CN110346627A - Weak current detection device - Google Patents
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- 238000001514 detection method Methods 0.000 title claims abstract description 31
- 239000000758 substrate Substances 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 230000005283 ground state Effects 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229940074200 diamode Drugs 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- PGYPOBZJRVSMDS-UHFFFAOYSA-N loperamide hydrochloride Chemical compound Cl.C=1C=CC=CC=1C(C=1C=CC=CC=1)(C(=O)N(C)C)CCN(CC1)CCC1(O)C1=CC=C(Cl)C=C1 PGYPOBZJRVSMDS-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 238000000387 optically detected magnetic resonance Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0092—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
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- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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Abstract
本发明解决了以下课题:现有的磁传感器由于存在灵敏度的极限,对于微小电流、例如nA级别的泄漏电流,存在着无法检测的问题。另外,在现有的检测方法中,通过所施加的交流电流在电极之间产生广泛分布的磁场,结果,泄漏电流所引起的磁场变动不能清楚的看到。本发明提供一种微小电流检测装置,其具备:含有NVC的磁传感器以及向量势装置,即能够检测微小的泄漏电流又能够提高作为磁传感器的灵敏度。
The present invention solves the problem that the conventional magnetic sensor has a problem of being unable to detect a small current, for example, a leakage current of the order of nA, due to the limit of sensitivity. In addition, in the conventional detection method, a widely distributed magnetic field is generated between the electrodes by the applied alternating current, and as a result, the magnetic field fluctuation caused by the leakage current cannot be clearly seen. The present invention provides a micro current detection device including a magnetic sensor including NVC and a vector potential device, which can detect micro leakage current and improve the sensitivity as a magnetic sensor.
Description
技术领域technical field
本发明涉及一种微小电流检测装置。The invention relates to a tiny current detection device.
背景技术Background technique
近年来,对于含有氮晶格空位中心(NVC:Nitrogen Vacancy Center)的结构,其在磁传感器技术领域上的应用得以注目。In recent years, a structure containing a nitrogen vacancy center (NVC: Nitrogen Vacancy Center) has attracted attention in the field of magnetic sensor technology.
在通常情况下,基态的电子被绿光激发之后,在返回基态时产生红光。另一方面,例如金刚石结构之中的氮原子和晶格空位中心(NVC:Nitrogen Vacancy Center)中的电子,通过2.87GHz程度的高频磁场的照射,从基态之中三个次能级中最低等级(ms=0),跃迁至基态中的比其高能量轨道的等级(ms=±1)。该状态的电子若被绿光激发,因为在无辐射的情况下返回基态之中三个次能级中的最低等级(ms=0),则发光量将减少,通过检测该光能够知道通过高频磁场是否发生了磁共振。Under normal circumstances, after the electrons in the ground state are excited by green light, red light is generated when they return to the ground state. On the other hand, for example, nitrogen atoms in the diamond structure and electrons in a lattice vacancy center (NVC: Nitrogen Vacancy Center) are irradiated with a high-frequency magnetic field of about 2.87 GHz, and the lowest among the three sub-levels in the ground state level (m s =0), the level of the transition to a higher energy orbital in the ground state (m s =±1). If the electrons in this state are excited by green light, since they return to the lowest level (m s = 0) of the three sub-levels in the ground state without radiation, the amount of luminescence will decrease. Whether magnetic resonance occurs in the high frequency magnetic field.
在一个测定系统之中,在金刚石样品的下方设置环缝式谐振器(Split RingResonator)或线圈式天线或线丝式天线,从该谐振器向样品照射2.87GHz程度的微波区域的高频磁场,进行高频磁场和激发光的扫描,并通过检测装置检测来自电子的红光的减少量,以此获得处于上述金刚石结构附近的细胞的信息(例如参照非专利文献1)。In one measurement system, a ring-slit resonator (Split Ring Resonator), a coil-type antenna, or a wire-type antenna is installed below a diamond sample, and a high-frequency magnetic field in the microwave region of about 2.87 GHz is irradiated to the sample from the resonator, Scanning a high-frequency magnetic field and excitation light, and detecting a reduction in red light from electrons by a detection device, obtains information on cells in the vicinity of the diamond structure (see, for example, Non-Patent Document 1).
另外,在电池技术领域之中,特别是对于汽车和民用领域中广泛使用的锂电池等电池,由于电极的剥离或严酷的使用环境,能够预想有电极之间漏电或短路的情况。为了随时监视像这样的情况,例如开发了不需破坏电池、而利用磁传感器检测泄漏电流的装置。In addition, in the field of battery technology, especially for batteries such as lithium batteries widely used in automobiles and consumer fields, it is expected that there may be leakage or short-circuit between electrodes due to electrode peeling or harsh use environment. In order to monitor such a situation at any time, for example, a device that detects leakage current using a magnetic sensor without destroying the battery has been developed.
专利文献1:日本特开2016-090581号公报Patent Document 1: Japanese Patent Laid-Open No. 2016-090581
非专利文献1:Kento Sasaki,et.al.,“Broadband,large-area microwaveantenna for optically-detected magnetic resonance of nitrogen-vacancy centersin diamode”REVIEW OF SCIENTIFIC INSTRUMENTS 87,053904(2016)Non-Patent Document 1: Kento Sasaki, et.al., "Broadband, large-area microwaveantenna for optically-detected magnetic resonance of nitrogen-vacancy centers in diamode" REVIEW OF SCIENTIFIC INSTRUMENTS 87, 053904 (2016)
发明内容SUMMARY OF THE INVENTION
但是,对于利用在上述情况的磁传感器,由于存在灵敏度的极限,对于微小电流、例如nA级别的泄漏电流,存在着无法检测的问题。However, since the magnetic sensor used in the above-mentioned case has a limit of sensitivity, there is a problem that it cannot detect a small current, for example, a leakage current of the order of nA.
另外,NVC等的磁传感器的灵敏度,由于1/f噪声的影响,在高频域具有高灵敏度,这已是公众所知的,为了更有效地提高测定灵敏度,在被测定场所进行AC的调制是有效的。In addition, the sensitivity of magnetic sensors such as NVC is known to have high sensitivity in the high frequency region due to the influence of 1/f noise. In order to improve the measurement sensitivity more effectively, AC modulation is performed at the measurement site. It's effective.
另外,如图4所示,在从电源130将交流电流供给到电极150的情况下,通过设置在电极150上方的磁检测元件120,虽然能够检测出电极150之间的泄漏电流,但从图5模拟的结果可以知道下述内容:由于通过该交流电流在电极150之间产生广泛分布的磁场,结果,泄漏电流所引起的磁场变动不能清楚的看到。换句话说,对于nA级别的泄漏电流,现有的检测方法在提高灵敏度方面存在着极限。In addition, as shown in FIG. 4 , when an alternating current is supplied from the power source 130 to the electrodes 150, the leakage current between the electrodes 150 can be detected by the magnetic detection element 120 provided above the electrodes 150, but the leakage current between the electrodes 150 can be detected. 5. From the simulation results, it can be understood that since the alternating current generates a widely distributed magnetic field between the electrodes 150, as a result, the magnetic field fluctuation caused by the leakage current cannot be clearly seen. In other words, for nA-level leakage currents, existing detection methods have limitations in improving sensitivity.
本发明是鉴于上述问题而完成的,其目的是提供一种利用具有氮晶格空位中心的结构而能够提高检测灵敏度的微小电流检测装置。The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a microcurrent detection device capable of improving detection sensitivity by utilizing a structure having a nitrogen lattice vacancy center.
本发明所涉及的微小电流检测装置,具备:含有NVC的磁传感器;以及向量势装置。The minute current detection device according to the present invention includes: a magnetic sensor including an NVC; and a vector potential device.
根据本发明,能够获得一种既能够检测微小的泄漏电流又能够提高作为磁传感器的灵敏度的微小电流检测装置。According to the present invention, it is possible to obtain a minute current detection device capable of detecting minute leakage currents and improving the sensitivity as a magnetic sensor.
附图说明Description of drawings
图1是表示本发明实施方式1所涉及的微小电流检测装置的图。FIG. 1 is a diagram showing a minute current detection device according to Embodiment 1 of the present invention.
图2是表示本发明实施方式1所涉及的、含有NVC的磁传感器的示意图。2 is a schematic diagram showing a magnetic sensor including NVC according to Embodiment 1 of the present invention.
图3是表示本发明实施方式1所涉及的微小电流检测装置的图1中沿A-A’剖面的图。Fig. 3 is a cross-section taken along A-A' in Fig. 1 showing the minute current detection device according to Embodiment 1 of the present invention.
图4是表示现有的泄漏电流检测装置的图。FIG. 4 is a diagram showing a conventional leakage current detection device.
图5是基于现有检测方法的电极之间的磁场的模拟图。FIG. 5 is a simulation diagram of a magnetic field between electrodes based on a conventional detection method.
符号说明Symbol Description
10:微小电流检测装置;20:含有NVC的磁传感器;21:包含含有NVC的基板的传感部;22:入射装置;23:出射检测装置;40:电池;50、150:电极;60、160:微小电流通路;70:向量势装置;71:管状体;72:线圈体;120:磁检测元件;130:电源。10: Microcurrent detection device; 20: Magnetic sensor including NVC; 21: Sensing part including substrate including NVC; 22: Incident device; 23: Exit detection device; 40: Battery; 50, 150: Electrodes; 60, 160: micro current path; 70: vector potential device; 71: tubular body; 72: coil body; 120: magnetic detection element; 130: power supply.
具体实施方式Detailed ways
以下,根据附图来说明本发明的具体实施方式。Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings.
实施方式1Embodiment 1
图1是表示本发明的实施方式1所涉及的微小电流检测装置10的图。微小电流检测装置10具备:含有NVC的磁传感器20;以及向量势装置70。在作为检查对象的电池40的电极50的上方,该微小电流检测装置10的含有NVC的磁传感器20,以与电极50相平行并与电池40不接触的方式而设置。FIG. 1 is a diagram showing a minute current detection device 10 according to Embodiment 1 of the present invention. The minute current detection device 10 includes: a magnetic sensor 20 including an NVC; and a vector potential device 70 . Above the electrode 50 of the battery 40 to be inspected, the NVC-containing magnetic sensor 20 of the minute current detection device 10 is provided in parallel with the electrode 50 and not in contact with the battery 40 .
另外,图2是表示本发明的实施方式1所涉及的、含有NVC的磁传感器的示意图。如图2所示,含有NVC的磁传感器20具备:包含含有NVC的基板的传感部21、入射装置22、出射检测装置23以及磁场产生装置24。2 is a schematic diagram showing a magnetic sensor including NVC according to Embodiment 1 of the present invention. As shown in FIG. 2 , the magnetic sensor 20 including NVC includes a sensor unit 21 including a substrate including NVC, an incident device 22 , an emission detection device 23 , and a magnetic field generation device 24 .
对于该含有NVC的磁传感器20的动作原理进行说明。The operation principle of the NVC-containing magnetic sensor 20 will be described.
在传感部21的金刚石基板中的NVC结构之中,被俘获的电子形成磁量子数ms=-1、0、+1的自旋三重态。本来,该电子被从入射装置22发射的绿色激光,从ms=0的基态激发而跃迁至高能级,但在之后一边发出红色的萤光一边返回ms=0的基态。但是,通过从磁场产生装置24产生的交流磁场B,在像这样的电子跃迁至ms=+1或者-1的基态并从该处被激光激发的情况下,也有一部分的电子不发光而返回基态的现象。也就是,在检测出射光之时,利用出射检测装置23,能够检测红光亮度的下降点。利用该现象能够测定磁场强度。也就是,由于受来自后面叙述的泄漏电流的磁场的影响,出射光的亮度更进一步的变化,通过出射检测装置23检测该变化,可以知道磁场强度的变化。In the NVC structure in the diamond substrate of the sensing portion 21 , the trapped electrons form spin triplet states with magnetic quantum numbers m s =−1, 0, +1. Originally, the electrons are excited from the ground state of m s =0 to a high energy level by the green laser light emitted from the incident device 22 , but then return to the ground state of m s =0 while emitting red fluorescence. However, even when such electrons transition to the ground state of m s =+1 or -1 by the alternating magnetic field B generated by the magnetic field generator 24 and are excited by laser light from there, some of the electrons return without emitting light. ground state phenomenon. That is, when the outgoing light is detected, the outgoing detection device 23 can detect the drop point of the luminance of the red light. Using this phenomenon, the magnetic field strength can be measured. That is, the brightness of the outgoing light further changes due to the influence of the magnetic field from the leakage current described later, and the change in the intensity of the magnetic field can be known by detecting this change by the outgoing detection device 23 .
另外,为了提高含有NVC的磁传感器20的灵敏度,若被测定对象的磁场具有交流成分,则灵敏度被提高。通过向被测定对象施加交流电压变化,泄漏电流根据交流电压发生变化,以此产生的磁场也具有交流成分,能够更高精度的检测。In addition, in order to improve the sensitivity of the magnetic sensor 20 containing NVC, when the magnetic field of the object to be measured has an AC component, the sensitivity is improved. By applying a change in AC voltage to the object to be measured, the leakage current changes according to the AC voltage, and the magnetic field generated thereby also has an AC component, which enables more accurate detection.
但是,在电极50之间单纯地施加AC电流,会产生像现有技术那样的交流磁场,为解决该课题,使用后面叙述的向量势装置70。However, simply applying an AC current between the electrodes 50 generates an AC magnetic field as in the prior art. To solve this problem, a vector potential device 70 described later is used.
向量势装置70是例如将导线卷绕成线圈状并形成长的管状体71之后,利用该管状体71更进一步卷绕而成的大的线圈体72。也就是,向量势装置70是闭合回路。另外,向量势装置70形成为包围作为检查对象的电池40的形状。另外,由于管状体71的直径小,在图1之中,用实线表示管状体71。换句话说,电池40的电极50以与向量势装置70的线圈体的开口面相平行的方式而设置。The vector potential device 70 is, for example, a large coil body 72 formed by winding a wire into a coil shape to form a long tubular body 71 , and then further winding the tubular body 71 . That is, the vector potential device 70 is a closed loop. In addition, the vector potential device 70 is formed so as to surround the battery 40 to be inspected. In addition, since the diameter of the tubular body 71 is small, in FIG. 1 , the tubular body 71 is indicated by a solid line. In other words, the electrode 50 of the battery 40 is arranged in parallel with the opening surface of the coil body of the vector potential device 70 .
图3是表示本发明实施方式1所涉及的微小电流检测装置的图1中沿A-A’剖面的图。在图3之中,表示管状体71的实线是导线。另外,由导线形成的多个圆形状,表示管状体71的剖面。如图3所示,若像这样的向量势装置70之中施加交流电流,在该大的线圈体72的卷绕结构的内部空间之中,能够制作出没有磁场只存在有交流电场的状态。由此,如图3所示,在电池40的电极50之间能够制作出均匀的交流电场(交流电压)。Fig. 3 is a cross-section taken along A-A' in Fig. 1 showing the minute current detection device according to Embodiment 1 of the present invention. In FIG. 3, the solid line which shows the tubular body 71 is a lead wire. In addition, a plurality of circular shapes formed by conducting wires represent the cross-section of the tubular body 71 . As shown in FIG. 3 , when an alternating current is applied to such a vector potential device 70 , a state in which there is no magnetic field and only an alternating electric field can be created in the inner space of the winding structure of the large coil body 72 . Thereby, as shown in FIG. 3 , a uniform AC electric field (AC voltage) can be created between the electrodes 50 of the battery 40 .
通过像这样的结构,在电池40的电极50之间,即使由于裂缝或电极的剥离等原因而出现微小电流通路60,通过该微小电流通路60产生微小的泄漏电流,由于向由该微小电流所形成的磁场施加来自向量势装置70的交流成分,所以通过含有NVC的磁传感器20能够容易地检测该泄漏电流。With such a structure, even if a minute current path 60 is formed between the electrodes 50 of the battery 40 due to cracks, peeling of the electrodes, etc., a minute leakage current is generated through the minute current path 60, and a minute leakage current is generated through the minute current path 60. The formed magnetic field applies an AC component from the vector potential device 70, so the leakage current can be easily detected by the magnetic sensor 20 including NVC.
另外,在向量势装置70之中,由该管状体71所形成的线圈体72的直径D,优选比电池40、尤其比电极50大。In addition, in the vector potential device 70 , the diameter D of the coil body 72 formed by the tubular body 71 is preferably larger than that of the battery 40 , and in particular, larger than that of the electrode 50 .
另外,在电池40的面积大的情况下,能够一边进行含有NVC的磁传感器20的扫描一边检查泄露电流。In addition, when the area of the battery 40 is large, the leakage current can be checked while scanning the magnetic sensor 20 including the NVC.
另外,在图2之中,表示的是磁场产生装置24和入射装置22、出射检测装置23设置在与包含含有NVC的基板的传感部21不同的一侧,但是也可以设置在相同的一侧。In addition, in FIG. 2 , the magnetic field generating device 24 , the incident device 22 , and the emission detection device 23 are shown on a different side from the sensor portion 21 including the substrate containing NVC, but they may be provided on the same side. side.
工业上的实用性Industrial applicability
本发明,能够适用于例如相对于电池等而检测微小电流的装置。The present invention can be applied to, for example, a device that detects a minute current with respect to a battery or the like.
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