CN109703163A - A kind of vacuum attaching machine - Google Patents
A kind of vacuum attaching machine Download PDFInfo
- Publication number
- CN109703163A CN109703163A CN201811605213.1A CN201811605213A CN109703163A CN 109703163 A CN109703163 A CN 109703163A CN 201811605213 A CN201811605213 A CN 201811605213A CN 109703163 A CN109703163 A CN 109703163A
- Authority
- CN
- China
- Prior art keywords
- support pins
- position state
- attaching machine
- vacuum attaching
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B41/00—Arrangements for controlling or monitoring lamination processes; Safety arrangements
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
- Manipulator (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of vacuum attaching machine, including main engine bed, the interior upper cover plate being oppositely arranged up and down and the lower cover plate of being equipped with for adsorbing upper substrate and lower substrate to be fit respectively；The first support pins wherein are additionally provided in the main engine bed, with first position state and second position state；Wherein in the first position state, first support pins are located between the opposite surface of the upper and lower lids, and can catch the upper substrate fallen from the upper cover plate；In the second position state, first support pins are located at except the region between the opposite surface of the upper and lower lids so that the upper and lower lids can the upper and lower substrates close to each other and then respectively adsorbing it be bonded.Appearance position deviation between the two and then do again due to the two position deviation to scrap after caused upper and lower substrates fitting after further fitting the advantage of the invention is that solving the problems, such as that upper substrate is fallen on lower substrate.
Description
Technical field
The present invention relates to display panel manufacturing technology field, in particular to a kind of vacuum attaching machine.
Background technique
In the packaging technology of TFT-LCD industry, generally use vacuum abutted equipment (Vacuum Aligner System,
Abbreviation VAS) two plate bases are become into an entirety at box.A chip base is adsorbed on vacuum abutted equipment upper cover plate in the prior art
Plate is adsorbed another plate base on lower cover plate, is then vacuumized using vacuum pump, then carries out contraposition box pressure under vacuum conditions
It closes.Coating glue class is for bonding upper and lower base plate on usual substrate.
Board work is that upper and lower base plate is adsorbed by the adsorbent equipment in upper and lower cover plates, then carries out contraposition pressing.But
With the use of board, adsorbent equipment will die down to the adsorption capacity of substrate, this will will lead to is existed by the substrate of upper cover plate absorption
Vacuumizing phase is fallen on the substrate of lower cover plate, and then causes upper and lower base plate position deviation, if continuing subsequent upper and lower base
Pressing step between plate, results even in the problem of upper and lower base plate is scrapped.
Therefore, it is necessory to develop a kind of novel vacuum attaching machine, to overcome the deficiencies of existing technologies.
Summary of the invention
The object of the present invention is to provide a kind of vacuum attaching machines, are able to solve existing in the prior art since absorption fills
Set and die down to the adsorption capacity of substrate, the substrate of caused upper cover plate absorption on the substrate that vacuumizing phase falls to lower cover plate,
And then cause upper and lower substrates position deviation, result even in the problem of upper and lower substrates are scrapped.
To achieve the above object, the present invention provides a kind of vacuum attaching machine, including main engine bed, interior to be equipped with opposite up and down set
The upper cover plate and lower cover plate set for adsorbing upper substrate and lower substrate to be fit respectively；Is wherein additionally provided in the main engine bed
One support pins, with first position state and second position state；
Wherein in the first position state, first support pins are located between the opposite surface of the upper and lower lids,
And the upper substrate fallen from the upper cover plate can be caught；In the second position state, first support pins are located at
Except region between the opposite surface of the upper and lower lids, so that the upper and lower lids can be close to each other and then it is each
It is bonded from the upper and lower substrates of absorption.
Further, in different embodiments, wherein first support pins are provided with pressure sensor, pass through pressure
The upper substrate for whether having fall thereon is known in variation.
Further, in different embodiments, further include control unit, simultaneously energy is connect with the pressure sensor
Receive its data, after it knows the pressure change data variation of the pressure sensor, can stop the upper and lower lids it
Between operation close to each other.
Further, in different embodiments, wherein described control unit is also connected with alarm unit, is used for Xiang Qifa
Alarm command out.
For example, when described control unit according to the pressure change data of the pressure sensor find the upper cover plate for
Substrate adsorption power is insufficient and when there is " falling piece " problem, be notified that the alarm unit is alarmed, to remind external behaviour
Make personnel and carries out corresponding component maintenance or replacement.Wherein the alarm unit can be acousto-optic warning unit, be also possible to
Audio alert unit, specifically can with the need depending on, and be not limited.
Further, in different embodiments, wherein described control unit is also connected with manipulator, described for removing
The upper substrate fallen on first support pins.
Further, in different embodiments, wherein first support pins by way of rotation described first
It is converted between location status and the second position state.
Further, in different embodiments, wherein the angular range of first support pins rotation is 0~180 degree.
Further, in different embodiments, wherein first support pins by way of flexible described first
It is converted between location status and the second position state.
Further, in different embodiments, wherein the material of first support pins is using stainless steel material, organic
Composite material or organic material, specifically can with the need depending on, be not limited to these three materials.
It further, in different embodiments, further include the second support pins, it is opposite with first support pins to set
It sets, also there is first position state and second position state, described in catching and falling jointly with first support pins
Upper substrate.
Further, in different embodiments, wherein second support pins are provided with pressure sensor.
Further, in different embodiments, the shape of the support pins, setting quantity and move mode can be with need
It depending on wanting, and is not limited, as long as can guarantee the safe upper substrate caught and fallen by adsorption capacity deficiency.
Compared with the existing technology, the beneficial effects of the present invention are: the present invention provides a kind of vacuum attaching machine, in main engine bed
The support pins of inside setting a pair of opposing, with first position state and second position state；Wherein described first
Location status, first support pins can be caught from the upper cover plate and fall between the upper and lower lids apparent surface
The upper substrate, solve upper substrate fall on lower substrate make between the two appearance position deviation, and then due to the two
Position deviation does the problem of scrapping after further caused upper and lower substrates after being bonded are bonded again.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those skilled in the art, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the schematic cross-sectional view for the vacuum attaching machine that the embodiment of the present invention 1 provides；
Fig. 2 is the schematic cross-sectional view that support pins are located at first position state in the embodiment of the present invention 1；
Fig. 3 is the schematic cross-sectional view that support pins catch the upper substrate fallen in the embodiment of the present invention 1；
Fig. 4 is the schematic cross-sectional view that support pins are located at second position state in the embodiment of the present invention 1；
Fig. 5 is the schematic top plan view for the vacuum attaching machine that the embodiment of the present invention 2 provides；
Fig. 6 is the schematic top plan view that support pins are located at first position state in the embodiment of the present invention 2；
Fig. 7 is that the support pins of the embodiment of the present invention 3 catch the schematic top plan view of the upper substrate fallen；
Fig. 8 is the schematic top plan view that support pins are located at second position state in the embodiment of the present invention 2.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Specific structure and function details disclosed herein are only representative, and are for describing the present invention show
The purpose of example property embodiment.But the present invention can be implemented by many alternative forms, and be not interpreted as
It is limited only by the embodiments set forth herein.
In the description of the present invention, it is to be understood that, term " center ", " transverse direction ", "upper", "lower", "left", "right",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "top", "bottom", "inner", "outside" be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.In addition, belonging to
Meaning is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicated in " first " " second "
The quantity of the technical characteristic shown.Limit as a result, by the feature of " first ", " second " can explicitly or implicitly include one or
More this feature of person.In description of the invention, unless otherwise indicated, the meaning of " plurality " is two or more.In addition,
Term " includes " and its any deformation, it is intended that cover and non-exclusive include.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Term used herein above is not intended to limit exemplary embodiment just for the sake of description specific embodiment.Unless
Context clearly refers else, otherwise singular used herein above "one", " one " also attempt to include plural number.Also answer
When understanding, term " includes " and/or "comprising" used herein above provide the feature, integer, step, operation, list
The presence of member and/or component, and do not preclude the presence or addition of other one or more features, integer, step, operation, unit, group
Part and/or combination thereof.
Embodiment 1
Referring to Fig. 1, the present invention provides a kind of vacuum attaching machine, including main engine bed 1, upper cover plate 21, lower cover plate 22,
One support pins 41 and the second support pins 42, upper cover plate 21 and about 22 lower cover plate are oppositely arranged, and adsorb upper base to be fit respectively
Plate 31 and lower substrate 32.
Wherein the first support pins 41 and the second support pins 42 have first position state and second position state, please refer to figure
2, Fig. 2 show the cross-sectional view that the first support pins 41 and the second support pins 42 in the present embodiment are located at first position state,
One location status, the first support pins 41 and the second support pins 42 are located between 22 apparent surface of upper cover plate 21 and lower cover plate.
When the adsorption capacity deficiency upper substrate 31 due to upper cover plate 21 is fallen, referring to Fig. 3, Fig. 3 show the present embodiment
First support pins 41 and the second support pins 42 catch the cross-sectional view of the upper substrate 21 fallen.
When upper substrate is not fallen, the first support pins 41 and 42 moving in rotation of the second support pins to second position state,
Referring to Fig. 4, the first support pins 41 and the second support pins 42 are located at the section view of second position state in the present embodiment shown in Fig. 4
Figure.
It is both provided with pressure sensor on first support pins 41 and the second support pins 42, can be known thereon by pressure change
Whether " fall piece " is had.It is additionally provided with control unit on main engine bed 1, connect with pressure sensor and its data can be received, when it
After knowing the pressure change data variation of pressure sensor, the operation close to each other between upper and lower lids can be stopped.
Further, control unit is also connected with alarm unit, for issuing alarm command to it.When control unit according to
When the pressure change data discovery upper cover plate of pressure sensor " falling piece " problem occurs for substrate adsorption power deficiency, it can lead to
Know that alarm unit is alarmed, to remind outside operator to carry out corresponding component maintenance or replacement.And control unit
It is also connected with manipulator, for removing the upper substrate 31 fallen on the first support pins 41.
Illustrate the fitting operation process of the vacuum attaching machine in the preferred embodiment of the present invention below:
When carrying out fitting operation, upper substrate 31 is adsorbed first on upper cover plate 21, adsorbs lower substrate 32 on lower substrate 22, so
The first support pins 41 and the second support pins 42 are rotated by 90 ° and are moved to first position state afterwards.
Then main engine bed 1 vacuumizes, if upper substrate 21 is fallen, the first support pins 41 and the second support pins 42 can be caught
The pressure data of the upper substrate 21 fallen, pressure sensor will change, and then control unit stops between upper and lower lids
Operation close to each other, the then stopping of main engine bed 1 vacuumizes, and chamber is opened, and manipulator removes the first support pins 41 and second
The upper substrate 31 fallen on the support tip 42；Control unit issues alarm command to alarm unit simultaneously, and alarm unit is alarmed, mentioned
Awake outside operator carries out replacement adsorbent equipment.
If upper substrate 21 is not fallen, the first support pins 41 and the second support pins 42 will moving in rotation to the second position
State, then two cover boards are relatively close, and upper substrate 32 and lower substrate 33 to be fit are bonded.It circuits sequentially, prevents substrate from falling
It falls and scraps.
Embodiment 2
Referring to Fig. 5, the present invention provides a kind of vacuum attaching machine, including main engine bed 1, upper cover plate 21, lower cover plate 22,
One support pins 43 and the second support pins 44, upper cover plate 21 and about 22 lower cover plate are oppositely arranged, and adsorb upper base to be fit respectively
Plate 31 and lower substrate 32.
Wherein the first support pins 43 and the second support pins 44 have first position state and second position state, please refer to figure
6, Fig. 6 show the top view that the first support pins 43 and the second support pins 44 in the present embodiment are located at first position state,
One location status, the first support pins 43 and the second support pins 44 are located between 22 apparent surface of upper cover plate 21 and lower cover plate.
When the adsorption capacity deficiency upper substrate 31 due to upper cover plate 21 is fallen, referring to Fig. 7, Fig. 7 show the present embodiment
First support pins 43 and the second support pins 44 catch the top view of the upper substrate 21 fallen.
When upper substrate is not fallen, the first support pins 43 and 44 telescopic moving of the second support pins to second position state,
Referring to Fig. 8, the first support pins 43 and the second support pins 44 are located at the vertical view of second position state in the present embodiment shown in Fig. 8
Figure.
It is both provided with pressure sensor on first support pins 43 and the second support pins 44, can be known thereon by pressure change
Whether " fall piece " is had.It is additionally provided with control unit on main engine bed 1, connect with pressure sensor and its data can be received, when it
After knowing the pressure change data variation of pressure sensor, the operation close to each other between upper and lower lids can be stopped.Control is single
Member is also connected with alarm unit, for issuing alarm command to it.When control unit is according to the pressure change number of pressure sensor
It is found that when upper cover plate " falling piece " problem occurs for substrate adsorption power deficiency, it is notified that alarm unit is alarmed, with
Just outside operator is reminded to carry out corresponding component maintenance or replacement.Control unit is also connected with manipulator, for removing
The upper substrate 31 fallen on first support pins 41.
Illustrate the fitting operation process of the vacuum attaching machine in the preferred embodiment of the present invention below:
When carrying out fitting operation, upper substrate 31 is adsorbed first on upper cover plate 21, adsorbs lower substrate 32 on lower substrate 22, so
The first support pins 43 and 44 telescopic moving of the second support pins are to first position state afterwards.
Then main engine bed 1 vacuumizes, if upper substrate 21 is fallen, the first support pins 43 and the second support pins 44 can be caught
The pressure data of the upper substrate 21 fallen, pressure sensor will change, and then control unit stops between upper and lower lids
Operation close to each other, the then stopping of main engine bed 1 vacuumizes, and chamber is opened, and manipulator removes the first support pins 43 and second
The upper substrate 31 fallen on the support tip 44；Control unit issues alarm command to alarm unit simultaneously, and alarm unit is alarmed, mentioned
Awake outside operator carries out replacement adsorbent equipment.
If upper substrate 21 is not fallen, the first support pins 43 and the second support pins 44 will telescopic moving to the second position
State, then two cover boards are relatively close, and upper substrate 32 and lower substrate 33 to be fit are bonded.It circuits sequentially, prevents substrate from falling
It falls and scraps.
In other embodiments, the shape of support pins, setting quantity and move mode can with the need depending on, and it is unlimited
It is fixed, safe the upper substrate fallen by adsorption capacity deficiency is caught as long as can guarantee.
In different embodiments, it wherein the material of first support pins can use stainless steel material, can also adopt
With organic composite material or organic material, specifically can with the need depending on, be not limited to these three materials.
The beneficial effects of the present invention are: the present invention provides a kind of vacuum attaching machine, and a pair of of phase is arranged inside main engine bed
To the support pins of setting, with first position state and second position state；Wherein in the first position state, described
One support pins can catch the upper substrate fallen from the upper cover plate between the upper and lower lids apparent surface, solution
Upper substrate of having determined, which is fallen on lower substrate, makes appearance position deviation between the two and then since the two position deviation is done again into one
The problem of being scrapped after caused upper and lower substrates fitting after the fitting of step.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (10)
1. a kind of vacuum attaching machine, which is characterized in that interior to be equipped with the upper cover plate and lower cover being oppositely arranged up and down including main engine bed
Plate for adsorbing upper substrate and lower substrate to be fit respectively；The first support pins wherein are additionally provided in the main engine bed, are had
First position state and second position state；Wherein in the first position state, first support pins are located at described upper and lower
Between the opposite surface of cover board, and the upper substrate fallen from the upper cover plate can be caught；In the second position state, institute
It states except the region that the first support pins are located between the opposite surface of the upper and lower lids, so that the upper and lower lids can
The upper and lower substrates close to each other and then respectively adsorbing it are bonded.
2. a kind of vacuum attaching machine according to claim 1, which is characterized in that first support pins are provided with pressure biography
Sensor knows the upper substrate for whether having fall thereon by pressure change.
3. a kind of vacuum attaching machine according to claim 2, which is characterized in that further include control unit, with the pressure
Force snesor connects and can receive its data can stop after it knows the pressure change data variation of the pressure sensor
The only operation close to each other between the upper and lower lids.
4. a kind of vacuum attaching machine according to claim 3, which is characterized in that it is single that described control unit is also connected with alarm
Member, for issuing alarm command to it.
5. a kind of vacuum attaching machine according to claim 3, which is characterized in that described control unit is also connected with machinery
Hand, for removing the upper substrate fallen on first support pins.
6. a kind of vacuum attaching machine according to claim 1, which is characterized in that the side that first support pins pass through rotation
Formula is converted between the first position state and the second position state.
7. a kind of vacuum attaching machine according to claim 3, which is characterized in that the angle model of the first support pins rotation
It encloses for 0~180 degree.
8. a kind of vacuum attaching machine according to claim 1, which is characterized in that first support pins pass through flexible side
Formula is converted between the first position state and the second position state.
9. a kind of vacuum attaching machine according to claim 1, which is characterized in that it further include the second support pins, and it is described
First support pins are oppositely arranged, and also have first position state and second position state, for total with first support pins
It is same to catch the upper substrate fallen.
10. a kind of vacuum attaching machine according to claim 1, which is characterized in that second support pins are provided with
Pressure sensor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605213.1A CN109703163B (en) | 2018-12-26 | 2018-12-26 | Vacuum laminating machine |
| PCT/CN2019/084022 WO2020133839A1 (en) | 2018-12-26 | 2019-04-24 | Vacuum aligner machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605213.1A CN109703163B (en) | 2018-12-26 | 2018-12-26 | Vacuum laminating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109703163A true CN109703163A (en) | 2019-05-03 |
| CN109703163B CN109703163B (en) | 2020-04-28 |
Family
ID=66257765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811605213.1A Active CN109703163B (en) | 2018-12-26 | 2018-12-26 | Vacuum laminating machine |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109703163B (en) |
| WO (1) | WO2020133839A1 (en) |
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| JP2003131241A (en) * | 2001-10-24 | 2003-05-08 | Matsushita Electric Ind Co Ltd | Liquid crystal substrate bonding method |
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| CN105082717A (en) * | 2015-09-11 | 2015-11-25 | 武汉华星光电技术有限公司 | Vacuum pasting device and base plate pasting method |
| KR20160069195A (en) * | 2014-12-08 | 2016-06-16 | (주)다인스 | Vacuum laminator and method for laminating using the same |
| CN207943764U (en) * | 2018-03-22 | 2018-10-09 | 无锡睿龙新材料科技有限公司 | Copper-clad plate steel plate absorbing and hoisting machine anti-dropping apparatus |
-
2018
- 2018-12-26 CN CN201811605213.1A patent/CN109703163B/en active Active
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|---|---|---|---|---|
| JP2001005401A (en) * | 1999-06-21 | 2001-01-12 | Hitachi Techno Eng Co Ltd | Substrate assembling method and apparatus |
| JP2003131241A (en) * | 2001-10-24 | 2003-05-08 | Matsushita Electric Ind Co Ltd | Liquid crystal substrate bonding method |
| JP2005107143A (en) * | 2003-09-30 | 2005-04-21 | Seiko Epson Corp | Substrate assembly method and apparatus |
| JP4598463B2 (en) * | 2004-09-21 | 2010-12-15 | 芝浦メカトロニクス株式会社 | Vacuum apparatus, substrate bonding apparatus, and substrate bonding method |
| CN2763837Y (en) * | 2004-12-30 | 2006-03-08 | 群康科技(深圳)有限公司 | LCD panel |
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| CN102789081A (en) * | 2012-08-08 | 2012-11-21 | 吴江市博众精工科技有限公司 | LCD (liquid crystal display) assembly machine |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN109703163B (en) | 2020-04-28 |
| WO2020133839A1 (en) | 2020-07-02 |
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