CN109695562B - A fluid pump and an exciting element - Google Patents
A fluid pump and an exciting element Download PDFInfo
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- CN109695562B CN109695562B CN201810515559.6A CN201810515559A CN109695562B CN 109695562 B CN109695562 B CN 109695562B CN 201810515559 A CN201810515559 A CN 201810515559A CN 109695562 B CN109695562 B CN 109695562B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
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- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
一种流体泵及激振元件，本发明属于流体输送技术领域，涉及一种流体泵，包括：压电振子，所述压电振子包括振动基板和设于所述振动基板一侧的压电元件；振动隔膜，所述振动隔膜配置于所述振动基板的另一侧，所述振动基板靠近所述振动隔膜的一侧设有沉腔；平面部，所述平面部以靠近且相对的方式配置于所述振动隔膜远离振动基板的一侧，所述平面部与所述沉腔相对的区域内至少设有一个通气孔；通过对所述压电元件施加一定频率的交变电压，振动基板发生弯曲变形，使振动隔膜产生谐振并随着振动基板朝着相同的方向弯曲变形，进而流体泵从所述通气孔吸入流体，从通气孔的周向方向排出。本发明能获得更高的输出压力和输出流量，具有很大的市场价值，值得推广。
A fluid pump and an exciting element. The present invention belongs to the field of fluid transportation technology and relates to a fluid pump, comprising: a piezoelectric vibrator, the piezoelectric vibrator comprising a vibration substrate and a piezoelectric element arranged on one side of the vibration substrate; a vibration diaphragm, the vibration diaphragm is arranged on the other side of the vibration substrate, and a sinking cavity is provided on the side of the vibration substrate close to the vibration diaphragm; a plane portion, the plane portion is arranged in a close and opposite manner on the side of the vibration diaphragm away from the vibration substrate, and at least one vent is provided in the area opposite to the sinking cavity of the plane portion; by applying an alternating voltage of a certain frequency to the piezoelectric element, the vibration substrate is bent and deformed, so that the vibration diaphragm resonates and bends and deforms in the same direction as the vibration substrate, and then the fluid pump inhales fluid from the vent and discharges it from the circumferential direction of the vent. The present invention can obtain higher output pressure and output flow, has great market value, and is worthy of promotion.
Description
Technical Field
The invention belongs to the technical field of fluid conveying equipment, and particularly relates to a fluid pump.
Background
Micro fluid pumps have wide application requirements in the fields of medical biology, fine chemistry, aerospace, micro-electro-mechanical systems and the like. With the trend of miniaturization of electronic products of application targets, miniature fluid pumps are required to be miniaturized or have their output capacity increased without being enlarged while ensuring their output capacity (output pressure and output flow rate).
The current gas micropump mainly comprises an electromagnetic diaphragm pump driven by a motor cam mechanism, a piezoelectric diaphragm pump driven by a piezoelectric vibrator and a micropump utilizing a squeeze film effect. The piezoelectric pump is a diaphragm pump in which an alternating voltage is applied to a piezoelectric element to bend and deform a diaphragm, and the bent and deformed diaphragm has the advantages of simple structure, light weight, low power consumption and the like.
The electromagnetic diaphragm pump has the problems of complex structure, high cost, large noise and the like in the practical application process; the piezoelectric diaphragm pump is provided with a one-way valve at an inlet and an outlet, the long-term use reliability of the one-way valve is reduced, and in the use process, foreign matters such as dust are attached to the valve to ensure that the piezoelectric pump cannot fully convey fluid, the attachment of the foreign matters such as dust on the one-way valve can cause the increase of the driving frequency of a piezoelectric driving element, the one-way valve cannot work at high frequency due to a hysteresis effect to ensure that the piezoelectric pump fails, and the limit of insufficient limiting working pressure and further improving the output capacity of the existing piezoelectric micro pump utilizing the squeeze film effect exists in the structure of the piezoelectric micro pump.
Disclosure of Invention
The invention aims to solve the problems of complex structure, high cost, large noise or low reliability, insufficient fluid conveying or pressure, low output capacity and the like in the prior art, and provides a miniature fluid pump with high output capacity.
In order to achieve the above purpose, the invention adopts the technical scheme that the fluid pump comprises:
a piezoelectric vibrator including a vibration substrate and a piezoelectric element provided on one side of the vibration substrate;
the vibrating diaphragm is arranged on the other side of the vibrating substrate, and a sinking cavity is arranged on one side of the vibrating substrate, which is close to the vibrating diaphragm;
A planar portion disposed on a side of the vibration diaphragm away from the vibration substrate so as to be close to and opposite to each other, wherein at least one vent hole is provided in a region of the planar portion opposite to the sinking chamber;
By applying an alternating voltage of a certain frequency to the piezoelectric element, the vibration substrate is deformed to bend, and the vibration diaphragm is deformed to bend in the same direction along with the vibration substrate, so that the fluid pump sucks the fluid from the vent hole and discharges the fluid from the circumferential direction of the vent hole.
The part of the plane part corresponding to the sinking cavity is an elastic plate, and the part of the plane part positioned in the circumferential direction of the sinking cavity is a rigid plate or is fixedly restrained.
According to the invention, the vibrating diaphragm is fixed on the vibrating substrate, the part of the vibrating diaphragm opposite to the sinking cavity can perform bending vibration, and the part of the vibrating diaphragm, which is positioned in the circumferential direction of the sinking cavity, is used for fixing and restraining.
The piezoelectric element and the vibration substrate are arranged in a centering way and are bonded into a whole to form the piezoelectric vibrator, and the piezoelectric vibrator can generate bending vibration from the central part to the peripheral part.
The piezoelectric element, the vibration substrate and the vibration diaphragm are square or round.
The sinking cavity is arranged at the central part of the vibration substrate, and is circular. The fluid pump further comprises a supporting plate and an upper cover plate, wherein the supporting plate is arranged on the plane part and is in sealing connection with the upper cover plate, the upper cover plate is arranged on the supporting plate and is also in sealing connection with the supporting plate, so that a cavity is formed, and a through hole is formed in the center or other positions of the upper cover plate and is communicated with the outside atmosphere.
The vibration substrate comprises a middle vibration area, a peripheral support part, an elastic connection part, a first lead welding part, an upper cover plate, a first support plate, a second support plate, a third support plate and an electrode plate, wherein the third support plate is adhered to a plane part, a vibration diaphragm and a piezoelectric vibrator are sequentially adhered to the third support plate and are arranged in a centering manner, the second support plate is adhered to the peripheral support part of the vibration substrate, the second support plate is made of insulating materials and participates in constructing a cavity, the electrode plate is insulated from the vibration substrate, and the upper cover plate, the first support plate and the electrode plate are sequentially stacked and adhered to the peripheral support part of the vibration substrate, so that the construction of the cavity is completed.
The lower part of the plane part is provided with the bottom plate lining plate, and the plane part is of an elastic flexible structure, wherein the center of the bottom plate lining plate is provided with a circular opening, so that the center part of the plane part can be exposed in the circular opening.
The invention is provided with a second bottom plate lining plate at the lower part of the bottom plate lining plate, wherein, at least one ventilation groove is carved on the upper surface of the second bottom plate lining plate, so that fluid is sucked into the cavity through the ventilation groove and then through the ventilation hole.
The invention also provides an excitation element, which comprises a piezoelectric vibrator and a vibration diaphragm, wherein the piezoelectric vibrator comprises a vibration substrate and the piezoelectric element arranged on one side of the vibration substrate, the vibration diaphragm is arranged on the other side of the vibration substrate, a sinking cavity is arranged on one side of the vibration substrate, which is close to the vibration diaphragm, and the vibration substrate is bent and deformed by applying alternating voltage with a certain frequency to the piezoelectric element, and the vibration diaphragm is bent along with the vibration substrate towards the same direction.
After the technical scheme is adopted, the fluid pump provided by the invention has the following beneficial effects:
The invention can obtain higher output pressure and output flow under the condition of not enlarging or even miniaturizing the fluid pump by increasing the amplitude in the working process of the fluid pump and reducing the loss in the working process, and further, the invention can further improve the output performance of the fluid pump by arranging a sinking cavity on the vibration substrate and constructing an excitation element by matching with the vibration diaphragm, thereby reducing the requirements on the shapes of the piezoelectric element and the vibration substrate, and can be round or square, and simultaneously, the deformation of the functional part of the vibration diaphragm is amplified by the resonance of the sinking cavity, so that the output flow and the output pressure of the pump are improved, and further, the plane part is arranged into an elastic structure, so that the output performance of the fluid pump is further improved.
Drawings
Fig. 1 is a schematic structural diagram of an excitation element according to a first embodiment;
FIG. 2 is a schematic diagram of a fluid pump according to the first embodiment;
fig. 3 is a schematic diagram showing a suction state of the fluid pump according to the first embodiment;
fig. 4 is a schematic diagram showing a discharge state of the fluid pump according to the first embodiment;
FIG. 5 is a schematic diagram of a fluid pump according to a second embodiment;
fig. 6 is an exploded view of the fluid pump of the third embodiment;
Fig. 7 is a schematic structural view of a fluid pump according to a third embodiment;
fig. 8 is an exploded view of the fluid pump of the fourth embodiment;
Fig. 9 is a schematic structural view of a fluid pump according to the fourth embodiment;
fig. 10 is an exploded view of the fluid pump of the fifth embodiment;
fig. 11 is a schematic structural diagram of a fluid pump according to the fifth embodiment.
Wherein the piezoelectric element 1, the piezoelectric vibrator 10, the vibration substrate 2, the first wire bonding portion 22, the elastic connection portion 23, the sinking chamber 21, the vibration diaphragm 3, the flat portion 4, the vent hole 41, the support plate 5, the cavity 51, the first support plate 50, the electrode sheet 52, the second support plate 53, the third support plate 54, the upper cover plate 6, the through hole 61, the bottom plate lining plate 7, the circular opening 71, the second bottom plate lining plate 8, and the vent groove 81.
Detailed Description
The invention is described in further detail below with reference to the drawings and the detailed description.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Example 1
As shown in fig. 1, the fluid pump of the present embodiment includes a piezoelectric vibrator 10, a vibrating diaphragm 3, and a flat portion 4, wherein the piezoelectric vibrator 10 includes a vibrating substrate 2 and a piezoelectric element 1 provided on one side of the vibrating substrate 2, the piezoelectric element 1 and the vibrating substrate 2 are arranged in a centered and bonded together to form the piezoelectric vibrator 10, the piezoelectric vibrator 10 is capable of bending vibration from a central portion to a peripheral portion thereof, the vibrating substrate 2 is made of a metal such as stainless steel, phosphor bronze, or the like, electrode films of substantially the entire surface are formed on upper and lower surfaces of the piezoelectric element 1, electrodes of the lower surface are electrically conducted with the vibrating substrate and form capacitive coupling, and conductor lines are connected to the electrodes of the upper surface and the vibrating substrate are electrically connected to a driving circuit, so that a rectangular wave-like or sine wave-like driving voltage is applied to cause the piezoelectric vibrator 10 to bending vibration from the central portion to the peripheral portion thereof.
As shown in fig. 2, a flat surface portion 4 is arranged below the vibration substrate 2, and the piezoelectric vibrator 10 is mounted on (contacts) the flat surface portion 4. Since the case when not driven is shown here, in fig. 2, the piezoelectric vibrator 10 appears to be fixed to the planar portion, but the peripheral portion of the piezoelectric vibrator 10 is not restrained by the planar portion 4. The piezoelectric vibrator 10 is disposed in contact with the flat surface portion 4 only when not in driving, and the flat surface portion 4 is provided with at least one vent hole 41, and the vent hole 41 is provided at or near the center of the area of the flat surface portion 4 opposed to the piezoelectric vibrator 10, and the piezoelectric vibrator 10 and the flat surface portion 4 are placed in contact when not in driving, but the periphery of the piezoelectric vibrator 10 is not restrained by the flat surface portion 4.
In order to increase the amplitude to increase the output pressure and the output flow rate, the present embodiment provides a novel excitation element, in which a sinking cavity 21 is added to a vibration substrate 2, a vibration diaphragm 3 is added, a piezoelectric element 1, the vibration substrate 2 and the vibration diaphragm 3 are sequentially bonded, and the centers of the three are aligned, thereby forming the excitation element, specifically, the vibration diaphragm 3 is disposed on the other side of the vibration substrate 2, the sinking cavity 21 having a certain diameter and depth is disposed on the side of the vibration substrate 2 near the vibration diaphragm 3, at least one vent 41 is disposed in the area of the planar portion 4 opposite to the sinking cavity 21, and the vibration substrate 2 is bent and deformed by applying an alternating voltage of a certain frequency to the piezoelectric element 1, so that the vibration diaphragm 3 resonates and is bent and deformed in the same direction as the vibration substrate 2 is sucked from the vent 41, and is discharged in the circumferential direction of the vent 41, so that no unnecessary gap is generated between the vibration diaphragm 3 and the planar portion 4, thereby improving the fluid conveying efficiency.
Further, the vibrating diaphragm 3 is fixed to the vibrating substrate 2, and the vibrating diaphragm 3 is capable of bending vibration at least in a portion facing the submerged chamber 21, and the vibrating diaphragm 3 is fixed and restrained in a circumferential portion of the submerged chamber 21, and can be fixed and restrained by adhesion.
Further, the portion of the planar portion 4 corresponding to the sinking cavity 21 may be designed as an elastic plate, and the portion of the planar portion 4 located in the circumferential direction of the sinking cavity 21 is a rigid plate or is fixedly restrained, so that the resonance of the whole pump can be further increased, and accordingly, the output pressure and the output flow are increased, and it should be noted that the planar portion 4 in this embodiment may also be rigid and not resonate along with the vibration of the excitation element.
The shapes of the piezoelectric element 1, the vibration substrate 2, and the vibration diaphragm 3 include, but are not limited to, square and circular, which are not limited thereto.
The settling chamber 21 is disposed at the central portion of the vibration substrate 2, and preferably, the settling chamber 21 is circular, so that the thin film portion of the center of the vibration diaphragm 3 corresponding to the settling chamber 21 is in a rotationally symmetrical shape, and thus, an unnecessary gap is not generated between the vibration diaphragm 3 and the plane portion 4, thereby enabling to improve efficiency in pumping fluid.
Fig. 3 and 4 show the working principle of the fluid pump according to the present embodiment, in which the piezoelectric vibrator 10 and the vibrating diaphragm 3 reach a certain resonance state at a proper working frequency, and are schematically shown in the working diagrams of the excitation element in the first-order vibration state.
By applying an alternating voltage to the piezoelectric vibrator 10, the piezoelectric vibrator 10 can be bent to be convex and concave, and the vibrating diaphragm 3 can be deformed to be convex and concave together with the piezoelectric vibrator 10, and has an effect of amplifying the deformation. First, as shown in fig. 3, in the fluid suction state, the piezoelectric vibrator 10 is bent upward to be convex, and the vibration diaphragm 3 is also in the convex state, so that the gap between the periphery of the excitation element and the flat surface portion 4 is smaller than the gap between the central portion thereof and the flat surface portion 4. In this way, the pressure in the center portion of the excitation element is reduced (negative pressure state) and the pressure in the periphery is increased, so that the fluid flows into the space from the vent hole 41 in the planar portion 4 and the fluid flows into the space through the gap between the periphery of the excitation element and the planar portion 4, but since the gap is small, the flow resistance is large, the amount of fluid that can flow in is small compared with the amount of fluid that flows in through the central vent hole 41 is small, and it can be considered that the amount of fluid that flows in through the central vent hole 41 is a set amount.
Then, as shown in fig. 4, in the fluid-pressed state, the piezoelectric vibrator 10 is bent downward to form a concave shape, and the vibrating diaphragm 3 is also brought into a concave state, so that a gap between the center portion of the excitation element and the planar portion 4 is smaller than a gap between the periphery thereof and the planar portion 4. In this way, the pressure in the center portion of the excitation element is increased and the pressure in the periphery is reduced, so that the fluid sucked into the cavity between the excitation element and the planar portion 4 flows in the peripheral direction and flows out through the center vent hole 41 in the planar portion 4, but since the gap between the center portion of the excitation element and the planar portion 4 is small, the flow resistance is large, the amount of fluid that can flow out is small, and the amount of fluid that can flow out is small compared with the fluid that flows out in the peripheral direction.
The above-described suction and discharge processes are repeated by the control of alternating current to achieve the purpose of continuously sucking fluid from the vent hole 41 and discharging fluid from the peripheral direction and continuously conveying the fluid, and further, since the periphery of the exciting element is unconstrained and the exciting element is constructed to amplify the vibration of the area of the vibrating diaphragm 3 corresponding to the cavity 21, the exciting element can obtain a larger sufficient amplitude during the vibration.
The pressure in the center portion and the periphery of the excitation element varies with the moment of bending vibration of the piezoelectric vibrator 10, and in general, a negative pressure is generated in the center portion of the excitation element, and a positive pressure is generated in the periphery in accordance with the negative pressure balance. Therefore, the excitation element and the planar portion 4 are held in a non-contact state throughout the movement of the excitation element, and the pressure in the center portion and the pressure in the periphery vary with the load pressure.
The higher the pump load, the lower the average height of the excitation element relative to the planar surface 4, and the corresponding flow rate decreases. Conversely, the lower the load on the pump, the higher the average height of the excitation element with respect to the planar portion 4, and the corresponding flow rate. Even when the pump operates under a large load pressure, the gap between the exciting element and the flat surface portion 4 is reduced, and the diaphragm 3 is brought into contact with the flat surface portion 4, so that the pump operation is not hindered.
Example two
As shown in fig. 5, the fluid pump of this embodiment is basically the same as the first embodiment in that the fluid pump further includes a support plate 5 and an upper cover plate 6, the support plate 5 is disposed on the plane portion 4 and is in sealing connection with the support plate 5, the upper cover plate 6 is disposed on the support plate 5, and the upper cover plate 6 is also in sealing connection with the support plate 5, thereby constructing a cavity 51, wherein a through hole 61 is disposed at the center or other position of the upper cover plate 6 and is in communication with the external atmosphere through the through hole 61.
When not driven, the excitation elements are arranged in contact with each other on the planar portion 4, and when driven by a power source, fluid is sucked through the center vent hole 41 and then the sucked fluid is discharged through the through hole 61 according to the principle described in the first embodiment. Thus, the fluid pump can perform suction and discharge functions.
Example III
As shown in fig. 6 and 7, which are respectively an exploded view and a sectional view of the structure of the fluid pump of the third embodiment, the present embodiment is basically the same as the first embodiment, except that the structure of the vibration substrate 2 is modified, and it can be seen from fig. 6 that the vibration substrate 2 includes a middle vibration region, a peripheral support portion, an elastic connection portion 23, and a first wire bonding portion 22. Wherein the elastic connection portion 23 is provided in an elastic structure having a small elastic coefficient, and the intermediate vibration region is flexibly supported on the peripheral support portion, so that it can be considered that the elastic support does not interfere with the bending vibration of the intermediate vibration region, i.e., the vibration region is substantially in an unconstrained state.
In addition, the fluid pump of the present embodiment further includes an upper cover plate 6, a first support plate 50, a second support plate 53, a third support plate 54, and an electrode sheet 52, wherein the third support plate 54 is adhered to the planar portion 4, and the excitation element is adhered to the third support plate 54, and the three are disposed in a centered manner. The thickness of the third support plate 54 is slightly larger than the thickness of the vibrating diaphragm 3, so that the gap between the vibrating diaphragm 3 and the planar portion 4 can be increased to achieve the flow rate improvement. In addition, when the fluid pump is operated under a high load condition, the gap between the exciting element and the planar portion 4 may be reduced, even a collision may occur, which can be improved by adding the third support plate 54, and the flow rate under the high load condition may be increased.
Then, the second support plate 53 is bonded to the peripheral support portion of the vibration substrate 2, the thickness of the second support plate 53 is slightly thicker than that of the piezoelectric element 1, the second support plate 53 is an insulating material, and the cavity 51 is built while the electrode sheet 52 is insulated from the vibration substrate 2.
Then, the upper cover plate 6, the first support plate 50 and the electrode sheet 52 are sequentially stacked and bonded to the peripheral support portions of the second support plate 53, thereby completing the construction of the cavity 51. The fluid pump is driven by the power supply to pump fluid through the vent hole 41 and discharge fluid through the through hole 61.
In addition, the electrode sheet 52 is provided with a second wire bonding portion 521 and a third wire bonding portion 522, wherein the third wire bonding portion 522 is connected to the upper surface of the piezoelectric element 1 by soldering.
Example IV
Fig. 8 and 9 are an exploded view and a sectional view, respectively, of a structure of a fluid pump according to a fourth embodiment, which is basically the same as the third embodiment, except that a bottom plate liner 7 is provided at a lower portion of the planar portion 4, and the planar portion 4 is changed from a rigid structure to a flexible structure having elasticity. The center of the base plate lining plate 7 is provided with a circular opening 71, so that the center part of the planar part 4 can be exposed in the circular opening 71, the piezoelectric vibrator 10 is applied with a driving voltage with proper frequency, the vibrating diaphragm 3 and the planar part 4 can reach a certain resonance state, and the vibrating phase of the planar part 4 and the vibrating diaphragm 3 are 180 degrees different in motion, so that the amplitude can be further increased, and the output performance of the fluid pump can be further improved.
In this way, by driving the piezoelectric vibrator 10 by applying an external driving voltage, the fluid pump can suck the fluid from the bottom surface vent hole 41 and discharge the fluid from the top through hole 61.
Example five
Fig. 10 and 11 are an exploded view and a sectional view, respectively, of the structure of the fifth fluid pump of the embodiment, which differs from the fourth fluid pump of the embodiment in that a second floor liner 8 is provided at the lower portion of the floor liner 7. At least one ventilation groove 81 is engraved on the upper surface of the second floor liner 8, so that fluid is sucked into the cavity 51 through the ventilation groove 81 and then through the ventilation holes 41. For further inflow properties, 3 or more ventilation slots 81 can be provided on the second floor lining 8 in a circumferentially symmetrical manner.
In addition, two or more such fluid pumps may be arranged in series-parallel to improve overall output performance.
The fluid pump provided by the invention can obtain higher output pressure and output flow under the condition that the fluid pump is not large and even smaller by increasing the amplitude in the working process of the fluid pump and reducing the loss in the working process, and further, the planar part is set to be an elastic structure, so that the output performance of the fluid pump can be further improved, the fluid pump has great market value and is worthy of popularization.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (9)
1. A fluid pump, comprising:
A piezoelectric vibrator (10), wherein the piezoelectric vibrator (10) comprises a vibration substrate (2) and a piezoelectric element (1) arranged on one side of the vibration substrate (2);
the vibrating diaphragm (3), the vibrating diaphragm (3) is fixed on the other side of the vibrating substrate (2), a sinking cavity (21) is arranged on one side, close to the vibrating diaphragm (3), of the vibrating substrate (2), the part, opposite to the sinking cavity (21), of the vibrating diaphragm (3) can vibrate in a bending mode, the vibrating diaphragm (3) is located at the circumferential part of the sinking cavity (21) to conduct fixed constraint, and the sinking cavity (21) resonates and amplifies deformation of a functional part of the vibrating diaphragm (3);
A flat surface part (4), wherein the flat surface part (4) is arranged on one side of the vibrating diaphragm (3) away from the vibrating substrate (2) in a close and opposite manner, and at least one vent hole (41) is arranged in a region of the flat surface part (4) opposite to the sinking cavity;
By applying an alternating voltage of a certain frequency to the piezoelectric element (1), the vibration substrate (2) is deformed in a bending manner, the vibration diaphragm (3) resonates and is deformed in a bending manner in the same direction as the vibration substrate (2), and fluid is sucked from the vent hole (41) and discharged from the vent hole (41) in the circumferential direction.
2. A fluid pump according to claim 1, wherein the portion of the planar portion (4) corresponding to the sinking chamber (21) is an elastic plate, and the portion of the planar portion (4) located in the circumferential direction of the sinking chamber (21) is a rigid plate or is fixedly restrained.
3. A fluid pump according to claim 1, wherein the piezoelectric element (1) and the vibration substrate (2) are arranged in a centered manner and bonded together to form a piezoelectric vibrator (10), and the piezoelectric vibrator (10) is capable of generating flexural vibration from a central portion to a peripheral portion thereof.
4. A fluid pump according to claim 1, wherein the sinking chamber (21) is disposed at a central portion of the vibration substrate (2), and the sinking chamber (21) is circular.
5. A fluid pump according to claim 1, further comprising a support plate (5) and an upper cover plate (6), wherein the support plate (5) is arranged on the planar portion (4) and is in sealing connection with the support plate (5), and the upper cover plate (6) is arranged on the support plate (5), and the upper cover plate (6) is also in sealing connection with the support plate (5), thereby constructing the cavity (51), wherein a through hole (61) is arranged in the center or other position of the upper cover plate (6), and is communicated with the outside atmosphere through the through hole (61).
6. A fluid pump according to claim 1, wherein the vibration substrate (2) comprises a middle vibration area, a peripheral support portion, an elastic connection portion (23) and a first wire welding portion (22), the fluid pump further comprises an upper cover plate (6), a first support plate (50), a second support plate (53), a third support plate (54) and an electrode plate (52), wherein the third support plate (54) is adhered to the planar portion (4), the vibration diaphragm and the piezoelectric vibrator are sequentially adhered to the third support plate (54), the three are placed in a centering manner, the second support plate (53) is adhered to the peripheral support portion of the vibration substrate (2), the second support plate (53) is made of an insulating material and participates in constructing the cavity (51), the electrode plate (52) is insulated from the vibration substrate (2), and the upper cover plate (6), the first support plate (50) and the electrode plate (52) are sequentially stacked and adhered to the peripheral support portion of the vibration substrate (2), so that the cavity (51) is constructed.
7. A fluid pump according to claim 5 or 6, wherein the lower part of the planar part (4) is provided with a base plate lining plate (7), and the planar part (4) is of a resiliently flexible structure, wherein the center of the base plate lining plate (7) is provided with a circular opening (71) so that the center part of the planar part (4) can be exposed in the circular opening (71).
8. A fluid pump according to claim 7, wherein a second floor liner (8) is provided at the lower part of the floor liner (7), wherein at least one ventilation groove (81) is engraved on the upper surface of the second floor liner (8) so that fluid is sucked into the cavity (51) through the ventilation groove (81) and then through the ventilation hole (41).
9. An excitation element is characterized by comprising a piezoelectric vibrator (10) and a vibration diaphragm (3), wherein the piezoelectric vibrator (10) comprises a vibration substrate (2) and a piezoelectric element (1) arranged on one side of the vibration substrate (2), the vibration diaphragm (3) is arranged on the other side of the vibration substrate (2), a sinking cavity (21) is arranged on one side, close to the vibration diaphragm (3), of the vibration substrate (2), a part, opposite to the sinking cavity (21), of the vibration diaphragm (3) can perform bending vibration, the part, opposite to the sinking cavity (21), of the vibration diaphragm (3) is fixedly restrained, the sinking cavity (21) resonates and amplifies deformation quantity of a functional part of the vibration diaphragm (3), and the vibration diaphragm (3) bends and deforms along with the vibration substrate (2) in the same direction by applying alternating voltage with a certain frequency to the piezoelectric element (1).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810515559.6A CN109695562B (en) | 2018-05-25 | 2018-05-25 | A fluid pump and an exciting element |
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| CN201810515559.6A CN109695562B (en) | 2018-05-25 | 2018-05-25 | A fluid pump and an exciting element |
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| CN109695562A CN109695562A (en) | 2019-04-30 |
| CN109695562B true CN109695562B (en) | 2025-02-18 |
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|---|---|---|---|---|
| WO2020261686A1 (en) * | 2019-06-27 | 2020-12-30 | 株式会社村田製作所 | Pump device |
| CN117970648B (en) * | 2024-03-28 | 2024-06-04 | 成都理工大学工程技术学院 | Wear comfortable MR intelligence glasses |
| CN119103092B (en) * | 2024-09-29 | 2025-02-28 | 常州威图流体科技有限公司 | Open flow generating device |
| CN119222139B (en) * | 2024-09-30 | 2025-03-18 | 常州威图流体科技有限公司 | Piezoelectric fluid pump |
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| CN102597520A (en) * | 2010-05-21 | 2012-07-18 | 株式会社村田制作所 | Fluid pump |
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| CN103573593B (en) * | 2013-11-01 | 2015-11-11 | 刘勇 | Piezoelectric flexible diaphragm pump |
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| CN102597520A (en) * | 2010-05-21 | 2012-07-18 | 株式会社村田制作所 | Fluid pump |
| CN107795466A (en) * | 2016-09-05 | 2018-03-13 | 研能科技股份有限公司 | Method for manufacturing fluid control device |
| CN208380823U (en) * | 2018-05-25 | 2019-01-15 | 常州威图流体科技有限公司 | A kind of fluid pump and exciting element |
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| CN109695562A (en) | 2019-04-30 |
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Address after: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Applicant after: CHANGZHOU WEITU FLUID TECHNOLOGY Co.,Ltd. Address before: 213164 room 2521, North Tower, Hui Yan building, Changzhou science and Education Town, 18 Wujin Road, Wujin, Changzhou. Applicant before: CHANGZHOU WEITU FLUID TECHNOLOGY Co.,Ltd. |
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