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CN110429464A - A high power laser beam combiner - Google Patents

A high power laser beam combiner Download PDF

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Publication number
CN110429464A
CN110429464A CN201910653712.6A CN201910653712A CN110429464A CN 110429464 A CN110429464 A CN 110429464A CN 201910653712 A CN201910653712 A CN 201910653712A CN 110429464 A CN110429464 A CN 110429464A
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optical fiber
beam combiner
glass tube
laser beam
power laser
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孙振忠
朱宝华
王皓亮
路崧
邓君
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Dongguan University of Technology
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Dongguan University of Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/245Removing protective coverings of light guides before coupling
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/25Preparing the ends of light guides for coupling, e.g. cutting
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/255Splicing of light guides, e.g. by fusion or bonding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383Parallel arrangements

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Mechanical Coupling Of Light Guides (AREA)

Abstract

The invention discloses a high-power laser beam combiner, which belongs to the field of lasers and comprises a laser generating unit and a sensing module; the laser generation unit is used for welding optical fibers output by the plurality of LD modules on the beam combiner, and selecting a proper tapering ratio and a proper cutting angle by preprocessing the quartz glass tube and the optical fibers, so that tapering loss is reduced, the uniformity of a welding point is improved, bubbles are reduced, the precision of optical fiber beam combination processing is improved, the output power of the optical fiber beam combiner is improved, and the stability of a device is improved; the sensing module comprises multiple monitoring of power acquisition, temperature, humidity, scattering PD and transmission open circuit, the sensor module is positioned inside the LD module and carries out multiple monitoring based on the ARM and the FPGA module, the spatial resolution of the system is ensured under high-speed acquisition, and meanwhile, the signal can be processed in real time to improve the signal-to-noise ratio of the signal.

Description

一种高功率激光器合束器A high power laser beam combiner

技术领域technical field

本发明属于激光器领域,特别是涉及一种高功率激光器合束器。The invention belongs to the field of lasers, in particular to a high-power laser beam combiner.

背景技术Background technique

光纤激光器具有转化效率高、光束质量好、结构紧凑以及维护方便的优点,在科学研究、工业制造、国防安全等领域得到了广泛的应用,随着高功率、高亮度LD和双包层光纤制造工艺的发展,光纤激光器输出功率不断提高,目前单根单模光纤激光器输出功率已经达到万瓦级,并且存在一定的提升空间,然而由于热损伤、非线性效应、光纤端面损伤、热透镜效应等因素的制约,单根单模光纤激光器的输出功率不可能无限提升,因此需要通过合成技术提高光纤激光器的输出功率。Fiber laser has the advantages of high conversion efficiency, good beam quality, compact structure and convenient maintenance. It has been widely used in scientific research, industrial manufacturing, national defense security and other fields. With the development of technology, the output power of fiber laser has been continuously improved. At present, the output power of a single single-mode fiber laser has reached 10,000 watts, and there is a certain room for improvement. However, due to thermal damage, nonlinear effects, fiber end face damage, thermal lens effect, etc. Restricted by factors, the output power of a single single-mode fiber laser cannot be increased infinitely, so it is necessary to increase the output power of the fiber laser through synthesis technology.

激光合束是大幅提升激光输出功率和辐射亮度的有效手段,主要是将多束激光组合成一束输出,目前激光合束的方法有空间耦合法和光纤合束法,空间耦合法是利用固体光学器件将光耦合进光纤,利用对泵浦光高透、对信号光高反的透镜将泵浦光和信号光一同耦合进双包层光纤,实现信号光的放大,采用空间耦合法效率比较低,只有60%-70%左右,且利用固体的透镜组合,稳定性较差;光纤合束法是通过熔融拉锥光纤束的基础上制备光纤合束器,光纤合束器是高功率光纤激光器的重要器件之一,对高功率光纤激光器未来的发展起着举足轻重的作用,它是无源器件,可以使得功率定向传输,在高功率全纤化激光器中扮演着重要的角色,光纤合束器具有耦合效率高、操作方便、易实现全纤化,适宜在高功率下使用等优点。Laser beam combining is an effective means to greatly increase laser output power and radiance. It mainly combines multiple laser beams into one output beam. At present, laser beam combining methods include spatial coupling method and optical fiber beam combining method. The spatial coupling method uses solid-state optics The device couples light into the optical fiber, and uses a lens with high transparency to the pump light and high reflection to the signal light to couple the pump light and the signal light into the double-clad fiber to realize the amplification of the signal light. The efficiency of the spatial coupling method is relatively low , only about 60%-70%, and the use of solid lens combination has poor stability; the fiber combining method is to prepare a fiber combiner on the basis of melting the tapered fiber bundle, and the fiber combiner is a high-power fiber laser One of the most important devices, it plays a pivotal role in the future development of high-power fiber lasers. It is a passive device that enables directional transmission of power and plays an important role in high-power all-fiber lasers. Fiber combiners It has the advantages of high coupling efficiency, convenient operation, easy realization of full fiber, suitable for use under high power, etc.

目前光纤合束器在制备工艺主要分为旋转法和套管法,旋转法通过多根光纤束缠绕,加热拉锥使光纤熔接在一起,制成光纤束,在光纤束较细的地方切割,并与输出光纤熔接,制成光纤合束器,但此方法制备的光纤合束器功率不高;套管法是通过将多根光纤穿入石英套管中,然后通过加热拉锥使套管和光纤熔融在一起,然后切割与输出光纤熔接,套管法制备的光纤合束器在输出功率上有较大的优势,但是在套管拉锥方面工艺技术要求较高,加工精度较高,操作不当容易造成光纤的结构遭到破坏。At present, the preparation process of optical fiber combiner is mainly divided into rotation method and sleeve method. The rotation method winds multiple optical fiber bundles, heats the tapered fibers to fuse them together, and makes optical fiber bundles, which are cut at the thinner fiber bundles. And it is fused with the output fiber to make a fiber combiner, but the power of the fiber combiner prepared by this method is not high; the sleeve method is to pass multiple optical fibers into the quartz sleeve, and then heat the tapered sleeve to make the sleeve It is fused together with the optical fiber, and then cut and fused with the output optical fiber. The fiber combiner prepared by the sleeve method has a greater advantage in output power, but the technical requirements for the sleeve taper are higher, and the processing accuracy is higher. Improper operation can easily cause damage to the structure of the optical fiber.

中国专利授权公告号 CN201621024211.X ,发明名称为一种中红外波段光纤抽运/信号合束器,该发明采用的信号光纤的纤芯材料为纯二氧化锗材料,光纤组束的拉锥区的拉锥比例在1~3之间,光纤组束与输出光纤熔接,虽然该方法可以耦合高功率的激光进入输出光纤,但是其不足之处在于,拉锥比例范围较大,信号光纤在此拉锥比例范围内的损耗较大。China Patent Authorization Announcement No. CN201621024211.X, the name of the invention is a mid-infrared band optical fiber pumping/signal combiner, the core material of the signal optical fiber used in this invention is pure germanium dioxide material, and the tapered region of the optical fiber bundle The taper ratio is between 1 and 3, and the fiber bundle is fused with the output fiber. Although this method can couple high-power lasers into the output fiber, its disadvantage is that the range of the taper ratio is large, and the signal fiber is here The loss in the ratio range of the tapering is larger.

发明内容Contents of the invention

针对传统光纤合束器中耦合效率低、稳定性差、操作工艺精度要求较高的问题,本发明提供了一种高功率激光器合束器,通过采用光纤合束法代替空间耦合合束法,对石英玻璃管、光纤进行预处理,选择合适的拉锥比和切割角度,减小了拉锥损耗,提高光纤合束加工的精度,提高光纤合束器的输出功率,同时基于ARM和FPGA模块进行功率采集、温度、湿度、散射PD、传输断路的多重监控。Aiming at the problems of low coupling efficiency, poor stability, and high requirements for operating process precision in traditional fiber optic beam combiners, the present invention provides a high-power laser beam combiner, which replaces the spatial coupling beam combining method with optical fiber beam combining, and Quartz glass tubes and optical fibers are pretreated, and the appropriate taper ratio and cutting angle are selected to reduce the taper loss, improve the precision of fiber combining processing, and increase the output power of the fiber combiner. At the same time, it is based on ARM and FPGA modules. Multiple monitoring of power collection, temperature, humidity, scattered PD, and transmission disconnection.

一种高功率激光器合束器,包括激光发生单元、传感模块;其中激光发生单元通过将多个LD模块输出的光纤熔接在合束器上,传感模块包括功率采集、温度、湿度、散射PD、传输断路的多重监控,且传感器模块位于LD模块内部。A high-power laser beam combiner, including a laser generating unit and a sensing module; wherein the laser generating unit fuses the optical fibers output by multiple LD modules to the beam combiner, and the sensing module includes power collection, temperature, humidity, and scattering Multiple monitoring of PD, transmission break, and the sensor module is located inside the LD module.

进一步,所述合束器包括多根输入光纤和一根输出光纤,输入光纤的数量与光纤激光器的数量一致,所述多根输入光纤的一端分别与多个光纤激光器模块的输出信号光纤熔接,另一端经熔融拉锥后,截断锥区与输出光纤的一端熔接。Further, the beam combiner includes a plurality of input fibers and an output fiber, the number of input fibers is consistent with the number of fiber lasers, and one end of the plurality of input fibers is respectively fused with output signal fibers of a plurality of fiber laser modules, After the other end is fused and tapered, the truncated cone area is fused with one end of the output fiber.

进一步,所述合束器的制备方法,包括以下步骤:Further, the preparation method of the beam combiner comprises the following steps:

(1)玻璃管准备:准备一根石英玻璃管,玻璃套管端口使用金刚石进行光滑处理,光滑处理后进行超声波清洗;(1) Glass tube preparation: prepare a quartz glass tube, use diamond to smooth the end of the glass sleeve, and perform ultrasonic cleaning after smoothing;

(2)玻璃管第一次拉锥:将玻璃管进行第一次拉锥,使玻璃套管内径略大于光纤束直径;(2) The first tapering of the glass tube: Taper the glass tube for the first time, so that the inner diameter of the glass sleeve is slightly larger than the diameter of the optical fiber bundle;

(3)光纤处理:将输入光纤一端除去涂覆层,另一端用胶带固定;(3) Optical fiber treatment: remove the coating from one end of the input optical fiber, and fix the other end with adhesive tape;

(4)穿入光纤:将光纤的裸纤部分从靠近短锥区一端在酒精润滑作用下缓慢插入到玻璃套管中;(4) Penetrating the optical fiber: slowly insert the bare fiber part of the optical fiber into the glass sleeve under the action of alcohol lubrication from the end close to the short tapered area;

(5)光纤束二次拉锥:将光纤束和玻璃管一起二次拉锥;(5) Secondary taper of optical fiber bundle: the second taper of optical fiber bundle and glass tube together;

(6)光纤束切割和熔接:对石英玻璃管外侧加热,加热温度为1700℃,使石英玻璃管,输入光纤,石英玻璃管熔为一体,使用光纤切割刀对其进行切割,并与一根大芯径传导光纤熔接;(6) Optical fiber bundle cutting and welding: heat the outside of the quartz glass tube at a temperature of 1700°C to fuse the quartz glass tube, input optical fiber, and quartz glass tube into one, cut it with an optical fiber cutter, and combine it with a Splicing of large core diameter conductive optical fiber;

(7)热封装:使用外封管对熔接处进行封套保护。(7) Heat sealing: Use an outer sealing tube to protect the weld joint.

进一步,所述步骤(1)中所述石英玻璃管为掺氟石英管。Further, the quartz glass tube in the step (1) is a fluorine-doped quartz tube.

由于在对玻璃管进行拉锥时,熔融状态的温度越高,玻璃管的粘性就会越小,即使在拉锥速度一样的前提下,玻璃管比较薄的地方容易变形,导致拉锥后的玻璃管不是正圆形,进而影响合束器的稳定性,而掺氟石英管的玻璃管减少了误差,因此可以减少变形导致合束器的不稳定性。When tapering the glass tube, the higher the temperature of the molten state, the smaller the viscosity of the glass tube. Even under the same premise of the tapering speed, the thinner part of the glass tube is easy to deform, resulting in The glass tube is not a perfect circle, which affects the stability of the beam combiner, and the glass tube of the fluorine-doped quartz tube reduces the error, so it can reduce the instability of the beam combiner caused by deformation.

进一步,所述步骤(4)中所述光纤穿好后需要将玻璃管中的残余酒精处理干净再进行拉锥。Further, after the optical fiber in the step (4) is threaded, the residual alcohol in the glass tube needs to be cleaned before being tapered.

由于酒精没有处理干净,在高温熔融状态下,酒精挥发导致玻璃管内壁烧黑,所以实验中采用真空泵来处理玻璃管内的残留酒精,避免因酒精挥发导致玻璃管内壁烧黑。Since the alcohol is not cleaned, in the high-temperature melting state, the alcohol volatilizes and causes the inner wall of the glass tube to burn black. Therefore, a vacuum pump is used in the experiment to deal with the residual alcohol in the glass tube to avoid the inner wall of the glass tube being burnt black due to alcohol volatilization.

进一步,所述步骤(4)中,当光纤束穿入玻璃管后,通过显微镜对光纤束进行微调整。Further, in the step (4), after the optical fiber bundle penetrates into the glass tube, the optical fiber bundle is fine-tuned through a microscope.

由于光纤束穿入玻璃管后,光纤之间会存在应力和交叉,导致玻璃管中光纤束中排布不均匀,因此当光纤束穿入玻璃管后,通过显微镜对光纤束进行微调整,可以确保每根光纤的裸光纤全部穿入到石英玻璃管的锥区,保证光纤中不存在应力,无盘绕,在玻璃管中排列均匀,实现光纤束的拉锥。Since the optical fiber bundles are inserted into the glass tube, there will be stress and crossing between the optical fibers, resulting in uneven distribution of the optical fiber bundles in the glass tube. Ensure that the bare optical fiber of each optical fiber penetrates into the tapered area of the quartz glass tube to ensure that there is no stress in the optical fiber, no coils, and the arrangement is uniform in the glass tube to realize the tapering of the optical fiber bundle.

进一步,所述步骤(5)中,实验中输入光纤的拉锥长度设置为13mm,拉锥比例为1.3。Further, in the step (5), the length of the tapered input fiber in the experiment is set to 13 mm, and the tapered ratio is set to 1.3.

其中光纤的包层和纤芯随着拉锥过程的进行逐渐减小,当纤芯减小后,在纤芯中传输的光进入包层,减小拉锥损耗,提高器件的稳定性。Among them, the cladding and core of the optical fiber gradually decrease with the tapering process. When the core is reduced, the light transmitted in the core enters the cladding, reducing the tapering loss and improving the stability of the device.

进一步,所述步骤(6)中光纤束的切割角度控制在0.5度以内。Further, the cutting angle of the optical fiber bundle in the step (6) is controlled within 0.5 degrees.

在光纤束切割过程中,切割角度过大容易造成熔接点不均匀,有气泡产生,当切割角度较小时,可以提高熔接点的均匀性,减少气泡的产生,进而提高器件的稳定性。During the fiber bundle cutting process, if the cutting angle is too large, it will easily cause uneven fusion points and bubbles. When the cutting angle is small, the uniformity of fusion points can be improved, the generation of bubbles can be reduced, and the stability of the device can be improved.

进一步,所述步骤(6)中对石英玻璃管外侧加热采用的三电极环火方式进行加热。Further, in the step (6), the outer side of the quartz glass tube is heated by a three-electrode ring fire method.

采用三电极环火方式进行加热光纤组束受热均匀,拉锥出的光纤束椎体均匀变化,且电极不易损害及氧化,使用寿命相对较长,节约成本,相较于氢氧焰加热拉锥,无需控制气体流速,操作安全。The three-electrode ring fire method is used to heat the fiber bundle evenly, the cone of the fiber bundle out of the taper changes uniformly, and the electrodes are not easy to damage and oxidize, the service life is relatively long, and the cost is saved. Compared with the hydrogen-oxygen flame heating the taper , no need to control the gas flow rate, safe operation.

进一步,所述传感模块为基于ARM和FPGA模块进行多重监控。Further, the sensing module is based on ARM and FPGA modules for multiple monitoring.

由于ARM处理器有着指令长度固定、性能较好、成本较低等优点,在本发明中,ARM处理器主要负责两个功能:接收客户端传入的配置信息并对传感系统进行流程控制,将传感器得到的功率、温度、湿度、散射PD、传输断路的数据进行处理计算;FPGA模块用于将ARM传输的数据做分析运算,FPGA模块既能够对背向散射信号进行高速采集确保了系统的空间分辨率,同时又能够对信号进行实时处理提高信号的信噪比。Because the ARM processor has the advantages of fixed instruction length, better performance, and lower cost, in the present invention, the ARM processor is mainly responsible for two functions: receiving configuration information from the client and controlling the flow of the sensor system, Process and calculate the power, temperature, humidity, scattered PD, and transmission disconnection data obtained by the sensor; the FPGA module is used to analyze and calculate the data transmitted by the ARM. Spatial resolution, and at the same time, it can process the signal in real time to improve the signal-to-noise ratio of the signal.

本发明的工作原理:通过采用非相干合束进行辐射功率的叠加,采用光纤合束法通过熔融拉锥光纤束的基础上制备光纤合束器,在使用套管法制备光纤合束器的过程中使用掺氟石英管减少拉锥过程中变形所造成的合束器的不稳定性;通过显微镜对光纤束进行微调整保证光纤中不存在应力,无盘绕,在玻璃管中排列均匀,实现光纤束的拉锥;设置适宜的拉锥比例以及切割角度,减小了拉锥损耗,提高熔接点的均匀性,减少气泡的产生,进而提高器件的稳定性。The working principle of the present invention: superimpose the radiation power by adopting incoherent beam combining, adopt the optical fiber beam combining method to prepare the optical fiber beam combiner on the basis of melting the tapered fiber bundle, and prepare the optical fiber beam combiner by using the sleeve method The fluorine-doped quartz tube is used in the process to reduce the instability of the beam combiner caused by the deformation during the tapering process; the fiber bundle is fine-tuned through a microscope to ensure that there is no stress in the fiber, no coils, and the arrangement is uniform in the glass tube, realizing the fiber The taper of the beam; setting the appropriate taper ratio and cutting angle reduces the loss of the taper, improves the uniformity of the welding point, reduces the generation of air bubbles, and improves the stability of the device.

有益效果Beneficial effect

(1)本发明采用光纤合束法代替空间耦合合束法,对石英玻璃管、光纤进行预处理,选择合适的拉锥比和切割角度,减小了拉锥损耗,提高光纤合束加工的精度,提高光纤合束器的输出功率,同时基于ARM和FPGA模块进行功率采集、温度、湿度、散射PD、传输断路的多重监控。(1) The present invention adopts the optical fiber beam combining method instead of the space coupling beam combining method, pre-treats the quartz glass tube and the optical fiber, selects the appropriate tapering ratio and cutting angle, reduces the tapering loss, and improves the processing efficiency of the optical fiber beam combining. Accuracy, improve the output power of the fiber combiner, and perform multiple monitoring of power collection, temperature, humidity, scattering PD, and transmission disconnection based on ARM and FPGA modules.

(2)本发明中光纤剥除采用热剥除法进行,与机械剥除和化学剥除相比,减少了光纤包层表面的损伤,提高了合束器的稳定性。(2) In the present invention, the optical fiber stripping is carried out by thermal stripping, which reduces the damage on the surface of the optical fiber cladding and improves the stability of the beam combiner compared with mechanical stripping and chemical stripping.

(3)本发明使用三电极环火方式进行加热,使光纤组束受热均匀,拉锥出的光纤束椎体均匀变化,且电极不易损害及氧化,使用寿命相对较长,节约成本,相较于氢氧焰加热拉锥,无需控制气体流速,操作安全。(3) The present invention uses a three-electrode ring fire method for heating, so that the optical fiber bundles are heated evenly, and the cones of the optical fiber bundles produced by the taper change uniformly, and the electrodes are not easy to be damaged and oxidized, and the service life is relatively long, saving costs. The bicone is heated by an oxyhydrogen flame, no need to control the gas flow rate, and the operation is safe.

(4)本发明实验中设置了合适的拉锥比,减小了在光纤束和玻璃管一起进行拉锥过程中的拉锥损耗,提高器件的稳定性。(4) In the experiment of the present invention, an appropriate tapering ratio is set, which reduces the tapering loss during the tapering process of the optical fiber bundle and the glass tube, and improves the stability of the device.

(5)本发明光纤束的切割角度控制在0.5度以内,在光纤束切割过程中,切割角度过大容易造成熔接点不均匀,有气泡产生,当切割角度较小时,可以提高熔接点的均匀性,减少气泡的产生,进而提高器件的稳定性。(5) The cutting angle of the optical fiber bundle of the present invention is controlled within 0.5 degrees. During the cutting process of the optical fiber bundle, if the cutting angle is too large, it will easily cause unevenness of the fusion splicing point, and bubbles will be generated. When the cutting angle is small, the uniformity of the fusion splicing point can be improved. Sex, reduce the generation of air bubbles, and then improve the stability of the device.

附图说明Description of drawings

图1为7×1合束器单臂输出功率测试光路图;Figure 1 is the optical circuit diagram of the single-arm output power test of the 7×1 beam combiner;

图2为7×1合束器单臂输入功率测试光路图。Figure 2 is the optical circuit diagram of the single-arm input power test of the 7×1 beam combiner.

具体实施方式Detailed ways

以下将结合附图对本发明各实施例的技术方案进行清楚、完整的描述,显然,所描述的实施例仅仅是本发明的一部分实施例,而不是全部的实施例;基于本发明的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所得到的所有其它实施例,都属于本发明所保护的范围。The technical solutions of the various embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them; based on the embodiments of the present invention, All other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

实施例1Example 1

一种高功率激光器合束器,包括激光发生单元、传感模块;其中激光发生单元通过将多个LD模块输出的光纤熔接在合束器上,传感模块包括功率采集、温度、湿度、散射PD、传输断路的多重监控,且传感器模块位于LD模块内部。A high-power laser beam combiner, including a laser generating unit and a sensing module; wherein the laser generating unit fuses the optical fibers output by multiple LD modules to the beam combiner, and the sensing module includes power collection, temperature, humidity, and scattering Multiple monitoring of PD, transmission break, and the sensor module is located inside the LD module.

进一步,所述合束器包括多根输入光纤和一根输出光纤,输入光纤的数量与光纤激光器的数量一致,所述多根输入光纤的一端分别与多个光纤激光器模块的输出信号光纤熔接,另一端经熔融拉锥后,截断锥区与输出光纤的一端熔接。Further, the beam combiner includes a plurality of input fibers and an output fiber, the number of input fibers is consistent with the number of fiber lasers, and one end of the plurality of input fibers is respectively fused with output signal fibers of a plurality of fiber laser modules, After the other end is fused and tapered, the truncated cone area is fused with one end of the output fiber.

进一步,所述合束器的制备方法,包括以下步骤:Further, the preparation method of the beam combiner comprises the following steps:

(1)玻璃管准备:准备一根石英玻璃管,玻璃套管端口使用金刚石进行光滑处理,光滑处理后进行超声波清洗;(1) Glass tube preparation: prepare a quartz glass tube, use diamond to smooth the end of the glass sleeve, and perform ultrasonic cleaning after smoothing;

(2)玻璃管第一次拉锥:将玻璃管进行第一次拉锥,使玻璃套管内径略大于光纤束直径;(2) The first tapering of the glass tube: Taper the glass tube for the first time, so that the inner diameter of the glass sleeve is slightly larger than the diameter of the optical fiber bundle;

(3)光纤处理:将输入光纤一端除去涂覆层,另一端用胶带固定;(3) Optical fiber treatment: remove the coating from one end of the input optical fiber, and fix the other end with adhesive tape;

(4)穿入光纤:将光纤的裸纤部分从靠近短锥区一端在酒精润滑作用下缓慢插入到玻璃套管中;(4) Penetrating the optical fiber: slowly insert the bare fiber part of the optical fiber into the glass sleeve under the action of alcohol lubrication from the end close to the short tapered area;

(5)光纤束二次拉锥:将光纤束和玻璃管一起二次拉锥;(5) Secondary taper of optical fiber bundle: the second taper of optical fiber bundle and glass tube together;

(6)光纤束切割和熔接:对石英玻璃管外侧加热,加热温度为1700℃,使石英玻璃管,输入光纤,石英玻璃管熔为一体,使用光纤切割刀对其进行切割,并与一根大芯径传导光纤熔接;(6) Optical fiber bundle cutting and welding: heat the outside of the quartz glass tube at a temperature of 1700°C to fuse the quartz glass tube, input optical fiber, and quartz glass tube into one, cut it with an optical fiber cutter, and combine it with a Splicing of large core diameter conductive optical fiber;

(7)热封装:使用外封管对熔接处进行封套保护。(7) Heat sealing: Use an outer sealing tube to protect the weld joint.

进一步,所述步骤(1)中所述石英玻璃管为掺氟石英管。Further, the quartz glass tube in the step (1) is a fluorine-doped quartz tube.

由于在对玻璃管进行拉锥时,熔融状态的温度越高,玻璃管的粘性就会越小,即使在拉锥速度一样的前提下,玻璃管比较薄的地方容易变形,导致拉锥后的玻璃管不是正圆形,进而影响合束器的稳定性,而掺氟石英管的玻璃管减少了误差,因此可以减少变形导致合束器的不稳定性。When tapering the glass tube, the higher the temperature of the molten state, the smaller the viscosity of the glass tube. Even under the same premise of the tapering speed, the thinner part of the glass tube is easy to deform, resulting in The glass tube is not a perfect circle, which affects the stability of the beam combiner, and the glass tube of the fluorine-doped quartz tube reduces the error, so it can reduce the instability of the beam combiner caused by deformation.

进一步,所述步骤(4)中所述光纤穿好后需要将玻璃管中的残余酒精处理干净再进行拉锥。Further, after the optical fiber in the step (4) is threaded, the residual alcohol in the glass tube needs to be cleaned before being tapered.

由于酒精没有处理干净,在高温熔融状态下,酒精挥发导致玻璃管内壁烧黑,所以实验中采用真空泵来处理玻璃管内的残留酒精,避免因酒精挥发导致玻璃管内壁烧黑。Since the alcohol is not cleaned, in the high-temperature melting state, the alcohol volatilizes and causes the inner wall of the glass tube to burn black. Therefore, a vacuum pump is used in the experiment to deal with the residual alcohol in the glass tube to avoid the inner wall of the glass tube being burnt black due to alcohol volatilization.

进一步,所述步骤(4)中,当光纤束穿入玻璃管后,通过显微镜对光纤束进行微调整。Further, in the step (4), after the optical fiber bundle penetrates into the glass tube, the optical fiber bundle is fine-tuned through a microscope.

由于光纤束穿入玻璃管后,光纤之间会存在应力和交叉,导致玻璃管中光纤束中排布不均匀,因此当光纤束穿入玻璃管后,通过显微镜对光纤束进行微调整,可以确保每根光纤的裸光纤全部穿入到石英玻璃管的锥区,保证光纤中不存在应力,无盘绕,在玻璃管中排列均匀,实现光纤束的拉锥。Since the optical fiber bundles are inserted into the glass tube, there will be stress and crossing between the optical fibers, resulting in uneven distribution of the optical fiber bundles in the glass tube. Ensure that the bare optical fiber of each optical fiber penetrates into the tapered area of the quartz glass tube to ensure that there is no stress in the optical fiber, no coils, and the arrangement is uniform in the glass tube to realize the tapering of the optical fiber bundle.

进一步,所述步骤(5)中,实验中输入光纤的拉锥长度设置为13mm,拉锥比例为1.3。Further, in the step (5), the length of the tapered input fiber in the experiment is set to 13 mm, and the tapered ratio is set to 1.3.

其中光纤的包层和纤芯随着拉锥过程的进行逐渐减小,当纤芯减小后,在纤芯中传输的光进入包层,减小拉锥损耗,提高器件的稳定性。Among them, the cladding and core of the optical fiber gradually decrease with the tapering process. When the core is reduced, the light transmitted in the core enters the cladding, reducing the tapering loss and improving the stability of the device.

进一步,所述步骤(6)中光纤束的切割角度控制在0.5度以内。Further, the cutting angle of the optical fiber bundle in the step (6) is controlled within 0.5 degrees.

在光纤束切割过程中,切割角度过大容易造成熔接点不均匀,有气泡产生,当切割角度较小时,可以提高熔接点的均匀性,减少气泡的产生,进而提高器件的稳定性。During the fiber bundle cutting process, if the cutting angle is too large, it will easily cause uneven fusion points and bubbles. When the cutting angle is small, the uniformity of fusion points can be improved, the generation of bubbles can be reduced, and the stability of the device can be improved.

进一步,所述步骤(6)中对石英玻璃管外侧加热采用的三电极环火方式进行加热。Further, in the step (6), the outer side of the quartz glass tube is heated by a three-electrode ring fire method.

采用三电极环火方式进行加热光纤组束受热均匀,拉锥出的光纤束椎体均匀变化,且电极不易损害及氧化,使用寿命相对较长,节约成本,相较于氢氧焰加热拉锥,无需控制气体流速,操作安全。The three-electrode ring fire method is used to heat the fiber bundle evenly, the cone of the fiber bundle out of the taper changes uniformly, and the electrodes are not easy to damage and oxidize, the service life is relatively long, and the cost is saved. Compared with the hydrogen-oxygen flame heating the taper , no need to control the gas flow rate, safe operation.

进一步,所述传感模块为基于ARM和FPGA模块进行多重监控。Further, the sensing module is based on ARM and FPGA modules for multiple monitoring.

由于ARM处理器有着指令长度固定、性能较好、成本较低等优点,在本发明中,ARM处理器主要负责两个功能:接收客户端传入的配置信息并对传感系统进行流程控制,将传感器得到的功率、温度、湿度、散射PD、传输断路的数据进行处理计算;FPGA模块用于将ARM传输的数据做分析运算,FPGA模块既能够对背向散射信号进行高速采集确保了系统的空间分辨率,同时又能够对信号进行实时处理提高信号的信噪比。Because the ARM processor has the advantages of fixed instruction length, better performance, and lower cost, in the present invention, the ARM processor is mainly responsible for two functions: receiving configuration information from the client and controlling the flow of the sensor system, Process and calculate the power, temperature, humidity, scattered PD, and transmission disconnection data obtained by the sensor; the FPGA module is used to analyze and calculate the data transmitted by the ARM. Spatial resolution, and at the same time, it can process the signal in real time to improve the signal-to-noise ratio of the signal.

实施例2Example 2

在实施例1的基础上,本实施例采用的玻璃管为低折射率掺氟玻璃管,其纤芯数值孔径为0.22,输入光纤采用的是20/250um光纤,纤芯数值孔径为0.06,输出光纤采用的是20/400um大功率传能光纤,纤芯数值孔径为0.22,拉锥比例为1.3,拉锥长度为13mm,制备出7×1型光纤合束器。On the basis of Example 1, the glass tube used in this example is a low-refractive-index fluorine-doped glass tube with a core numerical aperture of 0.22. The input optical fiber is a 20/250um optical fiber with a core numerical aperture of 0.06. The optical fiber is a 20/400um high-power energy-transfer optical fiber with a core numerical aperture of 0.22, a tapered ratio of 1.3, and a tapered length of 13mm. A 7×1 fiber combiner is prepared.

将7×1型光纤合束器进行耐受功率测试,如图1所示,图1为7×1合束器单臂输出功率测试光路图,测试前用7个DL光源分别与7×1型合束器的7根单臂光纤熔接,在输出光纤末端切一零度角,并将功率计对准出射光斑,测试时,记录相应DL加载一定电流时第n根光纤所对应的输出功率Pn,完成以上测试后,进行单臂输入功率测试,如图2所示,图2为7×1合束器单臂输入功率测试光路图,保留DL与每个臂的熔接点,将合束器的单臂减掉一段,进行光路测试相应DL加载相同电流时的第n根光纤的初始功率值Pn /,第n根光纤的传输效率ηn,ηn=Pn/Pn /,耦合损耗Li=-10log(ηn)db,可以得到该合束器的输出功率为1634w,合束器的平均耦合效率为99.1%,耦合损耗为0.03db。The withstand power test of the 7×1 fiber combiner is shown in Figure 1. Figure 1 is the optical circuit diagram of the single-arm output power test of the 7×1 beam combiner. The 7 single-arm optical fibers of the type beam combiner are fused, and a zero-degree angle is cut at the end of the output optical fiber, and the power meter is aligned with the outgoing spot. During the test, record the output power corresponding to the nth optical fiber when the corresponding DL is loaded with a certain current. P n , after completing the above tests, conduct a single-arm input power test, as shown in Figure 2, Figure 2 is a 7×1 beam combiner single-arm input power test optical circuit diagram, the fusion point between DL and each arm is reserved, and the combined One section is subtracted from the single arm of the beamer, and the optical path test is carried out. The initial power value P n / of the nth optical fiber when the corresponding DL is loaded with the same current, and the transmission efficiency η n of the nth optical fiber, η n= P n /P n / , coupling loss L i =-10log(η n )db, it can be obtained that the output power of the beam combiner is 1634w, the average coupling efficiency of the beam combiner is 99.1%, and the coupling loss is 0.03db.

对比例1Comparative example 1

在实施例1的基础上,本实施例采用的玻璃管为低折射率掺氟玻璃管,其纤芯数值孔径为0.22,输入光纤采用的是20/250um光纤,纤芯数值孔径为0.06,输出光纤采用的是20/400um大功率传能光纤,纤芯数值孔径为0.22,拉锥比例为2,拉锥长度为20mm,制备出7×1型光纤合束器。On the basis of Example 1, the glass tube used in this example is a low-refractive-index fluorine-doped glass tube with a core numerical aperture of 0.22. The input optical fiber is a 20/250um optical fiber with a core numerical aperture of 0.06. The optical fiber is a 20/400um high-power energy-transfer optical fiber with a core numerical aperture of 0.22, a tapered ratio of 2, and a tapered length of 20mm. A 7×1 fiber combiner is prepared.

将此7×1型光纤合束器进行耐受功率测试,得到该合束器的输出功率为1075w,合束器的平均耦合效率为65.1%,耦合损耗为1.86db。The withstand power test of the 7×1 fiber combiner shows that the output power of the combiner is 1075w, the average coupling efficiency of the combiner is 65.1%, and the coupling loss is 1.86db.

由实施例2和对比例1的结果可以看出,当拉锥比例较大,拉锥长度较长时,合束器的传输效率降低,这主要是因为,当拉锥比例和拉锥长度尺寸不合理时,会导致拉锥区域产生不平滑现象,进而导致锥体的传输效率降低,当拉锥比例较大,拉锥长度较长时,拉锥区域不平滑现象较严重,因此椎体的传输效率只有65.1%,当拉锥比例为拉锥比例为1.3,拉锥长度为13mm,拉锥过渡区域平滑,锥体的传输效率为99.1%,因此当拉锥比例为1.3,拉锥长度为13mm,锥体的传输效率较高。From the results of Example 2 and Comparative Example 1, it can be seen that when the ratio of the taper is larger and the length of the taper is longer, the transmission efficiency of the beam combiner is reduced. This is mainly because, when the ratio of the taper and the length of the taper When it is unreasonable, it will lead to the unevenness of the tapered area, which will lead to a decrease in the transmission efficiency of the cone. When the ratio of the tapered is large and the length of the tapered is long, the unevenness of the tapered area is serious. The transmission efficiency is only 65.1%. When the ratio of the taper is 1.3, the length of the taper is 13mm, the transition area of the taper is smooth, and the transmission efficiency of the cone is 99.1%. Therefore, when the ratio of the taper is 1.3, the length of the taper is 13mm, the transmission efficiency of the cone is higher.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,根据本发明的技术方案及其发明构思加以等同替换或改变,都应涵盖在本发明的保护范围之内。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto, any person familiar with the technical field within the technical scope disclosed in the present invention, according to the technical solution of the present invention Any equivalent replacement or change of the inventive concepts thereof shall fall within the protection scope of the present invention.

Claims (10)

1.一种高功率激光器合束器,其特征在于,包括激光发生单元、传感模块;其中激光发生单元通过将多个LD模块输出的光纤熔接在合束器上,传感模块包括功率采集、温度、湿度、散射PD、传输断路的多重监控,且传感器模块位于LD模块内部。1. A high-power laser beam combiner is characterized in that it comprises a laser generating unit and a sensing module; wherein the laser generating unit is fused on the beam combiner by the optical fibers output by a plurality of LD modules, and the sensing module includes a power acquisition , temperature, humidity, scattering PD, multiple monitoring of transmission break, and the sensor module is located inside the LD module. 2.根据权利要求1所述的一种高功率激光器合束器,其特征在于,所述合束器包括多根输入光纤和一根输出光纤,输入光纤的数量与光纤激光器的数量一致,所述多根输入光纤的一端分别与多个光纤激光器模块的输出信号光纤熔接,另一端经熔融拉锥后,截断锥区与输出光纤的一端熔接。2. a kind of high power laser beam combiner according to claim 1, is characterized in that, described beam combiner comprises a plurality of input optical fibers and an output optical fiber, the quantity of input optical fiber is consistent with the quantity of fiber laser, so One end of the plurality of input fibers is respectively fused with the output signal fibers of the plurality of fiber laser modules, and the other end is fused and tapered, and the truncated tapered region is fused with one end of the output fiber. 3.根据权利要求1或者2所述的一种高功率激光器合束器,其特征在于,所述合束器的制备方法,包括以下步骤:3. a kind of high-power laser beam combiner according to claim 1 or 2, is characterized in that, the preparation method of described beam combiner, comprises the following steps: (1)玻璃管准备:准备一根石英玻璃管,玻璃套管端口使用金刚石进行光滑处理,光滑处理后进行超声波清洗;(1) Glass tube preparation: prepare a quartz glass tube, use diamond to smooth the end of the glass sleeve, and perform ultrasonic cleaning after smoothing; (2)玻璃管第一次拉锥:将玻璃管进行第一次拉锥,使玻璃套管内径略大于光纤束直径;(2) The first tapering of the glass tube: Taper the glass tube for the first time, so that the inner diameter of the glass sleeve is slightly larger than the diameter of the optical fiber bundle; (3)光纤处理:将输入光纤一端除去涂覆层,另一端用胶带固定;(3) Optical fiber treatment: remove the coating from one end of the input optical fiber, and fix the other end with adhesive tape; (4)穿入光纤:将光纤的裸纤部分从靠近短锥区一端在酒精润滑作用下缓慢插入到玻璃套管中;(4) Penetrating the optical fiber: slowly insert the bare fiber part of the optical fiber into the glass sleeve under the action of alcohol lubrication from the end close to the short tapered area; (5)光纤束二次拉锥:将光纤束和玻璃管一起二次拉锥;(5) Secondary taper of optical fiber bundle: the second taper of optical fiber bundle and glass tube together; (6)光纤束切割和熔接:对石英玻璃管外侧加热,加热温度为1700℃,使石英玻璃管,输入光纤,石英玻璃管熔为一体,使用光纤切割刀对其进行切割,并与一根大芯径传导光纤熔接;(6) Optical fiber bundle cutting and welding: heat the outside of the quartz glass tube at a temperature of 1700°C to fuse the quartz glass tube, input optical fiber, and quartz glass tube into one, cut it with an optical fiber cutter, and combine it with a Splicing of large core diameter conductive optical fiber; (7)热封装:使用外封管对熔接处进行封套保护。(7) Heat sealing: Use an outer sealing tube to protect the weld joint. 4.根据权利要求3所述的一种高功率激光器合束器,其特征在于,所述步骤(1)中所述石英玻璃管为掺氟石英管。4. A high-power laser beam combiner according to claim 3, characterized in that the quartz glass tube in the step (1) is a fluorine-doped quartz tube. 5.根据权利要求3所述的一种高功率激光器合束器,其特征在于,所述步骤(4)中所述光纤穿好后需要将玻璃管中的残余酒精处理干净再进行拉锥。5. A high-power laser beam combiner according to claim 3, characterized in that, after the optical fiber is threaded in the step (4), the residual alcohol in the glass tube needs to be cleaned before tapering. 6.根据权利要求3所述的一种高功率激光器合束器,其特征在于,所述步骤(4)中,当光纤束穿入玻璃管后,通过显微镜对光纤束进行微调整。6 . A high-power laser beam combiner according to claim 3 , characterized in that, in the step (4), after the optical fiber bundle penetrates into the glass tube, the optical fiber bundle is fine-tuned through a microscope. 7.根据权利要求3所述的一种高功率激光器合束器,其特征在于,所述步骤(5)中,实验中输入光纤的拉锥长度设置为13mm,拉锥比例为1.3。7. A high-power laser beam combiner according to claim 3, characterized in that, in the step (5), the length of the taper of the input fiber in the experiment is set to 13 mm, and the taper ratio is 1.3. 8.根据权利要求3所述的一种高功率激光器合束器,其特征在于,所述步骤(6)中光纤束的切割角度控制在0.5度以内。8. A high-power laser beam combiner according to claim 3, characterized in that the cutting angle of the fiber bundle in the step (6) is controlled within 0.5 degrees. 9.根据权利要求3所述的一种高功率激光器合束器,其特征在于,所述步骤(6)中对石英玻璃管外侧加热采用的三电极环火方式进行加热。9 . A high-power laser beam combiner according to claim 3 , characterized in that, in the step (6), the outer side of the quartz glass tube is heated by a three-electrode ring fire method. 10.根据权利要求1所述的一种高功率激光器合束器,其特征在于,所述传感模块为基于ARM和FPGA模块进行多重监控。10. A kind of high-power laser beam combiner according to claim 1, is characterized in that, described sensing module is based on ARM and FPGA module and carries out multiple monitoring.
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