CN109909465B - A method for inhibiting high temperature ordering of samarium cobalt alloys with high iron concentration - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及稀土永磁材料制备技术领域,尤其涉及一种高铁浓度2:17型钐钴永磁材料的制备方法。The invention relates to the technical field of preparation of rare earth permanent magnet materials, in particular to a preparation method of a high iron concentration 2:17 type samarium cobalt permanent magnet material.
背景技术Background technique
2:17型钐钴永磁材料以其出色的温度特性,已经被广泛使用在电子行波管、磁轴承、发动机、发电机及离子推进器等具有复杂热、磁环境的设备中。有关高铁浓度2:17型钐钴永磁材料的研究在最近的期刊文献中有所涉及,以成分为Sm(Co1-u-v-wFeuCuvZrw)z的磁体为例,普遍认为铁浓度超过25at%(或者下标u>0.32)时,磁体的胞状组织受到破坏,不能形成完整的胞状结构,现有的改进方法主要是:调整工艺抑制第二相析出或者调整成分获得最优单相成分,从而制备高铁浓度磁体。以东芝公司的研究结果为例,制备高铁浓度(Fe含量下标u=0.35或原子浓度比31at%)钐钴永磁材料用的工艺为传统粉末冶金工艺,其中其合金制备为感应熔炼,结果表明,即使采用热处理工艺的精确控制,其磁体主相中仍难以获得单相1:7H结构,总是存在2:17R有序相,影响磁体性能。中科院宁波新材料研究所调整磁体成分,可以在较低Fe浓度(下标u=0.28,原子浓度比25%)抑制2:17R有序相存在,但是不利于推广制备更高Fe浓度磁体。The 2:17 type samarium cobalt permanent magnet material has been widely used in equipment with complex thermal and magnetic environments such as electron traveling wave tubes, magnetic bearings, engines, generators and ion thrusters due to its excellent temperature characteristics. Research on 2:17 type samarium cobalt permanent magnet materials with high iron concentration has been covered in recent journal literature. Taking the magnet with the composition Sm(Co 1-uvw Fe u Cu v Zr w ) z as an example, it is generally believed that the iron concentration When it exceeds 25at% (or subscript u>0.32), the cellular organization of the magnet is damaged, and a complete cellular structure cannot be formed. The existing improvement methods are mainly: adjusting the process to suppress the precipitation of the second phase or adjusting the composition to obtain the optimal single phase components to prepare high iron concentration magnets. Taking the research results of Toshiba as an example, the process for preparing high iron concentration (Fe content subscript u=0.35 or atomic concentration ratio 31at%) samarium cobalt permanent magnet material is a traditional powder metallurgy process, in which the alloy is prepared by induction melting, the result It is shown that even with the precise control of the heat treatment process, it is still difficult to obtain a single-phase 1:7H structure in the main phase of the magnet, and there is always a 2:17R ordered phase, which affects the performance of the magnet. The Ningbo Institute of Advanced Materials, Chinese Academy of Sciences adjusted the magnet composition to suppress the existence of the 2:17R ordered phase at a lower Fe concentration (subscript u=0.28,
本发明通过分析发现高铁浓度成分的母合金铸锭中已经存在2:17R的有序相,为了抑制高铁浓度永磁材料中2:17有序相的产生,对母合金铸锭熔体快淬获得2:17型钐钴永磁快淬片,成功抑制了2:17R有序相产生,并且通过后续高温稳定处理,使合金转变为单相1:7H结构,可用于后续破碎制粉制备高性能磁体。In the present invention, it is found through analysis that a 2:17R ordered phase already exists in the master alloy ingot with a high iron concentration. Obtained 2:17 type samarium cobalt permanent magnet rapid quenching sheet, successfully inhibited the generation of 2:17R ordered phase, and through subsequent high temperature stabilization treatment, the alloy was transformed into a single-phase 1:7H structure, which can be used for subsequent crushing and milling to prepare high Performance magnets.
发明内容SUMMARY OF THE INVENTION
要解决的技术问题:Technical problem to be solved:
针对现有技术存在的不足,本发明通过提出一种抑制高铁浓度2:17型钐钴磁体高温相有序化的方法,从而获得高温单相1:7H结构。具体的,就是提供一种对粉末冶金工艺中合金铸锭的后处理工艺,工艺中包括通过溶体快淬法使合金铸锭通过极快冷却速度凝固抑制合金铸锭中有序化合金的出现,后续再通过高温稳定化处理,使亚稳凝固相稳定化形成为高温相1:7H。通过此方法处理的合金抑制了有序化2:17相产生,可以为磁体制备提供所需的高温1:7H固溶相。In view of the deficiencies in the prior art, the present invention provides a method for inhibiting the high-temperature phase ordering of a high-iron concentration 2:17 type samarium-cobalt magnet, thereby obtaining a high-temperature single-phase 1:7H structure. Specifically, it is to provide a post-processing process for an alloy ingot in a powder metallurgy process. The process includes making the alloy ingot solidify at an extremely fast cooling rate by a solution rapid quenching method to suppress the appearance of an ordered alloy in the alloy ingot. Subsequent high temperature stabilization treatment is performed to stabilize the metastable solidified phase to form a high temperature phase of 1:7H. The alloy treated by this method inhibits the generation of ordered 2:17 phase and can provide the required high-temperature 1:7H solid solution phase for magnet preparation.
一种抑制高铁浓度钐钴合金高温有序化的方法,具体步骤如下:A method for inhibiting high-temperature ordering of samarium-cobalt alloys with high iron concentration, the specific steps are as follows:
1)母合金制备1) Preparation of master alloy
将Sm、Co、Cu、Fe和Zr按照化学式比例混合,其化学式组成表示为Sm(Co1-u-v- wFeuCuvZrw)z,其中u=0.32~0.40,v=0.05~0.08,w=0.01~0.03,z=7.4~8.0,然后置于真空熔炼炉的水冷铜坩埚中,易烧损的Sm置于坩埚底部,抽真空至2×10-3~5×10-3Pa,向炉体内充入高纯氩气,炉内真空度上升至0.8×105Pa以后停止充气,在工作电压30V~45V,工作电流600A~800A的条件下重复熔炼3~4次,冷却得到合金铸锭。Mix Sm, Co, Cu, Fe and Zr according to the chemical formula ratio, and the chemical formula composition is expressed as Sm(Co 1-uv- w Fe u Cu v Zr w ) z , wherein u=0.32~0.40, v=0.05~0.08, w=0.01~0.03, z=7.4~8.0, then placed in the water-cooled copper crucible of the vacuum melting furnace, the easily burnt Sm was placed at the bottom of the crucible, evacuated to 2×10 -3 ~5×10 -3 Pa, Fill the furnace with high-purity argon gas, stop the gas after the vacuum degree in the furnace rises to 0.8×10 5 Pa, repeat the smelting for 3 to 4 times under the conditions of working voltage 30V~45V, working current 600A~800A, and cooling to obtain alloy ingot.
上述Sm(Co1-u-v-wFeuCuvZrw)z合金制备中,Sm含量实际量要比理论添加量多3%~5%。In the preparation of the above Sm(Co 1-uvw Fe u Cu v Zr w ) z alloy, the actual amount of Sm content is 3% to 5% more than the theoretical addition amount.
所述真空熔炼炉为电弧熔炼炉或者感应熔炼炉。The vacuum melting furnace is an electric arc melting furnace or an induction melting furnace.
2)母合金后处理2) Post-treatment of master alloy
熔体快淬:将合金铸锭放入带有0.1~0.5mm扁口喷嘴石英管中,置于炉体中与喷枪相连,真空抽至3×10-3Pa,然后充入高纯氩气至炉体压力为-0.04Pa,反复抽洗三次后,喷枪中充入0.03Pa高纯氩气,炉体中高纯氩气充入至炉体压力为-0.04Pa,使喷枪与炉体之间保持0.07Pa压强差,打开水冷铜轮,使其速度保持在3~25m/s,对合金铸锭感应加热至1300~1500℃,待合金完全熔化并稳定后,迅速打开喷枪气阀,使合金熔液快速喷至滚动铜轮表面,快速凝固成为厚度为0.1~0.3mm速凝片。Quick quenching of melt: put the alloy ingot into a quartz tube with a flat nozzle of 0.1-0.5mm, place it in the furnace body and connect it with the spray gun, vacuum it to 3×10 -3 Pa, and then fill it with high-purity argon gas When the pressure of the furnace body is -0.04Pa, after repeated pumping and washing three times, the spray gun is filled with 0.03Pa high-purity argon gas, and the high-purity argon gas in the furnace body is charged to the furnace body pressure of -0.04Pa, so that the gap between the spray gun and the furnace body is set to -0.04Pa. Keep the pressure difference of 0.07Pa, open the water-cooled copper wheel to keep the speed at 3~25m/s, and heat the alloy ingot to 1300~1500℃ by induction. After the alloy is completely melted and stabilized, quickly open the air valve of the spray gun to make the alloy The molten liquid is quickly sprayed onto the surface of the rolling copper wheel, and rapidly solidifies into a quick-setting sheet with a thickness of 0.1-0.3 mm.
高温稳定处理:将上述熔体快淬步骤获得的速凝片置于高真空炉中,炉体真空为2×10-3~5×10-3Pa,充入氩气,再抽至2×10-3~5×10-3Pa,加热至固溶温度Tst=1120~1145℃,固溶2~8h后淬火,即得高铁浓度钐钴合金。High-temperature stabilization treatment: put the quick-setting sheet obtained in the above-mentioned melt quenching step in a high-vacuum furnace, the furnace body vacuum is 2×10 -3 ~ 5×10 -3 Pa, filled with argon, and then pumped to 2× 10 -3 to 5×10 -3 Pa, heated to a solution temperature T st = 1120 to 1145° C., and quenched after solution for 2 to 8 hours to obtain a high iron concentration samarium cobalt alloy.
进一步的,所述步骤2)熔体快淬时,合金铸锭感应加热温度为1350~1400℃。Further, during the rapid quenching of the melt in the step 2), the induction heating temperature of the alloy ingot is 1350-1400°C.
进一步的,所述步骤2)熔体快淬时,水冷铜轮速度控制在3~10m/s。Further, when the melt is rapidly quenched in step 2), the speed of the water-cooled copper wheel is controlled at 3-10 m/s.
进一步的,所述步骤2)高温稳定处理时,固溶处理时间为4~6h。Further, during the high temperature stabilization treatment in the step 2), the solution treatment time is 4-6 hours.
进一步的,所述高铁浓度钐钴合金中主相为1:7H结构,有序相2:17相含量的体积百分比为0~0.3%。Further, the main phase in the high iron concentration samarium cobalt alloy has a 1:7H structure, and the volume percentage of the ordered phase 2:17 phase content is 0-0.3%.
进一步的,所述高铁浓度钐钴合金中主相无序的1:7H孪晶宽度为2.0~2.4nm。Further, the 1:7H twin width of the disordered main phase in the high iron concentration samarium cobalt alloy is 2.0-2.4 nm.
本发明通过母合金后处理方式,可以获得单相的1:7H相结构,抑制高铁浓度钐钴磁体高温相中存在的2:17相。本步骤工艺有两个优点,一是可以制备高铁浓度的钐钴主相,各合金元素在主相中固溶度最高,基本无析出;二是熔体快淬法的极快冷却速度,能够抑制主相1:7H中原子(尤其是Co-Co,Fe-Fe原子对)的有序化,抑制2:17R相的形成,避免磁体的胞状组织的不完整。本发明需要控制铜轮转速获得极快冷却速度,过慢的冷却速度会导致冷却速度不足,不能达到抑制2:17R相的形成目的,本发明的水冷铜轮速度为3m/s~25m/s。同时在工艺中需要进行高温稳定处理。熔体快淬后合金的结构实际为2:17H的有序相,虽然并不存在有序的2:17R相,但2:17H并不是后续所需的高温固溶1:7H相,因此需要通过高温稳定处理方式获得高温固溶1:7H相,且铸锭不同冷却部位由于冷速差异存在凝固形态差异,通过高温稳定处理也有利于是凝固组织均匀化,利于后期磁体制备过程中的粉体破碎。In the invention, a single-phase 1:7H phase structure can be obtained through the post-processing method of the master alloy, and the 2:17 phase existing in the high-temperature phase of the high-iron concentration samarium-cobalt magnet can be suppressed. This process has two advantages. One is that the main phase of samarium cobalt with high iron concentration can be prepared. The solid solubility of each alloy element in the main phase is the highest, and there is basically no precipitation; Suppress the ordering of atoms (especially Co-Co, Fe-Fe atom pairs) in the main phase 1:7H, inhibit the formation of the 2:17R phase, and avoid the incomplete cellular organization of the magnet. The invention needs to control the speed of the copper drum to obtain an extremely fast cooling speed. Too slow cooling speed will lead to insufficient cooling speed and cannot achieve the purpose of suppressing the formation of the 2:17R phase. The water-cooled copper drum speed of the invention is 3m/s~25m/s . At the same time, high temperature stabilization treatment is required in the process. The structure of the alloy after rapid melt quenching is actually an ordered phase of 2:17H. Although there is no ordered 2:17R phase, 2:17H is not the subsequent high-temperature solid solution 1:7H phase, so it is necessary to High-temperature solid solution 1:7H phase is obtained by high-temperature stabilization treatment, and there are differences in solidification morphology in different cooling parts of the ingot due to the difference in cooling rate. High-temperature stabilization treatment is also beneficial to homogenize the solidified structure, which is beneficial to the powder in the later magnet preparation process. Broken body.
本发明与现有技术相比所具有的有益效果:Compared with the prior art, the present invention has the following beneficial effects:
本发明通过技术上的创新,获得了高铁浓度单相1:7H合金主相,抑制不需要的2:17相。本方法可以应用在高铁浓度钐钴磁体的制备工艺中,对于常规工艺改进耗费少,利于大规模应用。The invention obtains the main phase of the high iron concentration single-phase 1:7H alloy through technical innovation, and suppresses the unnecessary 2:17 phase. The method can be applied to the preparation process of the high iron concentration samarium cobalt magnet, and the improvement of the conventional process is less expensive, which is favorable for large-scale application.
附图说明Description of drawings
图1为实施例1的合金的XRD图。FIG. 1 is an XRD pattern of the alloy of Example 1. FIG.
图2为对比例1的合金的XRD图。FIG. 2 is an XRD pattern of the alloy of Comparative Example 1. FIG.
图3为实施例1的合金的显微形貌。FIG. 3 is the microstructure of the alloy of Example 1. FIG.
图4为对比例1的合金的显微形貌。FIG. 4 is the microstructure of the alloy of Comparative Example 1. FIG.
图5为对比例2的合金的XRD图。FIG. 5 is an XRD pattern of the alloy of Comparative Example 2. FIG.
图6为实施例1的主相TEM微区形貌。FIG. 6 is the TEM micro-domain morphology of the main phase of Example 1. FIG.
图7为对比例2的主相TEM微区形貌。FIG. 7 is the TEM micro-domain morphology of the main phase of Comparative Example 2. FIG.
图8为对比例3的合金XRD图。FIG. 8 is an XRD pattern of the alloy of Comparative Example 3. FIG.
具体实施方式Detailed ways
实施例1Example 1
1)母合金制备1) Preparation of master alloy
将Sm、Co、Cu、Fe和Zr按照Sm(Co0.58Fe0.34Cu0.06Zr0.02)7.8化学式比例混合,然后置于真空熔炼炉的水冷铜坩埚中,易烧损的Sm置于坩埚底部,抽真空至2×10-3~5×10-3Pa,向炉体内充入高纯氩气,炉内真空度上升至0.8×105Pa以后停止充气,在工作电压30V~45V,工作电流600A~800A的条件下重复熔炼3~4次,冷却得到合金铸锭。Sm, Co, Cu, Fe and Zr were mixed according to the chemical formula ratio of Sm(Co 0.58 Fe 0.34 Cu 0.06 Zr 0.02 ) 7.8 , and then placed in a water-cooled copper crucible of a vacuum melting furnace. Vacuum to 2×10 -3 ~ 5×10 -3 Pa, fill the furnace with high-purity argon gas, and stop charging after the vacuum degree in the furnace rises to 0.8×10 5 Pa. The working voltage is 30V~45V, and the working current is 600A Under the condition of ~800A, the smelting is repeated 3 to 4 times, and the alloy ingot is obtained by cooling.
2)母合金后处理2) Post-treatment of master alloy
熔体快淬:将合金铸锭放入带有0.5mm宽喷口石英管中,置于炉体中与喷枪相连。真空抽至3×10-3Pa,然后充入高纯氩气至炉体压力为-0.04Pa,反复抽洗三次后,喷枪中充入0.03Pa高纯氩气,炉体中高纯氩气充入至炉体压力为-0.04Pa,使喷枪与炉体之间保持0.07Pa压强差,打开水冷铜轮,使其速度保持在5m/s,对合金铸锭感应加热至1400℃,待合金完全融化并稳定后,迅速打开喷枪气阀,使合金熔液快速喷至滚动铜轮表面,快速凝固成为厚度为0.1mm速凝片。Melt quick quenching: put the alloy ingot into a quartz tube with a 0.5mm wide spout, and place it in the furnace body to connect with the spray gun. The vacuum was pumped to 3×10 -3 Pa, and then filled with high-purity argon until the furnace pressure was -0.04Pa. After repeated pumping and washing three times, the spray gun was filled with 0.03Pa high-purity argon, and the furnace was filled with high-purity argon. The pressure into the furnace body is -0.04Pa, so that the pressure difference between the spray gun and the furnace body is maintained at 0.07Pa, the water-cooled copper wheel is turned on, and the speed is kept at 5m/s, and the alloy ingot is induction heated to 1400 ℃, until the alloy is completely After melting and stabilizing, quickly open the air valve of the spray gun, so that the alloy melt is quickly sprayed onto the surface of the rolling copper wheel, and quickly solidifies into a quick-setting sheet with a thickness of 0.1mm.
高温稳定处理:将步骤2)获得的速凝片置于高真空炉中,炉体真空为4×10-3Pa,充入氩气,再抽至4×10-3Pa,加热至固溶温度Tst=1145℃,固溶6h后淬火。High temperature stabilization treatment: put the quick-setting sheet obtained in step 2) in a high vacuum furnace, the vacuum of the furnace body is 4 × 10 -3 Pa, filled with argon, and then pumped to 4 × 10 -3 Pa, and heated to solid solution Temperature T st =1145 ℃, quenched after 6 hours of solid solution.
对比例1Comparative Example 1
相比于实施例1,对比例1只采用了步骤1)母合金制备,未进行步骤2)的母合金后处理工艺。Compared with Example 1, Comparative Example 1 only used step 1) to prepare the master alloy, and did not perform the master alloy post-treatment process of step 2).
对比例2Comparative Example 2
相比于实施例1,对比例2省去了实施例1工艺步骤2)母合金后处理中的溶体快淬步骤,其余采用与实施例1相同的成分与工艺。Compared with Example 1, Comparative Example 2 omits the solution rapid quenching step in the process step 2) post-treatment of the master alloy in Example 1, and the rest adopts the same composition and process as Example 1.
对比例3Comparative Example 3
相比于实施例1,对比例3省去实施例1工艺步骤2)母合金后处理中的高温稳定处理步骤,其余采用与实施例1相同的成分与工艺。Compared with Example 1, Comparative Example 3 omits the high temperature stabilization treatment step in the process step 2) master alloy post-treatment of Example 1, and the rest adopts the same composition and process as Example 1.
实施例1与对比例1、对比例2、对比例3得到的合金对比可以通过图1~图8说明。由图1和图2可知,利用实施例1工艺制备的母合金在主相无第二相2:17R存在(体积分数0),但是如果不对合金进行处理,如对比例1所示,母合金中将会存在8%(体积分数)的2:17R有序相,如果采用对比例1中的母合金进行后续磁体的制备,将不可避免在磁体中保留有有序的2:17R相,导致磁体性能的下降。The comparison of the alloys obtained in Example 1 and Comparative Example 1, Comparative Example 2, and Comparative Example 3 can be described with reference to FIGS. 1 to 8 . It can be seen from Figure 1 and Figure 2 that the master alloy prepared by the process of Example 1 has no secondary phase 2:17R in the main phase (volume fraction 0), but if the alloy is not treated, as shown in Comparative Example 1, the master alloy There will be 8% (volume fraction) of the 2:17R ordered phase in the magnet. If the master alloy in Comparative Example 1 is used for subsequent magnet preparation, the ordered 2:17R phase will inevitably remain in the magnet, resulting in Degradation of magnet performance.
通过图3与图4的显微形貌观察,实施例1所处理的合金中主相为1:7H相,但是对比例1中主相存在2:17R,同时成分偏析更加严重,对于磁体粉体破碎来说,这样的成分偏析会影响粉体质量。3 and 4, the main phase in the alloy treated in Example 1 is 1:7H phase, but the main phase in Comparative Example 1 is 2:17R, and the composition segregation is more serious. For magnet powder In terms of body fragmentation, such component segregation will affect the powder quality.
图5为对比例2中合金的XRD图谱分析,从图中可以看出合金中存在大约20%的2:17R有序相。说明只有同时采用了溶体快淬与高温稳定处理才能获得1:7H相。对于对比例2来说,由于母合金中存在2:17R相,高温稳定处理后加剧了2:17R相的扩散,导致有序化加剧。图6是实施例1中1:7H相高分辨图,可以看出主相1:7H相的孪晶宽度在2.0~2.4nm宽。图7为对比例2中主相1:7H孪晶宽度达到10nm以上,部分区域宽度达到20nm以上,说明实施例1中主相无序化程度高于对比例2。FIG. 5 is the XRD pattern analysis of the alloy in Comparative Example 2. It can be seen from the figure that about 20% of the 2:17R ordered phase exists in the alloy. It shows that the 1:7H phase can be obtained only by using the solution rapid quenching and high temperature stabilization treatment at the same time. For Comparative Example 2, due to the existence of the 2:17R phase in the master alloy, the diffusion of the 2:17R phase was intensified after the high temperature stabilization treatment, resulting in aggravated ordering. FIG. 6 is a high-resolution image of the 1:7H phase in Example 1. It can be seen that the twin width of the main phase 1:7H phase is 2.0 to 2.4 nm wide. 7 shows that the width of the main phase 1:7H twin in Comparative Example 2 reaches more than 10 nm, and the width of some regions reaches more than 20 nm, indicating that the degree of disorder of the main phase in Example 1 is higher than that in Comparative Example 2.
图8为对比实施例3中合金的XRD图谱分析,从图中可以看出,没有采用高温稳定处理,合金中2:17R相没有出现,但是有部分2:17H相的存在,含量为22%。说明高温稳定处理能够进一步让有序的2:17H结构转变为主相1:7H。Figure 8 is the XRD pattern analysis of the alloy in Comparative Example 3. It can be seen from the figure that the 2:17R phase does not appear in the alloy without the high temperature stabilization treatment, but there is a part of the 2:17H phase with a content of 22% . It shows that the high temperature stabilization treatment can further transform the ordered 2:17H structure into the main phase 1:7H.
实施例2-4Example 2-4
实施例2-4的工艺步骤与实施例1相同,但是所制备磁体成分按化学式Sm(Co1-u-v- wFeuCuvZrw)z中的u各有不同,具体成分如表1所示。The process steps of Examples 2-4 are the same as those of Example 1, but the components of the prepared magnets are different according to the u in the chemical formula Sm(Co 1-uv- w Fe u Cu v Zr w ) z , and the specific components are as shown in Table 1. Show.
表1Table 1
通过上述实施例,充分说明了采用本发明的工艺可以抑制高铁浓度钐钴合金中2:17R有序相的产生。根据文献中的结果,当磁体存在2:17R有序相,磁体时效后会形成不完整的胞状结构,迅速降低矫顽力。利用本发明工艺对铸锭进行处理,2:17已经被抑制产生,说明此工艺在制备高Fe浓度磁体中的优势。The above examples fully demonstrate that the process of the present invention can suppress the generation of the 2:17R ordered phase in the high iron concentration samarium cobalt alloy. According to the results in the literature, when the magnet has a 2:17R ordered phase, the magnet will form an incomplete cell-like structure after aging, and the coercivity will decrease rapidly. Using the process of the present invention to process the ingot, the generation of 2:17 has been suppressed, which shows the advantage of this process in the preparation of magnets with high Fe concentration.
尽管为了说明的目的,已描述了本发明的示例性实施方式,但是本领域的技术人员将理解,不脱离所附权利要求中公开的发明的范围和精神的情况下,可以在形式和细节上进行各种修改、添加和替换等的改变,而所有这些改变都应属于本发明所附权利要求的保护范围,并且本发明要求保护的产品各个部门和方法中的各个步骤,可以以任意组合的形式组合在一起。因此,对本发明中所公开的实施方式的描述并非为了限制本发明的范围,而是用于描述本发明。相应地,本发明的范围不受以上实施方式的限制,而是由权利要求或其等同物进行限定。Although exemplary embodiments of the present invention have been described for purposes of illustration, workers skilled in the art will recognize that changes may be made in form and detail without departing from the scope and spirit of the invention as disclosed in the accompanying claims. Carry out various modifications, additions and substitutions, etc., and all these changes should belong to the protection scope of the appended claims of the present invention, and the various steps in the various departments and methods of the products claimed in the present invention can be combined arbitrarily. form together. Accordingly, the description of the embodiments disclosed in the present invention is not intended to limit the scope of the present invention, but to describe the present invention. Accordingly, the scope of the present invention is not limited by the above embodiments, but is defined by the claims or their equivalents.
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