CN110411912A - Particulate Monitoring Module - Google Patents

Abstract

A kind of particulate matter monitoring module, include: a main body, it is made of air guide ontology and monitoring ontology, through the indoor heating element of multiple air storing cavities that air guide ontology is arranged in, to carry out heating and dehumidification into the intrinsic gas of air guide, monitoring ontology will be imported via the gas after heating and dehumidification again, enables to be located at partial size and concentration that the intrinsic sensor of monitoring is accurately detected suspended particulates, the interference for detecting suspended particulates so as to reducing aqueous vapor.

Description

Particulate Monitoring Module

technical field

This case relates to a particle monitoring module, especially a particle monitoring module that can maintain standard humidity monitoring and can be assembled in a thin portable device for gas monitoring.

Background technique

Suspended particles refer to solid particles or liquid droplets contained in the air. Because of their very fine particle size, they can easily enter the lungs of the human body through the nasal hairs in the nasal cavity, causing lung inflammation, asthma or cardiovascular disease. If other Pollutants attached to suspended particles will aggravate the harm to the respiratory system.

The current gas detection is mostly fixed-point, and can only measure the gas information around the gas observation station, and cannot provide the concentration of suspended particles anytime and anywhere; in addition, the detection of suspended particles is difficult to avoid the interference of water vapor. After the particles are surrounded by water vapor, the volume becomes larger, the light transmission is insufficient, and the number of small water molecules (water droplets) increases at the same time, which will directly affect the accuracy of detection; in view of this, how to detect suspended particles anytime and anywhere requires Avoiding the influence of ambient temperature and humidity on the detection results, so as to achieve the purpose of accurately detecting the concentration of suspended particles anytime and anywhere, is an urgent problem that needs to be solved at present.

Contents of the invention

The main purpose of this case is to provide a particle monitoring module, which can be assembled in a thin portable device for particle monitoring. The particulate monitoring module first draws gas into the first compartment through the air inlet, and heats the gas in the first compartment, so that the gas in the first compartment can maintain the monitoring standard humidity and improve the sensing efficiency of the gas sensor. In addition, the main body has a monitoring chamber with a one-way opening to provide a one-way monitoring of gas introduction and export. The resonant plate then guides the gas through the actuation of the actuator, so as to achieve the purpose of real-time monitoring of the particle monitoring module in the thin portable device.

A broad implementation aspect of this case is a particle monitoring module, including: a main body, a particle monitoring base, an actuator and a sensor. The main body is composed of a gas guiding body and a monitoring body, wherein the gas guiding body has multiple gas storage chambers and multiple ventilation channels. Each air storage chamber is respectively provided with an air inlet, a hot gas discharge port, an air outlet and a heating element. The heating element heats and dehumidifies the gas in the gas storage chamber, and makes the water vapor formed in the gas storage chamber due to heating discharged from the hot gas discharge port, and the dehumidified gas is led out through the gas outlet. Each two adjacent gas storage chambers communicate with each other through a corresponding ventilation channel, so that the gas in each gas storage chamber is guided to a phase through a corresponding ventilation channel after dehumidification. The adjacent air storage chamber is used for dehumidification again. The interior of the monitoring body is divided into an air inlet compartment and an air outlet compartment by a bearing partition, and the monitoring body is provided with an exhaust hole, which communicates with the air outlet compartment and the outside of the body. The carrying partition is provided with a communication port for communicating with the air inlet compartment and the air outlet compartment. The particle monitoring base is arranged in the intake compartment and has a monitoring channel. One end of the monitoring channel has a bearing groove, and the bearing groove communicates with the monitoring channel. The actuator is set in the particle monitoring base to control the gas from the inlet compartment into the monitoring channel, then through the communication port to the outlet compartment, and finally exhausted from the exhaust hole, so as to form a single-directional gas flow of the monitoring body lead. The sensor is arranged on the bearing partition and is located in the monitoring channel of the particle monitoring base, and is used for monitoring the particle concentration of the gas in the monitoring channel. In this way, when the external air with a humidity above 40% is introduced into the gas guide body, it is heated and dehumidified by the air storage chamber connected in series to make the humidity of the gas reach 10-40%, and then it is introduced into the monitoring body and guided by the actuator. Send it to the monitoring channel, and use the sensor to monitor the accurate particle concentration of the gas in the monitoring channel.

Description of drawings

FIG. 1 is a schematic cross-sectional view of the first embodiment of the particulate monitoring module of the present invention.

FIG. 2 is a schematic cross-sectional view of the air guide body of the first embodiment of the present invention.

FIG. 3 is a schematic cross-sectional view of the gas storage chamber of the first embodiment of the present invention viewed from a perspective opposite to that of FIG. 2 .

FIG. 4 is a schematic cross-sectional view of the monitoring body of the first embodiment of the present invention.

FIG. 5 is a schematic cross-sectional view of the valve provided in the gas storage chamber according to the first embodiment of the present application.

FIG. 6 is an exploded perspective view of the actuator of the first embodiment of the present application.

FIG. 7A is a schematic cross-sectional view of the actuator of the first embodiment of the present application.

7B to 7C are schematic diagrams showing the operation of the actuator according to the first embodiment of the present application.

FIG. 8A is a schematic cross-sectional view of the valve of the first embodiment of the present application.

FIG. 8B is a schematic diagram of the operation of the valve in the first embodiment of the present invention.

FIG. 9 is a schematic cross-sectional view of the second embodiment of the particulate monitoring module of the present invention.

FIG. 10 is a schematic cross-sectional view of the monitoring body of the second embodiment of the present application.

Figure 11 is a schematic cross-sectional view of the valve provided in the gas storage chamber in the second embodiment of the present case

FIG. 12A is a three-dimensional exploded view of the actuator of the second embodiment of the present application viewed from a top view.

FIG. 12B is a three-dimensional exploded schematic view of the actuator of the second embodiment of the present application viewed from a bottom-up angle.

FIG. 13A is a schematic cross-sectional view of the actuator of the second embodiment of the present application.

FIG. 13B is a schematic cross-sectional view of an actuator in another embodiment of the present invention.

13C to 13E are schematic diagrams showing the operation of the actuator according to the second embodiment of the present application.

Explanation of reference signs

1: subject

11: Gas guide body

111: Gas storage chamber

1111: air inlet

1112: Hot air vent

1113: Air outlet

1114: heating element

1115: first connection piercing

1116: temperature and humidity sensor

1117: Second connection piercing

112: ventilation channel

12: Monitoring body

121: Bearing partition

121a: exposed part

122: Air intake compartment

123: Outlet compartment

124: exhaust hole

125: Connecting port

126: connection hole

127: connector

2: Particulate Monitoring Base

21: Monitoring channel

22: Bearing groove

23: Laser Launcher

24: Beam Channel

3: Actuator

3': Actuator

31: Fumarole

31': Intake plate

31a: Connector

31b: suspended film

31c: hollow hole

31a': air intake hole

31b': busbar groove

31c': confluence chamber

32: cavity frame

32': resonance plate

32a': hollow hole

32b': movable part

32c': fixed part

33: Actuating body

33a: Piezoelectric carrier plate

33b: Adjusting the resonance plate

33c: piezoelectric plate

33c': bracket

33': Piezo Actuator

33a': hoverboard

33b': outer frame

33d': piezoelectric element

33e': Clearance

33f': convex part

34: Insulation frame

34': first insulation sheet

35: Conductive frame

35': conductive sheet

351': Conductive pin

352': electrode

36: Resonance chamber

36': second insulation sheet

37: Airflow chamber

37': chamber space

4: Sensor

5: circuit soft board

6: Valve

61: Holder

62: Seals

63: Displacement piece

611, 621, 631: through holes

Detailed ways

Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that the present case can have various changes in different aspects without departing from the scope of the present case, and the descriptions and diagrams therein are used for illustration in nature rather than limiting the present case.

This application provides a particle monitoring module, please refer to FIG. 1 to FIG. 3 . In the first embodiment of this application, the particle monitoring module includes a main body 1 , a particle monitoring base 2 , an actuator 3 and a sensor 4 . The main body 1 is composed of a gas guiding body 11 and a monitoring body 12 combined with each other. The air guide body 11 has a plurality of air storage chambers 111 and a plurality of ventilation channels 112 . Wherein, each air storage chamber 111 is provided with an air inlet 1111 , a hot air outlet 1112 , an air outlet 1113 and a heating element 1114 . After the gas enters the gas storage chamber 111 through the air inlet 1111, the gas in the gas storage chamber 111 is heated and dehumidified through the heating element 1114, so that the water vapor formed by the heating inside the gas storage chamber 111 is The hot gas discharge port 1112 discharges out of the gas storage chamber 111 . Finally, the heated and dehumidified gas is exported through the gas outlet 1113 . Each air passage 112 is arranged between two corresponding adjacent air storage chambers 111, that is, every two adjacent air storage chambers 111 are connected to each other through a corresponding air passage 112. The gas in each gas storage chamber 111 is communicated so that the gas in each gas storage chamber 111 is guided to an adjacent gas storage chamber 111 through a corresponding ventilation channel 112 after dehumidification, so as to perform dehumidification operation again.

Please continue to refer to FIG. 1 and FIG. 4 , an air inlet compartment 122 and an air outlet compartment 123 are separated by a loading partition 121 inside the monitoring body 12 . The monitoring body 12 is provided with an exhaust hole 124 communicating with the air outlet compartment 123 and the outside of the main body 1 . The carrying partition 121 is provided with a communication port 125 , so that the air inlet compartment 122 communicates with the air outlet compartment 123 .

The particulate monitoring base 2 is disposed in the intake compartment 122 , and in this embodiment, the particulate monitoring base 2 is disposed on the supporting partition 121 and accommodated in the intake compartment 122 . The particle monitoring base 2 has a monitoring channel 21, one end of the monitoring channel 21 has a bearing groove 22, the bearing groove 22 communicates with the monitoring channel 21, and the other end of the monitoring channel 21 is connected with the communication port 125 of the carrying partition 121 Pass.

The actuator 3 is arranged in the receiving groove 22 of the particle monitoring base 2, and closes the receiving groove 22, so as to control the introduction of gas from the inlet compartment 122 into the monitoring channel 21, and then lead to the gas outlet compartment through the communication port 125 123 , and finally exhausted through the exhaust hole 124 , so as to constitute the unidirectional gas transmission of the monitoring body 12 . The sensor 4 is arranged on the supporting partition 121 and located in the monitoring channel 21 of the particle monitoring base 2 for monitoring the particle concentration of the gas in the monitoring channel 21 . Among them, the monitoring channel 21 is directly connected to the intake compartment 122 vertically, so that the air can be directly guided above the monitoring channel 21 without affecting the air flow introduction, so that the gas can be introduced into the monitoring channel 21 faster, and the sensor 4 can be used for detection, and the gas flow can be improved. Monitoring efficiency.

Please continue to refer to FIG. 1 and FIG. 4 , the particle monitoring base 24 has a laser emitter 23 and a beam channel 24 . The laser emitter 23 is electrically connected to the carrying partition 121, and is adjacent to the beam channel 24, so as to emit light beams into the beam channel 24, and the beam channel 24 communicates with the monitoring channel 21 to guide the laser transmitter 23. The emitted light beam is irradiated into the monitoring channel 21 . When the light beam irradiates the gas in the monitoring channel 21 , the suspended particles contained in the gas will generate a plurality of light spots, and the sensor 4 senses the particle size and concentration of the suspended particles by receiving the light spots generated by the suspended particles. In this embodiment, the sensor 4 is a PM2.5 sensor, but not limited thereto.

Referring to FIG. 1 , the monitoring body 12 further has a connecting hole 126 through which a flexible circuit board 5 penetrates so that one end of the flexible circuit board 5 is electrically connected to the actuator 3 . After the flexible circuit board 5 is connected to the actuator 3 , the connection hole 126 is sealed by sealing glue, so as to prevent gas from being introduced into the air intake compartment 122 through the connection hole 126 . In addition, the carrying partition 121 has an exposed portion 121 a penetrating and extending out of the main body 1 , and a connector 127 is disposed on the exposed portion 121 a. The connector 127 is electrically connected to the other end of the flexible circuit board 5 for providing power and signals to the load-carrying partition 121 and the flexible circuit board 5 . In this embodiment, the carrying spacer 121 is a circuit board, but it is not limited thereto.

Please continue to refer to Figure 1. When the external air with a humidity of 40% or more is introduced into the air guide body 11, it is heated and dehumidified by multiple series-connected air storage chambers 111, so that the humidity of the air reaches 10-40%, and then introduced The inside of the monitoring body 12 is guided to the monitoring channel 21 via the actuator 3 , and the gas in the monitoring channel 21 is monitored by the sensor 4 to obtain an accurate particle concentration. It should be noted that, in this embodiment, it is best to keep the humidity of the gas at 20%-30%.

Next, please refer to FIG. 3 , the gas guide body 11 includes a plurality of temperature and humidity sensors 1116, which are respectively arranged in the gas storage chamber 111, to monitor the humidity of the gas in the gas storage chamber 111 respectively, so as to adjust the heating of the heating element 1114 respectively. time and heating power. Wherein, each gas storage chamber 111 is further provided with a first connection through hole 1115 and a second connection through hole 1117 . The first connection through hole 1115 is used for the flexible circuit board 5 to pass through, so that the circuit flexible board 5 can be electrically connected to the heating element 1114, and the first connection through hole 1115 is sealed with glue to prevent gas from entering the gas storage chamber 111 through the first connection through hole 1115 Inside. The second connection through hole 1117 is also used for the flexible circuit board 5 to pass through, so that the circuit flexible board 5 can be electrically connected to the temperature and humidity sensor 1116, and the second connection through hole 1117 is sealed by sealing glue to prevent gas from entering the gas storage through the second connection through hole 1117 Inside chamber 111.

Please refer to FIG. 5 , in this embodiment, the air guide body 11 is further provided with a plurality of valves 6 , which are respectively arranged at the air inlet 1111 , the hot air discharge port 1112 and the air outlet 1113 of each air storage chamber 111 , It is used to control the opening and closing of the air storage chamber 111 for heating and dehumidification, and the opening and closing state of the valve 6 is controlled by the monitoring result of the temperature and humidity sensor 1116 .

This case has the following implementation modes regarding the dehumidification and heating method of introducing gas into the gas guide body 11:

First, the first embodiment is as follows. The control valve 6 opens the air inlet 1111, the hot gas discharge port 1112, and the air outlet 1113 of all the gas storage chambers 111, so that when the outside air with a humidity of 40% or more is introduced into the air guide body 11, it is connected in series with each other. The connected and connected gas storage chambers 111 perform multi-chamber heating and dehumidification, and the temperature and humidity sensors 1116 are used to monitor the gas humidity in the gas storage chambers 111 to adjust the heating time and heating power of the heating elements 1114 respectively. In addition, the water vapor formed by heating and dehumidification in the gas storage chamber 111 is discharged from the hot gas discharge port 1112 , and the dehumidified gas with a humidity of 10-40% is then introduced into the monitoring body 12 .

The second embodiment is as follows. When one of the gas storage chambers 111 is being heated and dehumidified, the control valve 6 opens the air inlet 1111 and the hot gas discharge port 1112 of one of the gas storage chambers 111 and closes the one of the gas storage chambers 111. Air outlet 1113 controls the valve 6 of other air storage chambers 111 to open the air inlets 1111 and air outlets 1113 of other air storage chambers 111 and closes the hot gas discharge ports 1112 of other air storage chambers 111, so that the humidity above 40% External air is introduced into one of the air storage chambers 111 , and is heated and dehumidified by the heating element 1114 . After the temperature and humidity sensor 1116 monitors that the gas humidity in one of the gas storage chambers 111 reaches a required value, then open the gas outlet 1113 of the gas storage chamber 111 that has been heated and dehumidified, thereby making the humidity reach 10-40 % of the gas enters the monitoring body 12 to form a single chamber heating and dehumidification operation.

The third embodiment is as follows, when one of the gas storage chambers 111 is being heated and dehumidified, the control valve 6 opens the air inlet 1111 and the hot gas discharge port 1112 of one of the gas storage chambers 111 and closes the one of the gas storage chambers 111 The air outlet 1113 allows external air with a humidity above 40% to be introduced into one of the air storage chambers 111 , and is heated and dehumidified by the heating element 1114 . After the temperature and humidity sensor 1116 monitors that the humidity of the gas in one of the gas storage chambers 111 reaches a required value, the gas outlet 1113 is opened, and the dehumidified gas is introduced into the next gas storage chamber 111 in series for heating and dehumidification. At this time, the valve 6 controlling the next series gas storage chamber 111 opens the air inlet 1111 and the hot gas discharge port 1112 and closes the air outlet 1113, so that the dehumidified gas is heated and dehumidified again. Similarly, after the temperature and humidity sensor 1116 monitors that the humidity of the gas in the next series of gas storage chambers 111 reaches a required value, the gas outlet 1113 is opened, and the gas after secondary dehumidification is then introduced into other series of gas storage chambers 111 Continue to heat and dehumidify in batches several times. Finally, the demanded gas with a humidity of 10-40% is exported into the monitoring body 12 to form a multi-chamber heating and dehumidification operation in batches.

After understanding the heating and dehumidification operation of the particle monitoring module, the structure and operation method of the actuator 3 in the first embodiment of the present application will be described below.

Please refer to Fig. 6 to Fig. 7C, the actuator 3 of the first embodiment of the present case is a gas pump, and the actuator 3 includes a gas injection orifice sheet 31, a cavity frame 32, an actuating body 33, and an insulating frame stacked in sequence. 34 and conductive frame 35. The jet hole sheet 31 includes a plurality of connecting pieces 31a, a suspension sheet 31b and a hollow hole 31c. The suspension piece 31b can bend and vibrate, and a plurality of connecting pieces 31a are adjacent to the periphery of the suspension piece 31b. In the first embodiment of the present case, the number of connecting pieces 31a is four, which are respectively adjacent to the four corners of the suspension piece 31b, but it is not limited thereto. A hollow hole 31c is formed at the center of the suspension piece 31b. The cavity frame 32 is loaded and stacked on the suspension plate 31b, and the actuating body 33 is loaded and stacked on the cavity frame 32, and includes a piezoelectric carrier plate 33a, an adjustment resonant plate 33b, and a piezoelectric plate 33c. Wherein, the piezoelectric carrier plate 33a is loaded and stacked on the cavity frame 32 , the adjustment resonance plate 33b is loaded and stacked on the piezoelectric carrier plate 33a , and the piezoelectric plate 33c is loaded and stacked on the adjustment resonance plate 33b. The piezoelectric plate 33c is deformed after applying a voltage to drive the piezoelectric carrier plate 33a and the adjustment resonant plate 33b to perform reciprocating bending vibration. The insulating frame 34 is carried and stacked on the piezoelectric carrier plate 33 a of the actuating body 33 , and the conductive frame 35 is carried and stacked on the insulating frame 34 . Wherein, a resonance chamber 36 is formed among the actuator body 33 , the cavity frame 32 and the suspension piece 31 b. Wherein, the thickness of the resonant plate 33b is adjusted to be greater than the thickness of the piezoelectric carrier plate 33a.

Please refer to FIG. 7A , the actuator 3 is disposed in the receiving groove 22 of the particle monitoring base 2 through the connecting member 31 a. The air injection holes 31 are spaced apart from the bottom surface of the receiving groove 22 , and an air flow chamber 37 is formed between them. Please refer to FIG. 7B. When voltage is applied to the piezoelectric plate 33c of the actuator 33, the piezoelectric plate 33c begins to deform due to the piezoelectric effect and simultaneously drives the adjustment resonant plate 33b and the piezoelectric carrier plate 33a to produce displacement. At this time, the air-jet hole plate 31 will be driven together by the principle of Helmholtz resonance, so that the actuating body 33 will move away from the bottom surface of the receiving groove 22 . Since the actuating body 33 moves away from the bottom surface of the receiving groove 22, the volume of the airflow chamber 37 between the air jet hole sheet 31 and the bottom surface of the receiving groove 22 increases, and the internal air pressure forms a negative pressure, causing the actuating The air outside the device 3 enters the airflow chamber 37 from the gap between the connecting piece 31a of the air jet hole sheet 31 and the side wall of the receiving groove 22 due to the pressure gradient and collects pressure. Finally, please refer to FIG. 7C. When the gas continuously enters the airflow chamber 37, so that the air pressure in the airflow chamber 37 forms a positive pressure, the actuating body 33 is driven by the voltage to move to the bottom surface of the receiving groove 22, compressing the airflow chamber. 37, and push the air in the airflow chamber 37 to make the gas enter the airflow channel 21. Thereby, the sensor 4 can detect the concentration of suspended particles contained in the gas in the gas flow channel 21 .

The actuator 3 in the first embodiment of the present application is a gas pump. Of course, the actuator 3 of the present application can also be a MEMS gas pump produced by the MEMS process. Wherein, the air injection holes 31 , the cavity frame 32 , the actuating body 33 , the insulating frame 34 and the conductive frame 35 can all be made by surface micromachining technology, so as to reduce the volume of the actuator 3 .

The specific structure of the valve 6 is illustrated by referring to FIG. 8A and FIG. 8B . The valve 6 includes a retaining element 61 , a sealing element 62 and a displacement element 63 . The displacement member 63 is disposed between the holding member 61 and the sealing member 62 and can be displaced therebetween. The holder 61 has a plurality of through holes 611 , and the displacement member 63 is also provided with through holes 631 corresponding to the positions of the through holes 611 on the holder 61 . The positions of the through hole 611 of the holding member 61 and the through hole 631 of the displacement member 63 are aligned with each other. The sealing member 62 is provided with a plurality of through holes 621 , and the positions of the through holes 621 of the sealing member 62 and the through holes 611 of the holder 61 are misaligned and not aligned. The retainer 61 , sealing member 62 and displacement member 63 of the valve 6 are connected to a processor (not shown) through the circuit board 5 , and the processor controls the displacement of the displacement member 63 to open the valve 6 .

The displacement member 63 of the valve 6 can be a charged material, and the holding member 61 is a bipolar conductive material. The holder 61 is electrically connected to the processor of the circuit board 5 for controlling the polarity (positive polarity or negative polarity) of the holder 61 . If the displacement member 63 is a negatively charged material, when the valve 6 needs to be opened under control, the processor controls the holder 61 to form a positive electrode. At this time, the displacement member 63 and the holder 61 maintain different polarities, so that the displacement member 63 approaches the holder 61, constituting the opening of the valve 6 (as shown in FIG. 8B). Conversely, if the displacement member 63 is a negatively charged material, when the valve 6 must be closed under control, the processor controls the holder 61 to form a negative electrode. At this time, the displacement member 63 and the holder 61 maintain the same polarity, so that the displacement member 63 approaches the seal 62, constituting the closing of the valve 6 (as shown in FIG. 8A).

Alternatively, the displacement member 63 of the valve 6 can also be made of a magnetic material, and the holding member 61 is a magnetic material whose polarity can be controlled to change. The holder 61 is electrically connected to the processor of the circuit board 5 for controlling the polarity (positive or negative) of the holder 61 . If the displacement member 63 is a magnetic material with a negative polarity, when the valve 6 is to be opened under control, the processor controls the holder 61 to form a positive magnetism, at this time the displacement member 63 and the holder 61 maintain different polarities, so that the displacement member 63 Approaching to the holder 61, the valve 6 is opened (as shown in FIG. 8B ). Conversely, if the displacement member 63 is a magnetic material with a negative polarity, when the valve 6 must be closed under control, the processor controls the holder 61 to form a magnetic material with a negative pole. At this time, the displacement member 63 and the holder 61 maintain the same polarity, so that the displacement The member 63 approaches the sealing member 62, constituting the closing of the valve 6 (as shown in FIG. 8A ).

Please refer to Fig. 9 to Fig. 11, the structure and operation mode of the second embodiment of the particle monitoring module of this case are basically the same as the first embodiment, the only difference is the structure and operation mode of the actuator 3', which will be described below The structure and operation method of the actuator 3' in the second embodiment of the present application will be described.

Please refer to Fig. 12A, Fig. 12B and Fig. 13A, the actuator 3' of the second embodiment of this case is a gas pump, including an air inlet plate 31', a resonant plate 32', a piezoelectric actuator 33', A first insulating sheet 34', a conductive sheet 35' and a second insulating sheet 36'. The gas inlet plate 31 ′, the resonant sheet 32 ′, the piezoelectric actuator 33 ′, the first insulating sheet 34 ′, the conductive sheet 35 ′ and the second insulating sheet 36 ′ are stacked and combined in sequence.

In the second embodiment, the air intake plate 31' has at least one air intake hole 31a', at least one confluence row groove 31b' and one confluence chamber 31c'. The bus bar groove 31b' is disposed corresponding to the air inlet hole 31a'. The air inlet 31a' is used for introducing gas, and the confluence drain 31b' guides the gas introduced from the air inlet 31a' to flow into the confluence chamber 31c'. The resonant piece 32' has a hollow hole 32a', a movable part 32b' and a fixed part 32c'. The hollow hole 32a' is arranged corresponding to the confluence chamber 31c' of the inlet plate 31'. The movable part 32b' is disposed around the hollow hole 32a', and the fixed part 32c' is disposed on the periphery of the movable part 32b'. The resonant plate 32' and the piezoelectric actuator 33' together form a chamber space 37' therebetween. Therefore, when the piezoelectric actuator 33 ′ is driven, the gas will be introduced through the air inlet 31 a ′ of the air inlet plate 31 ′, and then collected into the confluence chamber 31 c ′ through the confluence row groove 31 b ′. Then, the gas passes through the hollow hole 32a' of the resonant piece 32', so that the piezoelectric actuator 33' resonates with the movable part 32b' of the resonant piece 32' to transmit the gas.

Please continue to refer to FIG. 12A , FIG. 12B and FIG. 13A , the piezoelectric actuator 33 ′ includes a suspension plate 33 a ′, an outer frame 33 b ′, at least one bracket 33 c ′, and a piezoelectric element 33 d ′. In this embodiment, the suspension board 33a' has a square shape and can bend and vibrate, but it is not limited thereto. The suspension board 33a' has a convex portion 33f'. In the second embodiment, the floating board 33 a ′ is designed in a square shape because compared with the circular shape, the structure of the square floating board 33 a ′ obviously has the advantage of saving power. The power consumption of the capacitive load operating at the resonant frequency will increase with the increase of the resonant frequency. Since the resonant frequency of the square suspension board 33 a ′ is lower than that of the circular suspension board, the power consumption will be lower. However, in other embodiments, the shape of the suspension board 33a' can be changed according to actual requirements. The outer frame 33b' is disposed around the outer side of the suspension board 33a'. The bracket 33c' is connected between the suspension board 33a' and the outer frame 33b' to provide a supporting force for elastically supporting the suspension board 33a'. The piezoelectric element 33d' has a side length which is less than or equal to the side length of the suspension plate 33a'. And the piezoelectric element 33d' is attached to a surface of the suspension board 33a' for applying a driving voltage to drive the suspension board 33a' to bend and vibrate. At least one gap 33e' is formed between the suspension plate 33a', the outer frame 33b' and the support 33c' for the gas to pass through. The protrusion 33f' protrudes from the other surface of the suspension board 33a'. In the second embodiment, the suspending piece 33a' and the protruding portion 33f' are integrally formed by an etching process, but it is not limited thereto.

Please refer to FIG. 13A. In the second embodiment, the cavity space 37' can be filled with a material, such as conductive glue, by using the gap generated between the resonant plate 32' and the outer frame 33b' of the piezoelectric actuator 33'. , but not limited thereto, so that a certain depth can be maintained between the resonant plate 32 ′ and the suspension plate 33 a ′, thereby guiding the gas to flow more rapidly. In addition, since the suspension plate 33 a ′ and the resonant plate 32 ′ are kept at an appropriate distance, the contact interference between them is reduced, and the generation of noise can also be reduced. In other embodiments, by increasing the height of the outer frame 33b' of the piezoelectric actuator 33', the amount of filling the gap between the resonant plate 32' and the outer frame 33b' of the piezoelectric actuator 33' can be reduced. The thickness of the conductive adhesive in. In this way, under the condition that the suspension plate 33a' and the resonant plate 32' can still be kept at an appropriate distance, the overall assembly of the actuator 3' will not affect the filling thickness of the conductive glue due to the hot pressing temperature and cooling temperature, so as to avoid the conductive glue The actual size of the chamber space 37 ′ after assembly is affected by thermal expansion and contraction.

Please refer to FIG. 13B. In other embodiments, the suspension board 33a' can be formed by stamping, so that the suspension board 33a' extends outward for a distance, and the outward extension distance can be formed between the suspension board 33a' and the outer frame by the bracket 33c' 33b', so that the surface of the protrusion 33f' on the suspension board 33a' and the surface of the outer frame 33b' are non-coplanar. A small amount of filling material, such as conductive glue, is coated on the assembly surface of the outer frame 33b', and the piezoelectric actuator 33' is attached to the fixed part 32c' of the resonant plate 32' by hot pressing, so that the pressure The electric actuator 33' can be assembled and combined with the resonant plate 32', so that the suspension plate 33a' of the above-mentioned piezoelectric actuator 33' is stamped to form a structural improvement of a chamber space 37', so that The required chamber space 37' can be completed by adjusting the stamping distance of the suspension plate 33a' of the piezoelectric actuator 33', which effectively simplifies the structural design of the adjustment chamber space 37', and also achieves simplified manufacturing processes and shortened Advantages such as processing time.

Please return to FIG. 12A and FIG. 12B , in the second embodiment, the first insulating sheet 34 ′, the conductive sheet 35 ′ and the second insulating sheet 36 ′ are frame-shaped thin sheets, but not limited thereto. The gas inlet plate 31', the resonant plate 32', the piezoelectric actuator 33', the first insulating plate 34', the conductive plate 35' and the second insulating plate 36' can all be processed through the surface micromachining technology of MEMS , the volume of the actuator 3' is reduced to form a MEMS actuator 3'.

Next, please refer to FIG. 13C. During the operation process of the piezoelectric actuator 33', the piezoelectric element 33d' of the piezoelectric actuator 33' is deformed after being applied with a driving voltage, driving the suspension plate 33a' away from the intake air. The direction of the plate 31' is displaced, and the volume of the chamber space 37' is increased at this time, forming a negative pressure in the chamber space 37', so that the gas in the confluence chamber 31c' is drawn into the chamber space 37'. At the same time, the resonant plate 32' generates resonance and simultaneously displaces in a direction away from the intake plate 31', thereby increasing the volume of the confluence chamber 31c'. And because the gas in the confluence chamber 31c' enters the chamber space 37', the confluence chamber 31c' is also in a negative pressure state, and then the gas is sucked into the confluence through the air inlet 31a' and the confluence row groove 31b' chamber 31c'.

Next, as shown in Figure 13D, the piezoelectric element 33d' drives the suspension plate 33a' to move toward the intake plate 31', compressing the chamber space 37', and similarly, the resonant plate 32' is actuated by the suspension plate 33a' to generate resonance And the displacement toward the inlet plate 31 ′ forces the gas in the chamber space 37 ′ to be pushed further through the gap 33 e ′ to achieve the effect of gas transmission.

Finally, as shown in Figure 13E, when the suspension plate 33a' is driven back to the state not driven by the piezoelectric element 33d', the resonant plate 32' is also driven to move away from the air intake plate 31'. When the resonant plate 32' moves the gas in the compression chamber space 37' to the gap 33e', and increases the volume in the confluence chamber 31c', the gas can continuously pass through the inlet hole 31a' and the confluence row groove 31b' to converge in the confluence chamber 31c'. By continuously repeating the above-mentioned steps of actuating the actuator 3' shown in FIG. 13C to FIG. 13E, the actuator 3' can continuously make the gas flow at a high speed, so as to achieve the operation of the actuator 3' to transmit and output gas.

Next, please refer back to FIG. 12A and FIG. 12B, a conductive pin 351' protrudes from the outer edge of the conductive sheet 35', and a curved electrode 352' protrudes from the inner edge, and the electrode 352' is electrically connected to the piezoelectric actuator. 33' piezoelectric element 33d'. The conductive pin 351' of the conductive sheet 35' connects external current to drive the piezoelectric element 33d' of the piezoelectric actuator 33'. In addition, the arrangement of the first insulating sheet 34' and the second insulating sheet 36' can avoid the occurrence of short circuit.

To sum up, in the particle monitoring module provided in this case, heating elements are installed in multiple air storage chambers, so that the humidity of the air introduced into the monitoring body from the air guide body is maintained at 10-40%, and then the actuator will maintain Gas with a humidity of 10-40% is introduced into the monitoring channel from the inlet compartment to detect the particle size and concentration of suspended particles. By maintaining the monitoring standard humidity to improve the monitoring efficiency of suspended particles, thereby improving the effect of detecting suspended particles. In addition, the particulate monitoring module provided in this case can be combined with a thin portable device for monitoring suspended particulates. It matches the habit of modern people to carry portable devices to achieve the effect of detecting suspended particulates anytime and anywhere, which is extremely industrially applicable and progressive.

This case can be modified in various ways by the people who are familiar with this technology, Ren Shijiang, but all of them do not break away from the intended protection of the scope of the attached patent application.

Claims (17)

1. A particle monitoring module, characterized in that, comprising: A main body is composed of a gas guiding body and a monitoring body, wherein the gas guiding body has: A plurality of gas storage chambers, wherein each of the gas storage chambers is respectively provided with an air inlet, a hot gas discharge port, an air outlet and a heating element, the heating element heats and dehumidifies the gas in the gas storage chamber, and The water vapor formed by heating inside the gas storage chamber is discharged from the hot gas discharge port, and the dehumidified gas is led out through the gas outlet; and A plurality of air passages, wherein every two adjacent air storage chambers communicate with each other through a corresponding air passage, so that the gas in each air storage chamber passes through a corresponding air passage after dehumidification The ventilation channel is guided to an adjacent air storage chamber, so as to perform dehumidification operation again; The interior of the monitoring body is divided into an air inlet compartment and an air outlet compartment by a bearing partition, and the monitoring body is provided with an exhaust hole, which communicates with the air outlet compartment and the outside of the main body, and the bearing compartment The plate is provided with a communication port for communicating with the air inlet compartment and the air outlet compartment; A particle monitoring base is set in the air intake compartment and has a monitoring channel, one end of the monitoring channel has a receiving groove, and the receiving groove communicates with the monitoring channel; An actuator is arranged in the particle monitoring base to control the gas to be introduced into the monitoring channel from the inlet compartment, then guided into the gas outlet compartment through the communication port, and finally discharged from the exhaust hole, thereby forming unidirectional gas delivery of the monitoring body; and a sensor, arranged on the bearing partition and located in the monitoring channel of the particle monitoring base, for monitoring the particle concentration of the gas in the monitoring channel; In this way, when the external air with a humidity above 40% is introduced into the air guiding body, each of the gas storage chambers connected in series is heated and dehumidified to make the humidity of the gas reach 10-40%, and then introduced into the monitoring body, The gas is guided into the monitoring channel through the actuator, and the gas in the monitoring channel is used to monitor the accurate particle concentration. 2. The particulate monitoring module according to claim 1, wherein the humidity of the gas is optimally maintained at 20%-30%. 3. The particle monitoring module according to claim 1, wherein the air guiding body includes a plurality of temperature and humidity sensors respectively arranged in each of the air storage chambers for monitoring the temperature and humidity in each of the air storage chambers. The humidity of the gas is used to adjust the heating time and heating power of the heating element respectively. 4. The particle monitoring module according to claim 3, wherein the air guide body comprises a plurality of valves, which are arranged in the air inlet, the hot air discharge port, and the air outlet of each of the air storage chambers, It is used to control the opening and closing of each air storage chamber for heating and dehumidification, and the opening and closing state of the valve is controlled according to the monitoring result of the temperature and humidity sensor. 5. The particle monitoring module according to claim 4, wherein when the air storage chamber is heated and dehumidified, the valve is controlled to open the air inlet, the air outlet and the hot air discharge port, so that the humidity is 40%. The above external air is introduced into the air guiding body, and passes through each of the gas storage chambers connected in series to perform multiple times of heating and dehumidification, and the water vapor formed in each of the gas storage chambers due to heating and dehumidification can be discharged by the hot gas The gas is discharged from the outlet, and the dehumidified gas with a humidity of 10-40% is then introduced into the monitoring body. 6. The particle monitoring module according to claim 4, wherein when one of the air storage chambers is heated and dehumidified, the valve opens the air inlet and the hot air discharge port and closes the air outlet, and each other The air storage chamber controls the valve to open the air inlet and the air outlet and close the hot gas discharge port, so that the external air with a humidity of more than 40% is introduced into the air storage chamber for heating and dehumidification, and is heated and dehumidified by the heating element After the temperature and humidity sensor monitors that the gas humidity in the air storage chamber for heating and dehumidification reaches a required value, then open the air outlet of the air storage chamber that has completed heating and dehumidification, and the derived humidity reaches 10-40%. The gas passes through each of the other gas storage chambers and then enters the monitoring body to form a single chamber heating and dehumidification operation. 7. The particle monitoring module according to claim 4, wherein when one of the air storage chambers is heated and dehumidified, the valve is controlled to open the air inlet and the hot air discharge port and close the air outlet, so that External air with a humidity above 40% is introduced into the air storage chamber, and is heated and dehumidified by the heating element. After the temperature and humidity sensor monitors that the humidity of the gas in the air storage chamber reaches a required value, the air outlet is opened to resume dehumidification. The final gas is introduced into each of the gas storage chambers in the next series for heating and dehumidification. At this time, the valve of each of the gas storage chambers in the next series is controlled to open the air inlet and the hot gas discharge port and close the gas outlet. , so that the dehumidified gas is heated and dehumidified again. After the temperature and humidity sensor monitors the gas humidity in the gas storage chamber to reach a required value, the gas outlet is opened, and the gas after the second dehumidification is reintroduced into other series. Each of the gas storage chambers continues to heat and dehumidify in batches for several times, and finally leads out the required gas with a humidity of 10-40% into the monitoring body, so as to constitute a multi-chamber multi-chamber heating and dehumidification operation in batches. 8. The particulate monitoring module of claim 1, wherein the sensor is a PM2.5 sensor. 9. The particulate monitoring module of claim 1, wherein the actuator is a MEMS gas pump. 10. The particulate monitoring module of claim 1, wherein the actuator is a gas pump comprising: An air jet orifice sheet, comprising a plurality of connecting pieces, a suspension piece and a hollow hole, the suspension piece can bend and vibrate, the plurality of connection pieces are adjacent to the periphery of the suspension piece, and the hollow hole is formed at the center of the suspension piece , the plurality of connectors elastically support the suspension sheet, and by arranging the plurality of connectors so that the actuator is arranged in the receiving groove of the particle monitoring base, an airflow chamber is formed in the air jet hole sheet and the receiving groove, and at least one gap is formed between the plurality of connecting pieces and the suspension piece; a cavity frame, loaded and stacked on the suspension sheet; An actuating body, loaded and superimposed on the cavity frame, is used to receive voltage and generate reciprocating bending vibration; an insulating frame, carried and stacked on the actuating body; and a conductive frame, the carrying stack is arranged on the insulating frame; Wherein, a resonance chamber is formed between the actuating body, the cavity frame and the suspension plate, and the air-jet hole plate is driven to resonate by driving the actuation body, so that the suspension plate of the air-jet hole plate reciprocates Vibrating and displacing in a formula, so as to drive the gas through the at least one gap into the air flow chamber, and then into the monitoring channel, so as to realize the transmission of the gas. 11. The particulate monitoring module of claim 10, wherein the actuating body comprises: a piezoelectric carrier plate, loaded and stacked on the cavity frame; an adjustment resonant plate, loaded and stacked on the piezoelectric carrier plate; and A piezoelectric plate is loaded and stacked on the adjustment resonant plate for receiving voltage to drive the piezoelectric carrier plate and the adjustment resonant plate to produce reciprocating bending vibration. 12 . The particulate monitoring module according to claim 11 , wherein the thickness of the adjustment resonant plate is greater than the thickness of the piezoelectric carrier plate. 13 . 13. The particulate monitoring module of claim 1, wherein the actuator is a gas pump comprising: An air intake plate has at least one air intake hole, at least one confluence row slot corresponding to the position of the air intake hole, and a confluence chamber, the air intake hole is used to introduce gas, and the confluence row slot is used to guide the intake air The gas introduced by the hole is sent to the confluence chamber; a resonant plate having a pair of hollow holes corresponding to the position of the confluence chamber, and a movable part surrounding the hollow hole; and A piezoelectric actuator is arranged correspondingly to the resonant piece in position. The gas inlet plate, the resonant piece and the piezoelectric actuator are stacked in sequence. The connection between the resonant piece and the piezoelectric actuator A chamber space is formed between them, so that when the piezoelectric actuator is driven, the gas is introduced from the inlet hole of the inlet plate, collected into the confluence chamber through the confluence row groove, and then passed through the resonance The hollow hole of the sheet makes the piezoelectric actuator resonate with the movable part of the resonant sheet to transmit gas. 14. The particulate monitoring module of claim 13, wherein the piezoelectric actuator comprises: A suspended plate has a square shape and can bend and vibrate; An outer frame is arranged around the outer side of the suspension board; At least one bracket is connected between the suspension board and the outer frame to provide elastic support; and A piezoelectric element has a side length, the side length is less than or equal to the side length of the suspension board, and the piezoelectric element is attached to a surface of the suspension board for applying voltage to drive the suspension board to bend and vibrate . 15. The particulate monitoring module of claim 13, wherein: The actuator also includes a first insulating sheet, a conductive sheet and a second insulating sheet, wherein the gas inlet plate, the resonant sheet, the piezoelectric actuator, the first insulating sheet, the conductive sheet and the The second insulating sheets are stacked sequentially. 16. The particle monitoring module as claimed in claim 1, wherein the supporting spacer is a circuit board. 17. The particle monitoring module according to claim 16, wherein the particle monitoring base and the sensor are electrically connected to the carrying partition, the particle monitoring base includes a laser emitter, and the laser emitter and The carrying partition is electrically connected, and is provided with a beam channel, which communicates with the monitoring channel, so that the beam emitted by the laser emitter is irradiated into the monitoring channel, so that the gas contained in the monitoring channel After the particles are irradiated by the light beam, a projected light spot is generated, which is sensed by the sensor.