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CN109716099A - Sensor module and detection method - Google Patents

Sensor module and detection method Download PDF

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Publication number
CN109716099A
CN109716099A CN201780058288.XA CN201780058288A CN109716099A CN 109716099 A CN109716099 A CN 109716099A CN 201780058288 A CN201780058288 A CN 201780058288A CN 109716099 A CN109716099 A CN 109716099A
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China
Prior art keywords
filter
ingredient
flow path
fluid
sensor module
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Chinese (zh)
Inventor
阿部真一
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Kyocera Corp
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Kyocera Corp
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Priority to CN202210436231.1A priority Critical patent/CN114935467A/en
Publication of CN109716099A publication Critical patent/CN109716099A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2202Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2247Sampling from a flowing stream of gas
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00Investigating materials by mechanical methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography
    • G01N30/26Conditioning of the fluid carrier; Flow patterns
    • G01N30/28Control of physical parameters of the fluid carrier
    • G01N30/34Control of physical parameters of the fluid carrier of fluid composition, e.g. gradient
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/34Purifying; Cleaning

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
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  • General Health & Medical Sciences (AREA)
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  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

传感器模块具备:传感器部,检测第1成分;第1流路,向传感器部供给被检查流体;和第2流路,向传感器部供给对照流体,该对照流体包含第2成分,该第2成分包含在被检查流体中且不同于第1成分,第2流路具有从对照流体中降低第1成分的量的第1过滤器。

The sensor module includes: a sensor part that detects a first component; a first flow path that supplies a fluid to be tested to the sensor part; and a second flow path that supplies a reference fluid to the sensor part, the reference fluid containing a second component, the second component Different from the first component contained in the fluid to be examined, the second flow path has a first filter that reduces the amount of the first component from the control fluid.

Description

Sensor module and detection method
This application claims the priority of Japanese Patent Application 2016-194409 (applying on September 30th, 2016), in order to It is integrally incorporated herein referring to and by disclosing for this application.
Technical field
This disclosure relates to sensor module and detection method.
Background technique
It is known in the art that the sensor module of the specific substance in detection fluid.For example, in patent document 1 In, disclose the gas componant detection device for having gas introduction part and gas detection section.
Citation
Patent document
Patent document 1:JP special open 2010-249556 bulletin
Summary of the invention
The sensor module that one embodiment of the disclosure is related to has: the sensor portion of the 1st ingredient of detection;To the biography Sensor portion supplies the 1st flow path for being examined fluid;With the 2nd flow path to sensor portion supply comparative fluid, the control stream Body includes the 2nd ingredient, and the 2nd ingredient is included in the examined fluid and is different from the 1st ingredient.2nd flow path The 1st filter with the amount for reducing the 1st ingredient from the comparative fluid.
The detection method that one embodiment of the disclosure is related to is executed using sensor module, sensor module tool It is standby: to be set to the 1st supply unit of the 1st flow path;It is set to the of the 2nd flow path of the 2nd filter with the amount for reducing the 1st ingredient 2 supply units: and sensor portion.The detection method includes: by driving the 1st supply unit, thus via the 1st flow path The step of being examined fluid is supplied to the sensor portion;By driving the 2nd supply unit, thus via the 2nd flow path The step of supplying comparative fluid to the sensor portion, the comparative fluid include the 2nd ingredient, and the 2nd ingredient is included in the quilt It checks in fluid and is different from the 1st ingredient;With the step of detecting 1 ingredient in the sensor portion.
Detailed description of the invention
Fig. 1 is the schematic diagram for the sensor module that an embodiment of the disclosure is related to.
Fig. 2 is the functional block diagram for indicating the schematic construction of sensor module of Fig. 1.
Fig. 3 is the figure for schematically showing the flowing of the fluid in the sensor module of Fig. 1.
Fig. 4 be indicate Fig. 2 control unit performed by processing an example flow chart.
Fig. 5 is the figure for indicating a variation of sensor module.
Fig. 6 is the figure for indicating a variation of sensor module.
Fig. 7 is the figure for indicating a variation of sensor module.
Specific embodiment
Hereinafter, be described with reference to this disclosure relates to embodiment.
Fig. 1 is the schematic diagram for the sensor module 10 that an embodiment of the disclosure is related to.Sensor module 10 for example has Standby shell 20.Fig. 1 is illustrated in shell 20 with the state for removing the face of a part of shell 20 for convenience of description Portion.Fluid (examined fluid) of the sensor module 10 based on check object and as comparison other fluid (comparative fluid) come Calculate the concentration for being examined the test object ingredient that the 1st ingredient is included as in fluid.
Sensor module 10 has inside shell 20: chamber 30, the 1st supply unit 40a, the 2nd supply unit 40b, the 1st flow path 50a, the 2nd flow path 50b, the 3rd flow path 50c and electronic circuit board (hereinafter referred to as " substrate ") 60.
Chamber 30 has sensor portion in inside.The 1st flow path 50a, the 2nd flow path 50b and the 3rd flow path are connected in chamber 30 50c.Fluid is supplied from the 1st flow path 50a and the 2nd flow path 50b to chamber 30.Fluid is discharged from the 3rd flow path 50c in chamber 30.Chamber Sensor portion in room 30 has multiple reacting parts.Reacting part is e.g. membranaceous.Reacting part reacts with specific ingredient.It is more At least any one reacting part in a reacting part reacts with test object ingredient.That is, in multiple reacting parts at least Any one reacting part detects test object ingredient.Reacting part is occurred by the specific ingredient for including in fluid-absorbent Deformation.Reacting part is for example made of materials such as polystyrene, neoprene, polymethyl methacrylate or NC Nitroncelluloses. Reacting part output is corresponding to the signal reacted between specific ingredient.Such as the signal is exported as voltage value.
1st supply unit 40a and the 2nd supply unit 40b are respectively arranged in the 1st flow path 50a and the 2nd flow path 50b.1st supplies Examined fluid and comparative fluid are supplied to chamber 30 respectively to portion 40a and the 2nd supply unit 40b.1st supply unit 40a And the 2nd supply unit 40b be for example made of respectively piezoelectric pump.
1st flow path 50a and the 2nd flow path 50b are for example made of the component of the tubuloses such as pipe.It is examined fluid and passes through the 1st stream Chamber 30 is supplied to after the 50a of road.Comparative fluid is supplied to chamber 30 after passing through the 2nd flow path 50b.1st flow path 50a and 2 flow path 50b are respectively provided with filter.Detailed feelings about the 1st flow path 50a and the 2nd flow path the 50b filter being respectively provided with Condition is described by after.
3rd flow path 50c is for example made of the component of the tubuloses such as pipe.The stream of chamber 30 is supplied to from the 3rd flow path 50c discharge Body.
Substrate 60 installs control unit and storage unit of aftermentioned sensor module 10 etc..
Fig. 2 is the functional block diagram for indicating the schematic construction of sensor module 10 of Fig. 1.The sensor module 10 of Fig. 2 has: Control unit 61, storage unit 62, sensor portion 31, the 1st supply unit 40a and the 2nd supply unit 40b.
Sensor portion 31 is provided to as described above in chamber 30.Sensor portion 31 is by being exported from each reacting part Signal be supplied to control unit 61.
1st supply unit 40a and the 2nd control of the supply unit 40b based on control unit 61, with given timing respectively from the 1st Flow path 50a and the 2nd flow path 50b supply fluid to chamber 30.
Control unit 61 is controlled by entirety of the representative to sensor module 10 of each functional block of sensor module 10 And the processor of management.Control unit 61 carries out the CPU (Central of regulated procedure by executing to control sequence Processing Unit) etc. processors constitute.Such program is for example stored in and storage unit 62 or the company of sensor module 10 In storage medium of the outside connect etc..
Control unit 61 calculates the dense of the test object ingredient being examined in fluid based on the signal exported from sensor portion 31 Degree.The calculating of the concentration of the control and test object ingredient of the 1st supply unit 40a and the 2nd supply unit 40b based on control unit 61 Details will be described later.
Storage unit 62 can be made of semiconductor memory or magnetic memory etc..Storage unit 62 store various information and/or Program etc. for making sensor module 10 work.Storage unit 62 can be used as working storage and work.
Then, illustrate the 1st supply unit 40a and the 2nd supply unit 40b based on control unit 61 control and test object at The details of the calculating for the concentration divided.Fig. 3 is the figure for schematically showing the flowing of the fluid in sensor module 10.In Fig. 3 In, arrow shown in the 1st supply unit 40a and the 2nd supply unit 40b indicates the 1st supply unit 40a and the 2nd supply unit 40b difference Send out the direction of fluid.
It is supplied to the 1st flow path 50a and is examined fluid (sample gas).Here, as an example, illustrate that being examined fluid is people Expiration the case where.Wherein, examined fluid is not limited to the expiration of people, can be set to the fluid of arbitrary check object.? In the case that examined fluid is the expiration of people, test object ingredient is, for example, acetone, ethyl alcohol or carbon monoxide etc..Detection pair As ingredient is also not limited to example listed herein.Include noise contribution (the noise gas as the 2nd ingredient in being examined fluid Body).Noise contribution is the ingredient other than test object ingredient.In noise contribution, for example, comprising oxygen, carbon dioxide, nitrogen and All the components other than the test objects ingredient such as vapor.
To the 2nd flow path 50b supply comparative fluid (refreshing gas).In the case where examined fluid is the expiration of people, make For comparative fluid, such as usable air.Wherein, comparative fluid is not limited to air.It include oxygen, titanium dioxide in comparative fluid The noise contributions such as carbon, nitrogen and vapor.Test object ingredient is mixed into comparative fluid sometimes.It is mixed into comparative fluid The amount of test object ingredient be for example minute quantity in comparative fluid compared with the noise contribution for including.
2nd flow path 50b has the 1st filter 70a.In the 2nd flow path 50b, the 1st filter 70a is arranged on to be supplied than the 2nd The side (downstream side) of chamber 30 is more leaned on to portion 40b.1st filter 70a reduces the test object ingredient in fluid.1st filtering Device 70a is, for example, the component (adsorbent material) for adsorbing test object ingredient.As the 1st filter 70a, such as activity can be used Charcoal.Wherein, the 1st filter 70a can be made of other components other than active carbon.
1st flow path 50a and the 2nd flow path 50b has the 2nd filter 70b.In the 1st flow path 50a and the 2nd flow path 50b In, the 2nd filter 70b be respectively set at than the 1st supply unit 40a and the 2nd supply unit 40b more lean on chamber 30 side (under Swim side).2nd filter 70b reduces the noise contribution in fluid.2nd filter 70b is, for example, the component for adsorbing noise contribution (adsorbent material).As the 2nd filter 70b, such as silica gel or ion exchange resin etc. can be used.Wherein, the 2nd filter 70b can be made of other components other than silica gel and ion exchange resin.
1st filter 70a can be the component that noise contribution is more reduced than the 2nd filter 70b.Example shown in Fig. 3 In son, in the 2nd flow path 50b, the 1st filter 70a is arranged on than the 2nd filter 70b more by having the chamber of sensor portion 31 The side (downstream side) of room 30.
Control unit 61 controls the 1st supply unit 40a and the 2nd supply unit 40b, alternately to come from the 1st to the supply of chamber 30 The supply of the examined fluid of flow path 50a and comparative fluid from the 2nd flow path 50b.That is, will be examined in the 1st supply unit 40a During fluid passes out to chamber 30, comparative fluid will not be passed out to chamber 30 by the 2nd supply unit 40b.In the 2nd supply unit 40b During comparative fluid is passed out to chamber 30, examined fluid will not be passed out to chamber 30 by the 1st supply unit 40a.Pass through control Portion 61 processed, such as with period regular hour, switch the fluid based on the 1st supply unit 40a and the 2nd supply unit 40b to chamber 30 supply.
The examined fluid for being fed into the 1st flow path 50a of sensor module 10 passes through the 1st supply unit 40a to chamber 30 Supply.When supplying examined fluid to chamber 30, this is examined fluid and passes through the 2nd filter 70b.At this point, passing through the 2nd filtering Device 70b reduces the noise contribution for being examined and in fluid including.That is, from the 1st flow path 50a to the fluid that chamber 30 supplies be from quilt Check the fluid that noise contribution is reduced in fluid.
The comparative fluid for being fed into the 2nd flow path 50b of sensor module 10 is supplied by the 2nd supply unit 40b to chamber 30 It gives.When supplying comparative fluid to chamber 30, which passes through the 2nd filter 70b and the 1st filter 70a.At this point, The noise contribution for including in comparative fluid is reduced by the 2nd filter 70b.It is reduced in comparative fluid and is wrapped by the 1st filter 70a The test object ingredient contained.That is, from the 2nd flow path 50b to the fluid that chamber 30 supplies be reduced from comparative fluid noise at Divide the fluid with test object ingredient.The amount for the test object ingredient for including in comparative fluid is compared with the amount of noise contribution In minimal amount of situation, test object ingredient is further decreased by the 1st filter 70a.As a result, and from the 1st flow path 50a to chamber The fluid that room 30 supplies compares, and can be considered as in the fluid supplied from the 2nd flow path 50b to chamber 30, not include substantially Test object ingredient.
If applying the fluid to chamber 30, by sensor portion 31, believe corresponding with the ingredient of the fluid supplied Number it is output to control unit 61.During supplying fluid from the 1st flow path 50a, sensor portion 31 exports and from examined fluid The corresponding signal of the ingredient of fluid after reducing noise contribution (the 1st signal).During supplying fluid from the 2nd flow path 50b, The output of sensor portion 31 signal corresponding with the fluid after reducing noise contribution and test object ingredient in comparative fluid (the 2 signals).From the 1st flow path 50a and the 2nd flow path 50b to the fluid that chamber 30 supplies all be to be reduced by the 2nd filter 70b Fluid after noise contribution, this point are common.Accordingly, with respect to the common ingredient, from 31 output phase of sensor portion with electricity Flat signal.In contrast, not being lowered in being examined fluid about test object ingredient, but lead in comparative fluid Crossing the 1st filter 70a is reduced.Therefore, the difference of the 1st signal and the 2nd signal that export from sensor portion 31 substantially may be used It is considered as being examined the concentration of the test object ingredient in fluid included.
This disclosure relates to sensor module 10 have in the 2nd flow path 50b from comparative fluid reduce test object at 1st filter 70a of the amount divided.Therefore, never have the 1st flow path 50a of the 1st filter 70a and have the 1st filter 70a The 2nd flow path 50b respectively in order to chamber 30 supply fluid.The amount of test object ingredient is supplied to sensor portion 31 as a result, The comparative fluid that the amount of the examined fluid and test object ingredient that do not reduce is lowered.What sensor portion 31 was exported and was supplied The corresponding signal of the ingredient of fluid (the 1st signal and the 2nd signal).Therefore, control unit 61 can be based on connecing from sensor portion 31 The difference of the signal of receipts calculates the difference of the ingredient of the fluid supplied in order to chamber 30.In this way, sensor module 10 can By reducing the amount of the test object ingredient of comparative fluid, to keep the concentration for the test object ingredient being examined in fluid more quasi- Really reflect in the difference of the 1st signal and the 2nd signal, therefore can be improved measurement accuracy.
In the present embodiment, the 1st flow path 50a and the 2nd flow path 50b passes through the 2nd with the amount for reducing noise contribution Filter 70b, to be easy to make the noise contribution from the fluid that the 1st flow path 50a and the 2nd flow path 50b are supplied to chamber 30 It is consistent.Therefore, according to sensor module 10, it can reduce the difference in the difference of the 1st signal and the 2nd signal because of noise contribution It is influenced caused by different, therefore can be improved measurement accuracy.
In sensor module 10 of the present embodiment, in the 2nd flow path 50b, the position ratio of the 1st filter 70a 2nd filter 70b more leans on the side of sensor portion 31.Therefore, the amount for flowing into the noise contribution of the 1st filter 70a can be reduced. Although then adsorption capacity can be small for the ingredient in the 1st filter 70a and the 2nd filter 70b more fluid-absorbent, by by the 2nd Filter 70b is configured in the upstream side for the flowing for more leaning on fluid than the 1st filter 70a, so as to reduce by the 1st filter 70a The amount of adsorbable ingredient.Therefore, the performance that the 1st filter 70a reduces noise contribution does not tend to decrease.As a result, in sensor In module 10, it is easy to maintain to be lowered from the amount of the test object ingredient in the fluid that the 2nd flow path 50b is supplied to chamber 30 State.Therefore, according to sensor module 10, it can be improved measurement accuracy.
In sensor module 10 of the present embodiment, in the 2nd flow path 50b, more leaned on than the 2nd supply unit 40b The 1st filter 70a is arranged in the side of sensor portion 31.In sensor module 10, in the 1st flow path 50a and the 2nd flow path 50b In, the 2nd filter 70b is set in the side for more leaning on sensor portion 31 than the 1st supply unit 40a and the 2nd supply unit 40b respectively. Therefore, in the case where unused sensor module 10, the gases such as outer gas are difficult from the 1st supply unit 40a and the 2nd supply unit 40b acts on the 1st filter 70a and the 2nd filter 70b.It is easy to prevent as a result, in the non-use of sensor module 10 Absorption of the 1 filter 70a and the 2nd filter 70b to the ingredient in fluid, thus the 1st filter 70a and the 2nd filter The performance that 70b reduces noise contribution does not tend to decrease.
Fig. 4 is the flow chart for indicating an example of processing performed by control unit 61, is to indicate stream performed by control unit 61 The flow chart of an example of the detection processing of the ingredient of body.In the process at the beginning of point of Fig. 4, the 1st supply unit 40a and the 2nd Supply unit 40b is not driven.
Control unit 61 drives the 1st supply unit 40a (step S11).It is tested from the 1st supply unit 40a to the supply of chamber 30 as a result, Look into fluid.
If being supplied to chamber 30 and being examined fluid, exported by sensor portion 31 corresponding with the ingredient of examined fluid 1st signal.Control unit 61 obtains the 1st signal (step S12) exported from sensor portion 31.
Control unit 61 drives the 2nd supply unit 40b (step S13) after stopping the driving of the 1st supply unit 40a.As a result, Comparative fluid is supplied from the 2nd supply unit 40b to chamber 30.
If supplying comparative fluid to chamber 30, pass through the output of sensor portion 31 the corresponding with the ingredient of comparative fluid the 2nd Signal.Control unit 61 obtains the 2nd signal (step S14) exported from sensor portion 31.
Step S11 and S12 and step S13 and S14 can alternately be repeated.
Control unit 61 calculates the ingredient of the fluid supplied to chamber 30 by the difference of the 1st signal and the 2nd signal of calculating Difference (step S15).
In the above-described embodiment, illustrate sensor module 10 have the 1st filter 70a and the 2nd filter 70b this The case where the two, but sensor module 10 for example may not possess the 2nd filter 70b.In this case, sensor module 10 have the 1st filter 70a in the 2nd flow path 50b, but do not have the 2nd filter 70b.In this case, due to sensor module 10 also can reduce the amount of the test object ingredient of comparative fluid, therefore according to above-mentioned reason, also can be improved measurement accuracy.
In the above-described embodiment, in the 2nd flow path 50b, illustrate the position of the 1st filter 70a than the 2nd filter 70b more leans on the example of the case where 31 side of sensor portion (downstream side), but the configuration of the 1st filter 70a and the 2nd filter 70b It is not limited to this.For example, as shown in figure 5, the position of the 2nd filter 70b can also be than the 1st filter in the 2nd flow path 50b 70a more leans on 31 side of sensor portion (downstream side).According to the configuration, since the 1st filter 70a also can reduce in comparative fluid The amount of test object ingredient, therefore according to above-mentioned reason, it also can be improved measurement accuracy.
Each structure in sensor module 10 is not limited to the above embodiment.For example, as shown in fig. 6, the 1st supply unit 40a can be arranged on the side (downstream side) that chamber 30 is more leaned on than the 2nd filter 70b in the 1st flow path 50a.That is, the 2nd mistake Filter 70b can be arranged on the opposite side (upstream side) of chamber 30 in the 1st flow path 50a relative to the 1st supply unit 40a.Together Sample, the 2nd supply unit 40b can be arranged in the 2nd flow path 50b and more lean on than the 1st filter 70a and the 2nd filter 70b The side (downstream side) of chamber 30.That is, the 1st filter 70a and the 2nd filter 70b can in the 2nd flow path 50b relative to 2nd supply unit 40b is arranged on the opposite side (upstream side) of chamber 30.In such a configuration, the 1st filter 70a and the 2nd Filter 70b is located at the opposite side of chamber 30 relative to the 1st supply unit 40a and the 2nd supply unit 40b.Therefore, in the 1st filtering In the case where the impaired performance of the reduction noise contribution of device 70a and the 2nd filter 70b, it is easy to carry out the 1st filter 70a And the 2nd filter 70b replacement.
Sensor module 10 can for example have regeneration sector 80 as shown in Figure 7.Regeneration sector 80 is can be the 1st The property of the reduction is regenerated in the case where the impaired performance of the amount of the reduction noise contribution of filter 70a and the 2nd filter 70b The mechanism of energy.Regeneration sector 80 can for example be regenerated by being heated to the 1st filter 70a and the 2nd filter 70b. Regeneration sector 80 for example can also be by regenerating the 1st filter 70a and the 2nd filter 70b irradiation light.Regeneration sector 80 Such as the 1st filter 70a and the 2nd filter 70b can also be regenerated by vacuumizing.Have in sensor module 10 In the case where having regeneration sector 80, due to being easy the amount of the reduction noise contribution to the 1st filter 70a and the 2nd filter 70b Performance regenerated, therefore be easy to maintain the calculating precision of the concentration of the test object ingredient based on sensor module 10.
In sensor module 10, regeneration sector 80 does not need centainly to be configured to the 1st filter 70a and the 2nd mistake Filter 70b both sides are worked.For example, regeneration sector 80 may be configured to in the 1st filter 70a and the 2nd filter 70b Either one work.
Above-mentioned sensor module 10 may be used at diversified on the way.That as described in above embodiment Sample can be calculated in the expiration of people by sensor module 10 in the case where examined fluid is the expiration of people and include The concentration of given ingredient.The concentration calculated for example may be used in the presumption of state relevant to human body.It is relevant to human body Development degree or the health status of human body of disease in the presumption of state e.g. human body etc..
Sensor module 10 for example can be used from the detection for the given gas componant that food generates.The gas detected The concentration of body ingredient may be used in the presumption of food quality.Food quality is property relevant to food or quality etc., example It such as may include freshness, edible time, maturity, the rotten degree of food.In addition to this, sensor module 10 also can It is used on the way using to diversified such as the detection of the given gas componant generated from machine.
The disclosure is illustrated based on each attached drawing and embodiment, it is noted that, as long as those skilled in the art Member is easy for carrying out various modifications and amendment based on the disclosure.Therefore, it shall be noted that these deformations and amendment are included in this In scope of disclosure.For example, function of including in each structural portion etc. etc. can logically be matched in reconcilable situation again It sets, multiple structure divisions can be combined into one, or can also be split.
Symbol description
10 sensor modules
20 shells
30 chambers
31 sensor portions
The 1st supply unit of 40a
The 2nd supply unit of 40b
The 1st flow path of 50a
The 2nd flow path of 50b
The 3rd flow path of 50c
60 substrates
61 control units
62 storage units
The 1st filter of 70a
The 2nd filter of 70b
80 regeneration sectors

Claims (11)

1. a kind of sensor module, has:
Sensor portion detects the 1st ingredient;
1st flow path, Xiang Suoshu sensor portion, which supplies, is examined fluid;With
2nd flow path, Xiang Suoshu sensor portion supply comparative fluid, which includes the 2nd ingredient, and the 2nd ingredient is included in In the examined fluid and be different from the 1st ingredient,
2nd flow path has the 1st filter of the amount that the 1st ingredient is reduced from the comparative fluid.
2. sensor module according to claim 1, wherein
1st filter more reduces the amount of the 1st ingredient compared to the 2nd ingredient.
3. sensor module according to claim 1 or 2, wherein
1st flow path and the 2nd flow path are respectively provided with the 2nd filter for reducing the amount of the 2nd ingredient.
4. sensor module according to claim 3, wherein
2nd filter more reduces the amount of the 2nd ingredient compared to the 1st ingredient.
5. sensor module according to claim 3 or 4, wherein
1st filter more reduces the amount of the 1st ingredient than the 2nd filter.
6. the sensor module according to any one of claim 3~5, wherein
In the 2nd flow path, the position of the 1st filter side farther downstream than the 2nd filter.
7. sensor module described according to claim 1~any one of 6, wherein
In the 2nd flow path, at the position than the 1st filter upstream side, have for the sensor Portion supplies the supply unit of the comparative fluid.
8. sensor module described according to claim 1~any one of 6, wherein
In the 2nd flow path, at the position of side farther downstream than the 1st filter, have for the sensor Portion supplies the supply unit of the comparative fluid.
9. sensor module described according to claim 1~any one of 8, wherein
The sensor module is also equipped with: the 1st regeneration sector, can regenerate reduction the 1st ingredient of the 1st filter The function of amount.
10. the sensor module according to any one of claim 3~6, wherein
Locating sensor module is also equipped with: the 2nd regeneration sector, can regenerate reduction the 2nd ingredient of the 2nd filter The function of amount.
11. a kind of detection method, comprising:
The step of preparing sensor module, which, which has, is set to the 1st supply unit of the 1st flow path, is set to and has Reduce the 2nd supply unit and sensor portion of the 2nd flow path of the 2nd filter of the amount of the 1st ingredient;
By driving the 1st supply unit, the step of being examined fluid is supplied to the sensor portion via the 1st flow path;
By driving the 2nd supply unit, the step of supplying comparative fluid to the sensor portion via the 2nd flow path, In, which includes the 2nd ingredient, and the 2nd ingredient is included in the examined fluid and is different from the 1st ingredient; With
The step of detecting 1 ingredient in the sensor portion.
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