CN109877824A - It is a kind of singly to take correction robot and its method for correcting error - Google Patents
It is a kind of singly to take correction robot and its method for correcting error Download PDFInfo
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- CN109877824A CN109877824A CN201711275867.8A CN201711275867A CN109877824A CN 109877824 A CN109877824 A CN 109877824A CN 201711275867 A CN201711275867 A CN 201711275867A CN 109877824 A CN109877824 A CN 109877824A
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Abstract
The present invention relates to the subsystems of carrying glass sheet system, it is specifically a kind of singly to take correction robot and its method for correcting error, slide unit of walking is arranged on installation foundation, walking slide plate is slidably connected with walking slide unit, lifting column is rotatably connect with walking slide plate, and the lifter slide to move along a straight line along lifting column short transverse is equipped on lifting column；One end of large arm is articulated on lifter slide, and one end of the other end and forearm is hinged, and the other end of forearm and one end of actuator are hinged, the position sensor of position when the other end of actuator is equipped at least two triggering skew substrate differences；Actuator, which has, to be rotated with lifter slide lifting, with lifting column, with the edge walking slide unit sliding of walking slide plate and the freedom degree flexible by large arm and forearm drive；Lifter slide is equipped with sensor array.List of the present invention takes the structure of correction robot simple, and method for correcting error is easy to operate, can rectify a deviation to the crooked substrate not parallel with station.
Description
Technical field
The present invention relates to the subsystems of carrying glass sheet system, specifically a kind of singly to take correction robot and its entangle
Folk prescription method.
Background technique
In recent years, opto-electronics rapidly develops, and the market demand is continuously increased, application of the industrial robot in opto-electronics
It dramatically increases therewith, it is especially the most urgent to the transfer robot demand for liquid crystal display panel factory dust-free workshop.This carrying implement
Device people is mainly used in glass substrate during LCD (liquid crystal display) is manufactured and transmits, the transmission of back-end process before connecting,
And the exchange and transmitting of the glass substrate in each processing procedure.Japan is the major producing country of current such robot, has been developed
Large machines people's system for the tenth generation LCD carrying glass sheet.
China's LCD glass substrate carrying robot relies primarily on import, involves great expense, and structure is complicated, cumbersome.
Summary of the invention
In order to meet the production requirement of glass substrate carrying robot, correction is singly taken the purpose of the present invention is to provide a kind of
Robot and its method for correcting error, can allow robot during picking and placing glass substrate, position and deflection to glass substrate
Angle carries out dynamic correction.
The purpose of the present invention is achieved through the following technical solutions:
The correction robot that singly takes of the invention includes installation foundation, walking slide unit, walking slide plate, lifting column, lifting cunning
Plate, sensor array, large arm, forearm, actuator and position sensor, the walking slide unit are arranged on installation foundation, the row
It walks slide plate to be slidably connected with walking slide unit, the lifting column is rotatably connect with walking slide plate, in the lifting column
It is equipped with the lifter slide to move along a straight line along lifting column short transverse；One end of the large arm is articulated with lifter slide
On, one end of the other end and the forearm is hinged, and the other end of the forearm and one end of the actuator are hinged, the actuator
The position sensor of position when the other end is equipped at least two triggering skew substrate differences；The actuator has with lifter slide
Lifting drives flexible freedom degree with lifting column rotation, with walking slide plate along the sliding of walking slide unit and by large arm and forearm；
The lifter slide is equipped with sensor array；
Wherein: one end of the actuator is the plate hinged with forearm, and the other end is in fork shape；The actuator it is another
One end is two fork arms being parallel to each other, and the sucker for skew substrate described in vacuum suction is equipped on every fork arm, every
The end of root fork arm is equipped with the position sensor；
The lifter slide is " U "-shaped, and one end of the either end and the large arm of " u "-shaped opening is hinged, the " u "-shaped liter
It drops and the sensor array is installed at the inner tank mouths of slide plate；The bottom edge of the lifter slide " u "-shaped and the height of lifting column
Direction is consistent, and the both ends of " u "-shaped opening are setting up and down, i.e., the " u "-shaped lifter slide deflects 90 ° of settings；The sensor array
It is mounted at the inner tank mouths of " u "-shaped bottom edge setting, laser beam is issued by transmitting terminal, is received by receiving end.
List of the present invention takes the method for correcting error of correction robot are as follows:
The installation foundation, which is equipped with, to be taken plate station and puts plate station, this takes and is placed with crooked substrate on plate station, described
The long side of crooked substrate, short side favour respectively to be taken plate station and puts the long side of plate station, short side；The walking slide plate is being walked
Relative movement is defined as X-axis on slide unit length direction, and the lifter slide is fixed along lifting column short transverse linear relative movement
Justice is Z axis, and the lifting column carries out rotation around pivot center relative to walking slide plate and is defined as θ axis, and the actuator passes through big
Arm, forearm, which drive, is defined as R axis perpendicular to the movement of the space line of θ axis and Z axis；The X-axis, Z axis sequential movements, described in drive
Actuator face takes plate station, the movement of R axis, makes the actuator to taking plate station direction to move；On the actuator other end
At least two position sensors position when triggering the difference of crooked substrate side short side, obtain this and take the crooked base on plate station
Not parallel angle between plate side short side and X-axis, and the angle is transmitted to control system；The control system controls R axis, θ
Axis and the linkage of X-axis servo drive the actuator deflection, compensate the angle, make the side long side and R axis of the crooked substrate
In parallel；The actuator vacuum suction skew substrate, the movement of R axis make the actuator and crooked substrate in large arm, the band of forearm
It is shunk under dynamic to the direction of lifter slide, in contraction process, the sensor array is flutterred by non-contact laser catches crooked substrate
Position of the long side of side relative to lifter slide, and it is transmitted to the control system, which controls X-axis, R axis and θ axis,
Make the actuator and plate station is put in the steering of crooked substrate, face puts plate station, the crooked substrate is passed through into R axis and Z axis
Coupled motions are placed on plate station smooth vertical and horizontally；
Wherein: the other end of the actuator is two fork arms being parallel to each other, and the end of every fork arm is equipped with position
Sensor；The actuator is moved from R axis to during taking plate station to move, and fork arm is equal with the long side of plate station is taken
Row；When the position sensor on a wherein fork arm first triggers crooked substrate side short side position, the actuator is in R axis, θ
Under axis and the linkage of X-axis servo, center rotating of the actuator relative to crooked substrate around the position sensor first triggered is allowed, directly
Upper position sensor to another fork arm also triggers crooked substrate side short side, at this time the fork arm of the actuator and crooked base
The long side of plate is parallel, and favours the long side for taking plate station；The control system respectively obtains two fork arm upper position sensors
The signal of transmitting obtains taking the crooked substrate side short side on plate station and the not parallel angle between X-axis；
The actuator is after the position sensor on two fork arms triggers crooked substrate side short side, until the skew
During substrate is placed on plate station smooth vertical and horizontally, remain parallel with the crooked long side of substrate；
Along the contraction process of R axial direction lifter slide direction, the sensor array, which is flutterred, to be caught for the actuator and crooked substrate
The joint of crooked substrate side long side and side short side is shunk in actuator and crooked substrate along the axial direction lifter slide direction R
Behind movement setting section path, then flutter the offset for catching crooked substrate side long side OQ t slide plate；If the array
Sensor continuously takes discrete data, and whether the joint of the side long side and side short side that can judge crooked substrate has breakage；Such as
Sensor array described in fruit continuously takes continuous data, can judge whether the side long side of crooked substrate has breakage.
Advantages of the present invention and good effect are as follows:
List of the present invention takes the structure of correction robot simple, and method for correcting error is easy to operate, can be to not parallel with station
Crooked substrate is rectified a deviation；High-cost sensor array on inexpensive position sensor and lifter slide on actuator fork arm
It is combined with each other, cost advantage is obvious.
Detailed description of the invention
Fig. 1 is one of the alternating station top view that the present invention singly takes correction robot；
Fig. 2 is the two of the alternating station top view that the present invention singly takes correction robot；
Fig. 3 is the isometric side view that the present invention singly takes correction robot；
Fig. 4 is the explosive view that the present invention singly takes correction robot；
Fig. 5 is the structural front view that the present invention singly takes correction robot；
Fig. 6 is the structure right view that the present invention singly takes correction robot；
Wherein: 1 is installation foundation, and 2 is take plate station, and 3 be crooked substrate, and 4 is put plate station, and 5 be walking slide unit, and 6 are
Walking slide plate, 7 be pivot center, and 8 be lifting column, and 9 be lifter slide, and 10 be sensor array, and 11 be large arm, and 12 be small
Arm, 13 be actuator, and 14 be position sensor.
Specific embodiment
The invention will be further described with reference to the accompanying drawing.
As shown in figs. 1 to 6, it is of the invention singly take correction robot include installation foundation 1, walking slide unit 5, walking slide plate 6,
Lifting column 8, lifter slide 9, sensor array 10, large arm 11, forearm 12, actuator 13 and position sensor 14, wherein single
It takes in the working environment where rectifying a deviation robot and is equipped with installation foundation 1 (can be workbench), be respectively equipped with and take on the installation foundation 1
Plate station 2 is symmetrically disposed on the left and right sides for singly taking correction robot with plate station 4, two stations are put.Walking slide unit 5 is fixed on
On installation foundation 1, walking slide plate 6 is slidably connected with walking slide unit 5, can move back and forth along the length direction of walking slide unit 5；
Movement can drive walking slide plate 6 to realize by cylinder.Lifting column 8 is rotatably connect with walking slide plate 6, lifting column
8 can rotate around pivot center 7；Rotation can be driven by a motor the realization of lifting column 8 by installing motor on walking slide plate 6.It rises
Drop column 8 is equipped with the lifter slide 9 to move along a straight line along 8 short transverse of lifting column, and lifter slide 9 is " U "-shaped, lifting
The bottom edge of 9 " u "-shaped of slide plate is consistent with the short transverse of lifting column 8, and the both ends of " u "-shaped opening are setting up and down, i.e. the " u "-shaped liter
It drops slide plate 9 and deflects 90 ° of settings；Sensor array 10 is mounted at the inner tank mouths of " u "-shaped bottom edge setting, is issued and is swashed by transmitting terminal
Light beam is received by receiving end.The linear motion of lifter slide 9 can be driven by cylinder and be risen by installing cylinder on lifting column 8
Slide plate 9 is dropped to realize.
One end of large arm 11 is articulated in the either end of the opening of lifter slide 9, and one end of the other end and forearm 12 is hinged, should
The other end of forearm 12 is hinged with actuator 13.One end of actuator 13 is the plate hinged with forearm 12, and the other end is equipped with extremely
The position sensor 14 of position when few two triggerings skew, 3 difference of substrate.The other end of the actuator 13 of the present embodiment is in fork
Shape, the i.e. other end of actuator 13 are two fork arms being parallel to each other, and are equipped on every fork arm for vacuum suction skew base
The sucker of plate 3 is equipped with a position sensor 14 in the end of every fork arm.Actuator 13 of the invention has to be slided with lifting
The lifting of plate 9 is stretched with the rotation of lifting column 8, with walking slide plate 6 along the sliding of walking slide unit 5 and by large arm 11 and the drive of forearm 12
The freedom degree of contracting.
Sensor array 10 of the invention is commercial products, purchases in Keyemce company, transmitting terminal model IG028R, connects
Receiving end model IG028T, levelling thickness range 28mm.
List of the present invention takes the method for correcting error of correction robot are as follows:
The relative movement on walking 5 length direction of slide unit of walking slide plate 6 is defined as X-axis, and lifter slide 9 is along lifting column 8
Short transverse linear relative movement is defined as Z axis, and lifting column 8 carries out rotation around pivot center 7 relative to walking slide plate 6 and is defined as
θ axis, actuator 13 are driven by large arm 11, forearm 12 and are defined as R axis perpendicular to the movement of the space line of θ axis and Z axis.Take plate work
It is placed with crooked substrate 3 on position 2, the long side of the skew substrate 3, short side favour the length for taking plate station 2 and putting plate station 4 respectively
Side, short side.
X-axis and Z axis sequential movements drive 13 face of actuator to take plate station 2, i.e. the fork arm of 13 other end of actuator is taking
It is parallel with the long side of plate station 2 is taken when plate station 2.The movement of R axis, makes actuator 13 to taking 2 direction of plate station to move, the mistake of movement
Cheng Zhong, fork arm are parallel with the long side of plate station 2 is taken；Due to take the side short side of the crooked substrate 3 on plate station 2 relative to
X-axis is not parallel, so two position sensors 14 on 13 other end of actuator trigger two differences of crooked 3 side short side of substrate
When position；That is, being executed when the position sensor 14 on a wherein fork arm first triggers crooked 3 side short side position of substrate
Device 13 allows actuator 13 relative to crooked substrate 3 around the position sensor first triggered under the linkage of R axis, θ axis and X-axis servo
Center does dead axle and becomes posture (i.e. around the center rotating of the position sensor 14 first triggered), until the upper position of another fork arm
Sensor 14 also triggers 3 side short side of crooked substrate, and the fork arm of actuator 13 is parallel with the crooked long side of substrate 3 at this time, and inclines
Tiltedly in the long side for taking plate station 2；Control system respectively obtains the signal of two fork arm upper position sensors 14 transmitting, obtains taking plate
3 side short side of crooked substrate on station 2 and the not parallel angle between X-axis.Control system controls R axis, θ axis and X-axis servo
Linkage drives the deflection of actuator 13, compensates the not parallel angle, keeps the side long side of crooked substrate 3 parallel with R axis.Actuator
13 vacuum suction skew substrates 3, the long side of crooked substrate 3 is parallel relative to the fork arm space of 13 other end of actuator at this time.It is askew
The side short side of oblique substrate 3 is in the fork arm relative to 13 other end of actuator according to two positions of 13 other end of actuator
Sensor 14 triggers two asynchronous positions and determines relatively, but the side long side of crooked substrate 3 is relative to lifter slide 9
Position is uncertain.
The movement of R axis, make actuator 13 and crooked substrate 3 large arm 11, forearm 12 drive under to the direction of lifter slide 9
It shrinks, in contraction process, sensor array 10 flutters the long side for catching crooked 3 side of substrate by non-contact laser relative to lifting cunning
The position of plate 9, and it is transmitted to control system, which controls X-axis, R axis and θ axis, turns to actuator 13 and crooked substrate 3
Put plate station 4, face puts plate station 4, crooked substrate 3 is placed on plate smooth vertical and horizontally by the coupled motions of R axis and Z axis
On station 4.
Position sensor 14 of two fork arms of 13 other end of actuator on two fork arms triggers 3 side of crooked substrate
After short side, until remaining the long side with crooked substrate 3 during crooked substrate 3 is placed on plate station 4 smooth vertical and horizontally
In parallel.
Actuator 13 and crooked substrate 3 along 9 direction contraction process of R axial direction lifter slide, sensor array 10 flutter catch it is askew
The joint of oblique substrate 3 side long side and side short side is received in actuator 13 and crooked substrate 3 along 9 direction of R axial direction lifter slide
Behind contracting movement setting section path, then flutter the offset for catching crooked 3 side long side OQ t slide plate 9 of substrate.If array sensing
Device 10 continuously takes discrete data, and whether the joint of the side long side and side short side that can judge crooked substrate 3 has breakage；If
Sensor array 10 continuously takes continuous data, can judge whether the side long side of crooked substrate 3 has breakage.
Claims (9)
1. a kind of singly take correction robot, it is characterised in that: including installation foundation (1), walking slide unit (5), walking slide plate (6),
Lifting column (8), lifter slide (9), sensor array (10), large arm (11), forearm (12), actuator (13) and position sensing
Device (14), the walking slide unit (5) are arranged on installation foundation (1), and the walking slide plate (6) is slidably connected with walking slide unit (5),
The lifting column (8) rotatably connect with walking slide plate (6), is equipped on the lifting column (8) along lifting column
(8) lifter slide (9) that short transverse moves along a straight line；One end of the large arm (11) is articulated on lifter slide (9), separately
One end of one end and the forearm (12) is hinged, and one end of the other end and the actuator (13) of the forearm (12) is hinged, should
The position sensor (14) of position when the other end of actuator (13) is equipped at least two triggering skew substrates (3) differences；It is described
Actuator (13), which has, to be rotated with lifter slide (9) lifting, with lifting column (8), with walking slide plate (6) edge walking slide unit (5)
Sliding and the freedom degree flexible by large arm (11) and forearm (12) drive；The lifter slide (9) is equipped with sensor array
(10)。
2. according to claim 1 singly take correction robot, it is characterised in that: one end of the actuator (13) be with it is small
The hinged plate of arm (12), the other end are in fork shape.
3. according to claim 2 singly take correction robot, it is characterised in that: the other end of the actuator (13) is two
The fork arm that root is parallel to each other is equipped with the sucker for skew substrate (3) described in vacuum suction on every fork arm, in every fork arm
End be equipped with the position sensor (14).
4. according to claim 1 singly take correction robot, it is characterised in that: the lifter slide (9) is " U "-shaped, should
One end of the either end and the large arm (11) of " u "-shaped opening is hinged, is equipped at the inner tank mouths of the " u "-shaped lifter slide (9)
The sensor array (10).
5. according to claim 4 singly take correction robot, it is characterised in that: the bottom edge of lifter slide (9) " u "-shaped
Consistent with the short transverse of lifting column (8), the both ends of " u "-shaped opening are setting up and down, i.e., the " u "-shaped lifter slide (9) deflects
90 ° of settings；The sensor array (10) is mounted at the inner tank mouths of " u "-shaped bottom edge setting, issues laser beam by transmitting terminal,
It is received by receiving end.
6. a kind of according to claim 1 to the method for correcting error for singly taking correction robot described in 5 any claims, feature exists
In: equipped with taking plate station (2) and putting plate station (4), this takes and is placed with crooked base on plate station (2) installation foundation (1)
Plate (3), the long side of the skew substrate (3), short side favour the long side for taking plate station (2) and putting plate station (4), short respectively
Side；The walking slide plate (6) relative movement on walking slide unit (5) length direction is defined as X-axis, lifter slide (9) edge
Lifting column (8) short transverse linear relative movement is defined as Z axis, and the lifting column (8) is relative to walking slide plate (6) around rotation
Axis (7) carries out rotation and is defined as θ axis, and the actuator (13) is driven by large arm (11), forearm (12) perpendicular to θ axis and Z
The space line movement of axis is defined as R axis；The X-axis, Z axis sequential movements drive the actuator (13) face to take plate station
(2), R axis moves, and makes the actuator (13) to taking plate station (2) direction to move；On actuator (13) other end extremely
Position when few two position sensors (14) trigger the difference of crooked substrate (3) side short side, obtains this and takes on plate station (2)
Not parallel angle between crooked substrate (3) side short side and X-axis, and the angle is transmitted to control system；The control system
R axis, θ axis and the linkage of X-axis servo are controlled, the actuator (13) deflection is driven, compensates the angle, makes the crooked substrate
(3) side long side is parallel with R axis；Actuator (13) the vacuum suction skew substrate (3), R axis movement, makes the actuator
(13) and crooked substrate (3) large arm (11), forearm (12) drive under shrink to the direction of lifter slide (9), contraction process
In, the sensor array (10) flutters the long side for catching crooked substrate (3) side by non-contact laser relative to lifter slide (9)
Position, and be transmitted to the control system, which controls X-axis, R axis and θ axis, makes the actuator (13) and skew base
Plate station (4) is put in plate (3) steering, face puts plate station (4), and the crooked substrate (3) is passed through to the coupled motions of R axis and Z axis
It is placed on plate station (4) smooth vertical and horizontally.
7. method for correcting error according to claim 6, it is characterised in that: the other end of the actuator (13) is two mutual
Parallel fork arm, the end of every fork arm are all provided with position sensor (14)；The actuator (13) moves from R axis to taking plate
During station (2) moves, fork arm is parallel with the long side of plate station (2) is taken；Position sensing on a wherein fork arm
When device (14) first triggers crooked substrate (3) side short side position, the actuator (13) under the linkage of R axis, θ axis and X-axis servo,
Center rotating of the actuator (13) relative to crooked substrate (3) around the position sensor first triggered is allowed, until another fork
The upper position sensor (14) of bar also triggers crooked substrate (3) side short side, at this time the fork arm of the actuator (13) and skew
The long side of substrate (3) is parallel, and favours the long side for taking plate station (2)；It is upper that the control system respectively obtains two fork arms
The signal for setting sensor (14) transmitting, obtains taking crooked substrate (3) the side short side on plate station (2) and the injustice between X-axis
Row angle.
8. method for correcting error according to claim 6, it is characterised in that: position of the actuator (13) on two fork arms
After sensor (14) triggers crooked substrate (3) side short side, until the skew substrate (3) is placed on plate work smooth vertical and horizontally
During position (4), remain parallel with the long side of crooked substrate (3).
9. method for correcting error according to claim 6, it is characterised in that: the actuator (13) and crooked substrate (3) are along R axis
Into lifter slide (9) direction contraction process, the sensor array (10), which is flutterred, catches crooked substrate (3) side long side and side is short
The joint on side sets section path along R axial direction lifter slide (9) direction contractile motion in actuator (13) and crooked substrate (3)
Afterwards, then the offset for catching crooked substrate (3) the side long side OQ t slide plate (9) is flutterred；If the sensor array
(10) discrete data is continuously taken, whether the joint of the side long side and side short side that can judge crooked substrate (3) has breakage；Such as
Sensor array described in fruit (10) continuously takes continuous data, can judge whether the side long side of crooked substrate (3) has breakage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711275867.8A CN109877824A (en) | 2017-12-06 | 2017-12-06 | It is a kind of singly to take correction robot and its method for correcting error |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711275867.8A CN109877824A (en) | 2017-12-06 | 2017-12-06 | It is a kind of singly to take correction robot and its method for correcting error |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109877824A true CN109877824A (en) | 2019-06-14 |
Family
ID=66923727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711275867.8A Pending CN109877824A (en) | 2017-12-06 | 2017-12-06 | It is a kind of singly to take correction robot and its method for correcting error |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111826927A (en) * | 2020-06-05 | 2020-10-27 | 利辛县柏斯特纺织科技有限公司 | Gauze is tailor and is used positioner |
| CN112659145A (en) * | 2020-12-15 | 2021-04-16 | 河南科技大学 | PSD-based seedling taking manipulator motion detection device and method |
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| JPH09162257A (en) * | 1995-12-05 | 1997-06-20 | Metsukusu:Kk | Thin-type substrate transfer device |
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| JP2000040735A (en) * | 1998-07-24 | 2000-02-08 | Mecs Corp | Substrate transfer device |
| TW501969B (en) * | 2000-03-23 | 2002-09-11 | Sankyo Seiki Seisakusho Kk | Double-arm robot |
| CN1401461A (en) * | 2001-08-07 | 2003-03-12 | 株式会社三协精机制作所 | Machine hand location method and device |
| CN101318328A (en) * | 2007-06-06 | 2008-12-10 | 株式会社安川电机 | Liquid carrying robot and control method thereof |
| CN103552083A (en) * | 2013-10-30 | 2014-02-05 | 上海华力微电子有限公司 | Method for adjusting position of mechanical arm |
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|---|---|---|---|---|
| JPH09162257A (en) * | 1995-12-05 | 1997-06-20 | Metsukusu:Kk | Thin-type substrate transfer device |
| JPH10335420A (en) * | 1997-06-04 | 1998-12-18 | Mecs:Kk | Work aligning apparatus |
| JP2000040735A (en) * | 1998-07-24 | 2000-02-08 | Mecs Corp | Substrate transfer device |
| TW501969B (en) * | 2000-03-23 | 2002-09-11 | Sankyo Seiki Seisakusho Kk | Double-arm robot |
| CN1401461A (en) * | 2001-08-07 | 2003-03-12 | 株式会社三协精机制作所 | Machine hand location method and device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111826927A (en) * | 2020-06-05 | 2020-10-27 | 利辛县柏斯特纺织科技有限公司 | Gauze is tailor and is used positioner |
| CN112659145A (en) * | 2020-12-15 | 2021-04-16 | 河南科技大学 | PSD-based seedling taking manipulator motion detection device and method |
| CN112659145B (en) * | 2020-12-15 | 2022-09-02 | 河南科技大学 | PSD-based seedling taking manipulator motion detection device and method |
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Application publication date: 20190614 |