CN110335795B - Process for improving field emission performance by processing cathode film - Google Patents
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- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
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Abstract
Description
技术领域technical field
本发明属于场发射阴极薄膜制备与处理领域，通过使用不同种类的胶带以及改变胶带处理次数等参数来调控场发射点，并使用砝码来让胶带和待处理场发射阴极薄膜贴合更加紧密，最大限度地发挥出胶带处理改善场发射性能的作用，达到改善阴极形貌、降低场屏蔽效应并最终提高场发射性能的目的。The invention belongs to the field of field emission cathode film preparation and processing. The field emission point is regulated by using different types of adhesive tapes and changing the parameters such as the treatment times of the adhesive tapes, and weights are used to make the adhesive tape and the field emission cathode film to be treated more closely adhered. The effect of tape treatment to improve the field emission performance is maximized to achieve the purpose of improving the cathode morphology, reducing the field shielding effect and finally improving the field emission performance.
背景技术Background technique
近年来，随着对电子发射技术不断深入的研究，以及其应用范围的不断扩大，场致电子发射作为一种冷阴极发射方式，受到了国内外研究者的大量关注，并在平板显示、X射线管、微波发生器等诸多领域中有潜在应用，成为真空微纳电子行业内的热点研究问题。In recent years, with the continuous in-depth research on electron emission technology and the continuous expansion of its application range, field electron emission, as a cold cathode emission method, has received a lot of attention from researchers at home and abroad, and has been widely used in flat-panel display, X-ray It has potential applications in many fields such as ray tubes and microwave generators, and has become a hot research issue in the vacuum micro-nano electronics industry.
场发射，是通过降低固体表面势垒的高度，压缩表面势垒的宽度，使电子能通过隧穿效应穿过或越过势垒顶端，形成电子发射。具体而言，就是在外加高压电场作用下，由于曲率较大的电极(即场发射阴极)附近电场增强，固体表面势垒宽度降低到接近或小于电子的波长时，电子通过隧穿效应发射，不需要其他形式的附加能量。Field emission is to reduce the height of the solid surface potential barrier and compress the width of the surface potential barrier, so that electrons can pass through or cross the top of the potential barrier through the tunneling effect to form electron emission. Specifically, under the action of an external high-voltage electric field, due to the enhanced electric field near the electrode with large curvature (ie, the field emission cathode), when the barrier width of the solid surface is reduced to be close to or smaller than the wavelength of the electron, the electron is emitted through the tunneling effect, No other forms of additional energy are required.
目前，有很多关于碳纳米管、石墨烯、碳化硅、氧化锌等低维纳米材料及其复合物作为场发射阴极的研究，采用的阴极薄膜制备方法有丝网印刷、真空抽滤、化学气相沉积、电泳等，但是，化学气相沉积所需成本太高，不利于场发射器件的商业化应用，而成本较低的丝网印刷和真空抽滤等方法易使阴极材料在基底上倒伏，导致有效的场发射点数量稀少，从而表现出来的场发射性能并不十分出色，因此，如何从材料改性角度出发来增强场发射性能成为一个非常值得研究的课题。研究人员大多采用了提高长径比、增强尖端与衬底之间的吸附、用其他材料界面修饰阴极材料，降低功函数等方法提升它的场发射性能。但场屏蔽效应一直是限制场发射性能的一个重要因素，需要通过移除部分与衬底吸附不好的场发射点，从而减小场屏蔽效应。At present, there are many studies on low-dimensional nanomaterials such as carbon nanotubes, graphene, silicon carbide, and zinc oxide, and their composites as field emission cathodes. The cathode film preparation methods used include screen printing, vacuum filtration, chemical vapor phase Deposition, electrophoresis, etc. However, the cost of chemical vapor deposition is too high, which is not conducive to the commercial application of field emission devices, and the low-cost methods such as screen printing and vacuum filtration are easy to cause the cathode material to fall on the substrate, resulting in The number of effective field emission points is scarce, so the field emission performance is not very good. Therefore, how to enhance the field emission performance from the perspective of material modification has become a very worthy research topic. Most of the researchers have adopted methods such as increasing the aspect ratio, enhancing the adsorption between the tip and the substrate, modifying the cathode material with other material interfaces, and reducing the work function to improve its field emission performance. However, the field shielding effect has always been an important factor limiting the field emission performance, and it is necessary to reduce the field shielding effect by removing some of the field emission points that are not well adsorbed to the substrate.
发明内容SUMMARY OF THE INVENTION
本发明的目的是通过使用不同种类的胶带以及改变胶带处理次数等参数来调控场发射点，并使用砝码来让胶带和待处理场发射阴极薄膜贴合更加紧密，最大限度地发挥出胶带处理改善场发射性能的作用，达到改善阴极形貌、降低场屏蔽效应并最终提高场发射性能的目的。本发明采用低维纳米材料作为阴极薄膜材料，使用不同种类的胶带，改变处理次数，并给出最优的处理次数，以最大程度地增强场发射性能。The purpose of the present invention is to adjust the field emission point by using different kinds of tapes and changing the parameters such as the number of tape treatments, and use weights to make the tape and the field emission cathode film to be treated more closely fit, so as to maximize the use of tape treatment The effect of improving the field emission performance can achieve the purpose of improving the cathode morphology, reducing the field shielding effect and finally improving the field emission performance. The invention adopts low-dimensional nanomaterials as cathode film materials, uses different kinds of adhesive tapes, changes the number of treatments, and provides the optimum number of treatments, so as to maximize the field emission performance.
实现本发明目的的具体技术方案是：The concrete technical scheme that realizes the object of the present invention is:
一种处理阴极薄膜提高场发射性能的工艺，该工艺具体包括以下步骤：A process for treating a cathode film to improve field emission performance, the process specifically comprises the following steps:
步骤1：胶带处理Step 1: Tape Handling
(1)胶带的预处理(1) Pretreatment of tape
将选好的胶带撕开2～10cm，在表面干净平整的物体或在胶带自身上将其反复地粘10～500次，通过改变胶带预处理的次数，改变胶带的粘附力；Tear off the selected tape for 2-10cm, and stick it repeatedly 10-500 times on an object with a clean and flat surface or on the tape itself, and change the adhesive force of the tape by changing the number of pretreatments of the tape;
(2)阴极薄膜的胶带粘撕处理(2) Tape sticking and tearing treatment of cathode film
将处理好的胶带均匀平整地贴到场发射阴极薄膜上，所述阴极薄膜包括但不限于碳纳米管、石墨烯、碳化硅、氧化锌低维纳米材料及其复合物。放置50～1000g重的砝码，使胶带均匀、平整地覆盖住场发射阴极薄膜，再揭下。The treated tape is evenly and flatly attached to the field emission cathode film, the cathode film includes but is not limited to carbon nanotubes, graphene, silicon carbide, zinc oxide low-dimensional nanomaterials and their composites. Place a weight of 50-1000g to make the tape cover the field emission cathode film evenly and evenly, and then peel it off.
步骤2：测试阴极薄膜的场发射性能Step 2: Test the Field Emission Properties of the Cathode Film
将胶带处理后的场发射阴极薄膜组装成场发射器件，置于真空系统中测试场发射性能，连接电路，记录电流和电压值，计算电流密度和电场强度；场发射性能测试的结果表明，使用砝码能使胶带和待处理场发射阴极薄膜贴合更加紧密，最大限度地发挥出胶带处理改善场发射性能的作用。经过胶带处理后，场发射阴极器件的开启电场从未进行胶带处理时的2.39V/μm降至1.51～2.06V/μm，阈值电场由未进行胶带处理时的3.13V/μm降至1.71～2.59V/μm。The tape-treated field emission cathode film was assembled into a field emission device, placed in a vacuum system to test the field emission performance, connected the circuit, recorded the current and voltage values, and calculated the current density and electric field strength; the results of the field emission performance test showed that the use of The weight can make the adhesive tape and the to-be-treated field emission cathode film adhere more closely, and maximize the effect of the tape treatment to improve the field emission performance. After tape treatment, the turn-on electric field of the field emission cathode device decreased from 2.39V/μm without tape treatment to 1.51-2.06V/μm, and the threshold electric field decreased from 3.13V/μm without tape treatment to 1.71-2.59 V/μm.
所述表面干净平整的物体为玻璃、塑料、不锈钢板或铜箔。The object with a clean and flat surface is glass, plastic, stainless steel plate or copper foil.
所述的胶带包括PI胶带、PET胶带、PVA胶带。Described adhesive tape includes PI adhesive tape, PET adhesive tape, PVA adhesive tape.
本发明的有益效果是：采用本方法提出的砝码压实工艺能使胶带和待处理场发射阴极薄膜贴合更加紧密，最大限度地发挥出胶带处理改善场发射性能的作用，本方法还通过预处理胶带，改变了胶带的粘附力，从而给出最优胶带处理次数，不仅能减小屏蔽效应，还不致使场发射点过于少，能大幅提高场发射性能。The beneficial effects of the invention are as follows: the weight compaction process proposed by the method can make the adhesive tape and the field emission cathode film to be treated more closely adhere, and maximize the effect of the tape treatment to improve the field emission performance. The pretreatment of the tape changes the adhesive force of the tape, thus giving the optimal tape treatment times, which can not only reduce the shielding effect, but also cause too few field emission points, which can greatly improve the field emission performance.
附图说明Description of drawings
图1为本发明实施例PET胶带处理多壁碳纳米管场发射阴极薄膜的截面示意图；Fig. 1 is the cross-sectional schematic diagram of treating multi-wall carbon nanotube field emission cathode film with PET tape according to the embodiment of the present invention;
图2为本发明实施例中多壁碳纳米管阴极薄膜经PET胶带处理不同次数后的照片图，从左到右依次为经200、300与400次胶带处理后的阴极薄膜照片图；Fig. 2 is the photograph figure of the multi-walled carbon nanotube cathode film after PET tape processing different times in the embodiment of the present invention, from left to right is the cathode film photograph figure after 200, 300 and 400 times of tape processing successively;
图3为本发明实施例中使用PET胶带对多壁碳纳米管阴极薄膜进行不同次数的胶带处理后器件的场发射性能的对比图；(a)为电流密度与电场强度的关系图；(b)为胶带处理次数对器件的开启电场强度的影响图；Fig. 3 is the contrast diagram of the field emission performance of the device after the multi-walled carbon nanotube cathode film is treated with PET tape for different times in the embodiment of the present invention; (a) is the relationship diagram of current density and electric field intensity; (b) ) is the influence figure of the number of times of tape treatment on the turn-on electric field strength of the device;
图4为本发明实施例中不同类型胶带处理对场发射性能的影响对比图。FIG. 4 is a comparison diagram of the effects of different types of tape treatments on field emission performance in an embodiment of the present invention.
具体实施方式Detailed ways
下面将详细叙述本发明中采用的技术，所描述的实施例仅为本发明中的一部分实施例。本领域内其他人员在未进行创造性劳动成果前提下所获得的其他实施例，应属于本发明的保护范围。The technology employed in the present invention will be described in detail below, and the described embodiments are only a part of the embodiments of the present invention. Other embodiments obtained by other persons in the art without creative work achievements shall belong to the protection scope of the present invention.
实施例1Example 1
一种处理阴极薄膜提高场发射性能的工艺，具体步骤包括：A process for treating a cathode film to improve field emission performance, the specific steps include:
步骤1：制备场发射阴极薄膜Step 1: Preparation of Field Emission Cathode Film
将质量比为20:1的松油醇和乙基纤维素混合后，在80℃水浴条件下充分搅拌，使之混合均匀，形成粘稠、透明的胶体，即为有机粘合剂；After mixing terpineol and ethyl cellulose with a mass ratio of 20:1, fully stir them in a water bath at 80 °C to make them evenly mixed to form a viscous and transparent colloid, which is an organic binder;
将作为场发射阴极材料的多壁碳纳米管粉末和有机粘合剂以质量比1:8混合，彻底研磨30分钟，至场发射阴极材料被充分分散即肉眼所见无颗粒。接下来，在干净的FTO导电玻璃基板上通过丝网印刷的方法涂覆场发射阴极材料，得到需要的场发射阴极薄膜。然后将其放入设定温度为350℃的马弗炉中，进行2小时的烘烤，以除去有机粘合剂。The multi-walled carbon nanotube powder as the field emission cathode material and the organic binder are mixed in a mass ratio of 1:8, thoroughly ground for 30 minutes, until the field emission cathode material is fully dispersed, that is, no particles can be seen with the naked eye. Next, the field emission cathode material is coated on the clean FTO conductive glass substrate by screen printing to obtain the desired field emission cathode film. It was then placed in a muffle furnace set at 350°C and baked for 2 hours to remove the organic binder.
步骤2：胶带处理Step 2: Tape Handling
(1)胶带的预处理(1) Pretreatment of tape
将选好的PET胶带撕开5cm，在胶带自身上将其反复地粘100次，通过改变胶带预处理的次数，改变胶带的粘附力；Tear the selected PET tape 5cm apart, stick it on the tape itself 100 times repeatedly, and change the adhesive force of the tape by changing the number of pretreatments of the tape;
(2)阴极薄膜的胶带粘撕处理(2) Tape sticking and tearing treatment of cathode film
参阅图1，将预先处理好的PET胶带均匀平整地贴到待处理的场发射阴极薄膜上，再放置500g重的砝码，使胶带平整地覆盖住场发射阴极薄膜，再揭下。由于处理后的胶带的粘性不同，胶带处理过程中带走的场发射点数目有所区别。Referring to Figure 1, stick the pre-treated PET tape evenly and evenly on the field emission cathode film to be treated, and place a weight of 500g to make the tape cover the field emission cathode film flatly, and then peel it off. Due to the different viscosity of the treated tape, the number of field emission points taken away during the tape treatment process is different.
步骤3：测试阴极薄膜的场发射性能Step 3: Test the Field Emission Properties of the Cathode Film
将胶带处理后的场发射阴极薄膜组装成场发射器件，置于场发射测试真空系统中；场发射性能测试的结果表明，通过选择合适的胶带处理工艺参数能有效地降低场发射器件的开启和阈值电场强度，从而获得性能优异的场发射器件。The field emission cathode film after tape treatment was assembled into a field emission device, which was placed in a field emission test vacuum system; the results of the field emission performance test showed that the selection of appropriate tape treatment parameters can effectively reduce the turn-on and the field emission device. The threshold electric field strength can be obtained to obtain a field emission device with excellent performance.
实施例2Example 2
一种处理阴极薄膜提高场发射性能的工艺，具体步骤包括：A process for treating a cathode film to improve field emission performance, the specific steps include:
步骤1：制备场发射阴极薄膜Step 1: Preparation of Field Emission Cathode Film
将质量比为20:1的松油醇和乙基纤维素混合后，在80℃水浴条件下充分搅拌，使之混合均匀，形成粘稠、透明的胶体，即为有机粘合剂；After mixing terpineol and ethyl cellulose with a mass ratio of 20:1, fully stir them in a water bath at 80 °C to make them evenly mixed to form a viscous and transparent colloid, which is an organic binder;
将作为场发射阴极材料的多壁碳纳米管粉末和有机粘合剂以质量比1:8混合，彻底研磨30分钟，至场发射阴极材料被充分分散即肉眼所见无颗粒。接下来，在干净的FTO导电玻璃基板上通过丝网印刷的方法涂覆场发射阴极材料，得到需要的场发射阴极薄膜。然后将其放入设定温度为350℃的马弗炉中，进行2小时的烘烤，以除去有机粘合剂。The multi-walled carbon nanotube powder as the field emission cathode material and the organic binder are mixed in a mass ratio of 1:8, thoroughly ground for 30 minutes, until the field emission cathode material is fully dispersed, that is, no particles can be seen with the naked eye. Next, the field emission cathode material is coated on the clean FTO conductive glass substrate by screen printing to obtain the desired field emission cathode film. It was then placed in a muffle furnace set at 350°C and baked for 2 hours to remove the organic binder.
步骤2：胶带处理Step 2: Tape Handling
(1)胶带的预处理(1) Pretreatment of tape
将选好的PET胶带撕开5cm，在胶带自身上将其反复地粘300次，通过改变胶带预处理的次数，改变胶带的粘附力；Tear the selected PET tape 5cm apart, stick it on the tape itself repeatedly 300 times, and change the adhesive force of the tape by changing the number of pretreatments of the tape;
(2)阴极薄膜的胶带粘撕处理(2) Tape sticking and tearing treatment of cathode film
参阅图1，将预先处理好的PET胶带均匀平整地贴到待处理的场发射阴极薄膜上，再放置500g重的砝码，使胶带平整地覆盖住场发射阴极薄膜，再揭下。由于处理后的胶带的粘性不同，胶带处理过程中带走的场发射点数目有所区别，如图2所示。Referring to Figure 1, stick the pre-treated PET tape evenly and evenly on the field emission cathode film to be treated, and place a weight of 500g to make the tape cover the field emission cathode film flatly, and then peel it off. Due to the different viscosity of the treated tape, the number of field emission points taken away during the tape treatment process is different, as shown in Figure 2.
步骤3：测试阴极薄膜的场发射性能Step 3: Test the Field Emission Properties of the Cathode Film
将胶带处理后的场发射阴极薄膜组装成场发射器件，置于场发射测试真空系统中；场发射性能测试的结果表明，通过选择合适的胶带处理工艺参数能有效地降低场发射器件的开启和阈值电场强度，从而获得性能优异的场发射器件。图3(a)和(b)分别展示了使用PET胶带进行不同次数的处理后电流密度与电场强度的关系曲线以及开启电场强度随胶带处理次数变化的曲线。图4展示了不用胶带处理以及使用不同类型胶带材料在进行相同次数的胶带处理后，电流密度与电场强度的对比曲线。The field emission cathode film after tape treatment was assembled into a field emission device, which was placed in a field emission test vacuum system; the results of the field emission performance test showed that the selection of appropriate tape treatment parameters can effectively reduce the turn-on and the field emission device. The threshold electric field strength can be obtained to obtain a field emission device with excellent performance. Figures 3(a) and (b) show the relationship between the current density and the electric field intensity after different times of treatment using the PET tape, and the curve of the turn-on electric field intensity as a function of the number of tape treatments, respectively. Figure 4 shows the comparison of current density and electric field strength after the same number of tape treatments without tape treatment and with different types of tape materials.
实施例3Example 3
一种处理阴极薄膜提高场发射性能的工艺，具体步骤包括：A process for treating a cathode film to improve field emission performance, the specific steps include:
步骤1：制备场发射阴极薄膜Step 1: Preparation of Field Emission Cathode Film
将质量比为20:1的松油醇和乙基纤维素混合后，在80℃水浴条件下充分搅拌，使之混合均匀，形成粘稠、透明的胶体，即为有机粘合剂；After mixing terpineol and ethyl cellulose with a mass ratio of 20:1, fully stir them in a water bath at 80 °C to make them evenly mixed to form a viscous and transparent colloid, which is an organic binder;
将作为场发射阴极材料的多壁碳纳米管粉末和有机粘合剂以质量比1:8混合，彻底研磨30分钟，至场发射阴极材料被充分分散即肉眼所见无颗粒。接下来，在干净的FTO导电玻璃基板上通过丝网印刷的方法涂覆场发射阴极材料，得到需要的场发射阴极薄膜。然后将其放入设定温度为350℃的马弗炉中，进行2小时的烘烤，以除去有机粘合剂。The multi-walled carbon nanotube powder as the field emission cathode material and the organic binder are mixed in a mass ratio of 1:8, thoroughly ground for 30 minutes, until the field emission cathode material is fully dispersed, that is, no particles can be seen with the naked eye. Next, the field emission cathode material is coated on the clean FTO conductive glass substrate by screen printing to obtain the desired field emission cathode film. It was then placed in a muffle furnace set at 350°C and baked for 2 hours to remove the organic binder.
步骤2：胶带处理Step 2: Tape Handling
(1)胶带的预处理(1) Pretreatment of tape
将选好的PET胶带撕开5cm，在胶带自身上将其反复地粘500次，通过改变胶带预处理的次数，改变胶带的粘附力；Tear the selected PET tape 5cm apart, stick it on the tape itself repeatedly 500 times, and change the adhesive force of the tape by changing the number of times of the tape pretreatment;
(2)阴极薄膜的胶带粘撕处理(2) Tape sticking and tearing treatment of cathode film
参阅图1，将预先处理好的PET胶带均匀平整地贴到待处理的场发射阴极薄膜上，再放置500g重的砝码，使胶带平整地覆盖住场发射阴极薄膜，再揭下。由于处理后的胶带的粘性不同，胶带处理过程中带走的场发射点数目有所区别。Referring to Figure 1, stick the pre-treated PET tape evenly and evenly on the field emission cathode film to be treated, and place a weight of 500g to make the tape cover the field emission cathode film flatly, and then peel it off. Due to the different viscosity of the treated tape, the number of field emission points taken away during the tape treatment process is different.
步骤3：测试阴极薄膜的场发射性能Step 3: Test the Field Emission Properties of the Cathode Film
将胶带处理后的场发射阴极薄膜组装成场发射器件，置于场发射测试真空系统中；场发射性能测试的结果表明，通过选择合适的胶带处理工艺参数能有效地降低场发射器件的开启和阈值电场强度，从而获得性能优异的场发射器件。The field emission cathode film after tape treatment was assembled into a field emission device, which was placed in a field emission test vacuum system; the results of the field emission performance test showed that the selection of appropriate tape treatment parameters can effectively reduce the turn-on and the field emission device. The threshold electric field strength can be obtained to obtain a field emission device with excellent performance.
实施例4Example 4
一种处理阴极薄膜提高场发射性能的工艺，具体步骤包括：A process for treating a cathode film to improve field emission performance, the specific steps include:
步骤1：制备场发射阴极薄膜Step 1: Preparation of Field Emission Cathode Film
将质量比为20:1的松油醇和乙基纤维素混合后，在80℃水浴条件下充分搅拌，使之混合均匀，形成粘稠、透明的胶体，即为有机粘合剂；After mixing terpineol and ethyl cellulose with a mass ratio of 20:1, fully stir them in a water bath at 80 °C to make them evenly mixed to form a viscous and transparent colloid, which is an organic binder;
将作为场发射阴极材料的多壁碳纳米管粉末和有机粘合剂以质量比1:8混合，彻底研磨30分钟，至场发射阴极材料被充分分散即肉眼所见无颗粒。接下来，在干净的FTO导电玻璃基板上通过丝网印刷的方法涂覆场发射阴极材料，得到需要的场发射阴极薄膜。然后将其放入设定温度为350℃的马弗炉中，进行2小时的烘烤，以除去有机粘合剂。The multi-walled carbon nanotube powder as the field emission cathode material and the organic binder are mixed in a mass ratio of 1:8, thoroughly ground for 30 minutes, until the field emission cathode material is fully dispersed, that is, no particles can be seen with the naked eye. Next, the field emission cathode material is coated on the clean FTO conductive glass substrate by screen printing to obtain the desired field emission cathode film. It was then placed in a muffle furnace set at 350°C and baked for 2 hours to remove the organic binder.
步骤2：胶带处理Step 2: Tape Handling
(1)胶带的预处理(1) Pretreatment of tape
将选好的PI胶带撕开5cm，在胶带自身上将其反复地粘300次，通过改变胶带预处理的次数，改变胶带的粘附力；Tear the selected PI tape 5cm apart, stick it on the tape itself 300 times repeatedly, and change the adhesive force of the tape by changing the number of times of tape pretreatment;
(2)阴极薄膜的胶带粘撕处理(2) Tape sticking and tearing treatment of cathode film
将预先处理好的PI胶带均匀平整地贴到待处理的场发射阴极薄膜上，再放置500g重的砝码，使胶带平整地覆盖住场发射阴极薄膜，再揭下。由于处理后的胶带的粘性不同，胶带处理过程中带走的场发射点数目有所区别。The pre-treated PI tape was evenly and evenly attached to the field emission cathode film to be treated, and then a 500g weight was placed to make the tape cover the field emission cathode film flatly, and then peeled off. Due to the different viscosity of the treated tape, the number of field emission points taken away during the tape treatment process is different.
步骤3：测试阴极薄膜的场发射性能Step 3: Test the Field Emission Properties of the Cathode Film
将胶带处理后的场发射阴极薄膜组装成场发射器件，置于场发射测试真空系统中；场发射性能测试的结果表明，通过选择合适的胶带处理工艺参数能有效地降低场发射器件的开启和阈值电场强度，从而获得性能优异的场发射器件。The field emission cathode film after tape treatment was assembled into a field emission device, which was placed in a field emission test vacuum system; the results of the field emission performance test showed that the selection of appropriate tape treatment parameters can effectively reduce the turn-on and the field emission device. The threshold electric field strength can be obtained to obtain a field emission device with excellent performance.
本发明的结果：Results of the present invention:
(1)胶带处理后的器件场发射性能优于未进行胶带处理的器件；(1) The field emission performance of the device after tape treatment is better than that of the device without tape treatment;
(2)PET胶带处理过的器件性能较优；(2) The performance of the device treated with PET tape is better;
(3)胶带处理次数不同，对场发射性能的影响也不同；(3) Different times of tape treatment have different effects on field emission performance;
(4)用PET胶带处理300次的器件具有最优异的场发射性能，其开启电场降至1.51V/μm，阈值电场降至1.71V/μm。(4) The device treated with PET tape for 300 times has the most excellent field emission performance, its turn-on electric field is reduced to 1.51V/μm, and the threshold electric field is reduced to 1.71V/μm.
所述的实例为本发明的优选实施方式，但本发明不仅限于上述实施方式，在不背离本发明实质内容的基础上，本领域研究人员能做出的任何显而易见的改进、替换，都应属于本专利的保护范围。The examples described are the preferred embodiments of the present invention, but the present invention is not limited to the above-mentioned embodiments, and any obvious improvements and substitutions that can be made by researchers in the field without departing from the essence of the present invention shall belong to the scope of protection of this patent.
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