CN109931250B - Series cavity array type micro piezoelectric gas compressor - Google Patents
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- 238000001816 cooling Methods 0.000 claims abstract description 36
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 239000003292 glue Substances 0.000 claims abstract description 5
- 239000000919 ceramic Substances 0.000 claims description 18
- 239000000110 cooling liquid Substances 0.000 claims description 15
- 230000010287 polarization Effects 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000006835 compression Effects 0.000 abstract description 14
- 238000007906 compression Methods 0.000 abstract description 14
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 63
- 238000009825 accumulation Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000017525 heat dissipation Effects 0.000 description 4
- 230000010354 integration Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004089 microcirculation Effects 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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Abstract
The invention belongs to the technical field of miniature gas compressors, and particularly relates to a serial cavity array type miniature piezoelectric gas compressor, which is integrally formed by an outer sleeve, a cooling sleeve, an upper plate, a middle plate, a lower plate, a sealing ring, a one-way valve, a fourth one-way valve and a piezoelectric vibrator; the first piezoelectric vibrator and the third piezoelectric vibrator are sequentially installed between the lower end face of the upper plate and the upper end face of the middle plate from left to right, the second piezoelectric vibrator is installed between the lower end face of the middle plate and the upper end face of the lower plate, and the diameters of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are sequentially reduced. And heat conducting glue is coated between the cooling sleeve and the cover plate, a cooling pipeline is arranged on the outer surface of the cooling sleeve, and an outer sleeve is arranged on the outer side of the cooling sleeve. Features and advantages: the previous stage cavity sucks large-volume gas to sufficiently supply the next stage cavity for compression, so that the gas compression amount of each stage of cavity can be effectively accumulated, the energy conversion efficiency is high, the energy density is high, and the output of large-flow and high-pressure gas can be realized simultaneously.
Description
Technical Field
The invention belongs to the technical field of miniature gas compressors, and particularly relates to a serial cavity array type miniature piezoelectric gas compressor.
Background
Because of the advantages of small size, compact structure, high control precision and the like of the micro compressor, the micro compressor is widely applied to the fields of electronic cooling, chemical synthesis, gas delivery, aerospace and the like. Chinese patent CN105321404a proposes an electromagnetic compressor, mainly comprising a fixed housing, an air inlet pipe, an air outlet pipe, a cylinder, a piston, a transmission frame, an armature core and an electromagnetic coil, the electromagnetic compressor is easy to control and has large electromagnetic force; chinese patent CN207048923U proposes a single-drive type micro-circulation compressor for natural gas, which adopts a vertical structure to perform structural design of the compressor, and uses a motor to drive, so that the floor space is small, and the maintenance and the transportation are convenient. However, the motor-driven micro gas compressor has a complex structure, a large volume, high power consumption and electromagnetic interference, and is not convenient for system integration and miniaturization. Pneumatic and electrostatic driven gas compressors have been proposed in turn. The pneumatic type device is driven by an independent air source and cannot be used for portable or independent instruments; since the diaphragm is driven by a small driving force and requires a high voltage, it is difficult to output a high-pressure gas.
The miniature piezoelectric gas compressor has simple structure, low power consumption, high energy density, no electromagnetic interference and easy control, and is an effective method for constructing the miniature gas compressor. However, most of the existing micro piezoelectric gas compressors are of a single-cavity structure, so that the pressure rising capability of the compressor is insufficient, the pressure level of pumping fluid can be achieved only, and the energy density is not high due to the fact that the air is easy to compress and the driving capability of a single piezoelectric vibrator is limited, so that the practical application of the micro piezoelectric gas compressor is limited.
The invention comprises the following steps:
aiming at the defects of the existing micro piezoelectric gas compressor, the invention provides a serial cavity array type micro piezoelectric gas compressor (hereinafter referred to as an array type micro compressor) which can simultaneously output high pressure/large flow, has no electromagnetic interference, high energy density, simple structure and low cost, and adopts the following technical scheme: the array type micro-compressor consists of an outer sleeve, a cooling sleeve, an upper plate, a middle plate, a lower plate, a sealing ring, a first one-way valve, a second one-way valve, a third one-way valve, a fourth one-way valve, a first piezoelectric vibrator, a second piezoelectric vibrator and a third piezoelectric vibrator; the upper plate, the middle plate and the lower plate are sequentially connected from top to bottom, a first piezoelectric vibrator and a third piezoelectric vibrator are sequentially arranged between the upper plate and the middle plate from left to right, and a second piezoelectric vibrator is arranged between the middle plate and the lower plate; a first cavity and a third cavity are respectively arranged between the first piezoelectric vibrator, the third piezoelectric vibrator and the middle plate, a second cavity is arranged between the second piezoelectric vibrator and the middle plate, and deformation of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator acts on the first cavity, the second cavity and the third cavity respectively, so that the volume change of the cavity is realized; the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are formed by concentrically bonding a metal substrate and a piezoelectric ceramic piece, and the diameter of the metal substrate is larger than that of the piezoelectric ceramic piece; sealing rings are adopted for sealing when the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are connected with the middle plate, so that the tightness of the first cavity, the second cavity and the third cavity is ensured; the inlet of the first cavity is provided with a gas inlet, a first one-way valve is arranged between the gas inlet and the first cavity, a second one-way valve is arranged between the first cavity and the second cavity, and a third one-way valve is arranged between the second cavity and the third cavity; the third cavity outlet is provided with a gas outlet, and a fourth one-way valve is arranged between the gas outlet and the third cavity; the first check valve, the second check valve, the third check valve and the fourth check valve realize the unidirectional flow of the gas from the gas inlet to the first cavity, the first cavity to the second cavity, the second cavity to the third cavity and the third cavity to the gas outlet; the diameters of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are sequentially reduced, and the volumes of the first cavity, the second cavity and the third cavity are also sequentially reduced, so that progressive accumulation compression of the array type micro compressor is realized; the serial cavity array type refers to that the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are arranged in a tiled array from large to small according to the diameters of the piezoelectric vibrators and the corresponding cavity volumes of the piezoelectric vibrators, and meanwhile, the first cavity, the second cavity and the third cavity form a serial cavity; in order to enable the array type micro-compressor to effectively dissipate heat during operation, the outer side of the array type micro-compressor is provided with a cooling sleeve, and the cooling sleeve is arranged on the periphery of the upper plate, the middle plate and the lower plate connector, is fully contacted with the surfaces of the upper plate, the middle plate and the lower plate, and is coated with heat-conducting glue; the outer surface of the cooling sleeve is provided with a cooling pipeline; the cooling pipeline is a spiral cooling pipeline; it should be noted that, the spiral cooling pipe is provided to make the cooling liquid stay in the cooling jacket for a longer time, so as to strengthen the heat dissipation effect; the periphery of the cooling sleeve is connected with an outer sleeve, and a cooling liquid inlet and a cooling liquid outlet are formed in the outer sleeve; when the array micro-compressor works, cooling liquid flows in from the cooling liquid inlet and flows out from the cooling liquid outlet through the cooling pipeline, so that heat generated by the operation of the compressor is taken away, and the heat dissipation effect is achieved.
The flow of the array micro-compressor is determined by a first piezoelectric vibrator, the diameter of the first piezoelectric vibrator is large, the volume change of a cavity is large, and under the driving of the same voltage and frequency, large flow can be obtained; the output pressure is determined by the third piezoelectric vibrator, the third piezoelectric vibrator is small in diameter and high in rigidity, and can output high pressure, so that the array micro-compressor can realize high-flow and high-pressure output at the same time. Meanwhile, in the high-frequency vibration driving process of the piezoelectric vibrator, a certain amount of gas reversely leaks through the one-way valve, a large volume of gas is sucked through the former-stage cavity to sufficiently supply the next-stage cavity for accumulated compression (the gas which is supplied by the former-stage cavity can make up for the gas reversely leaks through the one-way valve), so that the gas compression amount of each-stage cavity can be effectively accumulated, and the array type micro-compressor has larger energy density.
The ideal working process of the present embodiment can be divided into a first working state and a second working state.
The first working state: the first piezoelectric vibrator and the third piezoelectric vibrator apply voltages opposite to the polarization direction of the piezoelectric ceramic plates, the second piezoelectric vibrator applies voltages identical to the polarization direction of the piezoelectric ceramic plates, the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator vibrate upwards, the volume of the first cavity increases and the pressure decreases, the volume of the second cavity decreases and the pressure increases, the volume of the third cavity increases and the pressure decreases, the first check valve and the third check valve are caused to open, gas enters the first cavity through the gas inlet, and the gas in the second cavity is pressed into the third cavity.
And a second working state: the first piezoelectric vibrator and the third piezoelectric vibrator apply voltages with the same polarization direction as that of the piezoelectric ceramic plates, the second piezoelectric vibrator applies voltages with opposite polarization directions as that of the piezoelectric ceramic plates, the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator vibrate downwards, the volume of the first cavity is reduced, the pressure of the second cavity is increased, the pressure of the third cavity is reduced, the pressure of the third cavity is increased, the second check valve and the fourth check valve are opened, gas in the first cavity is pressed into the second cavity, and the third cavity discharges high-pressure gas through a gas outlet.
The array micro-compressor realizes the first-stage, second-stage and third-stage gas accumulation compression in the first cavity, the second cavity and the third cavity respectively, and the large-volume gas is supplied into the next-stage cavity through the previous-stage cavity to sufficiently supply the next-stage cavity for effective pressurization, so that the excellent gas pressurization effect can be obtained through the multi-stage accumulation compression; under the continuous driving of alternating voltage, the first working state and the second working state are repeatedly changed, and continuous high-flow/high-pressure gas can be output.
The invention has the characteristics and advantages that: 1. the gas accumulation and pressurization are realized by gradually decreasing the volume of each cavity, the flow is determined by a first piezoelectric vibrator, the diameter of the first piezoelectric vibrator is large, the volume change of the cavity is large, and the large flow can be obtained; the output pressure is determined by a third piezoelectric vibrator, and the third piezoelectric vibrator has small diameter and high rigidity and can output high pressure, so that the array micro-compressor can realize high-flow and high-pressure output simultaneously; 2. the previous stage cavity sucks large-volume gas to sufficiently supply the next stage cavity for compression, so that the gas compression amount of each stage of cavity can be effectively accumulated, the energy density is high, and the energy conversion efficiency is high; 3. the whole piezoelectric vibrator, the one-way valve and the cover plate are formed, the structure is simple, and the integration is easy.
Description of the drawings:
FIG. 1 is a cross-sectional view of a preferred embodiment of the present invention;
FIG. 2 is a cross-sectional view of a first operation state of a preferred embodiment of the present invention;
FIG. 3 is a cross-sectional view of a second operational configuration of a preferred embodiment of the present invention;
FIG. 4 is a layout of spiral cooling pipes in a preferred embodiment of the present invention.
Wherein: 1-a jacket; 11-a coolant inlet; 12-a cooling liquid outlet; 2-cooling jacket; 20-heat conducting glue; 21-cooling pipes; 3-upper plate; 4-an intermediate plate; 41-gas inlet; 42-gas outlet; 5-lower plate; 6, a sealing ring; 71-a first one-way valve; 72-a second one-way valve; 73-a third one-way valve; 74-a fourth one-way valve; 81-a first chamber; 82-a second chamber; 83-a third chamber; 91-a first piezoelectric vibrator; 92-a second piezoelectric vibrator; 93-a third piezoelectric vibrator; 9 a-a metal substrate; 9 b-piezoelectric ceramic plate.
The specific embodiment is as follows:
in the following, the technical solutions of the present invention will be clearly and completely described with reference to the accompanying drawings, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, only for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The following describes specific embodiments of the present invention in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.
Referring to fig. 1, 2, 3 and 4, the present invention proposes a tandem cavity array type micro piezoelectric gas compressor, which is composed of an outer casing 1, a cooling jacket 2, an upper plate 3, a middle plate 4, a lower plate 5, a sealing ring 6, a first check valve 71, a second check valve 72, a third check valve 73, a fourth check valve 74, a first piezoelectric vibrator 91, a second piezoelectric vibrator 92 and a third piezoelectric vibrator 93; the upper plate 3, the middle plate 4 and the lower plate 5 are sequentially connected from top to bottom, a first piezoelectric vibrator 91 and a third piezoelectric vibrator 93 are sequentially arranged between the upper plate 3 and the middle plate 4 from left to right, and a second piezoelectric vibrator 92 is arranged between the middle plate 4 and the lower plate 5; a first cavity 81 and a third cavity 83 are respectively arranged between the first piezoelectric vibrator 91, the third piezoelectric vibrator 93 and the middle plate 4, a second cavity 82 is arranged between the second piezoelectric vibrator 92 and the middle plate 4, and deformation of the first piezoelectric vibrator 91, the second piezoelectric vibrator 92 and the third piezoelectric vibrator 93 acts on the first cavity 81, the second cavity 82 and the third cavity 83 respectively, so that volume change of the cavities is realized; the first piezoelectric vibrator 91, the second piezoelectric vibrator 92 and the third piezoelectric vibrator 93 are formed by concentrically bonding a metal substrate 9a and a piezoelectric ceramic plate 9b, and the diameter of the metal substrate 9a is larger than that of the piezoelectric ceramic plate 9b; the first piezoelectric vibrator 91, the second piezoelectric vibrator 92 and the third piezoelectric vibrator 93 are all sealed by adopting the sealing ring 6 when connected with the middle plate 4, so that the tightness of the first cavity 81, the second cavity 82 and the third cavity 83 is ensured; the inlet of the first cavity 81 is provided with a gas inlet 41, a first one-way valve 71 is arranged between the gas inlet 41 and the first cavity 81, a second one-way valve 72 is arranged between the first cavity 81 and the second cavity 82, and a third one-way valve 73 is arranged between the second cavity 82 and the third cavity 83; the outlet of the third cavity 83 is provided with a gas outlet 42, and a fourth one-way valve 74 is arranged between the gas outlet 42 and the third cavity 86; the first check valve 71, the second check valve 72, the third check valve 73 and the fourth check valve 74 realize one-way flow of the gas from the gas inlet 41 to the first cavity 81, the first cavity 81 to the second cavity 82, the second cavity 82 to the third cavity 83 and the third cavity 83 to the gas outlet 42; the diameters of the first piezoelectric vibrator 91, the second piezoelectric vibrator 92 and the third piezoelectric vibrator 93 are sequentially reduced, and the volumes of the first cavity 81, the second cavity 82 and the third cavity 83 are also sequentially reduced, so that progressive accumulation compression of the array type micro compressor is realized; the serial cavity array type refers to that the first piezoelectric vibrator 91, the second piezoelectric vibrator 92, and the third piezoelectric vibrator 93 are arranged in a tiled array from large to small according to the diameters of the piezoelectric vibrators, and the first cavity 81, the second cavity 82, and the third cavity 83 form a serial cavity; in order to enable the array type micro-compressor to effectively dissipate heat during operation, a cooling sleeve 2 is arranged on the outer side of the array type micro-compressor, the cooling sleeve 2 is arranged on the periphery of the upper plate 3, the middle plate 4 and the lower plate 5, is fully contacted with the peripheral surfaces of the upper plate 3, the middle plate and the lower plate 5, and is coated with heat conducting glue 20; the upper plate 3, the middle plate 4 and the lower plate 5 are connected to form a whole; the outer surface of the cooling sleeve 2 is provided with a cooling pipeline 21; the cooling pipeline 21 is a spiral cooling pipeline; the spiral cooling pipe 21 is provided to retain the cooling liquid in the cooling jacket for a longer time, thereby enhancing the heat dissipation effect; the periphery of the cooling sleeve 2 is connected with a jacket 1, and a cooling liquid inlet 11 and a cooling liquid outlet 12 are arranged on the jacket 1; when the array type micro-compressor works, cooling liquid flows in from the cooling liquid inlet 11 and flows out from the cooling liquid outlet 12 through the cooling pipeline 21 so as to take away heat, and the heat dissipation effect is achieved.
The flow of the array micro-compressor is determined by the first piezoelectric vibrator 91, the diameter of the first piezoelectric vibrator 91 is large, the volume change of the cavity is large, and large flow can be obtained; the output pressure is determined by the third piezoelectric vibrator 93, and the third piezoelectric vibrator 93 has small diameter and large rigidity and can output high pressure, so that the array micro-compressor can realize high flow and high pressure output at the same time. In the high-frequency vibration driving process of the piezoelectric vibrator, the check valve can have certain reverse leakage of gas, and large-volume gas is sucked through the cavity of the previous stage to sufficiently supply the cavity of the next stage for accumulated compression (the gas supplied by the cavity of the previous stage can make up for the reverse leakage of the gas of the check valve), so that the gas compression quantity of the cavities of each stage can be effectively accumulated, and the array type micro-compressor has larger energy density.
The ideal working process of the present embodiment can be divided into a first working state and a second working state.
The first working state: the first piezoelectric vibrator 91 and the third piezoelectric vibrator 93 apply a voltage opposite to the polarization direction of the piezoelectric ceramic sheet 9b, the second piezoelectric vibrator 92 applies a voltage identical to the polarization direction of the piezoelectric ceramic sheet 9b, the first piezoelectric vibrator 91, the second piezoelectric vibrator 92 and the third piezoelectric vibrator 93 vibrate upward, the volume of the first chamber 81 increases and the volume of the second chamber 82 decreases and the volume of the third chamber 83 increases and the volume of the third chamber 83 decreases, the first check valve 71 and the third check valve 73 are opened, the gas enters the first chamber 81 through the gas inlet 41, and the gas in the second chamber 82 is pressed into the third chamber 83.
And a second working state: the first piezoelectric vibrator 91 and the third piezoelectric vibrator 93 apply the same voltage as the polarization direction of the piezoelectric ceramic sheet 9b, the second piezoelectric vibrator 92 applies the voltage opposite to the polarization direction of the piezoelectric ceramic sheet 9b, the first piezoelectric vibrator 91, the second piezoelectric vibrator 92 and the third piezoelectric vibrator 93 vibrate downward, the volume of the first chamber 81 decreases and the volume of the second chamber 82 increases and the volume of the third chamber 83 decreases and the volume of the third chamber 83 increases, the second check valve 72 and the fourth check valve 74 are caused to open, the gas in the first chamber 81 is pressed into the second chamber 82, and the third chamber 83 discharges the high-pressure gas through the gas outlet 42.
The array micro-compressor realizes the first-stage, second-stage and third-stage gas accumulation compression in the first cavity 81, the second cavity 82 and the third cavity 83 respectively, and the large-volume gas is fed into the cavity of the previous stage to sufficiently supply the cavity of the next stage for effective pressurization, so that the excellent gas pressurization effect can be obtained through the multi-stage accumulation compression; under the continuous driving of alternating voltage, the first working state and the second working state are repeatedly changed, and continuous high-flow/high-pressure gas can be output.
The above embodiments are provided for understanding the present invention and are not intended to be limiting, and those skilled in the art may make various changes and modifications according to the present invention without departing from the principle of the present invention, but these corresponding changes and modifications are intended to fall within the scope of the claims to which the present invention pertains.
Claims (2)
1. A series cavity array type micro piezoelectric gas compressor is characterized in that: the whole consists of an outer sleeve, a cooling sleeve, an upper plate, a middle plate, a lower plate, a sealing ring, a first one-way valve, a second one-way valve, a third one-way valve, a fourth one-way valve, a first piezoelectric vibrator, a second piezoelectric vibrator and a third piezoelectric vibrator; the upper plate, the middle plate and the lower plate are sequentially connected from top to bottom, a first piezoelectric vibrator and a third piezoelectric vibrator are sequentially arranged between the upper plate and the middle plate from left to right, and a second piezoelectric vibrator is arranged between the middle plate and the lower plate; a first cavity and a third cavity are respectively arranged between the first piezoelectric vibrator, the third piezoelectric vibrator and the middle plate, a second cavity is arranged between the second piezoelectric vibrator and the middle plate, and deformation of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator acts on the first cavity, the second cavity and the third cavity respectively; the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are formed by concentrically bonding a metal substrate and a piezoelectric ceramic piece; sealing rings are adopted for sealing when the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are connected with the middle plate; the inlet of the first cavity is provided with a gas inlet, a first one-way valve is arranged between the gas inlet and the first cavity, a second one-way valve is arranged between the first cavity and the second cavity, and a third one-way valve is arranged between the second cavity and the third cavity; the third cavity outlet is provided with a gas outlet, and a fourth one-way valve is arranged between the gas outlet and the third cavity; the diameters of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are sequentially reduced, and the volumes of the first cavity, the second cavity and the third cavity are also sequentially reduced; the working process can be divided into a first working state and a second working state; in the first working state, the first piezoelectric vibrator and the third piezoelectric vibrator apply voltages with opposite polarization directions to the piezoelectric ceramic plates, and the second piezoelectric vibrator applies voltages with the same polarization directions to the piezoelectric ceramic plates; in the second working state, the first piezoelectric vibrator and the third piezoelectric vibrator apply voltages with the same polarization direction as that of the piezoelectric ceramic piece, and the second piezoelectric vibrator applies voltages with opposite polarization direction as that of the piezoelectric ceramic piece; under the continuous driving of alternating voltage, the first working state and the second working state are repeatedly changed to output continuous gas.
2. The tandem cavity array micro piezoelectric gas compressor of claim 1, wherein: the cooling sleeve is arranged on the periphery of the upper plate, the middle plate and the lower plate connector, fully contacts with the peripheral surfaces of the upper plate, the middle plate and the lower plate connector, and is coated with heat-conducting glue; the cooling sleeve is provided with a cooling pipeline; the periphery of the cooling sleeve is connected with an outer sleeve, and a cooling liquid inlet and a cooling liquid outlet are arranged on the outer sleeve.
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| CN201910187256.0A CN109931250B (en) | 2019-03-03 | 2019-03-03 | Series cavity array type micro piezoelectric gas compressor |
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| CN201910187256.0A CN109931250B (en) | 2019-03-03 | 2019-03-03 | Series cavity array type micro piezoelectric gas compressor |
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| CN109931250B true CN109931250B (en) | 2024-03-15 |
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2019
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