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CN110058434A - Electrically-driven surface plasmon polariton light source structure - Google Patents

Electrically-driven surface plasmon polariton light source structure Download PDF

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Publication number
CN110058434A
CN110058434A CN201910344843.6A CN201910344843A CN110058434A CN 110058434 A CN110058434 A CN 110058434A CN 201910344843 A CN201910344843 A CN 201910344843A CN 110058434 A CN110058434 A CN 110058434A
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CN
China
Prior art keywords
metal film
light
source structure
light source
electric drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910344843.6A
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Chinese (zh)
Inventor
刘黎明
迟锋
张小文
易子川
张智
吴艳花
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Electronic Science and Technology of China Zhongshan Institute
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University of Electronic Science and Technology of China Zhongshan Institute
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Application filed by University of Electronic Science and Technology of China Zhongshan Institute filed Critical University of Electronic Science and Technology of China Zhongshan Institute
Priority to CN201910344843.6A priority Critical patent/CN110058434A/en
Publication of CN110058434A publication Critical patent/CN110058434A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/008Surface plasmon devices
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/017Structures with periodic or quasi periodic potential variation, e.g. superlattices, quantum wells

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

The invention relates to an electrically-driven surface plasmon light source structure, which comprises a multilayer structure consisting of a first metal film, a light-emitting layer and a second metal film; a luminescent layer is arranged above the first metal film, and a second metal film is arranged above the luminescent layer; the multilayer structure is provided with a perforation; this electric drive surface plasmon light source structure, simple structure not only is the characteristic that can full play surface plasmon, improves the light source structure of surface plasmon light source effect, moreover the light source structural protection film of having plated, have fine waterproof, dustproof effect, protection light source structure that can be fine for the light source structure can use in more complicated environment, and produced light propagates through perforation or the hole that sets up on the light source structure, is favorable to the diffusion of light, thereby has improved the homogeneity of light source luminous intensity.

Description

A kind of electric drive surface phasmon light-source structure
Technical field
The invention belongs to light sources technical fields, and in particular to a kind of electric drive surface phasmon light-source structure.
Background technique
Surface phasmon (SurfacePlasmons, SPs) is that the free electron coherent oscillation of metal medium interface is formed A kind of electromagnetic surface wave.Since SPs can realize the transmission and manipulation of light within the scope of sub-wavelength, and can be some special Generate the local optical electric field significantly increased in metal micro-nanostructure, thus it biosensor, surface-enhanced raman scattering enhancing and The various fields such as photon circuit suffer from important application.In recent years, noble metal nano particles and nanometer semiconductor structure are answered It closes and obtains the upsurge that optically resonance system due to it there are unique excellent properties different from compound monomer to cause research.Gold The enhancing electromagnetic field of local caused by the local surface phasmon of metal nano-particle can produce a series of nonlinear effect, Coupling with exciton in semiconductor-quantum-point can be between the production of energy transfer, new polariton light absorption, light emitting, nanostructure Life is regulated and controled, wherein the generation of new polariton shows surface phasmon and exciton carries out strong interaction, namely is entered Close coupling area.The surface phasmon of close coupling and exciton can reversibly AC energy, the period in femtosecond magnitude, this Quantum manipulation photon, single-photon light source and transistor, opening the light without threshold value lasing, ultrafast full light has with fields such as quantum information processing Important application.
Electromagnetic field is limited to the characteristic that sub-wavelength range and local electromagnetic field intensity greatly enhance by surface phasmon, is made Close coupling just can be obtained in the case where not needing closed resonator in room temperature.Surface phasmon and exciton are formed when close coupling Energy level splitting namely Rabi splitting can be observed in resonant frequency in new polariton.Most research concentrates on table now The close coupling of exciton in face phasmon and dyestuff or small molecule, and very with exciton close coupling research ground in semiconductor-quantum-point It is few.Semiconductor-quantum-point has adjustable photoelectric property height, absorption and fluorescence section height relative to dyestuff or small molecule, is not easy to send out The series of advantages such as raw fluorescent bleach will become the core material of New Generation Optical electrical part.
Summary of the invention
The object of the present invention is to provide a kind of electric drive surface phasmon light-source structures.
The electric drive surface phasmon light-source structure, including being made of the first metal film, luminescent layer, the second metal film Multilayered structure;It is provided with luminescent layer above first metal film, the second metal film is provided with above the luminescent layer;Institute It states and is provided with perforation on multilayered structure.
The lower surface that the perforation is located at the first metal film described in the first metal film, the second metal film is provided with protective film; The upper surface of second metal film is again provided with protective film.
The perforation is to be set to the second metal film, the hole on luminescent layer.
Described hole is located at the partial interior of the second metal film filled with the second transparent filling substance.
The lower surface of first metal film is provided with the second protective film;The upper surface of second metal film is equally arranged There is the second protective film.
The luminescent layer is quantum well layer.
The quantum well layer is made of GaAs or InGaAs.
The amount luminescent layer with a thickness of 50nm~80nm.
First metal film, the second metal film be by gold silver or copper at.
Beneficial effects of the present invention: this electric drive surface phasmon light-source structure provided by the invention, not only structure Simply, it is a kind of characteristic that can give full play to surface phasmon, improves the light-source structure of surface phasmon light source effect, And it is coated with protective film on the light-source structure, there is good waterproof and dustproof effect, can be good at protecting light source knot Structure enables light-source structure to use in more complex environment, and generated light is by being arranged in wearing on light-source structure Hole or hole are propagated, and the diffusion of light is conducive to, to improve the uniformity of light source luminescent intensity.
The present invention is described in further details below with reference to attached drawing.
Detailed description of the invention
Fig. 1 is electric drive surface phasmon light-source structure schematic diagram one.
Fig. 2 is electric drive surface phasmon light-source structure schematic diagram two.
Fig. 3 is electric drive surface phasmon light-source structure schematic diagram three.
Fig. 4 is electric drive surface phasmon light-source structure schematic diagram four.
In figure: 1, the first metal film;2, luminescent layer;3, the second metal film;4, it perforates;5, transparent filling substance;6, second thoroughly Bright filler;7, hole;8, protective film;9, the second protective film.
Specific embodiment
Reach the technical means and efficacy that predetermined purpose is taken for the present invention is further explained, below in conjunction with attached drawing and reality Example is applied to a specific embodiment of the invention, structure feature and its effect, detailed description are as follows.
Embodiment 1
A kind of electric drive surface phasmon light-source structure as shown in Figure 1 and Figure 2 is present embodiments provided, including by The multilayered structure that one metal film 1, luminescent layer 2, the second metal film 3 are constituted;The top of first metal film 1 is provided with luminescent layer 2, the top of the luminescent layer 2 is provided with the second metal film 3;Perforation 4 is provided on the multilayered structure;First metal film 1, Two metal films 3 are attached as the positive and negative anodes of electrode and external power supply, so that luminescent layer 2 is in circuit loop, meanwhile, the One metal film 1, the second metal film 3 form a Fabry-Perot interference cavity, when luminescent layer 2 generates light, Neng Gou Electromagnetism on second metal film 3 generates surface phasmon phenomenon, and surface phasmon can be enhanced in Fabry-Perot interference cavity Phenomenon, so that the light that luminescent layer issues is propagated in perforation 4, to form hole configurations micro-nano light source.
Further, the perforation 4 is located at the first metal film 1, the partial interior of the second metal film 3 is filled with transparent filling Object 5;The lower surface of first metal film 1 is provided with protective film 8;The upper surface of second metal film 3 is again provided with guarantor Cuticula 8;Closed electric drive surface phasmon light-source structure can be formed in this way, and there is good waterproof and dustproof effect, energy Enough protection light-source structures well, enable light-source structure to use in more complex environment, are able to extend light-source structure Service life.
Further, the luminescent layer 2 is quantum well layer.
The quantum well layer is made of the oxide that can be shone, such as GaAs or InGaAs are made.
The amount luminescent layer 5 with a thickness of 50nm~80nm, preferentially can choose 50nm, 55nm, 60nm, 70nm etc..
Further, first metal film 1, the second metal film 3 preferentially can choose with a thickness of 100nm~500nm 200nm, 300nm, 400nm, 500nm etc.;First metal film 1, the second metal film 3 are made of metal with good conductivity, More commonly used is gold, silver, copper, can select suitable thickness under the premise of saving cost.
Further, the transparent filling substance 5, protective film 8 may each be and be made of silica, and silica has very Good translucency, and it is non-conductive, it can play a protective role, avoid getting an electric shock.
The electric drive surface phasmon light-source structure, is not only simple in structure, be one kind can give full play to surface etc. from The characteristic of excimer, improves the light-source structure of surface phasmon light source effect, and protection is coated on the light-source structure Film 8 has good waterproof and dustproof effect, can be good at protecting light-source structure, enables light-source structure more complicated Environment in use, generated light passes through the perforation 4 that is arranged on light-source structure and is propagated, be conducive to the diffusion of light, from And improve the uniformity of light source luminescent.
Embodiment 2
On the basis of embodiment 1, electric drive surface phasmon light-source structure as shown in Figure 3, Figure 4, including by The multilayered structure that one metal film 1, luminescent layer 2, the second metal film 3 are constituted;The top of first metal film 1 is provided with luminescent layer 2, the top of the luminescent layer 2 is provided with the second metal film 3;Hole 7 on second metal film, luminescent layer 2;Hole 7 is not It being set on the first metal film 1, such first metal film 1 can be used as reflective layer, downward part just reflected, so that More light are projected from hole, improve the intensity of light source;First metal film 1, the second metal film 3 are as electrode and external power supply Positive and negative anodes are attached, so that luminescent layer 2 is in circuit loop, meanwhile, the first metal film 1, the second metal film 3 form one A Fabry-Perot interference cavity can generate surface etc. in the electromagnetism on the second metal film 3 when luminescent layer 2 generates light From excimer phenomenon, surface phasmon phenomenon is can be enhanced in Fabry-Perot interference cavity, so that the light that luminescent layer issues is in hole 7 It is inside propagated, to form hole configurations micro-nano light source.
Further, described hole 7 is located at the partial interior of the second metal film 3 filled with the second transparent filling substance 6;It is described The lower surface of first metal film 1 is provided with the second protective film 9;The upper surface of second metal film 3 is again provided with the second guarantor Cuticula 9;Closed electric drive surface phasmon light-source structure can be formed in this way, and there is good waterproof and dustproof effect, energy Enough protection light-source structures well, enable light-source structure to use in more complex environment, are able to extend light-source structure Service life.
Further, the luminescent layer 2 is quantum well layer.
Further, the quantum well layer is made of the oxide that can be shone, such as GaAs or InGaAs are made.
Further, the amount luminescent layer 5 with a thickness of 50nm~80nm, preferentially can choose 50nm, 55nm, 60nm, 70nm etc..
Further, first metal film 1, the second metal film 3 preferentially can choose with a thickness of 100nm~500nm 200nm, 300nm, 400nm, 500nm etc.;First metal film 1, the second metal film 3 are made of metal with good conductivity, More commonly used is gold, silver, copper, can select suitable thickness under the premise of saving cost.
Further, second transparent filling substance 6, the second protective film 9 may each be and be made of silica, titanium dioxide Silicon has good translucency, and non-conductive, can play a protective role, avoid getting an electric shock.
The electric drive surface phasmon light-source structure, is not only simple in structure, be one kind can give full play to surface etc. from The characteristic of excimer, improves the light-source structure of surface phasmon light source effect, and is coated with second on the light-source structure Protective film 9 has good waterproof and dustproof effect, can be good at protecting light-source structure, enables light-source structure more It is used in complex environment, generated light passes through the hole 7 being arranged on light-source structure and propagated, and is conducive to the expansion of light It dissipates, and the light of bottom can be reflected, to improve the intensity and luminous uniformity of light source luminescent.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention Protection scope.

Claims (10)

1. a kind of electric drive surface phasmon light-source structure, it is characterised in that: including by the first metal film (1), luminescent layer (2), the multilayered structure that the second metal film (3) is constituted;Luminescent layer (2), the hair are provided with above first metal film (1) The second metal film (3) are provided with above photosphere (2);Perforation (4) are provided on the multilayered structure.
2. a kind of electric drive surface phasmon light-source structure as described in claim 1, it is characterised in that: the perforation (4) Partial interior positioned at the first metal film (1), the second metal film (3) is filled with transparent filling substance (5).
3. a kind of electric drive surface phasmon light-source structure as described in claim 1, it is characterised in that: first metal The lower surface of film (1) is provided with protective film (8);The upper surface of second metal film (3) is again provided with protective film (8).
4. a kind of electric drive surface phasmon light-source structure as described in claim 1, it is characterised in that: the perforation (4) It is to be set to the second metal film (1), the hole (7) on luminescent layer (2).
5. a kind of electric drive surface phasmon light-source structure as claimed in claim 4, it is characterised in that: described hole (7) Partial interior positioned at the second metal film (3) is filled with the second transparent filling substance (6).
6. a kind of electric drive surface phasmon light-source structure as claimed in claim 4, it is characterised in that: first metal The lower surface of film (1) is provided with the second protective film (9);The upper surface of second metal film (3) is again provided with the second protection Film (9).
7. a kind of electric drive surface phasmon light-source structure as described in claim 1, it is characterised in that: the luminescent layer It (2) is quantum well layer.
8. a kind of electric drive surface phasmon light-source structure as claimed in claim 7, it is characterised in that: the quantum well layer It is made of GaAs or InGaAs.
9. a kind of electric drive surface phasmon light-source structure as claimed in claim 7, it is characterised in that: the amount luminescent layer (5) with a thickness of 50nm~80nm.
10. a kind of electric drive surface phasmon light-source structure as described in claim 1, it is characterised in that: first gold medal Belong to film (1), the second metal film (3) be by gold or silver or copper at.
CN201910344843.6A 2019-04-26 2019-04-26 Electrically-driven surface plasmon polariton light source structure Pending CN110058434A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0117606A1 (en) * 1983-01-28 1984-09-05 Xerox Corporation Collector for a LED array
JP2004172160A (en) * 2002-11-15 2004-06-17 Denso Corp Light emitting element
TW200802929A (en) * 2006-06-14 2008-01-01 Univ Nat Taiwan Light emitting device and method of manufacturing the same
CN103050591A (en) * 2011-10-14 2013-04-17 中国科学院物理研究所 Surface plasmon electro excitation source and manufacturing method thereof
CN103518096A (en) * 2011-02-16 2014-01-15 齐扎拉光系统有限责任公司 LED light module
CN103928579A (en) * 2014-04-22 2014-07-16 东南大学 an ultraviolet light emitting diode
CN104051587A (en) * 2014-06-19 2014-09-17 中国科学院半导体研究所 Preparation method of surface plasmon-enhanced GaN-based nanohole LED
US20150162560A1 (en) * 2013-12-06 2015-06-11 Industrial Technology Research Institute Light emitting device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0117606A1 (en) * 1983-01-28 1984-09-05 Xerox Corporation Collector for a LED array
JP2004172160A (en) * 2002-11-15 2004-06-17 Denso Corp Light emitting element
TW200802929A (en) * 2006-06-14 2008-01-01 Univ Nat Taiwan Light emitting device and method of manufacturing the same
CN103518096A (en) * 2011-02-16 2014-01-15 齐扎拉光系统有限责任公司 LED light module
CN103050591A (en) * 2011-10-14 2013-04-17 中国科学院物理研究所 Surface plasmon electro excitation source and manufacturing method thereof
US20150162560A1 (en) * 2013-12-06 2015-06-11 Industrial Technology Research Institute Light emitting device
CN103928579A (en) * 2014-04-22 2014-07-16 东南大学 an ultraviolet light emitting diode
CN104051587A (en) * 2014-06-19 2014-09-17 中国科学院半导体研究所 Preparation method of surface plasmon-enhanced GaN-based nanohole LED

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Application publication date: 20190726