CN110311195A - A Miniaturized Ultra-Wideband Artificial Surface Plasmon Bandpass Filter - Google Patents
A Miniaturized Ultra-Wideband Artificial Surface Plasmon Bandpass Filter Download PDFInfo
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Abstract
本发明公开了一种小型化超宽带人工表面等离激元带通滤波器,包括由上至下依次设置的上层金属结构、第一介质基板、中层传统等离激元波导、第二介质基板以及下层金属结构,上层金属结构的中间为单导体小型化等离激元波导,波导两端分别连接一个过渡段,过渡段另一端与第一金属条带连接;中层传统等离激元波导与上层单导体小型化等离激元波导长度相同,包括若干人工表面等离激元单元结构;下层金属结构包括两个中间不连通的对称结构,对称结构由一端向中间依次包括矩形金属地、梯形金属地过渡结构和下层人工表面等离激元过渡结构。本发明可以将电尺寸缩小为传统人工表面等离激元结构的26%,且将带通滤波器的相对工作带宽拓展到180%。
The invention discloses a miniaturized ultra-broadband artificial surface plasmon bandpass filter, which comprises an upper metal structure, a first dielectric substrate, a middle traditional plasmon waveguide, and a second dielectric substrate arranged sequentially from top to bottom And the lower metal structure, the middle of the upper metal structure is a single-conductor miniaturized plasmonic waveguide, the two ends of the waveguide are respectively connected to a transition section, and the other end of the transition section is connected to the first metal strip; the middle traditional plasmonic waveguide and The upper-layer single-conductor miniaturized plasmonic waveguide has the same length, including several artificial surface plasmon unit structures; the lower-layer metal structure includes two symmetrical structures that are not connected in the middle, and the symmetrical structures include a rectangular metal ground, a trapezoidal Metal ground transition structure and underlying artificial surface plasmon transition structure. The invention can reduce the electrical size to 26% of the traditional artificial surface plasmon structure, and expand the relative working bandwidth of the band-pass filter to 180%.
Description
技术领域technical field
本发明涉及带通滤波器,特别是涉及一种小型化超宽带人工表面等离激元带通滤波器。The invention relates to a band-pass filter, in particular to a miniaturized ultra-wideband artificial surface plasmon band-pass filter.
背景技术Background technique
表面等离激元是金属/电介质界面上光子与电子相互作用激发的光学表面波,具有波长压缩和近场增强等独特优点。然而,当工作频率缩小到微波波段时,这种表面等离激元本质上不可能存在,因为金属在此时表现为完美的导电体。采用的替代方法是,通过周期性地在金属上蚀刻亚波长的人工结构,人工表面等离激元可以被激发并用于模拟微波波段的光学表面等离子体激元。其中超薄二维人工表面等离激元波导由于更容易与传统的射频电路集成,引起了人们的广泛关注。自从提出了人工表面等离激元波导与传统电路的有效转换方法后,超薄人工表面等离激元波导在射频电路中的应用越来越多。因为超宽带带通滤波器是现代宽带无线通信系统中的关键部件,使用人工表面等离激元波导设计超宽带带通滤波器具有显著的工程价值。因为其高频截止特性,人工表面等离激元波导是天然然的低通滤波器,通过引入低频传输零点,即可设计人工表面等离激元波导带通滤波器。Surface plasmons are optical surface waves excited by the interaction of photons and electrons at the metal/dielectric interface, which have unique advantages such as wavelength compression and near-field enhancement. However, such surface plasmons are essentially impossible when the operating frequency is scaled down to the microwave band, since metals behave as perfect electrical conductors. Instead, by periodically etching subwavelength artificial structures on metals, artificial surface plasmons can be excited and used to mimic optical surface plasmons at microwave wavelengths. Among them, the ultrathin two-dimensional artificial surface plasmon waveguide has attracted extensive attention because it is easier to integrate with traditional radio frequency circuits. Since the effective conversion method between artificial surface plasmon waveguides and traditional circuits was proposed, the application of ultrathin artificial surface plasmon waveguides in radio frequency circuits has been increasing. Because ultra-wideband bandpass filters are key components in modern broadband wireless communication systems, the design of ultrawideband bandpass filters using artificial surface plasmon waveguides has significant engineering value. Because of its high-frequency cut-off characteristics, the artificial surface plasmon waveguide is a natural low-pass filter. By introducing a low-frequency transmission zero point, the artificial surface plasmon waveguide bandpass filter can be designed.
发明内容Contents of the invention
发明目的:提供一种人工表面等离激元带通滤波器的设计方法,具有显著的超宽带和小型化效果。Purpose of the invention: To provide a design method of an artificial surface plasmon bandpass filter, which has remarkable ultra-wideband and miniaturization effects.
技术方案:为实现上述发明目的,本发明采用以下技术方案:Technical solution: In order to realize the above-mentioned invention purpose, the present invention adopts the following technical solutions:
一种小型化超宽带人工表面等离激元带通滤波器,包括由上至下依次设置的上层金属结构、第一介质基板、中层传统等离激元波导、第二介质基板以及下层金属结构,其中,上层金属结构包括两个第一金属条带、两个锯齿高度逐渐增高的微开槽人工表面等离激元单元过渡段和包含若干微开槽人工表面等离激元单元的单导体小型化等离激元波导,单导体小型化等离激元波导位于中间,且其两端分别连接一个过渡段,过渡段另一端与第一金属条带连接;中层传统等离激元波导与单导体小型化等离激元波导长度相同,包括若干人工表面等离激元单元结构,且人工表面等离激元单元结构数量与单导体小型化等离激元波导中的微开槽人工表面等离激元单元数量相同;下层金属结构包括两个中间不连通的对称结构,对称结构由一端向中间依次包括金属地、金属地过渡结构和下层人工表面等离激元过渡结构。A miniaturized ultra-wideband artificial surface plasmon bandpass filter, including an upper metal structure, a first dielectric substrate, a middle traditional plasmon waveguide, a second dielectric substrate and a lower metal structure arranged in sequence from top to bottom , wherein the upper metal structure includes two first metal strips, two transition sections of micro-slotted artificial surface plasmon units whose sawtooth height gradually increases, and a single conductor containing several micro-slotted artificial surface plasmon units The miniaturized plasmonic waveguide, the single-conductor miniaturized plasmonic waveguide is located in the middle, and its two ends are respectively connected to a transition section, and the other end of the transition section is connected to the first metal strip; the middle traditional plasmonic waveguide and The single-conductor miniaturized plasmonic waveguide has the same length, including several artificial surface plasmon unit structures, and the number of artificial surface plasmon unit structures is the same as that of the micro-grooved artificial surface in the single-conductor miniaturized plasmonic waveguide The number of plasmonic units is the same; the lower metal structure includes two disconnected symmetrical structures in the middle, and the symmetrical structure includes a metal ground, a metal ground transition structure and a lower artificial surface plasmon transition structure from one end to the middle.
可选的,微开槽人工表面等离激元单元中间纵向开设有若干“弓”字形槽,上下两端横向分别开设有若干“弓”字形槽。Optionally, a number of "bow"-shaped grooves are longitudinally opened in the middle of the micro-slotted artificial surface plasmon unit, and a number of "bow"-shaped grooves are respectively opened horizontally at the upper and lower ends.
可选的,单导体小型化等离激元波导与中层传统等离激元波导在x-y平面重合,在z方向上由第一介质基板隔开,二者共同组成双导体小型化人工表面等离激元波导。Optionally, the single-conductor miniaturized plasmonic waveguide coincides with the middle-layer traditional plasmonic waveguide on the x-y plane, and is separated by the first dielectric substrate in the z direction. Together, they form a dual-conductor miniaturized artificial surface plasmon waveguide. Exciton waveguide.
可选的,双导体小型化人工表面等离激元波导的截止频率为4.25GHz,对应的截止波长为66.7mm。Optionally, the cutoff frequency of the dual-conductor miniaturized artificial surface plasmon waveguide is 4.25 GHz, and the corresponding cutoff wavelength is 66.7 mm.
可选的,上层金属结构与下层金属结构共同构成微带线与双导体小型化人工表面等离激元波导的转换结构。Optionally, the upper metal structure and the lower metal structure together form a conversion structure between a microstrip line and a dual-conductor miniaturized artificial surface plasmon waveguide.
可选的,下层金属结构与中层传统等离激元波导在x-y平面有部分重合,重合位置在中层传统等离激元波导两侧,范围为一个单元尺度,在z方向上由第二介质基板隔开。Optionally, the lower metal structure partially overlaps with the traditional middle-layer plasmonic waveguide on the x-y plane, and the overlapping position is on both sides of the middle-layer traditional plasmonic waveguide, and the range is one unit scale. separated.
可选的,下层金属结构中的金属地为矩形结构、金属地过渡结构为梯形结构。Optionally, the metal ground in the lower metal structure is a rectangular structure, and the metal ground transition structure is a trapezoidal structure.
可选的,该带通滤波器通带范围为0.23-4.25GHz,相对带宽高达180%,通带范围内群延时为1-1.8ns之间。Optionally, the passband range of the bandpass filter is 0.23-4.25GHz, the relative bandwidth is as high as 180%, and the group delay within the passband range is between 1-1.8ns.
有益效果:与现有技术相比,本发明能够显著提高带通滤波器的通带带宽,并且大大减小人工表面等离激元波导的几何尺寸,有利于应用系统整体的小型化。另外本发明制造简单、操作方便、容易集成,只需要一步光刻过程,不仅节省造价,而且避免了复杂结构引发的加工误差。Beneficial effects: Compared with the prior art, the present invention can significantly increase the passband bandwidth of the bandpass filter, and greatly reduce the geometric size of the artificial surface plasmon waveguide, which is beneficial to the overall miniaturization of the application system. In addition, the invention is simple to manufacture, convenient to operate, easy to integrate, and only needs one-step photolithography process, which not only saves the cost, but also avoids processing errors caused by complex structures.
附图说明Description of drawings
图1是小型化人工表面等离激元带通滤波器的原理图,其中(a)为整体示意图,(b)为分层显示图;Figure 1 is a schematic diagram of a miniaturized artificial surface plasmon bandpass filter, where (a) is the overall schematic diagram, and (b) is a layered display diagram;
图2是小型化人工表面等离激元单元结构及表面电流分布,其中,(a)为结构原理图,(b)表面电流分布图;Figure 2 shows the structure of the miniaturized artificial surface plasmon unit and the surface current distribution, where (a) is the schematic diagram of the structure, and (b) the surface current distribution diagram;
图3是传统和小型化表面等离激元单元的色散曲线比较;Figure 3 is a comparison of the dispersion curves of traditional and miniaturized surface plasmon units;
图4是小型化人工表面等离激元带通滤波器的S参数;Fig. 4 is the S parameter of the miniaturized artificial surface plasmon bandpass filter;
图5是小型化人工表面等离激元带通滤波器的群延时;Fig. 5 is the group delay of the miniaturized artificial surface plasmon bandpass filter;
图6是小型化人工表面等离激元带通滤波器的实验样品;Figure 6 is an experimental sample of a miniaturized artificial surface plasmon bandpass filter;
图中:1为上层金属结构,2为第一介质基板、3为中层传统等离激元波导、4为第二介质基板,5为下层金属结构,11为第一金属条带,12为过渡段,13为单导体小型化等离激元波导,51为矩形金属地、52为梯形金属地过渡结构,53为下层人工表面等离激元过渡结构。In the figure: 1 is the upper metal structure, 2 is the first dielectric substrate, 3 is the middle traditional plasmonic waveguide, 4 is the second dielectric substrate, 5 is the lower metal structure, 11 is the first metal strip, 12 is the transition Section 13 is a single-conductor miniaturized plasmon waveguide, 51 is a rectangular metal ground, 52 is a trapezoidal metal ground transition structure, and 53 is a lower artificial surface plasmon transition structure.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明的技术方案进行详细的说明。The technical solutions of the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
图1(a)是所提出的小型化人工表面等离激元带通滤波器整体模型,包括两层介质基板,以及分别位于两层介质基板之间和上下表面的三层金属结构,两层介质基板的介电常数相同,均为3.48,基板厚度分别为0.762mm和0.101mm。图1(b)是对于三层金属结构的分层显示,其中上层金属结构1包括第一金属条带11、两个锯齿高度逐渐增高的微开槽人工表面等离激元单元过渡段12和包含若干微开槽人工表面等离激元单元的单导体小型化等离激元波导13,两个过渡段12分别位于上层金属条带两端,且过渡段与第一金属条带连接,并对称设置于上层金属条带两边,单导体小型化等离激元波导位于过渡段之间。中层传统等离激元波导3与单导体小型化等离激元波导长度相同,也是由相同数量的人工表面等离激元单元组成,区别在于此处的人工表面等离激元单元结构为传统不加微开槽形式。微开槽人工表面等离激元单元为在传统锯齿状人工表面等离激元结构上进行横向和纵向的细微开槽,且有错位,使导体结构不被截断(形成类似“弓”型结构)。上层单导体小型化等离激元波导与中层传统等离激元波导在x-y平面重合,在z方向上由第一介质基板隔开,二者共同组成双导体小型化人工表面等离激元波导。下层金属结构5由两个对称部分构成,分别位于整体结构的两端,其组成部分包括矩形金属地51、梯形金属地过渡结构52和下层人工表面等离激元过渡结构53。上层金属结构与下层金属结构共同构成微带线与双导体小型化人工表面等离激元波导的转换结构。下层金属结构与中层传统等离激元波导之间在两侧各存在一个单元尺度的重合范围,在 x-y平面重合,在z方向上由第二介质基板隔开。Figure 1(a) is the overall model of the proposed miniaturized artificial surface plasmon bandpass filter, including two dielectric substrates, and a three-layer metal structure located between the two dielectric substrates and on the upper and lower surfaces. The dielectric constants of the dielectric substrates are the same, both being 3.48, and the thicknesses of the substrates are 0.762 mm and 0.101 mm, respectively. Figure 1(b) is a layered display of a three-layer metal structure, in which the upper metal structure 1 includes a first metal strip 11, two micro-slotted artificial surface plasmon unit transition sections 12 with gradually increasing sawtooth heights and A single-conductor miniaturized plasmon waveguide 13 comprising several micro-grooved artificial surface plasmon units, two transition sections 12 are respectively located at both ends of the upper metal strip, and the transition section is connected to the first metal strip, and It is arranged symmetrically on both sides of the upper metal strip, and the single-conductor miniaturized plasmonic waveguide is located between the transition sections. The traditional mid-level plasmonic waveguide 3 has the same length as the single-conductor miniaturized plasmonic waveguide, and is also composed of the same number of artificial surface plasmon units. The difference is that the artificial surface plasmon unit structure here is traditional No micro grooved form. The micro-slotted artificial surface plasmon unit is made of horizontal and vertical micro-slots on the traditional zigzag artificial surface plasmon structure, and there is a dislocation, so that the conductor structure is not truncated (forming a similar "bow" structure ). The upper-layer single-conductor miniaturized plasmonic waveguide and the middle-layer traditional plasmonic waveguide overlap on the x-y plane, and are separated by the first dielectric substrate in the z-direction. Together, they form a dual-conductor miniaturized artificial surface plasmon waveguide . The lower metal structure 5 is composed of two symmetrical parts, which are respectively located at two ends of the overall structure, and its components include a rectangular metal ground 51 , a trapezoidal metal ground transition structure 52 and a lower artificial surface plasmon transition structure 53 . The upper metal structure and the lower metal structure jointly constitute the conversion structure of the microstrip line and the miniaturized artificial surface plasmon waveguide of the double conductor. There is a cell-scale overlapping range between the lower metal structure and the middle traditional plasmonic waveguide on both sides, overlapping in the x-y plane, and separated by the second dielectric substrate in the z direction.
图1中所示,射频信号经过一端的由第一金属条带11和矩形金属地51组成的馈电结构被馈入带通滤波器,经过人工表面等离激元单元过渡段12和梯形金属地过渡结构 52以及下层人工表面等离激元过渡结构53转换为等离激元表面波,频率在带通频带范围内的信号将被传导到另一端,其它的射频信号将会被反射,因此实现有效的滤波效果。As shown in Fig. 1, the radio frequency signal is fed into the bandpass filter through the feeding structure composed of the first metal strip 11 and the rectangular metal ground 51 at one end, and passes through the artificial surface plasmon unit transition section 12 and the trapezoidal metal The ground transition structure 52 and the lower artificial surface plasmon transition structure 53 are converted into plasmon surface waves, and signals with frequencies within the bandpass frequency range will be transmitted to the other end, and other radio frequency signals will be reflected, so achieve an effective filtering effect.
其中各参数取值为:d=4.7mm,h1=1.2mm,h2=0.8mm,h3=0.4mm,h4=1mm, h5=0.7mm,h6=0.4mm,L1=8mm,L2=9.8mm,Wt=12.8mm。The value of each parameter is: d=4.7mm, h1=1.2mm, h2=0.8mm, h3=0.4mm, h4=1mm, h5=0.7mm, h6=0.4mm, L1=8mm, L2=9.8mm, Wt = 12.8 mm.
如图2所示,(a)图是本发明提出的微开槽人工表面等离激元单元结构,(b)图是全波仿真得到的相应表面电流分布。可以看到,单元表面的微开槽设计大大增加了电流的传导路径,因此形成显著的小型化效果。As shown in Figure 2, (a) is the micro-grooved artificial surface plasmon unit structure proposed by the present invention, and (b) is the corresponding surface current distribution obtained by full-wave simulation. It can be seen that the micro-groove design on the surface of the unit greatly increases the conduction path of the current, thus forming a significant miniaturization effect.
图2(a)中单元各参数取值为:a=2.8mm,p=4.7mm,H=5.2mm,h=1.6mm,wg=0.2mm,ts=0.762mm。The values of the parameters of the unit in Fig. 2(a) are: a=2.8mm, p=4.7mm, H=5.2mm, h=1.6mm, w g =0.2mm, ts=0.762mm.
如图3所示,对于本发明提出的小型化表面等离激元单元进行本征模仿真,其中横坐标表示传输频率,纵坐标表示色散,可以得到其色散曲线的截止频率为4.25GHz,对应的截止波长为66.7mm,如图中虚线所示;为了进行小型化效果的对比,如图3实线所示,此处同样给出了传统单层未开槽等离激元单元的色散曲线,其几何尺寸与本发明的小型化表面等离激元单元相同,其截止频率为17GHz,对应的截止波长为17.6mm。因此,就截止波长而言,所设计的双导体小型化人工表面等离激元波导的电尺寸缩小至传统结构的26%,小型化效果明显。As shown in Figure 3, the eigensimulation simulation is performed on the miniaturized surface plasmon unit proposed by the present invention, where the abscissa represents the transmission frequency, and the ordinate represents the dispersion, and the cutoff frequency of the dispersion curve can be obtained as 4.25 GHz, corresponding to The cutoff wavelength is 66.7mm, as shown by the dotted line in the figure; in order to compare the effect of miniaturization, as shown by the solid line in Figure 3, the dispersion curve of the traditional single-layer unslotted plasmonic unit is also given here , whose geometric dimensions are the same as those of the miniaturized surface plasmon unit of the present invention, its cut-off frequency is 17 GHz, and the corresponding cut-off wavelength is 17.6 mm. Therefore, in terms of cut-off wavelength, the electrical size of the designed dual-conductor miniaturized artificial surface plasmon waveguide is reduced to 26% of the traditional structure, and the miniaturization effect is obvious.
图4是小型化人工表面等离激元带通滤波器的S参数,其中横坐标表示传输频率,纵坐标表示幅值;图4说明,所设计的带通滤波器的3dB通带范围(S11<-10dB,S21>-3 dB)为0.23-4.25GHz,相对带宽高达180%,大大超越了传统带通滤波器的通带相对带宽,并且插损仅为0.1dB,凸显了此滤波器的高效传输性能。Fig. 4 is the S parameter of the miniaturized artificial surface plasmon bandpass filter, wherein the abscissa represents the transmission frequency, and the ordinate represents the amplitude; Fig. 4 illustrates that the 3dB passband range of the designed bandpass filter (S11 <-10dB, S21>-3 dB) is 0.23-4.25GHz, the relative bandwidth is as high as 180%, which greatly exceeds the relative bandwidth of the traditional bandpass filter, and the insertion loss is only 0.1dB, highlighting the filter's Efficient transmission performance.
图5是小型化人工表面等离激元带通滤波器的群延时数据,可以看到,在通带范围内,群延时范围为1-1.8ns。表明此滤波器具有良好的信号保真特性。Figure 5 shows the group delay data of the miniaturized artificial surface plasmon bandpass filter. It can be seen that within the passband range, the group delay ranges from 1 to 1.8 ns. It shows that this filter has good signal fidelity characteristics.
图6是制作的样品实物图,图中展示了滤波器的正面和背面照片。样品尺寸仅为11.2 cm2(0.07λ0 2),其中λ0是滤波器中心工作频率。图中给出1cm线段,通过比较直观证明了此设计的小型化效果。Figure 6 is a physical picture of the fabricated sample, which shows the front and back photos of the filter. The sample size is only 11.2 cm 2 (0.07λ 0 2 ), where λ 0 is the filter center operating frequency. The 1cm line segment is given in the figure, which proves the miniaturization effect of this design intuitively through comparison.
本发明的一种小型化超宽带表面等离激元带通滤波器。此滤波器为三层金属结构,并由两层介质基板隔开。上层金属结构为微开槽双侧锯齿状人工表面等离激元传输线,为了实现良好的匹配,锯齿高度被设计成由低到高。中层金属结构为一段锯齿高度相同的等离激元传输线,位置居中且长度短于上层传输线,并且锯齿状单元结构与上层结构位置一一对应。下层金属结构分为两段,形状相同,分别对称设计在滤波器整体结构两端。靠近两端为矩形金属地,其经由梯形转换结构过渡到一段截断等离激元传输线。上述下层截断等离激元传输线与中层结构之间存在一个单元尺寸的重合范围,形成容性耦合馈电效应,以此实现带通滤波器的低频抑制效果,滤波器的高频截止效应则由人工表面等离激元传输线的天然低通特性来实现。此设计可以将电尺寸缩小为传统人工表面等离激元结构的26%,并且首次将带通滤波器的相对工作带宽拓展到180%。A miniaturized ultra-wideband surface plasmon bandpass filter of the invention. The filter is a three-layer metal structure separated by two dielectric substrates. The upper metal structure is a micro-slotted double-sided serrated artificial surface plasmon transmission line. In order to achieve a good match, the sawtooth height is designed from low to high. The middle layer metal structure is a section of plasmon transmission line with the same sawtooth height, which is located in the center and shorter than the upper layer transmission line, and the zigzag unit structure corresponds to the position of the upper layer structure one by one. The lower metal structure is divided into two sections with the same shape, which are symmetrically designed at both ends of the overall structure of the filter. Near both ends is a rectangular metal ground, which transitions to a section of truncated plasmon transmission line through a trapezoidal conversion structure. There is an overlapping range of cell size between the lower cut-off plasmon transmission line and the middle structure, which forms a capacitive coupling feeding effect, so as to realize the low-frequency suppression effect of the band-pass filter, and the high-frequency cut-off effect of the filter is determined by The natural low-pass characteristic of the artificial surface plasmon transmission line is realized. This design can reduce the electrical size to 26% of the traditional artificial surface plasmon structure, and expand the relative operating bandwidth of the bandpass filter to 180% for the first time.
现有技术相比,本发明能够显著提高带通滤波器的通带带宽,并且大大减小人工表面等离激元波导的几何尺寸,有利于应用系统整体的小型化。另外本发明制造简单、操作方便、容易集成,只需要一步光刻过程,不仅节省造价,而且避免了复杂结构引发的加工误差。Compared with the prior art, the invention can significantly increase the passband bandwidth of the bandpass filter, and greatly reduce the geometric size of the artificial surface plasmon waveguide, which is beneficial to the overall miniaturization of the application system. In addition, the invention is simple to manufacture, convenient to operate, easy to integrate, and only needs one-step photolithography process, which not only saves the cost, but also avoids processing errors caused by complex structures.
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