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CN109724648B - Device and method for synchronously measuring temperature and strain based on orthogonal polarization dual-wavelength laser multi-longitudinal-mode self-mixing effect - Google Patents

Device and method for synchronously measuring temperature and strain based on orthogonal polarization dual-wavelength laser multi-longitudinal-mode self-mixing effect Download PDF

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CN109724648B
CN109724648B CN201910054192.7A CN201910054192A CN109724648B CN 109724648 B CN109724648 B CN 109724648B CN 201910054192 A CN201910054192 A CN 201910054192A CN 109724648 B CN109724648 B CN 109724648B
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吕亮
向荣
陈由泽
马阳成
桂华侨
王焕钦
刘建国
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Abstract

本发明属于光学检测技术领域,具体涉及基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置和方法。测量装置包括出射两个不同波长的正交偏振光的激光光源、传感单元、振动目标、偏振选择光开关、分光元件和信号处理单元。测量方法为:激光光源发射两个不同波长正交偏振的激光,振动目标发生振动,出射激光经过偏振选择光开关不同时刻切换两个输出正交的偏振态激光到振动目标上,反馈回激光光源谐振腔内形成自混合信号,分别在偏振态1激光和偏振态2激光下获得不同补偿距离,利用信号处理单元同时得出传感光纤所处环境温度值和应变值,该测量方法能实现温度和应变的同时测量。

Figure 201910054192

The invention belongs to the technical field of optical detection, and in particular relates to a device and method for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers. The measuring device includes a laser light source that emits two orthogonal polarized lights of different wavelengths, a sensing unit, a vibrating target, a polarization selective optical switch, a light splitting element and a signal processing unit. The measurement method is as follows: the laser light source emits two orthogonally polarized lasers with different wavelengths, the vibrating target vibrates, and the outgoing laser passes through the polarization selective optical switch at different times to switch the two output orthogonal polarization lasers to the vibrating target, and feed back to the laser light source. A self-mixing signal is formed in the resonator, and different compensation distances are obtained under the polarization state 1 laser and the polarization state 2 laser, respectively. The signal processing unit is used to obtain the ambient temperature value and strain value of the sensing fiber at the same time. This measurement method can realize the temperature Simultaneous measurement of strain and strain.

Figure 201910054192

Description

基于正交偏振双波长激光多纵模自混合效应同步测量温度和 应变的装置和方法Simultaneous measurement of temperature and Apparatus and method for straining

技术领域technical field

本发明属于光学检测技术领域,具体涉及基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置和方法。The invention belongs to the technical field of optical detection, and in particular relates to a device and method for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers.

背景技术Background technique

目前,光学测量方法因其非接触测量、测量灵敏度高、测量精度高等优点已被成熟应用于温度测量和应变测量的测量场合。而在智能材料与结构在线分析检测中,多参数的同时在线测量是目前结构健康状态检测的发展趋势,其中静态应变和温度的同时测量在热应变的误差校正中尤为重要。At present, optical measurement methods have been maturely used in temperature measurement and strain measurement due to their advantages of non-contact measurement, high measurement sensitivity and high measurement accuracy. In the on-line analysis and testing of smart materials and structures, simultaneous on-line measurement of multiple parameters is the current development trend of structural health state testing. Simultaneous measurement of static strain and temperature is particularly important in error correction of thermal strain.

在温度测量技术领域,目前的测温方法主要分为接触式和非接触式两大类。接触式的测温方法主要有热敏电阻测温法、光纤光栅测温法等;非接触式的测温方法主要有红外测温方法、传统干涉光学测温法等。基于热敏电阻体积小,机械性能好等优点,热敏电阻测温法主要适用于测量点温、表面温度及快速变化的温度的场合,但其存在复现性较差和互换性较差的缺点。光纤光栅测温法适用于需要测量精度要求较高的表面温度的场合,但是受自身材料特性影响,其测温范围较小,并且需要结合昂贵的光谱仪或者复杂的解调技术,应用成本较高。红外测温法被应用于测量真实温度时,受被测对象辐射率的影响较大,测量精度较低,不满足高精度测温需求。而传统干涉光学温度测量方法则一般采用马赫-曾德尔方案,信号光和参考光处在不同光路,受环境影响较大,结构相对复杂且调试困难。In the field of temperature measurement technology, the current temperature measurement methods are mainly divided into two categories: contact type and non-contact type. Contact temperature measurement methods mainly include thermistor temperature measurement method, fiber grating temperature measurement method, etc.; non-contact temperature measurement methods mainly include infrared temperature measurement method, traditional interference optical temperature measurement method, etc. Based on the advantages of the thermistor's small size and good mechanical properties, the thermistor temperature measurement method is mainly suitable for measuring point temperature, surface temperature and rapidly changing temperature, but it has poor reproducibility and poor interchangeability. Shortcomings. The fiber grating temperature measurement method is suitable for the occasions that need to measure the surface temperature with high precision, but due to its material characteristics, its temperature measurement range is small, and it needs to be combined with an expensive spectrometer or complex demodulation technology, and the application cost is high . When the infrared temperature measurement method is applied to measure the real temperature, it is greatly affected by the emissivity of the measured object, and the measurement accuracy is low, which does not meet the needs of high-precision temperature measurement. The traditional interferometric optical temperature measurement method generally adopts the Mach-Zehnder scheme. The signal light and the reference light are in different optical paths, which are greatly affected by the environment, and the structure is relatively complex and debugging is difficult.

在应变测量技术领域,传统的应变测量方法主要是利用电阻应变计(电阻应变片)来实现测量。该方法一般只能测量构件表面应变,难于显示其内部应变,并且存在测量仪器体积大、测量灵敏度低、动态范围小,不易被埋置在复合材料中等缺点。利用光学测量应变的方法主要包括光弹性测量法、全息干涉法、云纹法、光纤光栅法、传统光学干涉法等,其中光弹性测量法、全息干涉法、云纹法等方法存在受力模型复杂、测量材料有限、处理过程繁琐,处理数据量过大等问题;光纤光栅法则均需接入光谱仪观察不同应变下光栅反射波长的具体位置,测量成本较高且易受环境影响。而传统光学干涉法(如迈克尔逊、马赫-曾德尔等干涉法等)则需通过采集传感臂和参考臂间的干涉信号来获得应变大小,由于信号光和参考光处在不同光路,受环境影响较大,结构复杂且调试困难;法布里-帕罗型应变传感器则是利用空气腔中光的干涉效应对应变进行传感,但空气腔易受环境干扰且光程有一定限制,不适合高灵敏度应变测量。In the field of strain measurement technology, traditional strain measurement methods mainly use resistance strain gauges (resistance strain gauges) to achieve measurement. Generally, this method can only measure the surface strain of the component, and it is difficult to display its internal strain, and has the disadvantages of large size of the measuring instrument, low measurement sensitivity, small dynamic range, and it is not easy to be embedded in the composite material. The methods of measuring strain using optics mainly include photoelasticity measurement, holographic interferometry, moiré method, fiber grating method, traditional optical interferometry, etc. Among them, photoelasticity measurement method, holographic interferometry, moiré method and other methods have stress models. Complexity, limited measurement materials, cumbersome processing process, and large amount of data to be processed; the fiber grating method needs to be connected to a spectrometer to observe the specific position of the grating reflection wavelength under different strains. The measurement cost is high and it is easily affected by the environment. However, traditional optical interferometry (such as Michelson, Mach-Zehnder, etc.) needs to obtain the strain size by collecting the interference signal between the sensing arm and the reference arm. Since the signal light and the reference light are in different optical paths, the The environment has a great influence, the structure is complex and the debugging is difficult; the Fabry-Parot type strain sensor uses the interference effect of light in the air cavity to sense the strain, but the air cavity is easily disturbed by the environment and the optical path is limited. Not suitable for high sensitivity strain measurements.

对温度和应变参数的同时测量目前主要采用的光学测量方案为温度、应变双传感器测量方案及单一传感器的温度应变双参数测量方案。双传感器测量方案显然存在系统体积庞大,成本较高以及温度应变交叉敏感的问题。而目前单一传感器进行温度应变双参数测量主流方案主要包括基于光纤布拉格光栅的双包场FBG方案、FBG基频域二次谐波方案、不同包层尺寸的FBG方案、FBG和长周期光栅方案以及单一光纤上双波长偏振干涉测量方案等。但上述方案均基于传感信号波长随温度和应变的同时变化,后进行分离并测量,需结合昂贵光谱仪或波长计以及复杂的波长解调方案才能实现温度应变双参数的同时测量。Simultaneous measurement of temperature and strain parameters The main optical measurement schemes currently used are the temperature and strain dual-sensor measurement scheme and the single-sensor temperature-strain dual-parameter measurement scheme. The dual-sensor measurement scheme obviously has the problems of bulky system, high cost and cross-sensitivity to temperature and strain. At present, the mainstream solutions for the dual-parameter measurement of temperature and strain with a single sensor mainly include the double-envelope FBG scheme based on fiber Bragg grating, the FBG fundamental frequency domain second harmonic scheme, the FBG scheme with different cladding sizes, the FBG and long period grating scheme, and the single Two-wavelength polarization interferometry scheme on optical fiber, etc. However, the above schemes are all based on the simultaneous change of the sensing signal wavelength with temperature and strain, and then separate and measure them. It requires the combination of expensive spectrometers or wavelength meters and complex wavelength demodulation schemes to achieve simultaneous measurement of temperature and strain dual parameters.

发明内容SUMMARY OF THE INVENTION

本发明目的是为了解决上述问题,本发明基于激光多纵模自混合效应,提供有效克服现有方法存在问题的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置和方法。The purpose of the present invention is to solve the above problems. Based on the laser multi-longitudinal mode self-mixing effect, the present invention provides a device for synchronously measuring temperature and strain based on the orthogonal polarization dual-wavelength laser multi-longitudinal mode self-mixing effect, which effectively overcomes the problems of the existing methods, and the method.

本发明提供的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,具体技术方案如下:The device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers provided by the present invention has the following technical solutions:

基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,包括激光光源、传感单元、振动目标、偏振选择光开关、分光元件和信号处理单元,A device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers, including a laser light source, a sensing unit, a vibrating target, a polarization selective optical switch, a light splitting element and a signal processing unit,

所述激光光源发射的激光为两个不同波长的正交偏振光,The laser light emitted by the laser light source is orthogonally polarized light with two different wavelengths,

所述激光光源、传感单元、振动目标依次设置,所述偏振选择光开关和所述分光元件依次设置在所述激光光源与所述传感单元之间的光路上,The laser light source, the sensing unit, and the vibrating target are arranged in sequence, and the polarization selective optical switch and the light splitting element are sequentially arranged on the optical path between the laser light source and the sensing unit,

所述传感单元包括传感光纤,所述传感光纤置于待测温度和应变的环境内,所述激光光源发射的激光,经过分光元件进入所述传感光纤,The sensing unit includes a sensing fiber, the sensing fiber is placed in an environment where the temperature and strain are to be measured, and the laser light emitted by the laser light source enters the sensing fiber through the light splitting element,

所述振动目标底部固定于滑块上,所述滑块设置于滑轨上并且可沿滑轨水平移动,所述振动目标接收激光光源出射的激光并通过所述振动目标的振动面附着有的反射结构反馈回激光光源谐振腔内,形成自混合信号,The bottom of the vibration target is fixed on the slider, the slider is arranged on the slide rail and can move horizontally along the slide rail, the vibration target receives the laser light emitted by the laser light source and is attached to the vibration surface of the vibration target. The reflective structure is fed back into the resonator of the laser light source to form a self-mixing signal,

所述偏振选择光开关接收所述激光光源出射的激光,且将所述激光切换两个输出正交的偏振态1激光和偏振态2激光,所述偏振态1激光波长为λ1,所述偏振态2激光波长为λ2The polarization selective optical switch receives the laser light emitted by the laser light source, and switches the laser light to output orthogonal polarization state 1 laser and polarization state 2 laser. The wavelength of the polarization state 1 laser is λ 1 , and the The laser wavelength of polarization state 2 is λ 2 ,

所述分光元件为耦合器,用于将所述自混合信号分束至探测器上,所述探测器转化接收到光信号转为电信号,The light splitting element is a coupler for splitting the self-mixing signal to the detector, and the detector converts the received optical signal into an electrical signal,

所述信号处理单元接收所述电信号进行分析处理,同时获得所述传感光纤所处环境的温度和应变的变化值。The signal processing unit receives the electrical signal for analysis and processing, and simultaneously obtains changes in temperature and strain of the environment where the sensing fiber is located.

在某些实施方式中,所述激光光源为正交偏振双波长激光器,所述正交偏振双波长激光器选自正交偏振Zeeman双频激光器、正交偏振Nd:YAP双波长激光器、正交偏振He-Ne双频激光器中的任意一种;In certain embodiments, the laser light source is an orthogonally polarized dual-wavelength laser, and the orthogonally polarized dual-wavelength laser is selected from the group consisting of orthogonally polarized Zeeman dual-frequency lasers, orthogonally polarized Nd:YAP dual-wavelength lasers, orthogonally polarized Any of the He-Ne dual-frequency lasers;

或者所述激光光源由两个不同的波长多纵模激光器、一组起偏器和保偏耦合器组成。Or the laser light source consists of two multi-longitudinal mode lasers with different wavelengths, a set of polarizers and a polarization-maintaining coupler.

在某些实施方式中,所述振动目标为信号发生器驱动的扬声器或者压电陶瓷。In some embodiments, the vibration target is a speaker driven by a signal generator or a piezoelectric ceramic.

在某些实施方式中,所述偏振选择光开关为液晶消色差偏振选择光开关、磁光型波长选择光开关或棱镜型波长选择光开关。In some embodiments, the polarization selective optical switch is a liquid crystal achromatic polarization selective optical switch, a magneto-optical wavelength selective optical switch or a prismatic wavelength selective optical switch.

在某些实施方式中,所述传感光纤为传感光纤为单模光纤、多模光纤、双折射光纤或光子晶体光纤。In some embodiments, the sensing fiber is a single-mode fiber, a multi-mode fiber, a birefringent fiber, or a photonic crystal fiber.

在某些实施方式中,还包括衰减器和准直器,所述衰减器位于所述分光元件和所述传感单元之间,所述准直器位于传感单元和振动目标之间,所述传感光纤的一端与所述准直器连接。In some embodiments, an attenuator and a collimator are also included, the attenuator is located between the light splitting element and the sensing unit, the collimator is located between the sensing unit and the vibrating target, so One end of the sensing fiber is connected to the collimator.

在某些实施方式中,所述信号处理单元为计算机或者示波器。In some embodiments, the signal processing unit is a computer or an oscilloscope.

本发明还提供了的依据上述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置同时测量温度和应变的方法,包括如下步骤:The present invention also provides a method for simultaneously measuring temperature and strain based on the above-mentioned device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers, comprising the following steps:

(1)所述激光光源出射激光,所述激光光源发射的激光为两个不同波长的正交偏振光,所述振动目标设置为振动状态,调节所述偏振选择光开关,使波长为λ1的偏振态1激光通过,观察信号处理单元上的多纵模自混合信号,移动所述滑块,使所述信号处理单元波形保持相同相位或者相位延迟为2π整数倍,记录下滑块移动的第一补偿距离δLc1(1) The laser light source emits laser light, the laser light emitted by the laser light source is orthogonally polarized light of two different wavelengths, the vibration target is set to a vibration state, and the polarization selective optical switch is adjusted so that the wavelength is λ 1 The polarization state 1 laser passes through, observe the multi-longitudinal mode self-mixing signal on the signal processing unit, move the slider, keep the waveform of the signal processing unit in the same phase or the phase delay is an integer multiple of 2π, and record the movement of the slider. the first compensation distance δL c1 ;

(2)调节所述偏振选择光开关,使波长为λ2的偏振态2激光通过,观察信号处理单元上的多纵模自混合信号,移动所述滑块,使所述信号处理单元波形保持相同相位或者相位延迟为2π整数倍,记录下滑块移动的第二补偿距离δLc2(2) Adjust the polarization selective optical switch so that the polarization state 2 laser with the wavelength of λ 2 passes through, observe the multi-longitudinal mode self-mixing signal on the signal processing unit, and move the slider to keep the waveform of the signal processing unit. The same phase or phase delay is an integer multiple of 2π, and the second compensation distance δL c2 of the slider movement is recorded;

(3)根据步骤(1)所获得的第一补偿距离δLc1和步骤(2)中所获得的第二补偿距离δLc2联立方程组计算得出传感光纤所处环境的温度变化值(ΔT)和应变的变化值(Δε):(3) According to the simultaneous equations of the first compensation distance δL c1 obtained in step (1) and the second compensation distance δL c2 obtained in step (2), the temperature change value of the environment where the sensing fiber is located ( ΔT) and change in strain (Δε):

Figure GDA0002612620900000051
Figure GDA0002612620900000051

Figure GDA0002612620900000052
Figure GDA0002612620900000052

式中,Λ1,T,Λ1,ε为偏振态1激光所对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,Λ2,T,Λ2,ε为偏振态2激光对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,k0j为真空中j模式的波数,j指激光中第j个纵模模式。In the formula, Λ 1,T , Λ 1,ε are the temperature sensitivity coefficient and strain sensitivity coefficient of the sensing unit corresponding to the polarization state 1 laser, Λ 2,T , Λ 2,ε are the polarization state 2 laser corresponding to The temperature sensitivity coefficient of the sensing unit and the strain sensitivity coefficient of the sensing unit, k 0j is the wave number of the j mode in vacuum, and j refers to the jth longitudinal mode mode in the laser.

本发明提供的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置和方法是基于多纵模激光自混合反馈信号随温度和应变变化所导致的输出信号波形变化,并通过调节外腔腔长跟踪自混合信号波形同步实时测量待测位置的应变和温度变化。本发明具有以下优势:The device and method for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers provided by the present invention are based on the output signal waveform change caused by the multi-longitudinal mode laser self-mixing feedback signal with the change of temperature and strain, and By adjusting the cavity length of the external cavity, the self-mixing signal waveform is tracked and the strain and temperature changes of the position to be measured are measured in real time. The present invention has the following advantages:

1、结构简单,只需观察输出信号的强度变化波形并通过外腔进行跟踪补偿,就能实时获取温度和应变信息;1. The structure is simple, and the temperature and strain information can be obtained in real time only by observing the intensity change waveform of the output signal and tracking and compensating through the outer cavity;

2、温度和应变的传感单元在同一位置,是一种较好的本征测量方案,减少了测量系统受其它敏感因素的干扰。2. The temperature and strain sensing units are in the same position, which is a better intrinsic measurement scheme, reducing the interference of the measurement system by other sensitive factors.

附图说明Description of drawings

图1是本发明实施例1提供的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置的平面结构示意图;1 is a schematic plan view of a device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers provided in Embodiment 1 of the present invention;

图2是本发明实施例2提供的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置的平面结构示意图;2 is a schematic plan view of a device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers provided in Embodiment 2 of the present invention;

图3是本发明实施例2温度和应变的相位图;3 is a phase diagram of temperature and strain in Example 2 of the present invention;

图4是本发明实施例2的仿真模拟结果示意图。FIG. 4 is a schematic diagram of a simulation result of Embodiment 2 of the present invention.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明进一步详细说明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

实施例1Example 1

如图1所示,基于正交偏振双波长多纵模激光器自混合效应同步测量温度和应变的装置,包括正交偏振双波长激光器1、传感单元2、振动目标3、偏振选择光开关4、分光元件5、衰减器6和信号处理单元7。传感单元2包括传感光纤,传感光纤置于待测温度和应变的环境内,正交偏振双波长激光器1的尾纤与传感光纤的一端连接,正交偏振双波长激光器1为待测激光光源,出射激光经过传感光纤,从传感光纤的一端射至所述振动目标3上。振动目标3接收正交偏振双波长激光器1出射的激光并通过振动目标3上的反射结构31反馈回正交偏振双波长激光器1谐振腔内,形成自混合信号。振动目标3底部固定于滑块32上,滑块32设置于滑轨33上并且可沿滑轨33水平移动,滑轨33与出射激光处于同一直线上。正交偏振双波长激光器1与传感单元2之间的光路上依次设置偏振选择光开关4和分光元件5。偏振选择光开关4接收所述正交偏振双波长激光器1出射的激光,且将所述激光切换两个输出正交的偏振态1激光和偏振态2激光,所述偏振态1激光波长为λ1,所述偏振态2激光波长为λ2。分光元件5为耦合器,用于将所述自混合信号分束至探测器8上,所述探测器8转化接收到光信号转为电信号,信号处理单元7接收所述电信号进行分析处理,同时获得传感光纤所处环境的温度和应变的变化值。As shown in FIG. 1 , a device for synchronously measuring temperature and strain based on the self-mixing effect of an orthogonally polarized dual-wavelength multi-longitudinal mode laser includes an orthogonally polarized dual-wavelength laser 1 , a sensing unit 2 , a vibration target 3 , and a polarization selective optical switch 4 , splitting element 5 , attenuator 6 and signal processing unit 7 . The sensing unit 2 includes a sensing fiber, the sensing fiber is placed in the environment of the temperature and strain to be measured, the pigtail of the orthogonal polarization dual-wavelength laser 1 is connected to one end of the sensing fiber, and the orthogonal polarization dual-wavelength laser 1 is to be The laser light source is measured, and the outgoing laser light passes through the sensing fiber, and shoots onto the vibrating target 3 from one end of the sensing fiber. The vibrating target 3 receives the laser light emitted by the orthogonally polarized dual-wavelength laser 1 and feeds it back into the resonator of the orthogonally polarized dual-wavelength laser 1 through the reflection structure 31 on the vibrating target 3 to form a self-mixing signal. The bottom of the vibrating target 3 is fixed on the slider 32 , the slider 32 is arranged on the slide rail 33 and can move horizontally along the slide rail 33 , and the slide rail 33 and the outgoing laser are on the same straight line. A polarization selective optical switch 4 and a light splitting element 5 are sequentially arranged on the optical path between the orthogonally polarized dual-wavelength laser 1 and the sensing unit 2 . The polarization selective optical switch 4 receives the laser light emitted by the orthogonal polarization dual-wavelength laser 1, and switches the laser light to two output orthogonal polarization state 1 laser and polarization state 2 laser, and the polarization state 1 laser wavelength is λ 1 , the wavelength of the polarization state 2 laser is λ 2 . The optical splitting element 5 is a coupler, which is used to split the self-mixing signal to the detector 8, the detector 8 converts the received optical signal into an electrical signal, and the signal processing unit 7 receives the electrical signal for analysis and processing , and simultaneously obtain the temperature and strain changes of the environment where the sensing fiber is located.

在上述装置中,正交偏振双波长激光器1为正交偏振Zeeman双频激光器、正交偏振Nd:YAP双波长激光器或正交偏振He-Ne双频激光器;振动目标3为信号发生器驱动的扬声器或者压电陶瓷;偏振选择光开关4为液晶消色差偏振选择光开关、磁光型波长选择光开关或棱镜型波长选择光开关;传感光纤为传感光纤为单模光纤、多模光纤、双折射光纤或光子晶体光纤。上述装置中还包括衰减器6和准直器9,衰减器6位于分光元件5和传感单元2之间,准直器9位于传感单元和振动目标之间,所述传感光纤的另一端与所述准直器9连接,准直器9保证激光平行出射至目标物体表面;信号处理单元7为计算机或者示波器。In the above device, the orthogonal polarization dual-wavelength laser 1 is an orthogonal polarization Zeeman dual-frequency laser, an orthogonal polarization Nd:YAP dual-wavelength laser or an orthogonal polarization He-Ne dual-frequency laser; the vibration target 3 is driven by a signal generator. Speaker or piezoelectric ceramics; polarization selective optical switch 4 is liquid crystal achromatic polarization selective optical switch, magneto-optical wavelength selective optical switch or prismatic wavelength selective optical switch; sensing optical fiber is single-mode optical fiber, multi-mode optical fiber , birefringent fibers or photonic crystal fibers. The above-mentioned device also includes an attenuator 6 and a collimator 9, the attenuator 6 is located between the light splitting element 5 and the sensing unit 2, the collimator 9 is located between the sensing unit and the vibration target, and the other side of the sensing fiber is One end is connected to the collimator 9, and the collimator 9 ensures that the laser is emitted in parallel to the surface of the target object; the signal processing unit 7 is a computer or an oscilloscope.

利用上述装置同时测量温度和应变的方法为:正交偏振双波长激光器1作为待测激光光源,振动目标3发生振动,出射激光经过偏振选择光开关4,t1时刻,调控偏振选择光开输出偏振态1激光(波长λ1),t2时刻,调节偏振选择光开关切换输出偏振态2激光(波长λ2)到振动目标上,出射激光经振动目标的振动面附着有的反射结构31反射后,反馈回正交偏振双波长激光器1谐振腔内形成自混合信号,分别在偏振态1激光和偏振态2激光下使滑块32沿滑轨33移动,获得补偿距离,补偿距离使各个偏振态下的波形保持相同相位或者相位延迟为2π的整数倍,以改变振动目标距离正交偏振双波长激光器的距离,获得波形不分立的多纵模自混合信号,同时利用衰减器5调节反馈光的强度,利用探测器8采集在偏振态1激光和偏振态2激光下不同激光器外腔长度下的激光自混合信号,利用信号处理单元7对接收的激光自混合信号的电信号进行分析,以及偏振态1和偏振态2下不同的补偿距离得出同时得出传感光纤所处环境的温度和应变的变化值,具体步骤如下:The method of utilizing the above-mentioned device to measure temperature and strain simultaneously is as follows: the orthogonal polarization dual-wavelength laser 1 is used as the laser light source to be measured, the vibrating target 3 vibrates, and the outgoing laser passes through the polarization selective optical switch 4, and at time t 1 , the polarization selective optical switch is regulated and the output is turned on. Polarization state 1 laser (wavelength λ 1 ), at time t 2 , adjust the polarization selective optical switch to switch the output polarization state 2 laser (wavelength λ 2 ) to the vibrating target, and the outgoing laser is reflected by the reflective structure 31 attached to the vibrating surface of the vibrating target Then, it is fed back to the resonator of the orthogonally polarized dual-wavelength laser 1 to form a self-mixing signal, and the slider 32 is moved along the slide rail 33 under the polarization state 1 laser and the polarization state 2 laser, respectively, to obtain the compensation distance. The compensation distance makes each polarization In order to change the distance between the vibrating target and the orthogonally polarized dual-wavelength laser, the waveforms in the state of the same phase are kept in the same phase or the phase delay is an integer multiple of 2π, so as to obtain a multi-longitudinal mode self-mixing signal with indistinguishable waveforms. At the same time, the attenuator 5 is used to adjust the feedback light. The intensity of the laser self-mixing signal under different laser external cavity lengths under the laser of polarization state 1 and the laser of polarization state 2 is collected by the detector 8, and the electrical signal of the received laser self-mixing signal is analyzed by the signal processing unit 7, and Different compensation distances in polarization state 1 and polarization state 2 can obtain the change values of temperature and strain in the environment where the sensing fiber is located. The specific steps are as follows:

对于多纵模激光器的激光自混合信号,激光器不同纵模仅和自身模式发生干涉,最终形成的激光器自混合信号是各自纵模形成的激光自混合信号强度叠加,根据相关干涉混频理论模型,在不考虑散斑影响条件下,多纵模激光器自混合信号强度为:For the laser self-mixing signal of a multi-longitudinal mode laser, the different longitudinal modes of the laser only interfere with its own mode, and the final laser self-mixing signal is the superposition of the laser self-mixing signal intensity formed by the respective longitudinal modes. According to the relevant interference mixing theoretical model, Without considering the influence of speckle, the self-mixing signal strength of multi-longitudinal mode laser is:

Figure GDA0002612620900000081
Figure GDA0002612620900000081

式(1)中optj为j模式的外腔总光程,β为多纵模激光器中总的起振模式个数,j表示激光器中第j个纵模模式,I0为初始总光强,ΔIj为j模式激光光强变化的幅值,ω0为激光的角频率,c为真空中的光速,ng为激光器谐振腔介质群折射率,L0为激光器谐振腔腔长,c.c.表示前面公式的复共轭计算中,同种材料中激光不同纵模对应的折射率改变可忽略不计;In formula (1), op tj is the total optical path of the external cavity of the j mode, β is the total number of starting modes in the multi-longitudinal mode laser, j is the j-th longitudinal mode mode in the laser, and I 0 is the initial total light intensity , ΔI j is the amplitude of the j-mode laser light intensity change, ω 0 is the angular frequency of the laser, c is the speed of light in vacuum, n g is the refractive index of the laser cavity medium group, L 0 is the laser cavity cavity length, cc In the complex conjugate calculation of the previous formula, the refractive index changes corresponding to different longitudinal modes of the laser in the same material can be ignored;

当传感单元光程或相位发生变化时,有:When the optical path or phase of the sensing unit changes, there are:

optj=op0+δops+δopc=op0+δ(nsLs)+δ(ncLc) (2)op tj =op 0 +δop s +δop c =op 0 +δ(n s L s )+δ(n c L c ) (2)

Figure GDA0002612620900000082
Figure GDA0002612620900000082

式(2)中op0为激光器外腔初始光程,δops为温度应变引起的传感单元光程变化,δopc为补偿光程,nc为外腔空气折射率,ns为传感单元折射率,Ls为激光在传感单元中传输的实际路径的总几何长度,Lc为为补偿长度,式(3)中φ0j为j模式激光在外腔往返一周的初始相位,δφsj为温度变化及应变引起的传感单元相位变化,δφcj为补偿相位变化,测量温度变化及应变时,δφsj=-δφcjIn formula (2), op 0 is the initial optical path of the laser external cavity, δop s is the optical path change of the sensing unit caused by temperature strain, δop c is the compensation optical path, n c is the refractive index of the air in the external cavity, and n s is the sensing element. Unit refractive index, L s is the total geometric length of the actual path of laser transmission in the sensing unit, L c is the compensation length, in formula (3) φ 0j is the initial phase of the j-mode laser in one round trip of the external cavity, δφ sj is the phase change of the sensing unit caused by temperature change and strain, and δφ cj is the compensation phase change. When measuring temperature change and strain, δφ sj = -δφ cj .

各个模式波形保持相同相位或者相位延迟为2π整数倍时,不同纵模模式激光自混合信号叠加不存在波形分立,即:When each mode waveform maintains the same phase or the phase delay is an integer multiple of 2π, there is no waveform separation in the superposition of laser self-mixing signals of different longitudinal mode modes, namely:

optj=2mngL0 (4)op tj = 2mn g L 0 (4)

式(4)中m为激光器的外腔模式级数,为正整数,因此激光器存在一系列的特殊位置点,使叠加后的激光自混合信号不产生波形分立,从式(2)可知,当传感光纤所处环境温度应变改变时,光在传感光纤传输时的光程或相位会发生改变,导致各个模式的optj发生变化,使m值不再是整数,叠加后的激光自混合信号波形将发生分立,此时,通过调节滑动装置,改变外界反馈物位置来补偿光程或相位变化,使叠加后的激光自混合信号波形重新变为完整波形,再通过测量外界反馈物位置得到补偿相位变化,进而获得环境温度应变变化引起的传感单元光程变化变化δops,光波通过长度为L的传感单元后,出射光波的相位延迟可以表示为In formula (4), m is the external cavity mode series of the laser, which is a positive integer. Therefore, the laser has a series of special position points, so that the superimposed laser self-mixing signal does not produce waveform separation. From formula (2), it can be seen that when When the ambient temperature strain of the sensing fiber changes, the optical path or phase of the light in the sensing fiber will change, resulting in a change in the op tj of each mode, so that the m value is no longer an integer, and the superimposed laser self-mixing The signal waveform will be separated. At this time, by adjusting the sliding device, the position of the external feedback object is changed to compensate the optical path or phase change, so that the superimposed laser self-mixing signal waveform becomes a complete waveform again, and then the position of the external feedback object is measured. Compensate the phase change, and then obtain the optical path change δop s of the sensing unit caused by the change of ambient temperature strain. After the light wave passes through the sensing unit of length L, the phase delay of the outgoing light wave can be expressed as

φ=2πnL/λ0=βL (5)φ=2πnL/λ 0 =βL (5)

式中,β为光波在传感单元中的传播常数,λ0是光波在传感介质中的传播波长,n为传感介质折射率,那么光波在外界因素的作用下,相位延迟的变化可以写成如下形式In the formula, β is the propagation constant of the light wave in the sensing unit, λ 0 is the propagation wavelength of the light wave in the sensing medium, n is the refractive index of the sensing medium, then the change of the phase delay of the light wave under the action of external factors can be written in the following form

Δφ=βΔL+LΔβ (6)Δφ=βΔL+LΔβ (6)

式中,第一项表示由长度变化引起的相位延迟改变,第二项表示折射率变化引起的相位延迟改变,应变、温度效应均会引起传感单元长度、折射率的变化,从而造成光波的相位延迟发生改变,由(5)和(6)可以推出环境温度及应变变化引起传感单元相位延迟变化为In the formula, the first term represents the change of the phase delay caused by the change of the length, and the second term represents the change of the phase delay caused by the change of the refractive index. The phase delay changes. From (5) and (6), it can be deduced that the change of the phase delay of the sensing unit caused by the change of ambient temperature and strain is as follows:

δΦs=Λi,TΔT+Λi,εΔε (7)δΦ si,T ΔT+Λ i,ε Δε (7)

当补偿外腔测量处为真空或空气时,折射率为1,即When the measurement of the compensation outer cavity is vacuum or air, the refractive index is 1, that is

δΦs=Λi,TΔT+Λi,εΔε=δΦc=-k0jδLc (8)δΦ si,T ΔT+Λ i,ε Δε=δΦ c =-k 0j δL c (8)

Λi,T称为温度灵敏度系数,Λi,ε为传感单元应变灵敏度系数,以双波长正交偏振光为例:i=1时,Λ1,T,Λ1,ε为偏振态1激光所对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,δΦs1为偏振态1激光传感区温度应变变化时引起的相位变化,i=2时,Λ2,T,Λ2,ε为偏振态2激光对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,δΦs2为偏振态2激光传感区温度应变变化时引起的相位变化,矩阵形式为:Λ i, T is called the temperature sensitivity coefficient, Λ i, ε is the strain sensitivity coefficient of the sensing unit, taking dual-wavelength orthogonally polarized light as an example: when i=1, Λ 1, T , Λ 1, ε are polarization state 1 The temperature sensitivity coefficient of the sensing unit and the strain sensitivity coefficient of the sensing unit corresponding to the laser, δΦ s1 is the phase change caused by the change of temperature strain in the laser sensing area of polarization state 1, when i=2, Λ 2,T , Λ 2, ε is the temperature sensitivity coefficient of the sensing unit and the strain sensitivity coefficient of the sensing unit corresponding to the polarization state 2 laser, δΦ s2 is the phase change caused by the temperature strain change of the polarization state 2 laser sensing area, and the matrix form is:

Figure GDA0002612620900000091
Figure GDA0002612620900000091

其中Λ为灵敏度矩阵,测量过程中通过分时测量不同偏振模式(波长)光源下相同温度和应变下的外腔补偿长度,便可由式(8)和(9)获得传感处的应变和温度的变化值,即Among them, Λ is the sensitivity matrix. During the measurement process, by measuring the compensation length of the external cavity under the same temperature and strain under different polarization modes (wavelength) light sources, the strain and temperature at the sensing point can be obtained from equations (8) and (9). The change value of , that is

Figure GDA0002612620900000101
Figure GDA0002612620900000101

Figure GDA0002612620900000102
Figure GDA0002612620900000102

其中,δLc1为在偏振态1激光通过偏振选择光开关,滑块移动相对初始位置的补偿距离,δLc2为在偏振态2激光通过偏振选择光开关,滑块移动相对初始位置的补偿距离,Among them, δL c1 is the compensation distance when the laser in polarization state 1 passes through the polarization selective optical switch, and the slider moves relative to the initial position, δL c2 is the compensation distance between the laser in polarization state 2 and the polarization selective optical switch, and the slider moves relative to the initial position,

因此,利用分时测量(t1时刻和t2时刻)的方式,通过测量t1时刻下的偏振态1激光下的补偿距离δLc2和测量t2时刻偏振态2激光下的补偿距离δLc2,获得传感光纤所处环境的温度和应变的变化值。Therefore, by means of time-division measurement (time t 1 and time t 2 ), by measuring the compensation distance δL c2 under the laser with polarization state 1 at time t 1 and measuring the compensation distance δL c2 under the laser with polarization state 2 at time t 2 , and obtain the change values of temperature and strain of the environment where the sensing fiber is located.

实施例2Example 2

如图2所示,基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,包括两个不同波长的多纵模激光器11、12,起偏器101、102,保偏耦合器10、传感单元2、振动目标3、偏振选择光开关4、分光元件5、衰减器6和信号处理单元7。传感单元2包括传感光纤,传感光纤置于待测温度和应变的环境内,两个不同波长的多纵模激光器11、12的尾纤各连接一个起偏器101、102,不同波长产生不同偏振态的激光,通过保偏耦合器与传感光纤的一端连接,两个不同波长的多纵模激光器11、12为待测激光光源,出射激光经过传感光纤,从传感光纤的一端射至所述振动目标3上。振动目标3接收正交偏振双波长激光光源1出射的激光并通过振动目标3上的反射结构31反馈回两个不同波长的多纵模激光器11、12谐振腔内,形成自混合信号。振动目标3底部固定于滑块32上,滑块32设置于滑轨33上并且可沿滑轨33水平移动,滑轨33与出射激光处于同一直线上。两个不同波长的多纵模激光器11、12与传感单元2之间的光路上依次设置起偏器101、102、保偏耦合器10、偏振选择光开关4和分光元件5衰减器6。偏振选择光开关4接收两个不同波长的多纵模激光器11、12出射的激光,且将激光切换两个输出正交的偏振态1激光和偏振态2激光,偏振态1激光波长为λ1,偏振态2激光波长为λ2。分光元件5为耦合器,用于将所述自混合信号分束至探测器8上,所述探测器8转化接收到光信号为电信号,信号处理单元7接收所述电信号进行分析处理,同时获得传感光纤所处环境的温度和应变的变化值。As shown in Figure 2, the device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers includes two multi-longitudinal mode lasers 11, 12 with different wavelengths, polarizers 101, 102, polarization maintaining Coupler 10 , sensing unit 2 , vibrating target 3 , polarization selective optical switch 4 , light splitting element 5 , attenuator 6 and signal processing unit 7 . The sensing unit 2 includes a sensing fiber, the sensing fiber is placed in the environment of the temperature and strain to be measured, and the pigtails of the two multi-longitudinal mode lasers 11 and 12 with different wavelengths are connected to a polarizer 101 and 102 respectively. Lasers with different polarization states are generated, and are connected to one end of the sensing fiber through a polarization-maintaining coupler. Two multi-longitudinal mode lasers 11 and 12 with different wavelengths are the laser light sources to be measured. One end shoots onto the vibrating target 3 . The vibrating target 3 receives the laser light emitted by the orthogonally polarized dual-wavelength laser light source 1 and feeds it back into the resonators of the two multi-longitudinal mode lasers 11 and 12 with different wavelengths through the reflection structure 31 on the vibrating target 3 to form a self-mixing signal. The bottom of the vibrating target 3 is fixed on the slider 32 , the slider 32 is arranged on the slide rail 33 and can move horizontally along the slide rail 33 , and the slide rail 33 and the outgoing laser are on the same straight line. Polarizers 101 and 102 , polarization maintaining coupler 10 , polarization selective optical switch 4 and beam splitting element 5 attenuator 6 are sequentially arranged on the optical path between two multi-longitudinal mode lasers 11 and 12 of different wavelengths and the sensing unit 2 . The polarization selective optical switch 4 receives the laser light emitted by the two multi-longitudinal mode lasers 11 and 12 with different wavelengths, and switches the laser light to output orthogonal polarization state 1 laser and polarization state 2 laser, and the wavelength of the polarization state 1 laser is λ 1 , the laser wavelength of polarization state 2 is λ 2 . The optical splitting element 5 is a coupler for splitting the self-mixing signal to the detector 8, the detector 8 converts the received optical signal into an electrical signal, and the signal processing unit 7 receives the electrical signal for analysis and processing, At the same time, the change values of temperature and strain of the environment where the sensing fiber is located are obtained.

在上述装置中,激光光源1正交偏振双波长激光光源由两个不同的波长多纵模激光器11、12、一组起偏器101、102和保偏耦合器10组成;振动目标3为信号发生器驱动的扬声器或者压电陶瓷;偏振选择光开关4为液晶消色差偏振选择光开关、磁光型波长选择光开关或棱镜型波长选择光开关;传感光纤为传感光纤为单模光纤、多模光纤、双折射光纤或光子晶体光纤。上述装置中还包括衰减器6和准直器9,衰减器6位于分光元件5和传感单元2之间,准直器9位于传感单元和振动目标之间,所述传感光纤的另一端与所述准直器9连接,准直器9保证激光平行出射至目标物体表面;信号处理单元7为计算机或者示波器。In the above device, the laser light source 1 is composed of two different wavelength multi-longitudinal mode lasers 11, 12, a set of polarizers 101, 102 and a polarization-maintaining coupler 10; the vibration target 3 is a signal The speaker or piezoelectric ceramics driven by the generator; the polarization selective optical switch 4 is a liquid crystal achromatic polarization selective optical switch, a magneto-optical wavelength selective optical switch or a prismatic wavelength selective optical switch; the sensing optical fiber is the sensing optical fiber and the single-mode optical fiber , multimode fiber, birefringent fiber or photonic crystal fiber. The above-mentioned device also includes an attenuator 6 and a collimator 9, the attenuator 6 is located between the light splitting element 5 and the sensing unit 2, the collimator 9 is located between the sensing unit and the vibration target, and the other side of the sensing fiber is One end is connected with the collimator 9, and the collimator 9 ensures that the laser is emitted in parallel to the surface of the target object; the signal processing unit 7 is a computer or an oscilloscope.

利用上述装置同时测量温度和应变的方法为:两个不同波长的多纵模激光器11、12作为待测激光光源,振动目标3发生振动,同时出射激光经过偏振选择光开关4,t1时刻,调控偏振选择光开输出偏振态1激光(波长λ1),t2时刻,调节偏振选择光开关切换输出偏振态2激光(波长λ2)到振动目标上,出射激光经振动目标的振动面附着有的反射结构31反射后,两个不同波长的多纵模激光器11、12谐振腔内形成自混合信号,分别在偏振态1激光和偏振态2激光下使滑块32沿滑轨33移动,获得补偿距离,所述补偿距离使各个偏振态下的波形保持相同相位或者相位延迟为2π的整数倍,以改变振动目标距离正交偏振双波长激光光源的距离,获得波形不分立的多纵模自混合信号,同时利用衰减器5调节反馈光的强度,利用探测器8采集在偏振态1激光和偏振态2激光下不同激光器外腔长度下的激光自混合信号,利用信号处理单元7对接收的激光自混合信号的电信号进行分析,以及偏振态1和偏振态2下不同的补偿距离得出同时得出传感光纤所处环境的温度和应变的变化值,具体步骤如下:The method for simultaneously measuring temperature and strain by using the above-mentioned device is as follows: two multi-longitudinal mode lasers 11 and 12 with different wavelengths are used as the laser light source to be measured, the vibrating target 3 vibrates, and the outgoing laser light passes through the polarization selective optical switch 4 at the time t1 . Adjust the polarization selective light switch to output the polarization state 1 laser (wavelength λ 1 ), at time t 2 , adjust the polarization selective optical switch to switch the output polarization state 2 laser (wavelength λ 2 ) to the vibrating target, and the outgoing laser is attached to the vibrating surface of the vibrating target After reflection by some reflective structures 31, two multi-longitudinal mode lasers 11 and 12 with different wavelengths form a self-mixing signal in the resonator cavity, and the slider 32 is moved along the slide rail 33 under the polarization state 1 laser and the polarization state 2 laser, respectively. The compensation distance is obtained. The compensation distance keeps the waveforms in each polarization state in the same phase or the phase delay is an integer multiple of 2π, so as to change the distance between the vibration target and the orthogonally polarized dual-wavelength laser light source, and obtain multi-longitudinal modes with indistinguishable waveforms. At the same time, the intensity of the feedback light is adjusted by the attenuator 5, the laser self-mixing signal under different laser external cavity lengths under the polarization state 1 laser and the polarization state 2 laser is collected by the detector 8, and the signal processing unit 7 is used to receive the signal. The electrical signal of the laser self-mixing signal is analyzed, and the different compensation distances in polarization state 1 and polarization state 2 are obtained. At the same time, the changes in temperature and strain of the environment where the sensing fiber is located are obtained. The specific steps are as follows:

对于多纵模激光器的激光自混合信号,激光器不同纵模仅和自身模式发生干涉,最终形成的激光器自混合信号是各自纵模形成的激光自混合信号强度叠加,根据相关干涉混频理论模型,在不考虑散斑影响条件下,多纵模激光器自混合信号强度为:For the laser self-mixing signal of a multi-longitudinal mode laser, the different longitudinal modes of the laser only interfere with its own mode, and the final laser self-mixing signal is the superposition of the laser self-mixing signal intensity formed by the respective longitudinal modes. According to the relevant interference mixing theoretical model, Without considering the effect of speckle, the self-mixing signal strength of multi-longitudinal mode laser is:

Figure GDA0002612620900000121
Figure GDA0002612620900000121

式(1)中optj为j模式的外腔总光程,β为多纵模激光器中总的起振模式个数,j表示激光器中第j个纵模模式,I0为初始总光强,ΔIj为j模式激光光强变化的幅值,ω0为激光的角频率,c为真空中的光速,ng为激光器谐振腔介质群折射率,L0为激光器谐振腔腔长,c.c.表示前面公式的复共轭计算中,同种材料中激光不同纵模对应的折射率改变可忽略不计;In formula (1), op tj is the total optical path of the external cavity of the j mode, β is the total number of starting modes in the multi-longitudinal mode laser, j is the j-th longitudinal mode mode in the laser, and I 0 is the initial total light intensity , ΔI j is the amplitude of the j-mode laser light intensity change, ω 0 is the angular frequency of the laser, c is the speed of light in vacuum, n g is the refractive index of the laser cavity medium group, L 0 is the laser cavity cavity length, cc In the complex conjugate calculation of the previous formula, the refractive index changes corresponding to different longitudinal modes of the laser in the same material can be ignored;

当传感单元光程或相位发生变化时,有:When the optical path or phase of the sensing unit changes, there are:

optj=op0+δops+δopc=op0+δ(nsLs)+δ(ncLc) (2)op tj =op 0 +δop s +δop c =op 0 +δ(n s L s )+δ(n c L c ) (2)

Figure GDA0002612620900000122
Figure GDA0002612620900000122

式(2)中op0为激光器外腔初始光程,δops为温度应变引起的传感单元光程变化,δopc为补偿光程,nc为外腔空气折射率,ns为传感单元折射率,Ls为激光在传感单元中传输的实际路径的总几何长度,Lc为为补偿长度,式(3)中φ0j为j模式激光在外腔往返一周的初始相位,δφsj为温度变化及应变引起的传感单元相位变化,δφcj为补偿相位变化,测量温度变化及应变时,δφsj=-δφcjIn formula (2), op 0 is the initial optical path of the laser external cavity, δop s is the optical path change of the sensing unit caused by temperature strain, δop c is the compensation optical path, n c is the refractive index of the air in the external cavity, and n s is the sensing element. Unit refractive index, L s is the total geometric length of the actual path of laser transmission in the sensing unit, L c is the compensation length, in formula (3) φ 0j is the initial phase of the j-mode laser in one round trip of the external cavity, δφ sj is the phase change of the sensing unit caused by temperature change and strain, and δφ cj is the compensation phase change. When measuring temperature change and strain, δφ sj = -δφ cj .

各个模式波形保持相同相位或者相位延迟为2π整数倍时,不同纵模模式激光自混合信号叠加不存在波形分立,即:When each mode waveform maintains the same phase or the phase delay is an integer multiple of 2π, there is no waveform separation in the superposition of laser self-mixing signals of different longitudinal mode modes, namely:

optj=2mngL0 (4)op tj = 2mn g L 0 (4)

式(4)中m为激光器的外腔模式级数,为正整数,因此激光器存在一系列的特殊位置点,使叠加后的激光自混合信号不产生波形分立,从式(2)可知,当传感光纤所处环境温度应变改变时,光在传感光纤传输时的光程或相位会发生改变,导致各个模式的optj发生变化,使m值不再是整数,叠加后的激光自混合信号波形将发生分立,此时,通过调节滑动装置,改变外界反馈物位置来补偿光程或相位变化,使叠加后的激光自混合信号波形重新变为完整波形,再通过测量外界反馈物位置得到补偿相位变化,进而获得环境温度应变变化引起的传感单元光程变化变化δops,光波通过长度为L的传感单元后,出射光波的相位延迟可以表示为In formula (4), m is the external cavity mode series of the laser, which is a positive integer. Therefore, the laser has a series of special position points, so that the superimposed laser self-mixing signal does not produce waveform separation. From formula (2), it can be seen that when When the ambient temperature strain of the sensing fiber changes, the optical path or phase of the light in the sensing fiber will change, resulting in a change in the op tj of each mode, so that the m value is no longer an integer, and the superimposed laser self-mixing The signal waveform will be separated. At this time, by adjusting the sliding device, the position of the external feedback object is changed to compensate the optical path or phase change, so that the superimposed laser self-mixing signal waveform becomes a complete waveform again, and then the position of the external feedback object is measured. Compensate the phase change, and then obtain the change δop s of the optical path of the sensing unit caused by the change of ambient temperature strain. After the light wave passes through the sensing unit of length L, the phase delay of the outgoing light wave can be expressed as

φ=2πnL/λ0=βL (5)φ=2πnL/λ 0 =βL (5)

式中,β为光波在传感单元中的传播常数,λ0是光波在传感介质中的传播波长,n为传感介质折射率,那么光波在外界因素的作用下,相位延迟的变化可以写成如下形式In the formula, β is the propagation constant of the light wave in the sensing unit, λ 0 is the propagation wavelength of the light wave in the sensing medium, n is the refractive index of the sensing medium, then the change of the phase delay of the light wave under the action of external factors can be written in the following form

Δφ=βΔL+LΔβ (6)Δφ=βΔL+LΔβ (6)

式中,第一项表示由长度变化引起的相位延迟改变,第二项表示折射率变化引起的相位延迟改变,应变、温度效应均会引起传感单元长度、折射率的变化,从而造成光波的相位延迟发生改变,由(5)和(6)可以推出环境温度及应变变化引起传感单元相位延迟变化为In the formula, the first term represents the change of the phase delay caused by the change of the length, and the second term represents the change of the phase delay caused by the change of the refractive index. The phase delay changes. From (5) and (6), it can be deduced that the change of the phase delay of the sensing unit caused by the change of ambient temperature and strain is as follows:

δΦs=Λi,TΔT+Λi,εΔε (7)δΦ si,T ΔT+Λ i,ε Δε (7)

当补偿外腔测量处为真空或空气时,折射率为1,即When the measurement of the compensation outer cavity is vacuum or air, the refractive index is 1, that is

δΦs=Λi,TΔT+Λi,εΔε=δΦc=-k0jδLc (8)δΦ si,T ΔT+Λ i,ε Δε=δΦ c =-k 0j δL c (8)

Λi,T称为温度灵敏度系数,Λi,ε为传感单元应变灵敏度系数,以双波长正交偏振光为例:i=1时,Λ1,T,Λ1,ε为偏振态1激光所对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,δΦs1为偏振态1激光传感区温度应变变化时引起的相位变化,i=2时,Λ2,T,Λ2,ε为偏振态2激光对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,δΦs2为偏振态2激光传感区温度应变变化时引起的相位变化,矩阵形式为:Λ i, T is called the temperature sensitivity coefficient, Λ i, ε is the strain sensitivity coefficient of the sensing unit, taking dual-wavelength orthogonally polarized light as an example: when i=1, Λ 1, T , Λ 1, ε are polarization state 1 The temperature sensitivity coefficient of the sensing unit and the strain sensitivity coefficient of the sensing unit corresponding to the laser, δΦ s1 is the phase change caused by the change of temperature strain in the laser sensing area of polarization state 1, when i=2, Λ 2,T , Λ 2, ε is the temperature sensitivity coefficient of the sensing unit and the strain sensitivity coefficient of the sensing unit corresponding to the polarization state 2 laser, δΦ s2 is the phase change caused by the temperature strain change of the polarization state 2 laser sensing area, and the matrix form is:

Figure GDA0002612620900000141
Figure GDA0002612620900000141

其中Λ为灵敏度矩阵,测量过程中通过分时测量不同偏振模式(波长)光源下相同温度和应变下的外腔补偿长度,便可由式(8)和(9)获得传感处的应变和温度的变化值,即Among them, Λ is the sensitivity matrix. During the measurement process, by measuring the compensation length of the external cavity under the same temperature and strain under different polarization modes (wavelength) light sources, the strain and temperature at the sensing point can be obtained from equations (8) and (9). The change value of , that is

Figure GDA0002612620900000142
Figure GDA0002612620900000142

Figure GDA0002612620900000143
Figure GDA0002612620900000143

其中,δLc1为在偏振态1激光通过偏振选择光开关,滑块移动相对初始位置的补偿距离,δLc2为在偏振态2激光通过偏振选择光开关,滑块移动相对初始位置的补偿距离,Among them, δL c1 is the compensation distance when the laser in polarization state 1 passes through the polarization selective optical switch, and the slider moves relative to the initial position, δL c2 is the compensation distance between the laser in polarization state 2 and the polarization selective optical switch, and the slider moves relative to the initial position,

因此,利用分时测量(t1时刻和t2时刻)的方式,通过测量t1时刻下的偏振态1激光下的补偿距离δLc2和测量t2时刻偏振态2激光下的补偿距离δLc2,获得传感光纤所处环境的温度和应变的变化值。Therefore, by means of time-division measurement (time t 1 and time t 2 ), by measuring the compensation distance δL c2 under the laser with polarization state 1 at time t 1 and measuring the compensation distance δL c2 under the laser with polarization state 2 at time t 2 , and obtain the change values of temperature and strain of the environment where the sensing fiber is located.

图3给出了190mm长的bow-tie型光纤作为传感单元,在温度从5℃到100℃之间变化对两个波长正交偏振激光(波长分别为633nm,670nm)自混合干涉相位影响,及应变从25μm到500μm之间变化对上述两个波长正交偏振激光自混合干涉相位影响。Λ1,T=1.156rad/m℃,Λ1,ε=0.0677rad/μm为偏振态1激光(λ1=633nm)所对应的温度灵敏度系数和应变灵敏度系数;Λ2,T=1.229rad/m℃,Λ2,ε=0.0611rad/μm为偏振态2激光(λ2=670nm)所对应的温度灵敏度系数和应变灵敏度系数。从图3可以看出温度和应变对两个波长正交偏振激光的影响是各不相同,符合上述理论分析要求,可以实现上述技术方案。Figure 3 shows the effect of a 190mm long bow-tie fiber as a sensing unit on the self-mixing interference phase of two wavelengths of orthogonally polarized lasers (wavelengths of 633nm and 670nm) when the temperature varies from 5°C to 100°C. , and the effect of strain from 25 μm to 500 μm on the self-mixing interference phase of the above-mentioned two wavelengths orthogonally polarized lasers. Λ 1,T =1.156rad/m°C, Λ 1,ε =0.0677rad/μm is the temperature sensitivity coefficient and strain sensitivity coefficient corresponding to the polarization state 1 laser (λ 1 =633nm); Λ 2,T =1.229rad/ m°C, Λ 2,ε =0.0611rad/μm is the temperature sensitivity coefficient and strain sensitivity coefficient corresponding to the polarization state 2 laser (λ 2 =670 nm). It can be seen from Figure 3 that the effects of temperature and strain on the two wavelengths of orthogonally polarized laser light are different, which meets the above theoretical analysis requirements and can realize the above technical solution.

基于上述技术方案建立实验装置,实验装置采用两个不同波长的多纵模激光器为光源,利用仿真软件进行模拟仿真,为简单起见,我们这里仅考虑幅度相同的双模正交偏振双波长多纵模激光自混合信号的强度叠加波形。模拟中采用双波长分别为633nm,670nm,初始外腔距离为325mm,外腔光纤总长度为20m,传感单元光纤为长度为190mm,仿真模拟图如图3所示。从图4可以看出,当温差和应变均为0时,此时激光器外腔初始光程为29325mm,为ngL0的整数倍,m=29325,此时激光自混合信号波形不发生分立。当传感单元温度增加5℃且应变大小为25μm时,导致传感单元相位发生微小变动,重叠后的激光自混合信号波形发生分立,此时我们微调补偿外腔长度为0.44mm(对670nm波长激光),0.50mm(对633nm波长激光)此时激光器外腔相位再次成为φg的整数倍,m=29325,叠加后的激光自混合信号波形分立消失。将补偿外腔长度为0.44mm(对670nm波长激光),0.50mm(对633nm波长激光)代入公式(10)和(11),计算得出ΔT=5℃,Δε=25μm。Based on the above technical solution, an experimental device is established. The experimental device uses two multi-longitudinal mode lasers with different wavelengths as light sources, and uses simulation software to simulate. For simplicity, we only consider dual-mode orthogonal polarization dual-wavelength multi-longitudinal lasers with the same amplitude. The intensity superposition waveform of the mode laser self-mixing signal. In the simulation, the dual wavelengths are 633nm and 670nm, the initial outer cavity distance is 325mm, the total length of the outer cavity fiber is 20m, and the length of the sensing unit fiber is 190mm. The simulation diagram is shown in Figure 3. It can be seen from Figure 4 that when the temperature difference and strain are both 0, the initial optical path of the laser external cavity is 29325mm, which is an integer multiple of n g L 0 , m=29325, and the laser self-mixing signal waveform does not separate at this time. . When the temperature of the sensing unit increases by 5°C and the strain size is 25 μm, the phase of the sensing unit changes slightly, and the overlapping laser self-mixing signal waveforms are separated. Laser), 0.50mm (for 633nm wavelength laser) At this time, the laser external cavity phase becomes an integer multiple of φ g again, m=29325, and the superimposed laser self-mixing signal waveform disappears separately. Substitute the compensation external cavity length of 0.44mm (for 670nm wavelength laser) and 0.50mm (for 633nm wavelength laser) into formulas (10) and (11), and calculate ΔT=5°C, Δε=25μm.

综上所述,利用分时测量的方式,通过测量补偿距离,最终获得相应传感单元温度和应变的变化,实现对激光器传感单元应变和温度的同时测量。To sum up, by using the time-sharing measurement method, by measuring the compensation distance, the changes of the temperature and strain of the corresponding sensing unit are finally obtained, and the simultaneous measurement of the strain and temperature of the laser sensing unit is realized.

上述仅本发明较佳可行实施例,并非是对本发明的限制,本发明也并不限于上述举例,本技术领域的技术人员,在本发明的实质范围内,所作出的变化、改型、添加或替换,也应属于本发明的保护范围。The above are only preferred feasible embodiments of the present invention, and are not intended to limit the present invention, and the present invention is not limited to the above examples. Those skilled in the art, within the essential scope of the present invention, can Or replacement, should also belong to the protection scope of the present invention.

Claims (8)

1.基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,其特征在于,包括激光光源、传感单元、振动目标、偏振选择光开关、分光元件和信号处理单元,1. a device for synchronously measuring temperature and strain based on orthogonal polarization dual-wavelength laser multi-longitudinal mode self-mixing effect, it is characterized in that, comprises laser light source, sensing unit, vibration target, polarization selective optical switch, spectroscopic element and signal processing unit, 所述激光光源发射的激光为两个不同波长的正交偏振光,The laser light emitted by the laser light source is orthogonally polarized light with two different wavelengths, 所述激光光源、传感单元、振动目标依次设置,所述偏振选择光开关和所述分光元件依次设置在所述激光光源与所述传感单元之间的光路上,The laser light source, the sensing unit, and the vibrating target are arranged in sequence, and the polarization selective optical switch and the light splitting element are sequentially arranged on the optical path between the laser light source and the sensing unit, 所述传感单元包括传感光纤,所述传感光纤置于待测温度和应变的环境内,所述激光光源发射的激光,经过分光元件进入所述传感光纤,The sensing unit includes a sensing fiber, the sensing fiber is placed in an environment where the temperature and strain are to be measured, and the laser light emitted by the laser light source enters the sensing fiber through the light splitting element, 所述振动目标底部固定于滑块上,所述滑块设置于滑轨上并且可沿滑轨水平移动,所述振动目标接收激光光源出射的激光并通过所述振动目标的振动面附着有的反射结构反馈回激光光源谐振腔内,形成自混合信号,The bottom of the vibration target is fixed on the slider, the slider is arranged on the slide rail and can move horizontally along the slide rail, the vibration target receives the laser light emitted by the laser light source and is attached to the vibration surface of the vibration target. The reflective structure is fed back into the resonator of the laser light source to form a self-mixing signal, 所述偏振选择光开关接收所述激光光源出射的激光,且将所述激光切换两个输出正交的偏振态1激光和偏振态2激光,所述偏振态1激光波长为λ1,所述偏振态2激光波长为λ2The polarization selective optical switch receives the laser light emitted by the laser light source, and switches the laser light to output orthogonal polarization state 1 laser and polarization state 2 laser. The wavelength of the polarization state 1 laser is λ 1 , and the The laser wavelength of polarization state 2 is λ 2 , 所述分光元件为耦合器,用于将所述自混合信号分束至探测器上,所述探测器转化接收到光信号转为电信号,The light splitting element is a coupler for splitting the self-mixing signal to the detector, and the detector converts the received optical signal into an electrical signal, 所述信号处理单元接收所述电信号进行分析处理,同时获得所述传感光纤所处环境的温度和应变的变化值。The signal processing unit receives the electrical signal for analysis and processing, and simultaneously obtains changes in temperature and strain of the environment where the sensing fiber is located. 2.根据权利要求1所述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,其特征在于,所述激光光源为正交偏振双波长激光器,所述正交偏振双波长激光器选自正交偏振Zeeman双频激光器、正交偏振Nd:YAP双波长激光器、正交偏振He-Ne双频激光器中的任意一种;2. The device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers according to claim 1, wherein the laser light source is an orthogonally polarized dual-wavelength laser, and the orthogonal The polarization dual-wavelength laser is selected from any one of the orthogonal polarization Zeeman dual-frequency laser, the orthogonal polarization Nd:YAP dual-wavelength laser, and the orthogonal polarization He-Ne dual-frequency laser; 或者所述激光光源由两个不同的波长多纵模激光器、一组起偏器和保偏耦合器组成。Or the laser light source consists of two multi-longitudinal mode lasers with different wavelengths, a set of polarizers and a polarization-maintaining coupler. 3.根据权利要求1所述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,其特征在于,所述振动目标为信号发生器驱动的扬声器或者压电陶瓷。3 . The device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers according to claim 1 , wherein the vibration target is a speaker or a piezoelectric ceramic driven by a signal generator. 4.根据权利要求1所述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,其特征在于,所述偏振选择光开关为液晶消色差偏振选择光开关、磁光型波长选择光开关或棱镜型波长选择光开关。4. The device for synchronously measuring temperature and strain based on orthogonal polarization dual-wavelength laser multi-longitudinal mode self-mixing effect according to claim 1, wherein the polarization selective optical switch is a liquid crystal achromatic polarization selective optical switch, a magnetic Optical wavelength selective optical switch or prismatic wavelength selective optical switch. 5.根据权利要求1所述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,其特征在于,所述传感光纤为单模光纤、多模光纤、双折射光纤或光子晶体光纤。5. The device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers according to claim 1, wherein the sensing fiber is a single-mode fiber, a multi-mode fiber, a birefringent fiber Fiber or photonic crystal fiber. 6.根据权利要求1所述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,其特征在于,还包括衰减器和准直器,所述衰减器位于所述分光元件和所述传感单元之间,所述准直器位于传感单元和振动目标之间,所述传感光纤的一端与所述准直器连接。6 . The device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers according to claim 1 , further comprising an attenuator and a collimator, wherein the attenuator is located in the Between the spectroscopic element and the sensing unit, the collimator is located between the sensing unit and the vibration target, and one end of the sensing fiber is connected to the collimator. 7.根据权利要求1所述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置,其特征在于,所述信号处理单元为计算机或者示波器。7 . The device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers according to claim 1 , wherein the signal processing unit is a computer or an oscilloscope. 8 . 8.依据权利要求1-7中任意一项中所述的基于正交偏振双波长激光多纵模自混合效应同步测量温度和应变的装置同时测量温度和应变的方法,其特征在于,包括如下步骤:8. The method for simultaneously measuring temperature and strain according to the device for synchronously measuring temperature and strain based on the multi-longitudinal mode self-mixing effect of orthogonally polarized dual-wavelength lasers described in any one of claims 1-7, characterized in that, comprising the following steps: step: (1)所述激光光源出射激光,所述激光光源发射的激光为两个不同波长的正交偏振光,所述振动目标设置为振动状态,调节所述偏振选择光开关,使波长为λ1的偏振态1激光通过,观察信号处理单元上的多纵模自混合信号,移动所述滑块,使所述信号处理单元波形保持相同相位或者相位延迟为2π整数倍,记录下滑块移动的第一补偿距离δLc1(1) The laser light source emits laser light, the laser light emitted by the laser light source is orthogonally polarized light of two different wavelengths, the vibration target is set to a vibration state, and the polarization selective optical switch is adjusted so that the wavelength is λ 1 The polarization state 1 laser passes through, observe the multi-longitudinal mode self-mixing signal on the signal processing unit, move the slider, keep the waveform of the signal processing unit in the same phase or the phase delay is an integer multiple of 2π, and record the movement of the slider. the first compensation distance δL c1 ; (2)调节所述偏振选择光开关,使波长为λ2的偏振态2激光通过,观察信号处理单元上的多纵模自混合信号,移动所述滑块,使所述信号处理单元波形保持相同相位或者相位延迟为2π整数倍,记录下滑块移动的第二补偿距离δLc2(2) Adjust the polarization selective optical switch so that the polarization state 2 laser with the wavelength of λ 2 passes through, observe the multi-longitudinal mode self-mixing signal on the signal processing unit, and move the slider to keep the waveform of the signal processing unit. The same phase or phase delay is an integer multiple of 2π, and the second compensation distance δL c2 of the slider movement is recorded; (3)根据步骤(1)所获得的第一补偿距离δLc1和步骤(2)中所获得的第二补偿距离δLc2联立方程组计算得出传感光纤所处环境的温度变化值(ΔT)和应变的变化值(Δε):(3) According to the simultaneous equations of the first compensation distance δL c1 obtained in step (1) and the second compensation distance δL c2 obtained in step (2), the temperature change value of the environment where the sensing fiber is located ( ΔT) and change in strain (Δε):
Figure FDA0002612620890000031
Figure FDA0002612620890000031
Figure FDA0002612620890000032
Figure FDA0002612620890000032
式中,Λ1,T,Λ1,ε为偏振态1激光所对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,Λ2,T,Λ2,ε为偏振态2激光对应的传感单元温度灵敏度系数和传感单元应变灵敏度系数,k0j为真空中j模式的波数,j指激光中第j个纵模模式。In the formula, Λ 1,T , Λ 1,ε are the temperature sensitivity coefficient and strain sensitivity coefficient of the sensing unit corresponding to the polarization state 1 laser, Λ 2,T , Λ 2,ε are the polarization state 2 laser corresponding to The temperature sensitivity coefficient of the sensing unit and the strain sensitivity coefficient of the sensing unit, k 0j is the wave number of the j mode in vacuum, and j refers to the jth longitudinal mode mode in the laser.
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