CN110260893A - A kind of preparation method of condenser type flexible sensor - Google Patents

Abstract

The invention discloses a preparation method of a capacitive flexible sensor, comprising: bonding two composite sheets together to obtain a capacitive flexible sensor, and the preparation process of the composite sheet includes: bonding a film used to prepare graphene on a substrate On the surface, a graphene electrode pattern is printed on the film using a laser direct writing process; an encapsulation layer is provided on the surface of the graphene electrode pattern, and the graphene electrode pattern with the encapsulation layer is peeled off from the substrate; on the graphene electrode pattern An isolation layer is set, and the end of the graphene electrode pattern is connected with a wire to obtain a composite sheet. The above-mentioned technical scheme disclosed in this application uses the laser direct writing process to print graphene electrode patterns on the film to reduce the complexity of graphene electrode pattern preparation, improve preparation efficiency, and reduce preparation costs, thereby shortening the preparation of capacitive flexible sensors. cycle, improve the preparation efficiency of the capacitive flexible sensor, and reduce the preparation cost of the capacitive flexible sensor.

Description

A kind of preparation method of capacitive flexible sensor

technical field

The invention relates to the technical field of flexible sensing equipment, and more specifically, relates to a preparation method of a capacitive flexible sensor.

Background technique

With the development of science and technology, miniaturized, high-sensitivity, wearable flexible sensing devices have gradually become the focus of people's attention and research, and sensors, as one of the core components of sensing devices, have an extremely important role in the function and development of flexible sensing devices. important influence. Among them, capacitive flexible sensors are widely used in wearable flexible sensing devices as one of the flexible sensors.

At present, capacitive flexible sensors often use graphene, which is thin and transparent, with excellent electrical and thermal conductivity and mechanical properties, as electrodes. Graphene with a certain shape is prepared by mechanical exfoliation, chemical vapor deposition, and epitaxial growth, and then the prepared graphene is processed (specifically, it can include photolithography and etching, etc.) to construct a graphene layer with an electrode pattern , after that, the capacitive flexible sensor is prepared by utilizing the graphene layer with electrode patterns. However, in the above-mentioned preparation process, since it is necessary to prepare graphene in powder or other forms first, and then construct the electrode pattern, the electrode preparation process is cumbersome, complicated, and inefficient, which will eventually lead to capacitive flexible sensors. The preparation period is relatively long, and the preparation efficiency is relatively low. In addition, due to the need to use various equipment (for example: equipment related to the preparation of graphene of a certain shape, equipment related to the preparation of electrode patterns, etc.) to complete the production of the above-mentioned electrode pattern, and because the preparation process is relatively cumbersome and complicated, therefore, It will lead to a relatively high preparation cost of the capacitive flexible sensor.

To sum up, how to shorten the preparation cycle of the capacitive flexible sensor, improve the preparation efficiency of the capacitive flexible sensor, and reduce the preparation cost of the capacitive flexible sensor is a technical problem to be solved urgently by those skilled in the art.

Contents of the invention

In view of this, the object of the present invention is to provide a method for preparing a capacitive flexible sensor, so as to shorten the preparation cycle of the capacitive flexible sensor, improve the preparation efficiency of the capacitive flexible sensor, and reduce the preparation cost of the capacitive flexible sensor.

In order to achieve the above object, the present invention provides the following technical solutions:

A method for preparing a capacitive flexible sensor, comprising:

Bonding two composite sheets together to obtain a capacitive flexible sensor, wherein the preparation process of the composite sheet includes:

Paste the film used to prepare graphene on the surface of the substrate, and use the laser direct writing process to print the graphene electrode pattern on the film;

An encapsulation layer is provided on the surface of the graphene electrode pattern, and the graphene electrode pattern with the encapsulation layer is peeled off from the substrate;

An isolation layer is provided on the side of the graphene electrode pattern in contact with the substrate, and the end of the graphene electrode pattern is connected to a wire to obtain the composite sheet.

Preferably, an isolation layer is set on the side where the graphene electrode pattern is in contact with the substrate, comprising:

A polymer fiber layer is arranged on the side of the graphene electrode pattern in contact with the substrate.

Preferably, before the polymer fiber layer is set on the side of the graphene electrode pattern in contact with the substrate, it also includes:

The high molecular polymer fiber layer is prepared on a conductive glass substrate by using a near-field electrospinning direct writing process;

The high molecular polymer fiber layer is peeled off from the conductive glass substrate.

Preferably, a polymer fiber layer is prepared on a conductive glass substrate using a near-field electrospinning direct-writing process, including:

A grid-structured polymer fiber layer was prepared on a conductive glass substrate by using a near-field electrospinning direct-writing process.

Preferably, an encapsulation layer is set on the surface of the graphene electrode pattern, comprising:

Mix PDMS and curing agent together to obtain a mixture;

The mixture is poured on the substrate and cured to obtain a PDMS encapsulation layer arranged on the surface of the graphene electrode pattern.

Preferably, the end of the graphene electrode pattern is connected to a wire, including:

Connect the ends of the graphene electrode patterns to the wires with conductive glue.

Preferably, the two composite sheets are bonded together, including:

Coating a mixture obtained by mixing PDMS and a curing agent around at least one of the composite sheets;

The two composite sheets are pasted together by the mixture and cured so that the two composite sheets are bonded together.

Preferably, after bonding the two composite sheets together to obtain the capacitive flexible sensor, it also includes:

The capacitive flexible sensor is connected with a measuring meter, and the capacitive flexible sensor is measured by using the measuring meter.

The invention provides a method for preparing a capacitive flexible sensor, comprising: bonding two composite sheets together to obtain a capacitive flexible sensor, wherein the preparation process of the composite sheet includes: preparing a thin film for graphene Bonding on the surface of the substrate, and using the laser direct writing process to print the graphene electrode pattern on the film; setting an encapsulation layer on the surface of the graphene electrode pattern, and peeling off the graphene electrode pattern with the encapsulation layer from the substrate; An isolation layer is arranged on the side where the graphene electrode pattern is in contact with the substrate, and the end of the graphene electrode pattern is connected with a wire to obtain a composite sheet.

The above-mentioned technical scheme disclosed in the present application directly uses the laser direct writing process to print the graphene electrode pattern on the film used to prepare graphene, and arranges an encapsulation layer on the surface of the graphene electrode pattern, and arranges an isolation layer on the other surface. layer to obtain a composite sheet, and then, the end of the graphene electrode pattern is connected with a wire, and the two composite sheets are bonded together to obtain a capacitive flexible sensor. Since the thin film used to prepare graphene can be directly used to obtain the graphene electrode pattern through the laser direct writing process without first converting it into a certain form of graphene, and then processing the certain form of graphene to obtain the electrode pattern, Therefore, it is possible to reduce the cumbersome degree of graphene electrode pattern preparation, improve the preparation efficiency of graphene electrode pattern, reduce the preparation cost of graphene electrode pattern, thereby can shorten the preparation period of capacitive flexible sensor, improve the preparation of capacitive flexible sensor efficiency and reduce the fabrication cost of capacitive flexible sensors.

Description of drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention, and those skilled in the art can also obtain other drawings according to the provided drawings on the premise of not paying creative efforts.

Fig. 1 is the flowchart of the preparation method of a kind of capacitive flexible sensor provided by the embodiment of the present invention;

Fig. 2 is the schematic diagram that utilizes laser direct writing process to prepare graphene electrode pattern that the embodiment of the present invention provides;

3 is a schematic diagram of a capacitive flexible sensor provided by an embodiment of the present invention;

Fig. 4 is a schematic diagram of preparing a polymer fiber layer by using a near-field electrospinning direct-writing process provided by an embodiment of the present invention;

Fig. 5 is a schematic structural diagram of a composite sheet provided by an embodiment of the present invention.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Referring to Fig. 1, it shows a flowchart of a method for preparing a capacitive flexible sensor provided by an embodiment of the present invention, which may include:

S11: Paste the film used to prepare graphene on the surface of the substrate, and use the laser direct writing process to print graphene electrode patterns on the film.

After the substrate is cleaned, the film used to prepare graphene is pasted on the surface of the substrate, wherein the film used to prepare graphene can specifically be a polyimide film or other materials that can become graphene under laser ablation. film.

Then, according to the requirements of the electrode pattern of the capacitive flexible sensor to be prepared, the laser direct writing process can be used to process the film pasted on the substrate to print out the graphene electrode pattern. 2 for details, which shows a schematic diagram of a graphene electrode pattern prepared by a laser direct writing process provided by an embodiment of the present invention, and a laser 1 is used to process a substrate 2 pasted with a thin film for preparing graphene to print out Graphene electrode pattern 3. Among them, the basic principle of the laser direct writing process is: use a laser beam with variable intensity to ablate a specific carbon material (here, the thin film used to prepare graphene) to turn the carbon material into carbon plasma, And by changing the surrounding environment when the carbon plasma is cooled, the planar deposition of carbon atoms is realized, thereby preparing graphene, and when the laser beam is used for ablation and the surrounding environment is changed when the carbon plasma is cooled, the The ablation and cooling conditions are controlled to obtain graphene with a certain pattern shape.

It can be seen that the film used to prepare graphene can be directly converted into a graphene electrode pattern by using the laser direct writing process, without first preparing a certain form of graphene through redox method, mechanical exfoliation, chemical vapor deposition, epitaxial growth and other processes. Graphene, and then, the prepared graphene of a certain form is processed to obtain a graphene layer with an electrode pattern, therefore, the cumbersome degree of graphene electrode pattern preparation can be reduced, and the preparation efficiency of the graphene electrode pattern can be improved. And can reduce the equipment needed for graphene electrode pattern preparation, reduce the preparation cost of graphene electrode pattern, thereby can shorten the preparation cycle of capacitive flexible sensor, improve the preparation efficiency of capacitive flexible sensor, reduce the preparation of capacitive flexible sensor cost.

S12: setting an encapsulation layer on the surface of the graphene electrode pattern, and peeling off the graphene electrode pattern with the encapsulation layer from the substrate.

After the graphene electrode pattern is obtained, an encapsulation layer can be provided on the surface of the graphene electrode pattern, so that the encapsulation layer can encapsulate and protect the graphene electrode pattern and the capacitive flexible sensor.

After the encapsulation layer is set, the graphene electrode pattern with the encapsulation layer can be peeled off from the substrate by mechanical peeling or the like, so as to transfer the encapsulation layer with the graphene electrode pattern.

S13: setting an isolation layer on the side where the graphene electrode pattern is in contact with the substrate to obtain a composite sheet.

After the graphene electrode pattern with the encapsulation layer is peeled off from the substrate, an isolation layer can be provided on the side where the graphene electrode pattern contacts the substrate, that is, an isolation layer is provided on the side opposite to the encapsulation layer to obtain a composite sheet . Wherein, the isolation layer is used to support and isolate the upper electrode layer and the lower electrode layer.

S14: Connect the end of the graphene electrode pattern with a wire, and bond the two composite sheets together to obtain a capacitive flexible sensor.

After obtaining the composite sheet, the end of the graphene electrode pattern can be connected to the wire, so that the graphene electrode pattern can be connected to the external circuit by the wire, that is, the wire can be used as a terminal for the capacitive flexible sensor to be connected to the external circuit, thereby realizing Normal measurement for capacitive flexible sensors.

After the leads are drawn out, the two composite sheets can be glued together to obtain a capacitive flexible sensor. Specifically, when bonding, an adhesive can be coated around the isolation layers in one or two composite sheets, so that the isolation layers in the two composite sheets can be bonded together by the adhesive, thereby obtaining a package. Layer/graphene electrode pattern/isolation layer/graphene electrode pattern/encapsulation layer structure, that is, the capacitive flexible sensor is finally obtained.

For details, please refer to FIG. 3 , which shows a schematic diagram of the capacitive flexible sensor provided by the embodiment of the present invention, wherein the encapsulation layer 4 on the top layer and the encapsulation layer 4 on the bottom layer are used to package and protect the capacitive flexible sensor. Function, the graphene electrode pattern 3 located on the lower surface of the top packaging layer 4 and the graphene electrode pattern 3 located on the upper surface of the bottom packaging layer 4 are respectively used as the upper electrode layer and the lower electrode layer, and the graphene electrode pattern 3 located between the two layers of graphite electrode patterns 3 The isolation layer 5 is used to support and isolate the two layers of graphene electrode patterns 3 to prevent contact between the two layers of graphene electrode patterns 3, thereby improving the reliability of the capacitive flexible sensor.

As can be seen from the above, in the preparation process of the capacitive flexible sensor, since the graphene electrode pattern can be prepared directly by using the laser direct writing process, and after the graphene electrode pattern is prepared, the encapsulation layer can be directly arranged on the surface of the graphene electrode pattern , and after peeling off, an isolation layer can be directly set on the other surface of the graphene electrode pattern, and after the graphene electrode pattern is connected to the wire, two identical composite sheets can be bonded together directly to obtain a capacitive The flexible sensor, therefore, makes the preparation process of the capacitive flexible sensor relatively simple and convenient, and can shorten the preparation cycle of the capacitive flexible sensor, improve the preparation efficiency of the capacitive flexible sensor, and reduce the preparation cost of the capacitive flexible sensor.

The above-mentioned technical scheme disclosed in the present application directly uses the laser direct writing process to print the graphene electrode pattern on the film used to prepare graphene, and arranges an encapsulation layer on the surface of the graphene electrode pattern, and arranges an isolation layer on the other surface. layer to obtain a composite sheet, and then, the end of the graphene electrode pattern is connected with a wire, and the two composite sheets are bonded together to obtain a capacitive flexible sensor. Since the thin film used to prepare graphene can be directly used to obtain the graphene electrode pattern through the laser direct writing process without first converting it into a certain form of graphene, and then processing the certain form of graphene to obtain the electrode pattern, Therefore, it is possible to reduce the cumbersome degree of graphene electrode pattern preparation, improve the preparation efficiency of graphene electrode pattern, reduce the preparation cost of graphene electrode pattern, thereby can shorten the preparation period of capacitive flexible sensor, improve the preparation of capacitive flexible sensor efficiency and reduce the fabrication cost of capacitive flexible sensors.

In a method for preparing a capacitive flexible sensor provided in an embodiment of the present invention, an isolation layer is provided on the side where the graphene electrode pattern is in contact with the substrate, which may include:

A polymer fiber layer is arranged on the side where the graphene electrode pattern is in contact with the substrate.

When an isolation layer is provided on the side where the graphene electrode pattern is in contact with the substrate, specifically, a high molecular polymer fiber layer can be provided, so that the high molecular polymer fiber layer can be used as the isolation layer.

Among them, when the polymer fiber layer is used as the isolation layer, the polymer fiber layer can not only play the role of support and isolation, but also improve the flexibility of the capacitive flexible sensor, so that the capacitive flexible sensor Become softer, which can improve the competitiveness and applicability of capacitive flexible sensors in wearable flexible sensing devices.

A method for preparing a capacitive flexible sensor provided in an embodiment of the present invention may further include:

The high molecular polymer fiber layer was prepared on the conductive glass substrate by the near-field electrospinning direct writing process;

The polymer fiber layer is peeled off from the conductive glass substrate.

Before the high molecular polymer fiber layer is arranged on the side where the graphene electrode pattern is in contact with the substrate, it may also include: preparing a high molecular polymer fiber layer on the conductive glass substrate by using a near-field electrospinning direct writing process, and mechanically The high molecular polymer fiber layer is peeled off from the conductive glass substrate by means of peeling or the like. Then, the high molecular polymer fiber layer used as the isolation layer can be arranged on the graphene electrode pattern. Wherein, the thickness of the polymer fiber layer prepared by the near-field electrospinning direct writing process can be between 50-200 μm.

For details, please refer to Fig. 4 and Fig. 5, wherein, Fig. 4 shows a schematic diagram of preparing a polymer fiber layer using a near-field electrospinning direct writing process provided by an embodiment of the present invention, and Fig. 5 shows an embodiment of the present invention The structure schematic diagram of the composite sheet provided, utilizes the spinning nozzle 6 to prepare the high molecular polymer fiber layer 51 on the conductive glass substrate 7, and the high molecular polymer fiber layer 51 is peeled off from the conductive glass substrate 7, then, the The polymer fiber layer 51 is disposed on the graphene electrode pattern 3 to be used as the isolation layer 5, and then the graphene electrode pattern 3 is connected to the wire 8 to obtain a composite sheet.

The basic principle of the near-field electrospinning direct writing process is to reduce the spinning voltage by reducing the spinning distance between the spinning nozzle and the conductive glass substrate (scale range of several centimeters or even several millimeters), wherein the spinning distance can be The spinning voltage is controlled below 20mm, and the spinning voltage is about 1kV-4kV. At the same time, the conductive glass substrate is placed on the two-dimensional motion platform. Fiber layer) fixed-point deposition in a two-dimensional plane. Among them, the spinning materials used in the near-field electrospinning direct writing process can specifically be: thermoplastic polyurethane elastomer rubber (TPU), polyacrylonitrile (PAN), polyethylene terephthalate (PET), nylon 6 (PA6), polyvinylidene fluoride (PVDF), polyvinyl alcohol (PVA), polylactic acid (PLA) and polyethersulfone (PES) and other polymer materials.

The thickness of the polymer fiber layer prepared by the near-field electrospinning direct writing process is relatively uniform, the diameter and structure of the polymer fiber layer can be adjusted and ordered, and the polymer fiber layer can be customized In addition, the cost of preparing the polymer fiber layer by the near-field electrospinning direct writing process is relatively low and the efficiency is relatively high. Among them, the polymer fiber layer with uniform thickness helps to ensure the uniform spacing between the two layers of graphene electrode patterns. Therefore, if the same force is applied to the surface of the capacitive flexible sensor, the two layers of graphene will The spacing changes at different positions of the electrode pattern are the same, so that the same signal can be generated at different positions, that is, the polymer fiber layer with uniform thickness helps to improve the measurement accuracy and working reliability of the capacitive flexible sensor .

A method for preparing a capacitive flexible sensor provided in an embodiment of the present invention uses a near-field electrospinning direct-writing process to prepare a polymer fiber layer on a conductive glass substrate, which may include:

A grid-structured polymer fiber layer was prepared on a conductive glass substrate by using a near-field electrospinning direct-writing process.

A grid-structured polymer fiber layer can be prepared on a conductive glass substrate by using the near-field electrospinning direct-writing process, as shown in Figure 4 and Figure 5, where the diameter of a single polymer fiber layer can be 80nm-10μm, the grid size can reach 10μm*10μm.

Using the polymer fiber layer with grid structure as the isolation layer of the capacitive flexible sensor can make it play a better supporting and isolating role, and can also improve the measurement performance of the capacitive flexible sensor.

Of course, the near-field electrospinning direct writing process can also be used to customize polymer fiber layers with other structures and patterns.

In a method for preparing a capacitive flexible sensor provided in an embodiment of the present invention, an encapsulation layer is provided on the surface of a graphene electrode pattern, which may include:

Mix PDMS and curing agent together to obtain a mixture;

The mixture is poured on the substrate and cured to obtain a PDMS encapsulation layer arranged on the surface of the graphene electrode pattern.

The encapsulation layer can be set on the surface of the graphene electrode pattern in the following manner:

Mix PDMS (polydimethylsiloxane, polydimethylsiloxane) and curing agent together to obtain a mixture, wherein the mass ratio of PDMS to curing agent can be 10:1, and then pour the mixture on the substrate , and solidified to obtain a PDMS encapsulation layer arranged on the surface of the graphene electrode pattern. Afterwards, the graphene electrode pattern with the polydimethylsiloxane film can be peeled off from the substrate to obtain the polydimethylsiloxane film with the graphene electrode pattern, wherein the polydimethylsiloxane The thickness of the oxane film can be between 10mm-50mm.

Among them, polydimethylsiloxane film has the characteristics of easy processing and packaging, and exhibits good flexibility after curing, so it can improve the softness of capacitive flexible sensors.

A method for preparing a capacitive flexible sensor provided in an embodiment of the present invention connects the end of the graphene electrode pattern to a wire, which may include:

Use conductive glue to connect the ends of the graphene electrode patterns with wires.

When the end of the graphene electrode pattern is connected with the wire, the end of the graphene electrode pattern can be connected with the wire by using conductive glue (specifically, conductive silver glue, etc.), so as to improve the contact between the graphene electrode pattern and the wire. binding force, thereby improving the reliability of capacitive flexible sensors.

A method for preparing a capacitive flexible sensor provided in an embodiment of the present invention, bonding two composite sheets together may include:

Coating a mixture obtained by mixing PDMS and curing agent around at least one composite sheet;

The two composite sheets are pasted together by a mixture and cured so that the two composite sheets are bonded together.

Considering that the mixture obtained by mixing PDMS and curing agent has a certain viscosity, therefore, the above-mentioned mixture can be used to bond two composite sheets together, specifically, the mixture can be coated around at least one composite sheet (Specifically coating the mixture around the isolation layer), bonding the two composite sheets together through the mixture, and then curing and encapsulating, so that the two composite sheets are bonded together.

Using the above-mentioned mixture to bond the composite sheet can not only improve the reliability of the capacitive flexible sensor, but also save materials to reduce the preparation cost of the capacitive flexible sensor.

A method for preparing a capacitive flexible sensor provided in an embodiment of the present invention, after bonding two composite sheets together to obtain a capacitive flexible sensor, may further include:

Connect the capacitive flexible sensor to the measuring table, and use the measuring table to measure the capacitive flexible sensor.

Referring to Fig. 3, after obtaining the capacitive flexible sensor, the capacitive flexible sensor can be connected to the measuring meter 9 (specifically, it can be a measuring device such as a multimeter), and specifically the wire 8 connected to the graphene electrode pattern 3 can be connected to the measuring meter 9 Connected to use the measurement table 9 to measure the capacitive flexible sensor, so as to determine the performance and quality of the capacitive flexible sensor through measurement, so as to facilitate the classification operation of the capacitive flexible sensor according to the performance and quality, so as to obtain different levels of capacitive sensor, or it is convenient to improve the preparation process or preparation material of the capacitive flexible sensor according to the performance and quality, thereby improving the performance and quality of the capacitive flexible sensor.

It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is a relationship between these entities or operations. There is no such actual relationship or order between them. Furthermore, the terms "comprising", "comprising" or any other variation thereof are intended to cover a non-exclusive inclusion such that elements inherent in a process, method, article, or apparatus including a series of elements are included. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising said element. In addition, the parts of the technical solutions provided by the embodiments of the present invention that are consistent with the implementation principles of the corresponding technical solutions in the prior art are not described in detail, so as to avoid redundant description.

The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (8)

1. a kind of preparation method of condenser type flexible sensor characterized by comprising

Two composite sheets are bonded together, to obtain condenser type flexible sensor, wherein the preparation process packet of the composite sheet It includes:

The film for being used to prepare graphene is pasted onto substrate surface, and is printed on the membrane using laser direct-writing technique Graphene electrodes pattern；

On the surface of the Graphene electrodes pattern, encapsulated layer, and the Graphene electrodes figure that will have the encapsulated layer are set Case is stripped down from the substrate；

The one side being in contact with the substrate in the Graphene electrodes pattern is arranged separation layer, and by the Graphene electrodes figure The end of case is connected with conducting wire, to obtain the composite sheet.

2. the preparation method of condenser type flexible sensor according to claim 1, which is characterized in that in the graphene electricity Separation layer is arranged in the one side that pole figure case is in contact with the substrate, comprising:

In the one side that the Graphene electrodes pattern is in contact with the substrate, high polymer fiber layer is set.

3. the preparation method of condenser type flexible sensor according to claim 2, which is characterized in that in the graphene electricity Before the one side setting high polymer fiber layer that pole figure case is in contact with the substrate, further includes:

The high polymer fiber layer is prepared in electro-conductive glass substrate using near field electrostatic spinning direct-write process；

The high polymer fiber layer is stripped down from the electro-conductive glass substrate.

4. the preparation method of condenser type flexible sensor according to claim 3, which is characterized in that spun using near-field electrostatic Silk direct-write process prepares high polymer fiber layer in electro-conductive glass substrate, comprising:

The high polymer fiber of network is prepared in electro-conductive glass substrate using near field electrostatic spinning direct-write process Layer.

5. the preparation method of condenser type flexible sensor according to claim 1, which is characterized in that in the graphene electricity Encapsulated layer is arranged in the surface of pole figure case, comprising:

PDMS and curing agent are mixed, to obtain intermixture；

On the substrate by intermixture casting, and solidified, to obtain being arranged in the Graphene electrodes pattern table The PDMS encapsulated layer in face.

6. the preparation method of condenser type flexible sensor according to claim 1, which is characterized in that by the graphene electricity The end of pole figure case is connected with conducting wire, comprising:

The end of the Graphene electrodes pattern is linked together with the conducting wire using conducting resinl.

7. the preparation method of condenser type flexible sensor according to claim 6, which is characterized in that described compound by two Piece is bonded together, comprising:

In the intermixture that the surrounding coating of at least one composite sheet is mixed to get by PDMS and curing agent；

Two composite sheets are fit together by the intermixture, and are solidified, so that two composite sheets are viscous It is combined.

8. the preparation method of condenser type flexible sensor according to any one of claims 1 to 7, which is characterized in that inciting somebody to action Two composite sheets are bonded together, after obtaining condenser type flexible sensor, further includes:

The condenser type flexible sensor is connected with measurement table, using the measurement table to the condenser type flexible sensor into Row measurement.