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CN110006282B - thermal ground plane - Google Patents

thermal ground plane Download PDF

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CN110006282B
CN110006282B CN201810011928.8A CN201810011928A CN110006282B CN 110006282 B CN110006282 B CN 110006282B CN 201810011928 A CN201810011928 A CN 201810011928A CN 110006282 B CN110006282 B CN 110006282B
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ground plane
thermal ground
housing
gap
shell
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CN110006282A (en
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瑞恩·约翰·路易斯
杨荣贵
李云城
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University of Colorado System
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Kaiwen Thermal Engineering Technology Co
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

The application relates to the field of heat exchange and discloses a thermal ground plane. For example, thermal ground planes have vapor cores of variable thickness. The thermal ground plane includes a first enclosure and a second enclosure, wherein the second enclosure and the first enclosure are configured to enclose a working fluid. The thermal ground plane further includes an evaporator region disposed at least partially on at least one of the first enclosure and the second enclosure, a condenser region disposed at least partially on at least one of the first enclosure and the second enclosure, and a wicking structure disposed between the first enclosure and the second enclosure. The vapor core is at least partially defined by a gap between the first shell and the second shell, the gap having a thickness that is variable between the first shell and the second shell.

Description

热接地平面thermal ground plane

技术领域technical field

本申请涉及热交换领域,特别涉及一种热接地平面。The present application relates to the field of heat exchange, and in particular, to a thermal ground plane.

背景技术Background technique

热接地平面通常用于需要热接地平面厚度非常薄的紧密空间的设备,例如移动电子设备。另外,对于许多热接地平面,热导率可能与汽芯的厚度有关。例如,在45℃蒸汽的情况下,当间隙从200μm减小到100μm时,热接地层的有效热导率可以从30,000W/mK降低到7,000W/mK。当间隙从100μm减小到50μm时,热接地层的有效热导率可以进一步减小,例如从7000降低到2000W/mK。例如,50μm或100μm的间隙变化可能导致蒸气传输的热性能显著变化。热地面的厚度可能会产生其他的热量问题。在现有技术领域中存在一个挑战,即生产可用于厚度较薄但仍能提供有效热性能的受限空间的热接地平面。Thermal ground planes are often used in devices that require tight spaces with very thin thermal ground planes, such as mobile electronics. Also, for many thermal ground planes, thermal conductivity can be related to the thickness of the vapor core. For example, in the case of 45°C steam, when the gap is reduced from 200 μm to 100 μm, the effective thermal conductivity of the thermal ground plane can be reduced from 30,000 W/mK to 7,000 W/mK. When the gap is reduced from 100 μm to 50 μm, the effective thermal conductivity of the thermal ground plane can be further reduced, for example, from 7000 to 2000 W/mK. For example, a gap change of 50 μm or 100 μm can cause significant changes in the thermal properties of vapor transport. The thickness of the hot floor may create other thermal problems. A challenge in the prior art is to produce thermal ground planes that can be used in confined spaces with thin thicknesses and still provide efficient thermal performance.

发明内容SUMMARY OF THE INVENTION

本申请部分实施例提供了一种热接地平面,使得热接地平面内的汽芯具有可变厚度,从而可以优化热接地平面的蒸汽输送。Some embodiments of the present application provide a thermal ground plane, so that the steam core in the thermal ground plane has a variable thickness, so that the steam transport of the thermal ground plane can be optimized.

为解决上述技术问题,本申请部分实施例提供了一种热接地平面,包括第一壳体和第二壳体,其中,第二壳体和第一壳体被配置成封围工作流体。该热接地平面可进一步包括至少部分地设置在第一壳体和第二壳体中的至少一个上的蒸发器区,至少部分地设置在第一壳体和第二壳体中的至少一个上的冷凝器区,以及设置在第一壳体与第二壳体之间的芯吸结构。汽芯至少部分地由第一壳体与第二壳体之间的间隙限定,该间隙的厚度能够在第一壳体与第二壳体之间变化,汽芯用于在蒸发器区和冷凝器区之间进行蒸汽输送。In order to solve the above technical problem, some embodiments of the present application provide a thermal ground plane including a first casing and a second casing, wherein the second casing and the first casing are configured to enclose a working fluid. The thermal ground plane may further include an evaporator zone disposed at least partially on at least one of the first and second casings, at least partially disposed on at least one of the first and second casings the condenser area, and a wicking structure disposed between the first shell and the second shell. A vapor core is at least partially defined by a gap between the first shell and the second shell, the thickness of which can vary between the first shell and the second shell, the vapor core is used in the evaporator region and the condensation Steam transfer between reactor zones.

在一些实施例中,间隙可设计成为扩大汽芯间隙提供空间。In some embodiments, the gap may be designed to provide space for the expansion of the core gap.

在一些实施例中,与蒸发器区相邻的间隙的厚度小于平均间隙厚度。In some embodiments, the thickness of the gap adjacent to the evaporator zone is less than the average gap thickness.

在一些实施例中,与蒸发器区不相邻的间隙的厚度大于平均间隙厚度。In some embodiments, the thickness of the gaps not adjacent to the evaporator zone is greater than the average gap thickness.

在一些实施例中,第一壳体和第二壳体中的任意一个或两者包括拉伸和/或收缩扩大间隙的材料。In some embodiments, either or both of the first shell and the second shell include a material that stretches and/or shrinks to expand the gap.

在一些实施例中,热接地平面可包括设置在间隙内的多个隔离件。In some embodiments, the thermal ground plane may include a plurality of spacers disposed within the gap.

在一些实施例中,芯吸结构可与第一壳体层和/或第二壳体中的任意一个或两者接触。In some embodiments, the wicking structure may be in contact with either or both of the first shell layer and/or the second shell.

在一些实施例中,热接地平面可包括与芯吸结构和蒸发器区接触的附加芯吸结构。In some embodiments, the thermal ground plane may include additional wicking structures in contact with the wicking structures and the evaporator zone.

在一些实施例中,所述多个隔离件可包括由气密密封件封装的铜或聚合物。In some embodiments, the plurality of spacers may comprise copper or polymer encapsulated by a hermetic seal.

在一些实施例中,所述多个隔离件可包括弹簧。In some embodiments, the plurality of spacers may comprise springs.

在一些实施例中,所述多个隔离件可包括弹性材料。In some embodiments, the plurality of spacers may comprise an elastic material.

在一些实施例中,所述间隙的厚度可小于50μm。In some embodiments, the thickness of the gap may be less than 50 μm.

在一些实施例中,所述间隙可由大于环境压力的内部压力限定。In some embodiments, the gap may be defined by an internal pressure greater than ambient pressure.

本申请中的示例性实施方式不用于限定或定义本申请,而是为了提供帮助以理解本申请。其他实施方式在后面的具体实施方式中进行讨论。一个或多个实施方式的有益效果可以进一步通过阅读说明书或者实施一个或多个实施方式进行理解。The exemplary embodiments in the present application are not used to define or define the present application, but to provide assistance in understanding the present application. Other embodiments are discussed in the detailed description below. The beneficial effects of one or more embodiments can be further understood by reading the specification or implementing one or more embodiments.

附图说明Description of drawings

可结合具体实施例和相应的附图更好地理解本申请的特征、详情和效果。本申请一个或多个实施例通过与之对应的附图中的图片进行示例性说明,这些示例性说明并不构成对实施例的限定,附图中具有相同参考数字标号的元件表示为类似的元件,除非有特别申明,附图中的图不构成比例限制。The features, details and effects of the present application can be better understood with reference to the specific embodiments and the corresponding drawings. One or more embodiments of the present application are exemplified by the pictures in the corresponding drawings, and these exemplary descriptions do not constitute limitations on the embodiments, and elements with the same reference numerals in the drawings are denoted as similar Elements, unless otherwise stated, the figures in the accompanying drawings do not constitute a scale limitation.

图1是根据本申请以举例方式提供的一些实施例的热接地平面的示意图;1 is a schematic diagram of a thermal ground plane according to some embodiments provided by way of example herein;

图2是根据本申请以举例方式提供的一些实施例的0.25mm薄热接地平面的蒸汽输送的有效热导率示图;2 is a graph of the effective thermal conductivity of steam delivery for a thin 0.25 mm thermal ground plane according to some embodiments provided by way of example herein;

图3是根据本申请以举例方式提供的一些实施例的包括可变厚度的汽芯的热接地平面的侧视图热接地平面;3 is a side view thermal ground plane of a thermal ground plane including a vapor core of variable thickness in accordance with some embodiments provided by way of example herein;

图4A、图4B、图5A和图5B是根据本申请以举例方式提供的一些实施例制作具有可变厚度汽芯的热接地平面的步骤示意图;4A, 4B, 5A, and 5B are schematic diagrams of steps for fabricating a thermal ground plane with a variable thickness steam core according to some embodiments provided by way of example herein;

图6A和图6B是根据本申请以举例方式提供的一些实施例中多个隔离件中的第一部分具有扩展厚度和/或较低高度的热接地平面示意图;6A and 6B are schematic diagrams of a thermal ground plane with an extended thickness and/or a lower height of a first portion of a plurality of spacers in some embodiments provided by way of example in accordance with the present application;

图7A和图7B是根据本申请以举例方式提供的一些实施例中多个隔离件中的第一部分具有扩展厚度和/或较低高度以及褶皱或挤压轮廓的热接地平面示意图;7A and 7B are schematic diagrams of thermal ground planes of a first portion of a plurality of spacers having an expanded thickness and/or lower height and a corrugated or extruded profile in some embodiments provided by way of example in accordance with the present application;

图8是根据本申请以举例方式提供的一些实施例的热接地平面示意图;8 is a schematic diagram of a thermal ground plane according to some embodiments provided by way of example herein;

图9A、图9B、图10A和图10B是根据本申请以举例方式提供的一些实施例制作具有可变厚度汽芯的热接地平面的步骤示意图;Figures 9A, 9B, 10A and 10B are schematic diagrams of steps for fabricating a thermal ground plane with a variable thickness steam core according to some embodiments provided by way of example herein;

图11是根据本申请以举例方式提供的一些实施例中可包括设置于汽芯内的附加芯吸结构的热接地平面示意图,其中,热接地平面可放置在电路元件(如,可比其他电路元件生产更多热量的电路元件)附近的区域内芯吸结构;11 is a schematic diagram of a thermal ground plane that may include additional wicking structures disposed within a vapor core in some embodiments provided by way of example herein, wherein the thermal ground plane may be placed on circuit elements (eg, comparable to other circuit elements) wicking structures in regions near circuit components that produce more heat;

图12是根据本申请以举例方式提供的一些实施例中具有第一壳体的热接地平面示意图,其中,第一壳体具有可适应装置外壳轮廓的可变高度。在一些实施例中,可利用与装置外壳相关联的空隙来增强蒸汽输送;12 is a schematic diagram of a thermal ground plane in some embodiments provided by way of example in accordance with the present application with a first housing having a variable height that can accommodate the contours of the device housing. In some embodiments, voids associated with the device housing may be utilized to enhance vapor delivery;

图13是根据本申请以举例方式提供的一些实施例的具有可变高度的第一壳体和可变高度的第二壳体的热接地平面示意图;和13 is a schematic diagram of a thermal ground plane having a variable height first housing and a variable height second housing in accordance with some embodiments provided by way of example herein; and

图14是根据本申请以举例方式提供的一些实施例的具有可变高度的第一壳体和可变高度的第二壳体的热接地平面示意图。14 is a schematic diagram of a thermal ground plane with a first housing of variable height and a second housing of variable height in accordance with some embodiments provided by way of example herein.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚,下面将结合附图对本发明的各实施方式进行详细的阐述。然而,本领域的普通技术人员可以理解,在本发明各实施方式中,为了使读者更好地理解本申请而提出了许多技术细节。但是,即使没有这些技术细节和基于以下各实施方式的种种变化和修改,也可以实现本申请所要求保护的技术方案。In order to make the objectives, technical solutions and advantages of the present invention clearer, each embodiment of the present invention will be described in detail below with reference to the accompanying drawings. However, those of ordinary skill in the art can appreciate that, in the various embodiments of the present invention, many technical details are set forth in order for the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present application can be realized.

本申请公开了一种包括可变厚度汽芯的热接地平面。在一些实施例中,汽芯厚度可与电路元件和/或其中可放置热接地平面的装置外壳的三维形状相对应。本申请还公开了一种用于制造具有可变厚度汽芯的热接地平面的方法。The present application discloses a thermal ground plane including a variable thickness steam core. In some embodiments, the vapor core thickness may correspond to the three-dimensional shape of the circuit element and/or the device housing in which the thermal ground plane may be placed. The present application also discloses a method for fabricating a thermal ground plane with a variable thickness steam core.

图1是根据一些实施例的示例性热接地平面100的示意图。热接地平面100包括第一壳体105和第二壳体110,该第一壳体105和第二壳体110密封在一起以包围汽芯115和/或芯吸结构120。第一壳体105和第二壳体110还可以将工作流体封闭在汽芯和/或芯吸结构。热接地平面100可以设置在热源130和/或散热器140附近。热源130附近的热接地平面100的面积可以是蒸发器区域135和/或热接地平面100的面积在散热器140附近可以是冷凝器区域145。例如,工作流体可以从蒸发器区域135处或附近的热源130产生的热量中蒸发和/或蒸汽可以在缺少的热量的散热器140或冷凝器区域145附近冷凝。蒸汽可以经由汽芯115从蒸发器区域135流到冷凝器区域145。工作流体可以通过芯吸结构120从冷凝器区域145流动到蒸发器区域135。FIG. 1 is a schematic diagram of an exemplary thermal ground plane 100 in accordance with some embodiments. The thermal ground plane 100 includes a first shell 105 and a second shell 110 that are sealed together to enclose the vapor core 115 and/or the wicking structure 120 . The first housing 105 and the second housing 110 may also enclose the working fluid in a vapor core and/or a wicking structure. Thermal ground plane 100 may be disposed near heat source 130 and/or heat sink 140 . The area of the thermal ground plane 100 near the heat source 130 may be the evaporator area 135 and/or the area of the thermal ground plane 100 near the heat sink 140 may be the condenser area 145 . For example, the working fluid may evaporate from the heat generated by the heat source 130 at or near the evaporator region 135 and/or the vapor may condense near the radiator 140 or condenser region 145 where the heat is lacking. Steam may flow from evaporator region 135 to condenser region 145 via steam core 115 . The working fluid may flow from the condenser region 145 to the evaporator region 135 through the wicking structure 120 .

在一些实施例中,芯吸结构120可以沉积在第一壳体105和第二壳体110中的任一个或两者上。在一些实施例中,热接地平面(例如,芯吸结构120为其一部分)可以包括多个微结构。微结构可以包括例如沉积在多个微柱上的多个纳米线,纳米线阵列或者多个带有帽的微柱等。在一些实施例中,芯吸结构120可以理解为芯吸层或芯吸结构层。In some embodiments, the wicking structure 120 may be deposited on either or both of the first shell 105 and the second shell 110 . In some embodiments, the thermal ground plane (eg, of which wicking structure 120 is a part) may include multiple microstructures. Microstructures may include, for example, a plurality of nanowires deposited on a plurality of micropillars, an array of nanowires, or a plurality of capped micropillars, and the like. In some embodiments, the wicking structure 120 may be understood as a wicking layer or a wicking structure layer.

在一些实施例中,工作流体可以包括水或任何其他冷却剂,其可以例如通过一个或多个以下机构将热量从蒸发器区域135传递到冷凝器区域145:a)工作流体的蒸发通过吸收从热源130发散的热量来形成蒸汽;b)将工作流体从蒸发器区域135蒸发输送到冷凝器区域145;c)由散热器145提供的冷却,由蒸气冷凝成液体;和/或d)通过芯吸结构120产生的毛细管泵送压力将液体从冷凝器区域145返回到蒸发器区域135。In some embodiments, the working fluid may include water or any other coolant, which may transfer heat from the evaporator region 135 to the condenser region 145, eg, by one or more of the following mechanisms: a) Evaporation of the working fluid by absorption from heat dissipated by heat source 130 to form vapor; b) evaporative transport of the working fluid from evaporator region 135 to condenser region 145; c) cooling provided by radiator 145, condensing the vapor into a liquid; and/or d) passing through the wick The capillary pumping pressure created by the suction structure 120 returns the liquid from the condenser region 145 to the evaporator region 135 .

在一些实施例中,热接地平面的热性能可以取决于配置,但可以是铜的约3-50倍。In some embodiments, the thermal performance of the thermal ground plane may depend on the configuration, but may be about 3-50 times that of copper.

在一些实施例中,第一壳体105和/或第二壳体110和/或芯吸结构120可以包括铜,不锈钢,硅,聚合物,铜包覆的聚酰亚胺(Kapton)和/或柔性材料等。In some embodiments, the first shell 105 and/or the second shell 110 and/or the wicking structure 120 may comprise copper, stainless steel, silicon, polymers, copper clad polyimide (Kapton) and/or or flexible materials, etc.

在一些实施例中,热接地平面的运行与多个热阻有关联。例如,热阻可包括:a)蒸发器区通过热接地平面壳体的热阻(Re,壳体);b)通过蒸发器区内含水芯吸结构(如,铜丝网)的热阻(Re,丝网);c)通过汽芯从蒸发器输送蒸汽至冷凝器的热阻(Ra,蒸汽);d)通过冷凝器内含水芯吸结构的热阻(Rc,丝网);e)通过冷凝器区内的热接地平面壳体的热阻(Rc,壳体);f)沿含水芯吸结构从冷凝器到蒸发器的热传导热阻(Ra,丝网);和/或g)沿壳体从冷凝器到蒸发器的热传导热阻(Ra,壳体)。In some embodiments, the operation of the thermal ground plane is associated with a number of thermal resistances. For example, thermal resistances may include: a) thermal resistance in the evaporator region through a thermal ground plane shell (Re, shell); b) thermal resistance through an aqueous wicking structure (eg, copper wire mesh) in the evaporator region (Re, wire mesh); c) the thermal resistance (Ra, steam) for transporting steam from the evaporator to the condenser through the steam wick; d) the thermal resistance (Rc, wire mesh) through the water wicking structure in the condenser; e) the thermal resistance of the shell through the thermal ground plane within the condenser zone (Rc, shell); f) the thermal resistance of heat conduction from the condenser to the evaporator along the aqueous wicking structure (Ra, wire mesh); and/or g) Heat conduction thermal resistance from condenser to evaporator along the casing (Ra, casing).

对于厚的热接地平面(如,厚度约大于或等于1mm),汽芯的间隙(或高度)大/高。因此,蒸汽可通过汽芯传输,而流阻却不大和/或气相传导热阻(Ra,蒸汽)可忽略不计。然而,对于薄的热接地平面(如,厚度小于约1mm或厚度在0.25mm~0.35mm之间),汽芯的间隙(或高度)明显降低。在某些情况下,气相传导热阻(Ra,蒸汽)可能起主要作用。这种薄的热接地平面的总体热性能可取决于气相传导性能。For thick thermal ground planes (eg, thicknesses greater than or equal to about 1 mm), the gap (or height) of the core is large/high. Thus, steam can be transported through the steam core with little flow resistance and/or gas phase conduction thermal resistance (Ra, steam) is negligible. However, for thin thermal ground planes (eg, less than about 1 mm thick or between 0.25 mm and 0.35 mm thick), the gap (or height) of the core is significantly reduced. In some cases, vapor phase conduction thermal resistance (Ra, steam) may play a major role. The overall thermal performance of such a thin thermal ground plane may depend on the vapor phase conduction performance.

例如,气相传导的热性能可由气相传导的有效热导率来表示。如图2所示,这种气相传导的有效热导率Kvapor可能受汽芯的间隙δv和/或蒸汽温度T的影响。例如,当间隙δv从200um减小到100um时,温度T为45℃的蒸汽的有效热导率Kvapor可从30000W/mK降至7000W/mK。例如,当间隙δv从100um减小到50um时,有效导热率可进一步从7000W/mK降至2000W/mK。例如,间隙在50um~100um之间变化可导致气相传导的热性能发生明显变化。For example, the thermal performance of gas phase conduction can be represented by the effective thermal conductivity of gas phase conduction. As shown in FIG. 2, the effective thermal conductivity K vapor of this gas phase conduction may be affected by the gap δv of the vapor core and/or the vapor temperature T. For example, when the gap δv is reduced from 200um to 100um, the effective thermal conductivity K vapor of steam with a temperature T of 45°C can be reduced from 30000W/mK to 7000W/mK. For example, when the gap δv is reduced from 100um to 50um, the effective thermal conductivity can be further reduced from 7000W/mK to 2000W/mK. For example, changing the gap between 50um and 100um can result in significant changes in the thermal properties of gas phase conduction.

诸如智能手机、平板电脑、手表、可穿戴设备、笔记本电脑和/或可穿戴电子设备等移动系统的厚度非常重要。在设计阶段,必须认真考虑为每个设备预留50um或100um空间。本发明的一些实施例可引入汽芯厚度可变的热接地平面。在一些实施例中,热接地平面的可变厚度可与移动系统的空隙相匹配。The thickness of mobile systems such as smartphones, tablets, watches, wearables, laptops and/or wearable electronics is very important. During the design phase, careful consideration must be given to reserving 50um or 100um of space for each device. Some embodiments of the present invention may incorporate a thermal ground plane with variable core thickness. In some embodiments, the variable thickness of the thermal ground plane can be matched to the clearance of the mobile system.

几乎所有智能手机、平板电脑、笔记本电脑或可穿戴电子设备上都存在空隙。在一些实施例中,此类空隙可用于为热接地平面提供更厚汽芯,而这可用于提高气相传导。Air gaps are present on almost any smartphone, tablet, laptop or wearable electronic device. In some embodiments, such voids can be used to provide a thicker vapor core for the thermal ground plane, which can be used to improve gas phase conduction.

移动设备的电路板上不同高度元件形成多个空隙。此类空隙可用于提高热接地平面的气相传导,将芯片热量扩散至手机壳。移动系统内的其他区域也存在类似的空隙。Components of different heights form multiple voids on circuit boards of mobile devices. Such voids can be used to improve vapor conduction in the thermal ground plane, dissipating the heat from the chip to the phone case. Similar gaps exist in other areas within the mobile system.

此外,移动设备的壳体上具有可变间距。在一些实施例中,壳体上的空隙还可用于优化热接地平面的气相传导。Additionally, the mobile device has variable spacing on the housing. In some embodiments, voids on the housing may also be used to optimize vapor phase conduction to the thermal ground plane.

图1中示出了典型热接地平面,其为扁平状。在这种平板式结构中,汽芯可设计用于获得最佳性能。在一些实施例中,热接地平面的汽芯及其他材料层可有变化,并且可使用可利用的空隙。在大多数情况下,对于薄的热接地平面,从厚度的一边到另一边的温差变化小。因此,将芯吸结构直接贴在发热芯片上芯吸结构的作用可能不大。而不在芯片上贴附芯吸结构可使不同汽芯及其相关壳体的制造更为容易。A typical thermal ground plane is shown in Figure 1, which is flat. In this flat-plate configuration, the core can be designed for optimum performance. In some embodiments, the vapor core and other material layers of the thermal ground plane may vary, and available voids may be used. In most cases, with thin thermal ground planes, the temperature difference from one side of the thickness to the other is small. Therefore, directly attaching the wicking structure to the heat-generating chip may have little effect on the wicking structure. Not attaching the wicking structure to the chip allows for easier manufacture of the different vapor cores and their associated housings.

具有不同间隙的汽芯可采用冲压或其他成型工艺制成。而这种不同的间隙也可通过对汽芯加压和抵靠电路板使壳体变形而形成。在本实施例中,壳体可以是柔性材料和/或塑料。在成型工艺后,热接地平面的壳体可得到强化。Steam cores with different gaps can be made by stamping or other forming processes. And this different gap can also be created by pressurizing the steam core and deforming the casing against the circuit board. In this embodiment, the housing may be a flexible material and/or plastic. After the molding process, the shell of the thermal ground plane can be strengthened.

如图2所示,汽芯部分增加50um或100um可有效地增强热接地平面内的气相传导。该图还表明气相传导受蒸汽温度的强烈影响。因此,增强作用对远离发热芯片的部分影响显著。在这些部分中,蒸汽温度较低,因而导致气相传导不良。这些部分是指可从任何增强作用中受益的部分。As shown in Figure 2, adding 50um or 100um to the vapor core can effectively enhance the gas phase conduction in the thermal ground plane. The figure also shows that gas phase conduction is strongly influenced by steam temperature. Therefore, the enhancement effect has a significant effect on the part far from the heat generating chip. In these parts, the steam temperature is lower, resulting in poor gas phase conduction. These fractions refer to the fractions that can benefit from any enhancement.

图3是根据一些实施例包括可变厚度汽芯520的热接地平面500的侧视图。在一些实施例中,热接地平面500包括第一壳体510(如,第一壳体)和第二壳体535(如,第二壳体)。第一壳体510和第二壳体535可密封在一起,以封装热接地平面500的其他元件。热接地平面500可进一步包括芯吸结构515和汽芯520。芯吸结构515可耦合、贴附、接触和设置在第一壳体510上。在一些实施例中,芯吸结构515可由铜、不锈钢、钛、陶瓷或聚合物制成。在一些实施例中,若有需要,芯吸结构可包括或涂覆附加层,以防止其与流体发生反应。FIG. 3 is a side view of a thermal ground plane 500 including a variable thickness steam core 520 in accordance with some embodiments. In some embodiments, the thermal ground plane 500 includes a first housing 510 (eg, a first housing) and a second housing 535 (eg, a second housing). The first housing 510 and the second housing 535 may be sealed together to encapsulate other elements of the thermal ground plane 500 . Thermal ground plane 500 may further include wicking structure 515 and vapor core 520 . The wicking structure 515 may be coupled, attached, contacted and disposed on the first housing 510 . In some embodiments, the wicking structure 515 may be made of copper, stainless steel, titanium, ceramics, or polymers. In some embodiments, if desired, the wicking structure may include or be coated with additional layers to prevent it from reacting with fluids.

在一些实施例中,热接地平面500可设置在具有电路元件525和540的电路板530与装置外壳505之间。在该示例中,具有电路元件525和540的电路板530的高度可变。第二壳体535具有可变形状,以容纳形状可变的电路板530及电路元件525和540(如,处理器、存储器和集成电路等)。第二壳体535的可变形状可形成具有可变厚度的汽芯530。如图所示,无论汽芯520是在电路元件525,还是电路元件540附近,汽芯530的厚度都是可变化的。In some embodiments, thermal ground plane 500 may be disposed between circuit board 530 with circuit elements 525 and 540 and device housing 505 . In this example, the height of circuit board 530 with circuit elements 525 and 540 is variable. The second housing 535 has a variable shape to accommodate the variable shape circuit board 530 and circuit elements 525 and 540 (eg, processors, memories, integrated circuits, etc.). The variable shape of the second shell 535 may form the vapor core 530 having a variable thickness. As shown, the thickness of the steam core 530 can vary whether the steam core 520 is adjacent to the circuit element 525 or the circuit element 540 .

在一些实施例中,宽度可变的汽芯可增强热接地平面500内的气相传导。In some embodiments, a variable width vapor core may enhance vapor conduction within the thermal ground plane 500 .

在一些实施例中,蒸发器区可形成在电路元件525或540附近。在一些实施例中,蒸发器区可不形成在电路元件525或540附近。In some embodiments, an evaporator region may be formed near circuit elements 525 or 540 . In some embodiments, the evaporator region may not be formed near circuit elements 525 or 540 .

如图3所示,汽芯520在热接地平面与电路板空隙相对应的部分更厚。在一些实施例中,汽芯的不同部分的厚度可不同。在一些实施例中,热接地平面500的第二壳体535可具有波状外形、三维形状、变化形状和非平面形等。在一些实施例中,热接地平面500的芯吸结构515和/或第一壳体510可大致上呈扁平状。在一些实施例中,热接地平面500的第一壳体510和第二壳体535二者可具有波状外形、三维形状、变化形状和非平面形等。As shown in FIG. 3, the vapor core 520 is thicker at the portion of the thermal ground plane corresponding to the circuit board clearance. In some embodiments, the thickness of different portions of the vapor core may be different. In some embodiments, the second housing 535 of the thermal ground plane 500 may have a contoured shape, a three-dimensional shape, a varying shape, a non-planar shape, and the like. In some embodiments, the wicking structure 515 and/or the first housing 510 of the thermal ground plane 500 may be substantially flat. In some embodiments, both the first housing 510 and the second housing 535 of the thermal ground plane 500 may have contoured shapes, three-dimensional shapes, varying shapes, non-planar shapes, and the like.

在一些实施例中,蒸发器区可至少部分地设置在第一壳体510和/或第二壳体535上。例如,蒸发器区可设计在第一壳体510和/或第二壳体535内,使其在使用中位于热源附近,如,一个或多个电路元件525和540附近。In some embodiments, the evaporator zone may be disposed at least partially on the first housing 510 and/or the second housing 535 . For example, the evaporator region can be designed within the first housing 510 and/or the second housing 535 so that, in use, it is located near a heat source, such as one or more circuit elements 525 and 540 .

在一些实施例中,冷凝器区可至少部分地设置在第一壳体510和/或第二壳体535上。例如,冷凝器区可设计在第一壳体510和/或第二壳体535内,使其在使用中位于比热源更冷的区域附近。In some embodiments, a condenser zone may be disposed at least partially on first housing 510 and/or second housing 535 . For example, the condenser zone may be designed within the first housing 510 and/or the second housing 535 so that, in use, it is located near a region that is cooler than the heat source.

汽芯520包括2个较薄的汽芯区520A和520B,以及3个较厚汽芯区520C、520D和520E。在一些实施例中,汽芯区520A和520B的厚度小于汽芯平均厚度。在一些实施例中,汽芯区520C、520D和520E的厚度大于汽芯平均厚度。在一些实施例中,汽芯区520A和520B中的一个或多个的厚度约小于50μm~100μm。在一些实施例中,汽芯区520C、520D和520E中的一个或多个的厚度约大于50μm~100μm。The steam core 520 includes 2 thinner steam core regions 520A and 520B, and 3 thicker steam core regions 520C, 520D and 520E. In some embodiments, the thickness of the steam core regions 520A and 520B is less than the average thickness of the steam core. In some embodiments, the thickness of the steam core regions 520C, 520D and 520E is greater than the average thickness of the steam core. In some embodiments, the thickness of one or more of the vapor core regions 520A and 520B is less than about 50 μm to 100 μm. In some embodiments, the thickness of one or more of the vapor core regions 520C, 520D, and 520E is greater than about 50 μm to 100 μm.

图4A、图4B、图5A和图5B示出了根据一些实施例制作具有可变厚度汽芯的热接地平面的步骤。例如,在图4A中,多个隔离件615可设置或制造在第二壳体535上。多个隔离件615可通过电镀、金属蚀刻、聚合物沉积、光刻和气相沉积等方式设置于第二壳体535上。在一些实施例中,多个隔离件可气密密封或涂覆耐蚀性涂层。4A, 4B, 5A, and 5B illustrate the steps of making a thermal ground plane with a variable thickness steam core in accordance with some embodiments. For example, in FIG. 4A , a plurality of spacers 615 may be provided or fabricated on the second housing 535 . The plurality of spacers 615 may be disposed on the second casing 535 by means of electroplating, metal etching, polymer deposition, photolithography, and vapor deposition. In some embodiments, the plurality of spacers may be hermetically sealed or coated with a corrosion resistant coating.

例如,在图4B和图5A中,第二壳体535和多个隔离件615可压靠在成型基板605上,例如,使用成型顶板610。例如,成型基板605可具有电路元件525和540的电路板530的三维形式、形状或模型。在一些实施例中,成型基板605的形状可由电路板空隙限定。For example, in FIGS. 4B and 5A , the second housing 535 and the plurality of spacers 615 may be pressed against the molded base plate 605 , eg, using the molded top plate 610 . For example, molding substrate 605 may have a three-dimensional form, shape, or model of circuit board 530 of circuit elements 525 and 540 . In some embodiments, the shape of the molding substrate 605 may be defined by a circuit board void.

图5B示出了具有永久变形的第二壳体535和多个与其他层集成的隔离件615的热接地平面600。在该示例中,芯吸结构515接触、耦合、设置、生长在第一壳体510上。在该示例中,第一壳体510可以是扁平的。在该示例中,热接地平面600包括具有可变厚度的汽芯。在一些实施例中,可在水或其他冷却液填充入热接地平面600之前,排出热接地平面600内的气体。各种其他步骤可包括:将第一壳体510和第二壳体535密封在一起;填充热接地平面600;以及为热接地平面600涂覆一层或多层涂层等。在一些实施例中,正常运行期间,热接地平面600内的水蒸汽压力可低于大气压力。例如,较低的压力可能会导致热接地平面的壳体和/或其他层中的一个或两者被拉向与用于限定汽芯的隔离件相反的方向。在一些实施例中,热接地平面600的各成型步骤可利用一套固定装置通过成型步骤来完成。在一些实施例中,热接地平面600的各成型步骤可通过卷对卷(roll-to-roll)成型工艺完成。FIG. 5B shows a thermal ground plane 600 with a permanently deformed second housing 535 and a plurality of spacers 615 integrated with other layers. In this example, the wicking structure 515 is in contact with, coupled to, disposed on, grown on the first shell 510 . In this example, the first housing 510 may be flat. In this example, the thermal ground plane 600 includes a vapor core having a variable thickness. In some embodiments, the gas within the thermal ground plane 600 may be vented before the water or other cooling liquid fills the thermal ground plane 600 . Various other steps may include: sealing the first housing 510 and the second housing 535 together; filling the thermal ground plane 600; applying one or more coatings to the thermal ground plane 600, and the like. In some embodiments, during normal operation, the water vapor pressure within the thermal ground plane 600 may be below atmospheric pressure. For example, lower pressures may cause one or both of the shell and/or other layers of the thermal ground plane to be pulled in the opposite direction to the spacers used to define the vapor core. In some embodiments, each forming step of the thermal ground plane 600 may be accomplished through the forming step using a set of fixtures. In some embodiments, the various forming steps of the thermal ground plane 600 may be accomplished by a roll-to-roll forming process.

可用各种其他技术来形成多个隔离件615的高度。例如,多个隔离件615中的一些隔离件可用光刻技术蚀刻去除。在一些实施例中,隔离件的高度可分布不均,从而无需使隔离件变形。在一些实施例中,第二壳体535可根据需要的形状成型,然后在第二壳体535上形成隔离件。在一些实施例中,隔离件层可为连续网格层或多孔层。单层可由两个或多个子层组成。Various other techniques may be used to form the height of the plurality of spacers 615 . For example, some of the plurality of spacers 615 may be etched away using photolithographic techniques. In some embodiments, the height of the spacers may be unevenly distributed so that the spacers do not need to be deformed. In some embodiments, the second shell 535 may be molded according to the desired shape, and then spacers are formed on the second shell 535 . In some embodiments, the separator layer may be a continuous mesh layer or a porous layer. A single layer may consist of two or more sublayers.

在一些实施例中,多个隔离件615可包括铜或聚合物材料。在一些实施例中,多个隔离件可包括任何类型的金属。In some embodiments, the plurality of spacers 615 may comprise copper or polymer materials. In some embodiments, the plurality of spacers may comprise any type of metal.

图6A和图6B示出了多个隔离件815B的第一部分具有扩展厚度和/或较低高度的热接地平面800。热接地平面800可进一步具有多个隔离件815A的第二部分,其中,多个隔离件815A的第二部分具有扩展厚度和/或较高高度。多个隔离件815B的第一部分可以以第一厚度设置于汽芯520部分中,而多个隔离件815A的第二部分可以以第二厚度设置于汽芯520中。第一厚度可小于第二厚度。在一些实施例中,具有扩展厚度和/或较低高度的多个隔离件815B的第一部分可压缩扩展。图7A和图7B示出了多个隔离件915B的第一部分具有扩展厚度和/或较低高度以及可能由热接地平面900压缩形成的褶皱或挤压轮廓的热接地平面800。6A and 6B illustrate a first portion of the plurality of spacers 815B having an extended thickness and/or lower height thermal ground plane 800 . The thermal ground plane 800 may further have a second portion of the plurality of spacers 815A, wherein the second portion of the plurality of spacers 815A has an extended thickness and/or a higher height. A first portion of the plurality of spacers 815B may be disposed in the vapor core 520 portion with a first thickness, and a second portion of the plurality of spacers 815A may be disposed in the vapor core 520 with a second thickness. The first thickness may be smaller than the second thickness. In some embodiments, the first portion of the plurality of spacers 815B having an expanded thickness and/or lower height may be compressible. FIGS. 7A and 7B illustrate thermal ground plane 800 with a first portion of plurality of spacers 915B having an expanded thickness and/or lower height and possibly a corrugated or extruded profile formed by thermal ground plane 900 compression.

在一些实施例中,网格结构515可设置在多个隔离件815A、815B和/或915B上,和/或多个隔离件815A、815B和/或915B与第一壳体510之间。In some embodiments, the grid structure 515 may be disposed on the plurality of spacers 815A, 815B and/or 915B and/or between the plurality of spacers 815A, 815B and/or 915B and the first housing 510 .

图8示出了根据一些实施例的热接地平面1000。热接地平面1000内的网格结构515可设置在多个隔离件815A、815B和/或915B之间。在一些实施例中,多个隔离件815A、815B和/或915B可设置于第二壳体上。FIG. 8 shows a thermal ground plane 1000 in accordance with some embodiments. The grid structure 515 within the thermal ground plane 1000 may be disposed between the plurality of spacers 815A, 815B and/or 915B. In some embodiments, a plurality of spacers 815A, 815B and/or 915B may be provided on the second housing.

图9A、图9B、图10A和图10B示出了根据一些实施例制作具有可变厚度汽芯的热接地平面的步骤。在一些实施例中,多个隔离件715可包括具有类似弹簧机械性能的隔离件。例如,多个隔离件715可包括微弹簧、微型悬挂版、铜制微型挠曲件、其他金属材料或由气密密封件封装的弹性聚合物。在一些实施例中,多个隔离件715的机械刚度可足以使汽芯保持低真空。在一些实施例中,多个隔离件715和/或第一壳体510和/或第二壳体535的刚度不足,使汽芯520形状在移动系统外壳(如,壳体505)压力下随电路板530(和/或电路元件525和/或540)的构造成型。在具有空隙的区域,汽芯520可自然扩展。在一些实施例中,多个隔离件715的高度或尺寸可不均匀分布,因此,可设计多个隔离件715的变形量,以适应不同空隙。在一些实施例中,可将第一壳体510和/或第二壳体535形成所需形状之后,将多个隔离件715形成于壳体上。例如,多个隔离件715可以是连续网格层或多孔层。单层可由2个或多个子层组成。Figures 9A, 9B, 10A, and 10B illustrate the steps of making a thermal ground plane with a variable thickness steam core in accordance with some embodiments. In some embodiments, the plurality of spacers 715 may include spacers with spring-like mechanical properties. For example, the plurality of spacers 715 may include micro-springs, micro-suspension plates, copper micro-flexures, other metallic materials, or elastic polymers encapsulated by hermetic seals. In some embodiments, the mechanical stiffness of the plurality of spacers 715 may be sufficient to maintain a low vacuum in the steam core. In some embodiments, the stiffness of the plurality of spacers 715 and/or the first housing 510 and/or the second housing 535 is insufficient such that the shape of the vapor core 520 changes with the pressure of the mobile system housing (eg, housing 505 ) The construction of circuit board 530 (and/or circuit elements 525 and/or 540 ) is shaped. In areas with voids, the steam core 520 can naturally expand. In some embodiments, the heights or sizes of the plurality of spacers 715 may not be uniformly distributed, and therefore, the deformation amount of the plurality of spacers 715 may be designed to accommodate different gaps. In some embodiments, the plurality of spacers 715 may be formed on the housing after the first housing 510 and/or the second housing 535 are formed into a desired shape. For example, the plurality of spacers 715 may be continuous mesh layers or porous layers. A single layer may consist of 2 or more sublayers.

在一些实施例中,多个隔离件可以是有弹性的(如,类似于弹簧质量),允许热接地平面自调节和/或变形进入电路板间隙。在一些实施例中,汽芯520可包括多个高度可变的弹性隔离件。在一些实施例中,弹性或弹簧状隔离件和第一壳体510和/或第二壳体535可根据用于增强气相传导的空隙进行变形。在一些实施例中,可选用冷却剂在正压下运行向外推动第一壳体510和/或第二壳体535,从而使冷却剂本身被用作弹簧状材料。In some embodiments, the plurality of spacers may be resilient (eg, similar to spring masses), allowing the thermal ground plane to self-adjust and/or deform into the circuit board gap. In some embodiments, the vapor core 520 may include a plurality of elastic spacers of variable height. In some embodiments, the elastic or spring-like spacer and the first shell 510 and/or the second shell 535 can deform according to the voids used to enhance gas phase conduction. In some embodiments, the coolant may optionally be operated under positive pressure to push the first housing 510 and/or the second housing 535 outwardly so that the coolant itself acts as a spring-like material.

图11示出了可包括附加芯吸结构1320的热接地平面1300,芯吸结构设置于汽芯内,并且热接地平面可放置在电路元件(如,可比其他电路元件生产更多热量的电路元件)附近的区域内。例如,附加芯吸结构1320可用于减少一些电路元件产生的高热通量。在一些实施例中,附加芯吸结构1320可连接、接触和/或耦合至一个或多个附加芯吸结构515和/或第一壳体510。在一些实施例中,附加芯吸结构1320可由铜、不锈钢、钛、陶瓷或聚合物制成。在一些实施例中,若有需要,附加芯吸结构1320可包括或涂覆附加层,以防止其与流体发生反应。11 shows a thermal ground plane 1300 that may include additional wicking structures 1320 disposed within the vapor core, and the thermal ground plane may be placed on circuit elements (eg, circuit elements that can generate more heat than other circuit elements) ) in the nearby area. For example, additional wicking structures 1320 can be used to reduce the high heat flux generated by some circuit elements. In some embodiments, the additional wicking structures 1320 may be connected, contacted, and/or coupled to one or more of the additional wicking structures 515 and/or the first shell 510 . In some embodiments, the additional wicking structure 1320 may be made of copper, stainless steel, titanium, ceramics, or polymers. In some embodiments, the additional wicking structure 1320 may include or be coated with additional layers to prevent it from reacting with fluids, if desired.

在一些实施例中,例如,为了提供液态水保持连续蒸发,可将附加芯吸结构1320连接至芯吸结构515。发热芯片(如,电路元件)附近区域内的蒸汽温度高,并且相应的气相传导良好。这使得汽芯厚度可在该热区域内减少,而不会降低性能。In some embodiments, an additional wicking structure 1320 may be attached to the wicking structure 515, for example, to provide continuous evaporation of liquid water. The vapor temperature in the region near the heat generating chip (eg, circuit element) is high, and the corresponding gas phase conduction is good. This allows the steam core thickness to be reduced in this hot zone without degrading performance.

图12示出了具有第一壳体1410的热接地平面1400,其中,第一壳体1410具有可适应装置外壳505轮廓的可变高度。在一些实施例中,可利用与装置外壳505相关联的空隙来增强气相传导。每个系统的装置外壳505都是热管理的一个重要元件。例如,可将热量从电路元件525和540带入环境空气中。在一些实施例中,热管理的目的可以是将热量从发热电路元件525和540扩散至装置外壳505,由周围环境进行冷却。许多装置外壳(如,装置外壳505)可能并非是扁平的。例如,装置外壳可具有三维形状,以适应不同的设计需求。这就导致装置外壳可能存在各种空隙。根据一些实施例,热接地平面1400的汽芯820可具有可变厚度,形成用于适应装置外壳505的三维形状。在一些实施例中,芯吸结构815可设置在电路板530和/或电路元件525和/或540附近。FIG. 12 shows a thermal ground plane 1400 with a first housing 1410 having a variable height that can accommodate the contours of the device housing 505 . In some embodiments, voids associated with device housing 505 may be utilized to enhance gas phase conduction. The device enclosure 505 of each system is an important element of thermal management. For example, heat can be carried from circuit elements 525 and 540 into the ambient air. In some embodiments, the purpose of thermal management may be to dissipate heat from heat generating circuit elements 525 and 540 to device housing 505 for cooling by the surrounding environment. Many device housings (eg, device housing 505) may not be flat. For example, the device housing can have three-dimensional shapes to suit different design requirements. This results in various voids that may exist in the housing of the device. According to some embodiments, the vapor core 820 of the thermal ground plane 1400 may have a variable thickness formed to accommodate the three-dimensional shape of the device housing 505 . In some embodiments, the wicking structure 815 may be disposed near the circuit board 530 and/or the circuit elements 525 and/or 540 .

图13示出了根据一些实施例具有可变高度的第一壳体1410和可变高度的第二壳体1535的热接地平面1500。例如,第一壳体1410可具有适应装置外壳805的可变高度。例如,第二壳体1535可具有适应电路板530和/或电路元件525和540的可变高度。在该示例中,芯吸结构1515可接触、贴附、耦合、生长、设置在第二壳体1535上。13 illustrates a thermal ground plane 1500 having a variable height first housing 1410 and a variable height second housing 1535 in accordance with some embodiments. For example, the first housing 1410 may have a variable height that accommodates the device housing 805 . For example, the second housing 1535 may have a variable height that accommodates the circuit board 530 and/or circuit elements 525 and 540 . In this example, the wicking structure 1515 may contact, attach, couple, grow, and be disposed on the second housing 1535.

图14示出了根据一些实施例具有可变高度的第一壳体1410和可变高度的第二壳体1535的热接地平面1600。例如,第一壳体1410可具有适应装置外壳805的可变高度。例如,第二壳体1535可具有适应电路板530和/或电路元件525和540的可变高度。在该示例中,芯吸结构1615可接触、贴附、耦合、生长、设置在第一壳体1410上。14 illustrates a thermal ground plane 1600 having a variable height first housing 1410 and a variable height second housing 1535 in accordance with some embodiments. For example, the first housing 1410 may have a variable height that accommodates the device housing 805 . For example, the second housing 1535 may have a variable height that accommodates the circuit board 530 and/or circuit elements 525 and 540 . In this example, the wicking structure 1615 may contact, attach, couple, grow, and be disposed on the first housing 1410 .

在一些实施例中,装置外壳805和/或电路板530(和/或电路元件525和/或540)中的热接地平面1500和/或热接地平面1600空隙可用于增强气相传导。在一些实施例中,一个或多个芯吸结构可设置在第一壳体805和/或第二壳体835附近,其中的第一壳体805和/或第二壳体835设置在电路元件附近。In some embodiments, thermal ground plane 1500 and/or thermal ground plane 1600 voids in device housing 805 and/or circuit board 530 (and/or circuit elements 525 and/or 540 ) may be used to enhance vapor phase conduction. In some embodiments, one or more wicking structures may be positioned adjacent to the first housing 805 and/or the second housing 835, wherein the first housing 805 and/or the second housing 835 are positioned within the circuit elements nearby.

一些实施例包括具有一个或多个空隙的电路板,其中的空隙通过创建、组建及设计等形成,用于优化相关热接地平面内的气相传导。典型电路板的设计可通过结合考虑电气、机械、热和/或其他性能指标来获得优化。也可对空隙进行优化。例如,可将电路板设计成用于增强热接地平面相关汽芯内的气相传导。而空隙总是存在的,例如,可优化其布置,以增强气相传导。主要考虑因素还涉及尺寸,包括空隙的间隙和/或空隙内的蒸汽温度。蒸汽温度低时,气相传导效果可能不佳。在某些情况下,可能需要扩大远离热源(如,电路元件)区域内的汽芯大小。在这些区域中,蒸汽温度较低,为了实现有效传导,需增设间隙。Some embodiments include circuit boards having one or more voids, wherein the voids are created, fabricated, designed, etc. to optimize vapor phase conduction within an associated thermal ground plane. The design of a typical circuit board can be optimized by a combination of electrical, mechanical, thermal, and/or other performance metrics. The voids can also be optimized. For example, the circuit board may be designed to enhance vapor phase conduction within the vapor core associated with the thermal ground plane. While voids are always present, for example, their arrangement can be optimized to enhance gas phase conduction. Key considerations also relate to size, including the gap of the void and/or the temperature of the steam within the void. When the steam temperature is low, the gas phase conduction may not be effective. In some cases, it may be necessary to increase the size of the vapor core in areas away from heat sources (eg, circuit components). In these areas, the steam temperature is lower, and for efficient conduction, additional gaps are required.

一些实施例可进一步包括具有空隙的装置外壳,其中的空隙通过创建、布置、设计和组建等方式形成,用于优化气相传导。典型装置外壳的设计可结合考虑电气、机械、热及其他性能指标。也可对空隙进行优化。在一些实施例中,空隙可用于增强气相传导和热接地平面的相关热性能。例如,电路板和/或壳体(或外壳)可代表移动系统中的关键部件。空隙总是存在的,因此,可优化空隙布置,以增强气相传导和热接地平面的相关热性能。例如,主要考虑因素可包括尺寸,包括空隙的间隙和空隙内的蒸汽温度。Some embodiments may further include a device housing having voids, wherein the voids are created, arranged, designed, assembled, etc., for optimizing gas phase conduction. A typical device enclosure can be designed with a combination of electrical, mechanical, thermal, and other performance considerations. The voids can also be optimized. In some embodiments, voids may be used to enhance vapor phase conduction and related thermal performance of the thermal ground plane. For example, circuit boards and/or housings (or housings) may represent critical components in mobile systems. Voids are always present, so the void placement can be optimized to enhance the relative thermal performance of gas phase conduction and thermal ground planes. For example, primary considerations may include size, gaps including voids, and steam temperature within the voids.

“大致地”一词是指所指的值的5%或10%或制造公差范围内。The term "substantially" means 5% or 10% of the indicated value or within manufacturing tolerance.

公开了各种实施例。各实施例可部分地或全部地结合形成其他实施例。Various embodiments are disclosed. Various embodiments may be combined in part or in whole to form other embodiments.

本文中阐述了许多具体细节,以便提供对所要求保护的主题的透彻理解。然而,本领域技术人员应当理解,所要求保护的主题在没有这些具体细节的情况下也可实施。在其他情况下,没有对普通技术人员公知的方法、装置或系统进行详细描述,以避免混淆所要求保护的主题。Numerous specific details are set forth herein in order to provide a thorough understanding of the claimed subject matter. However, it will be understood by those skilled in the art that the claimed subject matter may be practiced without these specific details. In other instances, methods, devices, or systems that are well known to those of ordinary skill have not been described in detail so as not to obscure the claimed subject matter.

本文中公开的方法实施例可在计算装置运行中执行。上述示例中的单元块顺序可变化,例如,可将单元块重新排序、组合和/或分解为子块。某些单元块或进程可并行执行。The method embodiments disclosed herein may be performed while a computing device is running. The order of the unit blocks in the above examples may vary, eg, the unit blocks may be reordered, combined and/or decomposed into sub-blocks. Certain unit blocks or processes can be executed in parallel.

本文中所用的“适用于(adapted to)”或“配置成(configured to)”一词具有开放性和包含性意义,并非排除设备适用于或被配置成执行其他任务或步骤。此外,“基于(based on)”一词也具有开放性和包含性意义,事实上,“基于”一个或多个所引用的条件或值的工艺、步骤、计算或其他行动也可基于所引用条件或值之外的其他条件或值。本文中包括的标题、列表及编号仅仅是为了便于解释,而非旨在进行限制。The terms "adapted to" or "configured to" as used herein are intended to be open and inclusive and do not preclude the device being adapted or configured to perform other tasks or steps. In addition, the term "based on" also has an open and inclusive meaning, in fact, a process, step, calculation or other action "based on" one or more of the recited conditions or values may also be based on the recited condition or value. A condition or value other than a condition or value. The headings, lists, and numbers included herein are for convenience of explanation only and are not intended to be limiting.

虽然已经针对本主题的具体实施例进行了详细描述,但是,将会理解的是,本领域技术人员在获得对上述内容的理解后可容易地对此类实施例做变更、变化,并生成其等效物。因此,应当理解的是,描述本公开仅为示例之用,而并非旨在进行限制,并且不排除对本主题做修改、变化和/或添加,这对本领域普通技术人员而言是显而易见的。While specific embodiments of the present subject matter have been described in detail, it will be appreciated that such embodiments may be readily altered, varied, and generated by those skilled in the art after gaining an understanding of the foregoing. equivalent. Therefore, it is to be understood that the present disclosure is described by way of example only, and is not intended to be limiting, and does not preclude modifications, changes and/or additions to the subject matter that would be apparent to those of ordinary skill in the art.

本文中阐述了许多具体细节,以便提供对所要求保护的主题的透彻理解。然而,本领域技术人员将会理解,所要求保护的主题在没有这些具体细节的情况下也可实施。在其他情况下,没有对普通技术人员公知的方法、装置或系统做详细描述,以避免混淆所要求保护的主题。Numerous specific details are set forth herein in order to provide a thorough understanding of the claimed subject matter. However, one skilled in the art will understand that the claimed subject matter may be practiced without these specific details. In other instances, methods, devices, or systems that are well known to those of ordinary skill have not been described in detail so as not to obscure the claimed subject matter.

本文中公开的方法实施例可在计算装置运行中执行。上述示例中的单元块顺序可变化,例如,可将单元块重新排序、组合和/或分解为子块。某些单元块或进程可并行执行。The method embodiments disclosed herein may be performed while a computing device is running. The order of the unit blocks in the above examples may vary, eg, the unit blocks may be reordered, combined and/or decomposed into sub-blocks. Certain unit blocks or processes can be executed in parallel.

本申请的部分实施例还提供了如下例子。Some embodiments of the present application also provide the following examples.

例子1.一种热接地平面,包括:Example 1. A thermal ground plane comprising:

第一壳体;the first shell;

第二壳体,第二壳体和所述第一壳体配置成封围工作流体;a second housing, the second housing and the first housing are configured to enclose a working fluid;

蒸发器区,蒸发器区至少部分地设置在第一壳体和第二壳体中的至少一个上;an evaporator zone disposed at least partially on at least one of the first shell and the second shell;

冷凝器区,冷凝器区至少部分地设置在第一壳体和第二壳体中的至少一个上;a condenser zone disposed at least partially on at least one of the first shell and the second shell;

芯吸结构,该芯吸结构设置在第一壳体与第二壳体之间;a wicking structure disposed between the first shell and the second shell;

汽芯,该汽芯至少部分地由第一壳体与第二壳体之间的间隙限定,其中,间隙的厚度在第一壳体与第二壳体之间变化。A steam core that is at least partially defined by a gap between the first shell and the second shell, wherein the thickness of the gap varies between the first shell and the second shell.

例子2.根据例子1的热接地平面,其中,间隙设计成为扩大汽芯间隙提供空间。Example 2. The thermal ground plane of Example 1, wherein the gap is designed to provide room for an enlarged core gap.

例子3.根据例子1或2的热接地平面,其中,与蒸发器区相邻的间隙的厚度小于平均间隙厚度。Example 3. The thermal ground plane of example 1 or 2, wherein the thickness of the gap adjacent the evaporator region is less than the average gap thickness.

例子4.根据例子1、2或3的热接地平面,其中,与蒸发器区不相邻的间隙的厚度大于平均间隙厚度。Example 4. The thermal ground plane of Examples 1, 2, or 3, wherein the thickness of the gaps not adjacent to the evaporator region is greater than the average gap thickness.

例子5.根据例子1到4任一项的热接地平面,其中,第一壳体和第二壳体中的任意一个或二两者包括拉伸和/或收缩扩大间隙的材料。Example 5. The thermal ground plane of any of Examples 1 to 4, wherein either or both of the first and second housings comprise a material that stretches and/or shrinks to expand the gap.

例子6.根据例子1到5任一项的热接地平面,其中,芯吸结构层与第一壳体层和/或第二壳体中的任意一个或两者接触。Example 6. The thermal ground plane of any of Examples 1 to 5, wherein the wicking structure layer is in contact with either or both of the first shell layer and/or the second shell.

例子7.根据例子1到6任一项的热接地平面,其中,还包括与芯吸结构和蒸发器区接触的附加芯吸结构。Example 7. The thermal ground plane of any of Examples 1 to 6, further comprising additional wicking structures in contact with the wicking structures and the evaporator region.

例子8.根据例子1到7任一项的热接地平面,其中,间隙由高于环境压力的内部压力限定。Example 8. The thermal ground plane of any of Examples 1 to 7, wherein the gap is defined by an internal pressure above ambient pressure.

例子9.根据例子1至8中任意一项的热接地平面,其中,还包括设置在间隙内的多个隔离件。Example 9. The thermal ground plane of any one of Examples 1 to 8, further comprising a plurality of spacers disposed within the gap.

例子10.根据例子9的热接地平面,其中,多个隔离件包括由气密密封件封装的铜或聚合物。Example 10. The thermal ground plane of Example 9, wherein the plurality of spacers comprise copper or polymer encapsulated by a hermetic seal.

例子11.根据例子9的热接地平面,其中,多个隔离件可包括弹簧。Example 11. The thermal ground plane of Example 9, wherein the plurality of spacers can include springs.

例子12.根据例子9的热接地平面,其中,多个隔离件可包括弹性材料。Example 12. The thermal ground plane of Example 9, wherein the plurality of spacers can comprise a resilient material.

例子13.根据例子9的热接地平面,其中,间隙的厚度可小于50μm。Example 13. The thermal ground plane of Example 9, wherein the thickness of the gap may be less than 50 μm.

虽然已经针对本主题的具体实施例进行了详细描述,但是,将会理解的是,本领域技术人员在获得对上述内容的理解后可容易地对此类实施例做变更、变化,并生成其等效物。因此,应当理解的是,描述本公开仅为示例之用,而并非旨在进行限制,并且不排除对本主题做修改、变化和/或添加,这对本领域普通技术人员而言是显而易见的。While specific embodiments of the present subject matter have been described in detail, it will be appreciated that such embodiments may be readily altered, varied, and generated by those skilled in the art after gaining an understanding of the foregoing. equivalent. Therefore, it is to be understood that the present disclosure is described by way of example only, and is not intended to be limiting, and does not preclude modifications, changes and/or additions to the subject matter that would be apparent to those of ordinary skill in the art.

本领域的普通技术人员可以理解,上述各实施方式是实现本发明的具体实施例,而在实际应用中,可以在形式上和细节上对其作各种改变,而不偏离本发明的精神和范围。Those skilled in the art can understand that the above-mentioned embodiments are specific examples for realizing the present invention, and in practical applications, various changes in form and details can be made without departing from the spirit and the spirit of the present invention. scope.

Claims (10)

1. A thermal ground plane, comprising:
a first housing;
a second housing, the second housing and the first housing configured to enclose a working fluid;
an evaporator zone disposed at least partially on at least one of the first housing and the second housing;
a condenser zone at least partially disposed on at least one of the first shell and the second shell;
a wicking structure disposed between the first housing and the second housing;
a vapor core at least partially defined by a gap between the first and second housings, wherein a thickness of the gap varies between the first and second housings, the vapor core for vapor transport between the evaporator region and the condenser region.
2. The thermal ground plane according to claim 1, wherein the gap is designed to provide space for expanding the vapor core gap.
3. The thermal ground plane according to claim 1, wherein a thickness of a gap adjacent to the evaporator region is less than an average gap thickness.
4. The thermal ground plane according to claim 1, wherein a thickness of the gap not adjacent to the evaporator region is greater than an average gap thickness.
5. The thermal ground plane according to claim 1, wherein either or both of the first shell and the second shell comprise a material that stretches and/or contracts to expand a gap.
6. The thermal ground plane of claim 1, wherein the wicking structure layer is in contact with either or both of the first shell layer and/or the second shell.
7. The thermal ground plane according to claim 1, further comprising an additional wicking structure in contact with the wicking structure and the evaporator region.
8. The thermal ground plane according to claim 1, wherein the gap is defined by an internal pressure higher than an ambient pressure.
9. The thermal ground plane according to any one of claims 1 to 8, further comprising a plurality of spacers disposed within the gap.
10. The thermal ground plane according to claim 9, wherein the plurality of spacers comprise copper or a polymer encapsulated by a hermetic seal.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1443365A (en) * 2000-07-17 2003-09-17 因芬尼昂技术股份公司 Electronic chip component comprising integrated circuit and method for producing same
CN101545735A (en) * 2009-04-30 2009-09-30 上海交通大学 Micro-channel flat plate heat pipe with metal wire structure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6679318B2 (en) * 2002-01-19 2004-01-20 Allan P Bakke Light weight rigid flat heat pipe utilizing copper foil container laminated to heat treated aluminum plates for structural stability
KR101054092B1 (en) * 2009-09-25 2011-08-03 잘만테크 주식회사 Evaporator for Loop Heat Pipe System
WO2016044638A1 (en) * 2014-09-17 2016-03-24 The Regents Of The University Of Colorado, A Body Corporate Micropillar-enabled thermal ground plane
CN110470160A (en) * 2014-10-28 2019-11-19 科罗拉多州立大学董事会法人团体 Hot ground plane based on polymer, micro manufacturing
US10111363B2 (en) * 2014-12-04 2018-10-23 Microsoft Technology Licensing, Llc System for effectively transfering heat from electronic devices and method for forming the same
US9575523B2 (en) * 2015-01-22 2017-02-21 Microsoft Technology Licensing, Llc Device sandwich structured composite housing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1443365A (en) * 2000-07-17 2003-09-17 因芬尼昂技术股份公司 Electronic chip component comprising integrated circuit and method for producing same
CN101545735A (en) * 2009-04-30 2009-09-30 上海交通大学 Micro-channel flat plate heat pipe with metal wire structure

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