CN110095708B - Narrow-side substrate inspection device and narrow-side substrate inspection method - Google Patents
Narrow-side substrate inspection device and narrow-side substrate inspection method Download PDFInfo
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- CN110095708B CN110095708B CN201910397229.6A CN201910397229A CN110095708B CN 110095708 B CN110095708 B CN 110095708B CN 201910397229 A CN201910397229 A CN 201910397229A CN 110095708 B CN110095708 B CN 110095708B
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- 238000007689 inspection Methods 0.000 title claims abstract description 163
- 239000000758 substrate Substances 0.000 title claims abstract description 100
- 238000000034 method Methods 0.000 title claims abstract description 9
- 230000007704 transition Effects 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0425—Test clips, e.g. for IC's
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
A narrow-side substrate inspection apparatus and a narrow-side substrate inspection method, which can easily perform electrical inspection on a narrow-side substrate in a state of stably holding the narrow-side substrate even if the narrow-side substrate to be inspected has a small number of portions to be held. The inspection apparatus for a narrow-side substrate according to the present invention is an inspection apparatus for electrically inspecting a plurality of wirings formed on a circuit substrate, the inspection apparatus including an inspection jig and an inspection apparatus main body, the inspection jig being attached to the inspection apparatus main body, the inspection apparatus main body including: a first driving part for driving the inspection jig to approach or separate from the circuit substrate; and a mounting plate for supporting and positioning the circuit substrate in a vertical direction.
Description
Technical Field
The present invention relates to an inspection apparatus for a narrow-side substrate and an inspection method for a narrow-side substrate.
Background
Conventionally, when an inspection object such as a circuit board is subjected to electrical inspection such as short circuit or disconnection, an inspection jig such as that disclosed in patent document 1 is often used in an inspection apparatus.
The inspection jig generally includes an inspection side support, an electrode side support, a connecting member for connecting the inspection side support to the electrode side support with a space therebetween, an electrode mounting portion which is provided on the electrode side support on the side opposite to the connecting member and in contact with the electrode side support, and on which an electrode is mounted, and a plurality of probes which penetrate the electrode side support and the inspection side support, have front ends protruding from the inspection side support and capable of contacting an inspection object, and have rear ends protruding from the electrode side support and capable of contacting the electrode mounted on the electrode mounting portion.
Patent document 1: japanese patent laid-open No. 2005-338065
In the inspection apparatus, when the circuit board is inspected by using the inspection jig, the edge portion of the circuit board is usually held by a holding mechanism, and in this state, the tips of the plurality of probes exposed from the support on the inspection side are brought into contact with the inspection point of the circuit board.
However, when the circuit board is a narrow-sided board (that is, when the width of the edge portion of the circuit board where no wiring or the like is provided is 5mm or less), the portion that can be held by the holding mechanism is small, and therefore, the circuit board is likely to be detached from the holding mechanism during the inspection operation because the number of the held portions of the circuit board is small, and the circuit board may not be held by the holding mechanism.
Disclosure of Invention
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an inspection apparatus for a narrow-side substrate and an inspection method for a narrow-side substrate, which can easily perform an electrical inspection of a narrow-side substrate in a state where the narrow-side substrate is stably held, even if there is a small number of portions of the narrow-side substrate to be inspected which are to be held.
In order to achieve the above object, the present invention provides an inspection apparatus for a narrow-side substrate, which is capable of electrically inspecting a plurality of wirings formed on a circuit substrate, the inspection apparatus including an inspection jig and an inspection apparatus main body, the inspection jig being attached to the inspection apparatus main body, wherein the inspection apparatus main body includes: a first driving part for driving the inspection jig to approach or separate from the circuit substrate; and a mounting plate for supporting and positioning the circuit substrate in a vertical direction.
According to the inspection apparatus for a narrow-side substrate of the present invention, since the inspection apparatus main body includes the mounting plate for supporting and positioning the circuit substrate in the vertical direction, even if the circuit substrate is a narrow-side substrate having a narrow edge portion where no wiring or the like is provided, the circuit substrate can be easily and stably held by supporting the circuit substrate on the mounting plate, and the circuit substrate can be reliably electrically inspected.
In the inspection apparatus for a narrow-sided substrate according to the present invention, it is preferable that the inspection jig includes an upper inspection jig and a lower inspection jig, the mounting plate includes a mounting plate through hole provided in a vertical direction so as to correspond to the wiring, and at least a part of the lower inspection jig is capable of electrically inspecting the circuit board in cooperation with the upper inspection jig through the mounting plate through hole.
According to the inspection apparatus for a narrow-sided substrate of the present invention, the mounting plate includes the mounting plate through hole provided in the vertical direction corresponding to the wiring, and at least a part of the lower inspection jig can perform the electrical inspection of the circuit substrate in cooperation with the upper inspection jig through the mounting plate through hole, so that the electrical inspection can be easily performed by the upper inspection jig and the lower inspection jig even if the electrical inspection is performed by simultaneously contacting the wiring on both the front and back surfaces of the circuit substrate.
In the narrow-sided board inspection device according to the present invention, it is preferable that the mounting plate includes a board positioning portion for positioning the circuit board in a horizontal direction.
According to the narrow-sided board inspection apparatus of the present invention, since the mounting plate includes the board positioning portion for positioning the circuit board in the horizontal direction, when the circuit board is electrically inspected, the board positioning portion can be used to prevent the relative position of the circuit board with respect to the inspection jig from deviating from the design range in the horizontal direction, and thus, the circuit board can be more reliably electrically inspected.
In the narrow-sided substrate inspection apparatus according to the present invention, the inspection apparatus main body preferably further includes: a mounting plate support portion for supporting and positioning the mounting plate in a vertical direction; a second driving part for driving the carrier plate supporting part to approach or separate from the carrier plate; and a placement plate holding portion for holding and positioning the placement plate when the placement plate supporting portion is away from the placement plate.
According to the inspection apparatus for a narrow-sided substrate of the present invention, the inspection apparatus main body further includes a mounting plate support portion for supporting and positioning the mounting plate in the vertical direction, and a second driving portion for driving the mounting plate support portion to approach or separate from the mounting plate, so that it is easy to accurately position the circuit substrate via the mounting plate in the vertical direction by the mounting plate support portion, ensuring that the inspection jig properly contacts the circuit substrate; further, the inspection apparatus main body further includes a mounting board holding portion for holding and positioning the mounting board when the mounting board support portion is away from the mounting board, so that, after the positioning of the mounting board and the circuit board in the vertical direction is completed by the mounting board support portion, the mounting board is held by the mounting board holding portion so that the mounting board support portion is away from the mounting board, and thus, for example, interference between an inspection jig for inspecting the circuit board from below and the mounting board support portion can be avoided.
In the narrow-sided substrate inspection device according to the present invention, it is preferable that the mounting plate support portion includes a mounting plate positioning portion for positioning the mounting plate in a horizontal direction.
According to the inspection apparatus for a narrow-sided board of the present invention, since the mounting board support portion includes the mounting board positioning portion for positioning the mounting board in the horizontal direction, it is possible to avoid a positioning error of the mounting board with respect to the mounting board support portion by the mounting board positioning portion when performing an electrical inspection of the circuit board, and to avoid a relative position of the circuit board mounted on the mounting board with respect to the inspection jig from deviating from a design range in the horizontal direction, thereby facilitating an electrical inspection of the circuit board more reliably.
In the narrow-sided board inspection device according to the present invention, it is preferable that the mounting board includes an outer edge portion that does not overlap with the circuit board in a vertical direction, and the mounting board holding portion is capable of clamping the outer edge portion.
According to the inspection apparatus for a narrow-sided substrate of the present invention, since the lower space of the mounting board is easily made empty by clamping the outer edge portion of the mounting board by the mounting board holding portion, even if it is necessary to make contact with the wiring on the lower surface of the circuit board to perform electrical inspection, it is easily performed by the lower inspection jig.
In the narrow-sided substrate inspection apparatus according to the present invention, it is preferable that the circuit substrate is a flexible substrate, the mounting plate is a rectangular thin plate, and the four mounting plate holding portions are capable of clamping and horizontally stretching four corners of the mounting plate.
According to the inspection apparatus for narrow-sided boards of the present invention, the flatness of the mounting board and thus the circuit board mounted on the mounting board can be easily ensured by clamping and horizontally stretching the four corners of the mounting board by the mounting board holding portions, and thus the circuit board can be easily and accurately electrically inspected.
In the narrow-sided substrate inspection apparatus according to the present invention, it is preferable that the substrate positioning portion includes positioning pins that are provided corresponding to substrate through-holes in the circuit substrate in a vertical direction and are insertable into the substrate through-holes, and at least two positioning pins are provided apart from each other.
According to the inspection apparatus for a narrow-sided substrate of the present invention, the positioning of the circuit substrate in the horizontal direction with respect to the mounting board can be achieved with a simple configuration.
In the narrow-sided board inspection device according to the present invention, it is preferable that the positioning pins abut against the board through-holes so that the circuit board can be horizontally stretched when the four mounting board holding portions clamp and horizontally stretch the four corners of the mounting board.
According to the narrow-sided board inspection device of the present invention, during inspection, the positioning pins are brought into contact with the board through-holes of the circuit board, so that the circuit board is easily spread in the horizontal plane, and the flatness of the circuit board is further ensured, whereby the circuit board can be more easily and accurately electrically inspected.
In order to achieve the above object, the present invention provides a method for inspecting a narrow-sided substrate, in which a plurality of wirings of a circuit substrate having the wirings formed thereon are electrically inspected by an inspection jig, the method including: a substrate supporting and positioning step of supporting and positioning the circuit substrate in a vertical direction by a quadrangular mounting plate; a carrier plate stretching step of holding four corners of the carrier plate by four carrier plate holding portions, fixing one of the carrier plate holding portions, and urging the remaining three carrier plate holding portions in a direction away from the fixed carrier plate holding portion; and a substrate inspection step of bringing the inspection jig close to the circuit substrate to electrically inspect the circuit substrate.
According to the inspection method of the narrow-sided board of the present invention, in the stage of stretching the mounting board, the four corners of the mounting board are held by the four mounting board holding portions, and one mounting board holding portion is fixed and the remaining three mounting board holding portions are biased in a direction away from the fixed mounting board holding portion.
(effect of the invention)
According to the present invention, since the inspection apparatus main body includes the mounting plate for supporting and positioning the circuit board in the vertical direction, even if the circuit board is a narrow-side board having a narrow width at an edge portion where no wiring or the like is provided, the circuit board can be easily and stably held by supporting the circuit board on the mounting plate, and the circuit board can be reliably and electrically inspected.
Drawings
Fig. 1 is a perspective view schematically showing a partial configuration of an inspection apparatus for a narrow-side substrate according to an embodiment of the present invention, in which a circuit substrate and a mounting plate are shown as being separated from each other.
(symbol description)
1 inspection device for narrow-side substrate
11 inspection jig
111 upper part inspection jig
112 lower inspection jig
12 inspection apparatus main body
121 first driving part
1211 base
122 carrying plate
1221 through-hole of carrier plate
1222 transition part
12221 locating pin
1223 outer edge part
123 carrying plate support part
124 second driving part
1241 base
125 plate holder
20 Circuit board
21 edge part
211 substrate through hole
22 circuit pattern part
Detailed Description
Next, an inspection apparatus for a narrow-side substrate according to an embodiment of the present invention will be described with reference to fig. 1, in which fig. 1 is a perspective view schematically showing a partial configuration of the inspection apparatus for a narrow-side substrate according to the embodiment of the present invention.
Here, for convenience of explanation, three directions orthogonal to each other are set as an X direction, a Y direction, and a Z direction, and one side of the X direction is set as X1, the other side of the X direction is set as X2, one side of the Y direction is set as Y1, the other side of the Y direction is set as Y2, one side of the Z direction is set as Z1, and the other side of the Z direction is set as Z2, and the Z direction corresponds to a vertical direction, the Z1 direction corresponds to an upper direction, and the Z2 direction corresponds to a lower direction.
(Structure of inspection apparatus for narrow-sided substrate)
As shown in fig. 1, the inspection apparatus 1 for a narrow-side substrate according to the present embodiment is capable of electrically inspecting a wiring of a circuit board 20 on which a plurality of wirings are formed, and includes an inspection jig 11 and an inspection apparatus main body 12, and the inspection jig 11 is attached to the inspection apparatus main body 12.
Here, the circuit board 20 is, for example, a narrow-sided board in which the width of the edge portion 21 of the circuit pattern such as the wiring is not narrow.
In the present embodiment, as shown in fig. 1, the circuit board 20 is a flexible board having a rectangular shape when viewed in the Z direction, and has substrate through holes 211 at four corners thereof, respectively, and a circuit pattern portion 22 including a wiring is formed, and the circuit pattern portion 22 includes a plurality of identical circuit patterns. The circuit board may be a board of another shape or a hard board. The substrate through-holes may not be located at the four corners of the circuit board, and the substrate through-holes may be through-holes for fixing or the like in the circuit board, or through-holes electrically connected to the circuit pattern in the circuit pattern portion. Further, the circuit pattern portion may include only one circuit pattern, and may include a plurality of different circuit patterns.
Further, the inspection jig 11 may be of the same structure as that disclosed in patent document 1 mentioned in the background section, or of another structure, and since the specific form of the inspection jig 11 is not the focus of the present application, the detailed description thereof will not be expanded.
In the present embodiment, as shown in fig. 1, the inspection jig 11 includes an upper inspection jig 111 and a lower inspection jig 112, the upper inspection jig 111 and the lower inspection jig 112 may have the same configuration or different configurations, and the upper inspection jig 111 and the lower inspection jig 112 are attached to the inspection apparatus main body 12 through jig attachment portions, respectively.
Further, the inspection apparatus main body 12 includes: a first driving part 121 for driving the inspection jig 11 to approach or separate from the circuit substrate 20; and a mounting plate 122 for supporting and positioning the circuit board 20 in the Z direction, the mounting plate 122 being provided.
Here, the first driving portion 121 can drive the inspection jig 11 in the Z direction to approach or separate from the circuit substrate 20, and can drive the inspection jig 11 in the X direction and the Y direction. Specifically, the first driving unit 121 includes a base 1211 to which the jig mounting unit is fixed, and a driving source (for example, an air cylinder, a motor, or the like, not shown) for driving the base 1211 to move.
The mounting board 122 includes a mounting board through hole 1221 provided in the Z direction so as to correspond to the wiring of the circuit board 20.
In the present embodiment, the mounting plate 122 is a quadrangular thin plate, and includes a mounting plate through hole 1221, a frame-shaped transition portion 1222 positioned on the outer peripheral side of the mounting plate through hole 1221, and a frame-shaped outer edge portion 1223 positioned on the outer peripheral side of the transition portion 1222, the mounting plate through hole 1221 is provided in the Z direction so as to correspond to the wiring of the circuit board 20 (in the illustrated example, a rectangular hole is illustrated as a hole in the Z direction, but not limited thereto), at least a part of the lower inspection jig 112 is capable of performing electrical inspection on the circuit board 20 in cooperation with the upper inspection jig 111 through the mounting plate through hole 1221, and the outer edge portion 1223 is not overlapped with the circuit board 20 in the Z direction. The carrier plate may be designed in other shapes as required. In addition, when the circuit board includes a plurality of circuit patterns, the mounting plate through-holes may be provided in a plurality corresponding to the circuit patterns, and at least a part of the lower inspection jig may be adapted to electrically inspect the plurality of circuit patterns included in the circuit board through the plurality of mounting plate through-holes and the upper inspection jig, respectively. The transition portion may be located at another position, or the transition portion may not be provided. Further, a part of the outer edge portion may overlap the circuit board in the Z direction.
Further, the mounting plate 122 includes a substrate positioning portion for positioning the circuit substrate 20 in the horizontal direction.
In the present embodiment, as shown in fig. 1, the substrate positioning portion includes positioning pins 12221, and the positioning pins 12221 are provided corresponding to the substrate through-holes 211 in the circuit substrate 20 in the Z direction and are insertable into the substrate through-holes 211. In the illustrated example, one positioning pin 12221 is provided near each of the four corners of the mounting plate 122, and the positioning pins 12221 are spaced apart from each other.
Further, the inspection apparatus main body 12 includes: a mounting plate support portion 123 for supporting and positioning the mounting plate 122 in the Z direction by the mounting plate support portion 123; a second driving unit 124, the second driving unit 124 driving the carriage plate supporting unit 123 to approach or separate from the carriage plate 122; and a placement plate holding portion 125, the placement plate holding portion 125 holding and positioning the placement plate 122 when the placement plate supporting portion 123 is away from the placement plate 122.
In the present embodiment, the mounting plate support portion 123 has a substantially rectangular shape when viewed in the Z direction, and has a size larger than the mounting plate through hole 1221 but smaller than the mounting plate 122. The mounting plate supporting portion 123 includes a mounting plate positioning portion (not shown) for positioning the mounting plate 122 in the horizontal direction (i.e., the X direction and the Y direction) (e.g., a positioning protrusion that engages with a recess or the like on the surface of the mounting plate 122 on the Z2 direction side, not shown). The shape and size of the carriage plate support portion are not limited thereto, and may be other shapes and sizes as long as the carriage plate can be stably supported and positioned.
Further, the second driving portion 124 drives the carriage plate supporting portion 123 in the Z direction to approach or separate from the carriage plate 122. Specifically, the second driving unit 124 includes a base 1241 to which the mounting plate support 123 is fixed, and a driving source (for example, an air cylinder, a motor, or the like, not shown) for driving the base 1241 to move.
The mounting plate holding portion 125 can also clamp the outer edge 1223 of the mounting plate 122.
In the present embodiment, four mounting-plate holding portions 125 are provided, and these four mounting-plate holding portions 125 can clamp and horizontally stretch four corners of the mounting plate 122. When the four mounting board holding portions 125 clamp and horizontally stretch the four corners of the mounting board 122, the positioning pins 12221 are brought into contact with the board through-holes 211 so that the circuit board 20 can be horizontally stretched.
(example of Electrical inspection of Circuit Board by narrow-sided Board inspection apparatus)
First, the circuit board 20 is supported and positioned in the Z direction by the mounting plate 122. Specifically, the circuit board 20 is placed on the surface of the placement plate 122 on the Z1 direction side such that the board through-holes 211 at the four corners are aligned with the positioning pins 12221 near the four corners of the placement plate 122, respectively, and the four positioning pins 12221 are inserted into the four board through-holes 211, respectively.
Next, the mounting board 122 on which the circuit board 20 is mounted is supported by the mounting board support portion 123. Specifically, the mounting board 122 on which the circuit board 20 is mounted is supported by the surface of the mounting board support portion 123 on the Z1 direction side, and the mounting board 122 is positioned in the horizontal direction (i.e., the X direction and the Y direction) with respect to the mounting board support portion 123 by the mounting board positioning portion.
Next, the second driving unit 124 drives the placement plate support unit 123. Specifically, the second driving unit 124 drives the board support unit 123 in the Z1 direction so that the mounting board 122 on which the circuit board 20 is mounted reaches a predetermined position corresponding to the mounting board holding unit 125 in the Z direction.
Next, the four corners of the mounting plate 122 are held by the four mounting plate holding portions 125, and one mounting plate holding portion 125 (for example, the mounting plate holding portion 125 at the lower left corner in fig. 1) is fixed, and the remaining three mounting plate holding portions 125 are biased in a direction away from the fixed mounting plate holding portion 125 (for example, the mounting plate holding portion 125 at the lower left corner in fig. 1).
Then, the second driving unit 124 drives the mounting board support unit 123 in the Z2 direction so that the mounting board support unit 123 is separated in the Z direction from the mounting board 122 on which the circuit board 20 is mounted.
Then, the inspection jig 11 is driven by the first driving unit 121 to approach the circuit board 20. Specifically, the upper inspection jig 111 and the lower inspection jig 112 are driven by the first driving unit 121 to approach the circuit board 20 (for example, the upper inspection jig 111 and the lower inspection jig 112 are moved in the X direction, the Y direction, and the Z direction, respectively, as the case may be), and at least a part of the lower inspection jig 112 is engaged with the upper inspection jig 111 through the mounting plate through hole 1221 from the Z2 direction, thereby electrically inspecting the circuit board 20.
(main technical effects of the present embodiment)
According to the present embodiment, since the inspection device main body 12 includes the mounting plate 122, and the mounting plate 122 is used to support and position the circuit board 20 in the Z direction, even if the circuit board 20 is a narrow-side substrate having a narrow width at an edge portion where no wiring or the like is provided, the circuit board 20 is easily and stably held by supporting the circuit board 20 on the mounting plate 122, and the electrical inspection of the circuit board 20 is reliably performed.
Further, according to the present embodiment, in the electrical inspection of the circuit board 20, since the four corners of the mounting plate 122 are held by the four mounting plate holding portions 125, one mounting plate holding portion 125 is fixed, and the remaining three mounting plate holding portions 125 are biased in the direction away from the fixed mounting plate holding portion 125, the flatness of the mounting plate 122 is easily ensured, and the flatness of the circuit board 20 mounted on the mounting plate 122 is ensured, and thus the electrical inspection of the circuit board 20 is easily and accurately performed.
The present invention is described above by way of example with reference to the accompanying drawings, and it is to be understood that the specific implementations of the present invention are not limited to the above-described embodiments.
For example, in the above-described embodiment, the inspection jig 11 includes the upper inspection jig 111 and the lower inspection jig 112, but the present invention is not limited to this, and the inspection jig 11 may include only one of the upper inspection jig 111 and the lower inspection jig 112, and in this case, the mounting plate through hole 1221 may not be formed in the mounting plate 122.
In the above embodiment, the mounting plate 122 is a rectangular thin plate, and includes the mounting plate through hole 1221, the frame-shaped transition portion 1222 positioned on the outer peripheral side of the mounting plate through hole 1221, and the frame-shaped outer edge portion 1223 positioned on the outer peripheral side of the transition portion 1222, but the present invention is not limited thereto, and the specific configuration of the mounting plate 122 may be appropriately changed as necessary.
In the above embodiment, the circuit board 20 has the board through holes 211 at the four corners thereof, and the positioning pins 12221 are provided near the four corners of the mounting plate 122, respectively, in accordance with this, but the number and positions of the board through holes 211 and the positioning pins 12221 may be set as appropriate.
In the above embodiment, four mounting board holding portions 125 are provided, but the number of the mounting board holding portions 125 is not limited to this, and the number of the mounting board holding portions 125 may be appropriately changed as necessary, and in some cases, the mounting board holding portions 125 may be omitted.
In the above embodiment, the second driving unit 124 is provided for driving the mounting plate support 123 to approach or separate from the mounting plate 122, but the present invention is not limited to this, and the inspection apparatus main body 12 may not include the second driving unit 124, and in this case, the mounting plate 122 on which the circuit board 20 is mounted is carried to a preset position where the inspection of the inspection jig 11 can be performed while four corners of the mounting plate 122 are held by the mounting plate holding unit 125.
It should be understood that the present invention can freely combine the respective configurations and steps of the embodiments, or appropriately change or omit the respective configurations and steps of the embodiments within the scope thereof.
Claims (4)
1. An inspection apparatus for a narrow-sided substrate capable of electrically inspecting a plurality of wirings formed on a circuit substrate, comprising an inspection jig mounted on an inspection apparatus main body and an inspection apparatus main body,
the inspection apparatus main body includes:
a first driving part for driving the inspection jig to approach or separate from the circuit substrate;
a mounting plate for supporting and positioning the circuit substrate in a vertical direction;
a mounting plate support portion for supporting and positioning the mounting plate in a vertical direction;
a second driving part for driving the carrier plate supporting part to approach or separate from the carrier plate; and
a placement plate holding portion for holding and positioning the placement plate when the placement plate supporting portion is away from the placement plate,
the carrier plate includes an outer edge portion that does not overlap the circuit board in a vertical direction, the carrier plate holding portion being capable of clamping the outer edge portion,
the circuit substrate is a flexible substrate and the circuit substrate,
the carrying plate is a quadrilateral thin plate,
the four carrier board holding portions can clamp and horizontally stretch four corners of the carrier board,
the carrier board includes a substrate positioning portion for positioning the circuit substrate in a horizontal direction,
the substrate positioning portion includes positioning pins which are provided in vertical correspondence with substrate through-holes on the circuit substrate and are insertable into the substrate through-holes,
the positioning pins are provided at least two away from each other,
when the four mounting board holding portions clamp and horizontally stretch the four corners of the mounting board, the positioning pins are brought into contact with the board through-holes so that the circuit board can be horizontally stretched.
2. The inspection apparatus for narrow-sided substrates according to claim 1,
the inspection jig includes an upper inspection jig and a lower inspection jig,
the mounting board includes a mounting board through hole provided in a vertical direction corresponding to the wiring,
at least a part of the lower inspection jig can be electrically inspected with the upper inspection jig through the mounting plate through hole.
3. The inspection apparatus for narrow-sided substrates according to claim 1,
the carrying plate supporting portion includes a carrying plate positioning portion for positioning the carrying plate in a horizontal direction.
4. A method for inspecting a narrow-sided substrate, in which a plurality of wirings of a circuit substrate having the wirings formed thereon are electrically inspected by an inspection jig, comprising:
a substrate supporting and positioning step of supporting and positioning the circuit substrate in a vertical direction by a quadrangular mounting plate;
a carrier plate stretching step of holding four corners of the carrier plate by four carrier plate holding portions, fixing one of the carrier plate holding portions, and urging the remaining three carrier plate holding portions in a direction away from the fixed carrier plate holding portion; and
and a substrate inspection step of bringing the inspection jig close to the circuit substrate to electrically inspect the circuit substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910397229.6A CN110095708B (en) | 2019-05-14 | 2019-05-14 | Narrow-side substrate inspection device and narrow-side substrate inspection method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910397229.6A CN110095708B (en) | 2019-05-14 | 2019-05-14 | Narrow-side substrate inspection device and narrow-side substrate inspection method |
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| CN110095708A CN110095708A (en) | 2019-08-06 |
| CN110095708B true CN110095708B (en) | 2020-05-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2013164381A (en) * | 2012-02-13 | 2013-08-22 | Nidec-Read Corp | Alignment method of substrate inspection device, and substrate inspection device |
| JP2013191741A (en) * | 2012-03-14 | 2013-09-26 | Tokyo Electron Ltd | Probe device, and probe card attachment method of probe device |
| CN203851371U (en) * | 2014-05-12 | 2014-09-24 | 洛阳伟信电子科技有限公司 | Flexible circuit board clamp |
| JP6564345B2 (en) * | 2016-05-25 | 2019-08-21 | ヤマハファインテック株式会社 | Electrical inspection method and electrical inspection apparatus |
| CN205902216U (en) * | 2016-08-19 | 2017-01-18 | 河源西普电子有限公司 | Loading structure of flexible circuit board |
| CN206848310U (en) * | 2017-04-28 | 2018-01-05 | 日本电产理德机器装置(浙江)有限公司 | Gauging fixture and the check device for possessing the gauging fixture |
| CN207799025U (en) * | 2018-01-12 | 2018-08-31 | 日本电产理德机器装置(浙江)有限公司 | Electrical detection device |
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Address after: 314200 west side of Building 1, No. 550, Fanrong Road, Pinghu Economic Development Zone, Jiaxing City, Zhejiang Province Patentee after: NEDECO Precision Testing Equipment (Zhejiang) Co.,Ltd. Address before: 314200 West side of Building 1, No. 550, Fanrong Road, Pinghu Economic Development Zone, Jiaxing City, Zhejiang Province Patentee before: NIDEC-READ MACHINE APPARATUS (ZHEJIANG) CO.,LTD. |