10-28 | 2015-03-11 | 浙江中科电声研发中心 | Loudspeaker distortion feature value simulation analysis method |
| CN107515972A (en) * | 2017-08-10 | 2017-12-26 | 苏州上声电子有限公司 | A kind of Numerical Simulation Analysis method of loudspeaker falling process |
| CN109145514A (en) * | 2018-09-30 | 2019-01-04 | 浙江中科电声研发中心 | A kind of Numerical Simulation Analysis method of loudspeaker distortions |
| CN109362020A (en) * | 2018-09-30 | 2019-02-19 | 浙江中科电声研发中心 | A kind of Numerical Simulation Analysis method of speaker frame dynamic stiffness |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111931370A (en) * | 2020-08-06 | 2020-11-13 | 天津大学 | Research of ceramic insulator flash firing technology based on COMSOL |
| CN111931370B (en) * | 2020-08-06 | 2022-08-02 | 天津大学 | COMSOL-based ceramic insulator flash firing method |
| CN111814262A (en) * | 2020-09-02 | 2020-10-23 | 广州汽车集团股份有限公司 | Simulation analysis method, platform and computer storage medium of low frequency sound field in vehicle |
| CN111814262B (en) * | 2020-09-02 | 2021-02-09 | 广州汽车集团股份有限公司 | Simulation analysis method, platform and computer storage medium of low frequency sound field in vehicle |
| CN112231958A (en) * | 2020-10-23 | 2021-01-15 | 浙江中科电声研发中心 | Numerical simulation analysis method for acoustic impedance of sound-transmitting film |
| CN112231958B (en) * | 2020-10-23 | 2023-09-19 | 浙江中科电声研发中心 | Numerical simulation analysis method for acoustic impedance of sound-transmitting film |
| CN112487679A (en) * | 2020-11-20 | 2021-03-12 | 四川湖山电器股份有限公司 | Method, system, terminal and medium for simulating acoustic characteristics of sound box by numerical values |
| CN112924012A (en) * | 2021-01-25 | 2021-06-08 | 中航华东光电（上海）有限公司 | Method for measuring acoustic parameters of closed small space |
| CN113343462A (en) * | 2021-06-07 | 2021-09-03 | 西安交通大学 | High-order isogeometric multi-oil-cavity dynamic and static pressure sliding bearing oil film characteristic simulation method |
| CN113343462B (en) * | 2021-06-07 | 2023-05-02 | 西安交通大学 | Multi-oil-cavity dynamic and static pressure sliding bearing oil film characteristic simulation method based on high-order isosurface |
| CN113361224A (en) * | 2021-06-25 | 2021-09-07 | 南京大学 | Piezoelectric MEMS loudspeaker modeling method containing multilayer cantilever driver |
| CN113361224B (en) * | 2021-06-25 | 2023-09-08 | 南京大学 | Piezoelectric MEMS speaker modeling method including multi-layer cantilever driver |
| CN113630686A (en) * | 2021-08-13 | 2021-11-09 | 南京工程学院 | A high-intensity Helmholtz sound source design method based on pattern recognition |
| CN113993049A (en) * | 2021-08-26 | 2022-01-28 | 地球山(北京)科技有限公司 | MEMS digital loudspeaker design method |
| CN114528806A (en) * | 2022-02-17 | 2022-05-24 | 苏州浪潮智能科技有限公司 | Superconducting quantum circuit chip-level simulation method based on Comsol |
| WO2024099045A1 (en) * | 2022-11-08 | 2024-05-16 | 深圳市韶音科技有限公司 | Loudspeaker |
| CN115563838A (en) * | 2022-11-10 | 2023-01-03 | 北京工业大学 | A method for band structure and frequency domain analysis of seismic metamaterials based on COMSOL |
| CN115577603A (en) * | 2022-12-06 | 2023-01-06 | 深圳飞骧科技股份有限公司 | Simulation method and system for reducing unit matrix dimension and related equipment |
| WO2024131284A1 (en) * | 2022-12-22 | 2024-06-27 | 苏州上声电子股份有限公司 | Method for determining mounting position of speaker |
| CN116127887A (en) * | 2023-04-17 | 2023-05-16 | 东南大学 | A MEMS Device Macromodel Modeling Method Based on System Identification Method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110442907B (en) | 2023-04-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110442907A (en) | The Numerical Simulation Analysis method of piezoelectric type MEMS loudspeaker fundamental characteristics | |
| Missaoui et al. | Free and forced vibration of a cylindrical shell with a floor partition | |
| CN109362020A (en) | A kind of Numerical Simulation Analysis method of speaker frame dynamic stiffness | |
| CN110427650A (en) | The Numerical Simulation Analysis method of moving iron type loud-speaker fundamental characteristics | |
| Chevallier et al. | A benchmark for free vibration and effective coupling of thick piezoelectric smartstructures | |
| CN113901617A (en) | Numerical simulation analysis method for compliance of multi-suspension structure of micro loudspeaker | |
| CN112487679B (en) | A numerical simulation method, system, terminal and medium for acoustic characteristics of a speaker | |
| CN105550433B (en) | A kind of capacitive micromachined ultrasonic sensor characteristics analysis method | |
| CN112528411A (en) | Geometric nonlinear structure noise vibration response calculation method based on modal reduction | |
| Liu et al. | Ultrahigh-sensitivity piezoelectric AlN MEMS speakers enabled by analytical expressions | |
| Nguyen-Van et al. | A smoothed four-node piezoelectric element for analysis of two-dimensional smart structures | |
| Massimino et al. | Piezo-micro-ultrasound-transducers for air-coupled arrays: Modeling and experiments in the linear and non-linear regimes | |
| CN110991106B (en) | A Method for Predicting Vibration Characteristics of Composite Soft Sandwich Structures Containing Cavities in Fluid | |
| Fedotov | Active vibration suppression of Bernoulli-Euler beam: experiment and numerical simulation | |
| US20110202348A1 (en) | Rhythm processing and frequency tracking in gradient frequency nonlinear oscillator networks | |
| Huang et al. | A large-diaphragm piezoelectric panel loudspeaker and its acoustic frequency response simulation method | |
| CN118095016A (en) | Load identification method based on inverse element method and finite element rigidity matrix construction | |
| Li et al. | Closed-form expressions on CMUTs with layered anisotropic microplates under residual stress and pressure | |
| Kuntzman et al. | Network modeling of multiple-port, multiple-vibration-mode transducers and resonators | |
| CN105117552A (en) | Resonant cavity design method based on COMSOL software for surface acoustic wave temperature sensor | |
| CN109711112A (en) | A method for establishing a three-dimensional seismic test model | |
| Yu et al. | Simulation analysis and optimization design for wide band piezoelectric oscillator of energy harvesting device | |
| Frew et al. | VHDL-AMS behavioural modelling of a CMUT element | |
| CN118612642A (en) | Speaker optimization method, device, electronic device, storage medium and program product | |
| Chen et al. | A schematic-based design model for microphone and circuit integration |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |