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CN109739010B - A self-cleaning off-axis three-mirror device - Google Patents

A self-cleaning off-axis three-mirror device Download PDF

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CN109739010B
CN109739010B CN201811488480.5A CN201811488480A CN109739010B CN 109739010 B CN109739010 B CN 109739010B CN 201811488480 A CN201811488480 A CN 201811488480A CN 109739010 B CN109739010 B CN 109739010B
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mirror
assembly
cleaning
cavity
frame
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CN109739010A (en
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李安虎
邓兆军
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Tongji University
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Abstract

本发明涉及一种自清洁离轴三反射镜装置,包括第一反射镜组件、第二反射镜组件和第三反射镜组件,还包括探测器组件、超声波清洁组件、机械臂组件和框架,框架中设有空腔,第一反射镜组件和第三反射镜组件设在空腔中的底部,第二反射镜组件设在空腔中的顶部,探测器组件设在框架的顶部并穿过框架伸入空腔中,机械臂组件和超声波清洁组件均设在空腔的内壁上;超声波清洁组件包括清洁室,清洁室中设有超声波发生器和换能器;机械臂组件包括反射镜装卸器件和控制反射镜装卸器的工业机器人。与现有技术相比,本发明通过末端带有吸盘的工业机器人可实现反射镜的自动装卸,并放置于超声波清洁组件,从而实现对反射镜的自动清洁。

Figure 201811488480

The invention relates to a self-cleaning off-axis three-mirror device, comprising a first mirror assembly, a second mirror assembly and a third mirror assembly, as well as a detector assembly, an ultrasonic cleaning assembly, a mechanical arm assembly and a frame, the frame There is a cavity in the cavity, the first reflector assembly and the third reflector assembly are located at the bottom of the cavity, the second reflector assembly is located at the top of the cavity, and the detector assembly is located at the top of the frame and passes through the frame Extending into the cavity, the robotic arm assembly and the ultrasonic cleaning assembly are both arranged on the inner wall of the cavity; the ultrasonic cleaning assembly includes a cleaning room, and the cleaning room is provided with an ultrasonic generator and a transducer; the robotic arm assembly includes a mirror loading and unloading device and industrial robots that control mirror handlers. Compared with the prior art, the present invention can realize the automatic loading and unloading of the reflector through an industrial robot with a suction cup at the end, and place it on the ultrasonic cleaning component, thereby realizing automatic cleaning of the reflector.

Figure 201811488480

Description

一种自清洁离轴三反射镜装置A self-cleaning off-axis three-mirror device

技术领域technical field

本发明涉及光学成像技术领域,尤其是涉及一种自清洁离轴三反射镜装置。The invention relates to the technical field of optical imaging, in particular to a self-cleaning off-axis three-mirror device.

背景技术Background technique

反射式光学系统分同轴反射和离轴反射,其中离轴三反射镜光学系统由于其具备大视场、高分辨率、焦距长、波段宽、调制传递函数高等特点,被广泛应用于空间光学遥感领域。The reflective optical system is divided into on-axis reflection and off-axis reflection. Among them, the off-axis three-mirror optical system is widely used in space optics due to its large field of view, high resolution, long focal length, wide wavelength band, and high modulation transfer function. remote sensing field.

离轴三反射镜装置在使用前,需对三面反射镜借助干涉仪依次进行方位调整对正,人工装调难度极大,在专利号为201720163452.0、公告日为2017年11月24日的实用新型专利公开了一种利用离轴反射系统旋转的离轴三反成像系统加工装置,在专利号为201720163310.4、公告日为2017年9月26日的实用新型专利公开了一种利用金刚石刀具旋转的离轴三反成像系统加工装置,以上两专利提出了利用金刚石刀具一体加工三面反射镜的方法,可避免装调误差。但以上两专利没有考虑到在三面反射镜具体安装时,安装面的加工误差对调装造成的影响,因此还需进行精确调装。Before using the off-axis three-mirror device, it is necessary to adjust the orientation of the three-side mirrors in turn with the aid of an interferometer, which is extremely difficult to manually assemble. The patent discloses an off-axis three-mirror imaging system processing device that uses an off-axis reflection system to rotate. The three-axis three-mirror imaging system processing device, the above two patents propose a method of using a diamond tool to process the three-sided mirror in one piece, which can avoid the installation and adjustment errors. However, the above two patents do not take into account the influence of the machining error of the mounting surface on the adjustment when the three-sided mirror is specifically installed, so precise adjustment is required.

在先技术(梅贵,翟岩,苗健宇.离轴三反式多光谱相机的装调[J].光机电信息,2011,28(08):1-4)提出了利用多种仪器与计算机辅助装调软件相结合,对离轴三反系统进行精确调装的方法,但未给出具体的调整装置结构。反射镜在安装前需对镜面加工螺纹孔,机械加工会对镜面产生作用力,使得镜面产生微弱变形,同时在反射镜安装完成后,由于反射镜需在空间任意角度调整,因此有多个螺钉拉紧反射镜,在反射镜上将有多处螺钉孔产生应力集中,增加镜面变形影响反射镜的反射性能,极大的影响该设备的使用性能。The prior art (Mei Gui, Zhai Yan, Miao Jianyu. Mounting of off-axis three-trans multispectral cameras [J]. Opto-Mechanical Information, 2011, 28(08): 1-4) proposed the use of a variety of instruments Combined with the computer-aided adjustment software, the method for precise adjustment of the off-axis three-mirror system is provided, but the specific adjustment device structure is not given. Before the mirror is installed, the mirror surface needs to be machined with threaded holes. The mechanical processing will produce a force on the mirror surface, causing the mirror surface to be slightly deformed. At the same time, after the mirror is installed, since the mirror needs to be adjusted at any angle in space, there are many screws. When the mirror is tightened, there will be many screw holes on the mirror to generate stress concentration, increasing the mirror surface deformation affects the reflection performance of the mirror, and greatly affects the performance of the device.

离轴三反射装置在使用一段时间后,由于空间存在的细小粉尘会附着在反射镜表面,将对反射镜的性能造成影响,需及时对其进行清理。当前离轴三反射装置不具备自清洁功能,且存在灵活性及适应性较差,不能根据要求实时调整镜面空间位置的问题。After the off-axis three-reflection device is used for a period of time, the fine dust in the space will adhere to the surface of the reflector, which will affect the performance of the reflector, and it needs to be cleaned in time. The current off-axis three-reflection device does not have a self-cleaning function, has poor flexibility and adaptability, and cannot adjust the spatial position of the mirror surface in real time according to requirements.

发明内容SUMMARY OF THE INVENTION

本发明的目的就是为了克服上述现有技术存在的缺陷而提供一种自清洁离轴三反射镜装置。The purpose of the present invention is to provide a self-cleaning off-axis three-mirror device in order to overcome the above-mentioned defects of the prior art.

本发明的目的可以通过以下技术方案来实现:The object of the present invention can be realized through the following technical solutions:

一种自清洁离轴三反射镜装置,包括第一反射镜组件、第二反射镜组件和第三反射镜组件,还包括探测器组件、超声波清洁组件、机械臂组件和框架,所述框架中设有空腔,所述第一反射镜组件和第三反射镜组件设在空腔中的底部,所述第二反射镜组件设在空腔中的顶部,所述探测器组件设在框架的顶部并穿过框架伸入空腔中,所述机械臂组件和超声波清洁组件均设在空腔的内壁上;所述超声波清洁组件包括清洁室,所述清洁室中设有超声波发生器和换能器;所述机械臂组件包括反射镜装卸器件和控制反射镜装卸器的工业机器人。A self-cleaning off-axis three-mirror device includes a first mirror assembly, a second mirror assembly and a third mirror assembly, and also includes a detector assembly, an ultrasonic cleaning assembly, a robotic arm assembly and a frame, wherein the frame is There is a cavity, the first reflector assembly and the third reflector assembly are located at the bottom of the cavity, the second reflector assembly is located at the top of the cavity, and the detector assembly is located at the bottom of the frame. The top extends into the cavity through the frame, and the robotic arm assembly and the ultrasonic cleaning assembly are both arranged on the inner wall of the cavity; the ultrasonic cleaning assembly includes a cleaning room, and the cleaning room is provided with an ultrasonic generator and a changer. The mechanical arm assembly includes a mirror loading and unloading device and an industrial robot that controls the mirror loading and unloading device.

优选的,所述探测器组件包括探测头、插架、伸缩轴和安装座,所述探测头安装在插架上并穿过框架伸入空腔中,所述安装座固定在框架的顶部,所述插架通过伸缩轴固定在安装座上。Preferably, the detector assembly includes a detector head, a socket, a telescopic shaft and a mounting seat, the detector head is mounted on the socket and extends into the cavity through the frame, and the mounting seat is fixed on the top of the frame, The socket is fixed on the mounting seat through the telescopic shaft.

优选的,所述插架设有圆弧形安装槽和侧耳,所述侧耳包括间隔一定距离相对设置的两个支板,所述探测头安装在安装槽中,所述伸缩轴的一端固定在两个支板之间,所述伸缩轴的另一端固定在所述安装座上。Preferably, the socket is provided with a circular arc-shaped installation groove and a side lug, the side lug includes two support plates arranged opposite to each other at a certain distance, the probe head is installed in the installation groove, and one end of the telescopic shaft is fixed on the two support plates. Between the supporting plates, the other end of the telescopic shaft is fixed on the mounting seat.

优选的,所述安装座包括用于插入伸缩轴的伸缩通孔,所述伸缩通孔通过紧定螺钉固定在伸缩通孔中。Preferably, the mounting seat includes a telescopic through hole for inserting the telescopic shaft, and the telescopic through hole is fixed in the telescopic through hole by a set screw.

优选的,所述安装座与框架通过调整螺栓连接,所述框架在与调整螺栓的连接处设有长槽孔。Preferably, the mounting seat and the frame are connected by adjusting bolts, and the frame is provided with long slot holes at the connection with the adjusting bolts.

优选的,所述反射镜装卸器件具体为吸盘。Preferably, the mirror attachment and detachment device is specifically a suction cup.

优选的,所述第一反射镜组件、第二反射镜组件和第三反射镜组件分别都设有反射镜、安装钢板和电磁铁,所述反射镜和安装钢板连接,所述安装钢板吸附于电磁铁上,所述第一反射镜组件、第二反射镜组件的电磁铁分别都可转动的与空腔内壁连接,所述第三反射镜组件的电磁铁固定在空腔内壁上。Preferably, the first reflecting mirror assembly, the second reflecting mirror assembly and the third reflecting mirror assembly are respectively provided with reflecting mirrors, mounting steel plates and electromagnets, the reflecting mirrors are connected with the mounting steel plates, and the mounting steel plates are adsorbed on the On the electromagnet, the electromagnets of the first reflector assembly and the electromagnet of the second reflector assembly are respectively rotatably connected to the inner wall of the cavity, and the electromagnet of the third reflector assembly is fixed on the inner wall of the cavity.

优选的,所述第一反射镜组件、第二反射镜组件分别都包括底座和多个直线电机,所述底座固定在空腔内壁上,所述第一反射镜组件、第二反射镜组件的电磁铁分别与各自的底座球面铰接,所述第一反射镜组件、第二反射镜组件各自的直线电机均布在电磁铁的周围,并分别与电磁铁和空腔内壁球面铰接。Preferably, the first reflector assembly and the second reflector assembly each include a base and a plurality of linear motors, the base is fixed on the inner wall of the cavity, and the first reflector assembly and the second reflector assembly are The electromagnets are respectively hinged with their respective base spheres, and the respective linear motors of the first and second reflector assemblies are evenly distributed around the electromagnets and are respectively hinged to the electromagnets and the inner wall of the cavity.

优选的,所述安装钢板与反射镜连接的一侧的中部设置有凹槽。Preferably, a groove is provided in the middle of the side where the mounting steel plate is connected to the reflector.

优选的,所述空腔的底部为两侧分别朝中间向下倾斜的两个斜坡组成的倒三角状,所述第一反射镜组件和第三反射镜组件分别设在两个斜坡上。Preferably, the bottom of the cavity is in the shape of an inverted triangle formed by two slopes with two slopes respectively inclined downward toward the middle, and the first reflector assembly and the third reflector assembly are respectively arranged on the two slopes.

与现有技术相比,本发明具有以下优点:Compared with the prior art, the present invention has the following advantages:

1、采用超声波清洁组件,通过末端带有吸盘的工业机器人可实现反射镜的自动装卸,并放置于超声波清洁组件,从而实现对反射镜的自动清洁。1. Using the ultrasonic cleaning component, the automatic loading and unloading of the mirror can be realized by an industrial robot with a suction cup at the end, and placed in the ultrasonic cleaning component, so as to realize the automatic cleaning of the mirror.

2、设置有探测器,可实时监测本设备光路的变化,实时反馈调整,同时可针对不同光路要求实时调整反射镜空间姿态。2. It is equipped with a detector, which can monitor the change of the optical path of the device in real time, feedback and adjust in real time, and adjust the spatial attitude of the reflector in real time according to the requirements of different optical paths.

3、采用电磁铁吸紧反射镜,避免了反射镜安装孔的机械加工,减小了反射镜因机械加工产生的变形。3. The use of electromagnets to tighten the mirror avoids the machining of the mirror mounting holes and reduces the deformation of the mirror due to machining.

4、采用三个直线电机控制电磁铁空间姿态,从而自动调整反射镜的空间姿态,避免了人工装调反射镜,实现反射镜的精确调装。4. Three linear motors are used to control the space attitude of the electromagnet, so as to automatically adjust the space attitude of the reflector, avoid manual adjustment of the reflector, and realize the precise adjustment of the reflector.

5、安装钢板中部设置有凹槽,可极大的降低与反射镜的接触,可使吸力较均匀作用于反射镜外沿,减小反射镜因受力产生的变形。5. There is a groove in the middle of the installation steel plate, which can greatly reduce the contact with the mirror, make the suction force more uniformly act on the outer edge of the mirror, and reduce the deformation of the mirror due to force.

附图说明Description of drawings

图1为本发明自清洁离轴三反射镜装置的主视图;1 is a front view of a self-cleaning off-axis three-mirror device of the present invention;

图2为本发明自清洁离轴三反射镜装置的左剖视图;2 is a left cross-sectional view of the self-cleaning off-axis three-mirror device of the present invention;

图3为图1中A-A方向的剖视图;Fig. 3 is the sectional view of A-A direction in Fig. 1;

图4为本发明中插架的轴侧图;Fig. 4 is the isometric view of the slot in the present invention;

图5为本发明中伸缩轴的轴侧图;Figure 5 is an isometric view of the telescopic shaft in the present invention;

图6为本发明中安装座的轴侧图;Fig. 6 is the axonometric view of the mounting seat in the present invention;

图7为本发明中框架的轴侧图;Fig. 7 is the isometric view of the frame in the present invention;

图8为本发明中安装钢板一的主剖面视图;Fig. 8 is the main sectional view of installing steel plate one in the present invention;

图9为本发明中安装钢板二的主剖面视图;Fig. 9 is the main sectional view of installing steel plate two in the present invention;

图10为本发明中安装钢板三的主剖面视图。FIG. 10 is a front cross-sectional view of the third installation steel plate in the present invention.

图中标注:1.探测器组件、11.探测头、12.插架、121.安装槽、122.侧耳、13.伸缩轴、131.紧定螺纹孔一、14.紧定螺钉二、15.安装座、151.伸缩通孔、152.紧定螺纹孔二、153.长槽孔一、16.调整螺栓、17、紧定螺钉一、2.框架、21.通孔、22.长槽孔二、3.第一反射镜组件、31.反射镜一、32.安装钢板一、321.凹槽一、33.电磁铁一、34.直线电机一、35.底座一、36.直线电机二、37.直线电机三、4.第三反射镜组件、41.反射镜三、42.安装钢板三、421.凹槽三、43.电磁铁三、5.超声波清洁组件、51.密封盖、52.超声波发生器、53.换能器、54.清洁安装座、541.清洁室、542.清洁液进口、543.清洁液出口、6.机械臂组件、61.工业机器人、62.吸盘、7.第二反射镜组件、71.反射镜二、72.安装钢板二、721.凹槽二、73.电磁铁二、74.直线电机四、75.底座二、76.直线电机五、77.直线电机六。Labels in the figure: 1. Detector assembly, 11. Detector head, 12. Insert frame, 121. Installation slot, 122. Side ear, 13. Telescopic shaft, 131. Fastening thread hole 1, 14. Fastening screw 2, 15 .Mounting seat, 151. Telescopic through hole, 152. Fastening threaded hole 2, 153. Long slot hole 1, 16. Adjusting bolt, 17. Set screw 1, 2. Frame, 21. Through hole, 22. Long slot Hole 2, 3. The first mirror assembly, 31. Mirror 1, 32. Mounting steel plate 1, 321. Groove 1, 33. Electromagnet 1, 34. Linear motor 1, 35. Base 1, 36. Linear motor 2. 37. Linear motor 3. 4. Third mirror assembly, 41. Reflector 3, 42. Mounting steel plate 3. 421. Groove 3, 43. Electromagnet 3. 5. Ultrasonic cleaning assembly, 51. Sealing cover , 52. Ultrasonic generator, 53. Transducer, 54. Cleaning mount, 541. Cleaning chamber, 542. Cleaning fluid inlet, 543. Cleaning fluid outlet, 6. Robot arm assembly, 61. Industrial robot, 62. Suction cup , 7. Second mirror assembly, 71. Reflector two, 72. Mounting steel plate two, 721. Groove two, 73. Electromagnet two, 74. Linear motor four, 75. Base two, 76. Linear motor five, 77. Linear Motor VI.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明进行详细说明。本实施例以本发明技术方案为前提进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. This embodiment is implemented on the premise of the technical solution of the present invention, and provides a detailed implementation manner and a specific operation process, but the protection scope of the present invention is not limited to the following embodiments.

实施例Example

如图1~3所示,一种自清洁离轴三反射镜装置,包括第一反射镜组件3、第二反射镜组件7、第三反射镜组件4、探测器组件1、超声波清洁组件5、机械臂组件6和框架2。框架2中设有空腔。第一反射镜组件3和第三反射镜组件4设在空腔中的底部,本实施例中,空腔的底部为两侧分别朝中间向下倾斜的两个斜坡组成的倒三角状,第一反射镜组件3和第三反射镜组件4分别设在两个斜坡上。第二反射镜组件7设在空腔中的顶部。探测器组件1设在框架2的顶部并穿过框架2伸入空腔中。机械臂组件6和超声波清洁组件5均设在空腔的内壁上。As shown in FIGS. 1 to 3 , a self-cleaning off-axis three-mirror device includes a first mirror assembly 3 , a second mirror assembly 7 , a third mirror assembly 4 , a detector assembly 1 , and an ultrasonic cleaning assembly 5 , the robotic arm assembly 6 and the frame 2. A cavity is provided in the frame 2 . The first reflector assembly 3 and the third reflector assembly 4 are arranged at the bottom of the cavity. In this embodiment, the bottom of the cavity is an inverted triangle shape composed of two slopes on both sides that slope downward toward the middle, respectively. A mirror assembly 3 and a third mirror assembly 4 are respectively arranged on two slopes. The second mirror assembly 7 is provided on top of the cavity. The detector assembly 1 is provided on the top of the frame 2 and extends through the frame 2 into the cavity. Both the robotic arm assembly 6 and the ultrasonic cleaning assembly 5 are arranged on the inner wall of the cavity.

超声波清洁组件5设置在空腔的侧壁上,包括密封盖51、清洁安装座5415、超声波发生器52和换能器53。清洁安装座54设有清洁室541,清洁室541中设有分别连通清洁室541和外部的清洁液进口542和清洁液出口543,超声波发生器52和换能器53设置在清洁室541中。密封盖51封挡在清洁室541的开口。超声波发生器52发出的超声波频率为20~40kHz,本实施例中,具体为30kHz。The ultrasonic cleaning assembly 5 is disposed on the side wall of the cavity, and includes a sealing cover 51 , a cleaning mounting seat 5415 , an ultrasonic generator 52 and a transducer 53 . The cleaning mounting seat 54 is provided with a cleaning chamber 541 . The cleaning chamber 541 is provided with a cleaning liquid inlet 542 and a cleaning liquid outlet 543 respectively communicating with the cleaning chamber 541 and the outside. The ultrasonic generator 52 and the transducer 53 are arranged in the cleaning chamber 541 . The sealing cover 51 blocks the opening in the clean room 541 . The frequency of the ultrasonic waves emitted by the ultrasonic generator 52 is 20-40 kHz, and in this embodiment, it is specifically 30 kHz.

机械臂组件6包括反射镜装卸器件和控制反射镜装卸器的工业机器人61。本实施例中,反射镜装卸器件具体为吸盘62,可以实现自动装卸反射镜。The robotic arm assembly 6 includes a mirror handling device and an industrial robot 61 that controls the mirror handling device. In this embodiment, the mirror attachment and detachment device is specifically the suction cup 62, which can realize automatic attachment and detachment of the reflection mirror.

探测器组件1包括探测头11、插架12、伸缩轴13和安装座15。探测头11安装在插架12上并穿过框架2伸入空腔中,安装座15固定在框架2的顶部,插架12通过伸缩轴13固定在安装座15上。The detector assembly 1 includes a detector head 11 , a socket 12 , a telescopic shaft 13 and a mounting seat 15 . The probe head 11 is mounted on the socket 12 and extends into the cavity through the frame 2 . The mounting seat 15 is fixed on the top of the frame 2 , and the socket 12 is fixed on the mounting seat 15 through the telescopic shaft 13 .

如图4所示,插架12设有圆弧形安装槽121和侧耳122,侧耳122包括间隔一定距离相对设置的两个支板。探测头11安装在安装槽121中。As shown in FIG. 4 , the socket 12 is provided with a circular arc-shaped mounting groove 121 and a side ear 122 , and the side ear 122 includes two supporting plates arranged opposite to each other at a certain distance. The probe head 11 is installed in the installation groove 121 .

如图5所示,伸缩轴13的上端的宽度较窄且设有贯穿的连接孔,伸缩轴13的顶端设置有紧定螺纹孔一131。伸缩轴13的上端固定在两个支板之间,具体的,伸缩轴13的上端通过连接孔与两个支板铰接,紧定螺钉一17旋入紧定螺纹孔一131中使伸缩轴13固定在侧耳122中。As shown in FIG. 5 , the upper end of the telescopic shaft 13 has a narrow width and is provided with a connecting hole therethrough, and the top end of the telescopic shaft 13 is provided with a fixed threaded hole 1 131 . The upper end of the telescopic shaft 13 is fixed between the two support plates. Specifically, the upper end of the telescopic shaft 13 is hinged with the two support plates through the connecting hole, and the set screw 17 is screwed into the set screw hole 131 to make the telescopic shaft 13 Secured in the side ears 122 .

如图6所示,安装座15包括底板和设在底板上的套筒。套筒中间设有用于插入伸缩轴13的伸缩通孔151,套筒的中部设置有紧定螺纹孔二152,底板上设置有长槽孔一153。伸缩轴13的下端插在伸缩通孔151中,紧定螺钉二14旋入紧定螺纹孔二152使伸缩轴13固定在伸缩通孔151中。As shown in FIG. 6 , the mounting base 15 includes a base plate and a sleeve provided on the base plate. A telescopic through hole 151 for inserting the telescopic shaft 13 is provided in the middle of the sleeve, a second fixed threaded hole 152 is arranged in the middle of the sleeve, and a long slot hole 1 153 is arranged on the bottom plate. The lower end of the telescopic shaft 13 is inserted into the telescopic through hole 151 , and the second set screw 14 is screwed into the second tightened threaded hole 152 to fix the telescopic shaft 13 in the telescopic through hole 151 .

如图7所示,框架2顶部在安装探测器组件1的位置设置有通孔21和长槽孔二22。探测头11固装在插架12的安装槽121内,且探测头11的下端穿过框架2的通孔21伸入空腔中。安装座15与框架2通过调整螺栓16连接,通过调整螺栓16穿过长槽孔一153和长槽孔二22将安装座15与框架2固定连接。As shown in FIG. 7 , the top of the frame 2 is provided with a through hole 21 and two long slot holes 22 at the position where the detector assembly 1 is installed. The probe head 11 is fixedly mounted in the installation groove 121 of the socket 12 , and the lower end of the probe head 11 protrudes into the cavity through the through hole 21 of the frame 2 . The mounting seat 15 is connected with the frame 2 by adjusting bolts 16 , and the mounting seat 15 and the frame 2 are fixedly connected by the adjusting bolts 16 passing through the first slot hole 153 and the second slot hole 22 .

第一反射镜组件3包括反射镜一31、安装钢板一32、电磁铁一33、底座、直线电机一34、直线电机二36和直线电机三37。安装钢板一32的一侧与反射镜一31注胶固连,另一侧吸附于电磁铁一33上。电磁铁一33与底座一35球面铰接,底座一35固装在框架2内腔的底部。直线电机一34、直线电机二36和直线电机三37均布于电磁铁一33的周围,且直线电机一34、直线电机二36和直线电机三37的前端和尾端分别与电磁铁一33和空腔底部内壁球面铰接,可实现反射镜一31空间姿态的自动调整。The first reflector assembly 3 includes a reflector 1 31 , a mounting steel plate 1 32 , an electromagnet 1 33 , a base, a linear motor 1 34 , a linear motor 2 36 and a linear motor 3 37 . One side of the installation steel plate one 32 is glued to the reflector one 31 , and the other side is adsorbed on the electromagnet one 33 . The electromagnet one 33 is spherically hinged with the base one 35 , and the base one 35 is fixedly mounted on the bottom of the inner cavity of the frame 2 . The linear motor one 34, the linear motor two 36 and the linear motor three 37 are evenly distributed around the electromagnet one 33, and the front end and the tail end of the linear motor one 34, the linear motor two 36 and the linear motor three 37 are respectively connected with the electromagnet one 33. It is hinged with the spherical surface of the inner wall of the bottom of the cavity, which can realize the automatic adjustment of the spatial attitude of the mirror-31.

第二反射镜组件7包括反射镜二71、安装钢板二72、电磁铁二73、底座二75、直线电机四74、直线电机五76和直线电机六77。安装钢板二72的一侧与反射镜二71注胶固连,另一侧吸附于电磁铁二73上。电磁铁二73与底座二75球面铰接,底座二75固装在空腔的顶部。直线电机四74、直线电机五76和直线电机六77均布于电磁铁二73的周围,且直线电机四74、直线电机五76和直线电机六77的前端和尾端分别与电磁铁二73和空腔顶部内壁球面铰接,可实现反射镜二71空间姿态的自动调整。The second mirror assembly 7 includes a second mirror 71 , a second mounting steel plate 72 , a second electromagnet 73 , a second base 75 , a fourth linear motor 74 , a fifth linear motor 76 and a sixth linear motor 77 . One side of the second mounting plate 72 is glued to the second reflecting mirror 71 , and the other side is adsorbed on the second electromagnet 73 . The second electromagnet 73 is spherically hinged with the second base 75, and the second base 75 is fixedly mounted on the top of the cavity. The linear motor four 74, the linear motor five 76 and the linear motor six 77 are evenly distributed around the electromagnet two 73, and the front end and the tail end of the linear motor four 74, the linear motor five 76 and the linear motor six 77 are respectively connected with the electromagnet two 73. It is hinged with the spherical surface of the inner wall of the top of the cavity, which can realize the automatic adjustment of the space attitude of the mirror two 71 .

第三反射镜组件4包括反射镜三41、安装钢板三42和电磁铁三43。安装钢板三42的一侧与反射镜三41注胶固连,另一侧吸附于电磁铁三43上,电磁铁三43固装在空腔的底部。The third reflecting mirror assembly 4 includes a third reflecting mirror 41 , a third mounting steel plate 42 and a third electromagnet 43 . One side of the installation steel plate 342 is glued and connected with the mirror 3 41, and the other side is adsorbed on the electromagnet 3 43, and the electromagnet 43 is fixed at the bottom of the cavity.

安装钢板一32、安装钢板二72、安装钢板三42各自与反射镜连接的一侧的中部分别设置有凹槽一321、凹槽二721、凹槽三421,分别如图8、9、10所示,可极大的降低安装钢板与反射镜的接触,可使吸力较均匀作用于反射镜外沿,减小反射镜因受力产生的变形。Mounting steel plate one 32, mounting steel plate two 72 and mounting steel plate three 42 are respectively provided with groove one 321, groove two 721 and groove three 421 in the middle of the side connected to the reflector, as shown in Figures 8, 9 and 10 respectively. As shown in the figure, the contact between the mounting steel plate and the reflector can be greatly reduced, the suction force can be applied to the outer edge of the reflector more uniformly, and the deformation of the reflector due to the force is reduced.

本实施例中,电磁铁一33、电磁铁二73和电磁铁三43的电流均为20A。In this embodiment, the currents of the first electromagnet 33 , the second electromagnet 73 and the third electromagnet 43 are all 20A.

Claims (7)

1. A self-cleaning off-axis three-mirror device comprises a first mirror assembly (3), a second mirror assembly (7) and a third mirror assembly (4), and is characterized by further comprising a detector assembly (1), an ultrasonic cleaning assembly (5), a mechanical arm assembly (6) and a frame (2), wherein a cavity is formed in the frame (2), the first mirror assembly (3) and the third mirror assembly (4) are arranged at the bottom of the cavity, the second mirror assembly (7) is arranged at the top of the cavity, the detector assembly (1) is arranged at the top of the frame (2) and penetrates through the frame (2) to extend into the cavity, and the mechanical arm assembly (6) and the ultrasonic cleaning assembly (5) are arranged on the inner wall of the cavity; the ultrasonic cleaning assembly (5) comprises a cleaning chamber (541), wherein an ultrasonic generator (52) and a transducer (53) are arranged in the cleaning chamber (541); a cleaning liquid inlet (542) and a cleaning liquid outlet (543) which are respectively communicated with the cleaning chamber (541) and the outside are arranged in the cleaning chamber (541), and the ultrasonic generator (52) and the transducer (53) are arranged in the cleaning chamber (541); a sealing cover (51) for sealing the opening of the cleaning chamber (541); the robot arm assembly (6) comprises a mirror handling device and an industrial robot (61) controlling the mirror handling device;
the detector assembly (1) comprises a detection head (11), an insertion frame (12), a telescopic shaft (13) and a mounting seat (15), wherein the detection head (11) is installed on the insertion frame (12) and penetrates through the frame (2) to extend into the cavity, the mounting seat (15) is fixed to the top of the frame (2), and the insertion frame (12) is fixed to the mounting seat (15) through the telescopic shaft (13);
the inserting frame (12) is provided with an arc-shaped mounting groove (121) and a side lug (122), the side lug (122) comprises two support plates which are oppositely arranged at a certain distance, the detecting head (11) is mounted in the mounting groove (121), one end of the telescopic shaft (13) is fixed between the two support plates, and the other end of the telescopic shaft (13) is fixed on the mounting seat (15); the upper end of the telescopic shaft (13) is hinged with the two support plates through connecting holes;
the reflector assembling and disassembling device is a sucker (62);
the automatic assembling and disassembling of the reflector are realized by adopting the ultrasonic cleaning component (5) and an industrial robot (61) with a suction cup (62) at the tail end, and the reflector is placed on the ultrasonic cleaning component (5), so that the reflector is automatically cleaned.
2. A self-cleaning off-axis three-mirror device according to claim 1, wherein the mounting seat (15) comprises a telescopic through hole (151) for inserting the telescopic shaft (13), the telescopic shaft (13) being fixed in the telescopic through hole (151) by a set screw.
3. A self-cleaning off-axis three-mirror device according to claim 1, wherein the mounting base (15) is connected to the frame (2) by means of an adjusting bolt (16), and the frame (2) is provided with a slotted hole at the connection with the adjusting bolt (16).
4. An off-axis self-cleaning three-mirror device according to claim 1, wherein the first mirror assembly (3), the second mirror assembly (7) and the third mirror assembly (4) are respectively provided with a mirror, a mounting steel plate and an electromagnet, the mirror is connected with the mounting steel plate, the mounting steel plate is adsorbed on the electromagnet, the electromagnets of the first mirror assembly (3) and the second mirror assembly (7) are respectively rotatably connected with the inner wall of the cavity, and the electromagnet of the third mirror assembly (4) is fixed on the inner wall of the cavity.
5. An off-axis self-cleaning three-mirror device according to claim 4, wherein the first mirror assembly (3) and the second mirror assembly (7) respectively comprise a base and a plurality of linear motors, the base is fixed on the inner wall of the cavity, the electromagnets of the first mirror assembly (3) and the second mirror assembly (7) are respectively hinged with the respective base spherical surfaces, and the respective linear motors of the first mirror assembly (3) and the second mirror assembly (7) are uniformly distributed around the electromagnets and are respectively hinged with the electromagnets and the inner wall spherical surfaces of the cavity.
6. A self-cleaning off-axis three-mirror device as claimed in claim 4, wherein a groove is provided in the middle of the side of the mounting steel plate connected to the mirror.
7. An off-axis self-cleaning triple mirror device according to claim 1, wherein the bottom of the cavity is in an inverted triangular shape with two slopes sloping downward toward the middle at both sides, and the first mirror assembly (3) and the third mirror assembly (4) are respectively disposed on the two slopes.
CN201811488480.5A 2018-12-06 2018-12-06 A self-cleaning off-axis three-mirror device Expired - Fee Related CN109739010B (en)

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