CN110379793A - One kind covering copper ceramic substrate motherboard structure - Google Patents
One kind covering copper ceramic substrate motherboard structure Download PDFInfo
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- CN110379793A CN110379793A CN201910608123.6A CN201910608123A CN110379793A CN 110379793 A CN110379793 A CN 110379793A CN 201910608123 A CN201910608123 A CN 201910608123A CN 110379793 A CN110379793 A CN 110379793A
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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Abstract
本发明提供一种覆铜陶瓷基板母板结构,包括母板,母板的正面或者背面还刻设有切割线,母板正反两侧的外侧均设置有相对应的增强铜箔工艺边,增强铜箔工艺边包括四条上下左右的铜箔工艺边;切割线包括用于母板上铜箔工艺边从母板上掰离的横向切割线和纵向切割线,横向切割线或者纵向切割线的两端延伸至母板的外边缘;切割线还包括用于母板上的单个小基板进行掰离的网状内部切割线,网状内部切割线的上下左右四个方向上延伸出横向切割线以及纵向切割线。本专利通过相对应的增强铜箔工艺边,通过铜箔边,增加母板边缘的强度,减少母板的陶瓷边缘破损、裂缝的产生。
The present invention provides a copper-clad ceramic substrate mother board structure, including the mother board, the front or back of the mother board is also engraved with cutting lines, and the outer sides of the front and back sides of the mother board are provided with corresponding reinforced copper foil process edges, The enhanced copper foil process edge includes four upper, lower, left, and right copper foil process edges; the cutting line includes a horizontal cutting line and a vertical cutting line for separating the copper foil process edge on the motherboard from the motherboard, and the horizontal cutting line or the vertical cutting line. Both ends extend to the outer edge of the motherboard; the cutting line also includes a mesh internal cutting line for breaking off a single small substrate on the motherboard, and the horizontal cutting line extends from the top, bottom, left, and right directions of the mesh internal cutting line and longitudinal cutting lines. This patent increases the strength of the edge of the mother board and reduces the damage and cracks of the ceramic edge of the mother board through the corresponding enhanced copper foil process edge.
Description
技术领域technical field
本发明涉及半导体加工设备技术领域,具体涉及覆铜陶瓷基板的母板。The invention relates to the technical field of semiconductor processing equipment, in particular to a mother board of a copper-clad ceramic substrate.
背景技术Background technique
覆铜陶瓷基板(DBC基板),简称陶瓷覆铜板。覆铜陶瓷基板是母板制造的图形线路板,常在电子封装领域作为功率器件基板。Copper-clad ceramic substrate (DBC substrate), referred to as ceramic copper-clad laminate. Copper-clad ceramic substrates are graphic circuit boards manufactured by motherboards, and are often used as power device substrates in the field of electronic packaging.
为了提高功率器件封装的生产效率,目前DBC基板与芯片等元器件的焊接工艺正由小枚焊接逐渐改为母板整体焊接,焊接完成后再分成小枚。但由于母板基体材料为陶瓷,同时在交付前已激光切割过(表面有切割线),在生产中存在不少问题:In order to improve the production efficiency of power device packaging, the current welding process of components such as DBC substrates and chips is gradually changing from small piece welding to overall motherboard welding, and then divided into small pieces after welding. However, since the base material of the motherboard is ceramic, and it has been laser cut before delivery (with cutting lines on the surface), there are many problems in production:
1)母板边缘处陶瓷容易产生破损、裂缝,并且这些破损、裂缝容易向母板图形内部方向扩展,造成产品报废。1) Ceramics at the edge of the motherboard are prone to breakage and cracks, and these damages and cracks tend to expand toward the interior of the motherboard graphics, resulting in product scrapping.
2)在封装焊接过程或在交付运输过程中母板容易沿切割线开裂,造成产品断裂。2) During the packaging and welding process or during delivery and transportation, the mother board is easy to crack along the cutting line, resulting in product breakage.
发明内容Contents of the invention
针对现有技术存在的问题,本发明提供一种覆铜陶瓷基板母板结构,以解决现有传统的母板边缘容易破损和产生裂缝的问题,还解决了传统在后期封装或者运输过程过程中,母板容易沿着切割线开裂的技术问题。Aiming at the problems existing in the prior art, the present invention provides a copper-clad ceramic substrate motherboard structure to solve the problem that the edge of the existing traditional motherboard is easily damaged and cracks, and also solves the traditional , the technical problem that the mother board is easy to crack along the cutting line.
本发明的技术方案是:一种覆铜陶瓷基板母板结构,包括母板,所述母板的正面或者背面还刻设有纵横交错设置的切割线,其特征在于,所述母板正反两侧的外侧均设置有相对应的增强铜箔工艺边;The technical solution of the present invention is: a copper-clad ceramic substrate motherboard structure, including a motherboard, the front or back of the motherboard is also engraved with criss-cross cutting lines, it is characterized in that the front and back of the motherboard The outer sides of both sides are provided with corresponding reinforced copper foil process edges;
所述增强铜箔工艺边包括四条分别设置在母板外侧的上下左右四侧的铜箔边;The reinforced copper foil process side includes four copper foil sides arranged on the four sides of the upper, lower, left, and right outside the mother board;
所述切割线包括用于母板上铜箔边从母板上掰离的横向切割线和纵向切割线,所述横向切割线或者纵向切割线的两端延伸至所述母板的外边缘;所述横向切割线与所述纵向切割线设有两个,两个横向切割线与两个纵向切割线相交围成一矩形;The cutting line includes a transverse cutting line and a longitudinal cutting line for separating the copper foil edge on the motherboard from the motherboard, and the two ends of the transverse cutting line or the longitudinal cutting line extend to the outer edge of the motherboard; There are two transverse cutting lines and two longitudinal cutting lines, and the two transverse cutting lines intersect with the two longitudinal cutting lines to form a rectangle;
所述切割线还包括用于母板上单个小基板进行掰离的网状内部切割线,所述网状内部切割线的上下左右四个方向上延伸出横向切割线以及纵向切割线,但仍处于邻近的铜箔边的内侧。The cutting line also includes a mesh internal cutting line for breaking off a single small substrate on the motherboard. The horizontal cutting line and the vertical cutting line extend in the four directions of the mesh internal cutting line, but still On the inner side of the adjacent copper foil edge.
本专利通过将传统母板的正方两侧的外边缘均设置有相对应的增强铜箔工艺边,通过铜箔边,增加母板边缘的强度,减少母板的陶瓷边缘破损、裂缝的产生,同时铜箔边可阻止破损、裂缝向母板内部方向扩展。由于铜箔边的保护,母板内部的切割线不能贯穿整个母板,减少了母板沿切割线断裂的风险。In this patent, the outer edges of the square sides of the traditional motherboard are equipped with corresponding reinforced copper foil process edges, through the copper foil edge, the strength of the edge of the motherboard is increased, and the damage and cracks of the ceramic edge of the motherboard are reduced. At the same time, the copper foil edge can prevent damage and cracks from expanding to the inside of the mother board. Due to the protection of the copper foil edge, the cutting line inside the motherboard cannot run through the entire motherboard, reducing the risk of the motherboard breaking along the cutting line.
进一步优选的,所述母板的四个角部中至少一个角部为倒角结构。通过倒角结构,实现母板焊接时定位或防呆。倒角结构的角度为10°-80°。Further preferably, at least one of the four corners of the motherboard is chamfered. Through the chamfer structure, the positioning or fool-proofing of the mother board is realized. The angle of the chamfer structure is 10°-80°.
进一步优选的,所有的铜箔边的外侧与所述母板的外边缘之间存有间隙,且所有铜箔边的外侧与所述母板的外边缘的间距均大于3mm。Further preferably, there is a gap between the outer sides of all copper foil sides and the outer edge of the motherboard, and the distance between the outer sides of all copper foil sides and the outer edge of the motherboard is greater than 3 mm.
进一步优选的,相邻的铜箔边的邻近侧之间的间距大于0.6mm,且相邻的铜箔边邻近侧通过所述纵向切割线或者横向切割线分隔。Further preferably, the distance between adjacent sides of adjacent copper foil sides is greater than 0.6 mm, and the adjacent sides of adjacent copper foil sides are separated by the longitudinal cutting line or the transverse cutting line.
进一步优选的,所有的铜箔边分别为位于上侧的上铜箔边、位于下侧的下铜箔边,位于左侧的左铜箔边以及位于右侧的右铜箔边;Further preferably, all the copper foil sides are the upper copper foil side on the upper side, the lower copper foil side on the lower side, the left copper foil side on the left side and the right copper foil side on the right side;
所述上铜箔边与所述下铜箔边上下镜像对称设置;The upper copper foil side and the lower copper foil side are arranged symmetrically up and down;
所述左铜箔边与所述右铜箔边左右镜像对称设置。The left copper foil side and the right copper foil side are mirror-symmetrically arranged.
进一步优选的,所述左铜箔边以及所述右铜箔边的内侧与邻近的纵向切割线的间距大于0.3mm,所述上铜箔边以及所述下铜箔边的内侧与邻近的横向切割线的间距大于0.3mm。Further preferably, the distance between the inner side of the left copper foil side and the right copper foil side and the adjacent longitudinal cutting line is greater than 0.3mm, and the inner side of the upper copper foil side and the lower copper foil side and the adjacent transverse cutting line The distance between the cutting lines is greater than 0.3mm.
作为一种优选方案,所述纵向切割线的上下两端延伸至母板的外边缘,所述横向切割线的左右两端延伸出纵向切割线,但仍处于邻近的铜箔边的内侧。As a preferred solution, the upper and lower ends of the longitudinal cutting line extend to the outer edge of the mother board, and the left and right ends of the transverse cutting line extend beyond the longitudinal cutting line, but are still inside the adjacent copper foil edge.
这种结构后期的掰离顺序为,先沿纵向切割线将左铜箔边、右铜箔边竖向掰开,之后再沿横向切割线将上铜箔边、下铜箔边横向掰开。The separation sequence in the later stage of this structure is to first split the left copper foil side and the right copper foil side vertically along the longitudinal cutting line, and then split the upper copper foil side and the lower copper foil side horizontally along the horizontal cutting line.
作为另一种优选方案,所述横向切割线的左右两端延伸至母板的外边缘,所述纵向切割线延伸出横向切割线以及纵向切割线,但仍处于邻近的铝箔边的内侧。As another preferred solution, the left and right ends of the transverse cutting line extend to the outer edge of the motherboard, and the longitudinal cutting line extends out of the transverse cutting line and the longitudinal cutting line, but is still inside the adjacent aluminum foil edge.
这种结构后期的掰离顺序为,先沿横向切割线将上铜箔边、下铜箔边横向掰开,之后再沿纵向切割线将左铜箔边、右铜箔边竖向掰开。The separation sequence in the later stage of this structure is to first split the upper copper foil edge and the lower copper foil edge horizontally along the horizontal cutting line, and then vertically split the left copper foil edge and the right copper foil edge along the longitudinal cutting line.
附图说明Description of drawings
图1为本发明具体实施例1的一种结构示意图。FIG. 1 is a schematic structural view of Embodiment 1 of the present invention.
图2为本发明具体实施例1的局部放大图;Fig. 2 is the partial enlarged view of specific embodiment 1 of the present invention;
图3为本发明具体实施例1的局部放大图;Fig. 3 is the partial enlarged view of specific embodiment 1 of the present invention;
图4为本发明具体实施例2的一种结构示意图;Fig. 4 is a kind of structural representation of specific embodiment 2 of the present invention;
图5为本发明具体实施例3的角部处的结构示意图;Fig. 5 is a schematic structural view of the corner of Embodiment 3 of the present invention;
图6为本发明倒角结构设有1-4个情况下的结构示意图。Fig. 6 is a structural schematic diagram of the present invention with 1-4 chamfering structures.
图中:1为铜箔边,2为母板,A1为左铜箔边,A2为右铜箔边,B1为上铜箔边,B2为下铜箔边,M为纵向切割线,L为横向切割线。In the figure: 1 is the copper foil edge, 2 is the motherboard, A1 is the left copper foil edge, A2 is the right copper foil edge, B1 is the upper copper foil edge, B2 is the lower copper foil edge, M is the longitudinal cutting line, L is Horizontal cutting lines.
具体实施方式Detailed ways
下面结合附图对本发明做进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.
具体实施例1:参见图1至图3,一种覆铜陶瓷基板母板结构,包括母板2,母板2的正面或者背面还刻设有纵横交错设置的切割线,母板2正反两侧的外侧均设置有相对应的增强铜箔工艺边;增强铜箔工艺边包括四条分别设置在母板外侧的上下左右四侧的铜箔边1;切割线包括用于母板上的上下设置的铜箔边1从母板上掰离的横向切割线L以及用于母板上左右设置的铜箔边1从母板上掰离的纵向切割线M,横向切割线L两端伸出纵向切割线延伸至母板的外边缘,但仍处于邻近的铝箔边的内侧。所述横向切割线与所述纵向切割线设有两个,两个横向切割线与两个纵向切割线相交围成一矩形。横向切割线的端部均延伸出纵向切割线。纵向切割线的端部延伸出横向切割线。Specific embodiment 1: Referring to FIG. 1 to FIG. 3, a copper-clad ceramic substrate mother board structure includes a mother board 2, and the front or back of the mother board 2 is also engraved with criss-crossing cutting lines, and the front and back of the mother board 2 The outer sides of both sides are provided with corresponding enhanced copper foil process edges; the enhanced copper foil process edges include four copper foil edges 1 respectively arranged on the upper, lower, left, and right sides outside the motherboard; the cutting line includes the upper, lower The set copper foil side 1 is separated from the mother board by the horizontal cutting line L and the copper foil side 1 set on the left and right sides of the mother board is used to separate the longitudinal cutting line M from the motherboard, and the two ends of the horizontal cutting line L protrude The longitudinal cut line extends to the outside edge of the motherboard, but remains inside the adjacent foil edge. There are two transverse cutting lines and two longitudinal cutting lines, and the intersection of the two transverse cutting lines and the two longitudinal cutting lines forms a rectangle. Ends of the transverse cutting lines all extend out of the longitudinal cutting lines. The ends of the longitudinal cutting lines extend from the transverse cutting lines.
切割线还包括用于母板上的单个小基板进行掰离的网状内部切割线,网状内部切割线的上下左右四个方向上均延伸出横向切割线以及纵向切割线,但仍处于邻近的铜箔边的内侧。具体地说,也就是,网状内部切割线的上下两个方向上分别延伸出两个横向切割线,网状内部切割线的左右两个方向上分别延伸出两个纵向切割线。The cutting line also includes the mesh internal cutting line used to break off a single small substrate on the motherboard. The horizontal cutting line and the vertical cutting line extend in the four directions of the mesh internal cutting line, but they are still adjacent to each other. the inner side of the copper foil edge. Specifically, that is, two transverse cutting lines respectively extend in the upper and lower directions of the mesh inner cutting line, and two longitudinal cutting lines extend respectively in the left and right directions of the mesh inner cutting line.
本专利通过将传统母板的正方两侧的外边缘均设置有相对应的增强铜箔工艺边,通过铜箔边,增加母板边缘的强度,减少母板的陶瓷边缘破损、裂缝的产生,同时铜箔边可阻止破损、裂缝向母板内部方向扩展。由于铜箔边的保护,母板内部的切割线不能贯穿整个母板,减少了母板沿切割线断裂的风险。In this patent, the outer edges of the square sides of the traditional motherboard are equipped with corresponding reinforced copper foil process edges, through the copper foil edge, the strength of the edge of the motherboard is increased, and the damage and cracks of the ceramic edge of the motherboard are reduced. At the same time, the copper foil edge can prevent damage and cracks from expanding to the inside of the mother board. Due to the protection of the copper foil edge, the cutting line inside the motherboard cannot run through the entire motherboard, reducing the risk of the motherboard breaking along the cutting line.
所有的铜箔边分别为位于上侧的前铜箔边B1、位于下侧的后铜箔边B2,位于左侧的左铜箔边A1以及位于右侧的右铜箔边A2;上铜箔边B1与下铜箔边B2上下镜像对称设置;左铜箔边A1与右铜箔边A2左右镜像对称设置。All the copper foil edges are the front copper foil edge B1 on the upper side, the rear copper foil edge B2 on the lower side, the left copper foil edge A1 on the left side and the right copper foil edge A2 on the right side; the upper copper foil The side B1 and the lower copper foil side B2 are mirror-symmetrically set up and down; the left copper foil side A1 and the right copper foil side A2 are mirror-symmetrically set up and down.
上铜箔边B1与下铜箔边B2两者与邻近的横向切割线L之间的距离d为0.3mm~1.0mm。The distance d between the upper copper foil side B1 and the lower copper foil side B2 and the adjacent transverse cutting line L is 0.3 mm˜1.0 mm.
左铜箔边A1与右铜箔边A2两者与邻近的纵向切割线M之间的间距e为0.3mm~1.0mm。The distance e between the left copper foil edge A1 and the right copper foil edge A2 and the adjacent longitudinal cutting line M is 0.3 mm˜1.0 mm.
所有的铜箔边的外侧与母板的外边缘之间存有间隙,且上铜箔边以及下铜箔边的外侧与母板的外边缘的间距b均大于3mm。左铜箔边以及右铜箔边的外侧与母板的外边缘的间距a均大于3mm。右铜箔边和左铜箔边的顶部与邻近的横向切割线的间距c为0.3mm~1.0mm。There is a gap between the outer sides of all copper foil sides and the outer edge of the mother board, and the distance b between the outer sides of the upper copper foil side and the lower copper foil side and the outer edge of the mother board is greater than 3 mm. The distance a between the outer side of the left copper foil side and the outer side of the right copper foil side and the outer edge of the mother board is greater than 3 mm. The distance c between the tops of the right copper foil side and the left copper foil side and adjacent transverse cutting lines is 0.3mm˜1.0mm.
网状内部切割线超出横向切割线L或纵向切割线M的距离f为:0<f<c、d、e。参见图3。The distance f of the mesh internal cutting line beyond the transverse cutting line L or the longitudinal cutting line M is: 0<f<c, d, e. See Figure 3.
横向切割线L的左右两端延伸至延伸至母板的外边缘。The left and right ends of the transverse cutting line L extend to the outer edge of the motherboard.
这种结构后期的掰离顺序为,先沿横向切割线L将上铜箔边B1、下铜箔边B2横向掰开,之后再沿纵向切割线M将左铜箔边A1、右铜箔边A2竖向掰开方向排列。The order of separation in the later stage of this structure is to first split the upper copper foil edge B1 and the lower copper foil edge B2 horizontally along the transverse cutting line L, and then cut the left copper foil edge A1 and the right copper foil edge along the longitudinal cutting line M. A2 is arranged in the direction of splitting vertically.
可以将母板的长边侧的铜箔边先进行掰离。The copper foil on the long side of the motherboard can be broken off first.
具体实施例2,参见图4,纵向切割线M的上下两端延伸至延伸至母板的外边缘。Specific embodiment 2, referring to FIG. 4 , the upper and lower ends of the longitudinal cutting line M extend to the outer edge of the motherboard.
这种结构后期的掰离顺序为,先沿纵向切割线M将左铜箔边A1、右铜箔边A2竖向掰开,之后再沿横向切割线L将上铜箔边B1、下铜箔边B2横向掰开。The separation sequence in the later stage of this structure is as follows: First, the left copper foil edge A1 and the right copper foil edge A2 are vertically separated along the longitudinal cutting line M, and then the upper copper foil edge B1 and the lower copper foil edge B1 are separated along the transverse cutting line L. Side B2 is split apart laterally.
具体实施例3,参见图5以及图6,在具体实施例1或2的基础上,母板的四个角部中至少一个角部为倒角结构。通过倒角结构,实现母板焊接时定位或防呆。倒角结构的角度为10°-80°。母板四角可倒1~4个斜角。图6中(A)为一个角部进行倒角的示意图。(B)为两个角部进行倒角的示意图。(C)为三个角部进行倒角的示意图。(D)为四个角部进行倒角的示意图。倒角结构邻近的铝箔边上也为倒角结构。Specific embodiment 3, referring to FIG. 5 and FIG. 6 , on the basis of specific embodiment 1 or 2, at least one of the four corners of the motherboard is a chamfered structure. Through the chamfer structure, the positioning or fool-proofing of the mother board is realized. The angle of the chamfer structure is 10°-80°. The four corners of the motherboard can be inverted with 1 to 4 bevels. (A) in FIG. 6 is a schematic diagram of chamfering a corner. (B) is a schematic diagram of chamfering two corners. (C) is a schematic diagram of chamfering three corners. (D) is a schematic diagram of chamfering four corners. The edge of the aluminum foil adjacent to the chamfer structure is also a chamfer structure.
以上仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above are only preferred embodiments of the present invention, and it should be pointed out that for those of ordinary skill in the art, some improvements and modifications can also be made without departing from the principle of the present invention, and these improvements and modifications should also be considered Be the protection scope of the present invention.
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