CN110340787A - Sapphire slice vertical double-sided grinding equipment - Google Patents

Abstract

The present invention relates to the technical field of sapphire grinding equipment, and provides a vertical double-sided grinding equipment for sapphire slices. The vertical double-sided grinding equipment for sapphire slices includes: a first grinding disc and a second grinding disc, and the first grinding disc It is arranged parallel to the second grinding disc, and the first grinding disc and the second grinding disc can be switched between a first state not perpendicular to the ground and a second state perpendicular to the ground. The vertical double-sided grinding equipment for sapphire slices of the present invention is provided with two grinding discs parallel to each other. When the sapphire slices to be ground are placed, the grinding discs are in the first state, and when the sapphire slices are ground, the grinding discs are in the first state. , set vertically on the ground to eliminate the influence of the sapphire slice's own gravity on the removal volume, and avoid scrapping the sapphire slice.

Description

Sapphire slice vertical double-sided grinding equipment

technical field

The invention relates to the technical field of sapphire grinding equipment, in particular to a vertical double-sided grinding equipment for sapphire slices.

Background technique

Sapphire single crystal has the characteristics of high hardness, good light transmission, high wear resistance, good chemical stability, thermal conductivity, electromagnetic insulation, and excellent mechanical properties. It is widely used as window and sapphire wafer materials in the defense industry Cutting-edge technology research and civilian fields.

Sapphire is brittle and is a typical difficult-to-process material. At present, the preparation of sapphire wafers mainly includes slicing, flattening and polishing. In the leveling process, the cut marks generated during the wire cutting process are mainly removed by grinding, and a relatively flat surface is obtained, which provides a good foundation for subsequent polishing.

However, during the grinding process, whether it is free abrasive grinding or fixed abrasive grinding, it will be affected by the gravity of the sapphire itself, and the removal amount on both sides of the sapphire slice will be inconsistent, resulting in the scrapping of the sapphire slice.

Contents of the invention

In view of this, the present invention aims to propose a vertical double-sided grinding device for sapphire slices. The vertical double-sided grinding equipment for sapphire slices can be equipped with two grinding discs parallel to each other. The ground is set to eliminate the influence of the gravity of the sapphire slice itself on the removal amount.

In order to achieve the above object, technical solution of the present invention is achieved in that way:

A vertical double-sided grinding device for sapphire slices, comprising: a first grinding disc and a second grinding disc, the first grinding disc and the second grinding disc are arranged in parallel, and the first grinding disc and the second grinding disc The two grinding discs can be switched between a first state not perpendicular to the ground and a second state perpendicular to the ground.

Preferably, the sapphire slice vertical double-sided grinding device includes a rotating ring gear and a driving gear, the axis of the rotating ring gear is arranged parallel to the ground, and gear teeth are arranged on the outer peripheral surface, and the driving gear and the gear teeth meshing, the first grinding disc and the second grinding disc are rotatably installed on the inner circumference of the rotating ring gear.

Preferably, the vertical double-sided grinding device for sapphire slices includes a supporting gear, and the supporting gear and the driving gear are arranged on the side of the rotating ring gear close to the ground and mesh with the rotating ring gear at the same time.

Preferably, the rotation axes of the first grinding disc and the second grinding disc are arranged along the radial direction of the rotating ring gear.

Preferably, the vertical double-sided grinding device for sapphire slices includes an internal gear, an external ring gear and a planetary gear, the internal gear and the external ring gear are arranged coaxially with the first grinding disc, and are installed on The first grinding disc is close to the end face of the second grinding disc, and the planetary gear is meshed with the internal gear and the external ring gear at the same time.

Preferably, the internal gear is rotatably mounted on the end face of the first grinding disc close to the second grinding disc, and the outer ring gear is fixed on the end face of the first grinding disc close to the second grinding disc. end face.

Preferably, the vertical double-sided grinding device for sapphire slices includes an internal gear motor, and the gear shaft of the internal gear passes through the first grinding disc and is connected to the internal gear motor.

Preferably, the sapphire slice vertical double-sided grinding device includes a grinding disc support ring, the outer circumference of the grinding disc support ring is fixedly connected to the inner circumference of the rotating ring gear, and the axis of the grinding disc support ring is connected to the The axis of the rotating ring gear is vertical, and the end face of the first grinding disc away from the second grinding disc is rotatably connected to the grinding disc support ring.

Preferably, the vertical double-sided grinding equipment for sapphire slices includes a lifting device, and the second grinding disc is connected with the rotating ring gear through the lifting device.

Preferably, the lifting device includes an air cylinder, one end of the air cylinder is fixedly connected to the rotating ring gear, and the other end is rotatably connected to the second grinding disc.

Compared with the prior art, the sapphire slice vertical double-sided grinding equipment of the present invention is provided with two mutually parallel grinding discs. When placing the sapphire slice to be ground, the grinding disc is in the first state. When the sapphire slice is ground, The grinding disc is in the first state and is set vertically on the ground to eliminate the influence of the gravity of the sapphire slice itself on the removal amount and avoid scrapping the sapphire slice.

Other features and advantages of the present invention will be described in detail in the detailed description that follows.

Description of drawings

The drawings constituting a part of the present invention are used to provide a further understanding of the present invention, and the schematic implementations and descriptions of the present invention are used to explain the present invention, and do not constitute an improper limitation of the present invention. In the attached picture:

Fig. 1 is the structural representation of sapphire slice vertical double-sided grinding equipment of the present invention;

Fig. 2 is the front view of the sapphire slice vertical double-sided grinding equipment of the present invention;

Fig. 3 is the left side view of sapphire slice vertical double-sided grinding equipment of the present invention;

Fig. 4 is the bottom view of the sapphire slice vertical double-sided grinding equipment of the present invention;

Fig. 5 is the structural representation of the first grinding disc of the present invention;

Fig. 6 is a schematic diagram of the connection structure between the second grinding disc and the cylinder of the present invention.

Explanation of reference signs:

1 first grinding disc 2 second grinding disc

3 Rotating ring gear 4 Drive gear

5 Support gear 6 Internal gear

7 Outer ring gear 8 Planetary wheel

9 Internal gear motor 10 Grinding disk support ring

11 Lifting device 12 Drive gear drive motor

Detailed ways

Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

In the present invention, unless stated otherwise, the orientation words used such as "upper and lower" generally refer to the upper and lower parts shown in the accompanying drawings; The inside and outside of the silhouette. The present invention will be described in detail below with reference to the drawings and in combination with embodiments.

The present invention provides a kind of vertical double-sided grinding equipment for sapphire slices, as shown in Figure 1 to Figure 6, the vertical double-sided grinding equipment for sapphire slices includes: a first grinding disc 1 and a second grinding disc 2, the The first grinding disc 1 and the second grinding disc 2 are arranged in parallel, and the first grinding disc 1 and the second grinding disc 2 can be between a first state not perpendicular to the ground and a second state perpendicular to the ground switch between. Preferably, in the first state, the included angle between the first grinding disc 1 and the second grinding disc 2 and the horizontal plane is any angle from 0° to 45°, further preferably, the first grinding disc The included angle between the disc 1 and the second grinding disc 2 and the horizontal plane is 0°. In the above, the horizontal plane is parallel to the ground.

The vertical double-sided grinding equipment for sapphire slices of the present invention is provided with two grinding discs parallel to each other, and the first grinding disc 1 and the second grinding disc 2 can be in the first state not perpendicular to the ground and the second state perpendicular to the ground Convert between. When placing the sapphire slice to be ground, the first grinding disc 1 and the second grinding disc 2 are in the first state; when the sapphire slice is ground, the first grinding disc 1 and the second grinding disc 2 are in the second state, perpendicular to the ground Setting, drive the sapphire slice to be set vertically on the ground to eliminate the influence of the sapphire slice's own gravity on the removal amount, and avoid the scrapping of the sapphire slice.

Among the above, in order to drive the first grinding disc 1 and the second grinding disc 2 to rotate, the vertical double-sided grinding equipment for sapphire slices includes a rotating ring gear 3, a driving gear 4 and a driving gear driving motor 12, the The axis of the rotating ring gear 3 is arranged parallel to the ground, and the outer peripheral surface of the rotating ring gear 3 is provided with gear teeth, and the driving gear 4 is engaged with the gear teeth. On the rotating shaft of the motor 12, the driving gear drive motor 12 drives the rotating ring gear 3 to rotate by driving the driving gear 4, and the first grinding disc 1 and the second grinding disc 2 are rotatably installed on the inner periphery of the rotating ring gear 3 . Such an arrangement enables the first grinding disc 1 and the second grinding disc 2 to switch between a first state not perpendicular to the ground and a second state perpendicular to the ground.

In the above, in order to cooperate with the rotation of the rotating ring gear 3, the vertical double-sided grinding equipment for sapphire slices includes a supporting gear 5, and the supporting gear 5 and the driving gear 4 are arranged on the side of the rotating ring gear 3 close to the ground. One side, and meshes with the rotating ring gear 3 at the same time. The support gear 5 provides support for the rotating ring gear 3 , wherein the number of the support gear 5 can be one or more. Preferably, the number of the supporting gears 5 is two.

In order to maintain the dynamic balance of the sapphire slice vertical double-sided grinding equipment, the rotation axes of the first grinding disc 1 and the second grinding disc 2 are arranged along the radial direction of the rotating ring gear 3 . Such an arrangement makes when the first grinding disc 1 and the second grinding disc 2 rotate around the rotation axis, the first grinding disc 1 and the second grinding disc 2 form a gyro rotor, and the first grinding disc 1 and the second grinding disc 2 form a gyro rotor. The orientation of the rotation axes of the grinding disc 1 and the second grinding disc 2 in the inertial space remains stable, that is, pointing in a fixed direction, while resisting any force that changes the axial direction of the gyro rotor. Fixed axis, keep the dynamic balance of the sapphire slice vertical double-sided grinding equipment, so that the rotating ring gear 3 will not actively rotate, so that the first grinding disc 1 and the second grinding disc 2 maintain second state.

In order to improve the grinding quality of sapphire slices, the vertical double-sided grinding equipment for sapphire slices includes an internal gear 6, an external ring gear 7 and a planetary wheel 8, and the internal gear 6 and the external ring gear 7 are simultaneously connected with the first A grinding disc 1 is arranged coaxially, and is installed on the end surface of the first grinding disc 1 close to the second grinding disc 2 at the same time, and the planetary wheel 8 is simultaneously connected with the internal gear 6 and the external gear The ring 7 is engaged, and the planetary wheel 8 is provided with a plurality of slice installation holes, and the sapphire slices are placed in the slice installation holes. Such setting enables the sapphire slice to revolve around the internal gear 6 while rotating on its own during the grinding process. The superposition of the two rotations makes the grinding of the sapphire slice by the grinding disc more uniform, thereby improving the grinding quality of the sapphire slice.

Further, the internal gear 6 is rotatably mounted on the end face of the first grinding disc 1 close to the second grinding disc 2, and the outer ring gear 7 is fixed on the first grinding disc 1 close to the The end surface of the second grinding disc 2. Such an arrangement makes it possible to control the rotation of the pinion wheel 8 by controlling the rotation speed of the internal gear 6 .

Further, the sapphire slice vertical double-sided grinding equipment includes an internal gear motor 9, and the gear shaft of the internal gear 6 passes through the first grinding disc 1 and is connected with the internal gear motor 9, so that the internal gear The motor 9 drives the internal gear 6 to rotate, thereby controlling the rotation of the planetary wheel 8 . In order to support the first grinding disc 1, the sapphire slice vertical double-sided grinding equipment includes a grinding disc support ring 10, the shape of the grinding disc support ring 10 is annular, and the end surface of one end of the grinding disc support ring 10 is provided with There is a groove, the outer circumference of the grinding disc support ring 10 is fixedly connected with the inner circumference of the rotating ring gear 3, the axis of the grinding disc supporting ring 10 is perpendicular to the axis of the rotating ring gear 3, and the first The grinding disc 1 is arranged in the groove, and the end surface of the first grinding disc 1 away from the second grinding disc 2 is rotatably connected with the grinding disc support ring 10 . Such setting enables the first grinding disc 1 to be supported by the grinding disc support ring 10 when the first grinding disc 1 is in the second state, and at the same time, does not affect the internal gear motor 9 to drive the internal gear 6 to rotate.

The above-mentioned internal gear motor 9 can be installed on the end of the grinding disc support ring 10 close to the ground, and can also be installed on the inner circumference of the rotating ring gear 3 .

In order to facilitate the installation of sapphire slices, the vertical double-sided grinding equipment for sapphire slices includes a lifting device 11, which is installed on the rotating ring gear 3, and the second grinding disc 2 passes through the lifting device 11 It is connected with the rotating ring gear 3. Such an arrangement enables the lifting device 11 to drive the second grinding disc 2 to move along the axial direction of the second grinding disc 2 , which is convenient for placing or taking out sapphire slices.

In the above, as shown in FIG. 2 , the lifting device 11 includes an air cylinder, one end of which is fixedly connected to the rotating ring gear 3 , and the other end is rotatably connected to the second grinding disc 2 . The cylinder includes a cylinder and a piston rod that moves axially along the cylinder, the cylinder is fixed on the inner circumference of the rotating ring gear 3, and the piston rod is rotatably connected to the second grinding disc 2 , the second grinding disc 2 can rotate on the axis of the second grinding disc 2, specifically, as shown in Figure 6, the cylinder is connected to the second grinding disc 2 through a connecting block and a fixing hole, so The piston rod is fixedly connected with the connecting block, the second grinding disc 2 is fixedly connected with the fixing hole, the connecting block and the fixed block are rotary bodies, the rotary section of the connecting block is C-shaped, and the connecting block A cylindrical cavity is formed on the top, the rotary section of the fixed block is T-shaped, a cylinder is formed at one end of the fixed block, and the cylinder is rotatably arranged in the cylindrical cavity, so that the second The grinding disc 2 is rotatable around the piston rod.

The sapphire slice vertical double-sided grinding equipment also includes a grinding disc drive motor and a controller, and the controller is connected to the grinding disc drive motor, the internal gear motor 9, the driving gear drive motor 12 and the The cylinder is electrically connected, and the grinding disc driving motor includes two, and the grinding disc driving motor is installed on the inner circumference of the rotating ring gear 3, and the two grinding disc driving motors are connected with the first grinding disc 1 and the first grinding disc respectively. The second grinding disc 2 is connected to drive the first grinding disc 1 and the second grinding disc 2 to rotate.

When using the sapphire slice vertical double-sided grinding equipment of the present invention, the first grinding disc 1 and the second grinding disc 2 are in the first state, and the lifting device 11 drives the second grinding disc 2 away from the first grinding disc 1, and the operation The personnel place the sapphire slice to be polished in the installation hole on the star wheel 8. After the installation is completed, the lifting device 11 drives the second grinding disc 2 close to the first grinding disc 1 until the second grinding disc 2 contacts the sapphire slice. The controller controls the driving gear driving motor 12 to drive the driving gear 4 to rotate, and the driving gear 4 drives the rotating ring gear 3 to rotate, so that the first grinding disc 1 and the second grinding disc 2 are in the second state, and the controller controls the grinding disc driving motor to rotate, grinding The disc drive motor drives the first grinding disc 1 and the second grinding disc 2 to rotate, the controller controls the internal gear motor 9 to rotate, and the internal gear motor 9 drives the internal gear 6 to rotate, so as to control the speed of the planetary wheel 8 .

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of the present invention. within the scope of protection.

Claims (10)

1. A kind of sapphire slice vertical double-sided grinding equipment, is characterized in that, comprises: the first grinding disc (1) and the second grinding disc (2), described first grinding disc (1) and described second grinding The discs (2) are arranged in parallel, and the first grinding disc (1) and the second grinding disc (2) can be switched between a first state not perpendicular to the ground and a second state perpendicular to the ground. 2. sapphire slice vertical double-sided grinding equipment according to claim 1, is characterized in that, described sapphire slice vertical double-sided grinding equipment comprises rotating ring gear (3) and driving gear (4), and described rotating gear The axis of the ring (3) is arranged parallel to the ground, and gear teeth are arranged on the outer peripheral surface, the driving gear (4) is meshed with the gear teeth, the first grinding disc (1) and the second grinding disc ( 2) It is rotatably installed on the inner circumference of the rotating ring gear (3). 3. sapphire slice vertical double-sided grinding equipment according to claim 2, is characterized in that, described sapphire slice vertical double-sided grinding equipment comprises support gear (5), and described support gear (5) and described drive The gear (4) is arranged on the side of the rotating ring gear (3) close to the ground, and meshes with the rotating ring gear (3) at the same time. 4. vertical double-sided grinding equipment for sapphire slices according to claim 2, characterized in that, the rotation axis of the first grinding disc (1) and the second grinding disc (2) is along the rotating ring gear (3) radial setting. 5. sapphire slice vertical double-sided grinding equipment according to claim 1, is characterized in that, described sapphire slice vertical double-sided grinding equipment comprises internal gear (6), external ring gear (7) and planetary wheel ( 8), the internal gear (6) and the external ring gear (7) are coaxially arranged with the first grinding disc (1), and installed on the first grinding disc (1) close to the first On the end faces of the two grinding discs (2), the planetary gear (8) meshes with the internal gear (6) and the external ring gear (7) simultaneously. 6. The vertical double-sided grinding equipment for sapphire slices according to claim 5, characterized in that, the internal gear (6) is rotatably installed on the first grinding disc (1) close to the second grinding disc (2), the outer ring gear (7) is fixed on the end surface of the first grinding disc (1) close to the second grinding disc (2). 7. sapphire slice vertical double-sided grinding equipment according to claim 5, is characterized in that, described sapphire slice vertical double-sided grinding equipment comprises internal gear motor (9), and the gear shaft of described internal gear (6) It passes through the first grinding disc (1) and is connected with the internal gear motor (9). 8. sapphire slice vertical double-sided grinding equipment according to claim 1, is characterized in that, described sapphire slice vertical double-sided grinding equipment comprises grinding disc support ring (10), and described grinding disc support ring (10) The outer circumference of the rotating ring gear (3) is fixedly connected to the inner circumference, the axis of the grinding disc support ring (10) is perpendicular to the axis of the rotating ring gear (3), and the first grinding disc (1) The end surface away from the second grinding disc (2) is rotatably connected with the grinding disc support ring (10). 9. sapphire slice vertical double-sided grinding equipment according to claim 1, is characterized in that, described sapphire slice vertical double-sided grinding equipment comprises lifting device (11), and described second grinding disc (2) passes through The lifting device (11) is connected with the rotating ring gear (3). 10. vertical double-sided grinding equipment for sapphire slices according to claim 1, characterized in that, the lifting device (11) comprises a cylinder, one end of the cylinder is fixedly connected with the rotating ring gear (3), and the other One end is rotatably connected with the second grinding disc (2).