CN109655112A - Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement - Google Patents
Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement Download PDFInfo
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- CN109655112A CN109655112A CN201910072985.1A CN201910072985A CN109655112A CN 109655112 A CN109655112 A CN 109655112A CN 201910072985 A CN201910072985 A CN 201910072985A CN 109655112 A CN109655112 A CN 109655112A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 42
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- 230000001105 regulatory effect Effects 0.000 claims abstract description 14
- 230000003321 amplification Effects 0.000 claims abstract description 13
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 13
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 208000012868 Overgrowth Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- General Physics & Mathematics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention relates to a kind of adjustable measuring devices for measuring piezoelectric actuator load and output displacement simultaneously, it includes bottom plate, flexible amplification mechanism, flexible amplification mechanism includes two groups of hinge sets, the both ends of two groups of hinge sets are separately connected, one group of hinge set is equipped with fixing end, the fixing end is fixed on the bottom plate, another group of hinge set is equipped with shift end, displacement sensor is fixedly installed in the outside of shift end, the test side of displacement sensor and displacement end in contact, the centre of two groups of hinge sets is equipped with piezoelectric actuator, regulating mechanism is arranged in any one junction of two groups of hinge sets, the end thereof contacts of regulating mechanism and piezoelectric actuator, pressure sensor is arranged in the other end of piezoelectric actuator, the active force (load) of piezoelectric actuator is directly measured with pressure sensor；The device directly measures the displacement of flexible bridge-type enlarger shift end with displacement sensor, and the elongation (output displacement) of piezoelectric actuator is calculated further according to the auxometer of flexible bridge-type enlarger.
Description
Technical field
Present invention relates particularly to a kind of adjustable measuring devices for measuring piezoelectric actuator load and output displacement simultaneously.
Background technique
With the high speed development of 21st century science and technology, aerospace, optics, biomedicine, robot and nanometer skill
The fields such as art are constantly risen, these fields require system and execute point-device positioning and displacement, such as the reality of microfeed
The existing, direct compensation of mismachining tolerance, extra accuracy cutting etc..
Piezoelectric actuator is Micro-displacement Driving component important in microbit moving device, and in these fields, piezoelectric ceramics is driven
Dynamic body reveals advantage below: displacement resolution is high, and small in size, inertia is small, and response is fast, and structure is simple.
In use, needing to know that different loads (active force) pushes between the driving voltage and output displacement of electric drive
Relationship therefore design a kind of while measuring piezoelectric actuator load and output displacement, device can make piezoelectric actuator
Higher precision positioning is realized in these fields, is preferably applied, is had great importance.
Summary of the invention
In view of the deficiencies of the prior art, the present invention intends to provide a kind of while measuring piezoelectric actuator load
With the adjustable measuring device of output displacement.
To achieve the above object, the present invention provides the following technical scheme that it is a kind of measure simultaneously piezoelectric actuator load and
The adjustable measuring device of output displacement comprising the flexible amplification mechanism on bottom plate, the flexible amplification mechanism is arranged in bottom plate
The both ends of the hinge set connected and composed including two groups by several right circular flexure hinges, two groups of hinge sets are separately connected, wherein one group
Hinge set is equipped with fixing end, and the fixing end is fixed on the bottom plate, and another group of hinge set is equipped with shift end, institute's rheme
Displacement sensor, the test side of institute's displacement sensors and displacement end in contact, two groups of hinges is fixedly installed in the outside for moving end
The centre of group is equipped with piezoelectric actuator, any one junction of two groups of hinge sets is arranged regulating mechanism, the regulating mechanism with
The end thereof contacts of piezoelectric actuator, the other end of the piezoelectric actuator are arranged pressure sensor, after the pressure sensor
End is contacted with another junction of two groups of hinge sets.
Two groups of hinge sets are arranged by two vertical end connections in rectangle.
The flexible amplification mechanism is integrally formed setting.
A right circular flexure hinge in any one group of hinge set extends outward to form fixing end, the fixing end and pedestal
It is fixedly connected.
Sliding slot is equipped on the inside of any one vertical end, the regulating mechanism passes through vertical end and sliding slot constitutes sliding cooperation,
And one end of the regulating mechanism is in contact with piezoelectric actuator.
The regulating mechanism includes adjusting screw and constitutes the adjusting block being linked, the adjusting block with adjusting screw
Setting is contacted with the piezoelectric actuator.
Ball is equipped between the adjusting block and piezoelectric actuator.
Dismountable firm banking is fixed on the chassis, the piezoelectric actuator is placed on the firm banking.
The section of the firm banking is arc-shaped or rectangle.
Beneficial effects of the present invention: the active force (load) of piezoelectric actuator is directly measured with pressure sensor；The device
The displacement that flexible bridge-type enlarger shift end is directly measured with displacement sensor, further according to the amplification of flexible bridge-type enlarger
Rate calculates the elongation (output displacement) of piezoelectric actuator.
Detailed description of the invention
Fig. 1 is stereoscopic schematic diagram of the invention.
Fig. 2 is structural schematic diagram of the invention.
Fig. 3 is the rough schematic of flexible bridge-type enlarger.
Fig. 4 is the schematic diagram of flexible bridge-type enlarger.
Fig. 5 a, b are the structural schematic diagram of firm banking.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute is only used in the embodiment of the present invention
In explaining in relative positional relationship, the motion conditions etc. under a certain particular pose (as shown in the picture) between each component, if should
When particular pose changes, then directionality instruction also correspondingly changes correspondingly.
In the present invention unless specifically defined or limited otherwise, term " connection ", " fixation " etc. shall be understood in a broad sense,
For example, " fixation " may be a fixed connection, it may be a detachable connection, or integral；It can be mechanical connection, be also possible to
Electrical connection；It can be directly connected, the connection inside two elements or two can also be can be indirectly connected through an intermediary
The interaction relationship of a element, unless otherwise restricted clearly.It for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
In addition, the description for being such as related to " first ", " second " in the present invention is used for description purposes only, and should not be understood as
Its relative importance of indication or suggestion or the quantity for implicitly indicating indicated technical characteristic.Define as a result, " first ",
The feature of " second " can explicitly or implicitly include at least one of the features.In addition, the technical side between each embodiment
Case can be combined with each other, but must be based on can be realized by those of ordinary skill in the art, when the combination of technical solution
Conflicting or cannot achieve when occur will be understood that the combination of this technical solution is not present, also not the present invention claims guarantor
Within the scope of shield.
The invention discloses a kind of adjustable measuring devices for measuring piezoelectric actuator load and output displacement simultaneously comprising
Bottom plate 1, is arranged in the flexible amplification mechanism 7 on bottom plate, and the flexible amplification mechanism includes two groups of several right circular flexure hinges 71
The both ends of the hinge set of connection, two groups of hinge sets are separately connected, i.e., two groups of hinge sets are connected by two vertical ends 72, and are in square
Shape setting, wherein the right circular flexure hinge of one group of hinge set is placed on the bottom plate, the outer epitaxial lateral overgrowth of the right circular flexure hinge
Stretch to form fixing end 73, be fixed by bolts on bottom plate, and the right circular flexure hinge be this group of hinge set center, another group
Displacement sensor, the detection of institute's displacement sensors 2 is fixedly installed as shift end, the outside of the shift end in the center of hinge set
End is in contact with shift end, and when piezoelectric actuator is by electricity, which is able to detect the displacement of flexible amplification mechanism.
Wherein, the arc surface of adjacent two right circular flexure hinges of shift end and mobile terminal two sides not on the same line,
With deviation b.
The centre of two groups of hinge sets is equipped with piezoelectric actuator, any one junction of two groups of hinge sets, which is arranged, to be adjusted
The right side setting regulating mechanism of mechanism, i.e. piezoelectric actuator contacts, then pressure sensing is arranged in the left side of piezoelectric actuator 5
Device 6 contacts, while the other end of pressure sensor 6 is in contact with another junction.
The regulating mechanism includes the adjusting screw 4 across vertical end setting, one end of the adjusting screw and 3 structure of adjusting block
At being linked.Wherein adjusting screw is threadedly coupled with flexible amplification mechanism.
It is equipped with sliding slot 74 on the inside of any one vertical end, the adjusting block is placed in the sliding slot, and the adjusting block 3 can be with
Adjusting screw is rotated in sliding in sliding slot, by adjusting adjusting screw, between adjustable adjusting block and piezoelectric actuator away from
From, by changing the position of the adjusting block, the detection of the piezoelectric actuator of Lai Shixian different length, while by adjusting spiral shell
Silk, so that adjusting block gives piezoelectric actuator certain pretightning force.
It is equipped with ball 8 between the adjusting block and piezoelectric actuator, the masterpiece of piezoelectric actuator can be made using ball
With on one point, detect more acurrate.
Dismountable firm banking is fixed on the chassis, the piezoelectric actuator is placed on the firm banking.
The section of the firm banking is arc-shaped or rectangle, can both measure the piezoelectric actuator of tubular, can also be with
The piezoelectric actuator of strip is measured, replacement firm banking is directly passed through.
X is extended after piezoelectric actuator making alive, its two sections are respectively acting on pressure sensor and ball, adjusting block, tune
It saves on screw, and is transmitted on the two sides of flexible bridge-type enlarger, generate directed force F, this active force is by pressure sensing
Device is measured；Displacement y is generated in the other directions, sees Fig. 3.This displacement is measured by displacement sensor.
The magnifying power of bridge-type enlarger isλ=cotα=a/b, then the elongation of piezoelectric actuatorX=y/ λ,It is obtained to indirect
To the elongation of piezoelectric actuator, such as Fig. 4.
Embodiment is not construed as limitation of the present invention, but any based on spiritual improvements introduced of the invention, all should be
Within protection scope of the present invention.
Claims (9)
1. a kind of adjustable measuring device for measuring piezoelectric actuator load and output displacement simultaneously, it is characterised in that: it includes bottom
Plate, is arranged in the flexible amplification mechanism on bottom plate, and the flexible amplification mechanism includes two groups and connected by several right circular flexure hinges
The both ends of the hinge set of composition, two groups of hinge sets are separately connected, wherein one group of hinge set is equipped with fixing end, the fixing end is fixed
It is arranged on the bottom plate, another group of hinge set is equipped with shift end, and displacement sensor, institute is fixedly installed in the outside of the shift end
The test side of displacement sensors and displacement end in contact, the centre of two groups of hinge sets are equipped with piezoelectric actuator, two groups of hinges
Regulating mechanism, the end thereof contacts of the regulating mechanism and piezoelectric actuator is arranged in any one junction of group, and the piezoelectricity drives
Pressure sensor is arranged in the other end of dynamic device, and the rear end of the pressure sensor and another junction of two groups of hinge sets connect
Touching.
2. a kind of adjustable measuring device for measuring piezoelectric actuator load and output displacement simultaneously according to claim 1,
It is characterized by: two groups of hinge sets are connected by two vertical ends, and it is arranged in rectangle.
3. a kind of adjustable measurement dress for measuring piezoelectric actuator simultaneously and loading with output displacement according to claim 1 or 2
It sets, it is characterised in that: the flexible amplification mechanism is integrally formed setting.
4. a kind of adjustable measuring device for measuring piezoelectric actuator load and output displacement simultaneously according to claim 3,
It is characterized by: a right circular flexure hinge in any one group of hinge set extends outward to form fixing end, the fixing end with
Pedestal is fixedly connected.
5. a kind of adjustable measuring device for measuring piezoelectric actuator load and output displacement simultaneously according to claim 2,
It is characterized by: being equipped with sliding slot on the inside of any one vertical end, the regulating mechanism, which passes through vertical end and constitutes to slide with sliding slot, matches
It closes, and one end of the regulating mechanism is in contact with piezoelectric actuator.
6. the adjustable measurement that one kind described according to claim 1 or 2 or 5 measures piezoelectric actuator load and output displacement simultaneously
Device, it is characterised in that: the regulating mechanism includes adjusting screw and constitutes the adjusting block being linked, institute with adjusting screw
It states adjusting block and contacts setting with the piezoelectric actuator.
7. a kind of adjustable measuring device for measuring piezoelectric actuator load and output displacement simultaneously according to claim 6,
It is characterized by: being equipped with ball between the adjusting block and piezoelectric actuator.
8. a kind of adjustable measuring device for measuring piezoelectric actuator load and output displacement simultaneously according to claim 1,
It is characterized by: being fixed with dismountable firm banking on the chassis, the piezoelectric actuator is placed on the firm banking
On.
9. a kind of adjustable measuring device for measuring piezoelectric actuator load and output displacement simultaneously according to claim 8,
It is characterized by: the section of the firm banking is arc-shaped or rectangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910072985.1A CN109655112A (en) | 2019-01-25 | 2019-01-25 | Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910072985.1A CN109655112A (en) | 2019-01-25 | 2019-01-25 | Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement |
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| CN109655112A true CN109655112A (en) | 2019-04-19 |
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| CN201910072985.1A Pending CN109655112A (en) | 2019-01-25 | 2019-01-25 | Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114155908A (en) * | 2021-10-28 | 2022-03-08 | 佛山科学技术学院 | Concentrated flexible bridge type displacement amplification mechanism with flexible hinge optimized topological structure |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1619938A (en) * | 2004-11-16 | 2005-05-25 | 清华大学 | A giant magnetostrictive high-precision linear actuator clamped by piezoelectric effect |
| CN202212949U (en) * | 2011-08-29 | 2012-05-09 | 华南理工大学 | Micro-displacement amplifying mechanism based on compliant mechanism |
| CN104007028A (en) * | 2014-06-18 | 2014-08-27 | 哈尔滨工业大学 | Micro component extension test device |
| CN104297065A (en) * | 2014-10-28 | 2015-01-21 | 郑州轻工业学院 | Piezoelectric actuation micro-tensile testing device |
| CN206003839U (en) * | 2016-09-21 | 2017-03-08 | 中国工程物理研究院总体工程研究所 | A kind of structure for improving piezoelectricity compliant mechanism output displacement and intrinsic frequency |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| CN107796433A (en) * | 2017-12-25 | 2018-03-13 | 吉林大学 | Parasitic motion principle piezoelectric actuator dynamic Contact procedural test apparatus and method |
| CN209459697U (en) * | 2019-01-25 | 2019-10-01 | 嘉兴学院 | An adjustable measuring device for simultaneously measuring the load and output displacement of piezoelectric actuators |
-
2019
- 2019-01-25 CN CN201910072985.1A patent/CN109655112A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1619938A (en) * | 2004-11-16 | 2005-05-25 | 清华大学 | A giant magnetostrictive high-precision linear actuator clamped by piezoelectric effect |
| CN202212949U (en) * | 2011-08-29 | 2012-05-09 | 华南理工大学 | Micro-displacement amplifying mechanism based on compliant mechanism |
| CN104007028A (en) * | 2014-06-18 | 2014-08-27 | 哈尔滨工业大学 | Micro component extension test device |
| CN104297065A (en) * | 2014-10-28 | 2015-01-21 | 郑州轻工业学院 | Piezoelectric actuation micro-tensile testing device |
| CN206003839U (en) * | 2016-09-21 | 2017-03-08 | 中国工程物理研究院总体工程研究所 | A kind of structure for improving piezoelectricity compliant mechanism output displacement and intrinsic frequency |
| CN206559258U (en) * | 2017-01-19 | 2017-10-13 | 吉林大学 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
| CN107796433A (en) * | 2017-12-25 | 2018-03-13 | 吉林大学 | Parasitic motion principle piezoelectric actuator dynamic Contact procedural test apparatus and method |
| CN209459697U (en) * | 2019-01-25 | 2019-10-01 | 嘉兴学院 | An adjustable measuring device for simultaneously measuring the load and output displacement of piezoelectric actuators |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114155908A (en) * | 2021-10-28 | 2022-03-08 | 佛山科学技术学院 | Concentrated flexible bridge type displacement amplification mechanism with flexible hinge optimized topological structure |
| CN114155908B (en) * | 2021-10-28 | 2023-03-10 | 佛山科学技术学院 | Centralized Compliance Bridge Displacement Amplification Mechanism with Optimum Topological Configuration of Compliant Hinges |
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Application publication date: 20190419 |