CN109663214A - A kind of excimer treatment instrument cooling system structure and its control method - Google Patents
A kind of excimer treatment instrument cooling system structure and its control method Download PDFInfo
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- CN109663214A CN109663214A CN201811553537.5A CN201811553537A CN109663214A CN 109663214 A CN109663214 A CN 109663214A CN 201811553537 A CN201811553537 A CN 201811553537A CN 109663214 A CN109663214 A CN 109663214A
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- water
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- water tank
- cooler
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- 238000001816 cooling Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 119
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 31
- 239000010935 stainless steel Substances 0.000 claims abstract description 31
- 239000004743 Polypropylene Substances 0.000 claims abstract description 20
- -1 polypropylene Polymers 0.000 claims abstract description 20
- 229920001155 polypropylene Polymers 0.000 claims abstract description 20
- 239000000523 sample Substances 0.000 claims abstract description 18
- 239000002826 coolant Substances 0.000 claims abstract description 17
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 230000002159 abnormal effect Effects 0.000 claims description 7
- 230000001225 therapeutic effect Effects 0.000 claims description 7
- 230000017525 heat dissipation Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005057 refrigeration Methods 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000009897 systematic effect Effects 0.000 claims description 3
- 238000007667 floating Methods 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 abstract description 3
- 150000002500 ions Chemical class 0.000 description 49
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical group [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- 201000004681 Psoriasis Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000003729 cation exchange resin Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 208000017520 skin disease Diseases 0.000 description 1
- HGCGQDMQKGRJNO-UHFFFAOYSA-N xenon monochloride Chemical group [Xe]Cl HGCGQDMQKGRJNO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
- A61N5/0613—Apparatus adapted for a specific treatment
- A61N5/0616—Skin treatment other than tanning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20263—Heat dissipaters releasing heat from coolant
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20272—Accessories for moving fluid, for expanding fluid, for connecting fluid conduits, for distributing fluid, for removing gas or for preventing leakage, e.g. pumps, tanks or manifolds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20281—Thermal management, e.g. liquid flow control
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
- A61N2005/0626—Monitoring, verifying, controlling systems and methods
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
- A61N2005/0632—Constructional aspects of the apparatus
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
- A61N2005/0658—Radiation therapy using light characterised by the wavelength of light used
- A61N2005/0661—Radiation therapy using light characterised by the wavelength of light used ultraviolet
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
- A61N2005/0664—Details
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Physical Water Treatments (AREA)
Abstract
The present invention relates to a kind of excimer treatment instrument cooling system structure and its control methods, water pump is connected to polypropylene melt blown filter core, polypropylene melt blown filter core is connected to 308 ultraviolet light lamp caps, 308 ultraviolet light lamp caps are connected to flowmeter, flowmeter is connect with pressure switch, pressure switch is connect with stainless steel watch cooler, stainless steel watch cooler respectively with water tank, solenoid valve connection, solenoid valve is connect with Ion cup, Ion cup is connect with water tank, the microprocessor respectively with flowmeter, pressure switch, stainless steel watch cooler, PT100, ion concentration probe, solenoid valve, float switch connection, PT100 is installed on the water tank, float switch, ion concentration probe；The present invention controls the temperature of coolant circulation system, and the control of breakdown judge more particularly to coolant liquid intermediate ion concentration reduces the noise of cooling system to improve cooling system reliability, controls the ion concentration of coolant liquid, controls the light power of light source.
Description
Technical field
The present invention relates to the cooling systems of excimer treatment instrument, and in particular to a kind of excimer treatment instrument cooling system structure
And its control method, the effect of the design feature comprising its cooling system and each component.The present invention relates to coolant liquids to follow
The temperature of loop system controls, the control method of breakdown judge more particularly to coolant liquid intermediate ion concentration.
Background technique
Ultraviolet light excimer treatment instrument is a kind of for being suitable for the complementary irradiation of the skin diseases such as leucoderma, psoriasis
Therapeutic equipment.Its light source is ultraviolet light Excimer lamp, and it is 5000V that it, which is in voltage, under the exchange electric excitation of frequency 280K-300K
Light out.The electrode of ultraviolet light Excimer lamp is immersed in cooling water, and the ion concentration size in water affects ultraviolet light quasi-molecule
Voltage between lamp electrode, to influence its luminous efficiency.Its cooling system is particularly critical, and effect has following two points 1, cooling light
Source 2, influences the voltage of light source, to influence light power.In actual application, much cause since cooling system is unqualified
Lamp cap is burnt out, burst and light power not enough etc., influence the performance and yields of product.Ultraviolet light is quasi- in the past by the present invention
For molecular therapeutic apparatus cooling system by microprocessor monitors flow, the signals such as water level determine whether cooling recirculation system is normal,
It is normal just to work, it is abnormal just to alarm, see Fig. 3.These methods have the disadvantage that: 1, the cleannes of water are not accounted for, and it is cold
But water dirt will affect ion concentration and lamp cap light extraction efficiency in water.2, water pipe incident is not accounted in water passage circulation system
To extruding, causes hydraulic pressure big, water pipe is swarmed in.3, water intermediate ion concentration (resistance of water) is not accounted for lamp cap both end voltage
I.e. to the influence of light power.4, do not account for the temperature of coolant liquid, fan noise is excessive when refrigeration.
Summary of the invention
Mesh of the invention is to provide a kind of excimer treatment instrument cooling system structure, the temperature control to coolant circulation system
System, the control of breakdown judge more particularly to coolant liquid intermediate ion concentration reduce heat dissipation to improve cooling system reliability
The noise of system controls the ion concentration of coolant liquid, controls the light power of light source, and the purpose of the present invention also provides a kind of quasi- point
Sub- therapeutic equipment method for controlling cooling system.
In order to achieve the above object, the present invention has following technical solution:
A kind of excimer treatment instrument cooling system structure of the invention includes water pump, and polypropylene melt blown filter core, 308 is ultraviolet
Light lamp cap, flowmeter, pressure switch, stainless steel watch cooler, Ion cup, water tank, PT100, ion concentration probe, solenoid valve float
Ball switch, Ion cup, microprocessor, the water pump are connected to polypropylene melt blown filter core, polypropylene melt blown filter core and 308 ultraviolet lights
Lamp cap connection, 308 ultraviolet light lamp caps are connected to flowmeter, and flowmeter is connect with pressure switch, and pressure switch is cold with stainless steel watch
Device connection, stainless steel watch cooler are connect with water tank, solenoid valve respectively, and solenoid valve is connect with Ion cup, and Ion cup is connect with water tank,
The microprocessor respectively with flowmeter, pressure switch, stainless steel watch cooler, PT100, ion concentration probe, solenoid valve, floating ball
Switch connects, and PT100, float switch, ion concentration probe are installed on the water tank；Water in the water pump flows into polypropylene melt
Blown filter, then flows into 308 ultraviolet light lamp caps in the treatment head of excimer treatment instrument, and the water in lamp cap flows through flowmeter and pressure
Power switch is divided into two-way through the heat dissipation outflow of stainless steel watch cooler: flowing through Ion cup by a solenoid valve all the way, another way flows into
Water tank, finally returns to water pump by water tank, and the light source that water circulation flows through in the 308 ultraviolet light lamp cap cools down；The micro-control
Device control water pump starting processed, while monitoring water level, water temperature, flow, pressure, water intermediate ion concentration signal；The microcontroller is logical
The detection signal obtained is crossed, judges whether water circuit system is faulty, is controlled according to the revolving speed of the radiator fan of stainless steel watch cooler
The speed of refrigeration passes through the ion concentration in the on-off control cooling water for the solenoid valve for controlling Ion cup branch.
A kind of excimer treatment instrument method for controlling cooling system of the invention, there is following steps:
Therapeutic equipment booting, systematic microprocessor control water pump starting, and water, which starts the cycle over, flows through polypropylene melt blown filter core, ultraviolet
Then light lamp cap, flowmeter, pressure switch, stainless steel watch cooler flow into water tank all the way, another way flows into water tank through Ion cup,
Finally water pump is returned from water tank；Microprocessor starts to monitor flow signal, the pressure letter of pressure switch after water circulation system starting
Number, whether the water level signal of float switch is normal, and abnormal, then alarm stops working, normally, then continue sample temperature signal,
And ion concentration, microprocessor control the temperature of the revolving speed control coolant liquid of stainless steel watch cooler fan according to temperature signal,
The on-off that Ion cup branch way solenoid valve is controlled according to the size of ion concentration, to control the ion concentration of coolant liquid.
Due to taking above technical scheme, the present invention has the advantages that
1, it due to increasing pressure switch detection pressure, can effectively exclude to cause pressure excessive by extruding due to water pipe
The failure for making water pipe burst, keeps cooling system relatively reliable.
2, due to joined sundries and molecule in polypropylene melt blown filter core absorption water, the cleaning of coolant liquid is improved
Degree, extend coolant liquid advantageously reduces water intermediate ion concentration using the time.
3, with PT100 sample temperature, it can be determined that whether refrigeration is normal, while adjusting rotation speed of the fan, is freezing in this way
Measuring can reduce in enough situations by fan bring noise.
4, using solenoid valve control Ion cup branch on-off, the ion concentration (resistance of water) of control water can be existed
Between 500K-1500K, experiments have shown that equipment light power is stablized and meets 308 excimer treatment instrument ultraviolet lights and have within this range
The threshold value of curative effect.
5, for complete machine by micro controller process control, quantization is more accurate, can be required according to user, control the range of ion concentration.
Detailed description of the invention
Fig. 1 is present system program flow diagram；
Fig. 2 is cooling system structure block diagram of the present invention；
Fig. 3 is the cooling system structure block diagram of the prior art.
Specific embodiment
Referring to Fig. 1, Fig. 2, a kind of excimer treatment instrument cooling system structure of the invention includes water pump, polypropylene melt-blown
Filter core, 308 ultraviolet light lamp caps, flowmeter, pressure switch, stainless steel watch cooler, Ion cup, water tank, PT100, ion concentration are visited
Head, solenoid valve, float switch, Ion cup, microprocessor, the water pump are connected to polypropylene melt blown filter core, polypropylene melt sprinkling filter
Core is connected to 308 ultraviolet light lamp caps, and 308 ultraviolet light lamp caps are connected to flowmeter, and flowmeter is connect with pressure switch, pressure switch
It is connect with stainless steel watch cooler, stainless steel watch cooler is connect with water tank, solenoid valve respectively, and solenoid valve is connect with Ion cup, ion
Cup is connect with water tank, and the microprocessor is visited with flowmeter, pressure switch, stainless steel watch cooler, PT100, ion concentration respectively
Head, solenoid valve, float switch connect, and PT100, float switch, ion concentration probe are installed on the water tank；In the water pump
Water flows into polypropylene melt blown filter core, then flows into 308 ultraviolet light lamp caps in the treatment head of excimer treatment instrument, the water in lamp cap
Flow through flowmeter and pressure switch, through stainless steel watch cooler heat dissipation outflow be divided into two-way: all the way by a solenoid valve flow through from
Sub- cup, another way flow into water tank, finally return to water pump by water tank, water circulation flow through the light source in the 308 ultraviolet light lamp cap into
Row cooling；The microcontroller control water pump starting, while monitoring water level, water temperature, flow, pressure, water intermediate ion concentration signal；
The microcontroller judges whether water circuit system is faulty, according to the heat dissipation of stainless steel watch cooler by the detection signal obtained
The speed of the revolving speed control refrigeration of fan is dense by controlling the ion that the on-off of solenoid valve of Ion cup branch controls in cooling water
Degree.
A kind of excimer treatment instrument method for controlling cooling system of the invention, there is following steps:
Therapeutic equipment booting, systematic microprocessor control water pump starting, and water, which starts the cycle over, flows through polypropylene melt blown filter core, ultraviolet
Then light lamp cap, flowmeter, pressure switch, stainless steel watch cooler flow into water tank all the way, another way flows into water tank through Ion cup,
Finally water pump is returned from water tank；Microprocessor starts to monitor flow signal, the pressure letter of pressure switch after water circulation system starting
Number, whether the water level signal of float switch is normal, and abnormal, then alarm stops working, normally, then continue sample temperature signal,
And ion concentration, microprocessor control the temperature of the revolving speed control coolant liquid of stainless steel watch cooler fan according to temperature signal,
The on-off that Ion cup branch way solenoid valve is controlled according to the size of ion concentration, to control the ion concentration of coolant liquid.
The microprocessor model is SST89E516RD, the model PT100 of temperature sensor.
The stainless steel watch cooler (heat exchanger, Ningbo Sai Dun company), model A32S2P0, band 220V radiation air
Fan, fan model are that SUNON TaiWan, China builds quasi- A2175-HBL, surface air cooler material be stainless steel advantageously reduce in water from
Sub- concentration.
The 308 ultraviolet light lamp cap light source is xenon chloride excimer lamp, and manufacturer is Heraeus Inc., model 308
120Z；The molecule that xenon atom (Xe) and chlorine atom (Cl) form under high-frequency electric field effect；Chlorine atom receives one from xenon original
The electronics of son, latter two atom that is activated is in a unstable bonding state (quasi-molecule), to produce single-frequency quasi-molecule
Light.
The water tank upper installs PT100 (temperature sensor), ion probe (for measuring the resistance of water), float switch
(being used for sensed water level).
The ion concentration probe, manufacturer is Qi Zhi laser technology limited liability company, and model is ML-7085-03-
51, structure is two stainless steel iron staffs with nut, functions as the resistance of conductor measurement water.
The ionic agent being packed into the Ion cup is cation exchange resin.
The Ion cup and water tank are in parallel, connect with solenoid valve, by solenoid valve control, whether the branch has water flow to flow through；From
And achieve the purpose that control water concentration (water resistance between ion probe).
The polypropylene melt blown filter core model sooel filtration specification is 5um 3.7L/min 0.4Mpa, is used for
Filtration cycle water prevents water dirty.
Referring to Fig. 1, the course of work of the present invention is comprised the following steps:
Therapeutic equipment starting -> water pump starting -> water from water pump outflow -> polypropylene melt blown filter core -> 308 ultraviolet light lamp caps ->
Flowmeter -> pressure switch -> stainless steel watch cooler -> Ion cup -> water tank；
Water circulation is flowed along above-mentioned channel, and microcontroller obtains signal by detection, and sensed water level signal is abnormal, then
Alarm is shut down；Normally, then water-flow signal is continued to test, it is abnormal, it alarms, normally continues to test hydraulic signal, abnormal report
It is alert；Normal then sample temperature value, according to temperature value control radiator fan wind speed, sample ions concentration (resistance value of water), according to
Ion concentration value judges whether to open solenoid valve, the faulty alarm shutdown of circulating repetition above-mentioned steps, fault-free normal work.It is logical
Cross above-mentioned control method and program, it can be determined that whether water circuit system is faulty, can control water temperature and guarantees 308 ultraviolet light lamp caps
Heat dissipation it is normal, can control the resistance value of water between 500K-1500K.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.Here all embodiments can not be exhaustive.It is all to belong to this hair
The obvious changes or variations that bright technical solution is extended out are still in the scope of protection of the present invention.
Claims (2)
1. a kind of excimer treatment instrument cooling system structure, it is characterised in that: include water pump, polypropylene melt blown filter core, 308 is ultraviolet
Light lamp cap, flowmeter, pressure switch, stainless steel watch cooler, Ion cup, water tank, PT100, ion concentration probe, solenoid valve float
Ball switch, Ion cup, microprocessor, the water pump are connected to polypropylene melt blown filter core, polypropylene melt blown filter core and 308 ultraviolet lights
Lamp cap connection, 308 ultraviolet light lamp caps are connected to flowmeter, and flowmeter is connect with pressure switch, and pressure switch is cold with stainless steel watch
Device connection, stainless steel watch cooler are connect with water tank, solenoid valve respectively, and solenoid valve is connect with Ion cup, and Ion cup is connect with water tank,
The microprocessor respectively with flowmeter, pressure switch, stainless steel watch cooler, PT100, ion concentration probe, solenoid valve, floating ball
Switch connects, and PT100, float switch, ion concentration probe are installed on the water tank；Water in the water pump flows into polypropylene melt
Blown filter, then flows into 308 ultraviolet light lamp caps in the treatment head of excimer treatment instrument, and the water in lamp cap flows through flowmeter and pressure
Power switch is divided into two-way through the heat dissipation outflow of stainless steel watch cooler: flowing through Ion cup by a solenoid valve all the way, another way flows into
Water tank, finally returns to water pump by water tank, and the light source that water circulation flows through in the 308 ultraviolet light lamp cap cools down；The micro-control
Device control water pump starting processed, while monitoring water level, water temperature, flow, pressure, water intermediate ion concentration signal；The microcontroller is logical
The detection signal obtained is crossed, judges whether water circuit system is faulty, is controlled according to the revolving speed of the radiator fan of stainless steel watch cooler
The speed of refrigeration passes through the ion concentration in the on-off control cooling water for the solenoid valve for controlling Ion cup branch.
2. a kind of excimer treatment instrument method for controlling cooling system as described in claim 1, it is characterised in that there is following steps:
Therapeutic equipment booting, systematic microprocessor control water pump starting, and water, which starts the cycle over, flows through polypropylene melt blown filter core, ultraviolet lamp
Then head, flowmeter, pressure switch, stainless steel watch cooler flow into water tank all the way, another way flows into water tank through Ion cup, finally
Water pump is returned from water tank；Microprocessor starts to monitor flow signal after water circulation system starting, and the pressure signal of pressure switch floats
Whether the water level signal of ball switch is normal, abnormal, then alarm stops working, and normally, then continues sample temperature signal, Yi Jili
Sub- concentration, microprocessor according to temperature signal control stainless steel watch cooler fan revolving speed control coolant liquid temperature, according to from
The on-off of the size control Ion cup branch way solenoid valve of sub- concentration, to control the ion concentration of coolant liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811553537.5A CN109663214A (en) | 2018-12-19 | 2018-12-19 | A kind of excimer treatment instrument cooling system structure and its control method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811553537.5A CN109663214A (en) | 2018-12-19 | 2018-12-19 | A kind of excimer treatment instrument cooling system structure and its control method |
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| CN109663214A true CN109663214A (en) | 2019-04-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111432610A (en) * | 2020-05-11 | 2020-07-17 | 深圳市施全医疗科技有限公司 | Liquid cooling heat dissipation system of focusing ultrasonic therapeutic apparatus |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60217676A (en) * | 1984-04-12 | 1985-10-31 | Nec Corp | Ion laser device |
| CN1581366A (en) * | 2003-08-11 | 2005-02-16 | 株式会社日立制作所 | Electronic equipment provided with cooling system |
| CN103219633A (en) * | 2013-04-26 | 2013-07-24 | 中国科学院光电研究院 | Temperature control system of excimer laser |
| CN203503973U (en) * | 2013-09-23 | 2014-03-26 | 山东能源机械集团大族再制造有限公司 | Control system used for semiconductor laser |
-
2018
- 2018-12-19 CN CN201811553537.5A patent/CN109663214A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60217676A (en) * | 1984-04-12 | 1985-10-31 | Nec Corp | Ion laser device |
| CN1581366A (en) * | 2003-08-11 | 2005-02-16 | 株式会社日立制作所 | Electronic equipment provided with cooling system |
| CN103219633A (en) * | 2013-04-26 | 2013-07-24 | 中国科学院光电研究院 | Temperature control system of excimer laser |
| CN203503973U (en) * | 2013-09-23 | 2014-03-26 | 山东能源机械集团大族再制造有限公司 | Control system used for semiconductor laser |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111432610A (en) * | 2020-05-11 | 2020-07-17 | 深圳市施全医疗科技有限公司 | Liquid cooling heat dissipation system of focusing ultrasonic therapeutic apparatus |
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Application publication date: 20190423 |