CN110102996A - It is a kind of to pick up the tool for placing head and disassembly installation method for installing and dismounting - Google Patents
It is a kind of to pick up the tool for placing head and disassembly installation method for installing and dismounting Download PDFInfo
- Publication number
- CN110102996A CN110102996A CN201910389283.6A CN201910389283A CN110102996A CN 110102996 A CN110102996 A CN 110102996A CN 201910389283 A CN201910389283 A CN 201910389283A CN 110102996 A CN110102996 A CN 110102996A
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- Prior art keywords
- pallet
- head
- tool
- pickup
- mounting base
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a kind of tools and installing/dismounting method that placement head is picked up for installing and dismounting, it is related to the auxiliary tool technology field of semiconductor processing equipment, tool of the invention includes mounting base, linear guide, pallet and positioning fastener, the linear guide is mounted on mounting base lower end side, the pallet and linear guide cooperate, it is mounted in mounting base, the positioning fastener is mounted on above pallet, and is parallel to pallet setting.Replacement of the tool of the application for assist operators to sucker and measuring head in placement head is picked up; being automatically aligned to for measuring head may be implemented in the tool of the application; it does not need to shut down when being replaced; improve replacement efficiency; and under the booster action of the tool of the application; operator will not touch sucker, avoid the occurrence of the problem of operator pollutes suction nozzle.
Description
Technical field
The present invention relates to the auxiliary tool technology fields of semiconductor processing equipment, more specifically to one kind for installing
The tool for placing head and disassembly installation method are picked up in disassembly.
Background technique
Pick-and-place apparatus is the commonly used equipment in semi-conductor industry process, its working principle is that being inhaled using vacuum
Attached mode pickup device, is then placed into specified position, in the semiconductor industry more to the requirement of pick-and-place apparatus
Strictly.In the semiconductor industry, require the cleaning of holding element in process, and use pick-and-place apparatus to element into
Row transfer, can effectively guarantee the cleaning of element, also can rapidly element be carried and be shifted, and improve processing efficiency.
In the semiconductor industry, it for the requirement of pick-and-place apparatus, needs to place head using the pickup to different model
To adapt to the production requirement of different product.It is using manually to the existing way placing the sucker of head and being replaced is picked up
Operation.For the safety for ensuring operator, need to carry out power down process to pick-and-place apparatus, then by pick-and-place apparatus into
Row locking, operator will pick up manually to place head measuring head and sucker and disassembles, then replace other models measuring head and
Sucker, this mode have the following problems: firstly, the pure manual operations of operator carries out the replacement of measuring head and sucker, needing
Power down process is carried out, replacing construction is longer, is unfavorable for producing；Secondly, it is poor for the alignment rate of measuring head installation, easily cause peace
Wrongly installed mistake causes equipment downtime longer；When in addition being replaced by hand, suction nozzle is easily touched, the pollution of suction nozzle is caused, from
And cause to pollute element in subsequent production, the risk for causing product quality and reliability to reduce.
Summary of the invention
In order to overcome above-mentioned defect existing in the prior art and deficiency, this application provides one kind to pick up for installing and dismounting
Pick and place the tool for setting the sucker of head, the tool of the application places sucker and measuring head in head to picking up for assist operators
Replacement, the tool of the application may be implemented being automatically aligned to for measuring head, do not need to shut down when being replaced, and improve replacement effect
Rate, and under the booster action of the tool of the application, operator will not touch sucker, avoid the occurrence of operator and pollute and inhale
The problem of mouth.
According to a kind of tool for picking up placement head for installing and dismounting of the invention, it is characterised in that: including mounting base, directly
Line guide rail, pallet and positioning fastener；The upper end of the mounting base is adapted with the mounting rack for placing head is picked up, for putting with pickup
The mounting rack for setting head is fixed；The mounting base places the axial parallel of head with pickup, and the linear guide is mounted under mounting base
Side is held, the pallet and linear guide cooperate, be mounted in mounting base, and the positioning fastener is mounted on above pallet, and flat
Row is arranged in pallet, and the positioning fastener is connected as one with the pallet, and positioning fastener is together with pallet in linear guide
Sliding；Location hole is provided on the pallet, tray center position is provided with suction nozzle placing groove.Compared with prior art, this Shen
A set of tool for being used to that disassembly and installation to be assisted to pick up placement head please be devise, mounting base is used for and the mounting rack of head is placed in pickup
It is fixedly connected, while being also used for the other component of fixed installation tool, the effect of pallet is to be removed or to be installed for holding
Pickup place head, general to pick up that place head to be includes sucker and suction nozzle, suction nozzle, which is mounted on sucker, forms described pick up
Head is set in pick-and-place, is then fastened in the mounting post of pick-and-place apparatus by sucker, to complete to pick up the replacement for placing head.
When needing to dismantle pickup placement head, operator moves pallet manually, and pallet and sucker are fitted in
Together, then hand is detained on sucker, firmly pull down or by, by pick up place head disassembled from mounting post, this side
Formula can contact to avoid operator's hand with suction nozzle in disassembly, not need to carry out power down process to pick-and-place apparatus；Installation
When head is placed in new pickup, the suction nozzle for placing head will be picked up and sucker is fixedly installed togather, then puts mounted pickup
It sets head to be placed on pallet, wherein suction nozzle will be placed in the suction nozzle placing groove of pallet, be fixed with hole original on sucker, pin or point
Position reference point, the positioning reference point on sucker is corresponding with the location hole on pallet；After placing pickup placement head, operator
Pickup on pallet is placed head and is aligned with mounting post by manual-up mobile pallet, picks up placement head and is caught in mounting post, installs
In mounting post, complete to pick up the installation for placing head.During disassembly and installation, positioning fastener is matched with mounting post
It closes, positions and be provided with bayonet on fastener, bayonet is fastened in mounting post, prevents from firmly deviating and causing to pick up placement head installation
Mistake or disassembly mistake.
A kind of embodiment according to the present invention is provided with bayonet on positioning fastener of the invention, and the bayonet is for fixed
Pick up the installation site for placing head in position.
A kind of embodiment according to the present invention is provided with sliding connection block in the linear guide, described to be slidably connected
Block slides in linear guide, and the pallet and positioning fastener are fixedly mounted on sliding connection block.Ensure pallet and positioning
The consistency of fastener movement positions fastener during disassembly and installation and plays positioning protective effect so that the two links.
A kind of embodiment according to the present invention, the mounting base upper end are provided with magnet base, and the magnet base is for pacifying
Dress seat places being fixedly connected between head mounting rack with pickup, and magnet base generates magnetic force, under the magnetic force, so that mounting base
It is adsorbed on and picks up on the mounting rack for placing head, so that mounting base and the fixation picked up between placement head mounting rack are stronger and square
Just.
A kind of embodiment according to the present invention is provided with magnetic force control switch, the magnetic force control on the magnet base
Switch the magnetic on/off for controlling magnet base.The effect that magnetic force control switch is arranged is to facilitate mounting base is fixed on pickup to put
It sets on the mounting rack of head, also facilitates and disassemble mounting base from the mounting rack for picking up placement head.
A kind of embodiment according to the present invention, the tool further include having guide rod and guide rod installation part, the guide rod peace
Piece installing is fixedly mounted in mounting base, and parallel with pallet above pallet, and guide rod installation part one end is fixed with mounting base, separately
One end is fixedly connected with guide rod, and guide rod is arranged in an axially parallel mode with installation axle, and the guide rod is provided in the opposite position of linear guide,
Guide rod is passed through from pallet, and upper end is contacted with the mounting rack for placing head is picked up, and pallet moves up and down under the guiding role of guide rod.
The effect that guide rod and guide rod installation part is arranged is to prevent from tearing open to be oriented to the moving direction of pallet when pallet is mobile
Unload or installation process in, because of the case where firmly unevenness leads to pallet run-off the straight generation.
Head is placed present invention also provides a kind of pickup and disassembles and installs method, and the present processes may be implemented to pick up and put
The quick-replaceable of head is set, and does not need device powers down in replacement process, replacement efficiency, and the use of the application can be effectively improved
Method, the problem of can touching suction nozzle when disassembly and installation picks up and places head to avoid operator, suction nozzle is caused to pollute.
The disassembly installation method of head is placed according to a kind of pickup of the invention, it is characterised in that: place head including picking up
When placement head is picked up in installation, the upper end of mounting base is linked together with the mounting rack for placing head is picked up for disassembly and installation；It will pick up
The suction nozzle that head is set in pick-and-place is mounted on sucker, and then mounted pickup placement head is placed on pallet, is placed on pallet
In the process, the suction nozzle for picking up placement head is correspondingly placed in the suction nozzle placing groove of pallet, is with hole original on sucker, pin or point
Reference point is positioned, the positioning reference point on sucker is corresponding with the location hole on pallet；After placing pickup placement head, operator
The manual-up mobile pallet of member, pallet are moved upwardly together with positioning fastener, under the positioning action of positioning fastener, on pallet
It picks up placement head to be aligned with mounting post, picks up placement head and be caught in mounting post, be mounted in mounting post, complete to pick up placement head
Installation.
The disassembly for picking up placement head specifically refers to: the upper end of mounting base and the mounting rack for picking up placement head are connected to
Together；The manual-up mobile pallet of operator, pallet are moved upwardly together with positioning fastener, and positioning fastener is fastened on pickup and puts
The outer of the mounting post of head is set, the upper surface of pallet and pickup place the following table face contact of the sucker of head, pick up place head at this time
Suction nozzle be located in the suction nozzle placing groove among pallet；Then operator detains on sucker, firmly pulls down or by will pick up
Pick-and-place is set head and is disassembled from mounting post, completes to pick up the disassembly for placing head.
Compared with prior art, the tool that placement head is picked up in the Fast Installation disassembly of the application design can be used for assisting grasping
Make personnel and being automatically aligned to for measuring head may be implemented to the replacement for placing sucker and measuring head in head, the tool of the application is picked up,
It does not need to shut down when being replaced, improves replacement efficiency, and under the booster action of the tool of the application, operator will not
Sucker is touched, the problem of operator pollutes suction nozzle is avoided the occurrence of.The present processes, which may be implemented to pick up, places the fast of head
Speed replacement, and device powers down is not needed in replacement process, replacement efficiency, and the application method of the application can be effectively improved, it can
The problem of touching suction nozzle when disassembly and installation picks up and places head to avoid operator, suction nozzle caused to pollute.
Detailed description of the invention
Fig. 1 is that inventive article is mounted on the structural schematic diagram for picking up and placing on head mounting rack；
Fig. 2 will pick up placement head for inventive article and be mounted on the structural schematic diagram in mounting post；
Fig. 3 is the schematic perspective view of inventive article；
Fig. 4 is the side structure schematic view of inventive article；
Fig. 5 is to install to pick up the step flow chart for placing head using inventive article；
Fig. 6 is to dismantle to pick up the step flow chart for placing head using inventive article；
Appended drawing reference: 1, mounting base, 2, linear guide, 3, pallet, 4, positioning fastener, 5, suction nozzle placing groove, 6, suction nozzle, 7,
Sucker, 8, mounting post, 9, mounting rack, 10, sliding connection block, 11, location hole, 12, bayonet, 13, guide rod, 14, guide rod installation part,
15, magnet base, 16, magnetic force control switch.
Specific embodiment
With reference to the accompanying drawings of the specification, the technical solution of the application is made and is illustrated in further detail.
Embodiment 1
As one preferred embodiment of the application, referring to Figure of description 1-3, present embodiment discloses:
A kind of the tool of head placed is picked up for installing and dismounting according to of the invention, it is characterised in that: including mounting base 1,
Linear guide 2, pallet 3 and positioning fastener 4；The upper end of the mounting base 1 is adapted with the mounting rack 9 for placing head is picked up, and is used for
It is fixed with the mounting rack 9 for placing head is picked up；The mounting base 1 places the axial parallel of head with pickup, and the linear guide 2 is installed
In 1 lower end side of mounting base, the pallet 3 cooperates with linear guide 2, is mounted in mounting base 1, and the positioning fastener 4 is installed
Above pallet 3, and be parallel to the setting of pallet 3, the positioning fastener 4 is connected as one with the pallet 3, position fastener 4 and
Pallet 3 slides in linear guide 2 together；Location hole 11 is provided on the pallet 3,3 center of pallet is provided with suction nozzle
Placing groove 5.Compared with prior art, the application devises a set of for assisting disassembly and installation to pick up the tool of placement head, peace
Dress seat 1 is used to be fixedly connected with the mounting rack 9 for picking up placement head, while being also used for the other component of fixed installation tool, pallet 3
Effect be to place head for holding pickup to be removed or to be installed, it is general pick up to place head to be includes sucker 7 and inhales
Mouth 6, suction nozzle 6, which is mounted on, forms the pickup placement head on sucker 7, is then fastened on pick-and-place apparatus by sucker 7
In mounting post 8, to complete to pick up the replacement for placing head.When needing to dismantle pickup placement head, operator is manual
Mobile pallet 3, pallet 3 and sucker 7 are fit together, and then hand is detained on sucker 7, are firmly pulled down or by will pick up
It places head to disassemble from mounting post 8, this mode can contact to avoid operator's hand with suction nozzle 6 in disassembly, be not required to
Power down process is carried out to pick-and-place apparatus；When new pickup placement head is installed, the suction nozzle 6 and sucker 7 for placing head will be picked up
It is fixedly installed togather, then mounted pickup placement head is placed on pallet 3, wherein suction nozzle 6 will be placed in the suction of pallet 3
It is positioning reference point with original hole, pin or point on sucker 7 in mouth placing groove 5, by the positioning reference point and pallet 3 on sucker 7
On location hole 11 it is corresponding；After placing pickup placement head, the manual-up mobile pallet 3 of operator, by the pickup on pallet 3
It places head to be aligned with mounting post 8, picks up placement head and be caught in mounting post 8, be mounted in mounting post 8, complete to pick up and place head
Installation.During disassembly and installation, positioning fastener 4 is cooperated with mounting post 8, is positioned and is provided with bayonet on fastener 4
12, bayonet 12 is fastened in mounting post 8, prevents from firmly deviating and causing to pick up placement head setup error or disassembly mistake.
Embodiment 2
As the application another embodiment, referring to Figure of description 1-3, present embodiment discloses:
A kind of the tool of head placed is picked up for installing and dismounting according to of the invention, it is characterised in that: including mounting base 1,
Linear guide 2, pallet 3 and positioning fastener 4；The upper end of the mounting base 1 is adapted with the mounting rack 9 for placing head is picked up, and is used for
It is fixed with the mounting rack 9 for placing head is picked up；The mounting base 1 places the axial parallel of head with pickup, and the linear guide 2 is installed
In 1 lower end side of mounting base, the pallet 3 cooperates with linear guide 2, is mounted in mounting base 1, and the positioning fastener 4 is installed
Above pallet 3, and be parallel to the setting of pallet 3, the positioning fastener 4 is connected as one with the pallet 3, position fastener 4 and
Pallet 3 slides in linear guide 2 together；Location hole 11 is provided on the pallet 3,3 center of pallet is provided with suction nozzle
Placing groove 5.Compared with prior art, the application devises a set of for assisting disassembly and installation to pick up the tool of placement head, peace
Dress seat 1 is used to be fixedly connected with the mounting rack 9 for picking up placement head, while being also used for the other component of fixed installation tool, pallet 3
Effect be to place head for holding pickup to be removed or to be installed, it is general pick up to place head to be includes sucker 7 and inhales
Mouth 6, suction nozzle 6, which is mounted on, forms the pickup placement head on sucker 7, is then fastened on pick-and-place apparatus by sucker 7
In mounting post 8, to complete to pick up the replacement for placing head.
A kind of embodiment according to the present invention in Fig. 3, is provided with bayonet 12, the card on positioning fastener 4 of the invention
Mouth 12 picks up the installation site for placing head for positioning.
A kind of embodiment according to the present invention in Fig. 1 and Fig. 2, is provided with sliding connection block in the linear guide 2
10, the sliding connection block 10 slides in linear guide 2, and the pallet 3 and positioning fastener 4 are fixedly mounted on and are slidably connected
On block 10.Ensure pallet 3 and positions the consistency that fastener 4 acts, so that the two links, positioning card during disassembly and installation
Part 4 plays positioning protective effect.
A kind of embodiment according to the present invention, as shown in Figure 1,2 and 3,1 upper end of mounting base are provided with magnet base
15, the magnet base 15 places being fixedly connected between head mounting rack 9 with pickup for mounting base 1, and magnet base 15 generates magnetic force,
Under the magnetic force, so that mounting base 1 is adsorbed on the mounting rack 9 for picking up placement head, so that head is placed in mounting base 1 and pickup
Fixation between mounting rack 9 is stronger and conveniently.
A kind of embodiment according to the present invention is provided with magnetic force control switch 16, the magnetic force on the magnet base 15
Control switch 16 is used to control the magnetic on/off of magnet base 15.The effect that magnetic force control switch 16 is arranged is facilitated mounting base 1
It is fixed on and picks up on the mounting rack 9 for placing head, also facilitate and disassemble mounting base 1 from the mounting rack 9 for picking up placement head.
Embodiment 3
As the application another embodiment, referring to Figure of description 1-4, present embodiment discloses:
A kind of the tool of head placed is picked up for installing and dismounting according to of the invention, it is characterised in that: including mounting base 1,
Linear guide 2, pallet 3 and positioning fastener 4；The upper end of the mounting base 1 is adapted with the mounting rack 9 for placing head is picked up, and is used for
It is fixed with the mounting rack 9 for placing head is picked up；The mounting base 1 places the axial parallel of head with pickup, and the linear guide 2 is installed
In 1 lower end side of mounting base, the pallet 3 cooperates with linear guide 2, is mounted in mounting base 1, and the positioning fastener 4 is installed
Above pallet 3, and be parallel to the setting of pallet 3, the positioning fastener 4 is connected as one with the pallet 3, position fastener 4 and
Pallet 3 slides in linear guide 2 together；Location hole 11 is provided on the pallet 3,3 center of pallet is provided with suction nozzle
Placing groove 5.Compared with prior art, the application devises a set of for assisting disassembly and installation to pick up the tool of placement head, peace
Dress seat 1 is used to be fixedly connected with the mounting rack 9 for picking up placement head, while being also used for the other component of fixed installation tool, pallet 3
Effect be to place head for holding pickup to be removed or to be installed, it is general pick up to place head to be includes sucker 7 and inhales
Mouth 6, suction nozzle 6, which is mounted on, forms the pickup placement head on sucker 7, is then fastened on pick-and-place apparatus by sucker 7
In mounting post 8, to complete to pick up the replacement for placing head；Bayonet 12 is provided on positioning fastener 4, the bayonet 12 is for positioning
Pick up the installation site for placing head；It is provided with sliding connection block 10 in the linear guide 2, the sliding connection block 10 is in straight line
It is slided on guide rail 2, the pallet 3 and positioning fastener 4 are fixedly mounted on sliding connection block 10.Ensure pallet 3 and positioning card
The consistency that part 4 acts positions fastener 4 during disassembly and installation and plays positioning protective effect so that the two links.
A kind of embodiment according to the present invention, 1 upper end of mounting base are provided with magnet base 15, and the magnet base 15 is used
Make under the magnetic force in mounting base 1 with being fixedly connected between placement head mounting rack 9, the generation magnetic force of magnet base 15 is picked up
It obtains mounting base 1 to be adsorbed on the mounting rack 9 for picking up placement head, so that the fixation between head mounting rack 9 is placed in mounting base 1 and pickup
It is stronger and conveniently.Magnetic force control switch 16 is provided on the magnet base 15, the magnetic force control switch 16 is for controlling
The magnetic on/off of magnet base 15.The effect that magnetic force control switch 16 is arranged, which facilitates, is fixed on pickup placement head for mounting base 1
On mounting rack 9, also facilitates and disassemble mounting base 1 from the mounting rack 9 for picking up placement head.
A kind of embodiment according to the present invention, as shown in figure 4, the tool further includes having guide rod 13 and guide rod installation part
14, the guide rod installation part 14 is fixedly mounted in mounting base 1, and is located at 3 top, guide rod installation part parallel with pallet 3 of pallet
14 one end and mounting base 1 are fixed, and the other end is fixedly connected with guide rod 13, and guide rod 13 is arranged in an axially parallel mode with installation axle, the guide rod
13 are provided in the opposite position of linear guide 2, and guide rod 13 is passed through from pallet 3, and upper end connects with the mounting rack 9 for placing head is picked up
Touching, pallet 3 move up and down under the guiding role of guide rod 13.The effect that guide rod 13 and guide rod installation part 14 is arranged is to hold in the palm
Disk 3 is oriented to the moving direction of pallet 3 when mobile, prevents in disassembly or installation process, because firmly unevenness leads to pallet 3
The case where run-off the straight, occurs.
Embodiment 4
As the application another embodiment, referring to Figure of description 1 and 2, present embodiment discloses:
The disassembly installation method that head is placed according to a kind of pickup of the invention places the disassembly and installation of head including picking up,
When placement head is picked up in installation, the upper end of mounting base 1 and the mounting rack 9 for picking up placement head are linked together；Head is placed by picking up
Suction nozzle 6 be mounted on sucker 7, then by mounted pickup placement head be placed on pallet 3, be placed on the process of pallet 3
In, the suction nozzle 6 for picking up placement head is correspondingly placed in the suction nozzle placing groove 5 of pallet 3, is with original hole, pin or point on sucker 7
Reference point is positioned, the positioning reference point on sucker 7 is corresponding with the location hole 11 on pallet 3；After placing pickup placement head, behaviour
Make the manual-up mobile pallet 3 of personnel, pallet 3 is moved upwardly together with positioning fastener 4, under the positioning action of positioning fastener 4,
Pickup on pallet 3 is placed head and is aligned with mounting post 8, picks up placement head and is caught in mounting post 8, is mounted in mounting post 8, completes
Pick up the installation for placing head.
Embodiment 5
As the application another embodiment, referring to Figure of description 1 and 2, present embodiment discloses:
The disassembly installation method that head is placed according to a kind of pickup of the invention places the disassembly and installation of head including picking up,
When placement head is picked up in installation, the upper end of mounting base 1 and the mounting rack 9 for picking up placement head are linked together；Head is placed by picking up
Suction nozzle 6 be mounted on sucker 7, then by mounted pickup placement head be placed on pallet 3, be placed on the process of pallet 3
In, the suction nozzle 6 for picking up placement head is correspondingly placed in the suction nozzle placing groove 5 of pallet 3, is with original hole, pin or point on sucker 7
Reference point is positioned, the positioning reference point on sucker 7 is corresponding with the location hole 11 on pallet 3；After placing pickup placement head, behaviour
Make the manual-up mobile pallet 3 of personnel, pallet 3 is moved upwardly together with positioning fastener 4, under the positioning action of positioning fastener 4,
Pickup on pallet 3 is placed head and is aligned with mounting post 8, picks up placement head and is caught in mounting post 8, is mounted in mounting post 8, completes
Pick up the installation for placing head；The disassembly for picking up placement head specifically refers to: the upper end of mounting base 1 and pickup are placed to the peace of head
9 are shelved to link together；The manual-up mobile pallet 3 of operator, pallet 3 are moved upwardly together with positioning fastener 4, positioning card
Part 4 is fastened on the outer for picking up the mounting post 8 for placing head, and the upper surface of pallet 3 connects with the lower surface for placing the sucker 7 of head is picked up
Touching, the suction nozzle 6 for picking up placement head at this time are located in the suction nozzle placing groove 5 among pallet 3；Then operator detains in sucker 7
On, firmly pull down or by, by pick up place head disassembled from mounting post 8, complete pick up place head disassembly.
Claims (8)
1. it is a kind of for installing and dismounting pick up place head tool, it is characterised in that: including mounting base (1), linear guide (2),
Pallet (3) and positioning fastener (4)；The upper end of the mounting base (1) is adapted with the mounting rack (9) for placing head is picked up；The peace
It fills seat (1) and places the axial parallel of head with pickup, the linear guide (2) is mounted on mounting base (1) lower end side, the pallet
(3) cooperate with linear guide (2), the positioning fastener (4) is mounted on above pallet (3), and is parallel to pallet (3) setting, fixed
Bit card part (4) can slide on linear guide (2) together with pallet (3)；Location hole (11) are provided on the pallet (3),
Pallet (3) center is provided with suction nozzle placing groove (5).
2. a kind of tool for picking up placement head for installing and dismounting as described in claim 1, it is characterised in that: positioning fastener
(4) bayonet (12) are provided on.
3. a kind of tool for picking up placement head for installing and dismounting as described in claim 1, it is characterised in that: the straight line is led
It is provided on rail (2) sliding connection block (10), the sliding connection block (10) is slided on linear guide (2), the pallet (3)
It is fixedly mounted on sliding connection block (10) with positioning fastener (4).
4. a kind of tool for picking up placement head for installing and dismounting as described in claim 1, it is characterised in that: the mounting base
(1) upper end is provided with magnet base (15), and the magnet base (15) is for mounting base (1) and picks up between placement head mounting rack (9)
Be fixedly connected.
5. a kind of tool for picking up placement head for installing and dismounting as claimed in claim 4, it is characterised in that: the magnet base
(15) it is provided on magnetic force control switch (16), the magnetic force that the magnetic force control switch (16) is used to control magnet base (15) is opened
It closes.
6. a kind of tool for picking up placement head for installing and dismounting as described in claim 1, it is characterised in that: the tool is also
It include guide rod (13) and guide rod installation part (14), the guide rod installation part (14) is fixedly mounted on mounting base (1), and is located at
Parallel with pallet (3) above pallet (3), guide rod installation part (14) one end and mounting base (1) are fixed, and the other end is fixedly connected with guide rod
(13), guide rod (13) is arranged in an axially parallel mode with installation axle, and the guide rod (13) is provided in the opposite position of linear guide (2),
Guide rod (13) is from pallet (3) across upper end is contacted with the mounting rack (9) for placing head is picked up, pallet (3) leading in guide rod (13)
It is moved up and down under to effect.
7. a kind of pickup places head and dismantles installation method, it is characterised in that: place the disassembly and installation of head including picking up, installation is picked up
When pick-and-place is set, the mounting rack (9) that head is placed in the upper end of mounting base (1) and picking up is linked together；Head is placed by picking up
Suction nozzle (6) is mounted on sucker (7)；Mounted pickup placement head is placed on pallet (3), the mistake of pallet (3) is placed on
Cheng Zhong, the suction nozzle (6) for picking up placement head is correspondingly placed in the suction nozzle placing groove (5) of pallet (3), with original on sucker (7)
Hole, pin or point are positioning reference point, and the positioning reference point on sucker (7) is corresponding with location hole (11) on pallet (3)；It places
It after head is placed in good pickup, moves up pallet (3), pallet (3) is moved upwardly together with positioning fastener (4), in positioning fastener (4)
Positioning action under, pickup on pallet (3) is placed head and be directed at mounting post (8), and pickup placement head is caught in mounting post (8),
It is mounted on mounting post (8), completes to pick up the installation for placing head.
8. a kind of pickup as claimed in claim 7 places head and dismantles installation method, it is characterised in that: described pick up places head
Disassembly includes: that the upper end of mounting base (1) links together with the mounting rack (9) for placing head is picked up；Pallet (3) are moved up,
Pallet (3) is moved upwardly together with positioning fastener (4), and positioning fastener (4), which is fastened on, picks up the outer of the mounting post (8) for placing head
The following table face contact of the sucker (7) of head is placed in edge, the upper surface of pallet (3) and pickup, picks up suction nozzle (6) position for placing head at this time
In the intermediate suction nozzle placing groove (5) of pallet (3)；Sucker (7) and pallet (3) are moved downwardly together；Will pick up place head from
Mounting post disassembles on (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910389283.6A CN110102996B (en) | 2019-05-10 | 2019-05-10 | Tool for mounting, dismounting, picking and placing head and dismounting and mounting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910389283.6A CN110102996B (en) | 2019-05-10 | 2019-05-10 | Tool for mounting, dismounting, picking and placing head and dismounting and mounting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110102996A true CN110102996A (en) | 2019-08-09 |
| CN110102996B CN110102996B (en) | 2020-12-11 |
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| CN201910389283.6A Active CN110102996B (en) | 2019-05-10 | 2019-05-10 | Tool for mounting, dismounting, picking and placing head and dismounting and mounting method |
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| CN107900971A (en) * | 2018-01-13 | 2018-04-13 | 郑州百信润唐信息技术有限公司 | Valve lock clip assembly and disassembly tool |
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| EP3333855A1 (en) * | 2016-12-09 | 2018-06-13 | GE-Hitachi Nuclear Energy Americas LLC | Systems and methods for nuclear reactor dry tube assembly removal and installation |
| CN208409747U (en) * | 2018-07-03 | 2019-01-22 | 英特尔产品（成都）有限公司 | A kind of chip suction nozzle more changing device |
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| US6379103B1 (en) * | 1999-12-22 | 2002-04-30 | Orc Manufacturing Co., Ltd. | Substrate transfer apparatus |
| US20060005377A1 (en) * | 2004-07-06 | 2006-01-12 | Chii-Ming Leu | Fixing tool for quickly setting up a secure device |
| JP2007207854A (en) * | 2006-01-31 | 2007-08-16 | Shibaura Mechatronics Corp | Semiconductor chip mounting equipment |
| JP2009082838A (en) * | 2007-09-29 | 2009-04-23 | Dainippon Printing Co Ltd | Head installation apparatus, head installation method, substrate working apparatus and head positioning method |
| CN101590634A (en) * | 2008-05-26 | 2009-12-02 | 维特根有限公司 | Be used to dismantle the instrument of cutter |
| CN204810714U (en) * | 2015-07-24 | 2015-11-25 | 深圳市速准芯科技有限公司 | Device is changed to paster suction nozzle |
| CN205852682U (en) * | 2016-07-29 | 2017-01-04 | 山东钢铁股份有限公司 | Vehicle wheel group auxiliary replacement device |
| CN106392561A (en) * | 2016-11-23 | 2017-02-15 | 徐州工业职业技术学院 | Spindle mounting tool suitable for machine tool |
| EP3333855A1 (en) * | 2016-12-09 | 2018-06-13 | GE-Hitachi Nuclear Energy Americas LLC | Systems and methods for nuclear reactor dry tube assembly removal and installation |
| CN107932013A (en) * | 2017-11-16 | 2018-04-20 | 佛山市川东磁电股份有限公司 | A kind of pressure sensor provision for disengagement |
| CN107825099A (en) * | 2017-12-07 | 2018-03-23 | 广东溢达纺织有限公司 | Knitting machine corner angle block changing device |
| CN107900971A (en) * | 2018-01-13 | 2018-04-13 | 郑州百信润唐信息技术有限公司 | Valve lock clip assembly and disassembly tool |
| CN208409747U (en) * | 2018-07-03 | 2019-01-22 | 英特尔产品（成都）有限公司 | A kind of chip suction nozzle more changing device |
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| Publication number | Publication date |
|---|---|
| CN110102996B (en) | 2020-12-11 |
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