CN109946349B - Organic field effect transistor and preparation method thereof, and biogenic amine gas sensor - Google Patents
Organic field effect transistor and preparation method thereof, and biogenic amine gas sensor Download PDFInfo
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Abstract
本发明公开一种有机场效应晶体管及其制备方法以及生物胺气敏传感器,有机场效应晶体管包括自下至上依次层叠设置的衬底、有机半导体层、生物胺敏感层、绝缘层和栅极,衬底上还设有漏极和源极,有机半导体层覆盖在源极和漏极上以及衬底上未被源极和漏极覆盖的区域;生物胺敏感层对生物胺的敏感度被设置为大于有机半导体层对生物胺的敏感度。本发明中,通电状态下的有机场效应晶体管会在生物胺敏感层和有机半导体层形成导电沟道,当存在生物胺,生物胺和生物胺敏感层、有机半导体层产生化学反应而改变导电沟道的电阻,通过感知电阻的变化即可感测生物胺,有效提高检测的敏感度,实现优化检测效果、提高检测效率的目的。
The invention discloses an organic field effect transistor, a preparation method thereof, and a biogenic amine gas sensor. The organic field effect transistor comprises a substrate, an organic semiconductor layer, a biogenic amine sensitive layer, an insulating layer and a gate which are sequentially stacked from bottom to top. The substrate is also provided with a drain electrode and a source electrode, and the organic semiconductor layer covers the source electrode and the drain electrode and the area on the substrate that is not covered by the source electrode and the drain electrode; the sensitivity of the biogenic amine sensitive layer to the biogenic amine is set is greater than the sensitivity of the organic semiconductor layer to biogenic amines. In the present invention, the organic field effect transistor in the energized state will form a conductive channel in the biological amine sensitive layer and the organic semiconductor layer. When biological amine exists, the biological amine and the biological amine sensitive layer and the organic semiconductor layer will undergo chemical reactions to change the conductive channel. The resistance of the channel can be sensed by sensing the change of the resistance, which can effectively improve the sensitivity of the detection, achieve the purpose of optimizing the detection effect and improving the detection efficiency.
Description
技术领域technical field
本发明涉及气体检测的技术领域,特别涉及利用有机半导体材料进行气体检测的技术领域,具体涉及一种有机场效应晶体管及其制备方法以及生物胺气敏传感器。The invention relates to the technical field of gas detection, in particular to the technical field of gas detection using organic semiconductor materials, and in particular to an organic field effect transistor, a preparation method thereof, and a biological amine gas sensor.
背景技术Background technique
生物胺是一类含氮的低分子有机碱,主要由氨基酸脱羧作用形成,广泛存在于富含氨基酸、蛋白质的肉制品、水产品和发酵制品中。生物胺根据其结构可分为三类:脂肪族,包括腐胺、尸胺、精胺、亚精胺等;芳香族,包括酪胺、苯乙胺等;杂环胺,包括组胺、色胺等。适量的生物胺是维持人体正常生理功能所必需的,但人体如果对生物胺摄入过量,则会引起过敏反应,严重时可能危及生命。此外,生物胺往往是在食品腐烂或发酵过程中产生,食品中毒的发作和某些毒理学特性与组胺和酪胺有密切关系,食品中生物胺含量可作为食品品质的重要指标。因此,食品中生物胺的有效、快速检测对食品品质和安全性具有重要意义。Biogenic amines are a kind of nitrogen-containing low-molecular-weight organic bases, which are mainly formed by the decarboxylation of amino acids, and are widely found in meat products, aquatic products and fermented products rich in amino acids and proteins. Biogenic amines can be divided into three categories according to their structure: aliphatic, including putrescine, cadaverine, spermine, spermidine, etc.; aromatic, including tyramine, phenethylamine, etc.; heterocyclic amines, including histamine, chromophore, etc. Amines etc. An appropriate amount of biogenic amines is necessary to maintain the normal physiological functions of the human body, but if the human body ingests excessive amounts of biogenic amines, it will cause allergic reactions, which may be life-threatening in severe cases. In addition, biogenic amines are often produced in the process of food decay or fermentation. The onset of food poisoning and some toxicological properties are closely related to histamine and tyramine. The content of biogenic amines in food can be used as an important indicator of food quality. Therefore, the effective and rapid detection of biogenic amines in food is of great significance to food quality and safety.
由于生物胺分子中缺少发色基团,本身既无紫外吸收、又无荧光及电化学活性,使得各类生物胺的分离及测定非常困难。传统测定生物胺主要依靠生化类方法,例如酶生物传感器法、薄层色谱法、气相色谱法、离子色谱法、毛细管电泳法和高效液相色谱法等,其中,高效液相色谱法因为具有柱效高、分离效率高、分析速度快、灵敏度高、定量分析准确等优点,大部分学者将它作为分析食品中生物胺的主要方法,但是该法检测量小,一次仅能检测一个样品,成本高,总体效率低。为了解决上述问题,目前提出一种通过无机金属氧化物半导体气敏传感器来测定生物胺的方法,但是该方法具有工作温度高,需要加热器;对多数有机气体检测灵敏度低;检测范围窄等弊端。Due to the lack of chromophoric groups in biogenic amine molecules, it has neither ultraviolet absorption nor fluorescence and electrochemical activity, making the separation and determination of various biogenic amines very difficult. The traditional determination of biogenic amines mainly relies on biochemical methods, such as enzyme biosensor method, thin layer chromatography, gas chromatography, ion chromatography, capillary electrophoresis and high performance liquid chromatography. It has the advantages of high efficiency, high separation efficiency, fast analysis speed, high sensitivity, and accurate quantitative analysis. Most scholars use it as the main method for analyzing biogenic amines in food. high, the overall efficiency is low. In order to solve the above problems, a method for measuring biogenic amines through inorganic metal oxide semiconductor gas sensors is proposed at present, but this method has disadvantages such as high operating temperature, requiring heaters, low detection sensitivity for most organic gases, and narrow detection range. .
发明内容SUMMARY OF THE INVENTION
本发明的主要目的是提出一种有机场效应晶体管、制备方法以及生物胺气敏传感器,旨在解决传统检测方法存在的检测灵敏度低、检测效率低的问题。The main purpose of the present invention is to provide an organic field effect transistor, a preparation method and a biogenic amine gas sensor, aiming to solve the problems of low detection sensitivity and low detection efficiency existing in traditional detection methods.
为实现上述目的,本发明提出的一种有机场效应晶体管,用于感测食品中的生物胺,所述有机场效应晶体管包括自下至上依次层叠设置的衬底、有机半导体层、生物胺敏感层、绝缘层以及栅极,所述衬底的上端还设有源极和漏极,所述有机半导体层覆盖在所述漏极和所述源极上、以及所述衬底上未被所述漏极和所述源极覆盖的区域;In order to achieve the above purpose, an organic field effect transistor proposed by the present invention is used for sensing biogenic amines in food, and the organic field effect transistor comprises a substrate, an organic semiconductor layer, a biogenic amine sensitive layer, an insulating layer and a gate electrode, the upper end of the substrate is further provided with a source electrode and a drain electrode, the organic semiconductor layer covers the drain electrode and the source electrode, and the substrate is not covered the area covered by the drain and the source;
其中,所述生物胺敏感层对生物胺的敏感度被设置为大于所述有机半导体层对生物胺的敏感度。Wherein, the sensitivity of the biogenic amine sensitive layer to the biogenic amine is set to be greater than the sensitivity of the organic semiconductor layer to the biogenic amine.
可选地,所述有机半导体层的材料为具有如下结构式(Ⅰ)、(Ⅱ)、(Ⅲ)、(Ⅳ)所示结构的化合物中的任意一种:Optionally, the material of the organic semiconductor layer is any one of the compounds having the structures represented by the following structural formulas (I), (II), (III), and (IV):
可选地,所述生物胺敏感层的材料为具有如下结构式(Ⅴ)、(Ⅵ)所示结构的化合物中的任意一种:Optionally, the material of the biogenic amine sensitive layer is any one of the compounds having the structures shown in the following structural formulas (V) and (VI):
其中,在结构式(Ⅴ)中:M=Au或者M=Co。Wherein, in structural formula (V): M=Au or M=Co.
可选地,所述绝缘层的材料为水或者磷酸缓冲盐溶液。Optionally, the material of the insulating layer is water or phosphate buffered saline.
可选地,所述衬底的材料为玻璃、硅片或者陶瓷;或者,Optionally, the material of the substrate is glass, silicon wafer or ceramic; or,
所述源极、所述漏极和所述栅极的材料为铝或者金。The source electrode, the drain electrode and the gate electrode are made of aluminum or gold.
可选地,所述有机半导体层的厚度为60nm~70nm;或者,Optionally, the thickness of the organic semiconductor layer is 60 nm˜70 nm; or,
所述生物胺敏感层的厚度为8nm~12nm;或者,The thickness of the biogenic amine sensitive layer is 8nm-12nm; or,
所述衬底的厚度为45nm~55nm。The thickness of the substrate is 45 nm˜55 nm.
此外,本发明还提出一种制备如上所述的有机场效应晶体管的方法,包括以下步骤:In addition, the present invention also provides a method for preparing the above organic field effect transistor, comprising the following steps:
提供一衬底;providing a substrate;
在所述衬底上设置漏极和源极;a drain electrode and a source electrode are provided on the substrate;
在所述源极和所述漏极上、以及所述衬底上未被所述漏极和所述源极覆盖的区域上,设置有机半导体层;an organic semiconductor layer is provided on the source electrode and the drain electrode and on the region of the substrate not covered by the drain electrode and the source electrode;
在所述有机半导体层上设置生物胺敏感层;A biogenic amine sensitive layer is arranged on the organic semiconductor layer;
在所述生物胺敏感层上设置绝缘层;an insulating layer is provided on the biogenic amine sensitive layer;
在所述绝缘层上设置栅极,以得到所述有机场效应晶体管。A gate is provided on the insulating layer to obtain the organic field effect transistor.
可选地,所述栅极、所述源极和所述漏极的设置方法均为真空热蒸镀、磁控溅射或者等离子体增强的化学气相沉积。Optionally, the methods for setting the gate electrode, the source electrode and the drain electrode are vacuum thermal evaporation, magnetron sputtering or plasma-enhanced chemical vapor deposition.
可选地,所述在所述生物胺敏感层上设置绝缘层的步骤包括:在所述生物胺敏感层上滴加1~3μL的水或者磷酸缓冲盐溶液,构成所述绝缘层。Optionally, the step of disposing an insulating layer on the biogenic amine sensitive layer includes: dripping 1-3 μL of water or a phosphate buffered saline solution on the biogenic amine sensitive layer to form the insulating layer.
此外,本发明还提出一种生物胺气敏传感器,包括如上所述的有机场效应晶体管。In addition, the present invention also provides a biogenic amine gas sensor, comprising the above organic field effect transistor.
本发明提供的技术方案中,通电状态下的所述有机场效应晶体管,会在所述生物胺敏感层和所述有机半导体层形成导电沟道,当环境中存在生物胺时,生物胺和所述生物胺敏感层、所述有机半导体层产生化学反应,将改变所述导电沟道的电阻,因此,通过感知所述电阻的变化即可实现感测环境中生物胺的目的;另外,在所述漏极和所述源极的上方设置所述有机半导体层、在所述有机半导体层的上方增设对生物胺更加敏感的所述生物胺敏感层,不仅有利于增大所述有机场效应晶体管与生物胺的接触面积,还能有效提高检测的敏感度,实现优化检测效果、提高检测效率的目的。In the technical solution provided by the present invention, the organic field effect transistor in the power-on state will form a conductive channel in the biogenic amine sensitive layer and the organic semiconductor layer. When biogenic amine exists in the environment, the biogenic amine and all The biological amine sensitive layer and the organic semiconductor layer produce chemical reaction, which will change the resistance of the conductive channel, so the purpose of sensing the biological amine in the environment can be realized by sensing the change of the resistance; The organic semiconductor layer is arranged above the drain electrode and the source electrode, and the biological amine sensitive layer that is more sensitive to biological amine is added above the organic semiconductor layer, which is not only conducive to increasing the organic field effect transistor. The contact area with the biogenic amine can also effectively improve the detection sensitivity, so as to optimize the detection effect and improve the detection efficiency.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图示出的结构获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can also be obtained according to the structures shown in these drawings without creative efforts.
图1为本发明提供的有机场效应晶体管的一实施例的结构示意图。FIG. 1 is a schematic structural diagram of an embodiment of an organic field effect transistor provided by the present invention.
附图标号说明:Description of reference numbers:
本发明目的的实现、功能特点及优点将结合实施例,参照附图做进一步说明。The realization, functional characteristics and advantages of the present invention will be further described with reference to the accompanying drawings in conjunction with the embodiments.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
需要说明,若本发明实施例中有涉及方向性指示(诸如上、下、左、右、前、后……),则该方向性指示仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等,如果该特定姿态发生改变时,则该方向性指示也相应地随之改变。It should be noted that if there are directional indications (such as up, down, left, right, front, back, etc.) involved in the embodiments of the present invention, the directional indications are only used to explain a certain posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication also changes accordingly.
另外,若本发明实施例中有涉及“第一”、“第二”等的描述,则该“第一”、“第二”等的描述仅用于描述目的,而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外,全文中出现的“和/或”的含义,包括三个并列的方案,以“A和/或B”为例,包括A方案、或B方案、或A和B同时满足的方案。另外,各个实施例之间的技术方案可以相互结合,但是必须是以本领域普通技术人员能够实现为基础,当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在,也不在本发明要求的保护范围之内。In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for the purpose of description, and should not be construed as indicating or implying Its relative importance or implicitly indicates the number of technical features indicated. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In addition, the meaning of "and/or" in the whole text includes three parallel schemes. Taking "A and/or B" as an example, it includes scheme A, scheme B, or scheme satisfying both of A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be realized, it should be considered that the combination of such technical solutions does not exist. , is not within the scope of protection required by the present invention.
由于生物胺分子中缺少发色基团,本身既无紫外吸收、又无荧光及电化学活性,使得各类生物胺的分离及测定非常困难。传统测定生物胺主要依靠生化类方法,例如酶生物传感器法、薄层色谱法、气相色谱法、离子色谱法、毛细管电泳法和高效液相色谱法等,其中,高效液相色谱法因为具有柱效高、分离效率高、分析速度快、灵敏度高、定量分析准确等优点,大部分学者将它作为分析食品中生物胺的主要方法,但是该法检测量小,一次仅能检测一个样品,成本高,总体效率低。为了解决上述问题,目前提出一种通过无机金属氧化物半导体气敏传感器来测定生物胺的方法,但是该方法具有工作温度高,需要加热器;对多数有机气体检测灵敏度低;检测范围窄等弊端。Due to the lack of chromophoric groups in biogenic amine molecules, it has neither ultraviolet absorption nor fluorescence and electrochemical activity, making the separation and determination of various biogenic amines very difficult. The traditional determination of biogenic amines mainly relies on biochemical methods, such as enzyme biosensor method, thin layer chromatography, gas chromatography, ion chromatography, capillary electrophoresis and high performance liquid chromatography. It has the advantages of high efficiency, high separation efficiency, fast analysis speed, high sensitivity, and accurate quantitative analysis. Most scholars use it as the main method for analyzing biogenic amines in food. high, the overall efficiency is low. In order to solve the above problems, a method for measuring biogenic amines through inorganic metal oxide semiconductor gas sensors is proposed at present, but this method has disadvantages such as high operating temperature, requiring heaters, low detection sensitivity for most organic gases, and narrow detection range. .
鉴于此,本发明提供一种生物胺气敏传感器,所述生物胺气敏传感器包括有机场效应晶体管和其他构件,图1为本发明提供的有机场效应晶体管的一实施例,由于本发明的主要发明点在于对有机场效应晶体管的改进,以下结合具体的附图主要对有机场效应晶体管进行说明。In view of this, the present invention provides a biogenic amine gas sensor, which includes an organic field effect transistor and other components. FIG. 1 is an embodiment of the organic field effect transistor provided by the present invention. The main invention lies in the improvement of the organic field effect transistor. The organic field effect transistor will be mainly described below with reference to the specific drawings.
请参阅图1,在本实施例中,所述有机场效应晶体管100用于感测环境中的生物胺及其含量,尤其适用于感测食品中的生物胺,所述有机场效应晶体管100包括自下至上依次层叠设置的衬底1、有机半导体层3、生物胺敏感层4、绝缘层5以及栅极6,另外,所述衬底1的上端还设有漏极21和源极22,所述有机半导体层3覆盖在所述漏极21和所述源极22上、以及所述衬底1上未被所述漏极21和所述源极22覆盖的区域。另外,所述生物胺敏感层4对生物胺的敏感度被设置为大于所述有机半导体层3对生物胺的敏感度,具体可以体现在:所述生物胺敏感层4的材料对生物胺的敏感度大于所述有机半导体层3的材料,或者所述生物胺敏感层4与生物胺的接触面积大于所述有机半导体层3与生物胺的接触面积。在工作时,对所述栅极6和所述漏极21施加正电压,对所述源极22施加负电压或者接地,所述源极22、所述漏极21和所述栅极6即相当于电容器的两个极板,所述有机半导体层3、所述生物胺敏感层4和所述绝缘层5之间逐层接触导通,使得所述有机场效应晶体管100整体处于通电状态,构成电容器。Referring to FIG. 1 , in this embodiment, the organic
本发明提供的技术方案中,通电状态下的所述有机场效应晶体管100,会在所述生物胺敏感层4和所述有机半导体层3形成导电沟道,当环境中存在生物胺时,生物胺和所述生物胺敏感层4、所述有机半导体层3产生化学反应,将改变所述导电沟道的电阻,因此,通过感知所述电阻的变化即可实现感测环境中生物胺的目的;另外,在所述漏极21和所述源极22的上方设置所述有机半导体层3、在所述有机半导体层3的上方增设对生物胺更加敏感的所述生物胺敏感层4,不仅有利于增大所述有机场效应晶体管100与生物胺的接触面积,还能有效提高检测的敏感度,实现优化检测效果、提高检测效率的目的。In the technical solution provided by the present invention, the organic
进一步地,在本实施例中,所述有机半导体层3的材料为具有如下结构式(Ⅰ)、(Ⅱ)、(Ⅲ)、(Ⅳ)所示结构的化合物中的任意一种:Further, in this embodiment, the material of the
其中,结构式(Ⅰ)中的化合物为PDI8-CN2材料、结构式(Ⅱ)中的化合物为P3HT材料、结构式(Ⅲ)中的化合物为Pentacene材料、结构式(Ⅳ)中的化合物为PEDOT:PSS材料,上述化合物在常温下即可与生物胺产生灵敏反应,具体地,生物胺气体可以通过晶粒间界快速穿越所述有机半导体层3进入电荷积累层,然后在晶粒间界生成陷阱以减少电荷载流子的迁移率,从而快速改变导电沟道的电阻,实现灵敏检测生物胺的目的;上述化合物均为现有产品,可与所述衬底1兼容,适应于低温加工和大批量生产。Wherein, the compound in structural formula (I) is PDI8-CN2 material, the compound in structural formula (II) is P3HT material, the compound in structural formula (III) is Pentacene material, the compound in structural formula (IV) is PEDOT:PSS material, The above compounds can react sensitively with biogenic amines at room temperature. Specifically, the biogenic amine gas can quickly pass through the
此外,在本实施例中,所述生物胺敏感层4的材料为具有如下结构式(Ⅴ)、(Ⅵ)所示结构的化合物中的任意一种:In addition, in this embodiment, the material of the biogenic amine sensitive layer 4 is any one of the compounds having the structures shown in the following structural formulas (V) and (VI):
其中,在结构式(Ⅴ)中:M=Au或者M=Co。结构式(Ⅴ)中的化合物为Au-EHO材料、结构式(Ⅵ)中的化合物为Co-EHO材料,所述生物胺敏感层4覆盖在所述有机半导体层3的上方,直接接触环境中的生物胺,由于所述Au-EHO材料和所述Co-EHO材料相较于所述PDI8-CN2材料、所述P3HT材料、所述Pentacene材料和所述PEDOT:PSS材料对生物胺具备更高的敏感度,具体地,生物胺气体分子会进入所述生物胺敏感层4的空穴,然后和所述生物胺敏感层4的分子进行键合生成电偶极子,进一步影响所述有机半导体层3的导电特性,使得所述有机场效应晶体管100对生物胺气体更加敏感,则有助于拓宽所述有机场效应晶体管100的检测范围,且有利于加快检测速度,从而提高检测效率。Wherein, in structural formula (V): M=Au or M=Co. The compound in the structural formula (V) is an Au-EHO material, and the compound in the structural formula (VI) is a Co-EHO material, and the biological amine sensitive layer 4 covers the
接着,在本实施例中,所述绝缘层5的材料为水或者磷酸缓冲盐溶液,相较于传统的无机绝缘材料,水或者磷酸缓冲盐溶液形成的绝缘层5具有较高的介电常数,可有效提高所述有机场效应晶体管100的电容,从而提高所述有机场效应晶体管100内的导通电流,降低所述有机场效应晶体管100所需的工作电压。使用时,所述栅极6直接插入水或者磷酸缓冲盐溶液中即可。Next, in this embodiment, the material of the insulating
进一步地,在本实施例中,所述衬底1的材料为玻璃、硅片或者陶瓷,具备良好的绝缘性且材料价格低廉,有利于减轻经济成本负担;或者,所述漏极21、所述源极22和所述栅极6的材料为铝或者金,在不增加所述有机场效应晶体管100的体积和质量的同时,有助于扩大电容量。Further, in this embodiment, the material of the
进一步地,在本实施例中,所述有机半导体层3的厚度为60nm~70nm,或者所述生物胺敏感层4的厚度为8nm~12nm,或者所述衬底1的厚度为45nm~55nm,且优选为50nm。所述有机半导体层3、所述生物胺敏感层4和所述绝缘层5的厚度影响所述源极22、所述漏极21与所述栅极6之间的电容感应,若该厚度较大,则所述有机场效应晶体管100感测到的电容变化较小甚至无法形成良好的电容感应,影响对生物胺的即时感测;反之,若该厚度较小,则需要的工作电压较大,不利于用户的使用,因此优选地,所述有机半导体层3的厚度为65nm,所述生物胺敏感层4的厚度为10nm。Further, in this embodiment, the thickness of the
此外,本发明还提出一种制备所述有机场效应晶体管100的方法,具体包括以下步骤:In addition, the present invention also provides a method for preparing the organic
步骤S10:提供一衬底1;Step S10: providing a
步骤S20:在所述衬底1上设置漏极21和源极22;Step S20: disposing a
步骤S30:在所述漏极21和所述源极22上、以及在所述衬底1上未被所述漏极21和所述源极22覆盖的区域上,设置有机半导体层3;Step S30: Disposing an
步骤S40:在所述有机半导体层3上设置生物胺敏感层4;Step S40: disposing a biogenic amine sensitive layer 4 on the
步骤S50:在所述生物胺敏感层4上设置绝缘层5;Step S50: disposing an insulating
步骤S60:在所述绝缘层5上设置栅极6,以得到所述有机场效应晶体管100。Step S60 : disposing the
在本实施例中,根据实际应用,选取合适的所述衬底1的材料和厚度,以硅片作为所述衬底1为例,使用丙酮、异丙酮等依次超声清洗所述硅片,然后用乙醇和去离子水冲洗所述硅片,最后用氮气吹干硅片表面;接着,在所述衬底1上蒸镀所述漏极21和所述源极22,然后在所述漏极21、所述源极22和所述衬底1上继续依次蒸镀所述有机半导体层3和所述生物胺敏感层4;在所述生物胺敏感层4上制备所述绝缘层5,最后在所述绝缘层5上设置所述栅极6,例如将所述栅极6的至少下端插入所述绝缘层5,获得所述有机场效应晶体管100。In this embodiment, according to the actual application, select the appropriate material and thickness of the
进一步地,在本实施例中,所述栅极6、所述源极22和所述漏极21的设置方法均为真空热蒸镀、磁控溅射或者等离子体增强的化学气相沉积。例如,将所述衬底1置于真空镀膜机内,在真空度为6.5×10-4Pa的条件下以1A/s的速度在所述衬底1上蒸镀金,得到所述漏极21和所述源极22。所述栅极6的具体制备方法与上述类似,不作赘述,另外,磁控溅射或者等离子体增强的化学气相沉积的具体步骤和相关要求可参考现有技术,此处不作详述。Further, in this embodiment, the methods for setting the
进一步地,在本实施例中,所述步骤S50包括:在所述生物胺敏感层4上滴加1~3μL的水或者磷酸缓冲盐溶液,构成所述绝缘层5。例如,在需要检测生物胺的环境里,可以用滴管往所述生物胺敏感层4上滴加约2μL的水或者磷酸缓冲盐溶液,然后再将所述栅极6插入水或者磷酸缓冲盐溶液中,从而构成完整的所述有机场效应晶体管100。所述绝缘层5的具体量值、组成成分等可以根据实际应用进行适应性调整,以针对性地检测不同环境下的不同生物胺,更加快速有效地获得更为准确的结果。Further, in this embodiment, the step S50 includes: dripping 1-3 μL of water or a phosphate buffered saline solution on the biogenic amine sensitive layer 4 to form the insulating
以所述有机场效应晶体管100的一具体实施例为例进行说明,可以在室温条件下,以50nm厚的玻璃作为衬底1,在衬底上通过磁控溅射的方式设置金制的漏极21和源极22;然后在所述漏极21和所述源极22上、以及所述衬底1上未被所述漏极21和所述源极22覆盖的区域上,通过蒸镀的方式设置65nm厚的有机半导体层3,且所述有机半导体层3的材料为P3HT;在所述有机半导体层3上,通过蒸镀的方式设置10nm厚的生物胺敏感层4,且所述生物胺敏感层4的材料为Co-EHO;在所述生物胺敏感层4上用吸管吸取2μL的磷酸缓冲盐溶液并滴加在所述生物胺敏感层4上,构成绝缘层5;最后在所述绝缘层5上通过真空热蒸镀的方式设置金制的栅极6,从而获得所述有机场效应晶体管100。采用现有的测量设备的测量技术,可有效检测出在Vg=0.6V时,此有机场效应晶体管100对应的饱和电流为0.9μA,载流子迁移率为2.3x10-3cm2/Vs,阈值电压为0.03V,响应速度为0.2s,说明本发明制备的所述有机场效应晶体管100在室温条件下对生物胺的响应结果良好,响应速度快,灵敏度高。Taking a specific embodiment of the organic
以上所述仅为本发明的优选实施例,并非因此限制本发明的专利范围,凡是在本发明的发明构思下,利用本发明说明书及附图内容所作的等效结构变换,或直接/间接运用在其他相关的技术领域均包括在本发明的专利保护范围内。The above descriptions are only the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Under the inventive concept of the present invention, the equivalent structural transformations made by the contents of the description and drawings of the present invention, or the direct/indirect application Other related technical fields are included in the scope of patent protection of the present invention.
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005095938A1 (en) * | 2004-04-01 | 2005-10-13 | Nanyang Technological University | Addressable transistor chip for conducting assays |
CN101097991A (en) * | 2006-06-28 | 2008-01-02 | 中国科学院化学研究所 | A dual-working mode organic field effect transistor and its preparation method |
CN101454659A (en) * | 2006-05-29 | 2009-06-10 | 皇家飞利浦电子股份有限公司 | Organic field-effect transistor for sensing applications |
CN101779307A (en) * | 2007-07-13 | 2010-07-14 | 原子能委员会 | Organic field-effect transistor and method of fabricating this transistor |
CN102169104A (en) * | 2010-12-22 | 2011-08-31 | 重庆邮电大学 | SiC-based MOSFET (metal-oxide -semiconductor field effect transistor) oxysensible sensor for automobile engine |
CN102636544A (en) * | 2012-04-23 | 2012-08-15 | 电子科技大学 | Multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and preparation method thereof |
CN103399072A (en) * | 2013-08-02 | 2013-11-20 | 中国科学院化学研究所 | Gas-assisted organic field-effect transistor sensor, and preparation method and applications thereof |
CN104132989A (en) * | 2014-08-01 | 2014-11-05 | 电子科技大学 | Organic field-effect tube gas sensor based on mixed insulating layer and preparation method thereof |
CN104297320A (en) * | 2013-07-17 | 2015-01-21 | 国家纳米科学中心 | Organic monolayer thin film field effect gas sensor and preparation method thereof |
CN105699463A (en) * | 2015-08-27 | 2016-06-22 | 索武生 | Chemical field effect transistor gas-sensitive sensor and manufacturing method thereof |
KR20180103653A (en) * | 2017-03-10 | 2018-09-19 | 서울대학교산학협력단 | Dopamine detecting biosensor and method of detecting dopamine using the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103926296B (en) * | 2014-04-28 | 2016-01-06 | 广东产品质量监督检验研究院 | For biology sensor detecting biogenic amine and preparation method thereof |
CN105954322B (en) * | 2016-05-20 | 2018-06-19 | 上海交通大学 | A kind of biological/chemical sensor based on Organic Thin Film Transistors |
-
2019
- 2019-04-02 CN CN201910260445.6A patent/CN109946349B/en not_active Expired - Fee Related
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005095938A1 (en) * | 2004-04-01 | 2005-10-13 | Nanyang Technological University | Addressable transistor chip for conducting assays |
CN101454659A (en) * | 2006-05-29 | 2009-06-10 | 皇家飞利浦电子股份有限公司 | Organic field-effect transistor for sensing applications |
CN101097991A (en) * | 2006-06-28 | 2008-01-02 | 中国科学院化学研究所 | A dual-working mode organic field effect transistor and its preparation method |
CN101779307A (en) * | 2007-07-13 | 2010-07-14 | 原子能委员会 | Organic field-effect transistor and method of fabricating this transistor |
CN102169104A (en) * | 2010-12-22 | 2011-08-31 | 重庆邮电大学 | SiC-based MOSFET (metal-oxide -semiconductor field effect transistor) oxysensible sensor for automobile engine |
CN102636544A (en) * | 2012-04-23 | 2012-08-15 | 电子科技大学 | Multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and preparation method thereof |
CN104297320A (en) * | 2013-07-17 | 2015-01-21 | 国家纳米科学中心 | Organic monolayer thin film field effect gas sensor and preparation method thereof |
CN103399072A (en) * | 2013-08-02 | 2013-11-20 | 中国科学院化学研究所 | Gas-assisted organic field-effect transistor sensor, and preparation method and applications thereof |
CN104132989A (en) * | 2014-08-01 | 2014-11-05 | 电子科技大学 | Organic field-effect tube gas sensor based on mixed insulating layer and preparation method thereof |
CN105699463A (en) * | 2015-08-27 | 2016-06-22 | 索武生 | Chemical field effect transistor gas-sensitive sensor and manufacturing method thereof |
KR20180103653A (en) * | 2017-03-10 | 2018-09-19 | 서울대학교산학협력단 | Dopamine detecting biosensor and method of detecting dopamine using the same |
Non-Patent Citations (3)
Title |
---|
卟啉及其衍生物对生物分子的识别研究进展;侯长军 等;《应用化学》;20110930;第28卷(第9期);第977-985页 * |
四苯基卟啉钴气敏元件的制备及性能;王佳明 等;《精细化工》;20180331;第35卷(第3期);第372-376页 * |
四苯基卟啉钴-溴百里酚蓝复合薄膜/K+交换玻璃光波导传感元件的制备及胺类气体的检测;热依汉古丽•艾孜则 等;《分析试验室》;20180228;第37卷(第2期);第192-196页 * |
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