CN110346041A - A kind of spectrometer - Google Patents

Abstract

The spectrometer provided by the present invention belongs to the technical field of spectrometers, and includes: a light-emitting device having at least two interfaces of a spectrum detection device, the interfaces of the spectrum detection device include an optical fiber spectrum detection interface and a Rowland circle spectrum detection interface; a Rowland circle spectrum detection device, It is connected with the interface of the Rowland circle spectrum detection device of the light-emitting device, and has a casing, and a Rowland circular light chamber is formed inside the casing, and the casing is provided with an incident slit module, which is sequentially arranged along the light path in the light chamber There are a grating module, a zero-order light baffle and a CCD detection module; the grating module includes a concave grating, and the concave grating has only one group; the present invention connects the optical fiber spectrum detection device and the Rowland circle spectrum detection device with the light emitting device for the first time, and at the same time The light is collected, and at the same time, a larger measurement wavelength range is obtained without changing the grating, and the operation is simple and convenient.

Description

a spectrometer

technical field

The invention relates to the technical field of spectrometers, in particular to a spectrometer.

Background technique

A spectrometer, also known as a spectrometer, is a scientific instrument that decomposes complex light into spectral lines. It consists of an entrance slit, a dispersion system, an imaging system and one or more exit slits. The electromagnetic radiation of the radiation source is separated into the required wavelength or wavelength region by the dispersive element, and the intensity is measured at the selected wavelength (or scanning a certain waveband).

Chinese patent document CN102519590A discloses a spectrometer hybrid Rowland circle device, including a Rowland circle base, a Rowland circle support, a seam belt, a plurality of CCD modules and a plurality of photomultiplier tube modules, and the Rowland circle support is fixedly installed on the Rowland circle base On the surface, the Roland circle bracket is in the shape of an arc, and the front side is provided with long strip-shaped through holes arranged left and right. The arc-shaped seam belt is fixedly installed on the front side of the Roland circle bracket. A plurality of positioning holes are opened on the upper surface and the lower surface of the upper surface, and the positioning holes communicate with the elongated through holes. The CCD module includes a tray, a CCD element, a reflector and a reflector fixing block, and the CCD element is fixedly installed On the upper surface of the tray, the reflector is fixedly installed on the tray through the reflector fixing block, and the reflector is located on the front upper side of the CCD element, the tray is fixedly installed in the positioning hole, and the reflector is located on the In the elongated through hole, the photomultiplier tube module includes a photomultiplier tube and a fixing plate, and the photomultiplier tube is fixedly installed on the Roland circle base through the fixing plate, and the photomultiplier tube is located at the front side of the slit belt, and the spectrum The spectral lines can be irradiated onto the photomultiplier tube through the strip-shaped through hole and the slit strip. The above-mentioned spectrometer hybrid Rowland circle device places the CCD module on the inner side of the slit belt arc to collect spectral signals, and the photomultiplier tube is installed on the front side of the slit belt arc to collect spectral signals, and no photomultiplier tube is installed in the area where the CCD module is installed. The joint acquisition of spectral signals by the CCD module and the photomultiplier tube ensures the analysis accuracy of the instrument, effectively increases the number of elements that can be analyzed by a single spectrometer, and thus increases the types of materials that can be analyzed by the spectrometer.

With the development of technology, we have more and more needs to realize the measurement of a wide range of wavelengths. In the prior art, in a spectrometer, if the measurement of a large wavelength range is realized, the method of changing the grating lines is generally used, that is, when performing detection in different wavelength ranges, it is necessary to replace and use different order gratings, so as to realize the wavelength range. expand. However, when replacing the grating, it is troublesome to replace and debug the grating, so it is very inconvenient to use the spectrometer.

Contents of the invention

Therefore, the technical problem to be solved by the present invention is to overcome the defect that a single spectrometer in the prior art needs to replace the grating when measuring different wavelength ranges, resulting in cumbersome operations, thereby providing a spectrometer using the principle of the Rowland circle optical path.

In order to solve the above technical problems, the spectrometer provided by the invention includes:

The light-emitting device has at least two spectral detection device interfaces, and the spectral detection device interfaces include optical fiber spectral detection interfaces and Rowland circle spectral detection interfaces;

The Rowland circle spectrum detection device is connected with the interface of the Rowland circle spectrum detection device of the light-emitting device, and has a casing, and a Rowland circular light chamber is formed inside the casing, and an incident slit module is arranged on the casing, and the A grating module, a zero-level light baffle and a CCD detection module are sequentially arranged along the optical path in the optical chamber;

The grating module includes a concave grating having only one set.

As a preferred solution, the optical chamber of the Rowland circle spectrum detection device adopts a vacuum type.

As a preferred solution, the CCD detection module includes a plurality of CCD sensors, and the plurality of CCD sensors are arranged in the shape of a Rowland circle in the optical chamber through a fixing seat.

As a preferred solution, there are seven CCD sensors.

As a preferred solution, the incident slit module includes:

The entrance is arranged on the shell of the Rowland circle spectrum detection device;

a cylindrical mirror connected to the entrance and extending towards the outside of the housing;

A condenser lens connected to the external port of the cylindrical lens.

As a preferred option, it also includes:

The fiber optic spectrum detection device is connected to the fiber optic spectrum detection interface of the light emitting device through an optical fiber.

As a preferred solution, the optical fiber spectrum detection device includes:

The box body has an incident slit on the side wall for allowing light to enter, and has a cavity inside for accommodating the detection module;

A collimating mirror is arranged obliquely toward the direction of the incident slit inside the box;

a grating, inside the box, opposite to the collimating mirror;

The CCD sensor, inside the box, is used to receive the light beam dispersed by the grating.

As a preferred solution, the optical fiber spectrum detection device also includes: an optical trap, arranged in the box; the optical trap includes:

a first light trap disposed between the incident slit and the collimating mirror;

The second optical trap is arranged between the collimating mirror and the grating.

As a preferred solution, the optical fiber spectrum detection device also includes:

The focusing mirror is arranged inside the box body and opposite to the grating, and reflects the light beam scattered by the grating into the CCD sensor through light reflection.

As a preferred solution, the optical trap also includes:

The third optical trap is arranged between the focusing mirror and the CCD sensor.

The technical solution of the present invention has the following advantages:

1. The spectrometer provided by the present invention comprises a light-emitting device and a Rowland circle spectrum detection device; wherein, two interfaces suitable for installing an optical fiber spectrum detection device and a Rowland circle spectrum detection device are arranged on the light-emitting device, and the two devices are connected to the light-emitting device simultaneously Connecting to collect light at the same time, without changing the grating, at the same time, a larger measurement wavelength range is obtained, and the operation is simple and convenient.

The Roland circle spectrum detection device is equipped with a grating module, a zero-order light baffle and a CCD detection module along the optical path in the optical chamber, and the zero-order light baffle is used to block the zero-order light. When measuring light with a wavelength of 130-500nm, there is no need to set two A grating disperses the zero-order light, so its design simplifies the internal structure of the grating module and reduces the volume of the light chamber;

When it is necessary to measure long-wavelength elements such as lithium, sodium, and potassium, select a suitable optical fiber spectral detection device, connect the optical fiber spectral detection device to the optical fiber spectral detection interface of the light-emitting device, and use the optical fiber spectral detection device and the Rowland circle spectral detection device Cooperating with it can realize the measurement of 130-800nm wavelength.

The optical fiber spectrum detection device is used as an option, which makes the purchase and use process more diversified, and can be selected according to needs, and for the first time realizes the combination of the Rowland circle spectrum detection device and the fiber optic spectrum detection device.

2. In the spectrometer provided by the present invention, the light chamber of the Rowland circle detection device is a vacuum type, which can meet the measurement requirements of 130-200nm light by vacuumizing.

3. In the spectrometer provided by the present invention, the CCD detection module includes 7 CCD sensors, and is fixed in the light chamber in the shape of a Rowland circle through a fixing seat; the measurement range is increased and the resolution is improved.

4. In the spectrometer provided by the present invention, the incident slit module includes: an entrance, a cylindrical mirror, and a condenser; a condenser, which focuses the light entering the light-emitting device; and a cylindrical mirror amplifies the light path coming in through the condenser, for better measurement.

5. For the spectrometer provided by the present invention, we connect the optical fiber spectrum detection device to the interface on the light-emitting device through an optical fiber, which expands the detection range of the spectrometer so that it can measure long-wavelength elements such as lithium, sodium, and potassium, and adapt to more need.

6. The spectrometer provided by the present invention, the optical fiber spectrum detection device includes: a box body, a collimating mirror, a grating and a CCD sensor; the structure of the fiber optic spectrometer is simplified and modularized, and only the most core components of the spectrometer are retained, thereby ensuring that the optical fiber spectrometer can be realized The simplification of the fiber optic spectrometer is realized without the measurement accuracy.

7. The spectrometer provided by the present invention, the optical fiber spectrum detection device includes an optical trap, and the optical trap includes a first optical trap and a second optical trap, wherein the first optical trap is arranged between the incident slit and the collimating mirror, The stray light in the incident light is blocked from entering the optical path, that is, the high-angle incident light is blocked from entering the collimating mirror, and the stray light reflected from the collimating mirror is also prevented from entering the incident slit area; the second optical trap is set at the Between the collimating mirror and the grating, it prevents the reflection of large-angle light from entering the imaging pipeline; the third optical trap is arranged between the focusing mirror and the CCD sensor, preventing the reflection of large-angle light from the focusing mirror in the horizontal direction from entering Second CCD sensor.

Description of drawings

In order to more clearly illustrate the specific implementation of the present invention or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the specific implementation or description of the prior art. Obviously, the accompanying drawings in the following description The drawings show some implementations of the present invention, and those skilled in the art can obtain other drawings based on these drawings without any creative work.

Fig. 1 is a structural schematic diagram of the present invention.

Fig. 2 is a schematic diagram of the top view internal structure of the Rowland circle spectral detection device.

Fig. 3 is a schematic diagram of the top view internal structure of the optical fiber spectrum detection device.

Explanation of reference signs:

1. Light-emitting equipment; 2. Roland circle spectrum detection device; 3. Concave grating; 4. Zero-order light barrier; 5. CCD detection module; Detection device; 10, box body; 11, collimating mirror; 12, grating; 13, second CCD sensor; 14, first light trap; 15, second light trap; 16, focusing mirror; 17, third light trap ; 18. Incident slit.

Detailed ways

The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, therefore, should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and should not be understood as indicating or implying relative importance.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as there is no conflict with each other.

The spectrometer provided in this embodiment is shown in Figure 1, including: a light-emitting device 1, a Rowland circle spectrum detection device 2, and an optical fiber spectrum detection device 9, wherein the fiber optic spectrum detection device 9 is optional according to actual needs. The spectrum detection device 2 can realize the measurement of the wavelength of 130-500nm; the measurement of the wavelength of 130-800nm can be realized through the cooperative use of the optical fiber spectrum detection device 9 and the Rowland circle spectrum detection device 2 . The light-emitting device 1 is provided with a fiber optic spectrum detection interface and a Rowland circle spectrum detection interface, wherein the fiber optic spectrum detection device is connected to the fiber optic spectrum detection interface, and the Rowland circle spectrum detection device is connected to the Rowland circle spectrum detection interface.

As shown in Figure 2, the focal length of the optical structure of Roland circle spectrum detection device 2 is 498.8mm, and the shell inside of described Roland circle spectrum detection device 2 is formed with the light chamber of Roland circle, and described light chamber adopts vacuum type, can By vacuuming, the accuracy of measuring 130-200nm light is improved. The casing is provided with an incident slit module, and the optical chamber is provided with a grating module, a zero-order windshield and a CCD detection module 5 .

Wherein, the incident slit module comprises: the incident port 6 that is arranged on the housing of Roland circular spectrum detection device, connects incident port 6, and the cylindrical mirror 7 that extends toward the outside of housing and is connected on the external port of cylindrical mirror 7 The condenser lens 8; the grating module includes a group of concave gratings 3, which cooperate with the zero-order light baffle 4 to realize the measurement of the wavelength in the range of 130-500nm. The CCD detection module is a photoelectric sensor, the model is TCD1304, and the pixel is 3648. It includes a plurality of first CCD sensors, of which seven are provided in this embodiment. Arrangement of shapes.

As shown in Figure 3, the optical fiber spectrum detection device 9 adopts a Cheney-Turner Czerny-Turner optical path structure with a focal length of 72.5mm, and the measured wavelength range is 500-800nm, including a box body 10, a collimating mirror 11, and a grating 12 , the second CCD sensor 13 and the focusing mirror 16, also including the first optical trap 14, the second optical trap 15 and the third optical trap 17;

Wherein, there is an incident slit 18 on the side wall of the box body 10 to allow the light to enter, and there is a cavity for accommodating the detection module inside. Inside the box body 10, there is a collimating mirror 11 inclined toward the incident slit direction. , the grating 12 that is arranged opposite to the collimator mirror 11, the focusing mirror 16 that is arranged opposite to the grating 12, the focusing mirror 16 reflects the light beam scattered by the grating into the second CCD sensor by reflection; between the incident slit and the collimating mirror 11 A first optical trap 14 is arranged between them, a second optical trap 15 is arranged between the collimating mirror 11 and the grating 12 , and a third optical trap is arranged between the focusing mirror 16 and the second CCD sensor 13 .

In addition, as an alternative implementation, when the focusing mirror 16 is omitted and the second CCD sensor 13 is arranged at the focusing mirror 16, the third light trap 17 can be omitted.

How to use and principle:

The optical fiber spectrum detection device 9 is connected to the optical fiber spectrum detection interface of the light emitting device 1, and the Rowland circle spectrum detection device 2 is connected to the Rowland circle spectrum detection interface of the light emitting device 1, and the angle and position of each optical element are adjusted, and the light emitting device 1 sends out a request With the measured light to be measured, the Roland circle spectrum detection device 2 and the optical fiber spectrum detection device 9 simultaneously collect the light;

When the light enters the Rowland circle spectrum detection device 2, the light enters through the entrance 6, is concentrated by the condenser lens 8, passes through the cylindrical lens 7, and then projects onto the concave grating 3, and enters the CCD for detection after being diffracted by the concave grating 3 module, during the optical path from the concave grating 3 to the CCD detection module, the zero-order light baffle 4 absorbs the zero-order light in the optical path, making the detection results more accurate, and the analysis spectrum is obtained through the CCD detection module.

At the same time, the light also enters the optical fiber spectrum detection device 9. After the incident light enters from the incident slit, it is collimated by the collimating mirror 11, and the collimated beam is diffracted by the grating 12, and then focused and imaged by the focusing mirror 16 and projected to the second On the CCD sensor, data analysis is performed.

Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.

Claims (10)

1. a kind of spectrometer characterized by comprising

Luminaire (1) has at least two spectrum detection device interfaces, and the spectrum detection device interface includes fiber spectrum Detect interface and Rowland circle spectral detection interface；

Rowland circle spectrum detection device (2) is connect with the Rowland circle spectrum detection device interface of the luminaire, is had outer Shell is formed with the circular light room of rowland in the inside of the shell, and shell is equipped with entrance slit module, the edge in the light room Optical path is disposed with grating module, zero level light barrier (4) and CCD detection module (5)；

The grating module includes concave grating (3), and the concave grating (3) only has one group.

2. spectrometer according to claim 1, which is characterized in that the light room of the Rowland circle spectrum detection device (2) is adopted Use vacuum type.

3. spectrometer according to claim 1, which is characterized in that the CCD detection module includes multiple first CCD sensings Device, multiple first ccd sensors are by fixing seat with the arrangement of rowland round in the light room.

4. spectrometer according to claim 3, which is characterized in that the ccd sensor has seven.

5. spectrometer according to claim 1, which is characterized in that the entrance slit module includes:

Entrance port (6) is arranged on the shell of the Rowland circle spectrum detection device (2)；

Cylindrical mirror (7) is connected on the entrance port (6), and is extended towards the external of shell；

Condenser (8), is connected on the outside port of the cylindrical mirror (7).

6. spectrometer according to any one of claims 1 to 5, which is characterized in that further include:

Fiber spectrum detection device (9) detects interface with the fiber spectrum of the luminaire (1) by optical fiber and connect.

7. spectrometer according to claim 6, which is characterized in that the fiber spectrum detection device (9) includes:

Box body (10), has the entrance slit (18) for entering light on side wall, and inside has for accommodating detection module Cavity；

Collimating mirror (11) is obliquely installed in the tray interior towards the entrance slit (18) direction；

Grating (12) is opposite with the collimating mirror (11) in the tray interior；

Second ccd sensor (13), in the tray interior, for receiving the light beam of the grating dispersion.

8. spectrometer according to claim 7, which is characterized in that the fiber spectrum detection device (9) further include: light is fallen into Trap is arranged in the box body；The light trapping includes:

First light trapping (14) is arranged between the entrance slit and the collimating mirror (11)；

Second light trapping (15) is arranged between the collimating mirror (11) and the grating (12).

9. spectrometer according to claim 8, which is characterized in that the fiber spectrum detection device further include:

Focus lamp (16), it is internal in the box body (10), it is oppositely arranged with the grating (12), by reflective by the grating (12) light beam dispersed reflexes in second ccd sensor (13).

10. spectrometer according to claim 9, which is characterized in that the light trapping further include:

Third light trapping (17) is arranged between the focus lamp (16) and second ccd sensor (13).