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CN110238765A - 一种超精磨砂轮用陶瓷结合剂及其制备方法和应用 - Google Patents

一种超精磨砂轮用陶瓷结合剂及其制备方法和应用 Download PDF

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CN110238765A
CN110238765A CN201910540985.XA CN201910540985A CN110238765A CN 110238765 A CN110238765 A CN 110238765A CN 201910540985 A CN201910540985 A CN 201910540985A CN 110238765 A CN110238765 A CN 110238765A
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abrasive disk
vitrified bond
grinding abrasive
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CN110238765B (zh
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苗卫朋
丁玉龙
刘宾
包华
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Zhengzhou Research Institute for Abrasives and Grinding Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C17/00—Disintegrating by tumbling mills, i.e. mills having a container charged with the material to be disintegrated with or without special disintegrating members such as pebbles or balls
    • B02C17/10—Disintegrating by tumbling mills, i.e. mills having a container charged with the material to be disintegrated with or without special disintegrating members such as pebbles or balls with one or a few disintegrating members arranged in the container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
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Abstract

本发明针对现有技术中陶瓷结合剂砂轮存在的问题，提供一种超精磨砂轮用陶瓷结合剂及其制备方法和应用，由以下重量百分比的组分构成：二氧化硅粉体25%‑50%，高岭土5%‑10%，硝酸盐类粉体5%‑15%，氧化硼粉5%‑15%，金属氧化物粉2%‑8%，添加剂2%‑10%。利用该陶瓷结合剂制备的砂轮，具有自锐性好，孔隙率高，且大部分是闭气孔，磨削性能好的特点。

Description

一种超精磨砂轮用陶瓷结合剂及其制备方法和应用
技术领域
本发明属于超精磨砂轮技术领域，具体涉及一种超精磨砂轮用陶瓷结合剂及其制备方法和应用。
背景技术
二十一世纪的信息时代，电子产品向着小型化、高性能、多功能方向快速发展，对集成电路（IC）制造技术的要求越来越高，硅片逐渐趋向大直径化，但是直径增大给硅片减薄磨削带来了极大的困难。大直径硅片研磨加工时，存在研磨损伤大，面型精度低及不易自动化控制等问题，无法进行高品质，高效率的加工。而普通的陶瓷结合剂制备出来的砂轮由于自锐性差，孔隙率低，在磨削的时候接触面大，磨料不易脱落，极易对工件产生磨损，滑擦，划痕等现象，影响工件的加工质量。
中国专利CN 1938129 B公开了一种多孔陶瓷结合剂砂轮及制备方法，虽然在一定程度上能够解决砂轮的自锐性问题，但是此砂轮的孔多为通孔，由于孔隙较高，磨削后的杂质会随着孔渗入砂轮，影响后续的使用。
发明内容
本发明针对现有技术中陶瓷结合剂砂轮存在的问题，提供一种超精磨砂轮用陶瓷结合剂及其制备方法和应用，利用该陶瓷结合剂制备的砂轮，具有自锐性好，孔隙率高，且大部分是闭气孔，磨削性能好的特点。
本发明采用如下技术方案：
一种超精磨砂轮用陶瓷结合剂，由以下重量百分比的组分构成：二氧化硅粉体 25%-50%，高岭土 5%-10%，硝酸盐类粉体 5%-15%，氧化硼粉 5%-15%，金属氧化物粉 2%-8%，添加剂 2%-10%。
优选地，所述硝酸盐类粉体为硝酸锂，硝酸钙和硝酸镁中的一种或多种。
优选地，所述金属氧化物粉为氧化铁和/或氧化铝。
优选地，所述添加剂为碳酸钙、碳酸氢钙、碳酸镁和碳酸氢钠中的一种或多种。
上述的超精磨砂轮用陶瓷结合剂的制备方法，将所有原料放入球磨罐中，进行干磨48-96小时，再加入水进行湿磨96-150小时，然后过筛，静置48小时，分离粉体与水并将水离后的粉体进行干燥处理，最后再干磨24-72小时后过筛，即得超精磨砂轮用陶瓷结合剂粉体。
进一步地，所述干燥处理具体操作为：在80-120℃条件下烘干12-20小时。
上述的超精磨砂轮用陶瓷结合剂在金刚石砂轮制备中的应用，制备得到的金刚石砂轮内的气孔为闭气孔。
本发明的有益效果如下：
1）本发明提供的陶瓷结合剂制备得到的超精磨砂轮，其内部的气孔多为封闭气孔，而封闭气孔相较于通孔，可以使砂轮具有更高的强度，提高砂轮的寿命；而且高的孔隙率时，磨削后的碎屑容易进入砂轮内部，不利于后续的磨削，而闭孔可以有效避免这种情况的发生。本发明通过加入添加剂，可以使此结合剂制备的金刚石砂轮组织结构中的气孔率在达到70%，满足砂轮超精磨的使用需求。
2）本发明所述陶瓷结合剂中选用氧化硅和氧化铝，其构成陶瓷结合剂中的网络骨架，起到基本的支撑作用，而且氧化硅和氧化铝有利于增加对磨料的润湿性，本发明的陶瓷结合剂使用时烧结温度低，大约在623℃，用此结合剂制备的金刚石砂轮具有高孔隙率且可控，自锐性好，在磨削硅片，蓝宝石等过程中，可与磨料同步消耗，对工件不产生划痕，有利于改善被磨削工件的表面质量。
3）本发明的陶瓷结合剂所用原材料成本低，而且制备工艺简单，推广适用性强。
附图说明
图1为实施例2所得陶瓷结合剂的TGDSC曲线；
图2是利用实施例2所得陶瓷结合剂制成的金刚石砂轮；
图3是现有技术和本发明的陶瓷结合剂制成的金刚石砂轮磨削的硅片对比示意图；
图4是磨削硅片的原子力三维照片；
图5是金刚石砂轮的SEM图谱。
具体实施方式
为了使本发明的技术目的、技术方案和有益效果更加清楚，下面结合附图和具体实施例对本发明的技术方案作出进一步的说明。
实施例1：
一种超精磨砂轮用陶瓷结合剂，采用以下重量配比的原料制备而成：
准备原料：二氧化硅粉体46kg，高岭土9kg，硝酸钙9kg，硝酸锂6kg，氧化硼粉14kg，氧化铝4kg，氧化铁2kg，碳酸钙6kg，碳酸氢钙4kg。
具体步骤如下：
1）将上述原材料粉体放入球磨罐中，干磨80小时；
2）加入水分，湿磨进行110小时；
3）然后过270#筛，静置48小时，将水与粉体分离，然后在100℃下干燥40小时；
4）粉碎后继续球磨60小时后过325#筛，制得所要的陶瓷结合剂粉体。
实施例2：
准备原料：二氧化硅粉体48kg，高岭土10kg，硝酸钙9kg，硝酸锂6kg，氧化硼粉12kg，氧化铝2kg，氧化铁3kg，碳酸钙4kg，碳酸氢钙6kg。
具体步骤如下：
1）将上述原材料粉体放入球磨罐中，干磨75小时；
2）加入水分，湿磨进行105小时；
3）然后过270#筛，静置44小时，将水与粉体分离，然后在100℃下干燥40小时；
4）然后粉碎后继续球磨60小时后过325#筛，制得所要的陶瓷结合剂粉体。
将所得陶瓷结合剂粉体进行TDDSC测试，TDDSC曲线图谱如图1所示，从图中可以看出，随着温度的升高，陶瓷结合剂的质量并没有发生变化，在620℃的时候，吸热明显，开始出现吸热峰，这说明结合剂开始出现液相，发生熔融现象，说明此结合剂的烧结温度大约在623℃。现有技术中的陶瓷结合剂的烧结温度一般在700℃左右，本发明制备出来的陶瓷结合剂能够有效降低烧结温度。
实施例3：
准备原料：二氧化硅粉体50kg，高岭土8kg，硝酸钙6kg，硝酸锂6kg，氧化硼粉13kg，氧化铝4kg，氧化铁3kg，碳酸钙5kg，碳酸氢钙5kg。
具体步骤如下：
1）将上述原材料粉体放入球磨罐中，干磨80小时；
2）加入水分，湿磨进行110小时；
3）然后过筛，静置48小时，将水与粉体分离，然后在100℃下干燥40小时；
4）然后粉碎后继续球磨60小时后过筛，制得所要的陶瓷结合剂粉体。
取实施例2制备得到的陶瓷结合剂粉体50kg和粒度为2—4μm的金刚石微粉50kg采用常规工艺加工金刚石砂轮，即将陶瓷结合剂粉体和金刚石微粉用树脂液打湿后，混合均匀，使用模具冷压成型，然后在马弗炉内于630℃烧结成块体，即得砂轮块；将得到的砂轮块进行加工，制备出金刚石砂轮，如图2所示，对该金刚石砂轮进行SEM和孔隙率测试，其组织结构的SEM图（图5）和孔隙率（检测4次）检测结果如下：可以看出，该金刚石砂轮的组织结构中充满了气孔，且气孔大小均匀，而且大部分是闭孔，因此闭孔结构几乎覆盖整个组织结构，具有很高的孔隙率，为提升磨削质量奠定了基础。
表1 金刚石砂轮的孔隙率检测结果
将上述所得金刚石砂轮置于硅片减薄磨床进行实验，实验结果如图3所示，同时以现有技术中金刚石砂轮的减薄结果作为对照，从图3对比中可以看出，现有技术中的陶瓷结合剂制备出的金刚石砂轮磨削出的硅片（左图）工件表面有不同程度的条纹，并呈现“瓜皮状”条纹，而本发明的陶瓷结合剂制备的金刚石砂轮磨削的硅片（右图）更加有光泽，表面质量更佳。
进一步地，本发明对磨削后的硅片进行了原子力检测，主要用于检测硅片表面的粗糙度。如图4所示，本发明的陶瓷结合剂制备的金刚石砂轮磨削的硅片表面相对平整，并没有过深的划痕（右图），而现有技术中的陶瓷结合剂制成的金刚石砂轮磨削出来的工件表面会有过深的划痕，工件表面质量差，难以进行下道工序（左图）。
最后所应说明的是：上述实施例仅用于说明而非限制本发明的技术方案，任何对本发明进行的等同替换及不脱离本发明精神和范围的修改或局部替换，其均应涵盖在本发明权利要求保护的范围之内。

Claims (7)

1.一种超精磨砂轮用陶瓷结合剂，其特征在于，由以下重量百分比的组分构成：二氧化硅粉体 25%-50%，高岭土 5%-10%，硝酸盐类粉体 5%-15%，氧化硼粉 5%-15%，金属氧化物粉2%-8%，添加剂 2%-10%。
2.根据权利要求1所述的超精磨砂轮用陶瓷结合剂，其特征在于，所述硝酸盐类粉体为硝酸锂，硝酸钙和硝酸镁中的一种或多种。
3.根据权利要求1所述的超精磨砂轮用陶瓷结合剂，其特征在于，所述金属氧化物粉为氧化铁和/或氧化铝。
4.根据权利要求1所述的超精磨砂轮用陶瓷结合剂，其特征在于，所述添加剂为碳酸钙、碳酸氢钙、碳酸镁和碳酸氢钠中的一种或多种。
5.权利要求1至4任一项所述的超精磨砂轮用陶瓷结合剂的制备方法，其特征在于，将所有原料放入球磨罐中，进行干磨48-96小时，再加入水进行湿磨96-150小时，然后过筛，静置45-52小时，分离粉体与水并将水离后的粉体进行干燥处理，最后再干磨24-72小时后过筛，即得超精磨砂轮用陶瓷结合剂粉体。
6.根据权利要求5所述的超精磨砂轮用陶瓷结合剂的制备方法，其特征在于，所述干燥处理具体操作为：在80-120℃条件下烘干12-20小时。
7.权利要求1至4任一项所述的超精磨砂轮用陶瓷结合剂在金刚石砂轮制备中的应用，其特征在于，制备得到的金刚石砂轮内的气孔为闭气孔。
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