CN109656016B - A kind of tubular deformation mirror and using method - Google Patents
A kind of tubular deformation mirror and using method Download PDFInfo
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Abstract
本发明涉及一种管状变形镜及使用方法，属于光学器件技术领域，所述管状变形镜包括基底层和压电层，且基底层和压电层均呈管状，所述基底层的内表面镀有光学反射膜，且其外表面与压电层的内表面光学粘接，所述压电层的内表面整体镀有第一电极形成变形镜的地电极，且其外表面镀有多个第二电极形成变形镜的驱动器，本发明将基底层和压电层设置呈管状，适用于对环形光束进行波前校正，结构新颖，同时，借助入射环形劈板、出射环形劈板增大环形光束入射至管状变形镜内表面的入射角，增大环形光束与管状变形镜的作用区域，有利于管状变形镜在作用区域设置更多的驱动器，增强变形镜的校正能力，实现更好的波前校正效果。
The invention relates to a tubular deformable mirror and a use method thereof, belonging to the technical field of optical devices. The tubular deformable mirror includes a base layer and a piezoelectric layer, and both the base layer and the piezoelectric layer are tubular, and the inner surface of the base layer is plated There is an optical reflection film, and its outer surface is optically bonded to the inner surface of the piezoelectric layer. The inner surface of the piezoelectric layer is integrally coated with the first electrode to form the ground electrode of the deformable mirror, and its outer surface is coated with a plurality of first electrodes. Two electrodes form the driver of the deformable mirror. In the present invention, the base layer and the piezoelectric layer are arranged in a tubular shape, which is suitable for wavefront correction of the ring beam. The structure is novel. At the same time, the ring beam is enlarged by means of the incident ring splitting plate and the outgoing ring splitting plate. The incident angle to the inner surface of the tubular deformable mirror increases the area of action between the annular beam and the tubular deformable mirror, which is conducive to setting more drivers in the action area of the tubular deformable mirror, enhancing the correction ability of the deformable mirror, and achieving a better wavefront correction effect.
Description
技术领域technical field
本发明属于光学器件技术领域，具体地说涉及一种管状变形镜及使用方法。The invention belongs to the technical field of optical devices, and in particular relates to a tubular deformable mirror and a use method thereof.
背景技术Background technique
自适应光学技术在激光装置、天文观测领域的光束质量控制中有着广泛的应用，变形镜是自适应光学技术中的核心器件。目前，变形镜的种类较多，如压电叠堆驱动变形镜、双压电片变形镜、微机械薄膜变形镜、液晶空间相位调制器等。不同的变形镜适用于不同的应用场景，如微机械薄膜变形镜适用于小口径光束的应用；液晶空间相位调制器适用于低功率、小口径光束的应用；压电叠堆驱动的变形镜则由于驱动器尺寸较大，只适用于大口径(数十mm以上)光束的应用。但是，针对光束截面较窄且外径较大的环形光束，传统的变形镜无法较好的进行应用和校正。Adaptive optics technology is widely used in laser devices and beam quality control in the field of astronomical observation. Deformable mirrors are the core devices in adaptive optics technology. At present, there are many types of deformable mirrors, such as piezoelectric stack-driven deformable mirrors, bimorph deformable mirrors, micromechanical film deformable mirrors, and liquid crystal space phase modulators. Different deformable mirrors are suitable for different application scenarios. For example, micromechanical thin-film deformable mirrors are suitable for small-aperture beam applications; liquid crystal spatial phase modulators are suitable for low-power, small-aperture beam applications; piezoelectric stack-driven deformable mirrors are Due to the large size of the driver, it is only suitable for the application of large-aperture (above tens of mm) beams. However, traditional deformable mirrors cannot be well applied and corrected for annular beams with narrow beam cross-section and large outer diameter.
发明内容Contents of the invention
针对现有技术的种种不足，为了解决上述问题，现提出一种管状变形镜及使用方法，通过入射环形劈板、出射环形劈板使环形光束以较大的入射角入射至管状变形镜的内表面，增大环形光束与管状变形镜的作用区域，有利于管状变形镜在作用区域设置更多的驱动器，实现更好的波前校正效果。Aiming at the various deficiencies of the prior art, in order to solve the above problems, a tubular deformable mirror and its use method are proposed, through which the annular beam enters the interior of the tubular deformable mirror at a relatively large incident angle through the incident annular splitting plate and the outgoing annular splitting plate. On the surface, increasing the action area of the annular beam and the tubular deformable mirror is beneficial to setting more drivers in the action area of the tubular deformable mirror to achieve a better wavefront correction effect.
为实现上述目的，本发明提供如下技术方案：To achieve the above object, the present invention provides the following technical solutions:
一种管状变形镜，包括基底层和压电层，且基底层和压电层均呈管状，所述基底层的内表面镀有光学反射膜，且其外表面与压电层的内表面光学粘接，所述压电层的内表面整体镀有第一电极形成变形镜的地电极，且其外表面镀有多个第二电极形成变形镜的驱动器。A tubular deformable mirror, comprising a base layer and a piezoelectric layer, and the base layer and the piezoelectric layer are both tubular, the inner surface of the base layer is coated with an optical reflection film, and its outer surface is optically aligned with the inner surface of the piezoelectric layer Bonding, the inner surface of the piezoelectric layer is integrally plated with first electrodes to form the ground electrode of the deformable mirror, and its outer surface is plated with multiple second electrodes to form the driver of the deformable mirror.
进一步，所述压电层的内表面镀有第一金属膜作为变形镜的地电极，其外表面镀有第二金属膜，所述第二金属膜分割成多个子模块形成变形镜的驱动器。Further, the inner surface of the piezoelectric layer is plated with a first metal film as the ground electrode of the deformable mirror, and its outer surface is plated with a second metal film, and the second metal film is divided into multiple sub-modules to form the driver of the deformable mirror.
进一步，所述压电层的内径大于基底层的外径，且两者的差不大于100微米。Further, the inner diameter of the piezoelectric layer is greater than the outer diameter of the base layer, and the difference between the two is not greater than 100 microns.
进一步，所述压电层的厚度为480-520微米。Further, the thickness of the piezoelectric layer is 480-520 microns.
另，本发明还提供一种管状变形镜的使用方法，包括如下步骤：In addition, the present invention also provides a method for using a tubular deformable mirror, which includes the following steps:
S1：沿着环形光束的传输方向，管状变形镜的前端放置入射环形劈板，管状变形镜的后端放置出射环形劈板，所述入射环形劈板与出射环形劈板的材质及结构相同，且两者以管状变形镜的中心线为对称轴对称设置；S1: Along the transmission direction of the annular beam, the front end of the tubular deformable mirror is placed with an incident annular splitter, and the rear end of the tubular deformable mirror is placed with an outgoing annular splitter. The material and structure of the incident annular splitter and the outgoing annular splitter are the same. And the two are symmetrically arranged with the central line of the tubular deformable mirror as the symmetrical axis;
S2：作为入射光束的环形光束经入射环形劈板传输至管状变形镜的内表面，经管状变形镜内表面反射的环形光束传输至出射环形劈板，且入射环形劈板、出射环形劈板均能增大环形光束入射至管状变形镜内表面的入射角。S2: The annular beam as the incident beam is transmitted to the inner surface of the tubular deformable mirror through the incident annular splitting plate, and the annular beam reflected by the inner surface of the tubular deformable mirror is transmitted to the outgoing annular splitting plate, and the incident annular splitting plate and the outgoing annular splitting plate are equal The incident angle of the annular light beam incident on the inner surface of the tubular deformable mirror can be increased.
进一步，所述入射环形劈板呈环状，其包括第一光束接触面和第二光束接触面，所述第一光束接触面垂直于入射环形劈板的内表面和外表面，所述第二光束接触面倾斜设置，且其与入射环形劈板的外表面存在夹角作为劈角，所述入射环形劈板的第一光束接触面作为环形光束的入射面。Further, the incident annular splitting plate is annular and includes a first beam contact surface and a second beam contacting surface, the first beam contacting surface is perpendicular to the inner surface and the outer surface of the incident annular splitting plate, and the second The beam contacting surface is arranged obliquely, and has an included angle with the outer surface of the incident annular splitting plate as a splitting angle, and the first beam contacting surface of the incident annular splitting plate serves as the incident surface of the annular beam.
进一步，所述劈角为β，所述环形光束入射至管状变形镜内表面的入射角为θ，则其中，n为入射环形劈板对环形光束的折射率。Further, the wedge angle is β, and the incident angle of the annular light beam incident on the inner surface of the tubular deformable mirror is θ, then Among them, n is the refractive index of the incident ring splitting plate to the ring beam.
进一步，所述步骤S2中，环形光束传输至出射环形劈板并作为输出光束透射输出，所述输出光束与入射光束的形态相同，所述入射环形劈板与出射环形劈板的第一光束接触面和第二光束接触面均镀有高透介质膜。Further, in the step S2, the annular beam is transmitted to the outgoing annular splitter and transmitted as an output beam, the output beam is in the same shape as the incident beam, and the incident annular splitter is in contact with the first beam of the outgoing annular splitter Both the surface and the second light beam contact surface are coated with a high-permeability dielectric film.
进一步，所述步骤S2中，环形光束传输至出射环形劈板并经出射环形劈板的第二光束接触面反射至管状变形镜内表面，经管状变形镜内表面反射的环形光束再次传输至入射环形劈板，并作为输出光束透射输出，所述输出光束与入射光束的形态相同，所述入射环形劈板的第一光束接触面和第二光束接触面均镀有高透介质膜，所述出射环形劈板的第二光束接触面镀有高反介质膜。Further, in the step S2, the annular beam is transmitted to the outgoing annular splitter and reflected to the inner surface of the tubular deformable mirror through the second beam contact surface of the outgoing annular splitter, and the annular beam reflected by the inner surface of the tubular deformable mirror is transmitted to the incident beam again. An annular splitting plate, which is transmitted and output as an output beam, the output beam is in the same shape as the incident beam, and the first beam contact surface and the second beam contact surface of the incident annular splitting plate are coated with a high-transmittance dielectric film, and the The contact surface of the second light beam exiting the annular split plate is coated with a high anti-dielectric film.
本发明的有益效果是：The beneficial effects of the present invention are:
将基底层和压电层设置呈管状，适用于对环形光束进行波前校正，结构新颖，同时，借助入射环形劈板、出射环形劈板增大环形光束入射至管状变形镜内表面的入射角，增大环形光束与管状变形镜的作用区域，有利于管状变形镜在作用区域设置更多的驱动器，增强变形镜的校正能力，实现更好的波前校正效果。The base layer and the piezoelectric layer are arranged in a tubular shape, which is suitable for wavefront correction of the ring beam. The structure is novel. At the same time, the incident angle of the ring beam incident on the inner surface of the tubular deformable mirror is increased by means of the incident ring splitter and the exit ring splitter. , increasing the action area of the annular beam and the tubular deformable mirror is conducive to setting more drivers in the action area of the tubular deformable mirror, enhancing the correction ability of the deformable mirror, and achieving a better wavefront correction effect.
附图说明Description of drawings
图1是本发明的整体结构示意图；Fig. 1 is the overall structural representation of the present invention;
图2是实施例二的光路示意图；Fig. 2 is the optical path schematic diagram of embodiment two;
图3是环形光束入射至管状变形镜内表面的入射角与劈角的示意图；Fig. 3 is a schematic diagram of the incident angle and the splitting angle of the annular light beam incident on the inner surface of the tubular deformable mirror;
图4是实施例三的光路示意图；Fig. 4 is the optical path schematic diagram of embodiment three;
图5(a)是待校正的环形光束的波前畸变示意图；Figure 5(a) is a schematic diagram of the wavefront distortion of the ring beam to be corrected;
图5(b)是采用传统变形镜校正后的环形光束的波前畸变示意图；Figure 5(b) is a schematic diagram of the wavefront distortion of the ring beam corrected by the traditional deformable mirror;
图5(c)是采用实施例二校正后的环形光束的波前畸变示意图。Fig. 5(c) is a schematic diagram of the wavefront distortion of the ring beam corrected by the second embodiment.
附图中：1-基底层、2-压电层、3-入射环形劈板、301-第一光束接触面、302-第二光束接触面、303-入射环形劈板的外表面、304-入射环形劈板的内表面、4-管状变形镜、5-出射环形劈板。In the drawings: 1-base layer, 2-piezoelectric layer, 3-incident ring splitting plate, 301-first beam contact surface, 302-second beam contact surface, 303-outer surface of incident ring splitting plate, 304- The inner surface of the incident annular splitting plate, 4-tube deformable mirror, 5-exiting annular splitting plate.
具体实施方式Detailed ways
为了使本领域的人员更好地理解本发明的技术方案，下面结合本发明的附图，对本发明的技术方案进行清楚、完整的描述，基于本申请中的实施例，本领域普通技术人员在没有做出创造性劳动的前提下所获得的其它类同实施例，都应当属于本申请保护的范围。此外，以下实施例中提到的方向用词，例如“上”“下”“左”“右”等仅是参考附图的方向，因此，使用的方向用词是用来说明而非限制本发明创造。In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the present invention is clearly and completely described below in conjunction with the accompanying drawings of the present invention. Based on the embodiments in this application, those of ordinary skill in the art will Other similar embodiments obtained without creative work shall all fall within the scope of protection of this application. In addition, the directional words mentioned in the following embodiments, such as "upper", "lower", "left", "right", etc., are only referring to the directions of the drawings, therefore, the directional words used are for illustration rather than limitation. invent.
实施例一：Embodiment one:
如图1所示，一种管状变形镜，包括基底层1和压电层2，且基底层1和压电层2均呈管状，所述基底层1的内表面抛光并镀有光学反射膜，用于反射环形光束，所述基底层1的外表面做打毛处理并通过光学胶与压电层2的内表面相粘接。所述压电层2的内表面整体镀有第一电极形成变形镜的地电极，且其外表面镀有多个第二电极形成变形镜的驱动器。所述基底层1和压电层2均可以设置成整体，也可以由若干曲面拼接而成。As shown in Figure 1, a tubular deformable mirror includes a base layer 1 and a piezoelectric layer 2, and the base layer 1 and the piezoelectric layer 2 are both tubular, and the inner surface of the base layer 1 is polished and coated with an optical reflection film , used to reflect the annular light beam, the outer surface of the base layer 1 is roughened and bonded to the inner surface of the piezoelectric layer 2 through optical glue. The inner surface of the piezoelectric layer 2 is integrally coated with a first electrode to form a ground electrode of the deformable mirror, and its outer surface is coated with a plurality of second electrodes to form a driver of the deformable mirror. Both the base layer 1 and the piezoelectric layer 2 can be arranged as a whole, or can be formed by splicing several curved surfaces.
具体的，所述压电层2的内表面镀有第一金属膜作为变形镜的地电极，其外表面镀有第二金属膜，所述第二金属膜分割成多个子模块形成变形镜的驱动器。所述驱动器可以是但不限于压电片状或柱状，驱动器的排布、数量等可以根据待校正环形光束的波前畸变尺寸、畸变特性以及要实现的校正目标进行具体设计。本实施例中，所述驱动器为压电片状。所述压电层2的内径大于基底层1的外径，且两者的差不大于100微米，避免光学胶的厚度过厚。所述压电层的厚度为480-520微米，以保证较好的驱动能力。Specifically, the inner surface of the piezoelectric layer 2 is coated with a first metal film as the ground electrode of the deformable mirror, and its outer surface is coated with a second metal film, and the second metal film is divided into multiple sub-modules to form the ground electrode of the deformable mirror. driver. The driver can be, but not limited to, a piezoelectric sheet or a column. The arrangement and quantity of the drivers can be specifically designed according to the wavefront distortion size and distortion characteristics of the ring beam to be corrected, and the correction goal to be achieved. In this embodiment, the driver is in the shape of a piezoelectric sheet. The inner diameter of the piezoelectric layer 2 is larger than the outer diameter of the base layer 1, and the difference between the two is not more than 100 microns, so as to avoid excessive thickness of the optical glue. The thickness of the piezoelectric layer is 480-520 microns to ensure better driving capability.
如图2所示，一种采用所述管状变形镜的使用方法，包括以下步骤：沿着环形光束的传输方向，管状变形镜4的前端放置入射环形劈板3，管状变形镜4的后端放置出射环形劈板5，所述入射环形劈板3与出射环形劈板5的材质及结构相同，且两者以管状变形镜4的中心线为对称轴对称设置，作为入射光束的环形光束经入射环形劈板3传输至管状变形镜4的内表面(即基底层1的内表面)，经管状变形镜4内表面反射的环形光束传输至出射环形劈板5，且入射环形劈板3、出射环形劈板5均促使环形光束径向的传输角度发生改变，使环形光束以较大的入射角入射至管状变形镜4的内表面，增大环形光束与管状变形镜4的作用区域，有利于管状变形镜4在作用区域设置更多的驱动器，实现更好的波前校正效果。As shown in Figure 2, a kind of using method that adopts described tubular deformable mirror, comprises the following steps: along the transmission direction of annular light beam, the front end of tubular deformable mirror 4 places incident annular splitter 3, the rear end of tubular deformable mirror 4 Place the outgoing annular splitting plate 5, the material and structure of the incident annular splitting plate 3 and the outgoing annular splitting plate 5 are the same, and both are symmetrically arranged with the central line of the tubular deformable mirror 4, as the annular beam of the incident beam passes through The incident annular splitting plate 3 is transmitted to the inner surface of the tubular deformable mirror 4 (i.e. the inner surface of the base layer 1), and the annular light beam reflected by the inner surface of the tubular deformable mirror 4 is transmitted to the outgoing annular splitting plate 5, and the incident annular splitting plate 3, The outgoing annular splitting plate 5 all promotes the radial transmission angle of the annular light beam to change, so that the annular light beam is incident on the inner surface of the tubular deformable mirror 4 with a larger incident angle, increasing the area of action between the annular light beam and the tubular deformable mirror 4. It is beneficial to arrange more drivers in the action area of the tubular deformable mirror 4 to achieve a better wavefront correction effect.
具体的，如图3所示，所述入射环形劈板3呈环状，其包括第一光束接触面301和第二光束接触面302，所述第一光束接触面301垂直于入射环形劈板的内表面304和入射环形劈板的外表面303，所述第二光束接触面302倾斜设置，且其与入射环形劈板的外表面303存在夹角作为劈角，所述入射环形劈板3的第一光束接触面301作为环形光束的入射面，所述劈角为β，所述环形光束入射至管状变形镜内表面的入射角为θ，则：Specifically, as shown in FIG. 3, the incident annular splitter 3 is annular, and it includes a first beam contact surface 301 and a second beam contact surface 302, and the first beam contact surface 301 is perpendicular to the incident annular splitter. The inner surface 304 of the incident annular splitting plate and the outer surface 303 of the incident annular splitting plate, the second beam contact surface 302 is arranged obliquely, and there is an included angle with the outer surface 303 of the incident annular splitting plate as the splitting angle, and the incident annular splitting plate 3 The first beam contact surface 301 is used as the incident surface of the annular beam, the split angle is β, and the incident angle of the annular beam incident on the inner surface of the tubular deformable mirror is θ, then:
，其中，n为入射环形劈板3对环形光束的折射率，θ1为环形光束在入射环形劈板3的第二光束接触面302上的入射角，θ2为环形光束在入射环形劈板3的第二光束接触面302上的出射角，α为经第二光束接触面302出射的光线与水平方向的夹角。 , where n is the refractive index of the incident annular splitter 3 to the annular beam, θ 1 is the incident angle of the annular beam on the second beam contact surface 302 of the incident annular splitter 3, and θ 2 is the incident angle of the annular beam on the incident annular splitter 3 on the second beam contacting surface 302, α is the angle between the light emitted through the second beam contacting surface 302 and the horizontal direction.
实施例二：Embodiment two:
本实施例与实施例一相同的部分不再赘述，不同的是：The same part of this embodiment and Embodiment 1 will not be described again, the difference is:
如图2所示，环形光束传输至出射环形劈板5并作为输出光束透射输出，所述输出光束与入射光束的形态相同，也就是说，根据光路的可逆性，由于入射环形劈板3与出射环形劈板5的结构、材质相同，加之，入射环形劈板3与出射环形劈板5对称设置，输出光束恢复到入射光束的原形态。为保证光能利用率，所述入射环形劈板3与出射环形劈板5的第一光束接触面和第二光束接触面均镀有高透介质膜。As shown in Figure 2, the annular light beam is transmitted to the outgoing annular splitter 5 and transmitted as the output beam output, and the shape of the output beam is the same as that of the incident beam, that is to say, according to the reversibility of the optical path, due to the incident annular splitter 3 and The structure and material of the outgoing annular splitting plate 5 are the same. In addition, the incident annular splitting plate 3 and the outgoing annular splitting plate 5 are arranged symmetrically, and the output beam returns to the original form of the incident beam. In order to ensure light energy utilization, the first beam contact surface and the second beam contact surface of the incident annular splitter 3 and the outgoing annular splitter 5 are coated with a high-transmittance dielectric film.
具体的，呈周向和径向分布的待校正的环形光束的波前畸变如图5(a)所示，所述待校正的环形光束的口径为50mm，壁厚4mm，PV值为6um。所述待校正的环形光束经传统变形镜校正后的波前畸变如图5(b)所示，与校正前波前畸变的分布和PV值基本一致，表明传统变形镜对此类大口径、薄壁环形光束的波前畸变校正能力极弱。采用本实施例校正后波前畸变如图5(c)所示，波前畸变呈现出均匀分布的特性，PV值为0.3um，且PV值仅为校正前PV值的5％。显然，与传统变形镜相比，管状变形镜对大口径、薄壁环形光束的波前畸变的校正能力有了显著提升。Specifically, the wavefront distortion of the circular beam to be corrected distributed circumferentially and radially is shown in FIG. The wavefront distortion of the annular light beam to be corrected after being corrected by the traditional deformable mirror is shown in Figure 5(b), which is basically consistent with the distribution and PV value of the wavefront distortion before correction, indicating that the traditional deformable mirror is suitable for such large-aperture, Thin-walled ring beams are extremely weak in correcting for wavefront distortion. The wavefront distortion corrected by this embodiment is shown in Fig. 5(c), the wavefront distortion presents a uniform distribution characteristic, the PV value is 0.3um, and the PV value is only 5% of the PV value before correction. Obviously, compared with the traditional deformable mirror, the tubular deformable mirror has a significant improvement in the ability to correct the wavefront distortion of the large-aperture, thin-walled annular beam.
实施例三：Embodiment three:
本实施例与实施例一相同的部分不再赘述，不同的是：The same part of this embodiment and Embodiment 1 will not be described again, the difference is:
如图4所示，环形光束传输至出射环形劈板5并经出射环形劈板5的第二光束接触面反射至管状变形镜4内表面，经管状变形镜4内表面反射的环形光束再次传输至入射环形劈板3，并作为输出光束透射输出，也就是说，环形光束两次经过管状变形镜4，使管状变形镜4的校正能力增大一倍，同时，输出光束与入射光束的形态相同。所述入射环形劈板3的第一光束接触面和第二光束接触面均镀有高透介质膜，所述出射环形劈板5的第二光束接触面镀有高反介质膜。As shown in Figure 4, the annular light beam is transmitted to the outgoing annular splitter plate 5 and reflected to the inner surface of the tubular deformable mirror 4 through the second beam contact surface of the outgoing annular splitter plate 5, and the annular beam reflected by the inner surface of the tubular deformable mirror 4 is transmitted again to the incident annular splitting plate 3, and transmit and output as the output beam, that is to say, the annular beam passes through the tubular deformable mirror 4 twice, so that the correction ability of the tubular deformable mirror 4 is doubled, and at the same time, the shape of the output beam and the incident beam same. Both the first beam contact surface and the second beam contact surface of the incident annular splitter 3 are coated with a high-transmittance dielectric film, and the second beam contact surface of the outgoing annular splitter 5 is coated with a high-reflection dielectric film.
以上已将本发明做一详细说明，以上所述，仅为本发明之较佳实施例而已，当不能限定本发明实施范围，即凡依本申请范围所作均等变化与修饰，皆应仍属本发明涵盖范围内。The present invention has been described in detail above. The foregoing description is only a preferred embodiment of the present invention, and should not limit the implementation scope of the present invention. within the scope of the invention.
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