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CN109945805A - A high-precision angle sensor - Google Patents

A high-precision angle sensor Download PDF

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Publication number
CN109945805A
CN109945805A CN201910281897.2A CN201910281897A CN109945805A CN 109945805 A CN109945805 A CN 109945805A CN 201910281897 A CN201910281897 A CN 201910281897A CN 109945805 A CN109945805 A CN 109945805A
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photodetector
convex lens
laser beam
laser
angle sensor
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张白
康学亮
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North Minzu University
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North Minzu University
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Abstract

本发明涉及一种高精度角度传感器,包括激光器,所述激光器用于发射激光束,所述激光束入射至反射部件;所述反射部件,用于固定被测物体,所述反射部件可旋转并且沿周向设有若干个反射面,每个所述反射面用于将所述激光束进行反射;凹透镜,用于接收所述反射面反射的激光束,并使得激光束发生折射;光电探测器,用于接收经凹透镜折射后的光束,并测量其入射位置;处理系统,具体用于根据所述光电探测器上所接收到的光束的入射位置变化值,处理得到被测物体的旋转角度值。通过凹透镜对激光束进行折射,可以将小角度变化放大为大角度变化,实现旋转角度的进一步放大,因此上述角度传感器可以进一步增大放大倍数,继而提高测量精度。

The invention relates to a high-precision angle sensor, comprising a laser for emitting a laser beam, and the laser beam is incident on a reflective part; the reflective part is used for fixing a measured object, the reflective part is rotatable and Several reflective surfaces are arranged along the circumferential direction, each of which is used to reflect the laser beam; a concave lens is used to receive the laser beam reflected by the reflective surface and refract the laser beam; a photodetector is used for It is used to receive the light beam refracted by the concave lens and measure its incident position; the processing system is specifically used to process the rotation angle value of the measured object according to the change value of the incident position of the light beam received on the photodetector. The laser beam is refracted by the concave lens, and the small angle change can be enlarged into a large angle change, so as to further enlarge the rotation angle. Therefore, the above-mentioned angle sensor can further increase the magnification, thereby improving the measurement accuracy.

Description

一种高精度角度传感器A high-precision angle sensor

技术领域technical field

本发明涉及测量技术领域,特别涉及一种高精度角度传感器。The invention relates to the technical field of measurement, in particular to a high-precision angle sensor.

背景技术Background technique

角度传感器是一种常用的几何量传感器,在航空航天、工业生产、机械制造以及军事科学等很多领域中都有广泛的使用。然而现有的角度传感器存在放大倍数依然有限,对于特殊应用场合的适用性差,或者测量精度不高的问题。例如申请号为201510276408.6,名称为“一种新型光臂放大式高精度角度传感器及测量方法”中提供的角度传感器,放大倍数较低,测量精度有待进一步提高。Angle sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. However, the existing angle sensors still have limited magnification, poor applicability to special applications, or low measurement accuracy. For example, the application number is 201510276408.6, and the angle sensor provided in "A Novel Optical Arm Amplified High-precision Angle Sensor and Measurement Method" has a low magnification and the measurement accuracy needs to be further improved.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于改善现有技术中所存在的不足,提供一种高精度角度传感器。The purpose of the present invention is to improve the deficiencies in the prior art and provide a high-precision angle sensor.

为了实现上述发明目的,本发明实施例提供了以下技术方案:In order to achieve the above purpose of the invention, the embodiments of the present invention provide the following technical solutions:

一种高精度角度传感器,包括激光器,所述激光器用于发射激光束,所述激光束入射至反射部件;A high-precision angle sensor, comprising a laser, the laser is used for emitting a laser beam, and the laser beam is incident on a reflective member;

所述反射部件,用于固定被测物体,所述反射部件可旋转并且沿周向设有若干个反射面,每个所述反射面用于将所述激光束进行反射;the reflective component is used to fix the object to be measured, the reflective component is rotatable and is provided with several reflective surfaces along the circumferential direction, each of the reflective surfaces is used to reflect the laser beam;

凹透镜,用于接收所述反射面反射的激光束,并使得激光束发生折射;a concave lens for receiving the laser beam reflected by the reflective surface and refracts the laser beam;

光电探测器,用于接收经凹透镜折射后的光束,并测量其入射位置;A photodetector for receiving the light beam refracted by the concave lens and measuring its incident position;

处理系统,具体用于根据所述光电探测器上所接收到的光束的入射位置变化值,处理得到被测物体的旋转角度值。通过凹透镜对激光束进行折射,可以将小角度变化放大为大角度变化,实现旋转角度的进一步放大,因此上述角度传感器可以进一步增大放大倍数,继而提高测量精度。The processing system is specifically configured to process and obtain the rotation angle value of the measured object according to the change value of the incident position of the light beam received on the photodetector. The laser beam is refracted by the concave lens, and the small angle change can be magnified into the large angle change, so as to realize the further magnification of the rotation angle. Therefore, the above-mentioned angle sensor can further increase the magnification, thereby improving the measurement accuracy.

在进一步的方案中,还包括凸透镜二,所述凸透镜二设置于所述凹透镜与光电探测器之间,从凹透镜射出的光束经凸透镜二后近似平行入射至所述光电探测器。加入凸透镜二,减小角度测量过程中激光入射光电探测器的入射角变化范围,提高测量精度。In a further solution, a second convex lens is also included, the second convex lens is disposed between the concave lens and the photodetector, and the light beam emitted from the concave lens passes through the second convex lens and enters the photodetector approximately in parallel. The second convex lens is added to reduce the variation range of the incident angle of the laser incident photodetector during the angle measurement process and improve the measurement accuracy.

在进一步的方案中,所述凹透镜用凸透镜一代替,且光电探测器与凸透镜一之间的距离大于两倍凸透镜一的焦距距离。利用凸透镜的折射,实现旋转角度的进一步放大,因此上述角度传感器可以进一步增大放大倍数,继而提高测量精度。In a further solution, the concave lens is replaced by a convex lens one, and the distance between the photodetector and the convex lens one is greater than twice the focal length distance of the convex lens one. The refraction of the convex lens is used to further enlarge the rotation angle, so the above-mentioned angle sensor can further increase the magnification, thereby improving the measurement accuracy.

在进一步的方案中,所述激光器、凹透镜与光电探测器组成探测头,所述探测头的数量为多个,且多个探测头的位置关系满足:至少有一个探测头内的光电探测器可接收到旋转前后的光束。In a further solution, the laser, the concave lens and the photodetector form a detection head, the number of the detection heads is multiple, and the positional relationship of the multiple detection heads satisfies: at least one photodetector in the detection head can The beam before and after the rotation is received.

在进一步的方案中,所述激光器、凸透镜二、凹透镜与光电探测器组成探测头,所述探测头的数量为多个,且多个探测头的位置关系满足:至少有一个探测头内的光电探测器可接收到旋转前后的光束。In a further solution, the laser, the second convex lens, the concave lens and the photodetector form a detector head, the number of the detector heads is multiple, and the positional relationship of the plurality of detector heads satisfies: there is at least one photoelectric detector in the detector head. The detector can receive the beam before and after the rotation.

在进一步的方案中,还包括凸透镜二,所述凸透镜二设置于所述凸透镜一与光电探测器之间,从凸透镜一射出的光束经凸透镜二后近似平行入射至所述光电探测器,且凸透镜二与凸透镜一之间的距离大于两倍凸透镜一的焦距距离。In a further solution, a second convex lens is also included, the second convex lens is disposed between the first convex lens and the photodetector, the light beam emitted from the first convex lens passes through the second convex lens and is approximately parallel to the photodetector, and the second convex lens is incident on the photodetector. The distance between the second and the convex lens one is greater than twice the focal length of the convex lens one.

在进一步的方案中,所述激光器、凸透镜一与光电探测器组成探测头,所述探测头的数量为多个,且多个探测头的位置关系满足:至少有一个探测头内的光电探测器可接收到旋转前后的光束。In a further solution, the laser, the first convex lens and the photodetector form a detector head, the number of the detector heads is multiple, and the positional relationship of the plurality of detector heads satisfies: there is at least one photodetector in the detector head The beam before and after rotation can be received.

在进一步的方案中,所述激光器、凸透镜一、凸透镜二光电探测器组成探测头,所述探测头的数量为多个,且多个探测头的位置关系满足:至少有一个探测头内的光电探测器可接收到旋转前后的光束。In a further solution, the laser, the first convex lens, and the second convex lens photodetector form a detection head, the number of the detection heads is multiple, and the positional relationship of the multiple detection heads satisfies: at least one photoelectric detector in the detection head The detector can receive the beam before and after the rotation.

在进一步的方案中,所述反射部件上的全部所述反射面形状大小相同。In a further solution, all the reflective surfaces on the reflective component have the same shape and size.

在进一步的方案中,所述反射部件为正多边形立柱,所述正多边形立柱的每个侧面为所述反射面。In a further solution, the reflective component is a regular polygonal column, and each side surface of the regular polygonal column is the reflective surface.

与现有技术相比,本发明的有益效果:Compared with the prior art, the beneficial effects of the present invention:

1、通过凹透镜对激光束进行折射,可以将小角度变化放大为大角度变化,实现旋转角度的进一步放大,因此上述角度传感器可以进一步增大放大倍数,继而提高测量精度。1. The laser beam is refracted by the concave lens, and the small angle change can be enlarged into a large angle change, so as to further enlarge the rotation angle. Therefore, the above-mentioned angle sensor can further increase the magnification, thereby improving the measurement accuracy.

2、通过凸透镜二,使得激光束以近似平行的方式入射至光电探测器,减小角度测量过程中激光入射光电探测器的入射角变化范围,提高测量精度。2. Through the second convex lens, the laser beam is incident on the photodetector in an approximately parallel manner, reducing the variation range of the incident angle of the laser incident photodetector during the angle measurement process, and improving the measurement accuracy.

3、通过多组探测头实现连续测量。3. Continuous measurement is achieved through multiple sets of probes.

附图说明Description of drawings

为了更清楚地说明本发明实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,应当理解,以下附图仅示出了本发明的某些实施例,因此不应被看作是对范围的限定,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他相关的附图。In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, and therefore do not It should be regarded as a limitation of the scope, and for those of ordinary skill in the art, other related drawings can also be obtained according to these drawings without any creative effort.

图1为本发明实施例提供的一种高精度角度传感器的结构示意图。FIG. 1 is a schematic structural diagram of a high-precision angle sensor provided by an embodiment of the present invention.

图2为本发明实施例提供的另一种高精度角度传感器的结构示意图。FIG. 2 is a schematic structural diagram of another high-precision angle sensor provided by an embodiment of the present invention.

图3为本发明实施例提供的另一种高精度角度传感器的结构示意图。FIG. 3 is a schematic structural diagram of another high-precision angle sensor provided by an embodiment of the present invention.

图4为本发明实施例提供的另一种高精度角度传感器的结构示意图。FIG. 4 is a schematic structural diagram of another high-precision angle sensor provided by an embodiment of the present invention.

图中标记说明Description of the marks in the figure

激光器1,激光束2,反射部件3,反射面4,光电探测器5,凹透镜6,凸透镜一7,凸透镜二8。Laser 1, laser beam 2, reflecting member 3, reflecting surface 4, photodetector 5, concave lens 6, convex lens one 7, convex lens two 8.

具体实施方式Detailed ways

下面将结合本发明实施例中附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。通常在此处附图中描述和示出的本发明实施例的组件可以以各种不同的配置来布置和设计。因此,以下对在附图中提供的本发明的实施例的详细描述并非旨在限制要求保护的本发明的范围,而是仅仅表示本发明的选定实施例。基于本发明的实施例,本领域技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. The components of the embodiments of the invention generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations. Thus, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present invention.

请参阅图1,本实施例示意性地公开了一种高精度(具体是指相比于背景技术中所描述的角度传感器的测量精度更高)角度传感器,包括激光器1,凹透镜6,光电探测器5,反射部件3,反射部件3用于固定被测物体,且反射部件3可旋转并且沿周向设有若干个反射面4。在本高精度角度传感器中:激光器1发射激光束2,激光束2入射至反射部件3中的任一反射面4,反射面4将激光束2进行反射。凹透镜6接收反射面4反射的激光束2,并使得激光束2发生折射。光电探测器5接收经凹透镜6折射后的光束,并测量其入射位置。处理系统根据所述光电探测器5上所接收到的光束的入射位置变化值,处理得到被测物体的旋转角度值。Referring to FIG. 1, this embodiment schematically discloses a high-precision (specifically, higher measurement accuracy than the angle sensor described in the background art) angle sensor, including a laser 1, a concave lens 6, a photodetector The reflector 5, the reflective part 3, the reflective part 3 is used to fix the object to be measured, and the reflective part 3 is rotatable and is provided with several reflective surfaces 4 along the circumferential direction. In the present high-precision angle sensor: the laser 1 emits the laser beam 2, the laser beam 2 is incident on any reflecting surface 4 in the reflecting member 3, and the reflecting surface 4 reflects the laser beam 2. The concave lens 6 receives the laser beam 2 reflected by the reflection surface 4 and refracts the laser beam 2 . The photodetector 5 receives the light beam refracted by the concave lens 6 and measures its incident position. The processing system obtains the rotation angle value of the measured object according to the change value of the incident position of the light beam received on the photodetector 5 .

如图1所示,旋转运行前的反射部件3、反射面4、激光束2用实线表示,旋转运行后的反射部件3、反射面4、激光束2用虚线表示,激光束2的传输路径与反射部件3、反射面4的运动路径如下:As shown in Fig. 1, the reflective part 3, the reflective surface 4, and the laser beam 2 before the rotating operation are represented by solid lines, and the reflective part 3, the reflective surface 4, and the laser beam 2 after the rotating operation are represented by dashed lines, and the transmission of the laser beam 2 is represented by a dotted line. The path and the movement path of the reflective component 3 and the reflective surface 4 are as follows:

旋转行动前,激光器1发射激光束2,激光束2入射至反射部件的其中一个反射面4,反射面4将激光束2反射至凹透镜6,凹透镜6使得激光束2发生折射,折射后的光束入射至光电探测器5,光电探测器5接收经凹透镜6折射后透射出的激光束2,并测量其入射位置。此时此处记为第一入射位置。Before the rotation, the laser 1 emits the laser beam 2, and the laser beam 2 is incident on one of the reflecting surfaces 4 of the reflective component. The reflecting surface 4 reflects the laser beam 2 to the concave lens 6. The concave lens 6 refracts the laser beam 2, and the refracted beam Incident to the photodetector 5, the photodetector 5 receives the laser beam 2 transmitted after being refracted by the concave lens 6, and measures its incident position. At this time, it is recorded here as the first incident position.

旋转行动后,激光器1发射激光束2,激光束2入射至反射部件的其中一个反射面4,反射面4将激光束2反射至凹透镜6,凹透镜6使得激光束2发生折射,折射后的光束入射至光电探测器5,光电探测器5接收经凹透镜6折射后透射出的激光束2,并测量其入射位置。此时此处记为第二入射位置。After the rotation, the laser 1 emits the laser beam 2, and the laser beam 2 is incident on one of the reflecting surfaces 4 of the reflective component. The reflecting surface 4 reflects the laser beam 2 to the concave lens 6. The concave lens 6 refracts the laser beam 2, and the refracted beam Incident to the photodetector 5, the photodetector 5 receives the laser beam 2 transmitted after being refracted by the concave lens 6, and measures its incident position. At this time, it is recorded here as the second incident position.

处理系统根据第一入射位置与第二入射位置的变化量,处理得到所述反射部件上被测物体的旋转角度值。The processing system processes and obtains the rotation angle value of the object to be measured on the reflective member according to the variation of the first incident position and the second incident position.

且为了实现旋转角度的连续测量,在本实施例中,由激光器1、凹透镜6、光电探测器5构成一个探测头,且如图1所示,探测头于本方案中的数量为两个。通过两个探测头使得被测物体在旋转过程中,当其中一个探测头中的光电探测器接收不到光束时切换至另一个探测头接收,因此可以可靠地保障连续角度测量,增强角度传感器的实用性。为了保证当其中一个探测头中的光电探测器接收不到光束时另一个探测头可以接收,其具体的实施方式为,两个探测头内的激光器1射出的激光束2入射于反射部件3上的不同点。And in order to realize the continuous measurement of the rotation angle, in this embodiment, a laser 1, a concave lens 6, and a photodetector 5 constitute a probe, and as shown in FIG. 1, the number of probes in this solution is two. Through the two detectors, during the rotation of the object to be measured, when the photodetector in one of the detectors cannot receive the light beam, it switches to the other detector to receive it, so it can reliably ensure continuous angle measurement and enhance the angle sensor’s performance. practicality. In order to ensure that when the photodetector in one of the detection heads cannot receive the light beam, the other detection head can receive the light beam. The specific implementation is as follows: the laser beam 2 emitted by the laser 1 in the two detection heads is incident on the reflective member 3 difference.

如图2所示,在另一个实施方案中,在图1所示结构基础上,本高精度角度传感器中的探测头还包括凸透镜二8,凸透镜二8设置于凹透镜6与光电探测器5之间。As shown in FIG. 2 , in another embodiment, on the basis of the structure shown in FIG. 1 , the detector head in the high-precision angle sensor further includes a second convex lens 8 , and the second convex lens 8 is arranged between the concave lens 6 and the photodetector 5 . between.

本方案中的光路传输过程如下:The optical transmission process in this scheme is as follows:

旋转行动前,激光器1发射出激光束2,激光束2入射至反射部件3上的反射面4,反射面4对激光束2进行反射,将激光束2反射至凹透镜6,凹透镜6接收经反射面4反射的激光束,并使得激光束2发生折射。凸透镜二8接收经凹透镜6折射后的激光束,并使得激光束2再次折射后入射光电探测器5。此时此处记为第一入射位置。Before the rotation, the laser 1 emits the laser beam 2, the laser beam 2 is incident on the reflective surface 4 on the reflective member 3, the reflective surface 4 reflects the laser beam 2, reflects the laser beam 2 to the concave lens 6, and the concave lens 6 receives the reflected The laser beam reflected by the surface 4 and the laser beam 2 are refracted. The second convex lens 8 receives the laser beam refracted by the concave lens 6 , and makes the laser beam 2 refracted again and then enters the photodetector 5 . At this time, it is recorded here as the first incident position.

旋转行动后,激光器1发射出激光束2,激光束2入射至反射部3件上的反射面4,反射面4对激光束2进行反射,将激光束2反射至凹透镜6,凹透镜6接收经反射面4反射的激光束,并使得激光束发生折射。凸透镜二8接收经凹透镜6折射后的激光束2,并使得激光束2再次折射后入射光电探测器5。此时此处记为第二入射位置。After the rotation, the laser 1 emits a laser beam 2, and the laser beam 2 is incident on the reflective surface 4 on the reflective part 3. The reflective surface 4 reflects the laser beam 2 and reflects the laser beam 2 to the concave lens 6, and the concave lens 6 receives the The laser beam reflected by the reflective surface 4 refracts the laser beam. The second convex lens 8 receives the laser beam 2 refracted by the concave lens 6 , and makes the laser beam 2 refracted again and then enters the photodetector 5 . At this time, it is recorded here as the second incident position.

此时,处理系统根据第一入射位置与第二入射位置的变化量,处理得到所述反射部件3上被测物体的旋转角度值。结合图2,容易理解的,较于图1所示的方案,该方案通过凸透镜二8,使得旋转行动前入射光电探测器5的激光束2与旋转行动后入射光电探测器的激光束2近似平行,避免由于光电探测器的激光入射角变化过大对于位置测量精度的影响,保障了光电探测器的测量精度。At this time, the processing system processes and obtains the rotation angle value of the object to be measured on the reflective member 3 according to the amount of change between the first incident position and the second incident position. With reference to FIG. 2 , it is easy to understand that, compared with the solution shown in FIG. 1 , this solution uses the convex lens 2 8 , so that the laser beam 2 incident on the photodetector 5 before the rotating action is similar to the laser beam 2 incident on the photodetector after the rotating action. Parallel to avoid the influence on the position measurement accuracy due to the excessive change of the laser incident angle of the photodetector, the measurement accuracy of the photodetector is guaranteed.

如图3所示,在另一个实施方案中,在图1所示结构基础上,图1中的凹透镜6被替换为凸透镜一7。激光束2发射出的激光束2入射至反射部件3上的反射面4,反射面4将激光束2反射至凸透镜一7。凸透镜一7使得激光束发生折射。结合图3,容易理解的,旋转行动前后,经凸透镜一7折射后的激光束2的光路与凸透镜一7的焦点交集并交错射入光电探测器5。为了实现光电探测器5测量距离的进一步放大,即实现反射部件3角度测量精度的进一步提高,光电探测器5与凸透镜一7之间的距离大于两倍凸透镜一7的焦距距离。As shown in FIG. 3 , in another embodiment, on the basis of the structure shown in FIG. 1 , the concave lens 6 in FIG. 1 is replaced by a convex lens 7 . The laser beam 2 emitted by the laser beam 2 is incident on the reflecting surface 4 on the reflecting member 3 , and the reflecting surface 4 reflects the laser beam 2 to the convex lens 1 7 . The convex lens-7 refracts the laser beam. 3 , it is easy to understand that before and after the rotating action, the optical path of the laser beam 2 refracted by the convex lens 1 7 intersects with the focal point of the convex lens 1 7 and enters the photodetector 5 in a staggered manner. In order to further enlarge the measurement distance of the photodetector 5 , that is, to further improve the angle measurement accuracy of the reflective member 3 , the distance between the photodetector 5 and the convex lens 1 7 is greater than twice the focal length of the convex lens 1 7 .

如图4所示,在另一个实施方案中,在图3所示结构基础上,本高精度角度传感器中的探测头还包括凸透镜二8,凸透镜二8设置于凸透镜一7与光电探测器5之间。As shown in FIG. 4 , in another embodiment, based on the structure shown in FIG. 3 , the detector head in the high-precision angle sensor further includes a second convex lens 8 , and the second convex lens 8 is arranged between the first convex lens 7 and the photodetector 5 between.

在本实施方案中,光路传输过程如下:In this embodiment, the optical path transmission process is as follows:

旋转行动前,激光器1发射出激光束2,激光束2入射至反射部件3上的反射面4,反射面4对激光束2进行反射,将激光束2反射至凸透镜一7,凸透镜一7接收经反射面4反射的激光束2,并使得激光束2发生折射。且经凸透镜一7透射出的激光束入射凸透镜二8,凸透镜二8使得激光束2发生第二次折射,并入射至光电探测器5。此时此处记为第一入射位置。Before the rotation, the laser 1 emits the laser beam 2, and the laser beam 2 is incident on the reflective surface 4 on the reflective member 3. The reflective surface 4 reflects the laser beam 2 and reflects the laser beam 2 to the convex lens 1 7, and the convex lens 1 7 receives it. The laser beam 2 is reflected by the reflection surface 4, and the laser beam 2 is refracted. The laser beam transmitted by the first convex lens 7 enters the second convex lens 8 , and the second convex lens 8 causes the second refraction of the laser beam 2 to be incident on the photodetector 5 . At this time, it is recorded here as the first incident position.

旋转行动后,激光器1发射出激光束2,激光束2入射至反射部件3上的反射面4,反射面4对激光束2进行反射,将激光束2反射至凸透镜一7,凸透镜一7接收经反射面4反射的激光束2,并使得激光束2发生折射。且经凸透镜一7透射出的激光束入射凸透镜二8,凸透镜二8使得激光束2发生第二次折射,并入射至光电探测器5。此时此处记为第二入射位置。且如图4所示,旋转行动后入射光电探测器的激光束与旋转行动前入射光电探测器的激光束近似平行。After the rotation, the laser 1 emits the laser beam 2, the laser beam 2 is incident on the reflective surface 4 on the reflective member 3, the reflective surface 4 reflects the laser beam 2, reflects the laser beam 2 to the convex lens 1 7, and the convex lens 1 7 receives it. The laser beam 2 is reflected by the reflection surface 4, and the laser beam 2 is refracted. The laser beam transmitted by the first convex lens 7 enters the second convex lens 8 , and the second convex lens 8 causes the second refraction of the laser beam 2 to be incident on the photodetector 5 . At this time, it is recorded here as the second incident position. And as shown in FIG. 4 , the laser beam incident on the photodetector after the rotating motion is approximately parallel to the laser beam incident on the photodetector before the rotating motion.

处理系统根据第一入射位置与第二入射位置的变化量,处理得到所述反射部件上被测物体的旋转角度值。The processing system processes and obtains the rotation angle value of the object to be measured on the reflective member according to the variation of the first incident position and the second incident position.

在本实施方案中,通过凸透镜一7对激光器1发射出的激光束进行第一次折射,且如图4所示,凸透镜二8与凸透镜一7之间的距离大于两倍凸透镜一的焦距距离,使得光电探测器5测量距离得到进一步的放大,即实现反射部件3角度测量精度的进一步提高。凸透镜二8使得旋转行动前入射光电探测器5的激光束2与旋转行动后入射光电探测器5的激光束2近似平行,避免由于光电探测器5的激光入射角变化过大对于角度测量精度的影响,保障了光电探测器的测量精度。In this embodiment, the laser beam emitted by the laser 1 is refracted for the first time by the convex lens 1 , and as shown in FIG. 4 , the distance between the convex lens 2 8 and the convex lens 1 7 is greater than twice the focal length of the convex lens 1 , so that the measurement distance of the photodetector 5 is further amplified, that is, the angle measurement accuracy of the reflective member 3 is further improved. The second convex lens 8 makes the laser beam 2 incident on the photodetector 5 before the rotating action to be approximately parallel to the laser beam 2 incident on the photodetector 5 after the rotating action, so as to avoid the impact on the angle measurement accuracy due to the excessive change of the laser incident angle of the photodetector 5. Influence, to ensure the measurement accuracy of the photodetector.

上述几个不同结构的角度传感器中,反射部件上的全部所述反射面形状大小相同。作为一种具体的实施方式,反射部件为正多边形立柱,且正多边形立柱的每个侧面为反射面。通过反射部件上的全部所述反射面形状大小相同使得旋转过程中,光电探测器上测得的光束入射距离与角度变化量的比值保持不变。In the above angle sensors with different structures, all the reflecting surfaces on the reflecting member have the same shape and size. As a specific embodiment, the reflective component is a regular polygonal column, and each side surface of the regular polygonal column is a reflective surface. All the reflecting surfaces on the reflecting component have the same shape and size, so that the ratio of the incident distance of the light beam to the angle change measured on the photodetector remains unchanged during the rotation.

且上述几个不同结构的角度传感器中,均通过采用两个探测头实现连续测量,但是容易理解的,在保证实现连续测量的情况下,不限制探测头的个数,也可以是三个,四个及四个以上。And in the above-mentioned angle sensors of different structures, continuous measurement is realized by using two probe heads, but it is easy to understand that in the case of ensuring continuous measurement, the number of probe heads is not limited, and it can also be three. Four or more.

以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明的保护范围之内。The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention. should be included within the protection scope of the present invention.

Claims (10)

1. a kind of high-precision angle sensor, which is characterized in that including laser, the laser for emitting laser beams, institute It states laser beam and is incident to reflection component;
The reflection component, for fixing testee, the reflection component is rotatable and circumferentially arranged with several reflections Face, each reflecting surface is for reflecting the laser beam;
Concavees lens for receiving the laser beam of the reflective surface, and reflect laser beam;
Photodetector for receiving the light beam after concavees lens reflect, and measures its incoming position;
Processing system, specifically for the incoming position changing value according to light beam received on the photodetector, processing Obtain the rotation angle value of testee.
2. high-precision angle sensor according to claim 1, which is characterized in that further include convex lens two, the convex lens Mirror two is set between the concavees lens and photodetector, is entered from less parallel after the light beam planoconvex lens two that concavees lens project It is incident upon the photodetector.
3. high-precision angle sensor according to claim 1, which is characterized in that a concavees lens convex lens generation It replaces, and the distance between photodetector and convex lens one are greater than the focal distance of twice of convex lens one.
4. high-precision angle sensor according to claim 1, which is characterized in that the laser, concavees lens and photoelectricity Detector forms detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: at least one Photodetector in detecting head can receive the light beam of rotation front and back.
5. high-precision angle sensor according to claim 2, which is characterized in that the laser, convex lens two, recessed Mirror and photodetector form detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: extremely Photodetector in a rare detecting head can receive the light beam of rotation front and back.
6. high-precision angle sensor according to claim 3, which is characterized in that further include convex lens two, the convex lens Mirror two is set between the convex lens one and photodetector, approximate flat after the light beam planoconvex lens two that convex lens one projects Row is incident to the photodetector, and the distance between convex lens two and convex lens one greater than twice of convex lens one focal length away from From.
7. high-precision angle sensor according to claim 3, which is characterized in that the laser, convex lens one and light Electric explorer forms detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: at least one Photodetector in a detecting head can receive the light beam of rotation front and back.
8. high-precision angle sensor according to claim 6, which is characterized in that the laser, convex lens one, convex lens Two photodetector of mirror forms detecting head, and the quantity of the detecting head is multiple, and the positional relationship of multiple detecting heads meets: extremely Photodetector in a rare detecting head can receive the light beam of rotation front and back.
9. high-precision angle sensor according to claim 1, which is characterized in that described in the whole on the reflection component Reflector shape size is identical.
10. high-precision angle sensor according to claim 9, which is characterized in that the reflection component is regular polygon Column, each side of the regular polygon column are the reflecting surface.
CN201910281897.2A 2019-04-09 2019-04-09 A high-precision angle sensor Pending CN109945805A (en)

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CN112923873A (en) * 2021-03-11 2021-06-08 北方民族大学 A laser scanning device and angle measuring sensor and method based on laser scanning
CN114894124A (en) * 2022-05-17 2022-08-12 北方民族大学 An interferometric angle measurement system and measurement method
CN115104041A (en) * 2020-02-12 2022-09-23 科纳普公司 Grating system comprising at least two reflective grating arrangements

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CN114894124A (en) * 2022-05-17 2022-08-12 北方民族大学 An interferometric angle measurement system and measurement method
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