CN109884097A

CN109884097A - A Tiltable Transmission Mode Electron Backscatter Diffraction Experimental Device

Info

Publication number: CN109884097A
Application number: CN201910143821.3A
Authority: CN
Inventors: 曹亚楠; 段宝玉; 谭心; 赵瑞超; 张邦文; 王海燕; 诸葛晨昱; 李一鸣; 霍文霞; 段宝龙
Original assignee: Inner Mongolia University of Science and Technology
Current assignee: Inner Mongolia University of Science and Technology
Priority date: 2019-02-27
Filing date: 2019-02-27
Publication date: 2019-06-14
Anticipated expiration: 2039-02-27
Also published as: CN109884097B

Abstract

It can vert transmission mode electron backscatter diffraction experimental provision the invention discloses one kind, base including being fixed on scanning electron microscopic observation table top, fluting is offered on the base, the rear side base of fluting is equipped with fixed plate, it is fixed with servo motor in the fixed plate, is fixed with active synchronization belt wheel on the rotor of servo motor；The two sides of the fluting are equipped with trailing arm；It is equipped with axis hole on trailing arm, lever arm is equipped with by shaft on trailing arm；U-type groove is offered on the lever arm, is fixed with driven synchronous pulley in shaft and in lever arm U-type groove；Rotation angle detecting sensor is connected with by shaft coupling in the side of shaft；The front end face of the lever arm is fixed with wedge-shaped probe, is fixed with sample stage in the upper surface of probe, is fixed with the structures such as specimen holder in the two sides of sample stage；The device reduces probe and sample stage collision accident rate, saves experimental period cost, and scanning electron microscope equipment is made to be easier to be upgraded to transmission electron microscopy rank.

Description

One kind can vert transmission mode electron backscatter diffraction experimental provision

Technical field

The present invention relates to scanning electron microscope observation experimental provision fields, are a kind of dresses of novel scanning electron microscope (SEM) experiment It sets, specially one kind can vert transmission mode electron backscatter diffraction experimental provision.

Background technique

T-EBSD analytical technology in scanning electron microscope is mainly used in crystal structure orientation analysis, oxygen in big shape changing metal Ultra-fine grain textile analysis, nanoparticles crystal between the analysis of the two dimensional crystal structure of compound film and metal oxide layer, metal The research such as nanometer phase growth mechanism in structure and matrix.

It needs in experiment according to different thickness of sample, different demands acceleration voltage and different target region atomic mass To adjust the angle between sample and probe in real time.There are mainly two types of existing adjustings, but has its limitation in experimental implementation. First way, scanning electron microscope sample table can vert towards probe orientation, may be implemented to adjust by the sample table that verts.Its angle Degree can be adjusted arbitrarily, seem convenient, but will distance between adjusting sample and detector at any time, because of sample and put in scanning electron microscope In probe between distance in 10mm or so, transmission electron microscope sample is thin small in addition, during the experiment, easily occur probe and sample Sample platform collision accident causes huge loss.

Another mode, if scanning electron microscope sample table verts, direction cannot be such that angle between probe and sample changes Become, can a series of additional preprepared sample tables for having certain angle, further according to different samples, trial exchanges different angles for Sample table.But prepare the process of experimental bench in advance, it needs largely to attempt, experimental amount is big, and time cost is high, performance difficulty. Even if observing a kind of sample of material, the transmission electron microscope sample thickness produced every time is inevitable different, and differing may be larger, and real The sample for repeatedly observing various material is generally required in the experiment on border, with the sample table of fixed angle, necessarily to test result and Effect is influenced.Therefore, there is an urgent need to a kind of new devices, to solve the above problems.

Summary of the invention

The purpose of the present invention is to provide a kind of for new t-EBSD technological development, reduces probe and sample stage collides thing Therefore rate, saving experimental period cost, it allows t-EBSD technology to be commercialized as early as possible, scanning electron microscope equipment is made to be easier to be upgraded to transmission electricity Mirror skill level liberates transmission electron microscope experimental pressure, is allowed to more preferably more intently capture sub-nanometer and micromicron grade problem in science.

One kind can vert transmission mode electron backscatter diffraction experimental provision, which is characterized in that including being fixed on scanning electricity The base of sem observation table top, offers fluting on the base, and the rear side base of fluting is equipped with fixed plate, in the fixed plate It is fixed with servo motor, is fixed with active synchronization belt wheel on the rotor of servo motor；The two sides of the fluting are equipped with trailing arm；? Trailing arm is equipped with axis hole, is equipped with lever arm by shaft on trailing arm；U-type groove is offered on the lever arm, in shaft And it is located in lever arm U-type groove and is fixed with driven synchronous pulley；Roll angle inspection is connected with by shaft coupling in the side of shaft to pass Sensor；The front end face of the lever arm is fixed with wedge-shaped probe, sample stage is fixed in the upper surface of probe, the two of sample stage Side is fixed with specimen holder；The active synchronization belt wheel passes through synchronous band connection with driven synchronous pulley.

Preferably, the shaft is ladder shaft.

Preferably, the probe is removably fixedly connected with lever arm by pin shaft, and probe is set with lever arm interface For convex surface, it is equipped with pin hole, the lever arm and probe in protrusion and is set as concave surface to connecting, pin hole, and two are equipped on probe The position consistency of person's pin hole, probe assigns into the concave surface of lever arm, and is fixed by pin shaft.

Preferably, with the perpendicular plane of SEM electron beam for 0 ° of face, the electron beam of any SEM and probe plane can be made to press from both sides Angle is in -30 ° to 150 ° or -15 ° to 165 ° or -5 ° to 175 ° or 0 ° to 180 ° in any one angular range.

Preferably, the shaft is fixed by bearing and trailing arm, and bearing is ball bearing.

Preferably, the lever arm and shaft are installed by way of keyway cooperates.

Preferably, the active synchronization belt wheel and servo motor are installed by way of keyway cooperates.

Preferably, one layer of rubber pad is equipped between the servo motor and fixed plate.

The beneficial effects of the present invention are EBSD can easily occur to avoid present scanning electron microscope sample table and probe completely The generation of probe and sample stage collision accident, and the problem of test result and effect can be influenced in another mode；Together When, any SEM can be suitable for, so that TEM sample obtains X rays topographs and Kikuchi lines information under transmission electron beam.

Detailed description of the invention

Fig. 1 is the structural diagram of the present invention.

Fig. 2 is configuration schematic diagram of the invention.

Fig. 3 is that probe of the invention docks schematic diagram with lever arm.

Fig. 4 is lever arm structural schematic diagram of the invention.

In figure, base 1, slot 1-1, fixed plate 2, servo motor 3, active synchronization belt wheel 4, trailing arm 5, axis hole 5-1, activity Arm 6, U-type groove 6-1, driven synchronous pulley 7, rotation angle detecting sensor 8, probe 9, sample stage 10, specimen holder 11, synchronous belt 12, Shaft 13.

Specific embodiment

As shown, the present invention, which devises one kind, can vert transmission mode electron backscatter diffraction experimental provision, it is main to wrap The base 1 for being fixed on scanning electron microscopic observation table top is included, fluting 1-1 is offered on the base 1, on the rear side base 1 for the 1-1 that slots It is welded with fixed plate 2, is fixed with servo motor 3 by four bolts in the fixed plate 2, four bolts can guarantee servo electricity Machine 3 is stably fixed on base 1, it is contemplated that servo motor 3 may generate vibration at work, and bolt gradually generates pine It is dynamic, therefore one layer of rubber pad is also set up between servo motor 3 and fixed plate 2, such bolt is not easy to generate during the work time It loosens, experimental facilities is damaged, and be fixed with synchronous belt 12 on the rotor of servo motor 3；Fluting 1-1 of the invention Two sides are equipped with trailing arm 5；Axis hole 5-1 is equipped on trailing arm 5, being equipped with internal diameter in an interference fit in axis hole 5-1 is 4mm Ball bearing；Lever arm 6 is fixedly installed with by ladder shaft 13 (in bearing hole) in the axis hole 5-1 on trailing arm 5, in order to Shaft 13 and lever arm 6 can be allowed to realize to rotate synchronously, be machined with slot respectively on the mounting surface of shaft 13 and lever arm 6, Key is installed in slot, the two is installed together by way of keyway cooperates, be so convenient for changing components, damage or Parts thereof is only needed to change after person's accuracy decline, reduces laboratory cost, two can will facilitate the angle of calibration activities arm 6 Degree, to maintain and safeguarding that the present apparatus provides convenience；The present invention will on lever arm 6 process U-type groove 6-1 structure, in shaft 13 and It is fixed with driven synchronous pulley 7 in the form of interference fit in lever arm 6U type groove 6-1, passes through connection in the side of shaft 13 Axis device is connected with rotation angle detecting sensor 8, and rotation angle detecting sensor 8 can accurately measure the angle of the rotation of lever arm 6；The work The front end face of swing arm 6 is removably fixedly connected with lever arm 6 by pin shaft, and probe 9 is set as convex surface with 6 interface of lever arm, Pin hole is equipped in protrusion, the lever arm 6 connects with 9 Duis of probe and is set as concave surface, and pin hole, and the two pin are equipped on probe 9 The position consistency in hole, probe 9 assigns into the concave surface of lever arm 6, and fixes with pin shaft, in this way, probe 9 and the formation of lever arm 6 One entirety, the angle that lever arm 6 rotates are 9 angles rotated of popping one's head in, according to the different thickness of sample of experiment demand, difference Demand acceleration voltage and different target region atomic mass to adjust the angle between sample and probe 9 in real time, can either be quick Accurate adjustment, and can guarantee that probe 9 and sample stage 10 will not collide, the collision of probe 9 and sample stage 10 can damage equipment It is bad, huge loss；It is equipped with sample stage 10 in the upper side of probe 9, is fixed with sample on the probe 9 of the two sides of sample stage 10 Folder 11；The active synchronization belt wheel 4 is connect with driven synchronous pulley 7 by synchronous belt 12, and accurate along with servo motor 3 turns Momentum, so that 9 rotation angle accuracies of probe are very high.

The present invention 9 angle of regulation range of probe are more and wide, with the perpendicular plane of SEM electron beam for 0 ° of face, can make any The electron beam of SEM and 9 plane included angles of probe are any in -30 ° to 150 ° or -15 ° to 165 ° or -5 ° to 175 ° or 0 ° to 180 ° In one angular range, maximum guarantee is provided for the test result and effect of experiment.

In using the present invention, when experimentation needs to adjust the angle of sample stage 10, it is only necessary to control servo motor 3 Amount of spin can be adjusted accurately, since sample stage 10 is placed directly on probe 9, in adjustment sample angle, will not be sent out completely Raw sample stage 10 crashes with probe 9, and ultrahigh in efficiency will not influence test simultaneously because angle can change And effect as a result.

Claims

1. a tiltable transmission mode electron backscatter diffraction experiment device, is characterized in that, comprises the machine base that is fixed on the scanning electron microscope observation table top, and is provided with slotted on the described machine base, and the rear side machine base of the slot is provided with. There is a fixed plate, the servo motor is fixed on the fixed plate, and the active synchronous pulley is fixed on the rotor of the servo motor; the two sides of the slot are provided with support arms; A movable arm is installed on the arm through a rotating shaft; a U-shaped groove is opened on the movable arm, and a driven synchronous pulley is fixed on the rotating shaft and located in the U-shaped groove of the movable arm; one side of the rotating shaft is connected with a coupling through a coupling a rotation angle detection sensor; a wedge-shaped probe is fixed on the front end surface of the movable arm, a sample stage is fixed on the upper surface of the probe, and a sample clamp is fixed on both sides of the sample stage; the active synchronous pulley and the driven synchronous pulley pass through Timing belt connection.

2 . The tiltable transmission mode electron backscatter diffraction experiment device according to claim 1 , wherein the rotating shaft is a stepped rotating shaft. 3 .

3. The tiltable transmission mode electron backscatter diffraction experimental device according to claim 1, wherein the probe is detachably fixedly connected to the movable arm through a pin shaft, and the probe and the movable arm abutting surface are set as a convex surface, A pin hole is provided on the protrusion, the movable arm and the probe are connected to a concave surface, a pin hole is provided on the probe, and the positions of the two pin holes are consistent, and the probe is inserted in the concave surface of the movable arm, and is connected by the pin Axle is fixed.

4. tiltable transmission mode electron backscatter diffraction experimental device according to claim 1, is characterized in that: with the SEM electron beam phase vertical plane as 0° plane, the electron beam of any SEM and the probe plane angle can be made at 0°. -30° to 150° or -15° to 165° or -5° to 175° or 0° to 180°.

5 . The tiltable transmission mode electron backscatter diffraction experiment device according to claim 1 , wherein the rotating shaft is fixed to the trailing arm through a bearing, and the bearing is a ball bearing. 6 .

6 . The tiltable transmission mode electron backscatter diffraction experiment device according to claim 1 , wherein the movable arm and the rotating shaft are installed in the form of matching with key grooves. 7 .

7 . The tiltable transmission mode electron backscatter diffraction experiment device according to claim 1 , wherein the active synchronous pulley and the servo motor are installed in the form of key-slot cooperation. 8 .

8 . The tiltable transmission mode electron backscatter diffraction experiment device according to claim 1 , wherein a layer of rubber pad is arranged between the servo motor and the fixing plate. 9 .