CN109991731A - Optical path changing device and optical interference system - Google Patents
Optical path changing device and optical interference system Download PDFInfo
- Publication number
- CN109991731A CN109991731A CN201910290015.9A CN201910290015A CN109991731A CN 109991731 A CN109991731 A CN 109991731A CN 201910290015 A CN201910290015 A CN 201910290015A CN 109991731 A CN109991731 A CN 109991731A
- Authority
- CN
- China
- Prior art keywords
- light
- optical
- medium body
- dielectric
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 118
- 230000008859 change Effects 0.000 claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims abstract description 6
- 230000007246 mechanism Effects 0.000 claims description 9
- 210000002706 plastid Anatomy 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 14
- 238000005259 measurement Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009615 fourier-transform spectroscopy Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
本发明公开了一种光程改变装置,包括介质体和光学面,介质体包括两者相对且相互平行的成对表面,入射光从成对表面的任意一表面进入介质体,从成对表面的另一表面透射出,透射光的传播方向与入射光的传播方向一致且透射光照射到光学面,介质体可旋转而使入射光进入介质体的入射角改变,光学面用于调整光的传播方向。本光程改变装置应用在光学系统中用于改变光程,能够克服现有推扫式的改变光程方法对无倾斜性要求高,会产生较高的实现代价的问题。本发明还公开一种光学干涉系统。
The invention discloses an optical path changing device, comprising a medium body and an optical surface, the medium body includes a pair of surfaces opposite and parallel to each other, and incident light enters the medium body from any surface of the paired surfaces, The transmission direction of the transmitted light is consistent with the transmission direction of the incident light, and the transmitted light is irradiated to the optical surface, the medium body can be rotated to change the incident angle of the incident light entering the medium body, and the optical surface is used to adjust the light propagation direction. The optical path changing device is applied in an optical system to change the optical path, and can overcome the problem that the existing push-broom method for changing the optical path has high requirements for no inclination and a high implementation cost. The invention also discloses an optical interference system.
Description
技术领域technical field
本发明涉及光学应用技术领域,特别是涉及一种光程改变装置。本发明还涉及一种光学干涉系统。The present invention relates to the technical field of optical applications, in particular to an optical path changing device. The invention also relates to an optical interference system.
背景技术Background technique
近年来,随着光学技术在测量领域的应用逐步深入,以相干光学为理论基础的应用日益增多,例如长度测量、振动测量、傅里叶变换光谱测量等。应用相干光学理论的测量技术都需要通过改变部分光路的光程,实现改变测量系统的光程差,使得根据光程差变化并通过后续处理方法,获得目标信息。In recent years, with the gradual deepening of the application of optical technology in the field of measurement, the applications based on coherent optics are increasing day by day, such as length measurement, vibration measurement, Fourier transform spectroscopy measurement, etc. Measurement techniques using coherent optics theory all need to change the optical path difference of the measurement system by changing the optical path length of part of the optical path, so that the target information can be obtained according to the change of the optical path difference and through subsequent processing methods.
现有技术中,采用的改变光程方法主要是推扫式,例如在时间调制型傅里叶变换光谱调制技术中,需要安置一面沿直线平移运动的反射面,又如在长度变化测量或者振动测量中,将被测物体随时间沿直线平移运动进而造成光程的改变。但是,这种将反射面沿直线平移运动的方式,要求反射面无倾斜地沿直线平移运动,因为如果反射面发生倾斜,会导致参考光波前和测量光波前失去平行关系,产生交角,将引起干涉信号光光强的波动,采样偏离真值,会导致测量结果发生偏差,因此该方式对无倾斜性要求高,进而产生较高的实现代价。In the prior art, the method used to change the optical path is mainly a push-broom type. For example, in the time-modulated Fourier transform spectral modulation technology, it is necessary to install a reflective surface that moves in translation along a straight line. During the measurement, the object to be measured is moved along a straight line in translation over time to cause the change of the optical path. However, this method of translating the reflective surface along a straight line requires the reflective surface to translate along a straight line without tilt, because if the reflective surface is tilted, the reference light wavefront and the measurement light wavefront will lose the parallel relationship, resulting in an intersection angle, which will cause The fluctuation of the light intensity of the interference signal and the deviation of the sampling from the true value will lead to the deviation of the measurement result. Therefore, this method has high requirements for no inclination, which in turn results in a high implementation cost.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种光程改变装置,应用在光学系统中用于改变光程,能够克服现有推扫式的改变光程方法对无倾斜性要求高,会产生较高的实现代价的问题。本发明还提供一种光学干涉系统。The purpose of the present invention is to provide an optical path changing device, which can be used in an optical system to change the optical path, which can overcome the high requirement of no inclination in the existing push-broom method of changing the optical path, which will result in a high realization cost. The problem. The present invention also provides an optical interference system.
为实现上述目的,本发明提供如下技术方案:To achieve the above object, the present invention provides the following technical solutions:
一种光程改变装置,包括介质体和光学面,所述介质体包括两者相对且相互平行的成对表面,入射光从所述成对表面的任意一表面进入所述介质体,从所述成对表面的另一表面透射出,透射光的传播方向与入射光的传播方向一致且透射光照射到所述光学面,所述介质体可旋转而使入射光进入所述介质体的入射角改变,所述光学面用于调整光的传播方向。An optical path changing device includes a medium body and an optical surface, the medium body includes a pair of surfaces opposite to each other and parallel to each other, and incident light enters the medium body from any surface of the pair of surfaces, The other surface of the paired surface transmits, the propagation direction of the transmitted light is consistent with the propagation direction of the incident light, and the transmitted light irradiates the optical surface, the medium body can be rotated so that the incident light enters the incident light of the medium body The angle is changed, and the optical surface is used to adjust the propagation direction of the light.
优选的,成对的两个表面都为平面。Preferably, both surfaces of the pair are planar.
优选的,所述介质体包括一组或者多组成对表面。Preferably, the medium body includes one or more pairs of surfaces.
优选的,所述介质体的形状为对称的几何形状,所述介质体的形状为正方体、长方体或者六面柱体。Preferably, the shape of the medium body is a symmetrical geometric shape, and the shape of the medium body is a cube, a rectangular parallelepiped or a hexahedral cylinder.
优选的,所述光学面为反射面、透射面或者半反半透面。Preferably, the optical surface is a reflective surface, a transmissive surface or a transflective surface.
优选的,所述光学面为反射面,从所述成对表面的另一表面透射出的光垂直照射到所述光学面,所述光学面用于将光反射回所述介质体使光原路返回。Preferably, the optical surface is a reflective surface, the light transmitted from the other surface of the pair of surfaces is vertically irradiated to the optical surface, and the optical surface is used to reflect the light back to the medium body to cause the light source road back.
优选的,还包括与所述介质体连接的用于驱动所述介质体旋转的驱动机构。Preferably, it also includes a driving mechanism connected with the medium body for driving the medium body to rotate.
优选的,所述驱动机构的转轴与所述介质体的旋转中心轴平行。Preferably, the rotation axis of the driving mechanism is parallel to the rotation center axis of the medium body.
优选的,所述光程改变装置的谱段涵盖紫外光波段、可见光波段和红外光波段。Preferably, the spectral band of the optical path changing device covers the ultraviolet light band, the visible light band and the infrared light band.
一种光学干涉系统,包括以上所述的光程改变装置。An optical interference system includes the above-mentioned optical path changing device.
由上述技术方案可知,本发明所提供的光程改变装置包括介质体和光学面,介质体包括两者相对且相互平行的成对表面,入射光从成对表面的任意一表面进入介质体,从成对表面的另一表面透射出,透射光的传播方向与入射光的传播方向一致并且透射光照射到光学面,光学面用于调整光的传播方向。通过旋转介质体能够使得入射光进入介质体的入射角改变,能够使光在介质体内的传播路程改变而使在介质体内的光程改变,从而实现改变光程。本光程改变装置依靠光学介质体和光学面这些光学零件的加工精度和装调精度来保证参考光波前和测量光波前的平行,光学零件的振动对波前交角的影响很微弱,因此与现有推扫式的改变光程方法相比,能够克服现有推扫式的改变光程方法对无倾斜性要求高,会产生较高的实现代价的问题。It can be seen from the above technical solutions that the optical path changing device provided by the present invention includes a medium body and an optical surface, the medium body includes a pair of surfaces that are opposite and parallel to each other, and the incident light enters the medium body from any surface of the paired surfaces, Transmitting from the other surface of the paired surfaces, the propagation direction of the transmitted light coincides with the propagation direction of the incident light and the transmitted light is irradiated to the optical surface, which is used to adjust the propagation direction of the light. By rotating the medium body, the incident angle of the incident light entering the medium body can be changed, the propagation path of the light in the medium body can be changed, and the optical path in the medium body can be changed, thereby realizing the change of the optical path. The optical path changing device relies on the machining accuracy and adjustment accuracy of the optical parts such as the optical medium body and the optical surface to ensure the parallelism of the reference light wavefront and the measurement light wavefront. Compared with the push-broom method of changing the optical length, it can overcome the problem that the existing push-broom method of changing the optical length has a high requirement for no inclination and will result in a higher implementation cost.
本发明提供的一种光学干涉系统,能够达到上述有益效果。The optical interference system provided by the present invention can achieve the above beneficial effects.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings without creative efforts.
图1为本发明实施例提供的一种光程改变装置的示意图。FIG. 1 is a schematic diagram of an optical path changing device according to an embodiment of the present invention.
具体实施方式Detailed ways
为了使本技术领域的人员更好地理解本发明中的技术方案,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本发明保护的范围。In order to make those skilled in the art better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described The embodiments are only some of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
本发明实施例提供一种光程改变装置,包括介质体和光学面,所述介质体包括两者相对且相互平行的成对表面,入射光从所述成对表面的任意一表面进入所述介质体,从所述成对表面的另一表面透射出,透射光的传播方向与入射光的传播方向一致且透射光照射到所述光学面,所述介质体可旋转而使入射光进入所述介质体的入射角改变,所述光学面用于调整光的传播方向。An embodiment of the present invention provides an optical path changing device, including a medium body and an optical surface, the medium body includes a pair of surfaces facing each other and parallel to each other, and incident light enters the pair of surfaces from any surface of the pair of surfaces. The dielectric body is transmitted from the other surface of the paired surfaces, the propagation direction of the transmitted light is consistent with the propagation direction of the incident light, and the transmitted light is irradiated on the optical surface, and the dielectric body can be rotated to allow the incident light to enter the optical surface. The incident angle of the medium body is changed, and the optical surface is used to adjust the propagation direction of light.
所述介质体由透光性的光学介质制成,其包括的成对的两个表面相对并且相互平行,满足当入射光从其中任意一表面进入介质体,光能够从另一表面透射出,并且透射光的传播方向与入射光的传播方向一致,使得光透过介质体后传播方向不改变。The medium body is made of a light-transmitting optical medium, and the two pairs of surfaces it includes are opposite and parallel to each other, so that when incident light enters the medium body from any one of the surfaces, the light can be transmitted from the other surface, And the propagation direction of the transmitted light is consistent with the propagation direction of the incident light, so that the propagation direction of the light does not change after passing through the medium body.
所述介质体可以旋转,通过介质体旋转能够使入射光进入介质体的入射角改变,入射光进入介质体的入射角是指入射光线与入射光照射到的介质体表面的法线的夹角。The medium body can be rotated, and the rotation of the medium body can change the incident angle of the incident light entering the medium body. The incident angle of the incident light entering the medium body refers to the angle between the incident light and the normal line of the surface of the medium body on which the incident light irradiates. .
本光程改变装置通过旋转介质体,能够使得入射光进入介质体的入射角改变,能够使光在介质体内的传播路程改变而使在介质体内的光程改变,从而实现改变光程。本光程改变装置应用在光学系统中,主要依靠光学介质体和光学面这些光学零件的加工精度和装调精度来保证参考光波前和测量光波前的平行,光学零件的振动对波前交角的影响很微弱,因此与现有推扫式的改变光程方法相比,能够克服现有推扫式的改变光程方法对无倾斜性要求高,会产生较高的实现代价的问题。By rotating the medium body, the optical path changing device can change the incident angle of the incident light entering the medium body, and can change the propagation path of the light in the medium body and the optical path in the medium body, so as to realize the change of the optical path. The optical path changing device is applied in the optical system, mainly relying on the machining accuracy and adjustment accuracy of the optical parts such as the optical medium body and the optical surface to ensure the parallelism of the reference light wavefront and the measurement light wavefront, and the influence of the vibration of the optical parts on the wavefront intersection angle It is very weak, so compared with the existing push-broom method of changing the optical length, it can overcome the problem that the existing push-broom method of changing the optical length has a high requirement for no inclination, which will result in a higher implementation cost.
下面结合具体实施方式和附图对本光程改变装置进行详细说明。The optical path changing device will be described in detail below with reference to the specific embodiments and the accompanying drawings.
本实施例光程改变装置包括介质体和光学面,其中介质体包括两者相对且相互平行的成对表面。The optical path changing device of this embodiment includes a medium body and an optical surface, wherein the medium body includes a pair of surfaces facing each other and parallel to each other.
介质体上成对的两个表面可以都是曲面,成对的两个曲面需要满足相对且相互平行,能够使入射光从其中任意一表面进入介质体,光能够从另一表面透射出,并且透射光的传播方向与入射光的传播方向一致,并且满足介质体在旋转时入射光进入介质体的入射角改变,这样保证在介质体旋转时光在介质体内的传播路程改变而使得在介质体内的光程改变。The two surfaces in the pair on the medium body can be curved surfaces, and the two curved surfaces in the pair need to be opposite and parallel to each other, so that the incident light can enter the medium body from either surface, and the light can be transmitted from the other surface, and The propagation direction of the transmitted light is consistent with the propagation direction of the incident light, and it satisfies the change of the incident angle of the incident light entering the medium body when the medium body rotates, so as to ensure that the propagation path of the light in the medium body changes when the medium body rotates, so that the light in the medium body changes. Optical path changes.
优选的,介质体上成对的两个表面可以都是平面,要求满足当入射光从其中任意一表面进入介质体,光能够从另一表面透射出,并且透射光的传播方向与入射光的传播方向一致,并且满足介质体在旋转时入射光进入介质体的入射角改变,以使得在介质体旋转时光在介质体内的传播路程改变,从而使得在介质体内的光程改变。Preferably, the two pairs of surfaces on the medium body can be both planes, and it is required to satisfy the requirement that when incident light enters the medium body from any one of the surfaces, the light can be transmitted from the other surface, and the propagation direction of the transmitted light is the same as that of the incident light. The propagation direction is the same, and the incident angle of the incident light entering the medium body changes when the medium body rotates, so that the propagation path of the light in the medium body changes when the medium body rotates, so that the optical path in the medium body changes.
在具体实施时,介质体可以包括一组或者多组成对表面,可以结合介质体的形状和应用需求进行设置。可选的,介质体的形状可以是正方体、长方体或者六面柱体等具有对称平行表面的几何体结构,但不限于此,介质体也可以是其它具有对称平行表面的几何体结构,也都在本发明保护范围内。During specific implementation, the medium body may include one or more pairs of surfaces, which may be set in combination with the shape of the medium body and application requirements. Optionally, the shape of the dielectric body may be a geometric structure with symmetrical parallel surfaces such as a cube, a cuboid, or a hexahedral cylinder, but is not limited to this, and the dielectric body may also be other geometric structures with symmetrical parallel surfaces, which are also described herein. within the scope of protection of the invention.
请参考图1,图1为本发明一种实施例提供的光程改变装置的示意图,本实施例中,介质体10包括两组成对表面,第一组成对表面为表面101和表面103,第二组成对表面为表面102和表面104,各个表面都为平面。参考图1展示的光透过介质体的光路图,可看出,入射光从介质体的表面101进入介质体10,光从介质体的表面103透射出,透射光的传播方向与入射光的传播方向一致,透射光照射到光学面11。将本光程改变装置设置在光学系统的预设光路中,通过旋转介质体10,能够改变参考平面13和光学面11之间的光程。Please refer to FIG. 1 . FIG. 1 is a schematic diagram of an optical path changing device according to an embodiment of the present invention. In this embodiment, the dielectric body 10 includes two pairs of surfaces. The first pair of surfaces is a surface 101 and a surface 103 . The two pairs of surfaces are surface 102 and surface 104, each of which is flat. Referring to the optical path diagram of light passing through the medium shown in FIG. 1, it can be seen that the incident light enters the medium 10 from the surface 101 of the medium, and the light is transmitted from the surface 103 of the medium. The propagation directions are the same, and the transmitted light is irradiated to the optical surface 11 . The optical path changing device is arranged in the preset optical path of the optical system, and the optical path between the reference plane 13 and the optical plane 11 can be changed by rotating the medium body 10 .
优选的,本光程改变装置还可包括与所述介质体连接的用于驱动所述介质体旋转的驱动机构,在应用时通过驱动机构驱动介质体旋转,使光在介质体内的光程改变,进而改变光学系统的光程。请参考图1所示,优选的,可设置驱动机构12的转轴与所述介质体10的旋转中心轴100平行,这样通过驱动机构能够较好地驱动介质体旋转。在具体实施时,驱动机构可以采用传动带、齿轮或者电磁驱动部件。Preferably, the optical path changing device may further include a driving mechanism connected with the medium body for driving the medium body to rotate, and the driving mechanism drives the medium body to rotate during application, so that the optical path of light in the medium body changes. , thereby changing the optical path of the optical system. Referring to FIG. 1 , preferably, the rotating shaft of the driving mechanism 12 can be set to be parallel to the rotation center axis 100 of the medium body 10 , so that the medium body can be better driven to rotate by the driving mechanism. In a specific implementation, the driving mechanism may adopt a transmission belt, a gear or an electromagnetic driving component.
本光程改变装置中,由介质体透射出的透射光照射到光学面,光学面用于调整光的传播方向。光学面可以是反射面、可设置介质体透射出的光垂直照射到光学面,即从介质体成对表面的另一表面透射出的光垂直照射到光学面,光学面将光反射回所述介质体使光原路返回。光学面也可以是透射面或者半反半透面,在实际应用时可以根据应用需求进行设置。In the optical path changing device, the transmitted light transmitted from the medium body irradiates the optical surface, and the optical surface is used to adjust the propagation direction of the light. The optical surface can be a reflective surface, and it can be set that the light transmitted from the medium body is vertically irradiated to the optical surface, that is, the light transmitted from the other surface of the paired surface of the medium body is vertically irradiated to the optical surface, and the optical surface reflects the light back to the optical surface. The dielectric body makes the light return the same way. The optical surface can also be a transmissive surface or a transflective surface, which can be set according to application requirements in practical applications.
在实际应用中,要设置介质体的旋转中心轴到光学面的距离大于介质体表面上点到其旋转中心轴的最大距离,这样保证介质体在旋转过程中不会与光学面碰撞。如图1所示,介质体10的横截面为正方形,介质体10的转轴中心轴到光学面11的距离H大于介质体横截面的对角线长度D的一半,即满足H>D/2,其中H为介质体10的转轴中心轴到光学面11的距离,D为介质体横截面的对角线长度,它是介质体表面上点到其旋转中心轴的最大距离。In practical applications, it is necessary to set the distance from the central axis of rotation of the medium body to the optical surface to be greater than the maximum distance from the point on the surface of the medium body to its central axis of rotation, so as to ensure that the medium body will not collide with the optical surface during the rotation process. As shown in FIG. 1 , the cross-section of the dielectric body 10 is square, and the distance H from the central axis of the rotating shaft of the dielectric body 10 to the optical surface 11 is greater than half of the diagonal length D of the cross-section of the dielectric body, that is, H>D/2 is satisfied. , where H is the distance from the central axis of the rotating shaft of the medium body 10 to the optical surface 11 , D is the diagonal length of the cross section of the medium body, which is the maximum distance from the point on the surface of the medium body to the central axis of its rotation.
在具体实施时,介质体可采用透光性材质制作,本实施例中不做具体限定。优选的,本光程改变装置的谱段涵盖紫外光波段、可见光波段和红外光波段,本装置可以应用于紫外光、可见光和红外光。During specific implementation, the medium body may be made of a light-transmitting material, which is not specifically limited in this embodiment. Preferably, the spectral band of the optical path changing device covers the ultraviolet light band, the visible light band and the infrared light band, and the device can be applied to ultraviolet light, visible light and infrared light.
本发明实施例还提供一种光学干涉系统,包括以上所述的光程改变装置。An embodiment of the present invention further provides an optical interference system, including the above-mentioned optical path changing device.
本发明所提供的光学干涉系统,其采用的光程改变装置包括介质体和光学面,介质体包括两者相对且相互平行的成对表面,入射光从成对表面的任意一表面进入介质体,从成对表面的另一表面透射出,透射光的传播方向与入射光的传播方向一致并且透射光照射到光学面,光学面用于调整光的传播方向。通过旋转介质体能够使得入射光进入介质体的入射角改变,能够使光在介质体内的传播路程改变而使在介质体内的光程改变,从而实现改变光程,与现有推扫式的改变光程方法相比,能够克服现有推扫式的改变光程方法对无倾斜性要求高,会产生较高的实现代价的问题。In the optical interference system provided by the present invention, the optical path changing device used includes a medium body and an optical surface, the medium body includes a pair of surfaces opposite to each other and parallel to each other, and incident light enters the medium body from any surface of the paired surfaces. , transmitted from the other surface of the paired surfaces, the propagation direction of the transmitted light is consistent with the propagation direction of the incident light and the transmitted light is irradiated to the optical surface, which is used to adjust the propagation direction of the light. By rotating the medium body, the incident angle of the incident light entering the medium body can be changed, the propagation distance of the light in the medium body can be changed, and the optical distance in the medium body can be changed, so as to realize the change of the optical distance, which is different from the existing push-broom type. Compared with the optical path method, it can overcome the problem that the existing push-broom method of changing the optical path has a high requirement for no inclination and a higher implementation cost.
以上对本发明所提供的一种光程改变装置及光学干涉系统进行了详细介绍。本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。The optical path changing device and the optical interference system provided by the present invention have been described in detail above. The principles and implementations of the present invention are described herein by using specific examples, and the descriptions of the above embodiments are only used to help understand the method and the core idea of the present invention. It should be pointed out that for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can also be made to the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910290015.9A CN109991731A (en) | 2019-04-11 | 2019-04-11 | Optical path changing device and optical interference system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910290015.9A CN109991731A (en) | 2019-04-11 | 2019-04-11 | Optical path changing device and optical interference system |
Publications (1)
Publication Number | Publication Date |
---|---|
CN109991731A true CN109991731A (en) | 2019-07-09 |
Family
ID=67133320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910290015.9A Pending CN109991731A (en) | 2019-04-11 | 2019-04-11 | Optical path changing device and optical interference system |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109991731A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1790148A (en) * | 2004-12-15 | 2006-06-21 | 鸿富锦精密工业(深圳)有限公司 | Focusing mechanism |
CN104515596A (en) * | 2013-09-26 | 2015-04-15 | 南开大学 | Miniaturized rotation scanning Fourier transform spectrometer |
CN107290939A (en) * | 2016-04-01 | 2017-10-24 | 深圳光启高等理工研究院 | Apply the photoetching instrument and micro structured pattern photolithography method in Meta Materials preparation |
CN109059754A (en) * | 2018-08-07 | 2018-12-21 | 暨南大学 | A kind of laser self-mixing interference measuring device and measuring method |
CN109297600A (en) * | 2018-10-22 | 2019-02-01 | 中国科学院西安光学精密机械研究所 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
-
2019
- 2019-04-11 CN CN201910290015.9A patent/CN109991731A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1790148A (en) * | 2004-12-15 | 2006-06-21 | 鸿富锦精密工业(深圳)有限公司 | Focusing mechanism |
CN104515596A (en) * | 2013-09-26 | 2015-04-15 | 南开大学 | Miniaturized rotation scanning Fourier transform spectrometer |
CN107290939A (en) * | 2016-04-01 | 2017-10-24 | 深圳光启高等理工研究院 | Apply the photoetching instrument and micro structured pattern photolithography method in Meta Materials preparation |
CN109059754A (en) * | 2018-08-07 | 2018-12-21 | 暨南大学 | A kind of laser self-mixing interference measuring device and measuring method |
CN109297600A (en) * | 2018-10-22 | 2019-02-01 | 中国科学院西安光学精密机械研究所 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI617841B (en) | Anti-moire pattern diffuser for optical systems | |
CN102589698B (en) | Variable-angle reflection measurement device and operation method thereof | |
CN101320126B (en) | Two-sided reflection movable mirror interferometer | |
US7106482B2 (en) | Scanning apparatus | |
CN106017519B (en) | A kind of Demodulation System for Fiber Optic Fabry-Perot Sensors and method | |
CN1963384A (en) | Method for measuring minute angle based on self-commix interference of laser and apparatus thereof | |
KR101922973B1 (en) | Microspot spectroscopic ellipsometer with 4-reflectors | |
CN103674243B (en) | LONG WAVE INFRARED spatial modulation and interference miniaturization method | |
US4664484A (en) | Variable light attenuator | |
CN111948783A (en) | Incident light angle continuous adjustable device and angle continuous adjusting method | |
JP7070029B2 (en) | Light irradiation device and laser radar device | |
CN112436371A (en) | Large-magnification and magnification continuously adjustable laser attenuator | |
CN109991731A (en) | Optical path changing device and optical interference system | |
US4978183A (en) | Holographic optic element collimator and method and apparatus for manufacture | |
CN103090972B (en) | Compact type full spectrum optical measuring head device used for reflection difference spectral measurement | |
KR20070058651A (en) | Optical retarder | |
CN102323238A (en) | Device and method for measuring refractive index of intermediate infrared multi-wavelength material | |
CN117470780B (en) | Generalized terahertz time-domain ellipsometry detection system capable of acquiring Jones matrix in real time | |
CN106291916B (en) | Optical chopper, light modulation system and its method for carrying out light modulation | |
KR100453710B1 (en) | Surface measurement apparatus and method thereof | |
CN101762323A (en) | Method for detecting adhesion between spatial heterodyne interferometer gratings | |
CN103543524B (en) | The continuous attenuator of former polarization state can be kept | |
CN207636280U (en) | Multi-view-field wavefront measuring device of telescope system | |
CN102538962B (en) | A kind of low stray light polychromator | |
CN215494380U (en) | Faraday rotation mirror |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190709 |
|
RJ01 | Rejection of invention patent application after publication |