CN110267493B - Flexible ultrathin liquid absorption core with hierarchical porous structure and manufacturing method thereof - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000007788 liquid Substances 0.000 title claims description 11
- 238000010521 absorption reaction Methods 0.000 title claims 6
- 239000011148 porous material Substances 0.000 claims abstract description 39
- 239000002250 absorbent Substances 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 16
- 239000002086 nanomaterial Substances 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 12
- 238000005245 sintering Methods 0.000 claims description 11
- 239000000835 fiber Substances 0.000 claims description 7
- 238000004070 electrodeposition Methods 0.000 claims description 6
- 230000002745 absorbent Effects 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 239000007790 solid phase Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000013354 porous framework Substances 0.000 claims 8
- 238000005260 corrosion Methods 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 238000003672 processing method Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 abstract description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
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- 239000002114 nanocomposite Substances 0.000 description 2
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- 230000035699 permeability Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
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Abstract
本发明涉及一种具有分级多孔结构的柔性超薄吸液芯,包括一级多孔骨架结构和二级微纳多孔结构;一级多孔骨架结构为柔性层,均布有一级孔隙,一级多孔骨架结构的厚度和一级孔隙的大小均为毫米级;二级微纳多孔结构均布有二级孔隙,二级微纳多孔结构的厚度为纳米级,二级孔隙的大小为微米级,或部分二级孔隙的大小为微米级、部分二级孔隙的大小为纳米级;二级微纳多孔结构附着在一级多孔骨架结构的表面;还包括三级纳米结构,三级纳米结构附着在一级多孔骨架结构和二级微纳多孔结构的表面。还涉及一种具有分级多孔结构的柔性超薄吸液芯的制造方法。本发明能够同时达到超薄、柔性和毛细性能强等散热需求,属于超薄热管技术领域。
The invention relates to a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure, which includes a first-level porous skeleton structure and a second-level micro-nano porous structure; the first-level porous skeleton structure is a flexible layer with first-level pores evenly distributed, and the first-level porous skeleton The thickness of the structure and the size of the primary pores are both on the millimeter level; the secondary micro-nano porous structure is evenly distributed with secondary pores, the thickness of the secondary micro-nano porous structure is on the nano level, and the size of the secondary pores is on the micron level, or partially The size of the secondary pores is on the micron scale, and some of the secondary pores are on the nanoscale; the secondary micro-nano porous structure is attached to the surface of the primary porous skeleton structure; it also includes tertiary nanostructures, which are attached to the primary porous skeleton structure. Porous skeleton structure and secondary micro-nano porous structure on the surface. It also relates to a method for manufacturing a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure. The invention can simultaneously meet the heat dissipation requirements of ultra-thinness, flexibility and strong capillary performance, and belongs to the technical field of ultra-thin heat pipes.
Description
技术领域Technical field
本发明涉及超薄热管技术领域,具体涉及一种具有分级多孔结构的柔性超薄吸液芯及其制造方法。The invention relates to the technical field of ultra-thin heat pipes, and in particular to a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure and a manufacturing method thereof.
背景技术Background technique
近年来,随着智能手机、智能手表和其他微电子器件的快速发展,其发热功率日益增长,而有效散热体积逐渐减小,电子芯片的散热问题日益严峻。超薄热管具有极高的热导率和超薄的厚度,是解决微电子器件散热难题的理想方案。作为超薄热管核心部件的吸液芯,决定了超薄热管的传热性能。现有超薄热管的吸液芯大多采用微沟槽结构或丝网结构,其毛细性能较差,难以满足日益增长的散热需求。此外,微电子器件的柔性化方向发展要求散热器件也具有较好的柔性。In recent years, with the rapid development of smart phones, smart watches and other microelectronic devices, their heating power has increased day by day, while the effective heat dissipation volume has gradually decreased, and the heat dissipation problem of electronic chips has become increasingly serious. Ultra-thin heat pipes have extremely high thermal conductivity and ultra-thin thickness, making them an ideal solution to solve the heat dissipation problem of microelectronic devices. As the core component of the ultra-thin heat pipe, the liquid-absorbing wick determines the heat transfer performance of the ultra-thin heat pipe. Most of the liquid absorbing cores of existing ultra-thin heat pipes adopt micro-groove structures or wire mesh structures, which have poor capillary performance and are difficult to meet the growing heat dissipation needs. In addition, the development of flexible microelectronic devices requires heat dissipation devices to also have good flexibility.
现有技术中不存在同时具备柔性好和毛细性能好的吸液芯。There is no liquid-absorbent core with both good flexibility and good capillary properties in the prior art.
发明内容Contents of the invention
针对现有技术中存在的技术问题,本发明的目的是:提供一种兼具柔性好和毛细性能好的具有分级多孔结构的柔性超薄吸液芯,同时提供了具有分级多孔结构的柔性超薄吸液芯的制造方法。In view of the technical problems existing in the prior art, the purpose of the present invention is to provide a flexible ultra-thin liquid-absorbent core with a graded porous structure that has both good flexibility and good capillary performance; Method of manufacturing thin absorbent wick.
为了达到上述目的,本发明采用如下技术方案:In order to achieve the above objects, the present invention adopts the following technical solutions:
一种具有分级多孔结构的柔性超薄吸液芯,包括一级多孔骨架结构和二级微纳多孔结构;一级多孔骨架结构为柔性层,均布有一级孔隙,一级多孔骨架结构的厚度和一级孔隙的大小均为毫米级;二级微纳多孔结构均布有二级孔隙,二级微纳多孔结构的厚度为纳米级,二级孔隙的大小为微米级,或部分二级孔隙的大小为微米级、部分二级孔隙的大小为纳米级;二级微纳多孔结构附着在一级多孔骨架结构的表面。此处所说的表面含一级多孔骨架结构的一级孔隙以内的表面和一级孔隙以外的表面。A flexible ultra-thin liquid-absorbent core with a hierarchical porous structure, including a first-level porous skeleton structure and a second-level micro-nano porous structure; the first-level porous skeleton structure is a flexible layer with evenly distributed first-level pores, and the thickness of the first-level porous skeleton structure and the size of the primary pores are all millimeter-scale; the secondary micro-nano-porous structure is evenly distributed with secondary pores, the thickness of the secondary micro-nano-porous structure is nanoscale, the size of the secondary pores is micron-scale, or some of the secondary pores The size of the secondary pores is on the micron scale, and the size of some of the secondary pores is on the nanoscale; the secondary micro-nano porous structure is attached to the surface of the primary porous skeleton structure. The surface mentioned here includes the surface within the primary pores of the primary porous skeleton structure and the surface outside the primary pores.
作为一种优选,一种具有分级多孔结构的柔性超薄吸液芯,还包括三级纳米结构;三级纳米结构均布有三级孔隙,三级孔隙的大小为纳米级;三级纳米结构附着在一级多孔骨架结构和二级微纳多孔结构的表面。此处所说的表面含一级多孔骨架结构的一级孔隙以内的表面和一级孔隙以外的表面,含二级微纳多孔结构的二级孔隙以内的表面和二级孔隙以外的表面。As a preference, a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure also includes a tertiary nanostructure; the tertiary nanostructure is evenly distributed with tertiary pores, and the size of the tertiary pores is nanoscale; the tertiary nanostructure Attached to the surface of the primary porous skeleton structure and the secondary micro-nano porous structure. The surface here refers to the surface within the first-level pores and the surface outside the first-level pores containing the first-level porous skeleton structure, and the surface within the second-level pores and the surface outside the second-level pores containing the second-level micro-nano porous structure.
作为一种优选,一级多孔骨架结构为网状,为金属丝网或者金属纤维烧结毡。As a preference, the primary porous skeleton structure is mesh-like, which is a metal mesh or a metal fiber sintered felt.
作为一种优选,二级微纳多孔结构仅附着在一级孔隙的内表面。As a preference, the secondary micro-nano porous structure is only attached to the inner surface of the primary pores.
作为一种优选,一级多孔骨架结构为纵横交错的网状结构。As a preference, the primary porous skeleton structure is a crisscross network structure.
作为一种优选,一种具有分级多孔结构的柔性超薄吸液芯,还包括沿着纵向或横向延伸的贯穿吸液芯的沟槽。Preferably, a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure further includes a groove extending longitudinally or transversely through the liquid-absorbent core.
作为一种优选,金属丝或金属纤维的直径为0.2-0.5mm,相邻两平行金属丝或金属纤维之间的距离为1-3mm;沟槽的两端距离一级多孔骨架结构的边缘为5-10mm;一级多孔骨架结构的厚度为0.05-0.15mm。As a preference, the diameter of the metal wire or metal fiber is 0.2-0.5mm, and the distance between two adjacent parallel metal wires or metal fibers is 1-3mm; the distance between the two ends of the groove and the edge of the primary porous skeleton structure is 5-10mm; the thickness of the first-level porous skeleton structure is 0.05-0.15mm.
一种具有分级多孔结构的柔性超薄吸液芯的制造方法,其特征在于:包括如下步骤:a.制作网状的一级多孔骨架结构;b.二级微纳多孔结构通过电化学沉积、固相烧结或物理溅射工艺附着在一级多孔骨架结构的一级孔隙的内表面,并通过烧结工艺将一级多孔骨架结构和二级微纳多孔结构固定在一起;c.采用物理喷涂、化学腐蚀或化学气象沉积工艺后,再通过烧结工艺制作三级纳米结构,制作的同时附着于一级多孔骨架结构和二级微纳多孔结构的表面。A method for manufacturing a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure, which is characterized by: including the following steps: a. Making a network-like primary porous skeleton structure; b. The secondary micro-nano porous structure is deposited through electrochemical deposition, The solid-phase sintering or physical sputtering process is attached to the inner surface of the first-level pores of the first-level porous skeleton structure, and the first-level porous skeleton structure and the second-level micro-nano porous structure are fixed together through the sintering process; c. Using physical spraying, After the chemical etching or chemical vapor deposition process, the third-level nanostructure is produced through the sintering process, which is simultaneously attached to the surface of the primary porous skeleton structure and the secondary micro-nano porous structure.
作为一种优选,步骤c后,通过激光加工方法去除吸液芯结构形成沟槽。Preferably, after step c, the liquid-absorbing wick structure is removed by laser processing to form a groove.
作为一种优选,步骤b和步骤c的烧结工艺为分步完成,或为在步骤c一次合并完成;步骤c后进行还原处理。As a preference, the sintering process of steps b and c is completed in steps, or is completed in one step in step c; a reduction treatment is performed after step c.
本发明的原理是:采用一级多孔骨架结构为基体,具有良好的柔性和力学性能;采用二级微纳多孔结构、三级纳米结构增强基体的毛细性能和力学性能。通过复合金属丝网骨架和微纳多孔结构,能够同时达到超薄、柔性和毛细性能强等散热需求。The principle of the invention is: using a first-level porous skeleton structure as the matrix, which has good flexibility and mechanical properties; using a second-level micro-nano porous structure and a third-level nanostructure to enhance the capillary properties and mechanical properties of the matrix. Through the composite metal mesh skeleton and micro-nano porous structure, it can simultaneously meet the heat dissipation requirements of ultra-thinness, flexibility and strong capillary performance.
本发明具有如下优点:The invention has the following advantages:
(1)通过在一级多孔骨架结构基体中生长微纳多孔结构,不仅增强了金属丝网、金属纤维烧结毡的毛细性能,而且可以保持多孔基体的柔性、厚度基本不变,是柔性超薄散热器件吸液芯的良好选择。(1) By growing micro-nano porous structures in the primary porous skeleton structure matrix, it not only enhances the capillary properties of the metal mesh and metal fiber sintered felt, but also keeps the flexibility and thickness of the porous matrix basically unchanged, making it a flexible and ultra-thin A good choice for wicks in heat dissipation devices.
(2)本发明的核心是在一级多孔骨架结构基体上生长较小尺度的微纳复合结构,可以根据基体材料的不同以及实际应用的需求,选取不同的微纳复合结构及吸液芯级数,具有良好的适用性。(2) The core of the present invention is to grow smaller-scale micro-nano composite structures on a primary porous skeleton structure matrix. Different micro-nano composite structures and liquid-absorbent core levels can be selected according to the different matrix materials and the needs of practical applications. numbers and has good applicability.
(3)本发明制作工艺简单,成本低廉,具有较好的柔韧性和毛细性能,能够满足超薄、柔性散热器件的使用需求。(3) The present invention has simple manufacturing process, low cost, good flexibility and capillary performance, and can meet the use requirements of ultra-thin and flexible heat dissipation devices.
(4)二级微纳多孔结构仅附着在一级孔隙的内表面,可不增加一级多孔骨架结构的厚度。(4) The secondary micro-nano porous structure is only attached to the inner surface of the primary pores and does not increase the thickness of the primary porous skeleton structure.
(5)采用沟槽结构,可增加液体工质回流的渗透率,提升吸液芯的性能。(5) The groove structure can increase the permeability of the liquid working medium backflow and improve the performance of the liquid-absorbing core.
附图说明Description of the drawings
图1是实施例一的具有分级多孔结构的柔性超薄吸液芯的结构示意图。Figure 1 is a schematic structural diagram of a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure according to Embodiment 1.
图2是实施例二的具有分级多孔结构的柔性超薄吸液芯的结构示意图。Figure 2 is a schematic structural diagram of a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure according to the second embodiment.
图3是实施例三的具有分级多孔结构的柔性超薄吸液芯的结构示意图。Figure 3 is a schematic structural diagram of a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure according to Embodiment 3.
其中,1为一级多孔骨架结构,2为二级微纳多孔结构,3为三级纳米结构,4为沟槽,11为一级孔隙,21为二级孔隙。Among them, 1 is the first-level porous skeleton structure, 2 is the second-level micro-nano porous structure, 3 is the third-level nanostructure, 4 is the groove, 11 is the first-level pore, and 21 is the second-level pore.
具体实施方式Detailed ways
下面将结合具体实施方式来对本发明做进一步详细的说明。The present invention will be described in further detail below in conjunction with specific embodiments.
实施例一Embodiment 1
一种具有分级多孔结构的柔性超薄吸液芯,包括一级多孔骨架结构、二级微纳多孔结构、三级纳米结构。A flexible ultra-thin liquid-absorbent core with a hierarchical porous structure, including a first-level porous skeleton structure, a second-level micro-nano porous structure, and a third-level nanostructure.
一级多孔骨架结构为300目的铜丝网结构,包括铜丝和铜丝之间形成的一级孔隙。铜丝直径是0.05mm,铜丝网的整体厚度约为0.08mm。The primary porous skeleton structure is a 300-mesh copper wire mesh structure, including primary pores formed between copper wires. The diameter of the copper wire is 0.05mm, and the overall thickness of the copper wire mesh is about 0.08mm.
二级微纳多孔结构通过恒电流电沉积法附着在一级孔隙的内表面,包括微纳尺度的铜颗粒和由相邻铜颗粒形成的不规则二级孔隙。本实施例的恒电流电沉积法采用两电极体系,铜丝网作为阴极,另一铜片作为阳极,两电极之间的距离为10mm,电解液采用0.4M的硫酸铜和1.5M的硫酸,电流密度采用1A/cm2,电沉积时间为40s。The secondary micro-nano porous structure is attached to the inner surface of the primary pores through galvanostatic electrodeposition, including micro-nano-scale copper particles and irregular secondary pores formed by adjacent copper particles. The galvanostatic electrodeposition method of this embodiment uses a two-electrode system, with a copper mesh as the cathode and another copper sheet as the anode. The distance between the two electrodes is 10mm. The electrolyte uses 0.4M copper sulfate and 1.5M sulfuric acid. The current density is 1A/cm 2 and the electrodeposition time is 40s.
电沉积完成后,将样品清洗干净,然后放入马弗炉中进行烧结工艺处理,烧结温度为350℃,在空气环境中保温1小时;烧结过程不仅可以在一级多孔骨架结构和二级微纳多孔结构之间形成牢固的烧结径,而且可以在一级多孔骨架结构和二级微纳多孔结构的表面形成三级纳米结构(三级氧化铜纳米线结构);最后对吸液芯进行还原处理,还原采用氢气气氛,将吸液芯在氢气气氛下加热至300℃,并保温1小时,随炉冷却后得到最终的具有三级多孔结构的柔性超薄吸液芯。After the electrodeposition is completed, the sample is cleaned and then placed in a muffle furnace for sintering process. The sintering temperature is 350°C and kept in an air environment for 1 hour. The sintering process can not only combine the first-level porous skeleton structure and the second-level microstructure. A strong sintered diameter is formed between the nanoporous structures, and a third-level nanostructure (third-level copper oxide nanowire structure) can be formed on the surface of the first-level porous skeleton structure and the second-level micro-nano-porous structure; finally, the liquid-absorbent core is reduced A hydrogen atmosphere is used for treatment and reduction. The liquid-absorbent core is heated to 300°C in a hydrogen atmosphere and kept warm for 1 hour. After cooling in the furnace, the final flexible ultra-thin liquid-absorbent core with a three-level porous structure is obtained.
实施例二Embodiment 2
本实施例在实施例一的基础上增加沟槽结构。This embodiment adds a trench structure based on Embodiment 1.
在吸液芯表面通过激光加工的方法去除掉宽度为0.3mm的吸液芯结构以形成相互平行的横向沟槽,相互平行的沟槽之间的间距为1.5mm;沟槽可以增加液体工质回流的渗透率,提升吸液芯的性能。The liquid-absorbing core structure with a width of 0.3mm is removed by laser processing on the surface of the liquid-absorbing core to form parallel transverse grooves. The spacing between parallel grooves is 1.5mm; the grooves can increase the amount of liquid working fluid. The permeability of backflow improves the performance of the absorbent core.
本实施例未提及部分同实施例一。The parts not mentioned in this embodiment are the same as those in Embodiment 1.
实施例三Embodiment 3
本实施例一种具有分级多孔结构的柔性超薄吸液芯,包括一级多孔骨架结构、二级微纳多孔结构。This embodiment is a flexible ultra-thin liquid-absorbent core with a hierarchical porous structure, including a primary porous skeleton structure and a secondary micro-nano porous structure.
一级多孔骨架结构和二级微纳多孔结构同实施例一。The primary porous skeleton structure and secondary micro-nano porous structure are the same as those in Embodiment 1.
上述实施例为本发明较佳的实施方式,但本发明的实施方式并不受上述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above embodiments. Any other changes, modifications, substitutions, combinations, etc. may be made without departing from the spirit and principles of the present invention. All simplifications should be equivalent substitutions, and are all included in the protection scope of the present invention.
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