CN109655116B - System and method for controlling precision of small pulsating flow by utilizing gas micro-pressure difference based on PWM control method - Google Patents
System and method for controlling precision of small pulsating flow by utilizing gas micro-pressure difference based on PWM control method Download PDFInfo
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Abstract
本发明涉及差压流量测试领域,公开了一种基于PWM控制法利用气体微压差控制脉动小流量精度的系统,包括微压传感器,所述传感器内设有传感器主腔体、传感器第一腔体和传感器第二腔体,所述传感器第二腔体、传感器主腔体均与传感器连接,所述传感器主腔体与精密微压差计连接,所述精密微压差计还与传感器第一腔体和传感器第二腔体连接,所述传感器第二腔体与偏心转子抽气泵连接,所述偏心转子抽气泵通过D/A转换器与单片机连接,所述单片机具有PWM控制功能,所述单片机还与精密微压差计和PC机连接。本发明可以得到PWM控制的标定流量在精度要求范围之内,精度能控制在小于2%以内。
The invention relates to the field of differential pressure flow testing, and discloses a system based on a PWM control method for controlling the precision of pulsating small flow by utilizing gas micro-pressure difference, comprising a micro-pressure sensor, wherein the sensor is provided with a main cavity of the sensor and a first cavity of the sensor body and the second cavity of the sensor, the second cavity of the sensor and the main cavity of the sensor are both connected with the sensor, the main cavity of the sensor is connected with the precision micro differential pressure gauge, and the precision micro differential pressure gauge is also connected with the sensor first cavity A cavity is connected to the second cavity of the sensor, the second cavity of the sensor is connected to the eccentric rotor air pump, and the eccentric rotor air pump is connected to the single-chip microcomputer through the D/A converter, and the single-chip microcomputer has the PWM control function, so The single-chip microcomputer is also connected with a precision micro-differential pressure gauge and a PC. The invention can obtain that the calibrated flow controlled by the PWM is within the required precision range, and the precision can be controlled within less than 2%.
Description
技术领域technical field
本发明涉及差压流量测试领域,更具体地说,特别涉及一种基于PWM控制法利用气体微压差控制脉动小流量精度的系统和方法。The invention relates to the field of differential pressure flow testing, and more particularly, to a system and method for controlling the precision of small pulsating flow by utilizing gas micro-pressure difference based on a PWM control method.
背景技术Background technique
压差流量计是采用介质流体流经节流装置时产生的压力差与流量之间存在一定关系的工作原理进行测定的,压差流量计种类很多,技术也非常成熟。压差流量计包括:孔板流量计、喷嘴流量计、文丘里流量计、节流流量计等等。The differential pressure flowmeter is measured by the working principle that there is a certain relationship between the pressure difference and the flow rate generated when the medium fluid flows through the throttling device. There are many types of differential pressure flowmeters, and the technology is also very mature. Differential pressure flowmeters include: orifice flowmeters, nozzle flowmeters, Venturi flowmeters, throttle flowmeters, etc.
市场上现有的压差流量计优点:结构简单,无可动部件;可靠性较高;复现性能好;适应性较广,它适用于各种工况下的单相流体,适用的管道直径范围宽,可以配用通用差压计;装置已标准化。Advantages of existing differential pressure flowmeters on the market: simple structure, no moving parts; high reliability; good repeatability; wide adaptability, it is suitable for single-phase fluids under various working conditions, suitable for pipelines Wide diameter range, can be equipped with general differential pressure gauge; device is standardized.
缺点是安装要求严格;流量计前后要求较长直管段,所以体积较大;测量范围窄,一般范围度为3:1;压力损失较大;对于较小直径的管道测量比较困难;精确度不够高(±1%~±2%);不适合测量小微流量及脉动气流。The disadvantage is that the installation requirements are strict; the front and rear of the flowmeter require a long straight pipe section, so the volume is large; the measurement range is narrow, and the general range is 3:1; the pressure loss is large; it is difficult to measure pipes with small diameters; the accuracy is not enough High (±1%~±2%); not suitable for measuring small flow and pulsating airflow.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于提供一种基于PWM控制法利用气体微压差控制脉动小流量精度的系统和方法,本方案不用考虑流量计的结构与大小,只要考虑取到充分的压差值的结构即可,也能用PWM算法滤除脉动流量的波动控制流量精度到±2%以内,还可以自由设定标定流量。The purpose of the present invention is to provide a system and method based on the PWM control method for using the gas micro-pressure difference to control the precision of small pulsating flow. Yes, the PWM algorithm can also be used to filter out the fluctuation of the pulsating flow and control the flow accuracy to within ±2%, and the calibration flow can be set freely.
为了达到上述目的,本发明采用的技术方案如下:In order to achieve the above object, the technical scheme adopted in the present invention is as follows:
一种基于PWM控制法利用气体微压差控制脉动小流量精度的系统,包括微压传感器,所述微压传感器内设有传感器主腔体、传感器第一腔体和传感器第二腔体,所述传感器主腔体与精密微压差计连接,所述精密微压差计还与传感器第一腔体和传感器第二腔体连接,所述传感器第二腔体与偏心转子抽气泵连接,所述偏心转子抽气泵通过D/A转换器与单片机连接,所述单片机具有PWM控制功能,所述单片机还与精密微压差计和PC机连接。A system based on a PWM control method using a gas micro-pressure difference to control the accuracy of a small pulsating flow, comprising a micro-pressure sensor, wherein the micro-pressure sensor is provided with a main sensor cavity, a first sensor cavity and a second sensor cavity, so The main cavity of the sensor is connected with the precision micro differential pressure gauge, the precision micro differential pressure gauge is also connected with the first cavity of the sensor and the second cavity of the sensor, and the second cavity of the sensor is connected with the eccentric rotor air pump, so The eccentric rotor air pump is connected with a single chip microcomputer through a D/A converter, the single chip chip has a PWM control function, and the single chip chip is also connected with a precision micro differential pressure gauge and a PC.
进一步地,所述单片机通过PWM功能控制微压差流量。Further, the single-chip microcomputer controls the micro-pressure differential flow through the PWM function.
本发明还提供一种基于PWM控制法利用气体微压差控制脉动小流量精度的方法,该方法包括以下步骤:The present invention also provides a method for controlling the precision of pulsating small flow rate by utilizing gas micro-pressure difference based on the PWM control method, and the method comprises the following steps:
S1、开始测量;S1, start measurement;
S2、读取标定的中心压差值A;S2. Read the calibrated central differential pressure value A;
S3、读取设定的上下压差偏差值表压值B;S3. Read the gauge pressure value B of the set upper and lower pressure difference deviation value;
S4、读取微压传感器的测量值Ci;S4, read the measurement value Ci of the micro-pressure sensor;
S5、计算出采样Ci加权移动平均C;S5, calculate the sampling Ci weighted moving average C;
S6、当C值在A±B范围内,重复步骤S2;否则根据压差与流量关系控制算法输出PWM控制泵电压给D/A转换器;S6, when the C value is within the range of A±B, repeat step S2; otherwise, output the PWM control pump voltage to the D/A converter according to the control algorithm of the relationship between the pressure difference and the flow;
S7、未确定结束测量,重复步骤S2;确定结束测量,停止测量。S7. If it is not determined to end the measurement, repeat step S2; if it is determined to end the measurement, stop the measurement.
进一步地,所述控制算法包括标准节流的计算公式、理想气体的状态方程和PWM控制输出电压的占空比与差压值关系式,所述控制算法用于标定流量,所述控制算法用于控制流量精度在2%以内。Further, the control algorithm includes the calculation formula of standard throttling, the state equation of ideal gas and the relationship between the duty cycle and differential pressure value of the PWM control output voltage, the control algorithm is used to calibrate the flow, and the control algorithm uses To control the flow accuracy within 2%.
与现有技术相比,本发明的优点在于:本方案不用考虑流量计的结构与大小,只要考虑取到充分的压差值的结构即可,也能用PWM算法滤除脉动流量的波动控制流量精度到±2%以内,还可以自由设定标定流量。Compared with the prior art, the advantages of the present invention are: this scheme does not need to consider the structure and size of the flowmeter, as long as the structure of obtaining a sufficient differential pressure value can be considered, and the PWM algorithm can also be used to filter out the fluctuation control of the pulsating flow. The flow accuracy is within ±2%, and the calibration flow can be freely set.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings without creative efforts.
图1是本发明基于PWM控制法的微压差小流量精度控制示意图;Fig. 1 is the micro-pressure difference and small flow precision control schematic diagram based on PWM control method of the present invention;
图2是本发明利用单片机PWM功能控制微压差流量控制流程图;Fig. 2 is the present invention utilizes the single chip PWM function to control the micro-pressure difference flow control flow chart;
图3是本发明内置泵流量的示意图;Fig. 3 is the schematic diagram of the built-in pump flow of the present invention;
图4是本发明利用公式3得到流量与精度曲线。FIG. 4 is a flow rate and precision curve obtained by the present
具体实施方式Detailed ways
下面结合附图对本发明的优选实施例进行详细阐述,以使本发明的优点和特征能更易于被本领域技术人员理解,从而对本发明的保护范围做出更为清楚明确的界定。The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and the protection scope of the present invention can be more clearly defined.
请参阅图1-图3所示,本发明提供一种基于PWM控制法利用气体微压差控制脉动小流量精度的系统,包括微压传感器,所述微压传感器内设有传感器主腔体、传感器第一腔体和传感器第二腔体,所述传感器主腔体与精密微压差计连接,所述精密微压差计还与传感器第一腔体和传感器第二腔体连接,所述传感器第二腔体与偏心转子抽气泵连接,所述偏心转子抽气泵通过D/A转换器与单片机连接,所述单片机具有PWM控制功能,所述单片机还与精密微压差计和PC机连接。Please refer to FIG. 1-FIG. 3. The present invention provides a system for controlling the accuracy of pulsating small flow rate by using gas micro-pressure difference based on PWM control method, including a micro-pressure sensor, and the micro-pressure sensor is provided with a sensor main cavity, The first cavity of the sensor and the second cavity of the sensor, the main cavity of the sensor is connected with the precision micro differential pressure gauge, the precision micro differential pressure gauge is also connected with the first cavity of the sensor and the second cavity of the sensor, the The second cavity of the sensor is connected to the eccentric rotor air pump, and the eccentric rotor air pump is connected to the single-chip microcomputer through a D/A converter, the single-chip microcomputer has a PWM control function, and the single-chip microcomputer is also connected to a precision micro differential pressure gauge and a PC. .
所述单片机通过PWM功能控制微压差流量;该方法包括以下步骤:S1、开始测量;S2、读取标定的中心压差值A;S3、读取设定的上下压差偏差值表压值B;S4、读取微压传感器的测量值Ci;S5、计算出采样Ci加权移动平均C;S6、当C值在A±B范围内,重复步骤S2;否则根据压差与流量关系控制算法输出PWM控制泵电压给D/A转换器;S7、未确定结束测量,重复步骤S2;确定结束测量,停止测量。The single-chip microcomputer controls the micro-pressure difference flow through the PWM function; the method includes the following steps: S1, start measurement; S2, read the calibrated central pressure difference value A; S3, read the set upper and lower pressure difference deviation value gauge pressure value B; S4, read the measured value Ci of the micro pressure sensor; S5, calculate the weighted moving average C of the sampling Ci; S6, when the C value is within the range of A±B, repeat step S2; otherwise, control the algorithm according to the relationship between the pressure difference and the flow rate Output the PWM control pump voltage to the D/A converter; S7, if it is not determined to end the measurement, repeat step S2; if it is determined to end the measurement, stop the measurement.
所述控制算法包括标准节流的计算公式、理想气体的状态方程和PWM控制输出电压的占空比与差压值关系式,所述控制算法用于标定流量,所述控制算法用于控制流量精度在2%以内。The control algorithm includes the calculation formula of standard throttling, the state equation of ideal gas and the relationship between duty cycle and differential pressure value of PWM control output voltage, the control algorithm is used to calibrate the flow, and the control algorithm is used to control the flow Accuracy is within 2%.
公式1为标准节流装置的国际计量组织认可的计算公式。Formula 1 is a calculation formula approved by the International Metrology Organization for standard throttling devices.
公式1中:qv-为体积流量(m3/s);C-流出系数(无量纲);β-节流孔径与管内径比(无量纲);ε-可压缩系数(无量纲);d-节流孔径(m);△p-压差值(Pa);ρ-气体密度(kg/m3)In formula 1: q v - is the volume flow (m 3 /s); C - outflow coefficient (dimensionless); β - ratio of orifice aperture to tube inner diameter (dimensionless); ε - compressibility coefficient (dimensionless); d- orifice diameter (m); △p-pressure difference (Pa); ρ-gas density (kg/m3)
公式2为理想气体的状态方程(盖·吕萨克定律),公式2中:T0-绝对稳定273.15;ρo-1.29(kg/m3)(0℃1atm下的空气密度);△T-实际摄氏温度。
在室温25℃下,公式(2)代入公式(1),然后公式(1)的其他参数根据实际结构可以简化为公式(3)的形式。由公式(3)可知流量实际和压差的平方根成正比。At room temperature of 25°C, formula (2) is substituted into formula (1), and then other parameters of formula (1) can be simplified to the form of formula (3) according to the actual structure. From formula (3), it can be known that the actual flow rate is proportional to the square root of the pressure difference.
首先一款产品的标定流量为0.1CFM=2.83(L/min),为满足这个流量下的压差不太高,流量测定零部件的体积不能太大,设计的节流孔的孔径小于2mm,长度小于20mm,这样流过孔径里的流速小于50m/s。First of all, the calibrated flow rate of a product is 0.1CFM=2.83 (L/min). In order to meet the pressure difference under this flow rate is not too high, the volume of the flow measurement parts should not be too large, and the designed orifice diameter is less than 2mm. The length is less than 20mm, so that the flow velocity through the aperture is less than 50m/s.
公式1中,C为流出系数,短孔的流出系数(Re>2000)一般设置为0.8;ε为可压缩系数:节流孔的流速小于50m/s或Ma(马赫数)小于0.2时,空气可以看成不可压缩气体(压力密度误差通常小于1%可忽略),因此ε可以设置为1;β节流孔径与管内径比:远小于1可以忽略。In formula 1, C is the outflow coefficient, and the outflow coefficient of the short hole (Re>2000) is generally set to 0.8; ε is the compressibility coefficient: when the flow velocity of the orifice is less than 50m/s or Ma (Mach number) is less than 0.2, the air It can be regarded as an incompressible gas (the pressure density error is usually less than 1% and can be ignored), so ε can be set to 1; the ratio of β orifice aperture to tube inner diameter: much less than 1 can be ignored.
这样得到公式(3);利用公式(3)可以仿真出差压值和流量的变化关系如图4所示。从图4看出要得到标定的0.1CFM(2.83L/min)的流量,中心差压值在510Pa左右。In this way, formula (3) is obtained; using formula (3), the relationship between the differential pressure value and the flow rate can be simulated as shown in Figure 4. It can be seen from Figure 4 that to obtain the calibrated flow rate of 0.1CFM (2.83L/min), the central differential pressure value is about 510Pa.
如图1所示,实际测量流量中,抽取空气的动力源是偏心转子抽气泵;泵的转速在5000-45000(rpm),造成空气流量的脉动在80Hz-750Hz之间;这样图1所示的精密微压差计实际测出的压差值也是变动的;不进行滤波和测出的流量也是忽高忽低,控制流量精度在10%以下。As shown in Figure 1, in the actual flow measurement, the power source for extracting air is the eccentric rotor air pump; the pump speed is 5000-45000 (rpm), resulting in the pulsation of the air flow between 80Hz-750Hz; as shown in Figure 1 The differential pressure value actually measured by the precision micro differential pressure gauge is also fluctuating; the flow rate measured without filtering and measuring also fluctuates high and low, and the control flow accuracy is below 10%.
通过实验得到:控制泵转速的电压输出占空比与差压计输出值之间有下面的关系(PWM控制输出电压的占空比与差压值关系式)。It is obtained through experiments that the following relationship exists between the duty ratio of the voltage output that controls the rotational speed of the pump and the output value of the differential pressure gauge (the relationship between the duty ratio of the PWM control output voltage and the differential pressure value).
式中a为迟滞系数(输出电压到电机转速升高反馈到压差有迟滞时间),Vi为每次输出的电压,ti为每次输出电压的时间,Vi设定成固定值,公式4可以表达为下面的公式。In the formula, a is the hysteresis coefficient (there is a hysteresis time from the output voltage to the motor speed increase and feedback to the voltage difference), Vi is the voltage of each output, ti is the time of each output voltage, Vi is set to a fixed value,
Δp=a·f(t) (5)Δp=a·f(t) (5)
式中t为单片机输出的占空比,带入到公式3里得到下面的式。In the formula, t is the duty ratio of the output of the single-chip microcomputer, and it is brought into
用上述公式6进行PWM控制,流量控制在±2%之内。Using the
第一实施例:First embodiment:
利用下面图所示的装置在0-5L/min范围内可以自由设置标定流量。产品内置泵粒子传感器的需要的流量是0.1CFM=2.83L/min,用独自开发的PC软件可以设定2.83L/min时的中心压差值在510Pa左右。标定中心值A和精度控制偏差值B写入单片机内。The calibration flow can be freely set in the range of 0-5L/min using the device shown in the figure below. The required flow rate of the built-in pump particle sensor is 0.1CFM=2.83L/min, and the central differential pressure value at 2.83L/min can be set at about 510Pa with the independently developed PC software. The calibration center value A and the precision control deviation value B are written into the microcontroller.
第二实施例:Second embodiment:
用于粒子传感器内置泵系列产品的流量控制,如图2所示首先读取第一种情况标定及设定的压差值和压差值上下线;针对精密微压差计采样的值进行加权移动平均处理,一定程度上滤除了压差的脉动,再用图2所示B部分加了连接孔结构改善了脉动和控制迟滞现象。It is used for the flow control of the built-in pump series of the particle sensor. As shown in Figure 2, firstly read the calibrated and set pressure difference value and the pressure difference value up and down line in the first case; weight the value sampled by the precision micro differential pressure meter The moving average processing filters out the pulsation of the differential pressure to a certain extent, and then the connection hole structure is added in part B shown in Figure 2 to improve the pulsation and control hysteresis.
判断采样的加权移动平均值是否在A±B之内,如果超出执行单片机的利用公式6计算的PWM控制程序中,图2里A所示部分;执行完返回到读取采样值的部分,在进行循环判断。Determine whether the weighted moving average of the sampling is within A±B, if it exceeds the PWM control program calculated by
这样可以得到PWM控制的标定流量在精度要求范围之内,精度能控制在小于2%以内,这就是该基于PWM控制法使用精密微差压计控制小流量精度的工作原理,同时本说明书中未作详细描述的内容均属于本领域专业技术人员公知的现有技术。In this way, it can be obtained that the calibrated flow rate of PWM control is within the required accuracy range, and the accuracy can be controlled within less than 2%. This is the working principle of using a precision differential pressure gauge to control the accuracy of small flow based on the PWM control method. The content described in detail belongs to the prior art known to those skilled in the art.
虽然结合附图描述了本发明的实施方式,但是专利所有者可以在所附权利要求的范围之内做出各种变形或修改,只要不超过本发明的权利要求所描述的保护范围,都应当在本发明的保护范围之内。Although the embodiments of the present invention are described in conjunction with the accompanying drawings, the patent owner can make various changes or modifications within the scope of the appended claims, as long as the protection scope described in the claims of the present invention is not exceeded, all should be within the protection scope of the present invention.
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1661337A (en) * | 2004-12-17 | 2005-08-31 | 张国仁 | Flux integrating instrument of iterating differential pressure |
US6945123B1 (en) * | 2004-06-28 | 2005-09-20 | The General Electric Company | Gas flow sensor having redundant flow sensing capability |
CN2752730Y (en) * | 2004-11-10 | 2006-01-18 | 中国科学院长春光学精密机械与物理研究所 | Flexible flat-plate wave differential type micro-flow sensor |
CN2789732Y (en) * | 2004-12-08 | 2006-06-21 | 常州市汇丰船舶附件制造有限公司 | Portable intelligent digital display micro-flowmeter |
CN101393043A (en) * | 2008-10-23 | 2009-03-25 | 蔡茂林 | High frequency response flowmeter and measurement method thereof |
JP2013170979A (en) * | 2012-02-22 | 2013-09-02 | Azbil Corp | Method of determining replacement period of differential pressure-pressure composite sensor |
CN107144311A (en) * | 2017-04-21 | 2017-09-08 | 合肥江航飞机装备有限公司 | A kind of small-flow gas flowmeter and scaling method |
CN108254031A (en) * | 2017-12-28 | 2018-07-06 | 上海工程技术大学 | Differential gas micro sensor and preparation method thereof |
-
2018
- 2018-12-22 CN CN201811576109.4A patent/CN109655116B/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6945123B1 (en) * | 2004-06-28 | 2005-09-20 | The General Electric Company | Gas flow sensor having redundant flow sensing capability |
CN2752730Y (en) * | 2004-11-10 | 2006-01-18 | 中国科学院长春光学精密机械与物理研究所 | Flexible flat-plate wave differential type micro-flow sensor |
CN2789732Y (en) * | 2004-12-08 | 2006-06-21 | 常州市汇丰船舶附件制造有限公司 | Portable intelligent digital display micro-flowmeter |
CN1661337A (en) * | 2004-12-17 | 2005-08-31 | 张国仁 | Flux integrating instrument of iterating differential pressure |
CN101393043A (en) * | 2008-10-23 | 2009-03-25 | 蔡茂林 | High frequency response flowmeter and measurement method thereof |
JP2013170979A (en) * | 2012-02-22 | 2013-09-02 | Azbil Corp | Method of determining replacement period of differential pressure-pressure composite sensor |
CN107144311A (en) * | 2017-04-21 | 2017-09-08 | 合肥江航飞机装备有限公司 | A kind of small-flow gas flowmeter and scaling method |
CN108254031A (en) * | 2017-12-28 | 2018-07-06 | 上海工程技术大学 | Differential gas micro sensor and preparation method thereof |
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