CN109799013A - A kind of pressure resistance type flexible sensor and preparation method thereof - Google Patents
A kind of pressure resistance type flexible sensor and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a kind of pressure resistance type flexible sensors and preparation method thereof, belong to pliable pressure sensor field.The flexible sensor, flexible PDMS stickiness substrate upper layer, compliant conductive fabric, gold electrode, flexible polyimide film and flexibility PDMS stickiness substrate bottom including the setting of successively stratification.The basal layer is obtained by forming a film after PDMS spin coating solidification；The conductive fabric is Conductive woven object, and being is warp thread by silver-plated electroconductive nylon long filament, and polyester filament is that weft yarn is knitted；The gold electrode forms flexible interdigital gold electrode by being deposited on flexible polyimide film；Gold electrode both ends respectively connect a conducting wire.The significant increase of the present invention sensitivity of pressure resistance type flexible sensor expands monitoring range, improves monitoring Repeatability.
Description
Technical field
The present invention relates to a kind of pressure resistance type flexible sensors and preparation method thereof, belong to pliable pressure sensor field.
Background technique
With wearable and man-made electronic's skin development, flexibility pressure sensor is because it is in man-machine interface, biology doctor
School superintendent's control and potential application in the fields such as motion detection and widely paid close attention to.It is highly sensitive for practical application
The characteristics of be that pressure sensor is in demand, especially in lower range pressure, for detect small activity (as contacted, the heart
Jump, breathing) caused by delicate pressure, additionally need sensor that there are the spies such as transparent, flexible, pinpoint accuracy, high duplication
Point, to meet irregular skin surface.
So far, the research of many reports all concentrates on soft highly sensitive pressure sensor, these sensors
By utilizing capacitive character, piezoelectricity, frictional electricity and pressure drag sensor mechanism.In these various sensor types, pressure drag type pressure
The working principle of sensor is, the piezoresistance sensor being made of substrate and conductive material is by the pressure signal or mechanical force of application
Signal is converted into current signal or resistance signal, and electric signal can change with the variation of pressure signal.Since it is simple
Induction mechanism, simplicity and the low power consuming of weaving process and be widely studied.It is mostly be covering on a flexible substrate or
It is embedded in conductive material, obtains the piezoresistive transducer of multilayered structure.Conductive material can be the nanometers material such as graphene, carbon nanotube
Material, is also possible to metal or metallization material.
Existing flexible base material has imperial scale and shell (Dragon Skin), dimethyl silicone polymer (PDMS), natural rubber
Deng the obtained flexible sensor of the conductive materials such as insertion or graphene coated, carbon nanotube, metal nanoparticle, wire.But
The disadvantages of sensors with auxiliary electrode is generally existing flexible insufficient, sensing range is small and sensitivity is not high, causes to dress constant, signal acquisition
Inaccuracy etc. limits its development and application.Therefore, it is necessary to a kind of highly sensitive, accuracy, and preparation process is simply flexible
Piezoresistive transducer.
Summary of the invention
It is an object of the present invention to overcome the shortcomings of above-mentioned technology, a kind of flexible piezoresistive transducer and its preparation side are provided
Method uses compliant conductive fabric as conductive material, it is intended to improve the property such as flexible sensor sensitivity, accuracy and detection range
Can, solve the problems, such as that cost of manufacture is very high.
The present invention provides a kind of pressure resistance type flexible sensors, comprising: the flexible substrates that PDMS film is formed are arranged in institute
The interdigital electrode in flexible substrates is stated, the conductive textile layer positioned at the interdigital electrode upper layer, positioned at conductive fabric upper layer
Substrate on PDMS film；And the conducting wire for being used to conduct inductive reactance being connected with the interdigital electrode layer.
In one embodiment of the invention, the conductive fabric is using silver-plated electroconductive nylon long filament as warp thread, with terylene
Long filament is weft yarn.
The silver-plated electroconductive nylon filament fineness is 80~100D/36F, and polyester filament fineness is 50~70D/24F.
The silver-plated electroconductive nylon filament fineness is 100D/36F, and polyester filament fineness is 70D/24F.
In one embodiment of the invention, the PDMS prepolymer by sold in the market base gel and curing agent with
The mass ratio of 8~10:1 is mixed with.
In one embodiment of the invention, the PDMS prepolymer is 184 silicon rubber of Dow corning SYLGARD
Host agent A and curing agent B are mixed with the mass ratio of 10:1.
In one embodiment of the invention, the PDMS film with a thickness of 0.8mm-1mm.
In one embodiment of the invention, the conductive fabric institutional framework is plain weave, Fang Ping 2 × 2, Fang Ping 3 × 3
Or one kind of satin weave 4/1.
In one embodiment of the invention, the density of the conductive fabric are as follows: 60~80/inch of weft yarn, warp thread 80
~120/inch.
In one embodiment of the invention, the institutional framework refers to the density (/inch) of structure, specific to wrap
It includes:
(1) plain cloth, through close 100, filling density is respectively 60,70,80；
(2) flat 2 × 2 fabrics in side, through close 100, filling density is respectively 60,70,80；
(3) flat 3 × 3 fabrics in side, through close 100, filling density is respectively 60,70,80；
(4) 4/1 fabric of satin weave, through close 100, filling density is respectively 60,70,80.
In one embodiment of the invention, the interdigital electrode is business polarizing electrode, and gold electrode is in 2.3 microns of thickness
Polyimides (supporting course) on carry out lithographic patterning；Spacing between adjacent fingers is 0.5mm, interdigital electrode
Width is 0.2mm, and gold electrode size is 15 × 10mm.
In one embodiment of the invention, the pattern of the lithographic patterning is comb finger-type and/or circular pattern.
In one embodiment of the invention, the conducting wire is copper wire, and the conducting wire passes through soldering and gold electrode
Both ends connection.
A second object of the present invention is to provide a kind of method for preparing the pressure resistance type flexible sensor, including it is as follows
Step:
(1) PDMS solution is prepared, by by base gel and curing agent (184 siloxanes bullet of Dow corning SYLGARD
Property body) the mixed liquid agitation of culture dish is placed in 5~7 minutes with the mass ratio of 8~10:1 after be put into vacuum oven,
Deaerated under vacuum 5~10 minutes of 10~20mm mercury column obtain PDMS solution；
(2) the PDMS solution in step (1) is spun on glass slide, it, will after solidifying 5 hours under conditions of 40 DEG C
PDMS film is removed from glass slide, is obtained by the PDMS film of viscosity, with a thickness of 0.8mm-1mm；
(3) prepare conductive fabric: using specification for 100D/36F conductive silver coated nylon long filament as warp thread, be 70D/ with specification
The polyester filament of 24F is weft yarn, is drawn a design by small model machine, controls the institutional framework and density of fabric；
(4) copper conductor is connect by tin-soldering method with interdigital gold electrode both ends；
(5) encapsulate: by with conducting wire interdigital gold electrode (lower layer be flexible polyimide film, upper layer is gold electrode) and
Conductive fabric is encapsulated in the identical PDMS film of two panels size, obtains flexible piezoresistive transducer.
The utility model has the advantages that the present invention provides a kind of pressure resistance type flexible sensors and preparation method thereof, by compliant conductive fabric
As conductive material, the Piezoresistance behavior of sensor is derived from " pressure " (increased contact point area) and " putting " (reduced contact point face
Product) during between conductive fabric and interdigital electrode contact point area variation, therefore size can do it is very small (length and
Width is smaller than 1cm), thickness is less than 1.80mm, solves the miniaturization difficult of the prior art, and low manufacture cost.With it is existing
There is technology to compare, sensitivity, accuracy and biggish monitoring range with higher such as can be used for pressing, be bent at the monitoring of power.
Monitoring range is 0-20kPa, and compression-sensitive degree is up to 0.264kPa-1, there is splendid repeatability, data are quasi- after compression 1000 times
Really.Due to its miniaturization, it can be used for the monitoring of the physiological signals such as human finger pressing, bending and breathing, can be used for preparing prison
Survey the fields such as wearable device and the intelligent robot of human health.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the flexible piezoresistive transducer of the present invention；
Fig. 2 is polyester filament (a) of the present invention and conductive silver coated nylon long filament (b) micro-structure diagram；
Fig. 3 conductive fabric pictorial diagram of the present invention；Wherein, (a) plain weave (b), Fang Ping 2 × 2 (c), Fang Ping 3 × 3, (d) satin weave
4/1；Wherein, S+P indicates that warp thread is silver coated nylon silk, and weft yarn is polyester filament；60,70.80 indicate filling density；The size of scale is
1mm；
Fig. 4 is that the present invention is based on stress-resistance plots of the flexible sensor of different fabrics；Wherein, (a) plain weave (b),
Flat 2 × 2 (c), the Fang Ping 3 × 3 in side, (d) satin weave 4/1；
Fig. 5 is pressure resistance type flexible sensor compression resistance of the invention than curve graph (by taking plain weave 100 × 60 as an example)；
Pressure resistance type flexible sensor Fig. 6 of the invention compresses 1000 front and back resistance ratio curve graphs
Example).
Specific embodiment
Embodiment 1:
The present invention provides the preparation method of the flexible piezoresistive transducer, comprising the following steps:
As shown in Figure 1, the structure of pressure resistance type flexible sensor of the invention successively includes PDMS film, conduction from up to down
Fabric, interdigital gold electrode and PDMS film；Conducting wire is set on the interdigital gold electrode.
The preparation process of the pressure resistance type flexible sensor is specific as follows:
(1) preparation of conductive fabric: using specification for 100D/36F conductive silver coated nylon long filament as warp thread, be with specification
The polyester filament of 70D/24F is weft yarn, is drawn a design by small model machine, controls the institutional framework and density of fabric；In the present embodiment,
The institutional framework and density for controlling fabric are plain weave 100 × 60；
(2) PDMS film preparation: by base gel and curing agent (184 silicone elastomer of Dow corning SYLGARD) with
The mixed liquid agitation of the mass ratio of 10:1 after five minutes, deaerates 5~10 minutes under the vacuum environment of 10~20mm mercury column
To PDMS solution；PDMS solution is spun on glass slide, after solidifying 5 hours under conditions of 40 DEG C, by PDMS film from carry glass
On piece removing, obtains by the PDMS film of viscosity, with a thickness of 0.8mm-1mm；
(3) copper conductor is connect by tin-soldering method with interdigital gold electrode both ends；
(4) it encapsulates: by the interdigital gold electrode (gold electrode being arranged on flexible polyimide film) with conducting wire and leading
Electric fabric seal obtains flexible piezoresistive transducer in the identical PDMS film of two panels size.
Embodiment 2:
Fabric is prepared according to the structural parameters of table 1 respectively, then the fabric of preparation is encapsulated into flexibility in the way of embodiment 1
Piezoresistive transducer.
The structural parameters of 1 conductive fabric of table
It is well known that textile design and intertexture density determine the density in the crosspoint of per unit area.In warp thread and latitude
Under the identical intertexture density of yarn, compared with the gentle satin fabric in side, plain cloth is relatively closer.From fig. 4, it can be seen that with side
Flat 2 × 2 fabrics, 3 × 3 fabric of Fang Ping are compared with 4/1 fabric of satin face, and tabby stress-sensitivity is opposed flattened.Reason
It is the structure of tabby relative close, thickness is slowly varying during compression.2 × 2 fabrics flat for side, Fang Ping 3 × 3
4/1 fabric of fabric and satin face, resistance ratio (R/R0) hardly change after stress is more than 1kPa, this shows that plain cloth is soft
The Suitable conductive fabric of property sensor.Fig. 4 shows, R/R of four kinds of fabrics under the stress lower than 1kPa0It is worth linear with stress
Relationship shows the decline of almost straight line from image, shows their high sensitivity to slight compression.
Using triumph digital multimeter (VC890C+) and manual cupping machine (ALJ-50HB) respectively to flexibility obtained
The characteristic parameter of sensor, for example, flexible sensing system sensitivity and repeatability tested.During the test, it will pass
The two poles of the earth of sensing system are connected to the resistance test end of multimeter, and sensor is placed on two compact disk (sample testing area 1cm2)
Between carry out compression verification, and the corresponding value of record respectively.
As a result as shown in Fig. 5~6.In the range of 0~3KPa of stress, sensitivity 0.264KPa- 1, as stress increases
Add, sensitivity decrease (Fig. 5).Compression verification repeats 1000 times, changes almost before the change in resistance and compression after thousand second compressions
Unanimously, there is repeatability and stability well.
Comparative example 1:
With embodiment 1, difference is specific embodiment, and the fabric of silver coated nylon silk and terylene is replaced with looped fabric.It is right
The piezoresistive transducer performance prepared is measured, the results show that knitted fabric shows unstable ring pilotaxitic texture, and
And it is upwardly-deformed to be easy to the side in whole thickness and plane.It is being passed in addition, the performance for crimping and being easily isolated certainly assigns knitted fabric
Difficulty in sensor manufacture.Moreover, coil is easy to shift after high external compressive force.These factors are all to based on knitting
Repeatability and the hysteresis quality tool of the flexible sensor of object have a significant impact.
Although the present invention has been described by way of example and in terms of the preferred embodiments, it is not intended to limit the invention, any to be familiar with this skill
The people of art can do various change and modification, therefore protection model of the invention without departing from the spirit and scope of the present invention
Enclosing subject to the definition of the claims.
Claims (10)
1. a kind of pressure resistance type flexible sensor characterized by comprising the flexible substrates that PDMS film is formed are arranged described
Interdigital electrode in flexible substrates, the conductive textile layer positioned at the interdigital electrode upper layer, the PDMS positioned at conductive fabric upper layer
Substrate on film；Conducting wire is set on the interdigital gold electrode；The conductive fabric is using silver-plated electroconductive nylon long filament as warp thread, to wash
Synthetic fibre long filament is weft yarn.
2. pressure resistance type flexible sensor according to claim 1, which is characterized in that the silver-plated electroconductive nylon filament fineness
For 80~100D/36F, polyester filament fineness is 50~70D/24F.
3. pressure resistance type flexible sensor according to claim 1, which is characterized in that the PDMS prepolymer is basic gel
It is mixed with curing agent with the mass ratio of 8~10:1.
4. pressure resistance type flexible sensor according to claim 1 or 3, which is characterized in that the thickness of the PDMS film
For 0.8mm-1mm.
5. pressure resistance type flexible sensor according to claim 1, which is characterized in that the density of the conductive fabric are as follows: latitude
60~80/inch of yarn, 80~120/inch of warp thread.
6. pressure resistance type flexible sensor according to claim 1 or 5, which is characterized in that the conductive fabric institutional framework
For one kind of plain weave, Fang Ping 2 × 2, Fang Ping 3 × 3 or satin weave 4/1.
7. pressure resistance type flexible sensor according to claim 1, which is characterized in that the interdigital electrode has carried out photoetching figure
Case；The pattern of the lithographic patterning is comb finger-type and/or circular pattern.
8. a kind of method for preparing any pressure resistance type flexible sensor of claim 1~7, which is characterized in that including as follows
Step:
(1) PDMS solution is prepared, it is mixed by the way that base gel and curing agent are placed in culture dish with the mass ratio of 8~10:1
Liquid agitation is put into vacuum oven after 5~7 minutes, and deaerated under vacuum 5~10 minutes in 10~20mm mercury column obtain
PDMS solution；
(2) the PDMS solution in step (1) is spun on glass slide, after solidifying 4~6 hours under conditions of 35~40 DEG C,
PDMS film is removed from glass slide, is obtained by the PDMS film of viscosity, with a thickness of 0.8mm-1mm；
(3) it prepares conductive fabric: using conductive silver coated nylon long filament as warp thread, preparing conductive fabric by weft yarn of polyester filament；
(4) copper conductor is connect by tin-soldering method with interdigital gold electrode both ends；
(5) it encapsulates: the interdigital gold electrode for having conducting wire and conductive fabric being encapsulated in the identical PDMS film of two panels size, obtained
To flexible piezoresistive transducer.
9. according to the method described in claim 8, it is characterized in that, the silver-plated electroconductive nylon filament fineness is 80~100D/
36F, polyester filament fineness are 50~70D/24F.
10. any pressure resistance type flexible sensor of claim 1~7 is in intelligent clothing, robot, medical treatment, military field
The application of context of detection.
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Cited By (21)
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| CN110440961A (en) * | 2019-08-16 | 2019-11-12 | 苏州亨允晟机电科技有限公司 | A kind of wearable piezoresistive transducer system |
| CN110608825A (en) * | 2019-09-12 | 2019-12-24 | 复旦大学 | Flexible pressure sensor based on polyimide substrate microstructure and its preparation method |
| CN110823423A (en) * | 2019-11-22 | 2020-02-21 | 中国科学院理化技术研究所 | A liquid metal flexible pressure sensor and preparation method thereof |
| CN110926661A (en) * | 2019-11-21 | 2020-03-27 | 东华大学 | A flexible fabric pressure and strain composite sensor |
| CN111024279A (en) * | 2019-12-30 | 2020-04-17 | 浙江清华柔性电子技术研究院 | Pressure sensor unit and pressure sensor |
| CN111103075A (en) * | 2019-12-12 | 2020-05-05 | 南京理工大学 | Flexible piezoresistive pressure sensor with adjustable measuring range and sensitivity |
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| CN114486009A (en) * | 2020-11-11 | 2022-05-13 | 北京梦之墨科技有限公司 | Piezoresistive flexible sensor and manufacturing method thereof |
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