CN110441640A - A kind of test device - Google Patents

Abstract

The invention relates to a testing device for testing a device under test containing radio frequency signal terminals, which is characterized in that it comprises a main body (1), the main body is embedded with a radio frequency detection body (2) made of conductors, A radio frequency elastic probe (3) is arranged in the radio frequency detection body, and an insulating sleeve (4) is wrapped on the outside of the radio frequency elastic probe; and a plurality of auxiliary elastic probes surrounding the radio frequency elastic probe wrapped with the insulating sleeve are also arranged in the radio frequency detection body. The probe (5); the upper end of the radio frequency detection body (2) is provided with perforations through which the radio frequency elastic probe (3) and a plurality of auxiliary elastic probes (5) can be respectively passed through; the upper end of the radio frequency elastic probe (3) It can be in contact with the radio frequency signal terminal of the device under test, the lower end of the radio frequency elastic probe is conductively connected with the inner conductor of the radio frequency cable, and the auxiliary elastic probe is directly in conductive contact with the radio frequency detection body; the lower end of the radio frequency detection body can be connected with the radio frequency cable.

Description

a test device

technical field

The invention relates to a testing device, in particular to a device under test containing radio frequency microwave signal terminals, such as testing high-speed transmission chips and microsystem (SIP) products in BGA packages.

Background technique

The future information exchange is developing towards wireless and mobile. Various wireless mobile technologies including mobile communication, wireless local area network, satellite communication, wireless access, radar detection, GPS positioning, etc. are developing vigorously. All of these systems require radio frequency (RF) technology, radio frequency integrated circuits (RFIC) or radio frequency systems. In these communication systems, people need to develop the signal spectrum extending to the radio frequency band or even the microwave and millimeter wave band with higher frequencies. In addition, some ultra-high-speed integrated circuits also have the characteristics of radio frequency microwave signal transmission.

Package, often translated as package, usually refers to the protective casing and related accessories of a single IC after being cut from the wafer, mainly used to protect the silicon wafer. The form of packaging generally includes DIP, QFP, QFN, BGA, etc. With the improvement of the technology level, the packaging technology develops rapidly, mainly because the packaging density is getting higher and higher, the scale is getting bigger and bigger, and the number of pins is increasing rapidly. In addition, due to the requirements of functional integration, single-chip packaging can no longer meet the requirements of system design, and packaging products have gradually developed from small-scale, single-chip packaging to large-scale, multi-chip packaging.

SiP (System in Package) system-in-package, as the name suggests, refers to the integration of a system in a package. Usually, this system needs to package multiple chips and be able to complete specific tasks independently, such as SiP system-in-package integrating multiple traditional IC chips such as CPU, DRAM, Flash, etc., which also includes SiP package containing radio frequency integrated circuit units. The lead-out method of its pins conventionally adopts the fan-out method of BGA package.

In the process of testing ICs, RFICs and SIPs and related packaging substrates and high-frequency circuit boards that require radio frequency microwave transmission or ultra-high-speed transmission, the radio frequency microwave transmission frequency may reach 20GHz or even higher. How to efficiently and conveniently Testing the RF microwave channel and the traditional control channel and power supply channel is a technical problem that needs to be solved urgently at present.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide a test device which can conveniently test the object under test containing the radio frequency microwave channel port of higher frequency, aiming at the above-mentioned prior art.

The technical solution adopted by the present invention to solve the above technical problems is: a test device for testing a device under test containing a radio frequency microwave signal port, characterized in that it includes a main body, and the main body is embedded with a device made of conductors. The radio frequency microwave detection body is equipped with a radio frequency elastic probe in the radio frequency microwave detection body, and the radio frequency elastic probe is wrapped with an insulating sleeve; Auxiliary grounding elastic probe; the upper end of the radio frequency microwave detection body is provided with perforations through which the radio frequency elastic probe and a plurality of auxiliary grounding elastic probes can be respectively passed; the upper end of the radio frequency elastic probe can be connected with the radio frequency microwave signal port of the device under test Contact, the lower end of the radio frequency elastic probe is conductively connected to the inner conductor of the radio frequency cable, and the auxiliary grounding elastic probe is directly in conductive contact with the radio frequency detection body; the lower end of the radio frequency detection body can be connected to the radio frequency cable.

As an improvement, the main body includes a panel and a bottom plate disposed below the panel, the radio frequency detection body includes an upper insert embedded in the panel and a lower insert embedded in the bottom plate, the upper and lower inserts are both It is made of conductor; the upper insert is provided with a first through hole extending in the up-down direction, and the RF elastic probe and the insulating sleeve wrapped around the RF elastic probe are inserted along the axial direction of the first through hole In the first through hole; the plurality of auxiliary grounding elastic probes are embedded in the upper insert and surround the radio frequency elastic probes wrapped with insulating sleeves, and the lower ends of the plurality of auxiliary elastic probes are embedded in the lower The lower insert is provided with a second through hole extending in the up-down direction, the first through hole and the first through hole are coaxially arranged, and the second through hole is provided with an axial direction along the second through hole. The inserted lower insulating sleeve is provided with a radio frequency inner conductor in conductive contact with the radio frequency elastic probe.

Further improvement, the upper insert is formed with an upper compensation step at the top of the first through hole; a lower compensation step is formed in the middle of the inner conductor; A gap is formed.

In a further improvement, the lower end of the radio frequency inner conductor is provided with a jack for inserting the center conductor of the radio frequency cable.

In a further improvement, the lower part of the lower insulating sleeve is provided with an insulating gasket to prevent the short circuit between the radio frequency inner conductor and the radio frequency cable outer conductor.

In a further improvement, the inner wall of the radio frequency inner conductor jack and the central conductor of the radio frequency cable are welded by solder; the inner wall of the second through hole of the lower insert and the outer conductor of the radio frequency cable are welded by solder.

In a further improvement, a low-frequency elastic probe is embedded in the panel, and a low-frequency pin that can be in conductive contact with the low-frequency elastic probe is disposed at a corresponding position in the bottom plate.

In a further improvement, a grounding elastic probe is embedded in the panel, and a grounding pin that can be in conductive contact with the grounding elastic probe is provided at a corresponding position in the bottom plate.

In a further improvement, the main body is provided with a metal shell outside, a metal bottom shell is provided under the metal shell, a radio frequency detection interface is provided on the metal bottom shell, and the radio frequency inner conductor of the radio frequency detection body is electrically connected to the radio frequency detection interface through a radio frequency cable; The metal bottom case is also provided with a low frequency detection interface, and the lower part of the low frequency pin is provided with a socket, which can be electrically connected with the low frequency detection interface through a wire; the ground pin is in conductive contact with the metal shell.

In a further improvement, the upper part of the metal shell is also provided with an upper cover, and the upper cover and the metal shell are movably connected by snaps.

In a further improvement, a through-hole observation window is opened on the upper cover at a portion corresponding to the measured object, and a movable gasket capable of pressing the measured device is arranged in the through-hole observation window.

Compared with the prior art, the advantages of the present invention are:

1. The elastic probe is used for effective contact with the pad or BGA ball of the tested object, which can flexibly and conveniently replace the tested object, and the welding-free design does not damage the tested object.

2. The RF detector is used as the main transmission channel for RF microwave signals. At the same time, a transmission channel of coaxial structure is also constructed at the contact part with the measured object. By setting up a compensation structure, the impedance matching effect can be better achieved and the RF microwave signal can be reduced. reflection.

3. In the improved scheme, an integrated integrated design is adopted, which can lead out all the radio frequency, control and power ports of the tested object as corresponding detection ports. The volume is small and can meet the needs of incoming line testing.

4. In the improved scheme, the upper cover area is provided with an open structure, which can conveniently conduct online window detection for some SIP products, and further perform fixed-point debugging and analysis operations on specific chip units in the package.

Description of drawings

1 is a schematic three-dimensional structure diagram of a testing device in an embodiment of the present invention;

FIG. 2 is a schematic three-dimensional structural diagram of a test device from another perspective in an embodiment of the present invention;

3 is an exploded perspective view of a testing device in an embodiment of the present invention;

4 is a cross-sectional view of a testing device in an embodiment of the present invention;

5 is a schematic structural diagram of a main body and a radio frequency detection body in an embodiment of the present invention;

6 is a schematic structural diagram of an upper insert and internal components in an embodiment of the present invention;

FIG. 7 is a schematic structural diagram of a lower insert and internal components in an embodiment of the present invention.

Detailed ways

The present invention will be further described in detail below with reference to the embodiments of the accompanying drawings.

The test device as shown in FIGS. 1 to 4 is used to test the device under test 7 containing the radio frequency signal terminal 71 , and it includes a main body 1, and the main body is embedded with a radio frequency detection body 2 made of conductors. A radio frequency elastic probe 3 is arranged in the body, and an insulating sleeve 4 is wrapped on the outside of the radio frequency elastic probe; a plurality of auxiliary elastic probes 5 surrounding the radio frequency elastic probe wrapped with an insulating sleeve are also arranged in the radio frequency detection body; The upper end of the body is provided with perforations through which the RF elastic probe and multiple auxiliary elastic probes can be respectively passed; the upper end of the RF elastic probe 3 can be in contact with the RF signal terminal 71 of the device under test 7, and the lower end of the RF elastic probe It is conductively connected to the inner conductor 61 of the radio frequency cable 6, and the auxiliary elastic probe 5 is in direct conductive contact with the radio frequency detection body 2; the lower end of the radio frequency detection body 2 can be connected to the radio frequency electric cable 6.

In this embodiment, the main body 1 is made of insulating material as a whole, and includes a panel 11 and a bottom plate 12 disposed below the panel; the radio frequency detection body 2 includes an upper insert 21 embedded in the insulating panel 11 and an upper insert 21 embedded in the insulating panel 11 . The lower insert 22 in the bottom plate 12, as shown in FIG. 5, both the upper insert 21 and the lower insert 22 are made of conductors; the upper insert 21 is provided with a first through hole extending in the up-down direction, so The RF elastic probe 3 and the insulating sleeve 4 wrapped around the RF elastic probe are inserted into the first through hole along the axial direction of the first through hole; the plurality of auxiliary elastic probes 5 are embedded in the upper insert 21, and surrounds the RF elastic probe 31 wrapped with the insulating sleeve 4, while the lower ends of the plurality of auxiliary elastic probes 5 are in conductive contact with the lower insert 22; The through holes through which the probes 3 and the plurality of auxiliary elastic probes 5 pass are shown in FIG. 6 ; the lower insert 22 is provided with a second through hole extending in the up-down direction, a first through hole and a first through hole Coaxially arranged, the second through hole is provided with a lower insulating sleeve 8 inserted along the axial direction of the second through hole, and the lower insulating sleeve 8 is provided with a radio frequency inner conductor 9 in conductive contact with the lower end of the radio frequency elastic probe 3, See Figure 7.

In this example, the outer shape of the lower insert 22 adopts a step design with an upper width and a lower width. In actual design, a step design with a narrow upper portion and a lower width or a narrow width at both ends and a middle width may also be adopted. The structural changes of this part should all be within the scope of protection of rights.

In this embodiment, the entire RF transmission line is designed based on a characteristic impedance of 50Ω, but dislocation compensation or high impedance compensation is used in some transition sections to reduce RF microwave reflection and improve transmission performance. For example, in order to form compensation, the upper insert 21 is formed with an upper compensation step 21a at the top of the first through hole, which can be used to adjust the impedance matching at the contact point with the chip pad; a lower compensation step 9a is formed in the middle of the inner conductor 9, High resistance compensation is formed; the lower end of the radio frequency elastic probe 3 is tapered, and a gap 4a is formed between the radio frequency elastic probe 3 and the inner wall of the insulating sleeve 4 to form high resistance compensation. The lower end of the radio frequency inner conductor 9 is provided with a slot 91 into which the inner conductor 61 of the radio frequency cable 6 is inserted. The lower part of the lower insulating sleeve 8 is provided with an insulating gasket 10 for preventing the short circuit between the radio frequency inner conductor and the outer conductive shell of the radio frequency cable.

In this embodiment, the outer shapes of the insulating sleeve 4 and the lower insulating sleeve 8 are designed with separate insulating materials, and the actual design can also use part of air medium or mixed medium to achieve the purpose of insulation and support. The structural changes of this part should all be within the scope of protection of rights.

A low-frequency elastic probe 13 is also embedded in the panel 11 , and a low-frequency pin 23 that can be in conductive contact with the low-frequency elastic probe is provided at a corresponding position in the bottom plate 12 . A grounding elastic probe 14 is also embedded in the panel 11 , and a grounding pin 24 capable of conducting conductive contact with the grounding elastic probe is provided at a corresponding position in the bottom plate 12 .

In this embodiment, the RF elastic probe 31 , the auxiliary elastic probe 5 , the low-frequency elastic probe 13 and the grounding elastic probe 14 use double-acting elastic probes as the transmission medium to achieve reliable contact. In practical applications Various vertical interconnection methods with elastic contact, such as wool buttons, conductive rubber pads, and special-shaped elastic needles, can also be used. The structural changes of this part should all be within the scope of protection of rights.

In this illustration, only one radio frequency detection body is used as an example for description, in fact, multiple radio frequency detection bodies can be distributed. In addition, the positions and spacing layouts of the RF detector, the low-frequency pins, and the ground pins are only given for illustration, and cannot be limited to the actual layout.

For special chip layouts, such as denser pitches, the panel 11 can be made into one piece with the upper insert 21, which is made of engineering plastics, and uses shorter and thinner elastic probes and a larger number of RF grounds to Reduce RF transmission losses. In addition, for some chip layouts with concentrated low-frequency distribution, the panel 11 and the upper insert 21 can also be made of a single piece of metal, but the peripheral material of the low-frequency elastic probe part needs to be made of insulating material, and a new independent insert is formed. This part can be optimized for the actual layout of the chip, which should be within the scope of protection.

The main body 1 is provided with a metal shell 15 outside, a metal bottom shell 16 is provided under the metal shell 15, a radio frequency detection interface 17 is provided on the metal bottom shell 16, and the radio frequency inner conductor of the radio frequency detection body is electrically connected with the radio frequency detection interface through a radio frequency cable. ; The metal bottom case is also provided with a low frequency detection interface 18, the low frequency pin 23 and the low frequency detection interface 18 are conductively connected by wires; the ground pin 24 is in conductive contact with the metal shell. The inside of the metal bottom case 16 is hollowed out to form a cavity for accommodating components such as radio frequency cables and low frequency wires, and the bottom opening is covered with a bottom cover 161 .

In this embodiment, the low-frequency detection interface 18 uses a J30J micro-rectangular electrical connector, but other types of electrical connectors such as J63 and D-type can be used in practice. By extension, a control circuit board can be further placed in the cavity formed by the metal bottom case 16 and the bottom cover 161 to optimize the stability of the low-frequency power supply and the waveform of the control signal. The structural changes of this part should all be within the scope of protection of rights.

The upper part of the metal shell 15 is further provided with an upper cover 19 , and the upper cover 19 is movably connected with the metal shell 16 through the buckle 20 . A through-hole observation window 19a is formed on the upper cover 19 corresponding to the RF elastic probe, and a movable gasket 25 capable of elastically pressing the device under test is arranged in the through-hole observation window.

In this embodiment, the upper cover 19 and the metal shell 16 are movably connected by double snaps, and can be expanded using a flip structure in which one side is fixed by the shaft and the other side is movably connected by snaps. The structural changes of this part should all be within the scope of protection of rights.

Obviously, the above-mentioned embodiments are only examples for clear description, and are not intended to limit the implementation manner. For those of ordinary skill in the art, changes or modifications in other different forms can also be made on the basis of the above description. There is no need and cannot be exhaustive of all implementations here. And the obvious changes or changes derived from this are still within the protection scope of the present invention.

Claims (10)

1. a kind of test device, for testing the tested device containing radio frequency signal terminal, it is characterised in that: including master Body (1), the detection of the radio frequency made of conductor body (2) is embedded in the main body, and radio frequency detection is equipped with radio frequency elastic probe in vivo (3), the outside of radio frequency elastic probe is enclosed with insulation sleeve (4)；Radio frequency detection, which is additionally provided with more rhizospheres in vivo and is wound on, is enclosed with insulation Assistant spring probe (5) around the radio frequency elastic probe of set；The upper end that radio frequency detects body (2) is equipped with can be respectively for radio frequency elasticity The perforation that probe (3) He Duogen assistant spring probe (5) is pierced by；The upper end of radio frequency elastic probe (3) can be penetrated with tested device The contact of frequency signal terminal, the lower end of radio frequency elastic probe and radio-frequency cable inner conductor are conductively connected, and assistant spring probe is direct Body conductive contact is detected with radio frequency；The lower end of radio frequency detection body can be connect with radio-frequency cable.

2. test device according to claim 1, it is characterised in that: the main body (1) includes that panel (11) and setting exist The bottom plate (12) of below the panel, radio frequency detection body (2) include being embedded the upper inserts (21) in panel (11) and being embedded Lower inserts (22) in bottom plate (12), upper inserts (21) and lower inserts (22) are made of conductor；It is set in the upper inserts (21) There is a first through hole vertically extended, the radio frequency elastic probe (3) and is wrapped in the insulation of radio frequency elastic probe (3) outside Set (4) is plugged in first through hole along the axial direction of first through hole；The more assistant spring probes are embedded in upper inserts (21), And it is centered around around the radio frequency elastic probe (3) for being enclosed with insulation sleeve, while the lower end of more assistant spring probes (5) is embedding under Part (22) conductive contact；The second through-hole vertically extended is equipped in the lower inserts (22), first through hole and first are led to Hole coaxial arrangement, the second through-hole is interior to be equipped with the lower insulation sleeve (8) plugged along the axial direction of the second through-hole, is equipped in lower insulation sleeve (8) With the radio frequency inner conductor (9) of radio frequency elastic probe conductive contact.

3. test device according to claim 2, it is characterised in that: the upper inserts (21) is in first through hole top end shape At there is upper compensation step (21a)；Lower compensation step (9a) is formed in the middle part of the inner conductor (9)；Under radio frequency elastic probe (3) End is tapered, and is formed with gap between insulation sleeve (4) inner wall.

4. test device according to claim 3, it is characterised in that: radio frequency inner conductor (9) lower end is provided with for radio frequency The slot (91) of connector inner conductor insertion；The lower insulation sleeve lower part, which is equipped with, prevents radio frequency inner conductor and radio-frequency cable outer conductive The insulation spacer of shell short circuit.

5. according to test device described in Claims 2 or 3 or 4, it is characterised in that: be also embedded with low frequency in the panel (11) Elastic probe, the interior corresponding position of the bottom plate (12) is equipped with can be with the low frequency contact pin (23) of low-frequency elastic probe conductive contact.

6. test device according to claim 5, it is characterised in that: be also embedded with ground connection elasticity in the panel (11) and visit Needle, the interior corresponding position of the bottom plate (12) is equipped with can be with the ground connection contact pin (24) of ground connection elastic probe conductive contact.

7. test device according to claim 6, it is characterised in that: the main body (1) is externally provided with metal shell, metal-back Metal bottom shell is equipped with below body, metal bottom shell is equipped with radio frequency and detects interface, and the radio frequency inner conductor of radio frequency detection body passes through radio frequency Cable is electrically connected with radio frequency detection interface；Low frequency detection interface is additionally provided in metal bottom shell, low frequency contact pin and low frequency detect interface It is conductively connected by conducting wire；It is grounded contact pin and metal shell conductive contact.

8. test device according to claim 7, it is characterised in that: the top of the metal shell is additionally provided with upper cover, on Lid is flexibly connected with metal shell by buckle；The corresponding position of the upper Gai Shangyu measurand is provided with through-hole observation window, should The removable insole pieces of energy elastic compression tested device are equipped in through-hole observation window.

9. the test device stated according to claim 2, it is characterised in that: one is made in the panel (11) and upper inserts (21) Part is made of engineering plastics material.

10. the test device stated according to claim 5, it is characterised in that: the panel (11) and upper inserts (21) use monolith Metal is made, and the periphery of low-frequency elastic probe locations is equipped with insulation wrap member, forms new independent inserts, is embedded in panel (11) It is interior.