CN109934021A - Layout method of probe-proof switched capacitor PUF circuit - Google Patents
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Abstract
本发明公开一种防探针探测的开关电容PUF电路的布局方法,开关电容PUF所采样的电容仅采用由构成容性防护层的上层金属、下层金属及之间的绝缘层构成的寄生电容,不包括固定电容;然后采用输入输出无反馈通路的模拟放大/比较器对开关电容的输出电压差值进行放大,得到最终输出秘钥。同时,不再采用长度较长的金属线网保护芯片的敏感区域,而是用多个较短的金属线或者面积较小的金属块作为开关电容PUF采样电容的极板,并覆盖敏感区域,通过减小采样电容的面积,以同时防止同层及不同层的破坏+重建+探测攻击,增加金属容性防护层的探针探测灵敏度。
The invention discloses a layout method of a switched capacitor PUF circuit which is anti-probe detection. The capacitor sampled by the switched capacitor PUF only adopts the parasitic capacitance formed by the upper metal, the lower metal and the insulating layer between them which form the capacitive protective layer. Fixed capacitors are not included; then an analog amplifier/comparator with no feedback path for input and output is used to amplify the output voltage difference of the switched capacitor to obtain the final output key. At the same time, instead of using a long metal wire mesh to protect the sensitive area of the chip, multiple short metal wires or metal blocks with a small area are used as the pole plates of the switched capacitor PUF sampling capacitor to cover the sensitive area. By reducing the area of the sampling capacitor to prevent damage + reconstruction + detection attacks on the same layer and different layers at the same time, the probe detection sensitivity of the metal capacitive protective layer is increased.
Description
技术领域technical field
本发明涉及安全芯片秘钥生成电路及安全防护电路,具体为开关电容PUF秘钥生成电路及基于该电路的防探针探测布局方法,属于硬件信息安全技术领域。The invention relates to a security chip secret key generation circuit and a safety protection circuit, in particular to a switched capacitor PUF secret key generation circuit and an anti-probe detection layout method based on the circuit, belonging to the technical field of hardware information security.
背景技术Background technique
面对日益严重的信息安全威胁,安全芯片的应用越来越广泛,从传统的银行和电信行业,到移动支付、电子护照、电子身份证、防伪设备、智能电网以及知识产权保护等,都必须采用安全芯片保证数据的安全,安全性已经成为一个电子产品的基本和必备特性。现今,黑客的攻击手段早已不局限于病毒、木马等软件攻击,而是采用了攻击性更强、防护难度更高的侵入式攻击方式直接窃取用户的密钥信息。所谓侵入式攻击,是指通过反向工程直接观测芯片中的密钥,或者使用探针并结合激光刻蚀、聚焦离子束(Focused Ion Beam,FIB)等暴力手段直接探测芯片内的密钥,攻击性强,造成的损失也非常大。In the face of increasingly serious threats to information security, the application of security chips is becoming more and more extensive, from traditional banking and telecommunications industries, to mobile payments, e-passports, e-ID cards, anti-counterfeiting equipment, smart grids, and intellectual property protection, etc. Using a security chip to ensure data security, security has become a basic and essential feature of an electronic product. Today, hackers' attack methods are no longer limited to software attacks such as viruses and Trojan horses, but have adopted invasive attacks that are more aggressive and more difficult to protect, and directly steal users' key information. The so-called invasive attack refers to the direct observation of the key in the chip through reverse engineering, or the use of probes combined with laser etching, Focused Ion Beam (FIB) and other violent means to directly detect the key in the chip. The attack is strong, and the damage caused is also very large.
为了避免直接反向工程攻击,最有效的方法是使用物理不可克隆函数(Physically Unclonable Function,PUF)提供密钥,PUF检测的是集成电路生产过程中构成电路器件的材料物理特性的随机变化,即使是芯片制造厂商也不可能采用相同的电路复制出完全相同的密钥,攻击者更无法通过版图分析反推出密钥。PUF技术虽能防止直接反向工程攻击,但无法阻止探测攻击,攻击者可以采用探针直接探测芯片内部敏感部位电信号;若敏感信息处于芯片底层,攻击者也可以采用破坏+探测攻击,首先去除顶层布局,然后再用微探针探测内部敏感信号;此外,若顶层防护层具有电信号特性,在破坏顶层防护层的布局后,为了保持被破坏电路的电信号连接状态,需要在其他地方进行信号线重建。重建+破坏+探测攻击正是利用FIB将被破坏的信号线在别的位置重新连接起来,以维持电路的正确连接状态,再用探针在已破坏的区域探测芯片内部敏感信息。可以看出,上述直接探测、破坏+探测、破坏+重建+探测等三种采用探针探测的攻击方式的攻击能力非常强,防护难度也非常大。In order to avoid direct reverse engineering attacks, the most effective method is to use a Physically Unclonable Function (PUF) to provide the key. PUF detects random changes in the physical properties of the materials that make up circuit devices during the production of integrated circuits, even if It is impossible for chip manufacturers to use the same circuit to copy the exact same key, and the attacker cannot deduce the key through layout analysis. Although PUF technology can prevent direct reverse engineering attacks, it cannot prevent detection attacks. Attackers can use probes to directly detect the electrical signals of sensitive parts inside the chip; if the sensitive information is at the bottom of the chip, attackers can also use destruction + detection attacks. Remove the top layer layout, and then use microprobes to probe internal sensitive signals; in addition, if the top layer protection layer has electrical signal characteristics, after destroying the layout of the top layer protection layer, in order to maintain the electrical signal connection state of the destroyed circuit, it needs to be located elsewhere Perform signal line reconstruction. The reconstruction + destruction + detection attack uses the FIB to reconnect the damaged signal lines in other positions to maintain the correct connection state of the circuit, and then uses the probe to probe the sensitive information inside the chip in the damaged area. It can be seen that the above three attack methods using probe detection, such as direct detection, destruction + detection, destruction + reconstruction + detection, have very strong attack capabilities and are very difficult to defend.
为了防止上述探测攻击,现有研究主要采用容性防护层对敏感区域进行防护,并将防护层的容性特性与密钥联系起来。例如,中国发明专利《一种防破解PUF结构》(专利号CN 104052604B)提出了一种基于开关电容PUF的防破解结构,如附图1所示。由于开关电容PUF采样的是电容比例的工艺随机偏差,且所采样电容的上下极板引至芯片顶层和次顶层金属,若外部探针探测顶层或者次顶层金属时,顶层或者次顶层金属所连接的采样电容容值也将发生变化,从而使得开关电容PUF所采样的电容比例也发生变化,进而改变开关电容PUF的输出秘钥。当外部破坏攻击发生时,与防护层相连的密钥产生电路或者检测电路检测防护层电路特性的变化,进而改变输出密钥,以使探针探测错误的密钥。但需要指出的是,该发明专利存在以下四个问题:In order to prevent the above-mentioned detection attacks, the existing research mainly uses the capacitive protection layer to protect the sensitive area, and associates the capacitive characteristics of the protection layer with the key. For example, the Chinese invention patent "An Anti-cracking PUF Structure" (Patent No. CN 104052604B) proposes an anti-cracking structure based on a switched capacitor PUF, as shown in FIG. 1 . Since the switched capacitor PUF samples the process random deviation of the capacitance ratio, and the upper and lower plates of the sampled capacitor lead to the top and sub-top metal of the chip, if the external probe detects the top or sub-top metal, the top or sub-top metal is connected to The capacitance value of the sampling capacitor will also change, so that the ratio of the capacitance sampled by the switched capacitor PUF will also change, thereby changing the output key of the switched capacitor PUF. When an external sabotage attack occurs, the key generation circuit or detection circuit connected to the protection layer detects the change of the circuit characteristics of the protection layer, and then changes the output key, so that the probe detects the wrong key. However, it should be pointed out that the invention patent has the following four problems:
(1)首先,开关电容PUF采样的电容由固定电容和寄生电容两部分构成,所用来对外部探测攻击进行检测的金属线网构成的寄生电容只是采样电容的一部分,这必将降低外部探测攻击的灵敏度;(1) First, the capacitor sampled by the switched capacitor PUF is composed of two parts: fixed capacitor and parasitic capacitor. The parasitic capacitor formed by the metal wire mesh used to detect external detection attacks is only a part of the sampling capacitor, which will definitely reduce external detection attacks. sensitivity;
(2)其次,其在顶层和次顶层都采用了连接至采样电容极板的信号金属线和地线混合绕线,目的就是让信号金属线与地线紧密分布,增加外部探针探测的难度:由于信号金属线与地线之间的间距很小,大探针探测的话必将使它们短路;对于破坏+重建攻击,若在同层进行操作,其操作的空间也很小,只能在金属线和地线之间进行操作,如附图2所示,在某0.18微米CMOS工艺下,同层重建的空间只有0.36微米,其难度大大增加。该种信号金属线和地线混合布线的布局方式能够有效防止大探针探测和同层破坏+重建+探测攻击,但是仍然存在严重的风险:如附图3所示,现在FIB普遍的方式是将处于钝化层以下的金属信号通过FIB引到钝化层外,再在钝化层进行重新连接,这样的话,就不存在操作空间较小的问题了,攻击者可以很简单的将顶层和次顶层金属分别引至钝化层进行重新连接,漏出处于底层的重要信号线,并用探针进行探测。对于这种攻击,上述发明专利几乎没有任何防护能力;(2) Secondly, it adopts the mixed winding of the signal metal wire and the ground wire connected to the sampling capacitor plate on the top layer and the sub-top layer. The purpose is to make the signal metal wire and the ground wire closely distributed and increase the difficulty of external probe detection. : Since the distance between the signal metal wire and the ground wire is very small, a large probe will definitely short-circuit them; for the destruction + reconstruction attack, if the operation is performed on the same layer, the operation space is also very small, and it can only be used in the The operation between the metal line and the ground line is shown in Figure 2. Under a certain 0.18-micron CMOS process, the space for reconstruction of the same layer is only 0.36 microns, which greatly increases the difficulty. This kind of layout method of mixed wiring of signal metal wire and ground wire can effectively prevent large probe detection and same-layer destruction + reconstruction + detection attack, but there are still serious risks: as shown in Figure 3, the current common method of FIB is Lead the metal signal below the passivation layer to the outside of the passivation layer through the FIB, and then reconnect the passivation layer. In this case, there is no problem of small operation space. The attacker can easily connect the top layer and the passivation layer. The sub-top layer metals are respectively led to the passivation layer for reconnection, and the important signal lines at the bottom layer are leaked and probed with probes. For this kind of attack, the above-mentioned invention patents have almost no protection capability;
(3)再次,虽然该专利只是将连接至固定电位的电容上极板引至顶层金属,而敏感信号N、P则处于次顶层金属,在秘钥产生的时候顶层金属看起来不会出现敏感信号。但是需要指出的是,如附图4所示,该开关电容PUF采用的是latch式的比较器对该敏感信息点N、P进行比较,当使能信号EN变为1的瞬间时,N、P两点电压先为电荷再分布后的电压,但是马上Latch式的比较器会对N、P两点进行放大比较,并快速地使该N、P敏感信号放大为实际输出的轨到轨“0/1”数字秘钥,可以看出,N、P两点将从直流电平迅速地变为“0/1”,也即经历一个快速脉冲变化。而由于电容所存储的电荷不能发生突变,也即电容具有高频耦合效应,N、P两点电压的快速变化也将耦合至连接到顶层金属的电容上极板金属信号线,若外部攻击者用探针探测顶层金属,可以通过观察所探测金属线是否出现脉冲来判断对应的N、P的最终电压值(也即最终秘钥值):若出现负脉冲或者毛刺,则对应N或者P为0,否则若出现正脉冲或者毛刺,则对应的N或者P为1。同时,需要指出的是,探针接到顶层金属后,相当于在上极板与地之间接了一个探针引入的寄生电容,但由于上极板连接的是固定电位,并不会对原始电容的失配采样造成影响,也即该种通过观测顶层金属出现正或者负毛刺或者脉冲的攻击方式将不会影响原始秘钥,攻击起来非常有效;(3) Again, although the patent only leads the upper plate of the capacitor connected to the fixed potential to the top metal, and the sensitive signals N and P are in the sub-top metal, the top metal does not appear to be sensitive when the secret key is generated. Signal. However, it should be pointed out that, as shown in Figure 4, the switched capacitor PUF uses a latch-type comparator to compare the sensitive information points N and P. When the enable signal EN becomes 1, N, P The voltage of the two points of P is the voltage after the charge is redistributed, but immediately the Latch-type comparator will amplify and compare the two points of N and P, and quickly amplify the N and P sensitive signals into the actual output rail-to-rail " 0/1" digital key, it can be seen that the two points N and P will rapidly change from the DC level to "0/1", that is, undergo a rapid pulse change. Since the charge stored in the capacitor cannot undergo sudden change, that is, the capacitor has a high-frequency coupling effect, and the rapid changes in the voltages of N and P will also be coupled to the metal signal line on the upper plate of the capacitor connected to the top metal. If an external attacker Probe the top metal with a probe, and you can judge the final voltage value (that is, the final key value) of the corresponding N and P by observing whether there is a pulse on the detected metal wire: if a negative pulse or burr occurs, the corresponding N or P is 0, otherwise if a positive pulse or glitch occurs, the corresponding N or P is 1. At the same time, it should be pointed out that after the probe is connected to the top metal, it is equivalent to connecting a parasitic capacitance introduced by a probe between the upper plate and the ground, but since the upper plate is connected to a fixed potential, it will not affect the original The mismatched sampling of capacitors has an impact, that is, the attack method that observes positive or negative glitches or pulses on the top metal will not affect the original key, and the attack is very effective;
(4)此外,该发明专利采用的是与开关电容PUF所采样电容连接的容性金属线网保护其他需要保护的敏感区域,若是敏感区域较大,实际的容性金属线网也非常长,这将大大降低该容性金属防护层的灵敏度。若是外部攻击者在非常小的范围内对该金属线网进行切断破坏,并将其引至最顶层的钝化层,进行重建,那么对于整个金属线网而言,金属线网实际的容值变化将非常小,很有可能低于比较器所能分辨的能力,最终相当于外部探针在不破坏容性防护层的前提下,能够探测处于防护层下方的其他敏感信息,从而大大降低容性金属防护层的防探测灵敏度。(4) In addition, the invention patent uses a capacitive metal wire mesh connected to the sampling capacitor of the switched capacitor PUF to protect other sensitive areas that need to be protected. If the sensitive area is large, the actual capacitive metal wire mesh is also very long. This will greatly reduce the sensitivity of the capacitive metal shield. If an external attacker cuts and destroys the metal wire mesh in a very small range, and leads it to the top passivation layer for reconstruction, then for the entire metal wire mesh, the actual capacitance value of the metal wire mesh is The change will be very small, which is likely to be lower than the ability of the comparator to distinguish, which is ultimately equivalent to that the external probe can detect other sensitive information under the protective layer without destroying the capacitive protective layer, thereby greatly reducing the capacitance. The anti-detection sensitivity of the metal protective layer.
综上可以看出,现有基于开关电容PUF的容性金属防护层存在外部探针探测攻击检测灵敏度低、仍有严重的防护缺陷等问题,为了使基于开关电容PUF的容性金属防护层具有真正的防探测攻击能力,首先,所采样的电容不应该引入固定电容,而是应该全部采用容性金属构成的寄生电容;其次,无需采用信号线与地线混合绕线,且金属线网不应走线过长,应采用多个较小面积或者长度较短的金属块或者金属线进行布局;最后,也是最为重要的,对N、P两点进行比较放大的放大器绝对不能采用输入输出耦合的latch式放大器,N、P两点的电压不能发生突变。To sum up, it can be seen that the existing capacitive metal protection layer based on switched capacitor PUF has problems such as low detection sensitivity of external probe detection attack and serious protection defects. In order to make the capacitive metal protection layer based on switched capacitor PUF have The real anti-detection attack capability, first of all, the sampled capacitors should not introduce fixed capacitors, but all parasitic capacitors composed of capacitive metals; The wiring should be too long, and multiple metal blocks or metal lines with smaller area or shorter length should be used for layout; finally, and most importantly, the amplifier that compares and amplifies the N and P points must not use input and output coupling. The latch type amplifier, the voltage of N and P points cannot change abruptly.
发明内容SUMMARY OF THE INVENTION
本发明针对背景技术所述问题,提出了一种防探针探测的开关电容PUF电路的布局方法,开关电容PUF所采样的电容仅采用由构成容性防护层的上层金属、下层金属及之间的绝缘层构成的寄生电容,不包括固定电容;然后采用输入输出无反馈通路的模拟放大/比较器对开关电容的输出电压差值进行放大,得到最终输出秘钥。同时,不再采用长度较长的金属线网保护芯片的敏感区域,而是用多个较短的金属线或者面积较小的金属块作为开关电容PUF采样电容的极板,并覆盖敏感区域,通过减小采样电容的面积,以同时防止同层及不同层的破坏+重建+探测攻击,增加金属容性防护层的探针探测灵敏度。In view of the problems of the background technology, the present invention proposes a layout method of a switched capacitor PUF circuit that is anti-probe detection. The parasitic capacitance formed by the insulating layer of the switch capacitor does not include the fixed capacitor; then the output voltage difference of the switched capacitor is amplified by an analog amplifier/comparator with no feedback path for input and output, and the final output key is obtained. At the same time, instead of using a long metal wire mesh to protect the sensitive area of the chip, multiple short metal wires or metal blocks with a small area are used as the pole plates of the switched capacitor PUF sampling capacitor to cover the sensitive area. By reducing the area of the sampling capacitor to prevent damage + reconstruction + detection attacks on the same layer and different layers at the same time, the probe detection sensitivity of the metal capacitive protective layer is increased.
为了达到上述目的,本发明采用以下方案:In order to achieve the above object, the present invention adopts the following scheme:
防探针探测的开关电容PUF电路的布局方法,包括:开关电容PUF所采样的电容仅采用由构成容性防护层的上层金属、下层金属及之间的绝缘层构成的寄生电容,不包括固定电容;然后采用输入输出无反馈通路的模拟放大/比较器对开关电容的输出电压差值进行放大,得到最终输出秘钥,其特征在于:A layout method for a switched capacitor PUF circuit that is anti-probe detection, comprising: the capacitor sampled by the switched capacitor PUF only adopts the parasitic capacitance composed of the upper metal, the lower metal and the insulating layer between the capacitive protective layers, excluding fixed capacitances. capacitor; then use an analog amplifier/comparator with no feedback path for input and output to amplify the output voltage difference of the switched capacitor to obtain the final output key, which is characterized in that:
构成开关电容PUF采样电容上下极板的两层金属可以是任意相邻两层金属,也可以是相互之间没有其他金属走线的不相邻金属,但这两层金属面积相同,且完全重叠;The two layers of metal that form the upper and lower plates of the switched capacitor PUF sampling capacitor can be any two adjacent layers of metal, or they can be non-adjacent metals without other metal traces between each other, but the two layers of metal have the same area and completely overlap. ;
构成开关电容PUF采样电容介质层的绝缘层可以是CMOS工艺中相邻金属层之间的通用绝缘层,也可以是CMOS工艺中金属-绝缘层-金属电容器件的高介电常数绝缘层。The insulating layer constituting the switched capacitor PUF sampling capacitor dielectric layer can be a general insulating layer between adjacent metal layers in a CMOS process, or a high dielectric constant insulating layer of a metal-insulating layer-metal capacitor device in the CMOS process.
进一步的,开关电容PUF每个采样金属电容面积均为几平方微米,并用多个金属电容阵列覆盖芯片中的敏感区域,增加防探针探测的灵敏度;Further, the area of each sampling metal capacitor of the switched capacitor PUF is several square microns, and multiple metal capacitor arrays are used to cover the sensitive area in the chip to increase the sensitivity of anti-probe detection;
所述开关电容PUF采样的金属电容容值在fF级别,可以是长度为几微米至十几微米的线状结构,也可以是面积为几平方微米的块状结构。The metal capacitance value sampled by the switched capacitor PUF is at the fF level, which can be a linear structure with a length of several micrometers to several dozen micrometers, or a block structure with an area of several square micrometers.
进一步的,用于对开关电容的输出电压差值进行放大比较的比较器由模拟比较器构成,不存在输出秘钥至输入敏感信号点的反馈通路,避免外部攻击者通过探测上层连接至固定电位的金属线获得输出秘钥值。Further, the comparator used to amplify and compare the output voltage difference of the switched capacitor is composed of an analog comparator, and there is no feedback path from the output key to the input sensitive signal point, preventing external attackers from connecting to the fixed potential by detecting the upper layer. The metal wire gets the output key value.
本发明的有益效果是:The beneficial effects of the present invention are:
本发明在保证实现开关电容PUF秘钥产生电路功能的前提下,所采样电容仅包括容性金属防护层构成的寄生电容,不包括固定电容,增加了外部探针探测的检查灵敏度。同时采用多个金属短线或者面积较小的金属块覆盖敏感区域,从而避免采用灵敏度较低的长金属线网,能够进一步提升外部探针探测的检测灵敏度。此外,避免采用latch式的输入输出耦合放大器,而采用模拟放大/比较器,能够有效防止电容耦合导致的秘钥信息泄露,提升安全性。Under the premise of ensuring the realization of the function of the switch capacitor PUF secret key generating circuit, the sampled capacitor only includes the parasitic capacitance formed by the capacitive metal protective layer, and does not include the fixed capacitance, thereby increasing the inspection sensitivity of external probe detection. At the same time, multiple metal short wires or metal blocks with a small area are used to cover the sensitive area, so as to avoid using a long metal wire mesh with low sensitivity, which can further improve the detection sensitivity of external probe detection. In addition, avoiding the use of a latch-type input-output coupling amplifier and using an analog amplifier/comparator can effectively prevent the leakage of secret key information caused by capacitive coupling and improve security.
附图说明Description of drawings
图1是参考发明专利提出的一种基于开关电容PUF的防破解结构;Fig. 1 is a kind of anti-cracking structure based on switched capacitor PUF proposed with reference to the invention patent;
图2是参考发明专利用于防同层破坏+重建+探测攻击的布局结构示意图;FIG. 2 is a schematic diagram of the layout structure used for anti-destruction + reconstruction + detection attack on the same layer with reference to the invention patent;
图3是不同层破坏+重建+探测攻击结构示意图;Figure 3 is a schematic diagram of the structure of different layers of destruction + reconstruction + detection attack;
图4是参考发明专利N、P瞬态信号通过电容耦合至顶层金属的波形图;FIG. 4 is a waveform diagram of the N, P transient signals coupled to the top metal through capacitance by referring to the invention patent;
图5是本发明所提出的基于开关电容PUF的防探针探测布局方式;Fig. 5 is the anti-probe detection layout mode based on switched capacitor PUF proposed by the present invention;
图6是参考发明专利和本发明在同层受到破坏+重建+探测攻击的示意图;Fig. 6 is the schematic diagram that the reference invention patent and the present invention are damaged + reconstruction + detection attack at the same layer;
图7是参考发明专利和本发明在不同层受到破坏+重建+探测攻击的示意图;7 is a schematic diagram of the reference invention patent and the present invention being destroyed + reconstructed + detection attack at different layers;
图8是本发明所采用的一种输入输出之间无反馈的模拟放大器/比较器结构示意图。FIG. 8 is a schematic structural diagram of an analog amplifier/comparator with no feedback between input and output used in the present invention.
具体实施方式Detailed ways
以下结合附图和具体实施实例对本发明进行进一步说明,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,旨在用于解释本发明,而不能理解为对本发明的限制,凡在本发明的精神和原则之内所做的任何修改、等同替换或改进等,均应包含在本发明的权利要求范围之内,本技术方案中未详细述及的,均为公知技术。The present invention is further described below with reference to the accompanying drawings and specific embodiments, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but should not be construed as a limitation of the present invention, and any modifications, equivalent replacements, or Improvements, etc., should be included within the scope of the claims of the present invention, and those not described in detail in this technical solution are all known technologies.
实施实例:图5所示的基于开关电容PUF的防探针探测布局方式,PUF仍然采用开关电容原理,检测的是两个电容比例CUP1/CDN1及CUP2/CDN2之间的失配,其中四个采样电容CUP1、CDN1、CUP2、CDN2可以采用寄生的金属-绝缘层-金属结构电容,上层金属和下层金属分别构成电容的两个极板,这两层金属可以采用任意相邻的两层金属,也可以采用之间没有其他信号线的不相邻两层金属,而CMOS工艺中金属层之间的通用绝缘层构成电介质;这四个采样电容的介质层也可以采用CMOS工艺中金属-绝缘层-金属电容所用的特殊的介电常数较高的介质层。对于SC PUFi单元,在设计时,设定CUP1=CUP2,CDN1=CDN2,从而有CUP1/CDN1=CUP2/CDN2。但是由于CMOS工艺中存在偏差,CUP1和CDN1并不会分别完全等于CUP2和CDN2,而是会在两个电容比例之间引入失配:CUP1/CDN1=δ+CUP2/CDN2。电路先经过放电阶段,即EN=0,所有电容两端都接GND,从而使所有电容存储的电荷都为0;然后EN=1,电路进入电荷再分布状态,CUP1和CUP2的上极板均接VDD,P、N两点的电压将与CUP1/CDN1和CUP2/CDN2有关。此时,电容比例的失配δ将在P和N之间引入电压差:Implementation example: The anti-probe detection layout based on the switched capacitor PUF shown in Figure 5, the PUF still adopts the switched capacitor principle, and detects the mismatch between the two capacitor ratios C UP1 /C DN1 and C UP2 /C DN2 , among which the four sampling capacitors C UP1 , C DN1 , C UP2 , and C DN2 can be parasitic metal-insulating layer-metal structure capacitors, and the upper metal and the lower metal respectively form the two pole plates of the capacitor, and the two layers of metal can be Any two adjacent layers of metal, or two non-adjacent layers of metal without other signal lines between them, can also be used, and the general insulating layer between the metal layers in the CMOS process constitutes a dielectric; the dielectric layers of the four sampling capacitors can also be used. A special dielectric layer with high dielectric constant used in metal-insulator-metal capacitors in the CMOS process is used. For the SC PUFi unit, in design, C UP1 =C UP2 , C DN1 =C DN2 , so that C UP1 /C DN1 =C UP2 /C DN2 . However, due to deviations in the CMOS process, C UP1 and C DN1 will not be exactly equal to C UP2 and C DN2 respectively, but will introduce a mismatch between the two capacitance ratios: C UP1 /C DN1 =δ+C UP2 / CDN2 . The circuit first goes through the discharge stage, that is, EN=0, and both ends of all capacitors are connected to GND, so that the stored charges of all capacitors are 0; then EN=1, the circuit enters the state of charge redistribution, and the upper poles of C UP1 and C UP2 Both boards are connected to VDD, and the voltages of P and N will be related to C UP1 /C DN1 and C UP2 /C DN2 . At this point, the mismatch δ in the capacitance ratio will introduce a voltage difference between P and N:
由此便将电容比例失配转换为电压差值,然后所得的电压差值将由比较器进行放大,并最终转换为轨到轨的输出数字秘钥Key[i]。This converts the capacitance ratio mismatch into a voltage difference, which is then amplified by the comparator and finally converted into a rail-to-rail output digital key Key[i].
上述基于SC PUF的秘钥产生原理与参考发明专利一致,但是为了提高容性金属防护层的探针探测攻击检测灵敏度,本发明中采样电容CUP1、CUP2、CDN1、CDN2不再包括固定电容,而是仅由两层金属及其之间的绝缘层构成的寄生电容构成,这样金属防护层的变化将全部反应至开关电容PUF中,增加了探针探测攻击检测灵敏度。The above-mentioned secret key generation principle based on SC PUF is consistent with the reference invention patent, but in order to improve the detection sensitivity of the probe detection attack of the capacitive metal protective layer, the sampling capacitors C UP1 , C UP2 , C DN1 , and C DN2 in the present invention no longer include The fixed capacitance is only composed of the parasitic capacitance composed of two layers of metal and the insulating layer between them, so that the change of the metal protective layer will be fully reflected in the switched capacitor PUF, which increases the detection sensitivity of probe detection attacks.
此外,在附图5中,构成采样电容CUP1、CUP2、CDN1、CDN2的金属为面积较小的块状结构或者长度较短的线状结构,而非参考发明专利里面的长金属线网,当外部攻击试图对这些金属防护层进行破坏或者重建时,如附图6(a)和附图7(a)所示,对于参考发明专利的长金属线网而言,由于每根金属线非常长,若在小范围内对金属线进行同层或者不同层破坏+重建,以漏出金属线网下面的重要敏感信息,其所引起的电容变化相对于总电容而言可能微不足道,因此,攻击者采用破坏+重建+探针探测攻击很有可能获取到正确的信息,而不会引起开关电容PUF输出秘钥的变化。而对于本发明而言,每个金属电容或者采用长度较短的金属线,或者采用面积较小的金属块,其长度或者面积与外部攻击所需的最小面积(几平方微米)在同一数量级,并用多个金属线或者金属块阵列覆盖整个所需保护的区域,若外部破坏+重建攻击发生时,其必然引起采样电容较大范围的变化,从而大大提升防外部探测攻击的灵敏度,如附图6(b,c)和附图7(b,c)所示。以现有所能达到的破坏+重建能力为例,FIB所能进行的最小操作区域约为几平方微米,因此,构成CUP1、CUP2、CDN1、CDN2四个采样电容的金属线或者金属块总面积也约为几平方微米,对应的容值约在几fF~几十fF之间。In addition, in FIG. 5 , the metals constituting the sampling capacitors C UP1 , C UP2 , C DN1 , and C DN2 are block-shaped structures with smaller area or line-shaped structures with shorter lengths, instead of referring to the long metals in the invention patent Wire mesh, when external attack attempts to destroy or rebuild these metal protective layers, as shown in Figure 6(a) and Figure 7(a), for the long metal wire mesh referenced to the invention patent, due to each The metal wire is very long. If the same layer or different layers of the metal wire are destroyed + reconstructed in a small area to leak the important and sensitive information under the metal wire mesh, the capacitance change caused by it may be insignificant compared to the total capacitance. Therefore, , it is very possible for the attacker to obtain the correct information by using the destruction + reconstruction + probe detection attack without causing the change of the output key of the switched capacitor PUF. For the present invention, each metal capacitor uses either a metal wire with a shorter length, or a metal block with a smaller area, whose length or area is in the same order of magnitude as the minimum area (a few square microns) required by an external attack, And use multiple metal wires or metal block arrays to cover the entire area to be protected. If an external damage + reconstruction attack occurs, it will inevitably cause a wide range of changes in the sampling capacitance, thus greatly improving the sensitivity of anti-external detection attacks, as shown in the attached picture 6(b,c) and Figure 7(b,c). Taking the existing destruction + reconstruction capability as an example, the minimum operation area that can be performed by FIB is about a few square microns . The total area of the metal block is also about a few square microns, and the corresponding capacitance is between a few fF and tens of fF.
最后,为了避免敏感信号点N、P出现电压突变而导致外部攻击可以通过探测连接至CUP1/CUP2上极板的上层金属也出现与N、P最终电压相关的正脉冲或者负脉冲,进而获得输出秘钥值,N、P电压应避免发生突变,本专利避免使用latch式的输入-输出耦合放大器,而是采用模拟电路中常用的输入输出之间无反馈的放大器/比较器,在比较和比较结束时,N、P的电压不会发生变化,外部攻击也无法通过探测上层金属获得PUF最终的秘钥值,一种实施实例如附图8所示。Finally, in order to avoid external attacks caused by voltage mutation at sensitive signal points N and P, the output can be obtained by detecting that the upper metal connected to the upper plate of CUP1/CUP2 also has positive or negative pulses related to the final voltages of N and P. The key value, N, P voltage should avoid sudden change, this patent avoids the use of latch-type input-output coupling amplifier, but adopts the amplifier/comparator with no feedback between the input and output commonly used in analog circuits. At the end, the voltages of N and P will not change, and external attacks cannot obtain the final key value of the PUF by detecting the upper layer metal. An example of implementation is shown in Figure 8.
上述实施例仅例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟悉此技术的人士皆可在不违背本发明的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本发明的权利要求所涵盖。The above-mentioned embodiments merely illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed in the present invention should still be covered by the claims of the present invention.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111916400A (en) * | 2020-07-22 | 2020-11-10 | 湖北大学 | Chip semi-invasive attack prevention method based on substrate coupling capacitive PUF |
US20210377058A1 (en) * | 2020-05-28 | 2021-12-02 | Stmicroelectronics (Crolles 2) Sas | Integrated physical unclonable function device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104052604A (en) * | 2014-05-23 | 2014-09-17 | 戴葵 | Novel anti-cracking PUF structure |
US20140320151A1 (en) * | 2012-10-29 | 2014-10-30 | Altis Semiconductor | Tamper Detection Arrangement |
CN106252348A (en) * | 2016-08-22 | 2016-12-21 | 上海华力微电子有限公司 | A kind of laying out pattern method being applicable to low capacitance density Test Constructure of |
CN107292200A (en) * | 2017-05-02 | 2017-10-24 | 湖北工业大学 | Strong PUF circuit structures based on switching capacity |
-
2019
- 2019-01-28 CN CN201910078051.9A patent/CN109934021B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140320151A1 (en) * | 2012-10-29 | 2014-10-30 | Altis Semiconductor | Tamper Detection Arrangement |
CN104052604A (en) * | 2014-05-23 | 2014-09-17 | 戴葵 | Novel anti-cracking PUF structure |
CN106252348A (en) * | 2016-08-22 | 2016-12-21 | 上海华力微电子有限公司 | A kind of laying out pattern method being applicable to low capacitance density Test Constructure of |
CN107292200A (en) * | 2017-05-02 | 2017-10-24 | 湖北工业大学 | Strong PUF circuit structures based on switching capacity |
Non-Patent Citations (1)
Title |
---|
万美琳: "适用于WSN的无线收发机芯片关键技术研究", 《信息科技辑》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210377058A1 (en) * | 2020-05-28 | 2021-12-02 | Stmicroelectronics (Crolles 2) Sas | Integrated physical unclonable function device |
US12052376B2 (en) * | 2020-05-28 | 2024-07-30 | Stmicroelectronics (Crolles 2) Sas | Integrated physical unclonable function device |
CN111916400A (en) * | 2020-07-22 | 2020-11-10 | 湖北大学 | Chip semi-invasive attack prevention method based on substrate coupling capacitive PUF |
CN111916400B (en) * | 2020-07-22 | 2023-06-27 | 湖北大学 | Chip anti-semi-invasive attack method based on substrate coupling capacitive PUF |
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