CN110265330A - Inner tube adjusts device - Google Patents
Inner tube adjusts device Download PDFInfo
- Publication number
- CN110265330A CN110265330A CN201910526342.XA CN201910526342A CN110265330A CN 110265330 A CN110265330 A CN 110265330A CN 201910526342 A CN201910526342 A CN 201910526342A CN 110265330 A CN110265330 A CN 110265330A
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- Prior art keywords
- inner tube
- movement shaft
- support
- motor
- sliding rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 125000004122 cyclic group Chemical group 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Technical solution of the present invention discloses a kind of inner tube adjustment device, for adjusting the inner tube position of boiler tube board, comprising: flange；Set at least one set of sliding rail of the flange periphery, every group of sliding rail includes two sliding rails being oppositely arranged；The motor being movably disposed on the sliding rail；The movement shaft that one end is connect with the motor；The support ring being sheathed on outside said inner tube, the edge of the support ring are equipped with the support ear with the movement shaft linkage；And control the controller of the motor rotation.The position of inner tube can be adjusted at any time in the boiler tube course of work using the inner tube adjustment device of technical solution of the present invention, position of the operator without adjusting inner tube at high temperature, it is easy to operate, safety coefficient is high, and the manufacture efficiency for improving wafer of high degree, the uniformity for improving wafer, ensure that product yield.
Description
Technical field
The present invention relates to semi-conductor device technology fields more particularly to a kind of inner tube to adjust device.
Background technique
Boiler tube board is the important equipment of field of semiconductor manufacture, many to need high temperature ring in semiconductor fabrication
The technique in border is both needed to complete in boiler tube board, such as the processing technology of wafer.
And during processing wafer, inner tube easily shifts, and cause the reaction gas in boiler tube to be unevenly distributed, from
And the uniformity of wafer is influenced, reduce product yield, in some instances it may even be possible to lead to scrap of the product.
Currently, the mode for solving inner tube offset is still used and is manually adjusted.When adjustment, need boiler tube board being cooled to 400
DEG C, artificially adjust inner tube position with high temperature gloves, survey machine again, when deviating more serious, also need to do again plant maintenance with
It maintains (PM, preventive maintenance).The process of manually adjusting need to operate under high temperature environment, and safety coefficient is low, and
It is time-consuming, laborious.
Summary of the invention
Technical solution of the present invention technical problems to be solved are that the inner tube of existing boiler tube board easily shifts, and influence furnace
The uniformity of pipe processing technique.
In order to solve the above technical problems, technical solution of the present invention provides a kind of inner tube adjustment device, for adjusting boiler tube machine
The inner tube position of platform, comprising: flange；Set at least one set of sliding rail of the flange periphery, every group of sliding rail includes phase
To two sliding rails of setting；The motor being movably disposed on the sliding rail；The fortune that one end is connect with the motor
Moving axis bar；The support ring being sheathed on outside said inner tube, the edge of the support ring are equipped with the support with the movement shaft linkage
Ear；And control the controller of the motor rotation.
Optionally, the flange inner ring is equipped with inner tube platform, and the support ring is placed on said inner tube platform.
Optionally, two groups of sliding rails are distributed in the edge-perpendicular of the flange, and two cunnings in every group of sliding rail
The inner circle center of circle of the line of centres in dynamic rail road through the flange.
Optionally, the other end of the movement shaft is detachably connected with the support ear.
Optionally, the support ear is equipped with the connecting hole penetrated for the movement shaft, and the movement shaft is parallel to institute
State support ring.
Optionally, the movement shaft is threadedly coupled with the connecting hole.
Optionally, inner tube adjustment device further includes locating rod, and one end of the locating rod and the support ear can
Dismantling connection, the other end are the cyclic structure passed through for the movement shaft, and the locating rod is perpendicular to where the support ring
Plane.
Optionally, the support ear is equipped with the location hole penetrated for the locating rod.
Optionally, one end of the locating rod is equipped with the support portion for supporting the support ear.
Optionally, the movement shaft is threadedly coupled with the cyclic structure.
Compared with prior art, technical solution of the present invention has the advantages that
Sliding rail is arranged at the edge of flange in technical solution of the present invention, and motor, the movement of motor is arranged on sliding rail
The support ear of shaft and support ring edge is connected, and the positive and negative rotation of motor is controlled by controller, drives support ring to be arranged interior
Pipe is mobile, and the position of inner tube is adjusted with this, realizes the adjustment to inner tube, therefore need not manually be adjusted to inner tube at high temperature
Whole, adjustment process is simple, easy to operate, and safety coefficient is high.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of boiler tube board；
Fig. 2 is a kind of top view of interior pipe mounting structure；
Fig. 3 is that the inner tube of the embodiment of the present invention adjusts the overlooking structure diagram of device；
Fig. 4 is that inner tube shown in Fig. 3 adjusts the attachment structure schematic diagram that shaft and support ear are moved in device；
Fig. 5 is that the inner tube of another embodiment of the present invention adjusts the overlooking structure diagram of device；
Fig. 6 is that inner tube shown in fig. 5 adjusts the attachment structure schematic diagram that shaft, locating rod and support ear are moved in device.
Specific embodiment
As shown in Figure 1, boiler tube board includes heater 1, is successively arranged outer tube (outer from outside to inside in heater 1
Tube) 2, inner tube (inner tube) 3 and cassette (boat) 4, cassette 4 is for carrying the device that wafer etc. need to be heat-treated.
Referring to figs. 1 and 2, the bottom position of outer tube 2 is equipped with flange (flange) 5, and the inner ring of flange 5 is equipped with inner tube
Platform 6, inner tube 3 are fixed in support ring (supporting ring) 7, and support ring 7 is placed on inner tube platform 6, is not had on inner tube platform 6
There are any limiting device and fixed device, therefore, the position of inner tube 3 easily deviates.
The reason of causing inner tube 3 to deviate, has very much, mainly there is following two aspect: on the one hand, carrying out PM to boiler tube board
When, the position of inner tube 3 can be had an impact；On the other hand, the vibration that boiler tube board generates at work also results in inner tube 3
Offset.And the reaction gas that the offset of inner tube 3 will result directly in boiler tube is unevenly distributed, to influence the uniformity of wafer, is dropped
Low product yield, in some instances it may even be possible to lead to scrap of the product.
In order to overcome drawbacks described above, inventor is studied, and proposes that sliding rail, sliding is arranged at the edge of flange
Motor is set on track, and the support ear of the movement shaft linkage support ring of motor controls the positive and negative rotation of motor, band by controller
Dynamic inner tube is mobile, realizes the adjustment to inner tube.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
Referring to figure 3., the inner tube adjustment device of the embodiment of the present invention is used to adjust the position of the inner tube 10 of boiler tube board, main
It include: flange 11, sliding rail, motor, movement shaft, support ring 13 and controller.
Wherein, the edge of flange 11 is equipped at least one set of sliding rail, and every group of sliding rail includes two be oppositely arranged
Sliding rail.The present embodiment is by taking two groups of sliding rails as an example, as shown in figure 3, one group of sliding rail includes the sliding being oppositely arranged
Track 111a1 and sliding rail 111a2, another group of sliding rail include the sliding rail 111b1 and sliding rail being oppositely arranged
111b2。
Further, in order to more easily adjust the position of inner tube, two groups of sliding rails are vertical distribution, and are located at same
The line of centres of two sliding rails of group is through the inner circle center of circle O of flange 11.Fig. 3 is shown in which a kind of feelings of vertical distribution
Condition, the i.e. line of centres of sliding rail 111a1 and sliding rail 111a2 are located in x-axis, sliding rail 111b1 and sliding rail
The line of centres of 111b2 is located in y-axis, and the center of circle O of 11 inner circle of flange is xy coordinate origin.Two groups of sliding rails are vertical
Distribution, can be adjusted inner tube in coordinate system range.
Corresponding each sliding rail, is movably equipped with motor, motor can be respectively along the sliding rail at respective place
It is mobile, one end connection motor for moving shaft (forward or reverse) can also be rotated with relative sliding track.Motor is in sliding rail
On set-up mode use existing design, as long as can be realized to motor on sliding rail slidably.
Specifically, as shown in figure 3, sliding rail 111a1 is equipped with motor 12a, sliding rail 111a2 is equipped with motor
12b, sliding rail 111b1 are equipped with motor 12c, and sliding rail 111b2 is equipped with motor 12d.Move one end of shaft 121a
Motor 12a is connected, one end of movement shaft 121b connects motor 12b, and one end of movement shaft 121c connects motor 12c, movement
One end of shaft 121d connects motor 12d.
It is arranged with support ring 13 outside inner tube 10, relatively fixed between inner tube 10 and support ring 13, the edge of support ring 13 is set
There is support ear, support ear and support ring 13 can be integrated molding, can also be connected with each other, after being put into boiler tube board, inner tube
10, support ring 13 and support ear three belong to an entirety, one of component movement, and remaining part moves therewith.
The quantity of support ear can determines according to actual conditions, and the inner ring of flange 11 is equipped with inner tube platform 112, will when installation
The support ear of support ring 13 is placed on inner tube platform 112.The quantity of support ear is more, and inner tube 10 can more stably be put in inner tube
Platform 112, but the quantity of support ear should not be excessive, is easy to cause modular construction complicated, bad assembly.In the embodiment of the present invention
In, the quantity of support ear is equal with the quantity of sliding rail, motor, the other end and support ear of the movement shaft connecting with motor
It is detachably connected.
Specifically, Fig. 3 shows 4 equally distributed support ears, respectively support ear 131A, support ear 131B, support
Ear 131C and support ear 131D.After inner tube 10 is put into boiler tube board, each support ear is opposite after connecting with accordingly movement shaft
Fixed, so that support ear 131A is connected with movement shaft 121a, support ear 131B is connected with movement shaft 121b, support ear
131C is connected with movement shaft 121c, and support ear 131D is connected with movement shaft 121d.
After movement shaft is connect with support ear, movement shaft is parallel to the plane (i.e. top plan view) where support ring.
When adjusting 10 position of inner tube, if wanting that inner tube 10 is allowed to generate displacement in the direction x, motor 12a, the 12b that need to only control the direction x are rotated forward
Or reversion is mobile in the direction x to drive movement shaft 121a, 121b, and motor 12c, the 12d in the direction y do not turn；Due to sliding rail
The rotation of the presence of road 111b1,111b2, motor 12a, 12b in x-axis will drive motor 12c, 12d in y-axis where it
Sliding rail 111b1,111b2 on move, to realize adjustment to inner tube position in the direction x.Similarly, if wanting to allow inner tube
10 generate displacement in the direction y, and motor 12c, the 12d that need to only control the direction y move shaft 121c, 121d forward or reverse to drive
It is mobile in the direction y, and motor 12a, the 12b in the direction x do not turn；Horse due to the presence of sliding rail 111a1,111a2, in y-axis
Rotation up to 12c, 12d will drive motor 12a, 12b in x-axis and move on sliding rail 111a1,111a2 where it, from
And realize the adjustment to inner tube position in the direction y.
The controller of the embodiment of the present invention can use existing control equipment, for controlling the rotation of motor.Controller
Control parameter configured according to actual needs, such as whether motor rotates, the rotation direction of motor, turnning circle, motor
Revolving speed etc..Controller can be connect with motor using signal, can also be connected for line.It, can be to controller in practical operation
Input coordinate, controller can automatically analyze out the direction which motor needs to rotate and motor rotates and circle number.
It please refers to support ear shown in Fig. 4 and moves the connection structure side view of shaft, in the present embodiment, support ear 131
It may include the outwardly extending first supporting element 131a (part that Fig. 3 can see) of self-supporting ring 13 and from the first supporting element
The second supporting element 131b, the first supporting element 131a and the second supporting element 131b that 131a is extended downwardly can be integrated molding, example
Such as a board-like material downward bending, it is also possible to two components and is connected with each other.
Second supporting element 131b is equipped with the connecting hole 15 penetrated for movement shaft 121.The other end of movement shaft 121 is set
Have an interconnecting piece 122, interconnecting piece 122 has external screw thread (not shown), and connecting hole 15 is equipped with internal screw thread, movement shaft 121 with connect
Hole 15 is connected through a screw thread and relatively fixed.After movement shaft 121 is connect with support ear 131, movement shaft 121 is parallel to branch
Plane (top plan view i.e. shown in Fig. 3) where pushing out ring 13.When the removable motor 12 on sliding rail 111 rotates band
When dynamic movement shaft 121 moves, movement shaft 121 will drive the movement of support ear 131.
In other embodiments, can also not need the second supporting element 131b, the first supporting element 131a has certain thickness, can
Movement shaft 121 is connect with the first supporting element 131a with direct.In addition, the detachable connection method of movement shaft and support ear
It is not limited to threaded connection described in the present embodiment, is also possible to other achievable structures such as rivet, snap connection.
Incorporated by reference to shown in Fig. 5 and Fig. 6, in an alternative embodiment of the invention, movement shaft 121 and support ear 131 are by determining
Position bar 16 is indirectly connected.One end of locating rod 16 is detachably connected with support ear 131, and the other end is to pass through for movement shaft 121
Cyclic structure 162.The movement shaft of embodiment illustrated in fig. 5 and the linkage structure of support ear are different from shown in Fig. 3, in detail below
Illustrate, and other structures are identical, details are not described herein.
Support ear 131 is equipped with the location hole 17 penetrated for locating rod 16, and in conjunction with Fig. 5 and Fig. 6, one end of locating rod 16 has
Have external screw thread (not shown), location hole 17 is equipped with internal screw thread, and locating rod 16 is connected through a screw thread and relatively fixed with location hole 17.
After locating rod 16 is connect with support ear 131, locating rod 16 is perpendicular to the plane (vertical view i.e. shown in fig. 5 where support ring 13
Plane).
In the present embodiment, one end of locating rod 16 is also provided with the support portion 161 for supporting the support ear 131, knot
Structure can be self-positioning bar 16 and extend protrusion to two sides.Assembly when, locating rod 16 penetrate location hole 17 until support portion 161 with
Support ear 131 is contacted and is bonded, and the effect of support portion 161 is identical as the effect of inner tube platform 112, can play support to support ear 13
Effect.Locating rod 16 and the connection of support ear 131 are simultaneously relatively fixed, enable support ear 131 that locating rod 16 is followed to move.
In the present embodiment, the cyclic structure 162 of 16 other end of locating rod has internal screw thread, moves the other end of shaft 121
It can be equipped with interconnecting piece 122, interconnecting piece 122 has external screw thread, and interconnecting piece 122 is connected through a screw thread with cyclic structure 162, works as fortune
After moving axis bar 121 is connect with cyclic structure 162, shaft 121 is moved perpendicular to locating rod 17, and is parallel to 13 place of support ring
Plane.When moving the movement of shaft 121, the movement of locating rod 16 will drive, which is similar to screw (interconnecting piece 122) and spiral shell
Female (cyclic structure) drives the movement of nut when screw is fixed on a position and rotates.
The inner tube adjustment device of above-described embodiment is slightly different on linkage structure, but adjusts the basic phase of principle of inner tube
Together, the adjusting range of inner tube is inner tube in the moveable range of flange inner ring, adjust process approximately as:
Referring to figure 5., using the center O of flange as coordinate origin (0,0), when not starting adjustment, in support ring 13
The heart (center of inner tube 10 in other words) is overlapped with coordinate origin.
Assuming that the center by support ring 13 is needed to be moved to (1,1), then can input coordinate (1,1) in the controller, control
Device processed analyzes the direction that each motor 12 needs to rotate and circle number, and controls each motor 12 and act by one of the following two kinds mode:
Mode one, y-axis direction motor 12 do not rotate, and x-axis direction motor 12 rotates, until the center of support ring 13 is moved to
(1,0) position；Then, x-axis direction motor 12 does not rotate, and the center that y-axis direction motor 12 rotates up to support ring 13 is moved to
(1,1) position.
Mode two, x-axis direction motor 12 do not rotate, and y-axis direction motor 12 rotates, until the center of support ring 13 is moved to
(0,1) position；Then, y-axis direction motor 12 does not rotate, and the center that x-axis direction motor 12 rotates up to support ring 13 is moved to
(1,1) position.
It should be noted that the present embodiment is to carry out control explanation by taking input coordinate as an example, but be not limited thereto, at it
In his embodiment, in the case where no coordinate system, the rotation direction and circle number of motor, or input phase can also be directly inputted
Motor rotation direction and circle number etc. are calculated by controller again to the displacement of the movement shaft of the motor connection of setting.
In conclusion the inner tube adjustment device using technical solution of the present invention can adjust at any time in the boiler tube course of work
The position of inner tube, position of the operator without adjusting inner tube at high temperature is easy to operate, safety coefficient is high, and high degree
The manufacture efficiency for improving wafer improves the uniformity of wafer, ensure that product yield.
Although the present invention discloses as above in a preferred embodiment thereof, it is not for limiting the present invention, any ability
Field technique personnel without departing from the spirit and scope of the present invention, may be by the methods and technical content of the disclosure above to this
Inventive technique scheme makes possible variation and modification, therefore, anything that does not depart from the technical scheme of the invention, according to this hair
Bright technical spirit belongs to the technology of the present invention to any simple modifications, equivalents, and modifications made by embodiment of above
The protection scope of scheme.
Claims (10)
1. a kind of inner tube adjusts device, for adjusting the inner tube position of boiler tube board characterized by comprising
Flange；
Set at least one set of sliding rail of the flange periphery, every group of sliding rail includes two sliding rails being oppositely arranged
Road；
The motor being movably disposed on the sliding rail；
The movement shaft that one end is connect with the motor；
The support ring being sheathed on outside said inner tube, the edge of the support ring are equipped with the support ear with the movement shaft linkage；
And
Control the controller of the motor rotation.
2. inner tube as described in claim 1 adjusts device, which is characterized in that the flange inner ring is equipped with inner tube platform, the branch
Pushing out ring is placed on said inner tube platform.
3. inner tube as described in claim 1 adjusts device, which is characterized in that two groups of cunnings are distributed in the edge-perpendicular of the flange
Dynamic rail road, and the inner circle center of circle of the line of centres of two sliding rails in every group of sliding rail through the flange.
4. inner tube as described in claim 1 adjusts device, which is characterized in that the other end of the movement shaft and the support
Ear is detachably connected.
5. inner tube as claimed in claim 4 adjusts device, which is characterized in that the support ear is equipped with to be worn for the movement shaft
The connecting hole entered, the movement shaft are parallel to the plane where the support ring.
6. inner tube as claimed in claim 5 adjusts device, which is characterized in that the movement shaft and the connecting hole screw thread connect
It connects.
7. inner tube as described in claim 1 adjusts device, which is characterized in that it further include locating rod, one end of the locating rod
Be detachably connected with the support ear, the other end be for the cyclic structure that passes through of movement shaft, the locating rod perpendicular to
Plane where the support ring.
8. inner tube as claimed in claim 7 adjusts device, which is characterized in that the support ear is equipped with to be penetrated for the locating rod
Location hole.
9. inner tube as claimed in claim 7 or 8 adjusts device, which is characterized in that one end of the locating rod is equipped with support institute
State the support portion of support ear.
10. inner tube as claimed in claim 7 adjusts device, which is characterized in that the movement shaft and the cyclic structure spiral shell
Line connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910526342.XA CN110265330B (en) | 2019-06-18 | 2019-06-18 | Inner pipe adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910526342.XA CN110265330B (en) | 2019-06-18 | 2019-06-18 | Inner pipe adjusting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110265330A true CN110265330A (en) | 2019-09-20 |
| CN110265330B CN110265330B (en) | 2020-12-18 |
Family
ID=67918980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910526342.XA Active CN110265330B (en) | 2019-06-18 | 2019-06-18 | Inner pipe adjusting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110265330B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6168427B1 (en) * | 1999-10-05 | 2001-01-02 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
| US6538237B1 (en) * | 2002-01-08 | 2003-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for holding a quartz furnace |
| US20090197409A1 (en) * | 2008-02-01 | 2009-08-06 | Hitachi-Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
| KR20100073571A (en) * | 2008-12-23 | 2010-07-01 | 주식회사 동부하이텍 | Vertical diffusion furnace for manufacturing semiconductor |
| CN105552006A (en) * | 2016-01-28 | 2016-05-04 | 北京七星华创电子股份有限公司 | Vertical heat treatment device |
| CN108695138A (en) * | 2017-03-29 | 2018-10-23 | 株式会社日立国际电气 | The manufacturing method of substrate support, substrate processing device and semiconductor devices |
| CN208674076U (en) * | 2018-08-07 | 2019-03-29 | 德淮半导体有限公司 | Cassette pedestal and furnace tube apparatus |
-
2019
- 2019-06-18 CN CN201910526342.XA patent/CN110265330B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6168427B1 (en) * | 1999-10-05 | 2001-01-02 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
| US6538237B1 (en) * | 2002-01-08 | 2003-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for holding a quartz furnace |
| US20090197409A1 (en) * | 2008-02-01 | 2009-08-06 | Hitachi-Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
| KR20100073571A (en) * | 2008-12-23 | 2010-07-01 | 주식회사 동부하이텍 | Vertical diffusion furnace for manufacturing semiconductor |
| CN105552006A (en) * | 2016-01-28 | 2016-05-04 | 北京七星华创电子股份有限公司 | Vertical heat treatment device |
| CN108695138A (en) * | 2017-03-29 | 2018-10-23 | 株式会社日立国际电气 | The manufacturing method of substrate support, substrate processing device and semiconductor devices |
| CN208674076U (en) * | 2018-08-07 | 2019-03-29 | 德淮半导体有限公司 | Cassette pedestal and furnace tube apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110265330B (en) | 2020-12-18 |
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Effective date of registration: 20221228 Address after: 223001 Room 318, Building 6, east of Zhenda Steel Pipe Company, south of Qianjiang Road, Huaiyin District, Huai'an City, Jiangsu Province Patentee after: Huaian Xide Industrial Design Co.,Ltd. Address before: 223300 no.599, East Changjiang Road, Huaiyin District, Huai'an City, Jiangsu Province Patentee before: HUAIAN IMAGING DEVICE MANUFACTURER Corp. |
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Application publication date: 20190920 Assignee: Nanjing Jinbaichuang Technology Co.,Ltd. Assignor: Huaian Xide Industrial Design Co.,Ltd. Contract record no.: X2023980035482 Denomination of invention: Inner tube adjustment device Granted publication date: 20201218 License type: Common License Record date: 20230516 |
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