CN110319934B - Interferometric modulator and infrared spectrometer - Google Patents
Interferometric modulator and infrared spectrometer Download PDFInfo
- Publication number
- CN110319934B CN110319934B CN201910550190.7A CN201910550190A CN110319934B CN 110319934 B CN110319934 B CN 110319934B CN 201910550190 A CN201910550190 A CN 201910550190A CN 110319934 B CN110319934 B CN 110319934B
- Authority
- CN
- China
- Prior art keywords
- mirror
- beam splitter
- fixing plate
- interferometric modulator
- supporting block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 238000003825 pressing Methods 0.000 claims description 18
- 238000002955 isolation Methods 0.000 claims description 8
- 239000007769 metal material Substances 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910000639 Spring steel Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000012443 analytical study Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000007891 compressed tablet Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000005495 investment casting Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention discloses an interferometric modulator and an infrared spectrometer. The interference modulator comprises a body, a beam splitter, a first plane mirror, a second plane mirror and a movable mirror scanning mechanism; the body comprises an upper fixing plate, a supporting block and a lower fixing plate, wherein the supporting block is positioned between the upper fixing plate and the lower fixing plate and fixedly connected with the upper fixing plate and the lower fixing plate, and the supporting block is provided with a beam splitter mounting hole; the beam splitter is arranged in the beam splitter mounting hole; the first plane mirror and the second plane mirror are fixed on the outer side wall of the body and are respectively positioned on two sides of the beam splitter and used for reflecting beams; the first angle mirror of the moving mirror scanning mechanism turns back the light beam emitted by the first plane mirror, and the second angle mirror turns back the light beam emitted by the second plane mirror. The interference modulator has the advantages of small volume, simple structure and high stability.
Description
Technical Field
The invention belongs to the field of detection equipment, and particularly relates to an interferometric modulator and an infrared spectrometer.
Background
The Fourier infrared spectrometer acquires the information of the infrared spectrum of the substance by acquiring the infrared interference signal by utilizing the transformation relation between the infrared interference signal and the infrared spectrogram, thereby qualitatively or quantitatively analyzing the components and the content of the substance. The optical interference modulator is a heart component of a Fourier infrared spectrometer, and the collimation deviation of internal devices of the optical interference modulator can greatly influence the modulation efficiency of interference signals, so that the performance of the optical interference modulator is influenced.
When the influence factors on the performance of the instrument are researched at present, the analyzed factors are only limited to the influence of an optical device, and after the factors are considered, only principle prototypes of the instrument can be completed. However, these analytical studies neglect the instrument as a practical product, and need to consider the influencing factors of long-term stability and the practical problems facing product engineering.
In the current commercial laboratory type infrared spectrometer, manufacturers often adopt materials with large heat capacity and large specific gravity, such as copper or cast iron, and the like, so that the thermal stability and the anti-vibration capability of the instrument are improved. The design can cause the instrument to have large volume and weight, so that the instrument is not convenient to move and is not beneficial to the use in industrial fields; and the mode of precision casting is often adopted, so that the production cost is higher. This greatly limits the industrial applicability of fourier infrared spectrometers.
Disclosure of Invention
In order to solve the above problems, the present invention provides an interferometric modulator and an infrared spectrometer, which have a small size, a light weight and a high stability through a compact mechanical connection.
The embodiment of the invention provides an interferometric modulator, which comprises a body, a beam splitter, a first plane mirror, a second plane mirror and a movable mirror scanning mechanism, wherein the beam splitter is arranged on the body;
the body comprises an upper fixing plate, a supporting block and a lower fixing plate, wherein the supporting block is positioned between the upper fixing plate and the lower fixing plate and fixedly connected with the upper fixing plate and the lower fixing plate, and the supporting block is provided with a beam splitter mounting hole;
the beam splitter is arranged in the beam splitter mounting hole;
the first plane mirror and the second plane mirror are fixed on the outer side wall of the body and are respectively positioned on two sides of the beam splitter and used for reflecting beams;
the movable mirror scanning mechanism comprises a swing arm, a rotating shaft, a first angle mirror, a second angle mirror and a driving device, wherein the swing arm is installed on the outer side wall of the body through the rotating shaft, the first angle mirror and the second angle mirror are fixed on the swing arm and distributed on the two sides of the beam splitter, the first angle mirror turns back light beams emitted by the first plane mirror, the second angle mirror turns back light beams emitted by the second plane mirror, and the driving device is connected with the swing arm.
According to an embodiment of the present invention, the first plane mirror includes a first reflecting mirror and a first mirror base, and the first reflecting mirror and the first mirror base are integrally formed.
In an embodiment of the present invention, an isolation groove is disposed between the first reflector and the first mirror seat.
According to an embodiment of the present invention, the second flat mirror includes a second reflecting mirror and a second mirror base, and the second reflecting mirror and the second mirror base are integrally formed.
According to an embodiment of the present invention, an isolation groove is disposed between the second reflecting mirror and the second mirror base.
According to an embodiment of the present invention, the second flat mirror further includes a fixing base, the second mirror base is connected to the fixing base through a spring, a fine adjustment screw is fixed to the fixing base through a thread, and an end of the fine adjustment screw is tightly attached to the second mirror base.
According to an embodiment of the present invention, the beam splitter is fixed in the beam splitter mounting hole through a pressing plate, the pressing plate is connected to the supporting block, and a pressing arm of the pressing plate presses the beam splitter.
According to an embodiment of the present invention, a protrusion is extended upward from a bottom surface of the beam splitter mounting hole, opposite to the pressing arm, and the protrusion supports the beam splitter.
According to an embodiment of the present invention, a V-shaped groove is formed on an outer side wall of the body, and a rotating shaft of the moving mirror scanning mechanism is fixed in the V-shaped groove through an elastic sheet.
The invention also provides an infrared spectrometer which comprises the interference modulator.
According to the interferometric modulator and the infrared spectrometer, the plane mirror, the movable mirror scanning mechanism and the beam splitter are fixed on the body, so that a stable structure is formed; the structure is simple, and the assembly process is greatly simplified; the performance of the instrument can adapt to the industrial field environment and operate stably for a long time.
Drawings
FIG. 1 is a front view of an interferometric modulator according to an embodiment of the invention.
FIG. 2 is a cross-sectional view of an interferometric modulator according to an embodiment of the invention.
Fig. 3 is a perspective view of the body of the embodiment of the present invention.
Fig. 4 is a front view of the body of the embodiment of the present invention.
FIG. 5 is a top view of an embodiment body of the present invention.
Fig. 6 is a schematic structural diagram of a first plane mirror according to an embodiment of the present invention.
Fig. 7 is a schematic structural diagram of a second flat mirror according to an embodiment of the present invention.
FIG. 8 is a cross-sectional view of a second flat mirror according to an embodiment of the present invention.
Fig. 9 is a schematic structural diagram of a moving mirror scanning mechanism according to an embodiment of the present invention.
Figure 10 is a schematic representation of a compressed tablet according to an embodiment of the present invention.
Figure 11 is an enlarged view of a beam splitter mounting hole according to an embodiment of the present invention.
Fig. 12 is a schematic view of the installation of the rotating shaft according to the embodiment of the present invention.
Detailed Description
The following detailed description of the present invention, taken in conjunction with the accompanying drawings and examples, is provided to enable the invention and its various aspects and advantages to be better understood. However, the specific embodiments and examples described below are for illustrative purposes only and are not limiting of the invention.
The term "connected", as used herein, unless otherwise expressly specified or limited, is to be construed broadly, as meaning either directly or through an intermediate connection. In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", and the like are based on the directions or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.
As shown in FIGS. 1 and 2, embodiments of the present invention provide an interferometric modulator. The interferometric modulator comprises a body 1, a beam splitter 2, a first flat mirror 3, a second flat mirror 4 and a moving mirror scanning mechanism 5. The beam splitter 2, the first plane mirror 3, the second plane mirror 4 and the moving mirror scanning mechanism 5 are all installed on the body 1, and laser is emitted into the interference modulator and then is processed by an optical element to generate interference light.
As shown in fig. 3, 4 and 5, the body 1 includes an upper fixing plate 11, a supporting block 12 and a lower fixing plate 13, and the upper fixing plate 11 and the lower fixing plate 13 have the same shape. The widths of the upper and lower fixing plates 11 and 13 are greater than the width of the supporting block 12. The body 1 is approximately shaped like an I, and the supporting block 12 is positioned between the upper fixing plate 11 and the lower fixing plate 13 and fixedly connected with the upper fixing plate 11 and the lower fixing plate 13.
Preferably, the upper fixing plate 11, the supporting block 12 and the lower fixing plate 13 are integrally formed, that is, the body 1 is formed by machining a single metal piece. In this embodiment, the material of the main body 1 is an isotropic metal material, such as an aluminum alloy, and the use of a light material is convenient for reducing the weight of the interferometric modulator.
The supporting block 12 is provided with a beam splitter mounting hole 14, and the beam splitter 2 is mounted in the beam splitter mounting hole 14. The bottom surface of the beam splitter mounting hole 14 is provided with a through light through hole, and the diameter of the light through hole is smaller than that of the beam splitter mounting hole 14. The laser light can be irradiated to the beam splitter 2 through the light transmitting hole. The beam splitter 2 splits the laser light into a transmitted beam and a reflected beam.
The first plane mirror 3 and the second plane mirror 4 are both fixed on the outer side wall of the body 1, and the first plane mirror 3 and the second plane mirror 4 are respectively located on two sides of the beam splitter 2 and used for reflecting beams. The transmitted beam of the beam splitter 2 is irradiated onto the first plane mirror 3, and the first plane mirror 3 reflects the transmitted beam. The reflected beam of the beam splitter 2 impinges on a second flat mirror 4, which second flat mirror 4 reflects the reflected beam.
As shown in fig. 9, the moving mirror scanning mechanism 5 includes a swing arm 51, a rotating shaft 52, a first angle mirror 53, a second angle mirror 54, and a driving device 55.
The rotating shaft 52 is installed on the outer side wall of the body 1, the swing arm 51 is fixedly connected with the rotating shaft 52, and the swing arm 51 can rotate around the axis of the rotating shaft 52. Optionally, the shaft 52 of the present embodiment is a resilient shaft.
The first and second angle mirrors 53 and 54 are fixed to both ends of the swing arm 51, respectively, and are located on both sides of the beam splitter 2, respectively. The rotation axis 52 is located between the first angled mirror 53 and the second angled mirror 54.
The first angle mirror 53 turns back the light beam emitted from the first plane mirror 3, and the second angle mirror 54 turns back the light beam emitted from the second plane mirror 4. The first angle mirror 53 and the second angle mirror 54 are hollow solid angle mirrors, and the optical characteristics of the hollow solid angle mirrors are that incident beams can be reflected according to 180 degrees without being influenced by the incident angle and the posture of the angle mirrors, so that the influence of self inclination can be overcome by using the hollow solid angle mirrors; and a completely symmetrical optical structure, so that the light beams do not traverse.
The driving device 55 is connected to the swing arm 51, and the driving device 55 can drive the swing arm 51 to swing. The driving device 55 in this embodiment is a linear motor.
With the interferometric modulator of this embodiment, after laser light is incident on the beam splitter 2, a part of the laser light is transmitted to form a transmitted beam, and the other part of the laser light is reflected to form a reflected beam.
The transmitted light beam enters the first plane mirror 3, enters the first angle mirror 53 after being reflected by the first plane mirror 3, the first angle mirror 53 turns back the light beam in the original path, returns to the beam splitter 2 after being reflected by the first plane mirror 3, is split again by the beam splitter 2, the transmitted light split again returns to the light source, and the reflected light split again is emitted along the reflection direction.
The reflected light beam enters the second plane mirror 4, enters the second angle mirror 54 after being reflected by the second plane mirror 4, the second angle mirror 54 turns the light beam back, returns to the beam splitter 2 after being reflected by the second plane mirror 4, is split again by the beam splitter 2, the reflected light split again returns to the light source, and the transmitted light split again is emitted.
The reflected light of the transmitted beam which is split again and the transmitted light of the reflected beam which is split again form interference light. The swing of the moving mirror scanning mechanism changes the optical path difference of the two beams of coherent light.
Alternatively, as shown in fig. 6, the first plane mirror 3 includes a first reflecting mirror 31 and a first mirror base 32, the reflecting surface of the first reflecting mirror 31 is used for reflecting the light beam, and the first mirror base 32 is connected with the body 1. The reflecting surface can be a circular, rectangular or elliptical surface and the like, and is selected according to requirements. The first reflecting mirror 31 and the first mirror base 32 are integrally formed, that is, the first plane mirror 3 is formed by processing a metal piece. The material of the first plane mirror 3 can be selected from isotropic metal materials, such as aluminum, aluminum alloy, stainless steel, etc.
Preferably, an isolation groove 33 is provided between the first reflector 31 and the first mirror seat 32, so that a certain gap is formed between the sidewall of the first reflector 31 and the sidewall of the first mirror seat 32. The isolation groove 33 is arranged to effectively isolate the deformation influence between the fixing surface of the first mirror base 32 and the reflecting surface of the first reflector 31, so that the stability of the reflecting surface after the change of the external environment is ensured.
Generally, the reflector is made of non-metal materials and fixed on a metal mirror frame. The traditional mode has two problems, namely that the size of the plane reflector is larger than the thickness of the plane reflector, so that the plane reflector is an approximate flexible plate and has certain instability; secondly, the plane mirror has stress and deformation in the fixing process, and especially when the outside has vibration and temperature change, the plane mirror can be distorted due to the change of the stress. Advantages of the first plane mirror 3 of the present embodiment: the way of fixing the first reflector 31 is not needed to be considered, stress and deformation cannot be introduced due to the fixation of the reflector, and the problem of stress and deformation cannot exist due to the mismatch of the thermal expansion coefficients of the first mirror seat 32 and the first reflector 31. The problem of thermal deformation does not exist between the first plane mirror 3 and the body 1, and the first mirror base 32 is isolated from the first reflecting mirror 31 through the isolating groove 33, so that the stress and the deformation are not transmitted to the reflecting surface in the fixing process of the first plane mirror 3 and the body 1, and the requirement on the processing precision of the body 1 can be reduced.
As shown in fig. 7 and 8, the second flat mirror 4 includes a second reflecting mirror 41 and a second mirror base 42, and a reflecting surface of the second reflecting mirror 41 is used to reflect the light beam. The reflecting surface of the second reflecting mirror 41 may be a circular, rectangular, or elliptical surface, and the shape thereof is selected according to the requirement. The second reflecting mirror 41 and the second mirror base 42 are integrally formed, that is, the second reflecting mirror 41 and the second mirror base 42 are formed by processing a metal, and the material of the second reflecting mirror 41 and the material of the second mirror base 42 can be isotropic metal material, such as aluminum, aluminum alloy, or stainless steel.
Preferably, an isolation groove 43 is formed between the second reflecting mirror 41 and the second mirror base 42, and the isolation groove 43 is annular in this embodiment. The second plane mirror 4 does not need to consider the problem that the stress of the second mirror 41 is not matched with the thermal expansion coefficient during the fixing process, and also does not need to consider the mirror distortion and instability of the second mirror 41 caused by the fixing.
Second flat mirror 4 further includes a fixing base 44, and second flat mirror 4 can be connected to body 1 through fixing base 44. Second microscope base 42 and fixing base 44 all are equipped with the spring hook, and second microscope base 42 passes through spring 45 with fixing base 44 to be connected, and the quantity of spring 45 is a plurality of. The fixing base 44 is provided with a fine adjustment screw 46, the fine adjustment screw 46 is fixed on the fixing base 44 through threads, and the end of the fine adjustment screw 46 is tightly attached to the second lens base 42. The angle of the second reflecting mirror 41 can be adjusted by rotating the fine adjustment screw 46. In this embodiment, the fixing base 44 is provided with a plurality of fine adjustment screws 46, which is more convenient for adjusting the second reflecting mirror 41.
As shown in FIG. 10, the interferometric modulator also includes a pressure plate 6, and the beam splitter 2 is secured within the beam splitter mounting hole 14 by the pressure plate 6. The pressing sheet 6 is provided with a plurality of pressing arms 61 bent at a certain angle, after the beam splitter 2 is placed in the beam splitter mounting hole 14, the pressing sheet 6 is placed above the beam splitter 2, the pressing arms 61 press the beam splitter 2 tightly, and the pressing sheet 6 is fixedly connected with the supporting block 12 by passing through the through hole 62 through screws.
The pressing piece 6 is made of a metal material having high elasticity, such as spring steel, beryllium copper, and the like. The pressing plate 6 is formed by processing a whole piece of material, and bends the pressing arm 61 at a certain angle to provide necessary pre-tightening force when fixing the beam splitter 2.
As shown in fig. 11, in order to fix the beam splitter 2 better, a bottom surface 141 of the beam splitter mounting hole is extended upward by a projection 142 opposite to the pressing arm 61, and the projection 142 supports the beam splitter 2. In order to reduce the stress caused by temperature change, an elastic gasket is arranged on the cylindrical surface side of the beam splitter 2 cylinder, so that the fixing force applied to the beam splitter 2 is uniformly distributed in all directions.
As shown in fig. 12, an installation groove 15 is formed on the outer side wall of the body, and the installation groove 15 is a V-shaped groove in this embodiment. The rotating shaft 52 of the moving mirror scanning mechanism is arranged in the mounting groove 15, and the rotating shaft 52 is fixed in the V-shaped groove through the elastic sheet 56. The elastic sheet 56 is made of a metal material with elasticity, such as spring steel, beryllium copper, and the like.
The embodiment of the invention also provides an infrared spectrometer which comprises the interference modulator.
The beam splitter 2, the first flat mirror 3, the second flat mirror 4, and the swing arm 5 of the interferometric modulator of this embodiment are fixed to the body, forming a stable structure. The reflector and the mirror base are processed by a whole metal material, and the problems of stress, thermal deformation and the like existing between the reflector and the mirror base are solved. Through the design of the slot, the influence of the stress on the reflecting surface when the reflector is fixed is isolated. In addition, the entire interferometric modulator may be fabricated from the same metal material, with the exception of the individual components, such as the beam splitter, to optimize the thermal stability of the overall structure.
The interferometric modulator of the embodiment can reduce the processing precision and greatly simplify the assembly process. No glue is needed, or tooling with extremely high precision is needed.
It should be noted that the above-mentioned embodiments described with reference to the drawings are only intended to illustrate the present invention and not to limit the scope of the present invention, and it should be understood by those skilled in the art that modifications and equivalent substitutions can be made without departing from the spirit and scope of the present invention. Furthermore, unless the context indicates otherwise, words that appear in the singular include the plural and vice versa. Additionally, all or a portion of any embodiment may be utilized with all or a portion of any other embodiment, unless stated otherwise.
Claims (10)
1. An interferometric modulator is characterized by comprising a body, a beam splitter, a first plane mirror, a second plane mirror and a movable mirror scanning mechanism;
the body comprises an upper fixing plate, a supporting block and a lower fixing plate, wherein the supporting block is positioned between the upper fixing plate and the lower fixing plate and fixedly connected with the upper fixing plate and the lower fixing plate, the supporting block is provided with a beam splitter mounting hole, the widths of the upper fixing plate and the lower fixing plate are larger than the widths of the supporting block, and the upper fixing plate, the supporting block and the lower fixing plate are integrally formed;
the beam splitter is arranged in the beam splitter mounting hole;
the first plane mirror and the second plane mirror are fixed on the outer side wall of the body and are respectively positioned on two sides of the beam splitter and used for reflecting beams;
the movable mirror scanning mechanism comprises a swing arm, a rotating shaft, a first angle mirror, a second angle mirror and a driving device, wherein the swing arm is installed on the outer side wall of the body through the rotating shaft, the first angle mirror and the second angle mirror are fixed on the swing arm and distributed on the two sides of the beam splitter, the first angle mirror turns back light beams emitted by the first plane mirror, the second angle mirror turns back light beams emitted by the second plane mirror, and the driving device is connected with the swing arm.
2. The interferometric modulator of claim 1, wherein the first planar mirror comprises a first mirror and a first mirror mount, the first mirror and the first mirror mount being integrally formed.
3. The interferometric modulator of claim 2, wherein an isolation groove is disposed between the first mirror and the first mirror mount.
4. The interferometric modulator of claim 1, wherein the second flat mirror comprises a second mirror and a second mirror mount, the second mirror and the second mirror mount being integrally formed.
5. The interferometric modulator of claim 4, wherein an isolation groove is disposed between the second mirror and the second base.
6. The interferometric modulator of claim 5, wherein the second flat mirror further comprises a fixing base, the second flat mirror base is connected to the fixing base through a spring, a fine tuning screw is fixed to the fixing base through a thread, and an end of the fine tuning screw is tightly attached to the second flat mirror base.
7. The interferometric modulator of claim 1, wherein the beam splitter is fixed in the beam splitter mounting hole by a pressing plate, the pressing plate is connected with the supporting block, and a pressing arm of the pressing plate presses the beam splitter.
8. The interferometric modulator of claim 7, wherein the beam splitter mounting hole has a bottom surface that extends upward to form a protrusion opposite the press arm, the protrusion supporting the beam splitter.
9. The interferometric modulator of claim 1, wherein a V-shaped groove is formed on an outer sidewall of the body, and a rotating shaft of the moving mirror scanning mechanism is fixed in the V-shaped groove through a spring.
10. An infrared spectrometer comprising the interferometric modulator of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910550190.7A CN110319934B (en) | 2019-06-24 | 2019-06-24 | Interferometric modulator and infrared spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910550190.7A CN110319934B (en) | 2019-06-24 | 2019-06-24 | Interferometric modulator and infrared spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110319934A CN110319934A (en) | 2019-10-11 |
| CN110319934B true CN110319934B (en) | 2022-02-01 |
Family
ID=68120221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910550190.7A Active CN110319934B (en) | 2019-06-24 | 2019-06-24 | Interferometric modulator and infrared spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110319934B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112180536A (en) * | 2020-09-24 | 2021-01-05 | 杭州春来科技有限公司 | A swinging device for an interferometer |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000019259A1 (en) * | 1998-09-30 | 2000-04-06 | Euv Limited Liability Corporation | Surface figure control for coated optics |
| CN102540403A (en) * | 2012-02-29 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | Primary mirror installation adjustment mechanism |
| CN105283789A (en) * | 2013-02-13 | 2016-01-27 | 齐戈股份有限公司 | Monolithic optical components with integrated flexures |
| CN106525241A (en) * | 2016-10-26 | 2017-03-22 | 北京雪迪龙科技股份有限公司 | Interferometer and spectrograph |
| CN107907495A (en) * | 2017-12-18 | 2018-04-13 | 上海仪电分析仪器有限公司 | Atomic absorption spectrophotometer luminous flux device for automatically regulating |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4773757A (en) * | 1987-08-19 | 1988-09-27 | Laser Precision Corporation | High resolution spectrometer interferometer having an integrated alignment unit |
| CN202631111U (en) * | 2012-05-30 | 2012-12-26 | 北京瑞利分析仪器有限公司 | Plane pendulum interferometer |
| KR101860347B1 (en) * | 2016-11-29 | 2018-05-23 | 국방과학연구소 | Housing system for michelson interferometer |
-
2019
- 2019-06-24 CN CN201910550190.7A patent/CN110319934B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000019259A1 (en) * | 1998-09-30 | 2000-04-06 | Euv Limited Liability Corporation | Surface figure control for coated optics |
| CN102540403A (en) * | 2012-02-29 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | Primary mirror installation adjustment mechanism |
| CN105283789A (en) * | 2013-02-13 | 2016-01-27 | 齐戈股份有限公司 | Monolithic optical components with integrated flexures |
| CN106525241A (en) * | 2016-10-26 | 2017-03-22 | 北京雪迪龙科技股份有限公司 | Interferometer and spectrograph |
| CN107907495A (en) * | 2017-12-18 | 2018-04-13 | 上海仪电分析仪器有限公司 | Atomic absorption spectrophotometer luminous flux device for automatically regulating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110319934A (en) | 2019-10-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5111520B2 (en) | Interferometer maintaining optical relationship between optical elements | |
| US8933406B2 (en) | Interferometer having multiple scan carriages | |
| CN108873320B (en) | Two-dimensional rapid control reflector | |
| CN110319934B (en) | Interferometric modulator and infrared spectrometer | |
| EP3652509B1 (en) | Mirror bearing for an interferometer | |
| US7733586B2 (en) | Lens positioning assembly | |
| CN115046636B (en) | A compact and highly stable phase-shift scanning device based on piezoelectric ceramic drive | |
| CN116419137A (en) | Optical microphone and sound transmission system based on hollow micro-cantilever | |
| US8853567B2 (en) | Electromagnetic force compensating weighing device with mounting system compensating for mechanical stresses | |
| CN109186755B (en) | Laser energy monitoring device | |
| US20080068612A1 (en) | Fourier-transform spectrometers | |
| CN118534606A (en) | Angle adjusting device of optical element | |
| CN109668527B (en) | Adjustable optical auto-collimator | |
| CN219533593U (en) | DMD assembly mounting structure | |
| CN222704782U (en) | Dual-optical lens adjusting module | |
| KR101806897B1 (en) | System for tilt compensation of moveable reflective mirror of michelson interferometer | |
| CN223193187U (en) | Cylindrical mirror angle adjustment mechanism and optical device | |
| JP7758579B2 (en) | Measuring equipment | |
| CN222053247U (en) | A fast focusing mechanism for television camera | |
| CN215812391U (en) | Portable spectrometer | |
| CN221765926U (en) | Reflecting piece position adjustment mechanism and projection equipment | |
| CN114967115B (en) | A large-stroke phase-shifting scanning device driven by a voice coil motor | |
| CN211206924U (en) | Light splitting prism assembly for off-axis three-mirror optical system | |
| CN117871520A (en) | Laser with adjustable light path | |
| JP2000182338A (en) | Backlash preventing member in optical pickup device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |