CN109737237A - Photothermal control membrane microvalve device and method of use - Google Patents
Photothermal control membrane microvalve device and method of use Download PDFInfo
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- CN109737237A CN109737237A CN201910084530.1A CN201910084530A CN109737237A CN 109737237 A CN109737237 A CN 109737237A CN 201910084530 A CN201910084530 A CN 201910084530A CN 109737237 A CN109737237 A CN 109737237A
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- membrane
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- transport fluid
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- 239000012528 membrane Substances 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000012530 fluid Substances 0.000 claims abstract description 56
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000012153 distilled water Substances 0.000 claims abstract description 34
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 31
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims abstract description 18
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 18
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 17
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000005192 partition Methods 0.000 claims abstract description 14
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims abstract description 14
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 9
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 9
- -1 polydimethylsiloxane Polymers 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 6
- 239000005060 rubber Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 229920001971 elastomer Polymers 0.000 claims description 4
- 239000012466 permeate Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 239000002033 PVDF binder Substances 0.000 claims 2
- 239000013013 elastic material Substances 0.000 claims 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims 2
- 108091006146 Channels Proteins 0.000 abstract description 32
- 238000004821 distillation Methods 0.000 abstract description 27
- 102000010637 Aquaporins Human genes 0.000 abstract description 25
- 108010063290 Aquaporins Proteins 0.000 abstract description 22
- 238000004458 analytical method Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract description 3
- 239000003814 drug Substances 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 229940058401 polytetrafluoroethylene Drugs 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 102000004363 Aquaporin 3 Human genes 0.000 description 4
- 108090000991 Aquaporin 3 Proteins 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 238000002207 thermal evaporation Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 229920005573 silicon-containing polymer Polymers 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- HZEWFHLRYVTOIW-UHFFFAOYSA-N [Ti].[Ni] Chemical compound [Ti].[Ni] HZEWFHLRYVTOIW-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011953 bioanalysis Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000017 hydrogel Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910001000 nickel titanium Inorganic materials 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a kind of photo-thermal manipulation membrane type microvalve device and application methods；Photo-thermal manipulates membrane type microvalve device, including the microchannel PDMS, it is characterized by: being provided with the transport fluid channel being parallel to each other and distillation aquaporin in the microchannel PDMS, the transport fluid channel is to transport main fluid, the distillation aquaporin circulates to distilled water, to provide steam pressure source；It is provided with partition between transport fluid channel and distillation aquaporin, through-hole is provided in the middle part of the partition, the both ends of the surface of the through-hole are respectively arranged with strain films and hydrophobic permeable membrane, and strain films and hydrophobic permeable membrane and through-hole form steam generating chamber；The strain films are located at transport fluid channel side, and deformation occurs for the strain films stress, form micro-valve；The hydrophobic permeable membrane is located at distillation aquaporin side；Infrared laser is provided on the outside of the distillation aquaporin；The present invention can be widely used in the fields such as fluid transport, chemical analysis, medicine detection.
Description
Technical field
The present invention relates to micro-fluidic fields, manipulate membrane type microvalve device and application method more particularly to a kind of photo-thermal.
Background technique
Microfluidic technology is a kind of to be related to the technology of the processing of flow liquid process in micro-meter scale space and device processing and manufacturing.It
It is the various effects and behavior for studying microfluid using the fluid processing of micromation and detection system under micron scale structures.
Since it has high-throughput microchannel and flow network, efficient fluid processing and testing mechanism, and potentially apply
Low cost has been widely used in pharmacy industry, biotechnology and bioanalysis, medicine, chemical analysis, machinery, IT industry very
To the fields such as national defence and aerospace.
Main element one of of the micro-valve as microfluidic system, effect include Runoff adjustment, ON/OFF conversion and sealing
Biomolecule, micro-nano particle, chemical reagent etc., property includes No leakage, dead volume is small, low in energy consumption, pressure drag is big, to particle flaw
It is dirty it is insensitive, reaction is fast, can linear operation ability etc..According to the difference of driving source, micro-valve can be divided into again piezoelectricity, magnetic, electricity,
Heat, phase transformation, the active micro-valve of bistable state and the active micro-valve by external secondary system such as gas-powered, wherein thermal drivers micro-valve packet
Hot-air, bimetallic and marmem micro-valve are included, phase transformation micro-valve includes hydrogel, sol-gel and paraffin micro-valve etc..Closely
Nian Lai, the research based on micro-fluidic chip expansion have very much.M.Duch et al. proposes a kind of top V-type cantilever beam and lower part silicon
Diaphragm forms, the low-power consumption of one layer of Co-Ni alloy of plating, magnetic micro-valve easy to use on V-type cantilever beam；T.H asegaw a etc.
People proposes one kind by empty gas-powered differential match system, and wherein main element is exactly to realize that direction turns by microsolenoid coil driver
The 10 multidirectional electrostatic drive micro-valves in outlet changed；It is respectively 8 μm and 5 μm of silicon fiml and aluminium by thickness that H.Jerm an, which has developed,
The bimetallic of layer composition drives micro-valve, and the micro-valve of ratio control can be well realized；M.E.Piccini et al. is using diameter
75 μm of nickel-titanium metal line has developed a kind of silicone resin tubulose closed type micro-valve, is opened by applying pulse voltage realization micro-valve
Close control.The commercialization degree of micro-valve is not still high at present, still has many problems to need to solve.Conventional micro-valve device generallys use
The materials such as glass, silicon wafer are substrate, are process using Si micromachining technique (such as photoetching, etching etc.), to process equipment
Height is required with raw material, processing cost is higher；Micro-valve structure is complex at present, usually nonplanar layer stereo structure,
It need to be process using multilayer silicon bonding technique, technique very complicated, the process-cycle is longer.More importantly this non-planar
Micro-valve structure be not easy to be integrated in microfluidic system, increase the integrated difficulty of microfluidic system.Therefore carry out novel micro-
The research of valve simplifies the structure and manufacture craft of micro-valve, reduces cost and integrated difficulty, have to the development of micro-fluidic chip
Important meaning.
Summary of the invention
Technical problem to be solved by the present invention lies in providing a kind of photo-thermal manipulation membrane type microvalve device and its application method,
To improve the response speed and precision of micro-valve.
In order to solve the above-mentioned technical problem, the technical scheme is that
A kind of photo-thermal manipulation membrane type microvalve device, including PDMS micro-flow channels, it is characterised in that: the PDMS microfluidic
The transport fluid channel being parallel to each other and distillation aquaporin are provided in channel, the transport fluid channel is to transport mainstream
Body, the distillation aquaporin circulates to distilled water, to provide steam pressure source；Transport fluid channel and distillation aquaporin it
Between be provided with partition, be provided with through-hole in the middle part of the partition, the both ends of the surface of the through-hole are respectively arranged with strain films and hydrophobic
Ventilated membrane, strain films and hydrophobic permeable membrane and through-hole form steam generating chamber；The strain films are located at transport fluid channel one
Side, and deformation occurs for the strain films stress, forms micro-valve；The hydrophobic permeable membrane is located at distillation aquaporin side；The steaming
Infrared laser is provided on the outside of distilled water channel.
The working principle of the invention is: the infrared laser heats the distilled water in the distillation aquaporin,
Distilled water is produced vapor by thermal evaporation, and the vapor is accumulated to form vapour pressure in steam generating chamber through hydrophobic permeable membrane,
The vapour pressure acts on strain films and brings it about deformation, and strain films block the transport of the main fluid in transport fluid channel.
The preferred embodiment of photo-thermal manipulation membrane type microvalve device according to the present invention, the strain films use poly dimethyl
Siloxanes, rubber or resin elastic-like material are made.
Photo-thermal according to the present invention manipulates membrane type microvalve device preferred embodiment, and the hydrophobic permeable membrane uses polytetrafluoro
Ethylene or Kynoar are made, and can be unable to permeate state water through vapor.
Second technical solution of the invention is:
A kind of application method of photo-thermal manipulation membrane type microvalve device, which includes PDMS micro-flow channels, special
Sign is:
The transport fluid channel being parallel to each other and distillation aquaporin, the transport are provided in the PDMS micro-flow channels
Fluid channel is to transport main fluid, and the distillation aquaporin circulates to distilled water, to provide steam pressure source；In traffic flow
It is provided with partition between body channel and distillation aquaporin, through-hole, the both ends of the surface point of the through-hole are provided in the middle part of the partition
It is not provided with strain films and hydrophobic permeable membrane, strain films and hydrophobic permeable membrane and through-hole form steam generating chamber；The strain
Film is located at transport fluid channel side, and deformation occurs for the strain films stress, forms micro-valve；The hydrophobic permeable membrane, which is located at, to be steamed
Distilled water channel side；Infrared laser is provided on the outside of the distillation aquaporin.
Main fluid is added in the transport fluid channel, distilled water is added in the distillation aquaporin, using described
Infrared laser heats the distilled water in the distillation aquaporin, and distilled water is produced vapor, the water by thermal evaporation
Vapor permeation hydrophobic permeable membrane is accumulated to form vapour pressure in steam generating chamber, and the vapour pressure acts on strain films and brings it about shape
Become, strain films block the transport of the main fluid in transport fluid channel.
The preferred embodiment of the application method of photo-thermal manipulation membrane type microvalve device according to the present invention, the strain films are adopted
It is made of dimethyl silicone polymer, rubber or resin elastic-like material.
The preferred embodiment of the application method of photo-thermal manipulation membrane type microvalve device according to the present invention, the hydrophobic, air-permeability
Film is made of polytetrafluoroethylene (PTFE) or Kynoar, can be unable to permeate state water through vapor.
The beneficial effect of photo-thermal manipulation membrane type microvalve device of the present invention and its application method is: the present invention is utilized and is answered
Becoming film stress, deformation occurs and forms the characteristic of micro-valve, realizes microfluid manipulation, has and carry out essence to fluid in microchannel
Quasi-, quick on/off function, the structure of micro-valve is simple, and manufacture craft simplifies, and controls at low cost, convenient for integrated, can answer extensively
Used in fields such as fluid transport, chemical analysis, medicine detections.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of photo-thermal manipulation membrane type microvalve device of the present invention.
Fig. 2 is the operation principle schematic diagram of photo-thermal manipulation membrane type microvalve device of the present invention.
Specific embodiment
Below with reference to test example and specific embodiment, the present invention is described in further detail.But this should not be understood
It is all that this is belonged to based on the technology that the content of present invention is realized for the scope of the above subject matter of the present invention is limited to the following embodiments
The range of invention.
Referring to Fig. 1 and Fig. 2, embodiment 1: a kind of photo-thermal manipulation membrane type microvalve device, including PDMS micro-flow channels, it is described
The transport fluid channel 2 being parallel to each other and distillation aquaporin 3 are provided in PDMS micro-flow channels, the transport fluid channel is used
To transport main fluid, the distillation aquaporin circulates to distilled water, to provide steam pressure source；In transport fluid channel and steam
Partition 4 is provided between distilled water channel, the middle part of the partition 4 is provided with through-hole 5, and the both ends of the surface of the through-hole 5 are respectively set
There are strain films 6 and hydrophobic permeable membrane 7, strain films 6 and hydrophobic permeable membrane 7 form steam generating chamber；The strain films 6 are located at transport
2 side of fluid channel, and deformation occurs for 6 stress of the strain films, forms micro-valve；The hydrophobic permeable membrane 7 is logical positioned at distilled water
3 side of road；Infrared laser 8 is provided on the outside of the distillation aquaporin 3.
In a particular embodiment, the strain films 6 are using polydimethylsiloxane, rubber or resin elastic-like material
It is made, with a thickness of tens microns to 100 microns.
The hydrophobic permeable membrane 7 is made of polytetrafluoroethylene (PTFE) or Kynoar, vapor can be penetrated and cannot be saturating
Liquid water is crossed, with a thickness of tens microns to 100 microns.
Referring to Fig. 1 and Fig. 2, the application method of a kind of photo-thermal of embodiment 2. manipulation membrane type microvalve device, the microvalve device packet
PDMS micro-flow channels 1 are included, the transport fluid channel 2 being parallel to each other and distillation aquaporin 3 are provided in the microchannel PDMS,
The transport fluid channel is to transport main fluid, and the distillation aquaporin circulates to distilled water, to provide steam pressure source；
It is provided with partition 4 between transport fluid channel and distillation aquaporin, the middle part of the partition 4 is provided with through-hole 5, the through-hole
5 both ends of the surface are respectively arranged with strain films 6 and hydrophobic permeable membrane 7, and strain films 6 and hydrophobic permeable membrane 7 form steam generating chamber；Institute
It states strain films 6 and is located at transport 2 side of fluid channel, and deformation occurs for 6 stress of the strain films, forms micro-valve；It is described hydrophobic
Air film 7 is located at distillation 3 side of aquaporin；Infrared laser 8 is provided on the outside of the distillation aquaporin 3.
Main fluid is added in the transport fluid channel 2, main fluid can be water, solution, chemical reagent, medical
Or gas etc. cannot penetrate the fluid of strain films 6；Distilled water is added in the distillation aquaporin, utilizes the infrared laser
Distilled water in the distillation aquaporin is heated, 1550nm infrared laser can be used in the infrared laser；Distillation
Water is produced vapor by thermal evaporation, and the vapor is accumulated to form vapour pressure in steam generating chamber through hydrophobic permeable membrane 7, described
Vapour pressure acts on strain films 6 and brings it about deformation, and strain films 6 block the transport of the main fluid in transport fluid channel.When need
When main fluid being wanted to circulate, stop heating distilled water.
In a particular embodiment, the strain films 6 are using dimethyl silicone polymer, rubber or resin elastic-like material system
At.With a thickness of tens microns to 100 microns.
The hydrophobic permeable membrane 7 is made of polytetrafluoroethylene (PTFE) or Kynoar, vapor can be penetrated and cannot be saturating
Cross liquid water.With a thickness of tens microns to 100 microns.
The above description is only a preferred embodiment of the present invention, is not intended to restrict the invention, although with reference to the foregoing embodiments
Invention is explained in detail, for those skilled in the art still can be to skill documented by foregoing embodiments
Art scheme is modified or equivalent replacement of some of the technical features.All within the spirits and principles of the present invention,
Any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910084530.1A CN109737237B (en) | 2019-01-29 | 2019-01-29 | Photo-thermal control membrane type micro-valve device and using method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910084530.1A CN109737237B (en) | 2019-01-29 | 2019-01-29 | Photo-thermal control membrane type micro-valve device and using method |
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| Publication Number | Publication Date |
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| CN109737237A true CN109737237A (en) | 2019-05-10 |
| CN109737237B CN109737237B (en) | 2020-05-12 |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4821997A (en) * | 1986-09-24 | 1989-04-18 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| JPH10223795A (en) * | 1997-02-03 | 1998-08-21 | Hitachi Chem Co Ltd | Manufacture of semiconductor package |
| US20040011977A1 (en) * | 2001-08-31 | 2004-01-22 | Hower Robert W | Micro-fluidic valves |
| KR20060063122A (en) * | 2004-12-07 | 2006-06-12 | 삼성전자주식회사 | Micro valve |
| CN101443635A (en) * | 2006-03-10 | 2009-05-27 | 霍尼韦尔国际公司 | Thermal mass gas flow sensor and method of forming same |
| CN103380299A (en) * | 2010-11-24 | 2013-10-30 | 弗兰霍菲尔运输应用研究公司 | Fluidic actuator having a deformable closure arrangement and long shelf life |
| CN104638286A (en) * | 2013-11-14 | 2015-05-20 | 霍尼韦尔国际公司 | Power generator having integrated membrane valve |
| CN104225964B (en) * | 2014-09-17 | 2016-09-28 | 清华大学 | Microfluid removal of bubbles device and preparation method thereof and microfluidic device |
-
2019
- 2019-01-29 CN CN201910084530.1A patent/CN109737237B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4821997A (en) * | 1986-09-24 | 1989-04-18 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| JPH10223795A (en) * | 1997-02-03 | 1998-08-21 | Hitachi Chem Co Ltd | Manufacture of semiconductor package |
| US20040011977A1 (en) * | 2001-08-31 | 2004-01-22 | Hower Robert W | Micro-fluidic valves |
| KR20060063122A (en) * | 2004-12-07 | 2006-06-12 | 삼성전자주식회사 | Micro valve |
| CN101443635A (en) * | 2006-03-10 | 2009-05-27 | 霍尼韦尔国际公司 | Thermal mass gas flow sensor and method of forming same |
| CN103380299A (en) * | 2010-11-24 | 2013-10-30 | 弗兰霍菲尔运输应用研究公司 | Fluidic actuator having a deformable closure arrangement and long shelf life |
| CN104638286A (en) * | 2013-11-14 | 2015-05-20 | 霍尼韦尔国际公司 | Power generator having integrated membrane valve |
| CN104225964B (en) * | 2014-09-17 | 2016-09-28 | 清华大学 | Microfluid removal of bubbles device and preparation method thereof and microfluidic device |
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| CN109737237B (en) | 2020-05-12 |
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