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CN109669065A - The voltage measurement method realized based on bar shaped radial polarisation grating - Google Patents

The voltage measurement method realized based on bar shaped radial polarisation grating Download PDF

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Publication number
CN109669065A
CN109669065A CN201811509063.4A CN201811509063A CN109669065A CN 109669065 A CN109669065 A CN 109669065A CN 201811509063 A CN201811509063 A CN 201811509063A CN 109669065 A CN109669065 A CN 109669065A
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light
strip
grating
linearly polarized
electro
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徐启峰
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Longyan University
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Longyan University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0084Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/24Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices

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  • General Physics & Mathematics (AREA)
  • Polarising Elements (AREA)

Abstract

The present invention relates to a kind of voltage measurement methods realized based on bar shaped radial polarisation grating, belong to electric system high voltage measuring technical field.Linearly polarized light is generated using light source and the polarizer, by electro-optic crystal and quarter-wave plate, so that linearly polarized light plane of polarization rotates, the strip light spots with dark line are converted to through bar shaped radial polarisation grating and analyzer again, finally by PSD displacement sensor or the displacement of ccd image sensor measurement hot spot dark fringe, the linear measurement of electric light phase delay angle can be realized.Advantage is: the direct linear measurement to electro-optic crystal phase delay may be implemented, measurement range is not limited by crystal half-wave voltage;And measurement pattern is unrelated with optical power, eliminates the influence to transformer measurement stability such as light source power fluctuation and optical path loss.

Description

The voltage measurement method realized based on bar shaped radial polarisation grating
Technical field
The present invention relates to electric system high voltage measuring technical fields, in particular to a kind of to be based on bar shaped radial polarisation grating The current measuring method of realization.
Background technique
Continuous development with electric system to voltage levels and large capacity, conventional voltage transformer is because of self-sensor machine The defect of reason gradually exposes the problems such as volume is big, insulation difficulty is big, the range of linearity is small, nil interface, it is difficult to adapt to electric power The requirement of system intelligent development.Optical voltage transformer refers to using the specific physical effect sense voltage of optical material, and leads to Cross the voltage transformer of optical fiber transmission signal.Compared with conventional voltage transformer, optical transformer has the advantage that (1) nothing The problems such as ferromagnetic resonance, magnetic saturation.(2) it insulate simple and reliable.(3) there is good anti-interference ability.(4) small in size, weight Gently, good economy performance.
Although optical voltage transformer is with the obvious advantage, there are still the solutions of many problems demands, as measurement range is small, is answered The line of force is birefringent and the influence of temperature drift is serious etc..It is above-mentioned for the optical voltage transformer based on electro-optic crystal Pockels effect The crux of problem is the limitation of polarization interference measurement pattern.Due to cannot achieve the direct survey to the delay of crystal current light phase Amount, generallys use polarization interference measurement pattern, phase delay is changed into intensity modulation, realizes voltage by the detection to light intensity Measurement.The size of this measurement pattern reflection optical power, is only capable of approximately linearly measuring limited electric light phase delay, stablize Property and reliability are limited by the problems such as temperature drift, crystal additional phase delay, half-wave voltage, are unable to satisfy the reality of electric system With requiring.Summary of the invention
The purpose of the present invention is to provide a kind of optical activity measurement methods realized based on bar shaped radial polarisation grating, solve The above problem of the existing technology.The present invention generates linearly polarized light using light source and the polarizer, by electro-optic crystal and four / mono- wave plate so that linearly polarized light plane of polarization rotates, then is converted to through bar shaped radial polarisation grating and analyzer and has The strip light spots of dark line, finally by PSD displacement sensor or the displacement of ccd image sensor measurement hot spot dark fringe, i.e., The linear measurement of electric light phase delay angle can be achieved.
Above-mentioned purpose of the invention is achieved through the following technical solutions:
Based on the voltage measurement method that bar shaped radial polarisation grating is realized, the side of the polarizer 2 is arranged in laser source 1, rises Electro-optic crystal 3 is arranged in the other side of inclined device 2, and quarter-wave plate 4 is placed between electro-optic crystal 3 and bar shaped radial polarisation grating 5, The other side of bar shaped radial polarisation grating 5 is arranged in PSD displacement sensor or ccd image sensor 6;The laser source 1 is emitted Laser linearly polarized light is obtained by the polarizer 2, electro-optic crystal 3 becomes biaxial crystal under Electric Field Modulated, and linearly polarized light enters Two polarization directions orthogonal linearly polarized light o light and e light are decomposed into after electro-optic crystal 3 along the z-axis direction, due to two polarization directions Refractive index it is different, o light and e light propagate generation electric light phase delay in electro-optic crystal 3, and size is directly proportional to voltage to be measured;o Light and e light incidence quarter-wave plate 4 simultaneously synthesize linearly polarized light under its effect, convert linearly polarized light polarization for phase delay The rotation in face;The linearly polarized light of outgoing enter bar shaped radial polarisation grating 5 formed strip light spots, when plane of polarization along the z-axis direction by When gradually rotating, strip light spots synchronous shift, and keep original intensity distribution;It is sensed through PSD displacement sensor or ccd image Device 6 positions intensity image to obtain the position of minimum intensity of light, hot spot displacement is detected, to obtain voltage value to be measured.
It shakes the consistent linear polarization light-transmissive grating in direction with bar shaped radial polarisation grating 5, and it is vertical with the saturating direction that shakes Linearly polarized light transmitance be zero, therefore transmitted light intensity by maximum is decremented to minimum on bar shaped radial polarisation grating 5, forms one The fixed strip light spots of a shape;With the variation of electric field to be measured, horizontal displacement, displacement and electric light phase occur for strip light spots Postpone linear.
The screen periods 10 of the bar shaped radial polarisation grating 5 are 200nm, and groove width 11 is 100nm, aluminum metal grizzly bar line Wide 12 be 100nm, and grating ridge thickness 13 is 200nm, duty ratio 0.5.
The PSD displacement sensor or 6 pairs of the ccd image sensor light spot images through bar shaped radial polarisation grating 5 Positioned, obtain electric light phase delay size and voltage value to be measured.
The beneficial effects of the present invention are:
Electric light phase delay is converted to the synchronous shift of hot spot by bar shaped radial polarisation grating principle, and passes through PSD Displacement sensor or ccd image sensor detect spot signal, complete the measurement of voltage.It may be implemented to electro-optic crystal phase The direct linear measurement of delay, measurement range are not limited by crystal half-wave voltage;And measurement pattern is unrelated with optical power, eliminates The influence to transformer measurement stability such as light source power fluctuation and optical path loss.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair Bright illustrative example and its explanation is used to explain the present invention, and is not constituted improper limitations of the present invention.
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the structural schematic diagram of bar shaped radial polarisation grating of the invention;
Fig. 3 is the partial enlargement diagram of bar shaped radial polarisation grating of the invention;
Fig. 4 is the surface of intensity distribution of the invention through bar shaped radial polarisation grating.
In figure: 1, laser source;2, the polarizer;3, electro-optic crystal;4, quarter-wave plate;5, bar shaped radial polarisation grating; 6, PSD displacement sensor or ccd image sensor;7, incident light;8, the polarization direction TM;9, the polarization direction TE;10, grating week Phase;11, groove width;12, aluminum metal grizzly bar line width;13, grating ridge thickness.
Specific embodiment
Detailed content and its specific embodiment of the invention are further illustrated with reference to the accompanying drawing.
Referring to FIG. 1 to FIG. 4, the voltage measurement method of the invention realized based on bar shaped radial polarisation grating, laser The side of the polarizer 2 is arranged in source 1, and electro-optic crystal 3 is arranged in the other side of the polarizer 2, and quarter-wave plate 4 is placed in electro-optic crystal Between 3 and bar shaped radial polarisation grating 5, PSD displacement sensor or ccd image sensor 6 are arranged in bar shaped radial polarisation grating 5 The other side;The laser that the laser source 1 is emitted obtains linearly polarized light by the polarizer 2, and electro-optic crystal 3 becomes under Electric Field Modulated At biaxial crystal, linearly polarized light enters after electro-optic crystal 3 is decomposed into the orthogonal linearly polarized light o in two polarization directions along the z-axis direction Light and e light, since the refractive index of two polarization directions is different, o light and e light are propagated generation electric light phase in electro-optic crystal 3 and are prolonged Late, size is directly proportional to voltage to be measured;O light and e light incidence quarter-wave plate 4 simultaneously synthesize linearly polarized light under its effect, will Phase delay is converted into the rotation of linearly polarized light plane of polarization;The linearly polarized light of outgoing enters bar shaped radial polarisation grating 5 and forms item Shape hot spot, when plane of polarization gradually rotates along the z-axis direction, strip light spots synchronous shift, and keep original intensity distribution;Through PSD displacement sensor or ccd image sensor 6 position intensity image to obtain the position of minimum intensity of light, detect hot spot displacement, To obtain voltage value to be measured.
It shakes the consistent linear polarization light-transmissive grating in direction with bar shaped radial polarisation grating 5, and it is vertical with the saturating direction that shakes Linearly polarized light transmitance be zero, therefore transmitted light intensity by maximum is decremented to minimum on bar shaped radial polarisation grating 5, forms one The fixed strip light spots of a shape;With the variation of electric field to be measured, horizontal displacement, displacement and electric light phase occur for strip light spots Postpone linear.
The structure of the bar shaped radial polarisation grating 5 is as shown in attached drawing 2 and Fig. 3, and in figure, 7 be incident light, the polarization side TM To the polarization direction 8 and TE 9, screen periods 10 are 200nm, and groove width 11 is 100nm, and aluminum metal grizzly bar line width 12 is 100nm, grating Ridge thickness 13 is 200nm, duty ratio 0.5.
The PSD displacement sensor or 6 pairs of the ccd image sensor light spot images through bar shaped radial polarisation grating 5 Positioned, obtain electric light phase delay size and voltage value to be measured.
The analyzing principle of bar shaped radial polarisation grating of the invention is:
Bar shaped radial polarisation grating proposed by the present invention is as shown in Figures 2 and 3, by electron-beam direct writing, nano impression and A kind of novel sub-wavelength aluminum metal polarization grating made of the technologies such as plasma etching, its main feature is that grating cutting (i.e. vibration thoroughly Direction) the radially even distribution in bar-shaped zone, interior outer radius be respectively screen periods be 200nm, groove width 100nm, Aluminum metal grizzly bar line width is 100nm, and grating ridge is with a thickness of 200nm, duty ratio 0.5.Due to grating TM mould high transmittance and The high reflectance of TE mould becomes tangential polarization light after incident light transmission, and it is vertical to can be described as light transmission shaft for grating under system coordinates In azimuthal linear polarizer, it is equivalent to its reference axis and has rotatedTherefore, the radial polarisation grating is under system coordinates Jones matrix G is
In formula, tTMIt is the diffraction efficiency (referred to as transmitance) of TM wave transmitted component, tTM=1;ξ is between two light waves Phase difference.
Principle schematic diagram of the invention as shown in Figure 1, the laser that is emitted of laser source 1 by the polarizer 2 to obtain line inclined Shake light, and electro-optic crystal 3 becomes biaxial crystal under Electric Field Modulated, and linearly polarized light is decomposed into along the z-axis direction after entering electro-optic crystal 3 Two polarization directions orthogonal linearly polarized light o light and e light, since the refractive index of two polarization directions is different, o light and e light are in electricity It is propagated in luminescent crystal 3 and generates electric light phase delay, size is directly proportional to voltage to be measured;O light and e light incidence quarter-wave plate 4 And linearly polarized light is synthesized under its effect, convert phase delay to the rotation of linearly polarized light plane of polarization;The linearly polarized light of outgoing Strip light spots, when plane of polarization gradually rotates along the z-axis direction, strip light spots sync bit are formed into bar shaped radial polarisation grating 5 It moves, and keeps original intensity distribution;Intensity image is positioned to obtain most through PSD displacement sensor or ccd image sensor 6 The position of small light intensity calculates spot displacement amount and voltage value to be measured.
If the light transmission shaft of the polarizer is located at y-axis direction, the light that light source issues is flat by its plane of polarization after the polarizer and y-axis Row, then the Jones matrix of incident polarized light is
The angle of the speed direction of electro-optic crystal and system x, y-coordinate axis direction are 45 °, according to Pockels effect, speed Electric light phase delay of δ is generated between axis, the Jones matrix J (δ) of electro-optic crystal is
The fast of standard quarter-wave plate, slow-axis direction are parallel with system y, x direction, and Jones matrix W is
Electric vector E (δ) after quarter-wave plate is emitted is the product of above-mentioned matrix
When above-mentioned linearly polarized light (its amplitude is A, azimuth α) is again by the grating analyzing of bar shaped radial polarisation, obtain
Then output intensity is
In formula: light vector subscript "+" indicates the Hermitian operation to light vector.
Light distribution through bar shaped radial polarisation grating is as shown in Fig. 4, forms that a light intensity is symmetrical and shape is solid Fixed strip light spots.When changing the polarization azimuth of linearly polarized light, strip light spots are subjected to displacement, and keep original intensity Distribution.If the length of grating is l, the polarization angular region of detection is (- pi/2 ,+pi/2), and the displacement at hot spot dark line center is △ x, Then the phase delay angle δ and l of electro-optic crystal meet
According to Pockels effect, voltage U and δ to be measured is calculated by formula (9)
Wherein λ is the wavelength of incident light;γ41For electro-optic coefficient;noFor the refractive index of o light;D is crystal along direction of an electric field Thickness;L is the light passing length of crystal;VπFor the half-wave voltage of crystal.
Therefore, the displacement △ x that hot spot dark line is detected by PSD displacement sensor or ccd image sensor, determines δ, from And voltage U to be measured is calculated.
Linearly polarized light generates phase delay after propagating certain distance in electro-optic crystal, and retardation and extra electric field are at just Than.It is consistent with the saturating direction of vibration a certain on grating when the linearly polarized light being emitted from electro-optic crystal passes through bar shaped radial polarisation grating Linear polarization light-transmissive grating, and the linearly polarized light transmitance vertical with the saturating direction of the vibration is zero, therefore in bar shaped radial polarisation Transmitted light intensity by maximum is decremented to minimum in a certain region on grating, forms the fixed strip light spots of a shape.Strip light spots It is moved horizontally with the variation of electric field to be measured, displacement and electric light phase-delay quantity are linear.Utilize PSD displacement sensing Device or ccd image sensor obtain electric light phase-delay quantity to spot location, realize the linear measurement to voltage, and measurement range It is not limited by crystal half-wave voltage, there is optical power independence.
Embodiment:
Experimental system is by taking 110kV voltage class as an example;Using single transverse mode LD light source, operation wavelength 808nm;Using LPVIS050 polarizing film, wave-length coverage 550-1500nm;Using BGO (Bi4Ge3O12) electro-optic crystal as sensing element, indulges To modulation, half-wave voltage 42.47kV;Using WPQ05M-808 quarter-wave plate, operation wavelength 808nm;Using bar shaped Screen periods are 200nm, and groove width 150nm, aluminum metal grizzly bar line width is 50nm, and grating ridge is with a thickness of 100nm, duty ratio 0.25;The ccd image sensor that the DALSA of use is produced, model S3-20-02K40.
Measurement is compared to the present invention by electronic transducer calibration instrument, the results are shown in Table 1, meets 0.5 grade of electricity Minor voltage transformer accuracy requirement.
The basic accuracy experimental data of table 1
The foregoing is merely preferred embodiments of the invention, are not intended to restrict the invention, for the technology of this field For personnel, the invention may be variously modified and varied.All any modification, equivalent substitution, improvement and etc. made for the present invention, It should all be included in the protection scope of the present invention.

Claims (4)

1.一种基于条形径向偏振光栅实现的电流测量方法,其特征在于:激光源(1)设置在起偏器(2)的一侧,起偏器(2)的另一侧设置电光晶体(3),四分之一波片(4)置于电光晶体(3)和条形径向偏振光栅(5)之间,PSD位移传感器或CCD图像传感器(6)设置在条形径向偏振光栅(5)的另一侧;所述激光源(1)出射的激光通过起偏器(2)得到线偏振光,电光晶体(3)在电场调制下变成双轴晶体,线偏振光进入电光晶体(3)后沿z轴方向分解为两个偏振方向正交的线偏振光o光和e光,由于两个偏振方向的折射率不同,o光和e光在电光晶体(3)内传播产生电光相位延迟,大小与待测电压成正比;o光和e光入射四分之一波片(4)并在其作用下合成线偏振光,将相位延迟转化为线偏振光偏振面的旋转;出射的线偏振光进入条形径向偏振光栅(5)形成条形光斑,当偏振面沿z轴方向逐渐转动时,条形光斑同步位移,并且保持原有的强度分布;经PSD位移传感器或CCD图像传感器(6)对光强图像定位得到最小光强的位置,从而得到光斑位移量和待测的电压值。1. A current measurement method based on a strip-shaped radial polarization grating, characterized in that: a laser source (1) is arranged on one side of a polarizer (2), and an electro-optical device is arranged on the other side of the polarizer (2) The crystal (3), the quarter-wave plate (4) is placed between the electro-optical crystal (3) and the strip radial polarization grating (5), and the PSD displacement sensor or the CCD image sensor (6) is set in the strip radial direction. The other side of the polarization grating (5); the laser light emitted from the laser source (1) obtains linearly polarized light through the polarizer (2), and the electro-optical crystal (3) becomes a biaxial crystal under the modulation of the electric field, and the linearly polarized light After entering the electro-optic crystal (3), it is decomposed into two linearly polarized lights o light and e light with orthogonal polarization directions along the z -axis. Internal propagation produces electro-optical phase delay, the magnitude of which is proportional to the voltage to be measured; o-light and e-light enter the quarter-wave plate (4) and synthesize linearly polarized light under its action, converting the phase delay into the plane of polarization of linearly polarized light The outgoing linearly polarized light enters the strip-shaped radial polarization grating (5) to form a strip-shaped light spot. When the polarization plane gradually rotates along the z-axis direction, the strip-shaped light spot moves synchronously and maintains the original intensity distribution; The displacement sensor or the CCD image sensor (6) locates the light intensity image to obtain the position of the minimum light intensity, thereby obtaining the displacement of the light spot and the voltage value to be measured. 2.根据权利要求1所述的基于条形径向偏振光栅实现的电流测量方法,其特征在于:与条形径向偏振光栅(5)振透方向一致的线偏振光能透过光栅,而与振透方向垂直的线偏振光透过率为零,因此在条形径向偏振光栅(5)上透射光强由最大递减到最小,形成一个形状固定的条形光斑;随着待测电场的变化,条形光斑发生水平位移,位移量与电光相位延迟成线性关系。2. The current measurement method based on the strip radial polarization grating according to claim 1, characterized in that: the linearly polarized light that is consistent with the vibration transmission direction of the strip radial polarization grating (5) can pass through the grating, and The transmittance of the linearly polarized light perpendicular to the vibration transmission direction is zero, so the transmitted light intensity on the strip-shaped radial polarization grating (5) decreases from the maximum to the minimum, forming a strip-shaped light spot with a fixed shape; With the change of , the strip light spot is horizontally displaced, and the displacement is linearly related to the electro-optical phase delay. 3.根据权利要求1所述的基于条形径向偏振光栅实现的电流测量方法,其特征在于:所述的条形径向偏振光栅(5)的光栅周期(10)为200nm,槽宽(11)为100nm,铝金属栅条线宽(12)为100nm,光栅脊厚度(13)为200nm,占空比为0.5。3. The current measurement method based on the strip-shaped radial polarization grating according to claim 1, characterized in that: the grating period (10) of the strip-shaped radial polarization grating (5) is 200 nm, and the groove width ( 11) is 100nm, the line width (12) of the aluminum metal grid is 100nm, the thickness of the grating ridge (13) is 200nm, and the duty ratio is 0.5. 4.根据权利要求1所述的基于条形径向偏振光栅实现的电流测量方法,其特征在于:所述的PSD位移传感器或CCD图像传感器(6)对透过条形径向偏振光栅(5)的光斑图像进行定位,得到电光相位延迟的大小和待测电压值。4. The current measurement method based on the strip-shaped radial polarization grating according to claim 1, characterized in that: the PSD displacement sensor or the CCD image sensor (6) is used to transmit the strip-shaped radial polarization grating (5). ) to locate the spot image to obtain the magnitude of the electro-optical phase delay and the voltage value to be measured.
CN201811509063.4A 2018-12-11 2018-12-11 The voltage measurement method realized based on bar shaped radial polarisation grating Pending CN109669065A (en)

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Application publication date: 20190423