CN109879245A - Two translation and one rotation large stroke uncoupled parallel piezoelectric micro-motion stage - Google Patents
Two translation and one rotation large stroke uncoupled parallel piezoelectric micro-motion stage Download PDFInfo
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Abstract
The invention discloses two translations, the one big strokes of rotation without coupling parallel piezoelectric micromotion platform, dynamic table top including being used as carrying object, the lower section gap of dynamic table top, which is equipped with, determines stage body, and the centre for determining stage body is equipped with the first holding tank, and the first holding tank gap is equipped with the dynamic stage body for being fixed at dynamic table top；Dynamic stage body is additionally provided with the first conducting part, the second conducting part and third conducting part；Determine stage body and is equipped with the third holding tank that gap accommodates the second flexible thin at the edge for being located at the first holding tank；First conducting part, the first driving unit of the respective rigid portion of the second conducting part and third conducting part, the second driving unit and third driving unit；Two translations and a rotation of dynamic stage body and dynamic table top in the horizontal plane are realized by the driving to the first driving unit, the second driving unit and third driving unit.It is an advantage of the invention that platform overall structure is simple and compact, work top is big, displacement stroke is big, without parasitic displacement, intrinsic frequency is high, is easily integrated displacement sensor.
Description
Technical field
The invention belongs to nanotechnology field, the micro-displacement mechanism being related in axis Nano-positioners, in particular to one
Two translation of kind, the one big stroke of rotation is without coupling parallel piezoelectric micromotion platform.
Background technique
Piezoelectric micromotion platform is a kind of to can produce the compliant mechanism of flexible deformation by piezo actuator driving to transmit position
Move the micro-displacement mechanism with power.Since it does not have hinge and bearing, so not needing to assemble, drive gap is not present, does not generate
Friction and wear；Due to being driven using piezo actuator, therefore its displacement resolution can reach nanoscale, and the response time can reach milli
Second grade, and rigidity is big, small in size, bearing capacity is strong.Therefore, it is widely used in Precision Machining and test, fiber alignment, micro-
In the technical field that component assembly, cellular micromanipulation etc. need micro-/ nano to position.It such as, can be real in accurate and Ultra-precision Turning
The Fine Feed of existing cutter or the compensation of mismachining tolerance；, it can be achieved that the fine adjustment of sensor in accurate measurement；It is aobvious in scanning probe
In micro mirror, the measurement, it can be achieved that microstructure appearance is combined with micro scanning probe；, it can be achieved that diameter is in fiber alignment
The fine registration of several microns to more than ten microns of two optical fiber；In MEMS(MEMS) assembly in, combined with micro-clamp, can
By micro- axis, micro gear assembly at microcomponent；It in bioengineering, combines, can be injected to cell or from thin with microshock probe
Corresponding ingredient is extracted in born of the same parents.
The realization of two translations (along x, y to a moving) rotation (around z-axis i.e. along z to rotating) Three Degree Of Freedom piezoelectric micromotion platform
Mode mainly have superposing type, tandem with parallel three kinds.Superposing type be first produce respectively can along x, y, z to output micro-displacement
The single degree of freedom piezoelectric micromotion platform, then three platforms are added up in short transverse by stacking again, this platform is set
Meter is easy, without coupling (i.e. when platform is moved along certain direction, will not generate parasitic displacement in other direction), installation in movement
It is convenient with piezo actuator is pre-tightened, but volume is big, and structure is not compact, and intrinsic frequency is low, and the performance parameter of each direction of motion need to divide
It is not designed.Tandem is first to produce to can produce another party in the moving platform (outer moving platform) for generating a direction movement
To the moving platform (intermediate moving platform) of movement, then the moving platform that can produce the movement of last direction is produced in intermediate moving platform
(interior moving platform), this platform structure is compact, and each moving platform is also without coupling in movement, but effectively table top is smaller, installation with it is pre-
Tight to be used to drive the piezo actuator of intermediate moving platform and interior moving platform difficult, the performance parameter of each direction of motion is also required to distinguish
It is designed.Parallel is the movement that all directions are realized using the same moving platform, and installation and preload piezo actuator are convenient,
The performance parameter of each direction of motion can be designed simultaneously, and comprehensive performance is better than superposing type and tandem, but existing parallel knot
Structure is not complicated, compact, and work top is small, and displacement stroke is small, and there are displacement coupling, intrinsic frequency is low.
Summary of the invention
Technical problem to be solved by the invention is to provide it is a kind of it is simple and compact for structure, work top is big, displacement stroke is big,
High two translations, the one big stroke of rotation of non-displacement coupling, intrinsic frequency is without coupling parallel piezoelectric micromotion platform.
The technical scheme of the invention to solve the technical problem is: two translations, the one big stroke of rotation is in parallel without coupling
Piezoelectric micromotion platform, the dynamic table top including being used as carrying object, the lower section gap of dynamic table top, which is equipped with, determines stage body, determines the centre of stage body
Equipped with the first holding tank, the first holding tank gap is equipped with dynamic stage body, moves intrinsic first screw of spiral shell between stage body and dynamic table top；Dynamic platform
Body includes mutually perpendicular first edge and second edge, and first edge is equipped with the first conducting part and the second conducting part, the second side
Edge is equipped with third conducting part；
First conducting part, the structure of the second conducting part with third conducting part these three conducting parts are identical, are correspondingly arranged at dynamic stage body side
In second holding tank of edge, including being respectively facing dynamic stage body and rigid portion and first flexible thin of the gap in the second holding tank
Plate in rigid portion and is connected in the first protrusion of the first flexible thin other end, on dynamic stage body and is connected in the first flexibility
Second protrusion of the thin plate other end further includes the second flexible thin for being vertically connected in rigid portion, the other end of the second flexible thin
It is connected in and determines stage body；The first flexible thin of a pair, rigid portion in each conducting part constitute single parallel four-bar linkage with dynamic stage body,
And then two opposite conducting parts constitute double parallel double leval jib with dynamic stage body by respective a pair of first flexible thin, rigid portion
Mechanism, to third driving unit apply voltage and applying simultaneously to the first driving unit and the second driving unit it is identical
When voltage, stage body and dynamic table top are moved along x to the translation displacements stringent to output with y, without generating parasitic displacement.
Determine stage body and is equipped with the third holding tank that gap accommodates the second flexible thin at the edge for being located at the first holding tank；First
One end far from dynamic stage body of the respective rigid portion of conducting part, the second conducting part and third conducting part is respectively equipped with the first driving list
Member, the second driving unit and third driving unit；By to the first driving unit, the second driving unit and third driving unit
Driving makes stage body and dynamic table top realize two translations, one rotation in horizontal plane.If being z-axis, the first driving unit perpendicular to dynamic table top
It is y-axis to the second driving unit, is x-axis both perpendicular to z-axis and y-axis.
To optimize above-mentioned technical proposal, the measure taken further include:
First driving unit, the structure of the second driving unit with third driving unit these three driving units are identical, including bridge-type
Enlarger, and the piezo actuator in bridge-type enlarger, piezo actuator are parallel to the second flexible thin；Bridge-type
Enlarger includes the first Stiff Block and third Stiff Block for being divided into piezo actuator both ends, and gap is set to piezo actuator two
The second Stiff Block and the 4th Stiff Block of side, the second Stiff Block spiral shell, which is fixedly arranged on, determines stage body, and the 4th Stiff Block spiral shell is fixedly arranged on rigid portion；
And sequentially it is connected in the third flexible thin between the first Stiff Block, the second Stiff Block, third Stiff Block and the 4th Stiff Block, the
The distance between one end and piezo actuator middle section of three flexible thins are less than the other end of third flexible thin and piezoelectricity executes
The distance between device end；When piezo actuator is powered, when piezo actuator can become elongation, the first Stiff Block and third rigidity
Block is opened each other, while third flexible thin can also be straightened from heeling condition, to make the second Stiff Block and the 4th Stiff Block
Away from each other, the second Stiff Block 202 and the length of the 4th Stiff Block away from each other be the several times of piezo actuator extended length very
To can be up to 10 times, to realize displacement equations effect, final 4th Stiff Block pushes rigid portion, when piezo actuator power-off,
Piezo actuator, the first Stiff Block, the second Stiff Block, third Stiff Block, the 4th Stiff Block and third flexible thin reset.
Above-mentioned dynamic stage body further includes the third edge parallel with first edge, and parallel with second edge
Four edges；Third edge is equipped with the 4th conducting part and the 5th conducting part with the first conducting part and the second conducting part mirror settings；
4th edge is equipped with the 6th conducting part with third conducting part mirror settings.
The number of second holding tank of the first above-mentioned conducting part, rigid portion and the second flexible thin is respectively 2, adjacent
Rigid portion be located at third holding tank one end and molding integral with one another.
It is above-mentioned to determine stage body and set that there are three accommodate the first driving unit, the second driving unit and third driving unit respectively
4th holding tank, and the 4th holding tank is connected to third holding tank；Bridge-type enlarger further include be sequentially connected with the first Stiff Block,
4th flexible thin of the second Stiff Block, third Stiff Block and the 4th Stiff Block, the 4th flexible thin parallel clearance are set to third
Between flexible thin and piezo actuator.A pair third flexible thin disposed in parallel, the 4th flexible thin in bridge-type enlarger
Plate constitutes single parallel four-bar linkage with the second Stiff Block, the first Stiff Block, and a pair for being located at the second Stiff Block other side is flat
Third flexible thin, the 4th flexible thin same second Stiff Block, the third Stiff Block of row setting also constitute single parallel―ordinal shift machine
Structure, the two single parallel four-bar linkages constitute double parallel four-bar mechanism；Equally, the third positioned at the 4th Stiff Block two sides is soft
Property thin plate, the 4th flexible thin also constitute double parallel four-bar mechanism with the 4th Stiff Block, the first Stiff Block, third Stiff Block,
When piezo actuator is acted on by voltage, above-mentioned double parallel four-bar mechanism can make driving unit defeated by the 4th Stiff Block
Stringent translation displacements out, without generating parasitic displacement.
The above-mentioned outer profile for determining stage body is rectangle, and dynamic stage body is vertical with dynamic table top is equipped with hollow hole.
Above-mentioned dynamic stage body is equipped with the boss for consolidating the first screw for spiral shell at the edge for being located at hollow hole.
The above-mentioned bottom for determining stage body is equipped with the bottom plate to match with the Internal periphery of the outer profile and hollow hole of determining stage body, bottom
Plate and determine intrinsic second screw of spiral shell between stage body.
When the number of respective second holding tank of the first conducting part to the 6th conducting part is 1, the number of rigid portion is 1
A, the number of the first protrusion, the second protrusion and the first flexible thin is respectively 2 and is divided into the two sides of rigid portion；When the 4th
When the number of conducting part to respective second holding tank of the 6th conducting part is 2, the number of rigid portion is 2, the first protrusion, the
The number of two protrusions and the first flexible thin is respectively 2, and is set between two adjacent rigid portions, two adjacent rigidity
Portion is in integrated formed structure in the one end being located in the third holding tank.
First Stiff Block, the second Stiff Block, third Stiff Block, the 4th Stiff Block, third flexible thin and the 4th flexible thin
Bridge-type enlarger composed by plate is an integral molding structure；It is described to determine stage body, the second flexible thin, rigid portion, first convex
Portion, the first flexible thin, the second protrusion and dynamic stage body are an integral molding structure.
Compared with prior art, two translations one of the invention rotate big stroke without coupling parallel piezoelectric micromotion platform, including
Dynamic table top as carrying object, the lower section gap of dynamic table top, which is equipped with, determines stage body, and the centre for determining stage body is equipped with the first holding tank, the
One holding tank gap is equipped with the dynamic stage body for being fixed at dynamic table top；Dynamic stage body is additionally provided with the first conducting part, the second conducting part and third
Conducting part；Determine stage body and is equipped with the third holding tank that gap accommodates the second flexible thin at the edge for being located at the first holding tank；First
The top of the respective rigid portion of conducting part, the second conducting part and third conducting part is respectively equipped with the first driving unit, the second driving
Unit and third driving unit；Make platform by the driving to the first driving unit, the second driving unit and third driving unit
Body and dynamic table top realize that two translations one rotate in the horizontal plane.With existing two translations, one rotation parallel piezoelectric micromotion platform phase
Than, the invention has the advantages that
1) relative to the outbound course of driving unit in existing piezoelectric micromotion platform and input direction along piezo actuator axis
To the axis of piezo actuator is perpendicular to the edge for determining stage body Yu dynamic stage body, and driving unit is difficult to determine stage body together and dynamic stage body is tight
Close combination, for the outbound course of driving unit perpendicular to the axis of piezo actuator, the axis of piezo actuator is parallel in the present invention
In the edge for determining stage body Yu dynamic stage body, driving unit same can determine stage body and dynamic stage body is combined closely, to make platform overall structure
It is simple and compact, work top is big.
2) input displacement of piezo actuator can be amplified 10 times or more by the bridge-type enlarger in driving unit, thus
The displacement stroke of dynamic stage body and dynamic table top can greatly be expanded.
3) the first flexible thin of a pair in each conducting part, rigid portion constitute single parallel four-bar linkage with dynamic stage body,
And then two opposite conducting parts constitute double parallel double leval jib with dynamic stage body by respective a pair of first flexible thin, rigid portion
Mechanism, to third driving unit apply voltage and applying simultaneously to the first driving unit and the second driving unit it is identical
When voltage, stage body and dynamic table top are moved along x to the translation displacements stringent to output with y, without generating parasitic displacement.
4) a pair of third flexible thin disposed in parallel in bridge-type enlarger, the 4th flexible thin with the second Stiff Block,
First Stiff Block constitutes single parallel four-bar linkage, and a pair third disposed in parallel for being located at the second Stiff Block other side is flexible
Thin plate, the 4th flexible thin also constitute single parallel four-bar linkage with the second Stiff Block, third Stiff Block, the two single parallel four
Link mechanism constitutes double parallel four-bar mechanism；Equally, the third flexible thin positioned at the 4th Stiff Block two sides, the 4th flexible thin
Plate also constitutes double parallel four-bar mechanism with the 4th Stiff Block, the first Stiff Block, third Stiff Block, in piezo actuator by electricity
When pressure acts on, above-mentioned double parallel four-bar mechanism can make driving unit export stringent translation displacements by the 4th Stiff Block,
Without generating parasitic displacement.
5) the only dynamic stage body of the motion parts of platform and dynamic table top, the quality of motion parts greatly reduce, and can greatly improve
The intrinsic frequency of platform.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention；
Fig. 2 is the decomposition diagram of Fig. 1；
Fig. 3 is the structural schematic diagram after determining stage body and the integrated molding of dynamic stage body in Fig. 2 with driving unit after equipped；
Fig. 4 is the complete section structural schematic diagram of Fig. 3；
Fig. 5 is the decomposition diagram of Fig. 3；
Fig. 6 is the structural schematic diagram of the first driving unit of the invention；
Fig. 7 is the complete section structural schematic diagram of Fig. 6；
Fig. 8 is the decomposition diagram that stage body and dynamic stage body are determined in Fig. 5；
Fig. 9 is the enlarged structure schematic diagram in the portion A in Fig. 5；
Figure 10 is the structural representation after rigid portion of the 4th conducting part into the 6th conducting part is connected with dynamic stage body in embodiment 2
Figure；
Figure 11 is the structural representation after rigid portion of the 4th conducting part into the 6th conducting part is connected with dynamic stage body in embodiment 3
Figure.
Specific embodiment
The embodiment of the present invention is described in further detail below in conjunction with attached drawing.
Fig. 1 to Figure 11 be structural schematic diagram of the invention, appended drawing reference therein are as follows: determine stage body 1, the first holding tank 11,
Third holding tank 12, the 4th holding tank 13, hollow hole 14, bridge-type enlarger 2, the first Stiff Block 201, the second Stiff Block 202,
Third Stiff Block 203, the 4th Stiff Block 204, third flexible thin 205, the 4th flexible thin 206, piezo actuator 207,
One driving unit 21, the second driving unit 22, third driving unit 23, dynamic table top 3, bottom plate 4, the first screw 51, the second screw
52, move stage body 6, first edge 61, second edge 62, third edge 63, the 4th edge 64, boss 65, the second holding tank 701,
Second protrusion 702, rigid portion 703, the first protrusion 704, the first flexible thin 705, the second flexible thin 706, the first conducting part
71, the second conducting part 72, third conducting part 73, the 4th conducting part 74, the 5th conducting part 75, the 6th conducting part 76.
Fig. 1 to Figure 11 is structural schematic diagram of the invention, as shown, two translations, the one big stroke of rotation of the invention is without coupling
Parallel piezoelectric micromotion platform is closed, the dynamic table top 3 including being used as carrying object, the lower section gap of dynamic table top 3, which is equipped with, determines stage body 1, fixed
The centre of stage body 1 is equipped with the first holding tank 11, and 11 gap of the first holding tank is equipped with dynamic stage body 6, moves between stage body 6 and dynamic table top 3
Intrinsic first screw 51 of spiral shell；As shown in figures 3 and 8, it moves stage body 6 and includes mutually perpendicular first edge 61 and second edge 62,
First edge 61 is equipped with the first conducting part 71 and the second conducting part 72, and second edge 62 is equipped with third conducting part 73；
First conducting part 71, the second conducting part 72 are identical with the structure of 73 these three conducting parts of third conducting part, are correspondingly arranged at dynamic
In second holding tank 701 at 6 edge of stage body, including being respectively facing dynamic stage body 6 and rigidity of the gap in the second holding tank 701
Portion 703 and the first flexible thin 705 in rigid portion 703 and are connected in first protrusion of 705 one end of the first flexible thin
704, on dynamic stage body 6 and it is connected in the second protrusion 702 of 705 other end of the first flexible thin, further includes vertically being connected in rigidity
Second flexible thin 706 in portion 703, the other end of the second flexible thin 706, which is connected in, determines stage body 1；Second flexible thin 706 is
Elastic deformation occurs when one driving unit 21, the second driving unit 22 and third 23 output displacement of driving unit, makes the first driving
The output displacement of unit 21, the second driving unit 22 and third driving unit 23 passes to dynamic stage body 6.One in each conducting part
Single parallel four-bar linkage, and then two opposite conducting parts are constituted with dynamic stage body 6 to the first flexible thin 705, rigid portion 703
Double parallel four-bar mechanism is constituted with dynamic 6 body of platform by respective a pair of first flexible thin 705, rigid portion 703, is giving third
Driving unit 23 applies voltage and when applying identical voltage simultaneously to the first driving unit 21 and the second driving unit 22,
Stage body and dynamic table top are moved along x to the translation displacements stringent to output with y, without generating parasitic displacement.
Determine stage body 1 and is equipped with the third receiving that gap accommodates the second flexible thin 706 at the edge for being located at the first holding tank 11
Slot 12；The one end of the respective rigid portion 703 of first conducting part 71, the second conducting part 72 and third conducting part 73 far from dynamic stage body 6
It is respectively equipped with the first driving unit 21, the second driving unit 22 and third driving unit 23.
Make stage body by the driving to the first driving unit 21, the second driving unit 22 and third driving unit 23 and moves
Table top realizes two translations and a rotation in horizontal plane.If being z-axis, the driving of the first driving unit 21 to the second perpendicular to dynamic table top 3
Unit 22 is y-axis, is x-axis both perpendicular to z-axis and y-axis.In embodiment, as shown in Fig. 3,4,5, the first driving unit 21,
Second driving unit 22 is identical with the structure of these three driving units of third driving unit 23, as shown in Fig. 5,6,7, including bridge
Formula enlarger 2, and the piezo actuator 207 in bridge-type enlarger 2, it is soft that piezo actuator 207 is parallel to second
Property thin plate 706；Bridge-type enlarger 2 includes the first Stiff Block 201 and third Stiff Block for being divided into 207 both ends of piezo actuator
203, gap is set to the second Stiff Block 202 and the 4th Stiff Block 204 of 207 two sides of piezo actuator；Second Stiff Block, 202 spiral shell is solid
Set on stage body 1 is determined, 204 spiral shell of the 4th Stiff Block is fixedly arranged on rigid portion 703, and is sequentially connected in first the 201, second rigidity of Stiff Block
Third flexible thin 205 between block 202, third Stiff Block 203 and the 4th Stiff Block 204, one end of third flexible thin 205
The distance between 207 middle section of piezo actuator be less than third flexible thin 205 the other end and 207 end of piezo actuator it
Between distance.When piezo actuator 207, which is powered, to be extended, the first Stiff Block 201 and third Stiff Block 203 are opened each other, together
When third flexible thin 205 can be also straightened from heeling condition, to keep the second Stiff Block 202 and the 4th Stiff Block 204 remote each other
From, the second Stiff Block 202 and the length of the 4th Stiff Block 204 away from each other be the several times of 207 extended length of piezo actuator very
To can be up to 10 times, to realize displacement equations effect, final 4th Stiff Block 204 pushes rigid portion 703, works as piezo actuator
When 207 power-off, piezo actuator 207, the first Stiff Block 201, the second Stiff Block 202, third Stiff Block 203, the 4th Stiff Block
204 and third flexible thin 205 reset.
In embodiment, as shown in figures 3 and 8, moving stage body 6 further includes the third edge 63 parallel with first edge 61,
And fourth edge 64 parallel with second edge 62；Third edge 63 is equipped with and the first conducting part 71 and the second conducting part 72
4th conducting part 74 of mirror settings and the 5th conducting part 75；4th edge 64 is equipped with the with 73 mirror settings of third conducting part
Six conducting parts 76.Setting is z-axis perpendicular to dynamic table top 3, and first the 21 to the second driving unit of driving unit 22 is y-axis, and described
Y-axis and z-axis be vertically x-axis, respective first is flexible in the 4th conducting part 74, the 5th conducting part 75 and the 6th conducting part 76
Thin plate 705 respectively with respective first flexible thin 705 in the second conducting part 72, the first conducting part 71 and third conducting part 73,
Rigid portion 703 and dynamic stage body 6 constitute double parallel quadrangle four-bar mechanism, to make stage body 6 to third driving unit 23
Apply voltage and when applying identical voltage simultaneously to the first driving unit 21 and the second driving unit 22, along x to y to defeated
Stringent translation displacements out, without generating parasitic displacement.
In embodiment, as shown in Figure 9 and Figure 10, the second holding tank 701 of the first conducting part 71, rigid portion 703 and second
The number of flexible thin 706 is respectively 2, adjacent rigid portion 703 be located at one end of third holding tank 12 and it is integral with one another at
Type.
In embodiment, as shown in Figure 5 and Figure 8, determine stage body 1 set there are three accommodate respectively the first driving unit 21, second drive
4th holding tank 13 of moving cell 22 and third driving unit 23, and the 4th holding tank 13 is connected to third holding tank 12；Bridge-type
Enlarger 2 further includes being sequentially connected with the first Stiff Block 201, the second Stiff Block 202, third Stiff Block 203 and the 4th Stiff Block
204 the 4th flexible thin 206,206 parallel clearance of the 4th flexible thin are set to third flexible thin 205 and piezo actuator
Between 207, it is stringent that being arranged in parallel of third flexible thin 205 and the 4th flexible thin 206 can be such that the 4th Stiff Block 204 generates
Translation displacements, without generating parasitic displacement, specifically, a pair of third flexible thin disposed in parallel in bridge-type enlarger 2
205, the 4th flexible thin 206 constitutes single parallel four-bar linkage with the second Stiff Block 202, the first Stiff Block 201, and is located at the
A pair third flexible thin 205 disposed in parallel of two Stiff Blocks, 202 other side, same second Stiff Block of the 4th flexible thin 206
202, third Stiff Block 203 also constitutes single parallel four-bar linkage, the two single parallel four-bar linkages constitute double parallel four and connect
Linkage；Equally, third flexible thin 205, the 4th flexible thin 206 positioned at 204 two sides of the 4th Stiff Block are rigid with the 4th
Block 204, the first Stiff Block 201, third Stiff Block 203 also constitute double parallel four-bar mechanism, in piezo actuator 207 by electricity
When pressure acts on, above-mentioned double parallel four-bar mechanism can make driving unit export stringent translation position by the 4th Stiff Block 204
It moves, without generating parasitic displacement.4th holding tank 13 can make the first driving unit 21, the second driving unit 22 and third driving
Unit 23 is placed in dynamic stage body 6, further avoids the first driving unit 21, the second driving unit 22, third driving unit 23
With determine stage body 1 and be superimposed to be formed by thickness, to keep micromotion platform whole more frivolous.
In embodiment, as shown in Figure 1, the outer profile for determining stage body 1 is rectangle, dynamic stage body 6 is vertical with dynamic table top 3 is equipped with
Emptying aperture 14 can not only reduce the quality of dynamic stage body 6 and dynamic table top 3, and when regulating mechanism of the platform as optical system is to go back
It can be as clear aperature.
In embodiment, as shown in Fig. 3,5 and Fig. 8, moves stage body 6 and be equipped at the edge for being located at hollow hole 14 for spiral shell solid first
The boss 65 of screw 51.Boss 65 can be lifted dynamic table top 3, avoid dynamic table top 3 and the first driving unit 21, the second driving unit 22
With the CONTACT WITH FRICTION of third driving unit 23.
In embodiment, as shown in Fig. 2, the bottom for determining stage body 1 is equipped with the lubrication groove with the outer profile and hollow hole 14 for determining stage body 1
The bottom plate 4 that exterior feature matches, bottom plate 4 and determines intrinsic second screw 52 of spiral shell between stage body 1；Between bottom plate 4 between dynamic stage body 6 with being equipped with
Gap avoids CONTACT WITH FRICTION；Bottom plate 4 can prevent dust from entering the inside of platform from the lower section for determining stage body 1.
The number of respective second holding tank 701 of 71 to the 6th conducting part of the first conducting part 76 of embodiment 1 is 2, just
Property portion 703 number be 2, the number of the first protrusion 704, the second protrusion 702 and the first flexible thin 705 be respectively 2 and
Between two adjacent rigid portions 703, two adjacent rigid portions 703 are in one be located in the third holding tank 12
End is in integrated formed structure, is equipped with the hollow slots for conveniently inserting screws into the 4th Stiff Block 204 between adjacent rigid portion 703,
As shown in Figure 9.
Embodiment 2 the difference from embodiment 1 is that, 74 to the 6th conducting part 76 of the 4th conducting part of embodiment 2 is not engraved
Empty slot, as shown in Figure 10.
Embodiment 3 the difference from embodiment 1 is that, 74 to the 6th conducting part 76 of the 4th conducting part of embodiment 3 is respective
The number of second holding tank 701 is 1, and the number of rigid portion 703 is 1, and the first protrusion 704, the second protrusion 702 and first are soft
The number of property thin plate 705 is respectively 2 and is divided into the two sides of rigid portion 703, as shown in figure 11.
First Stiff Block 201, the second Stiff Block 202, third Stiff Block 203, the 4th Stiff Block 204, third flexible thin
205 and the 4th bridge-type enlarger 2 composed by flexible thin 206 be an integral molding structure；Determine stage body 11, the second flexible thin
706, rigid portion 703, the first protrusion 704, the first flexible thin 705, the second protrusion 702 and dynamic stage body 6 are an integral molding structure.
If being z-axis perpendicular to dynamic table top 3, first the 21 to the second driving unit of driving unit 22 is y-axis, both perpendicular to z-axis and y-axis
For x-axis, then platform realizes that the process of two translations, one rotation is as follows:
If only applying identical voltage simultaneously to the piezo actuator 207 of the first driving unit 21 and the second driving unit 22,
First driving unit 21 and the second driving unit 22 push the first conducting part 71 and the second conducting part 72 respectively, then push dynamic platform
Body 6, to moving, moves table top 3 just along x to stringent straight line micro-displacement is exported, without being displaced in y to coupling is generated along x.
If only applying voltage to the piezo actuator 207 of third driving unit 23, third driving unit 23 pushes third
Conducting part 73 then pushes dynamic stage body 6 along y to moving, and moves table top 3 just along y to exporting stringent straight line micro-displacement, without
It is displaced in x to coupling is generated.
If only applying voltage to the piezo actuator 207 of the first driving unit 21, the first driving unit 21 pushes first
Conducting part 71 or the second driving unit 22 push the second conducting part 72, and dynamic stage body 6 is then pushed to rotate around z-axis, move table top 3 around
Z-axis rotation.
Highly preferred embodiment of the present invention has illustrated, and the various change or remodeling made by those of ordinary skill in the art are not
It can depart from the scope of the present invention.
Claims (10)
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