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CN110375845B - Electrostatic balance type high-sensitivity hydrophone - Google Patents

Electrostatic balance type high-sensitivity hydrophone Download PDF

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CN110375845B
CN110375845B CN201910595768.0A CN201910595768A CN110375845B CN 110375845 B CN110375845 B CN 110375845B CN 201910595768 A CN201910595768 A CN 201910595768A CN 110375845 B CN110375845 B CN 110375845B
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polar plate
driving
acoustic
elastic body
hydrophone
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CN110375845A (en
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宋开臣
缪秋艳
吴宾
叶凌云
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Zhejiang University ZJU
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/186Hydrophones

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Abstract

本发明公开了一种静电平衡型高灵敏度水听器,所述静电平衡型高灵敏度水听器包括声压敏感结构、位移检测装置、静电驱动装置和检测与控制电路。在强背景噪声下,传统水听器声压敏感结构中的声弹性体由于变形过大呈现非线性特性,灵敏度下降。本发明通过闭环检测的方式,采用位移检测装置检测弹性体的形变量,采用静电驱动装置驱动弹性体,使弹性体工作在平衡位置。本发明弥补了水听器弹性体在强背景噪声下呈现非线性而使灵敏度下降的缺点,有利于提高水听器的灵敏度。

Figure 201910595768

The invention discloses an electrostatic balance type high sensitivity hydrophone, which comprises a sound pressure sensitive structure, a displacement detection device, an electrostatic drive device and a detection and control circuit. Under the strong background noise, the acoustic elastic body in the sound pressure sensitive structure of the traditional hydrophone exhibits nonlinear characteristics due to excessive deformation, and the sensitivity decreases. The present invention adopts the displacement detection device to detect the deformation amount of the elastic body by means of closed-loop detection, and uses the electrostatic driving device to drive the elastic body, so that the elastic body works in the equilibrium position. The invention makes up for the defect that the elastic body of the hydrophone exhibits nonlinearity under strong background noise and reduces the sensitivity, and is beneficial to improve the sensitivity of the hydrophone.

Figure 201910595768

Description

一种静电平衡型高灵敏度水听器An electrostatically balanced high-sensitivity hydrophone

技术领域technical field

本发明涉及一种水听器,尤其涉及一种静电平衡型高灵敏度水听器,属于测量仪器技术领域。The invention relates to a hydrophone, in particular to an electrostatic balance type high-sensitivity hydrophone, which belongs to the technical field of measuring instruments.

背景技术Background technique

水听器是水声探测的关键器件。在水听器的探头中,一般通过检测声弹性体的位移来获取微弱的声压信号。在海洋环境中,水听器往往受强背景噪声干扰。在强噪声下,声弹性体的变形很大,振动位移与声压的关系呈非线性,导致水听器探测灵敏度降低。基于闭环检测的静电平衡型水听器在检测水听器弹性体的大变形后,通过反馈控制使弹性体维持在平衡位置,可以降低弹性体非线性,提高水听器灵敏度。The hydrophone is the key device for underwater sound detection. In the probe of the hydrophone, the weak sound pressure signal is generally obtained by detecting the displacement of the acoustic elastic body. In marine environments, hydrophones are often disturbed by strong background noise. Under strong noise, the deformation of the acousto-elastic body is large, and the relationship between the vibration displacement and the sound pressure is nonlinear, resulting in a decrease in the detection sensitivity of the hydrophone. After detecting the large deformation of the elastic body of the hydrophone, the electrostatic balance hydrophone based on closed-loop detection can maintain the elastic body in the equilibrium position through feedback control, which can reduce the nonlinearity of the elastic body and improve the sensitivity of the hydrophone.

发明内容SUMMARY OF THE INVENTION

本发明所要解决的技术问题是水听器在强背景噪声下灵敏度不足的问题,提供一种静电平衡型高灵敏度水听器。The technical problem to be solved by the present invention is the problem of insufficient sensitivity of the hydrophone under strong background noise, and an electrostatic balance type high-sensitivity hydrophone is provided.

为实现上述目的,本发明采用以下设计方案:一种静电平衡型高灵敏度水听器,包括:In order to achieve the above object, the present invention adopts the following design scheme: an electrostatic balance type high-sensitivity hydrophone, comprising:

声压敏感结构,包括声弹性体和壳体,所述声弹性体安装于壳体中,边缘与壳体固定连接;The sound pressure sensitive structure includes an acoustic elastomer and a casing, the acoustic elastomer is installed in the casing, and the edge is fixedly connected to the casing;

位移检测装置,用于检测所述声弹性体的形变量;a displacement detection device for detecting the deformation amount of the acoustic elastic body;

静电驱动装置,用于驱动并保持声弹性体处于平衡位置;An electrostatic drive to drive and maintain the sonoelastic body in an equilibrium position;

检测与控制电路,用于接收和处理位移检测装置的信号,输出反馈电压给静电驱动装置。The detection and control circuit is used to receive and process the signal of the displacement detection device, and output the feedback voltage to the electrostatic driving device.

进一步的,所述声弹性体为表面贴有导电体的薄膜。Further, the acoustic elastomer is a film with a conductor attached to the surface.

进一步的,所述导电体为金属导电薄片。Further, the conductor is a metal conductive sheet.

进一步的,所述静电驱动装置包括上驱动极板和下驱动极板;所述上驱动极板位于所述声弹性体上方,所述下驱动极板位于所述声弹性体下方;上驱动极板和下驱动极板均与壳体固定连接,上驱动极板和下驱动极板均与闭环控制电路的反馈信号输出端相连。Further, the electrostatic driving device includes an upper driving pole plate and a lower driving pole plate; the upper driving pole plate is located above the acoustic elastic body, and the lower driving pole plate is located below the acoustic elastic body; Both the plate and the lower driving pole plate are fixedly connected with the casing, and both the upper driving pole plate and the lower driving pole plate are connected with the feedback signal output end of the closed-loop control circuit.

进一步的,所述上驱动极板和下驱动极板为导体材料。Further, the upper driving electrode plate and the lower driving electrode plate are made of conductor material.

进一步的,所述上驱动极板和下驱动极板均密集有透声小孔,使极板不阻碍声压传递。Further, the upper driving pole plate and the lower driving pole plate are densely provided with sound-transmitting small holes, so that the pole plates do not hinder the transmission of sound pressure.

进一步的,所述位移检测装置包括定极板、动极板和连接件;定极板与信号处理与控制电路电连接;动极板通过连接件与声弹性体连接;连接件穿过下驱动极板中心的小孔,使动极板位于下驱动极板下方。Further, the displacement detection device includes a fixed pole plate, a moving pole plate and a connecting piece; the fixed pole plate is electrically connected with the signal processing and control circuit; the moving pole plate is connected with the acoustic elastic body through the connecting piece; the connecting piece passes through the lower drive The small hole in the center of the pole plate makes the moving pole plate below the lower driving pole plate.

进一步的,所述连接件为绝缘材料;所述动极板和定级板均为导体材料。Further, the connecting piece is an insulating material; the moving electrode plate and the grading plate are both conductor materials.

进一步的,所述信号处理与控制电路和所述定级板均与壳体固定连接。Further, both the signal processing and control circuit and the grading board are fixedly connected to the housing.

进一步的,所述信号处理与控制电路包括电容检测模块、处理器模块和高压驱动模块;电容检测模块和高压驱动模块均与处理器模块相连;电容检测模块与位移检测装置相连,用于检测声弹性体的位移;高压驱动模块与静电驱动装置相连,用于控制驱动极板电压的大小;处理器模块接收电容检测模块的输出信号,并将输出信号经过PID控制算法处理,得到反馈控制信号;高压驱动模块根据反馈控制信号给上驱动极板和下驱动极板施加反馈电压,从而产生反馈力使声弹性保持在平衡位置;所述信号处理与控制电路输出的反馈控制信号也用以表征声压测量值。Further, the signal processing and control circuit includes a capacitance detection module, a processor module and a high-voltage drive module; the capacitance detection module and the high-voltage drive module are both connected to the processor module; the capacitance detection module is connected to the displacement detection device for detecting sound. The displacement of the elastic body; the high-voltage driving module is connected with the electrostatic driving device to control the voltage of the driving plate; the processor module receives the output signal of the capacitance detection module, and processes the output signal through the PID control algorithm to obtain the feedback control signal; The high-voltage driving module applies a feedback voltage to the upper driving electrode plate and the lower driving electrode plate according to the feedback control signal, thereby generating a feedback force to keep the acoustic elasticity in a balanced position; the feedback control signal output by the signal processing and control circuit is also used to characterize the acoustic pressure measurement.

本发明的有益效果是:水听器声压敏感结构中的声弹性体在强背景噪声下往往产生很大的位移。声弹性体在大变形下出现非线性,导致水听器检测灵敏度降低。静电闭环控制可以使水听器声弹性维持在平衡位置,弥补水听器弹性体在强背景噪声下变形大呈现非线性而使灵敏度下降的缺点,有利于提高水听器的灵敏度。The beneficial effect of the invention is that the acoustic elastic body in the sound pressure sensitive structure of the hydrophone often produces a large displacement under strong background noise. Acoustoelastics exhibit nonlinearity under large deformations, resulting in reduced detection sensitivity of hydrophones. The electrostatic closed-loop control can maintain the acoustic elasticity of the hydrophone in the equilibrium position, and make up for the defect that the hydrophone elastic body deforms greatly and presents nonlinearity under strong background noise, which reduces the sensitivity, which is beneficial to improve the sensitivity of the hydrophone.

附图说明Description of drawings

图1为静电平衡型高灵敏度水听器总体结构示意图;Figure 1 is a schematic diagram of the overall structure of an electrostatically balanced high-sensitivity hydrophone;

图2为静电平衡型高灵敏度水听器声弹性体示意图;Figure 2 is a schematic diagram of an electrostatically balanced high-sensitivity hydrophone acoustic elastomer;

图3为静电平衡型高灵敏度水听器在静电驱动装置示意图;3 is a schematic diagram of an electrostatically balanced high-sensitivity hydrophone in an electrostatic driving device;

图4为静电平衡型高灵敏度水听器位移检测装置示意图。FIG. 4 is a schematic diagram of an electrostatic balance type high-sensitivity hydrophone displacement detection device.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更见清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。显然,所述实施例是本发明一部分实施例,而不是全部的实施例。基于本发明的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的其他实施例,都属于本发明的保护范围。In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

如图1所示,本发明提供一种静电平衡型高灵敏度水听器,包括声压敏感结构1、位移检测装置2、静电驱动装置3和检测与控制电路4。所述声压敏感结构包括声弹性体11和壳体 12,声弹性体11安装于壳体12中,边缘与壳体12固定连接;所述位移检测装置2用于检测所述声弹性体11的形变量;所述静电驱动装置3,用于驱动并保持声弹性体11处于平衡位置;所述检测与控制电路4,用于接收和处理位移检测装置2信号,输出反馈电压给静电驱动装置3。同时,反馈电压也表征声压测量值。As shown in FIG. 1 , the present invention provides an electrostatically balanced high-sensitivity hydrophone, including a sound pressure sensitive structure 1 , a displacement detection device 2 , an electrostatic drive device 3 and a detection and control circuit 4 . The sound pressure sensitive structure includes an acoustic elastic body 11 and a casing 12 , the acoustic elastic body 11 is installed in the casing 12 , and the edge is fixedly connected to the casing 12 ; the displacement detection device 2 is used to detect the acoustic elastic body 11 The electrostatic driving device 3 is used to drive and keep the acoustic elastic body 11 in a balanced position; the detection and control circuit 4 is used to receive and process the signal of the displacement detection device 2, and output a feedback voltage to the electrostatic driving device 3. At the same time, the feedback voltage also characterizes the sound pressure measurement.

如图2所示,所述声弹性体11为表面贴有导电体112的薄膜111。所述导电体112为金属导电薄片。薄膜111的形状为圆形。由于在相同声压下圆形薄膜中心点的位移比其他形状的薄膜更大,因此选用圆形薄膜有利于提高检测灵敏度。As shown in FIG. 2 , the acoustic elastic body 11 is a thin film 111 with a conductor 112 attached to the surface. The conductor 112 is a metal conductive sheet. The shape of the thin film 111 is circular. Since the displacement of the center point of the circular film is larger than that of other shapes under the same sound pressure, the selection of the circular film is beneficial to improve the detection sensitivity.

如图3所示,所述静电驱动装置3包括上驱动极板31和下驱动极板32;所述上驱动极板 31位于所述声弹性体11上方,所述下驱动极板32位于所述声弹性体11下方。上驱动极板 31和下驱动极板32均与壳体固定连接,与检测与控制电路4的反馈电压输出端相连。所述上驱动极板31和下驱动极板32为导体材料,均密集有透声小孔311,使极板不阻碍声压传递。As shown in FIG. 3 , the electrostatic driving device 3 includes an upper driving electrode plate 31 and a lower driving electrode plate 32 ; the upper driving electrode plate 31 is located above the acoustic elastic body 11 , and the lower driving electrode plate 32 is located at the Below the acoustic elastic body 11 . Both the upper driving pole plate 31 and the lower driving pole plate 32 are fixedly connected to the casing, and are connected to the feedback voltage output terminal of the detection and control circuit 4. The upper driving pole plate 31 and the lower driving pole plate 32 are conductive materials, and are densely formed with sound-transmitting small holes 311, so that the pole plates do not hinder the transmission of sound pressure.

如图4所示,所述位移检测装置2包括定极板21、动极板22和连接件23。定极板21与信号处理与控制电路4电连接。所述信号处理与控制电路4和定级板21均与壳体12固定连接。动极板22通过连接件23与声弹性体11连接。连接件23穿过下驱动极板32中心的小孔,使动极板22位于下驱动极板32下方。所述连接件23为绝缘材料;所述定级板21和所述动极板22均为导体材料。定极板21与动极板22构成检测电容,声弹性体11在声压作用下产生形变,使动极板22发生位移,引起检测电容的变化。但位移检测装置不限于电容检测。所述连接件23为轻质量高刚度材料,选用碳化硅陶瓷,但不限于此;所述动极板22为轻质量高刚度材料,选用铝镁合金,但不限于此。As shown in FIG. 4 , the displacement detection device 2 includes a fixed pole plate 21 , a movable pole plate 22 and a connecting member 23 . The stator plate 21 is electrically connected to the signal processing and control circuit 4 . The signal processing and control circuit 4 and the grading board 21 are fixedly connected to the housing 12 . The moving pole plate 22 is connected to the acoustic elastic body 11 through the connecting member 23 . The connecting piece 23 passes through the small hole in the center of the lower driving pole plate 32 , so that the moving pole plate 22 is located below the lower driving pole plate 32 . The connecting piece 23 is an insulating material; the grading plate 21 and the moving electrode plate 22 are both conductor materials. The fixed electrode plate 21 and the movable electrode plate 22 form a detection capacitor, and the acoustic elastic body 11 is deformed under the action of sound pressure, so that the movable electrode plate 22 is displaced and the detection capacitance changes. However, the displacement detection device is not limited to capacitance detection. The connecting piece 23 is made of light-weight and high-rigidity material, and silicon carbide ceramics are selected, but not limited thereto; the moving pole plate 22 is made of light-weight and high-rigidity material, and aluminum-magnesium alloy is selected, but not limited thereto.

所述信号处理与控制电路4包括电容检测模块、处理器模块和高压驱动模块。电容检测模块和高压驱动模块均与处理器模块相连;电容检测模块与位移检测装置2相连,用于检测声弹性体11的位移;高压驱动模块与静电驱动装置3相连,用于控制驱动极板电压的大小;处理器模块接收电容检测模块的输出信号,并将输出信号经过PID控制算法处理,得到反馈控制信号,反馈控制信号驱动静电驱动装置,使高压驱动模块给上驱动极板31和下驱动极板 32施加反馈电压,从而产生反馈力使声弹性11保持在平衡位置,所述信号处理与控制电路4 输出的反馈控制信号用以表征声压测量值。所述电容检测模块采用MS3110芯片,但不限于此;所述处理器模块采用STM32F103VB芯片,但不限于此;所述高压驱动模块采用DAC082S085和OPA187芯片,但不限于此。The signal processing and control circuit 4 includes a capacitance detection module, a processor module and a high-voltage drive module. The capacitance detection module and the high-voltage driving module are both connected with the processor module; the capacitance detection module is connected with the displacement detection device 2 for detecting the displacement of the acoustic elastic body 11 ; the high-voltage driving module is connected with the electrostatic driving device 3 for controlling the driving plate The size of the voltage; the processor module receives the output signal of the capacitance detection module, and processes the output signal through the PID control algorithm to obtain a feedback control signal. The feedback control signal drives the electrostatic drive device, so that the high-voltage drive module sends the upper drive plate 31 and the lower The drive plate 32 applies a feedback voltage, thereby generating a feedback force to keep the acoustic elasticity 11 in an equilibrium position. The feedback control signal output by the signal processing and control circuit 4 is used to characterize the sound pressure measurement value. The capacitance detection module adopts, but is not limited to, the MS3110 chip; the processor module adopts, but is not limited to, the STM32F103VB chip; the high-voltage driving module adopts, but is not limited to, the DAC082S085 and OPA187 chips.

本发明通过位移检测装置检测弹性体的形变量,采用静电驱动装置驱动弹性体,使其工作在平衡位置。闭环检测弥补了水听器弹性体在强背景噪声下变形大呈现非线性而使灵敏度下降的缺点,提高了水听器灵敏度。In the invention, the deformation amount of the elastic body is detected by the displacement detection device, and the elastic body is driven by the electrostatic driving device to make it work in the equilibrium position. The closed-loop detection makes up for the shortcoming that the elastic body of the hydrophone deforms greatly and presents nonlinearity under strong background noise, which reduces the sensitivity, and improves the sensitivity of the hydrophone.

本技术领域的人员根据本发明所提供的文字描述、附图以及权利要求书能够很容易在不脱离权利 要求书所限定的本发明的思想和范围条件下,可以做出多种变化和改动。凡是依据本发明的技术思想和实质对上述实施例进行的任何修改、等同变化,均属于本发明的权利要求所限定的保护范围之内。Those skilled in the art can easily make various changes and modifications without departing from the spirit and scope of the present invention defined by the claims according to the written description, drawings and claims provided by the present invention. Any modifications and equivalent changes made to the above embodiments according to the technical idea and essence of the present invention fall within the protection scope defined by the claims of the present invention.

Claims (7)

1. An electrostatic equilibrium type high sensitivity hydrophone, characterized in that: the method comprises the following steps:
the sound pressure sensitive structure (1) comprises a sound elastic body (11) and a shell (12), wherein the sound elastic body (11) is arranged in the shell (12), and the edge of the sound elastic body is fixedly connected with the shell (12);
displacement detection means (2) for detecting the amount of deformation of the acoustic elastic body (11);
an electrostatic drive device (3) for driving and maintaining the acoustic elastomer (11) in a balanced position;
the detection and control circuit (4) is used for receiving and processing signals of the displacement detection device (2) and outputting feedback voltage to the electrostatic driving device (3);
the electrostatic driving device (3) comprises an upper driving polar plate (31) and a lower driving polar plate (32); the upper driving polar plate (31) is positioned above the acoustic elastomer (11), and the lower driving polar plate (32) is positioned below the acoustic elastomer (11); the upper driving polar plate (31) and the lower driving polar plate (32) are both fixedly connected with the shell (12), and the upper driving polar plate (31) and the lower driving polar plate (32) are both connected with a feedback signal output end of the detection and control circuit (4);
the upper driving polar plate (31) and the lower driving polar plate (32) are both provided with sound-transmitting small holes (311) densely, so that the polar plates do not obstruct sound pressure transmission;
the displacement detection device (2) comprises a fixed polar plate (21), a movable polar plate (22) and a connecting piece (23); the fixed polar plate (21) is electrically connected with the detection and control circuit (4); the movable polar plate (22) is connected with the acoustic elastomer (11) through a connecting piece (23); the connecting piece (23) passes through a small hole in the center of the lower driving pole plate (32), and the movable pole plate (22) is positioned below the lower driving pole plate (32).
2. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the acoustic elastomer (11) is a film (111) with a conductor (112) attached to the surface.
3. The electrostatically balanced high sensitivity hydrophone of claim 2, wherein: the conductor (112) is a metal conductive sheet.
4. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the upper driving polar plate (31) and the lower driving polar plate (32) are made of conductor materials.
5. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the connecting piece (23) is made of insulating materials; the fixed polar plate (21) and the movable polar plate (22) are both made of conductor materials.
6. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the detection and control circuit (4) and the fixed pole plate (21) are both fixedly connected with the shell (12).
7. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the detection and control circuit (4) comprises a capacitance detection module, a processor module and a high-voltage driving module; the capacitance detection module and the high-voltage driving module are connected with the processor module; the capacitance detection module is connected with the displacement detection device (2) and is used for detecting the displacement of the acoustic elastomer (11); the high-voltage driving module is connected with the electrostatic driving device (3) and is used for controlling the voltage of the driving polar plate; the processor module receives an output signal of the capacitance detection module and processes the output signal through a PID control algorithm to obtain a feedback control signal; the high-voltage driving module applies feedback voltage to the upper driving polar plate (31) and the lower driving polar plate (32) according to the feedback control signal, so that feedback force is generated to keep the acoustic elastomer (11) at a balance position; the feedback control signal output by the detection and control circuit (4) is also used for representing the sound pressure measured value.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029012A1 (en) * 2003-09-22 2005-03-31 Hosiden Corporation Vibration sensor
CN1846121A (en) * 2003-09-02 2006-10-11 星电株式会社 Vibration sensor
JP2006311106A (en) * 2005-04-27 2006-11-09 Matsushita Electric Works Ltd Acoustic sensor
CN107505479A (en) * 2017-09-26 2017-12-22 华中科技大学 A kind of electrostatic support accelerometer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU487471A1 (en) * 1972-12-18 1975-10-05 Ленинградский Институт Киноинженеров Electrostatic headset
JPS56165490A (en) * 1980-05-23 1981-12-19 Toshiba Corp Headphone device
CN2349736Y (en) * 1998-09-25 1999-11-17 戴文彬 Electrostatic loudspeaker using insulating-board plated metal on back side as electrode
JP4103877B2 (en) * 2004-09-22 2008-06-18 セイコーエプソン株式会社 Electrostatic ultrasonic transducer and ultrasonic speaker

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1846121A (en) * 2003-09-02 2006-10-11 星电株式会社 Vibration sensor
WO2005029012A1 (en) * 2003-09-22 2005-03-31 Hosiden Corporation Vibration sensor
JP2006311106A (en) * 2005-04-27 2006-11-09 Matsushita Electric Works Ltd Acoustic sensor
CN107505479A (en) * 2017-09-26 2017-12-22 华中科技大学 A kind of electrostatic support accelerometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
自校准智能水听器研究;张益;《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》;20071115;正文第11-37页 *

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