CN109813467A - Pressure sensor and preparation method and application thereof - Google Patents
Pressure sensor and preparation method and application thereof Download PDFInfo
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- CN109813467A CN109813467A CN201910227424.4A CN201910227424A CN109813467A CN 109813467 A CN109813467 A CN 109813467A CN 201910227424 A CN201910227424 A CN 201910227424A CN 109813467 A CN109813467 A CN 109813467A
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Abstract
The invention provides a pressure sensor and a preparation method and application thereof. The pressure sensor provided by the invention comprises a dielectric layer, a first electrode layer and a second electrode layer, wherein the first electrode layer and the second electrode layer are respectively positioned on two sides of the dielectric layer, and the dielectric layer comprises ion active substances. The preparation method comprises 1) preparing a dielectric layer comprising an ion active material; 2) preparing a first electrode layer and a second electrode layer; 3) and respectively fixing the first electrode layer and the second electrode layer on two sides of the dielectric layer to obtain the pressure sensor. The sensor provided by the invention has the advantages of flexibility, high transparency and high sensitivity, and can be applied to manufacturing flexible touch sensors or human-computer interaction interfaces and the like.
Description
Technical field
The invention belongs to sensor technical field, it is related to a kind of sensor and its preparation method and application more particularly to one
Kind pressure sensor and its preparation method and application.
Background technique
With the continuous development of science and technology, it is more and more to obtain people for convenient intuitive visualization human-computer interface system
Concern.Wherein, optical clear senser element is vital a part in the system.Capacitive sensor structure is simple, spirit
Sensitivity is high, but in the course of the research it has been found that the high sensitivity and the high grade of transparency of holding capacitor formula senser element are simultaneously
Difficult to realize.Firstly, some common transparent materials, such as glass, tin indium oxide, dimethyl silicone polymer, transparent modeling
Expect that their compression performance such as film is limited, it is poor so as to cause the sensing capability to pressure, directly it is prepared with these materials
The sensitivity of senser element is low, seriously limits its scope of application.Secondly, passing through dielectric layer or electrode layer building in sensor
Micro-structure can effectively improve the sensitivity of device, and this mode easily and effectively, is widely adopted in pressure sensor
With.However, the building of micro-structure can enhance scattering of the device to light, cause high mist degree and low transparency, therefore, this method is simultaneously
The sensor of high transparency is not suitable for making.Based in these the reason of, people's is a kind of simple there is an urgent need to go to seek
Efficient and inexpensive preparation means remove building high transparency, highly sensitive pressure sensor.
CN105776902A discloses a kind of method for preparing two-side transparent sensor, the preparation of the two-side transparent sensor
Method is the difference using optic-solidified adhesive adhesiveness on two sheet glass, divides silver nanowires network easily with glass plate
From to prepare the sensor of two-side transparent.Wherein, which includes glassy layer, transparent silver nanowires electrode layer
And the ultra-thin dielectric layer that optic-solidified adhesive is used as.The invention is by improving on silver nanowires internet startup disk to optic-solidified adhesive resistance to
Mill property, and the resistance of silver nanowires can be debugged arbitrarily, it is simple and convenient.It is sensed however, the invention has been simple consideration
The transparency of device, there is no further authenticate the sensing capabilities of device.And according to the sensing of pressure sensor original
(C ∝ A ε/d, wherein C is capacitance for reason analysis；A is electrode layer effective area；ε is dielectric layer constant；D is upper/lower electrode
Layer distance), the variation of capacitance caused by the variation by the thickness of optic-solidified adhesive is very limited, that is to say, that this pair
The sensitivity of the transparent sensor in face is low, limits its use scope.
CN109247920A discloses a kind of preparation method of highly sensitive pressure sensor, the high sensitivity pressure sensing
Device is provided at least one first electrode, second electrode in the side of the close second electrode tablet of its first electrode tablet
The side of the close first electrode tablet of tablet is provided at least one second electrode corresponding with first electrode, structural slab
On be provided with multiple through-holes.The first electrode and second electrode at one of through-hole both ends form an electrode sensing unit, often
Projection of the first electrode of a electrode sensing unit on second electrode face is overlapped at least part of second electrode.When first
When electrode tablet stress, first electrode tablet can be towards the Direction distortion of through-hole, to reduce first electrode and second
The distance between electrode, and then cause the variation of capacitance.This highly sensitive pressure sensor by the setting of structure, although one
Determine the detection sensitivity that can be improved sensor in degree, and the beat pulse of the vertical vessel directions of radial artery can be measured
Situation.But its optical transparence for having not focused on sensor, the high sensitivity pressure sensor are not appropriate for applying and touch
It touches screen or other needs to carry out in visualization interface device.
CN109341902A discloses a kind of using graphene as pliable pressure sensor of electrode material and preparation method thereof.
Two outer layer thin flexible film layers of the pliable pressure sensor are mixing for graphene microchip of the average radial size higher than 5-10um
Miscellaneous PCL electrospinning film, two electrode layers are leading for the nano-Ag particles containing big radial dimension of graphene microchip and minimum reunion
Electric ink, dielectric layer are that nano fiber electrostatic spinning forms.Although the program makes pressure sensor have flexibility, but it is simultaneously
It is not concerned with the optical transparence of sensor.
Therefore, it is necessary to develop a kind of flexible and transparent, the simple and highly sensitive pressure sensor of structure is wanted with meeting to apply
It asks.
Summary of the invention
Aiming at the above shortcomings existing in the prior art, the purpose of the present invention is to provide a kind of pressure sensor and its systems
Preparation Method and purposes.Pressure sensor provided by the invention has high sensitivity, and can have the characteristic of flexible and transparent.
To achieve this purpose, the present invention adopts the following technical scheme:
In a first aspect, the present invention provides a kind of pressure sensor, the pressure sensor includes dielectric layer and difference position
First electrode layer and the second electrode lay in dielectric layer two sides, the dielectric layer include ionic active.
Under external force, the presence of the ionic active in pressure sensor provided by the invention forms sensor
A kind of electric double layer, so as to greatly improve the sensitivity of sensor, and the presence of ionic active will not influence dielectric
The transparency of tunic, and then the good optical clarity of entire dielectric layer can be kept.
Sensitivity in Pressure Sensors provided by the invention is high, and can be realized flexible and transparent；And preparation process is simple, it is former
Expect low in cost, is conducive to large-scale industrial production；The flexible and transparent high sensitivity pressure sensor can be used for making
Touch screen, intelligent window, man-machine interface etc. have wide application value.
" comprising " of the present invention, it is intended that it can also include other components, these other components exceptionally except described group
Assign cloth different characteristics.In addition to this, " comprising " of the present invention, may be replaced by enclosed " for " or
" by ... form ".
It is used as currently preferred technical solution below, but not as the limitation to technical solution provided by the invention, leads to
Following preferred technical solution is crossed, can preferably reach and realize technical purpose and beneficial effect of the invention.
As currently preferred technical solution, the ionic active includes 1,3- methylimidazole Methylsulfate
In salt, sodium chloride, potassium chloride, 1- ethyl-3-methylimidazole dimethyl phosphate salt, ionic gel or phosphoric acid any one or extremely
Few two kinds of combination, typical but non-limiting combination have: the combination of 1,3- methylimidazole Methylsulfate salt and sodium chloride, 1-
The combination of the combination of ethyl-3-methylimidazole hexafluorophosphate and potassium chloride, ionic gel and phosphoric acid, 1- ethyl -3- methyl miaow
The combination of azoles hexafluorophosphate, sodium chloride and potassium chloride, 1- ethyl-3-methylimidazole hexafluorophosphate, ionic gel and phosphoric acid
Combination, 1,3- methylimidazole Methylsulfate salt, sodium chloride, potassium chloride and combination of phosphoric acid etc., preferably 1- ethyl -3- first
Base limidazolium hexafluorophosphate.
Preferably, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.
Preferably, the membrane material include polyester, polyimides, polylactic acid, polystyrene, polymethyl methacrylate,
In polypropylene, polyethylene, cellulose acetate or nitrocellulose any one or at least two combination, it is typical but unrestricted
The combination of property are as follows: the combination of the combination of polyester and polyimides, polylactic acid and polystyrene, polymethyl methacrylate and poly- third
The combination of the combination of alkene, polyethylene and cellulose acetate, polyester, the combination of polyimides and polylactic acid, polystyrene, poly- methyl
Methyl acrylate and polyacrylic combination, the combination of polyethylene, cellulose acetate and nitrocellulose, polyester, gather polyimides
Lactic acid, polystyrene and combination of polymethyl methacrylate etc., preferably cellulose acetate.
Preferably, the mass ratio of the membrane material and ionic active is 1:1~1:10, such as 1:1,1:2,1:3,1:
4,1:5,1:6,1:7,1:8,1:9 or 1:10 etc., it is not limited to cited numerical value, other are unlisted in the numberical range
Numerical value it is equally applicable.In the present invention, if the mass ratio of ionic active and membrane material is excessive, dielectric layer viscosity will lead to
Greatly, poor mechanical property；If the mass ratio of ionic active and membrane material is too small, it is bad to will lead to sensing capabilities.
As currently preferred technical solution, the first electrode layer and the second electrode lay include substrate and are located at lining
The network-like conductive layer of bottom side.
Preferably, the substrate is transparent substrates.
Preferably, the transparent substrates in the first electrode layer and the second electrode lay independently include polydimethylsiloxanes
Alkane, silicon rubber, polyester, polystyrene, polyethylene, polymethyl methacrylate, polyimides, polypropylene, glass or indium oxide
In tin any one or at least two combination, typical but non-limiting combination has: dimethyl silicone polymer and silicon rubber
Combination, the combination of polyester and polystyrene, the combination of polyethylene and polymethyl methacrylate, polymethyl methacrylate with
The combination of polyimides, the combination of dimethyl silicone polymer, silicon rubber and polyester, the group of polyethylene, polypropylene and polyimides
It closes, silicon rubber, polyester, polymethyl methacrylate, glass and combination of tin indium oxide etc., preferably polyimides.
Preferably, the material of the first electrode layer and the conductive layer in the second electrode lay independently includes golden grid, gold
It is any one in nano wire, silver-colored grid, silver nanowires, copper mesh, copper nano-wire, aluminium net lattice, aluminium nano wire or conducting polymer
Kind or at least two combination, typical but non-limiting combination has: the combination of golden grid and silver nanowires, nanowires of gold and copper
The combination of grid, the combination of silver-colored grid and copper nano-wire, the combination of copper mesh and aluminium nano wire, golden grid, silver-colored grid and aluminium are received
The combination of rice noodles, copper nano-wire, aluminium net lattice, silver-colored net and the combination of conducting polymer etc., preferably silver nanowires.
Preferably, the conductive layer with a thickness of 10~1000nm, such as 10nm, 50nm, 100nm, 250nm, 500nm,
750nm or 1000nm etc., preferably 50~500nm, further preferably 80nm.In the present invention, if the thickness mistake of conductive layer
It is poor to will lead to translucency for thickness；If the thickness of conductive layer is excessively thin, poorly conductive will lead to, influence sensing capabilities.
As currently preferred technical solution, the dielectric layer, first electrode layer and the second electrode lay are flexible saturating
Bright layer.Pressure sensor agent provided by the invention is flexible and transparent pressure sensor under the conditions of this.
Preferably, the dielectric layer with a thickness of dielectric layer with a thickness of 10~1000 μm, such as 10 μm, 50 μm, 100 μ
M, 250 μm, 500 μm, 750 μm or 1000 μm etc., preferably 10~100 μm, further preferably 50 μm.
Preferably, the thickness of the first electrode layer and the second electrode lay independently is 10~200 μm, such as 10 μm, 20 μ
M, 50 μm, 72 μm, 100 μm, 150 μm or 200 μm etc., preferably 50~100 μm, further preferably 100 μm.
Preferably, the dielectric layer is fixed by binder and first electrode layer and the second electrode lay.
Preferably, the binder includes butyl rubber, insatiable hunger polyester resin, adhesive tape, double-sided adhesive, polyurethane rubber
In glue, neoprene and epoxy resin any one or at least two combination, typical but non-limiting combination has: butyl
The combination of the combination of the combination of rubber and insatiable hunger polyester resin, adhesive tape and double-sided adhesive, polyurethane rubber and neoprene, fourth
The combination of base rubber, insatiable hunger polyester resin and adhesive tape, the combination of double-sided adhesive, polyurethane rubber and neoprene, butyl rubber
The combination of glue, insatiable hunger polyester resin, adhesive tape and double-sided adhesive, butyl rubber, insatiable hunger polyester resin, polyurethane rubber, neoprene
Rubber and the combination of epoxy resin etc., preferably epoxy resin.
Second aspect, the present invention provide a kind of preparation method of pressure sensor as described in relation to the first aspect, the method packet
Include following steps:
(1) dielectric layer is prepared, the dielectric layer includes ionic active；
(2) first electrode layer and the second electrode lay are prepared；
(3) step (2) first electrode layer and the second electrode lay are individually fixed in the two of step (1) described dielectric layer
Side obtains the pressure sensor.
Provided by the invention preparation method is simple, and cost of material is low, facilitates large-scale industrial production.
As currently preferred technical solution, step (1) method for preparing dielectric layer includes: by ion activity object
Matter is mixed with membrane material, and compacting film forming obtains the dielectric layer.
Preferably, the mixed method include in stirring, mixing, concussion, grinding or ultrasound any one or at least
Two kinds of combination, typical but non-limiting combination are as follows: the combination of stirring and mixing, the combination of concussion and grinding, stirring, mixing
With the combination of concussion, mixing, concussion, grinding and the combination of ultrasound etc. are preferably stirred.
Preferably, it is described compacting film forming temperature be 0-200 DEG C, such as 10 DEG C, 20 DEG C, 30 DEG C, 40 DEG C, 50 DEG C, 60 DEG C,
70 DEG C, 80 DEG C, 90 DEG C, 100 DEG C, 120 DEG C, 140 DEG C, 160 DEG C or 200 DEG C etc., it is not limited to cited numerical value, the number
It is equally applicable to be worth other unlisted numerical value in range, preferably 20-100 DEG C, further preferred 80 DEG C.
As currently preferred technical solution, the method for step (2) the preparation first electrode layer and the second electrode lay
Include: that the side that the material of conductive layer is coated in substrate is formed into network-like conductive layer, obtains the first electrode layer and the
Two electrode layers.
Preferably, the method for the coating is knifing.
As currently preferred technical solution, the method for step (3) described fixation includes: that dielectric layer is clipped in the first electricity
Among pole layer and the second electrode lay, fixed in the surrounding of contact surface with binder.
As the further preferred technical solution of preparation method of the present invention, the described method comprises the following steps:
(1) ionic active is mixed with membrane material, 20-100 DEG C of compacting film forming obtains dielectric layer；
(2) side that the material of conductive layer is coated in substrate is formed into network-like conductive layer with the method for knifing, obtained
The first electrode layer and the second electrode lay；
(3) step (1) described dielectric layer is clipped among step (2) first electrode layer and the second electrode lay, is being connect
The surrounding of contacting surface is fixed with binder, obtains the pressure sensor.
The third aspect, the present invention provide a kind of purposes of pressure sensor as described in relation to the first aspect, the pressure sensor
For touch sensing device or artificial intelligence human-computer interaction interface.
Pressure sensor provided by the invention not only has high sensitivity, also has fine optical clarity and flexibility,
So that the touch sensing device or human-computer interaction interface that are made by the senser element have very big application space.
Compared with the existing technology, the invention has the following advantages:
(1) in the present invention, electrode layer is made of network-like conductive layer and flexible transparent substrate material, network-like conduction
The presence of layer can increase the transmitance of visible light, so as to greatly improve the transparency of electrode layer, and flexible and transparent
Membrane material can provide the flexibility and the transparency of device as substrate；
(2) in the present invention, evenly dispersed in the dielectric layer of high transparency to have ionic active, under external force,
The presence of ionic species makes sensor form electric double layer, so as to greatly improve the sensitivity of sensor, and ion activity
The presence of substance will not influence the transparency of dielectric layer, and then can be with the optical transparence of retainer member entirety；
(3) low pressure (0-2KPa) sensitivity of flexible and transparent high sensitivity pressure sensor provided by the invention is reachable
1.856KPa-1, high pressure (20-120KPa) sensitivity is up to 0.313KPa-1, transparency can have flexibility up to 82.The present invention
The pressure sensor of offer can be applied to production touch sensing or human-computer interaction interface device etc..
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the pressure sensor that the embodiment of the present invention 1 provides, wherein 1- first electrode layer, 2- are situated between
Electric layer, 3- the second electrode lay；
Fig. 2 is the scanning electron microscope (SEM) photograph for the electrode layer that the embodiment of the present invention 1 provides；
Fig. 3 is the scanning electron microscope (SEM) photograph for the dielectric layer that the embodiment of the present invention 1 provides；
Fig. 4 is the sensitivity test figure for the pressure sensor that the embodiment of the present invention 1 provides；
Fig. 5 is the sensitivity test figure for the pressure sensor that comparative example 1 provides.
Specific embodiment
In order to better illustrate the present invention, it is easy to understand technical solution of the present invention, below further specifically to the present invention
It is bright.But following embodiments is only simple example of the invention, does not represent or limit the scope of the present invention, this
Invention protection scope is subject to claims.
The following are typical but non-limiting embodiments of the invention:
Embodiment 1
The present embodiment is prepared as follows pressure sensor:
(1) cellulose acetate and 1- ethyl-3-methylimidazole hexafluorophosphate that mass ratio is 1:1 are mixed equal
It is even, film forming is dried at 80 DEG C, obtains the dielectric layer of high transparency.
(2) one layer of metal silver nanowires are coated in a side surface of transparent Kapton by the method for knifing,
Obtain transparent electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with epoxy resin, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is silver nanowires.The conductive layer with a thickness of 50nm.The dielectric layer, first electrode layer and the second electrode lay are flexibility
Hyaline layer, the dielectric layer with a thickness of 50 μm, the thickness of the first electrode layer and the second electrode lay is 100 μm.
Fig. 1 is the structural schematic diagram of pressure sensor manufactured in the present embodiment, as shown, pressure manufactured in the present embodiment
Sensor is by dielectric layer 2 and is located at the first electrode layer 1 of dielectric layer two sides and the second electrode lay 3 forms.
Morphology analysis is carried out to the product utilization scanning electron microscope of this implementation.
Fig. 2 is the scanning electron microscope (SEM) photograph of electrode layer provided in this embodiment, and the silver nanowires that can be seen that coating by the figure is in
Network-like structure is distributed in substrate surface, and the diameter about 20nm or so of nano wire, this ultra-fine silver nanoparticle network of fibers
It is small to the scattering power of visible light, effectively increase the transparency of electrode layer.
Fig. 3 is the scanning electron microscope (SEM) photograph of dielectric layer provided in this embodiment, can be seen that load has ionic liquid by the figure
Dielectric layer surface is more flat and smooth, and the structure of this low rough overshoot imparts the high grade of transparency of dielectric layer.
Fig. 4 is the sensitivity test figure of pressure sensor provided in this embodiment, and it is excellent to can be seen that it has by the figure
Sensing capabilities, its sensitivity of low-pressure area be 1.665KPa-1, higher-pressure region 0.222KPa-1。
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 2
The present embodiment is prepared as follows pressure sensor:
(1) polymethyl methacrylate and ionic gel that mass ratio is 1:2 are shaken and is uniformly mixed, is pressed at 80 DEG C
Film obtains the dielectric layer of high transparency.
(2) one layer of metal nanowires of gold is coated in a side surface of transparent polyester film by the method for knifing, obtained
Transparent electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with butyl rubber, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is polymethyl methacrylate, and the ionic active is ionic gel.The membrane material and ion
The mass ratio of active material is 1:2.The first electrode layer and the second electrode lay include transparent substrates and be located at transparent substrates
The network-like conductive layer of side, the transparent substrates are polyester film, and the material of the conductive layer is nanowires of gold.It is described to lead
Electric layer with a thickness of 20nm.The dielectric layer, first electrode layer and the second electrode lay are flexible transparent layer, the dielectric layer
With a thickness of 100 μm, the thickness of the first electrode layer and the second electrode lay is 200 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 3
The present embodiment is prepared as follows pressure sensor:
(1) mass ratio is uniformly mixed for the polylactic acid of 1:3 and 1- ethyl-3-methylimidazole dimethyl phosphate salt mixing,
It forms a film in 150 DEG C of compactings, obtains the dielectric layer of high transparency.
(2) one layer of Nano line of metal copper is coated in a side surface of transparent polyethylene film by the method for knifing, obtained
To transparent electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with adhesive tape, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is polylactic acid, and the ionic active is 1- ethyl-3-methylimidazole dimethyl phosphate salt.It is described
The mass ratio of membrane material and ionic active is 1:3.The first electrode layer and the second electrode lay include transparent substrates and
Network-like conductive layer positioned at transparent substrates side, the transparent substrates are polyethylene film, and the material of the conductive layer is
Copper nano-wire.The conductive layer with a thickness of 200nm.The dielectric layer, first electrode layer and the second electrode lay are flexible saturating
Bright layer, the dielectric layer with a thickness of 500 μm, the thickness of the first electrode layer and the second electrode lay is 50 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 4
The present embodiment is prepared as follows pressure sensor:
(1) mass ratio is uniform for the polystyrene and sodium chloride ground and mixed of 1:5,140 DEG C of compactings film forming obtain high saturating
Bright dielectric layer.
(2) one layer of metallic silver net is coated in a side surface of transparent PDMS membrane by the method for knifing
Lattice obtain transparent electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with polyurethane rubber, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is polystyrene, and the ionic active is sodium chloride.The membrane material and ionic active
Mass ratio is 1:5.The first electrode layer and the second electrode lay include transparent substrates and the network positioned at transparent substrates side
The conductive layer of shape, the transparent substrates are dimethyl silicone polymer, and the material of the conductive layer is silver-colored grid.The conductive layer
With a thickness of 1000nm.The dielectric layer, first electrode layer and the second electrode lay are flexible transparent layer, the thickness of the dielectric layer
It is 100 μm, the thickness of the first electrode layer and the second electrode lay is 80 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 5
The present embodiment is prepared as follows pressure sensor:
(1) mass ratio is uniform for the cellulose acetate and potassium chloride ultrasonic mixing of 1:1,80 DEG C of compactings film forming obtain height
Transparent dielectric layer.
(2) one layer of metal copper mesh is coated in a side surface of transparent polyethylene film by way of knifing, obtained
Transparent electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with neoprene, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is potassium chloride.The membrane material and ionic active
Mass ratio be 1:1.The first electrode layer and the second electrode lay include transparent substrates and the net positioned at transparent substrates side
The conductive layer of network shape, the transparent substrates are polyethylene film, and the material of the conductive layer is copper mesh.The thickness of the conductive layer
Degree is 200nm.The dielectric layer, first electrode layer and the second electrode lay are flexible transparent layer, the dielectric layer with a thickness of
300 μm, the thickness of the first electrode layer and the second electrode lay is 150 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 6
The present embodiment is prepared as follows pressure sensor:
(1) mass ratio is uniformly mixed for the polypropylene of 1:8 and phosphoric acid mixing, rear 175 DEG C of compactings film forming obtains high transparency
Dielectric layer.
(2) one layer of aluminium nano wire is coated in a side surface of transparent silicone rubber film by way of knifing, obtained transparent
Electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with double-sided adhesive, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is polypropylene, and the ionic active is phosphate.The matter of the membrane material and ionic active
Amount is than being 1:1.The first electrode layer and the second electrode lay include transparent substrates and positioned at the network-like of transparent substrates side
Conductive layer, the transparent substrates are silicone rubber membrane, and the material of the conductive layer is aluminium nano wire.The conductive layer with a thickness of
500nm.The dielectric layer, first electrode layer and the second electrode lay are flexible transparent layer, the dielectric layer with a thickness of 500 μ
The thickness of m, the first electrode layer and the second electrode lay is 80 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 7
The present embodiment is prepared as follows pressure sensor:
(1) polyester and 1 for being 1:1 by mass ratio, 3- methylimidazole Methylsulfate salt are uniformly mixed, 250 DEG C of pressures
Film is made, obtains the dielectric layer of high transparency.
(2) one layer of silver-colored grid is coated in a side surface of transparent glass by way of knifing, obtains transparent electrode
Layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with epoxy resin, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is polyester, and the ionic active is 1,3- methylimidazole Methylsulfate salt.The membrane material with
The mass ratio of ionic active is 1:1.The first electrode layer and the second electrode lay include transparent substrates and are located at transparent
The network-like conductive layer of one side of substrate, the transparent substrates are glass, and the material of the conductive layer is silver-colored grid.The conduction
Layer with a thickness of 80nm.The dielectric layer with a thickness of 500 μm, the thickness of the first electrode layer and the second electrode lay is 50
μm。
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 8
The present embodiment is prepared as follows pressure sensor:
(1) nitrocellulose and 1- ethyl-3-methylimidazole hexafluorophosphate that mass ratio is 1:3 are shaken into mixing
Even, 250 DEG C of compacting film forming obtain the dielectric layer of high transparency.
(2) one layer of copper mesh is coated in a side surface of transparent polymethyl methacrylate film by way of knifing
Lattice obtain transparent electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with butyl rubber, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is nitrocellulose, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating membrane material and ionic active is 1:3.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are polymethyl methacrylate film, described to lead
The material of electric layer is copper mesh.The conductive layer with a thickness of 10nm.The dielectric layer, first electrode layer and the second electrode lay are equal
For flexible transparent layer, the dielectric layer with a thickness of 10 μm, the thickness of the first electrode layer and the second electrode lay is 10 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 9
The present embodiment is prepared as follows pressure sensor:
(1) mass ratio is uniformly mixed for the polypropylene of 1:1 and 1- ethyl-3-methylimidazole hexafluorophosphate mixing, 180
DEG C compacting film forming, obtain the dielectric layer of high transparency.
(2) one layer of aluminium net lattice are coated in a side surface of transparent indium tin oxide films by way of knifing, obtained
Bright electrode layer.
(3) the obtained transparent dielectric layer of step 1 is clipped among two obtained transparent electrode layers of step 2, surrounding
It is fixed with epoxy resin, obtains flexible and transparent high sensitivity pressure sensor.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is polypropylene, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.The film
The mass ratio of material and ionic active is 1:1.The first electrode layer and the second electrode lay include transparent substrates and position
Network-like conductive layer in transparent substrates side, the transparent substrates are indium oxide tin film, and the material of the conductive layer is aluminium
Grid.The conductive layer with a thickness of 80nm.The dielectric layer with a thickness of 1000 μm, the first electrode layer and second electrode
The thickness of layer is 80 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 10
Difference with embodiment 1 is only that, in the present embodiment, cellulose acetate film is replaced with polystyrene film.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is polystyrene film, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is silver nanowires.The conductive layer with a thickness of 50nm.The dielectric layer, first electrode layer and the second electrode lay are flexibility
Hyaline layer, the dielectric layer with a thickness of 50 μm, the thickness of the first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 11
Difference with embodiment 1 is only that in the present embodiment, will have silver nanowire film to replace with copper nano-wire film.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is copper nano-wire.The conductive layer with a thickness of 50nm.The dielectric layer, first electrode layer and the second electrode lay are flexibility
Hyaline layer, the dielectric layer with a thickness of 50 μm, the thickness of the first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 12
Difference with embodiment 1 is only that, in the present embodiment, will replace with fine and close gold with netted silver nanowire film
Belong to silverskin.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is compact metal silverskin.The dielectric layer is flexible transparent layer.The conductive layer with a thickness of 50nm.The thickness of the dielectric layer
Degree is 50 μm, and the thickness of the first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 13
Difference with embodiment 1 is only that in the present embodiment, will have polyimide film to replace with glass.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are glass, and the material of the conductive layer is received for silver
Rice noodles.The conductive layer with a thickness of 50nm.The dielectric layer is flexible transparent layer, the dielectric layer with a thickness of 50 μm, institute
The thickness for stating first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 14
Difference with embodiment 1 is only that, in the present embodiment, cellulose acetate and 1- in (1) the step of preparation method
The mass ratio of ethyl-3-methylimidazole hexafluorophosphoric acid is 1:10, and by cellulose acetate and 1- ethyl-3-methylimidazole hexafluoro phosphorus
After hydrochlorate is mixed evenly, 100 DEG C of compacting film forming.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:10.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is silver nanowires.The conductive layer with a thickness of 50nm.The dielectric layer, first electrode layer and the second electrode lay are flexibility
Hyaline layer, the dielectric layer with a thickness of 50 μm, the thickness of the first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 15
Difference with embodiment 1 is only that, in the present embodiment, the step of preparation method in (1) by cellulose acetate and
After 1- ethyl-3-methylimidazole hexafluorophosphate is mixed evenly, 200 DEG C of compacting film forming.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is silver nanowires.The conductive layer with a thickness of 50nm.The dielectric layer, first electrode layer and the second electrode lay are flexibility
Hyaline layer, the dielectric layer with a thickness of 50 μm, the thickness of the first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 16
Difference with embodiment 1 is only that, in the present embodiment, the step of preparation method in (1) by cellulose acetate and
After 1- ethyl-3-methylimidazole hexafluorophosphate is mixed evenly, 0 DEG C of compacting film forming.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is silver nanowires.The conductive layer with a thickness of 50nm.The dielectric layer, first electrode layer and the second electrode lay are flexibility
Hyaline layer, the dielectric layer with a thickness of 50 μm, the thickness of the first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Embodiment 17
Difference with embodiment 1 is only that, in the present embodiment, the step of preparation method in (1) by cellulose acetate and
After 1- ethyl-3-methylimidazole hexafluorophosphate is mixed evenly, 20 DEG C of compacting film forming.
Pressure sensor manufactured in the present embodiment by dielectric layer and be located at dielectric layer two sides first electrode layer and
The second electrode lay composition, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material
In material.The membrane material is cellulose acetate, and the ionic active is 1- ethyl-3-methylimidazole hexafluorophosphate.Institute
The mass ratio for stating ionic active and membrane material is 1:1.The first electrode layer and the second electrode lay include transparent substrates
With the network-like conductive layer for being located at transparent substrates side, the transparent substrates are Kapton, the material of the conductive layer
Material is silver nanowires.The conductive layer with a thickness of 50nm.The dielectric layer, first electrode layer and the second electrode lay are flexibility
Hyaline layer, the dielectric layer with a thickness of 50 μm, the thickness of the first electrode layer and the second electrode lay is 100 μm.
The performance test results of pressure sensor manufactured in the present embodiment are shown in Table 1.
Comparative example 1
Difference with embodiment 1 is only that, in this comparative example, 1- ethyl-3-methylimidazole six is not contained in dielectric layer
Fluorophosphate.
The performance test results of the pressure sensor of this comparative example preparation are shown in Table 1.
Fig. 5 is the sensitivity test figure for the pressure sensor that this comparative example provides, it can be seen from this figure that not loading 1-
The sensor of ethyl-3-methylimidazole hexafluorophosphate is 0.471KPa in the sensitivity of low-pressure area-1, the sensitivity of higher-pressure region is
0.00261KPa-1.By Fig. 5 and Fig. 4 comparison as can be seen that after supported ionic active material, transducer sensitivity is substantially increased.
Test method
(1) transparency is tested: institute's embodiment and comparative example are tested using ultraviolet-uisible spectrophotometer,
Select in test curve transparency of the value as institute's sample at 550nm point.
(2) flexible test: pinching the both ends of institute's sample with hand, applies two opposite power, sees whether sample can be turned round
Turn.
(3) sensitivity test: certain pressure is applied to sample by tension tester, and using capacitance measuring tester to sample
The capacitance variation of product carries out real-time monitoring, and test frequency is set as 1 × 105Then Hz calculates the sensitivity of sample.
Test result see the table below
Table 1
Based on the above embodiments with comparative example it is found that pressure sensor provided by the invention sensitivity with higher, and
And flexible and transparent preferably may be implemented by raw material, load prepared by the present invention has the dielectric layer of ionic liquid can be effective
The sensitivity of sensor is improved, and whole transparency can not be influenced, flexible transparent film can increase as electrode layer substrate
Add the flexibility of sensor and keeps transparency.Embodiment 7 causes pressure sensor not have soft because glass is rigid material
Property.Embodiment 9 causes pressure sensor not have flexibility because tin indium oxide brittleness is strong.Material of the embodiment 12 because of conductive layer
Material is chosen poor, thus pressure sensor is caused not have the transparency.Embodiment 13 because transparent substrates do not have flexibility,
Therefore pressure sensor is caused also not have flexibility.Comparative example 1 causes pressure to pass because without using ionic active
Sensor sensitivity is very poor.
The Applicant declares that the present invention is explained by the above embodiments detailed process equipment and process flow of the invention,
But the present invention is not limited to the above detailed process equipment and process flow, that is, it is above-mentioned detailed not mean that the present invention must rely on
Process equipment and process flow could be implemented.It should be clear to those skilled in the art, any improvement in the present invention,
Addition, selection of concrete mode of equivalence replacement and auxiliary element to each raw material of product of the present invention etc., all fall within of the invention
Within protection scope and the open scope.
Claims (10)
1. a kind of pressure sensor, which is characterized in that the pressure sensor includes dielectric layer and is located at dielectric layer two
The first electrode layer and the second electrode lay of side, the dielectric layer include ionic active.
2. pressure sensor according to claim 1, which is characterized in that the ionic active includes 1,3- dimethyl
Times of imidazoles Methylsulfate salt, sodium chloride, potassium chloride, 1- ethyl-3-methylimidazole dimethyl phosphate salt, ionic gel or phosphoric acid
It anticipates a kind of or at least two combinations, preferably 1- ethyl-3-methylimidazole hexafluorophosphate；
Preferably, the dielectric layer includes ionic active and membrane material, and the ionic active is distributed in membrane material；
Preferably, the membrane material includes polyester, polyimides, polylactic acid, polystyrene, polymethyl methacrylate, poly- third
In alkene, polyethylene, cellulose acetate or nitrocellulose any one or at least two combination, preferably acetate fiber
Element；
Preferably, the mass ratio of the membrane material and ionic active is 1:1~1:10.
3. pressure sensor according to claim 1 or claim 2, which is characterized in that the first electrode layer and the second electrode lay are equal
Including substrate and positioned at the network-like conductive layer of one side of substrate；
Preferably, the substrate is transparent substrates；
Preferably, the transparent substrates in the first electrode layer and the second electrode lay independently include dimethyl silicone polymer, silicon
In rubber, polyester, polystyrene, polyethylene, polymethyl methacrylate, polyimides, polypropylene, glass or tin indium oxide
Any one or at least two combination, preferably polyimides；
Preferably, the material of the first electrode layer and the conductive layer in the second electrode lay independently includes golden grid, gold nano
In line, silver-colored grid, silver nanowires, copper mesh, copper nano-wire, aluminium net lattice, aluminium nano wire or conducting polymer any one or
At least two combination, preferably silver nanowires；
Preferably, the conductive layer with a thickness of 10~1000nm, preferably 50~500nm, further preferably 80nm.
4. any one of -3 pressure sensor according to claim 1, which is characterized in that the dielectric layer, first electrode layer and
The second electrode lay is flexible transparent layer；
Preferably, the dielectric layer with a thickness of 10~1000 μm, preferably 10~100 μm, further preferably 50 μm；
Preferably, the thickness of the first electrode layer and the second electrode lay independently is 10~200 μm, preferably 50~100 μm,
Further preferably 100 μm；
Preferably, the dielectric layer is fixed by binder and first electrode layer and the second electrode lay；
Preferably, the binder includes butyl rubber, insatiable hunger polyester resin, adhesive tape, double-sided adhesive, polyurethane rubber, chlorine
In buna and epoxy resin any one or at least two combination, preferably epoxy resin.
5. a kind of preparation method of pressure sensor as described in claim 1, which is characterized in that the method includes following steps
It is rapid:
(1) dielectric layer is prepared, the dielectric layer includes ionic active；
(2) first electrode layer and the second electrode lay are prepared；
(3) step (2) first electrode layer and the second electrode lay are individually fixed in the two sides of step (1) dielectric layer,
Obtain the pressure sensor.
6. preparation method according to claim 5, which is characterized in that step (1) method for preparing dielectric layer includes:
Ionic active is mixed with membrane material, compacting film forming obtains the dielectric layer；
Preferably, the mixed method includes any one in stirring, mixing, concussion, grinding or ultrasound or at least two
Combination, preferably stir；
Preferably, the temperature of the compacting film forming is 0-200 DEG C, preferably 20-100 DEG C, further preferred 80 DEG C.
7. preparation method according to claim 5 or 6, which is characterized in that step (2) the preparation first electrode layer and
The method of two electrode layers includes: that the side that the material of conductive layer is coated in substrate is formed network-like conductive layer, is obtained described
First electrode layer and the second electrode lay；
Preferably, the method for the coating is knifing.
8. according to the described in any item preparation methods of claim 5-7, which is characterized in that the method packet of step (3) described fixation
It includes: dielectric layer is clipped among first electrode layer and the second electrode lay, fixed in the surrounding of contact surface with binder.
9. according to the described in any item preparation methods of claim 5-8, which is characterized in that the described method comprises the following steps:
(1) ionic active is mixed with membrane material, 20-100 DEG C of compacting film forming obtains dielectric layer；
(2) side that the material of conductive layer is coated in substrate is formed into network-like conductive layer with the method for knifing, obtained described
First electrode layer and the second electrode lay；
(3) step (1) described dielectric layer is clipped among step (2) first electrode layer and the second electrode lay, in contact surface
Surrounding fixed with binder, obtain the pressure sensor.
10. a kind of purposes of pressure sensor as described in claim 1, which is characterized in that the pressure sensor is for touching
Senser element or artificial intelligence human-computer interaction interface.
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