CN109599743B - Conical Photonic Crystal Laser Based on Mode Control of Photonic Crystal Defect States - Google Patents
Conical Photonic Crystal Laser Based on Mode Control of Photonic Crystal Defect States Download PDFInfo
- Publication number
- CN109599743B CN109599743B CN201811413063.4A CN201811413063A CN109599743B CN 109599743 B CN109599743 B CN 109599743B CN 201811413063 A CN201811413063 A CN 201811413063A CN 109599743 B CN109599743 B CN 109599743B
- Authority
- CN
- China
- Prior art keywords
- photonic crystal
- tapered
- layer
- perfect
- waveguide portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004038 photonic crystal Substances 0.000 title claims abstract description 124
- 230000007547 defect Effects 0.000 title claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 230000000737 periodic effect Effects 0.000 claims description 20
- 238000009826 distribution Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 16
- 238000013461 design Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 10
- 238000001914 filtration Methods 0.000 claims description 4
- 239000002096 quantum dot Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2218—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special optical properties
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
本发明公开了一种基于光子晶体缺陷态模式控制的锥形光子晶体激光器,包括:一外延层的结构,该外延层的结构包含:N型衬底;N型限制层,位于N型衬底之上;完美一维光子晶体,位于N型限制层之上;有源区,位于完美一维光子晶体上;P型限制层,位于有源区之上;P型接触层,位于P型限制层之上;以及锥形结构,设置于该外延层的P面,该锥形结构包含:脊形波导部分;以及锥形波导部分,与脊形波导部分相连,实现增益;其中,完美一维光子晶体中还包含破坏该完美一维光子晶体周期性的缺陷层,有源区位于该缺陷层中。该激光器能够改善半导体激光器光束质量,提高输出功率,减小垂直方向发散角,实现稳定的垂直模式输出。
The invention discloses a tapered photonic crystal laser based on photonic crystal defect state mode control, comprising: a structure of an epitaxial layer, and the structure of the epitaxial layer comprises: an N-type substrate; on top; perfect 1D photonic crystal, on top of N-type confinement layer; active region, on perfect 1D photonic crystal; P-type confinement layer, on top of active region; P-type contact layer, on P-type confinement layer; and a tapered structure disposed on the P-plane of the epitaxial layer, the tapered structure comprising: a ridge waveguide portion; and a tapered waveguide portion connected with the ridge waveguide portion to achieve gain; wherein, a perfect one-dimensional The photonic crystal also includes a defect layer that destroys the periodicity of the perfect one-dimensional photonic crystal, and the active region is located in the defect layer. The laser can improve the beam quality of the semiconductor laser, increase the output power, reduce the vertical divergence angle, and realize stable vertical mode output.
Description
技术领域technical field
本公开属于半导体激光器领域,涉及一种基于光子晶体缺陷态模式控制的锥形光子晶体激光器。The present disclosure belongs to the field of semiconductor lasers, and relates to a tapered photonic crystal laser based on photonic crystal defect state mode control.
背景技术Background technique
半导体激光器具有重量轻、体积小、便于集成等许多优点,同时还能实现高功率高效率的输出。目前半导体激光器在材料加工、通信、军事、医疗等诸多领域都有应用。然而在这些应用中,包括作为固态和光纤激光器的泵浦源、激光手术刀、激光武器、金属切割焊接、激光显示等,都对激光器的亮度有很高的要求。高亮度的实现需要同时获得高输出功率和高光束质量。传统的宽接触半导体激光器能够获得很高的单管输出功率和功率转换效率,但是由于其输出孔径比较宽,容易导致侧向多模产生,并且折射率的局部变化,使其容易产生束丝,最终导致光束质量比较差。另一方面,脊形波导激光器能够获得侧向近衍射极限输出,但受限于小的输出孔径和增益体积,其功率较低。Semiconductor lasers have many advantages, such as light weight, small size, and easy integration, and at the same time, they can achieve high-power and high-efficiency output. At present, semiconductor lasers are used in many fields such as material processing, communication, military, medical and so on. However, in these applications, including as a pump source for solid-state and fiber lasers, laser scalpels, laser weapons, metal cutting and welding, laser displays, etc., there is a high requirement for the brightness of the laser. Achieving high brightness requires both high output power and high beam quality. Traditional wide-contact semiconductor lasers can achieve high single-tube output power and power conversion efficiency, but due to their relatively wide output aperture, it is easy to cause lateral multi-mode generation, and the local change of refractive index makes it easy to produce beam filaments. The result is poor beam quality. Ridge-waveguide lasers, on the other hand, can achieve lateral near-diffraction-limited outputs, but are limited by small output apertures and gain volume, resulting in lower power.
在一些改善激光器光束质量的结构设计中,锥形激光器具有结构和工艺简单的特点。锥形激光器包括具有基模选择的脊形波导部分和用于模式放大锥形增益部分。高功率近衍射极限输出的锥形激光器已有相关报道。但是传统的锥形激光器有一个很大的缺点是垂直发散角很大,其半高全宽通常在30°甚至40°以上,这会造成一些应用中光束整形比较复杂且增加成本。为获得窄的垂直发散角,一些模式扩展结构得以提出,包括超大光腔、无源波导、低折射率势垒层等。然而,这些结构只能在一定程度上减小发散角,最小可获得20°以下的半高全宽发散角,无法进一步减小发散角到10°以下。另一方面,这些模式扩展结构基模与高阶模的限制因子比不够大,大电流下容易造成垂直方向高阶模的激射。此外,垂直方向上折射率可能因为局部温度的不同而发生变化,导致模式分布的改变。In some structural designs to improve laser beam quality, tapered lasers have the characteristics of simple structure and process. A tapered laser includes a ridge waveguide section with fundamental mode selection and a tapered gain section for mode amplification. High-power near-diffraction-limited conical lasers have been reported. However, the traditional conical laser has a big disadvantage that the vertical divergence angle is large, and its full width at half maximum is usually more than 30° or even 40°, which will cause the beam shaping to be complicated and increase the cost in some applications. To obtain a narrow vertical divergence angle, some mode expansion structures have been proposed, including ultra-large optical cavities, passive waveguides, and low-refractive-index barrier layers. However, these structures can only reduce the divergence angle to a certain extent, and the minimum full width at half maximum divergence angle of less than 20° can be obtained, and the divergence angle cannot be further reduced to less than 10°. On the other hand, the confinement factor ratio between the fundamental mode and the higher-order mode of these mode expansion structures is not large enough, and lasing of the higher-order mode in the vertical direction is easy to occur under high current. In addition, the refractive index in the vertical direction may vary due to local temperature differences, resulting in changes in the mode distribution.
因此,有必要提出一种光子晶体激光器,使其具有良好的综合性能:能够改善半导体激光器光束质量,提高输出功率,减小垂直方向发散角,实现稳定的垂直模式输出。Therefore, it is necessary to propose a photonic crystal laser with good comprehensive performance: it can improve the beam quality of the semiconductor laser, increase the output power, reduce the vertical divergence angle, and achieve stable vertical mode output.
发明内容SUMMARY OF THE INVENTION
(一)要解决的技术问题(1) Technical problems to be solved
有鉴于此,本公开的目的在于提供一种基于光子晶体缺陷态模式控制的锥形光子晶体激光器,其能够改善半导体激光器光束质量,提高输出功率,减小垂直方向发散角,实现稳定的垂直模式输出。In view of this, the purpose of the present disclosure is to provide a tapered photonic crystal laser based on photonic crystal defect state mode control, which can improve the beam quality of semiconductor lasers, increase the output power, reduce the divergence angle in the vertical direction, and realize a stable vertical mode output.
(二)技术方案(2) Technical solutions
根据本公开的一个方面,提供了一种基于光子晶体缺陷态模式控制的锥形光子晶体激光器,包括:一外延层的结构,该外延层的结构包含:N型衬底;N型限制层,位于N型衬底之上;完美一维光子晶体,位于N型限制层之上;有源区,位于完美一维光子晶体上;P型限制层,位于有源区之上;P型接触层,位于P型限制层之上;以及锥形结构,设置于该外延层的P面,该锥形结构包含:脊形波导部分;以及锥形波导部分,与脊形波导部分相连,实现增益;其中,完美一维光子晶体中还包含破坏该完美一维光子晶体周期性的缺陷层,有源区位于该缺陷层中。According to one aspect of the present disclosure, a tapered photonic crystal laser based on photonic crystal defect state mode control is provided, comprising: a structure of an epitaxial layer, the structure of the epitaxial layer comprising: an N-type substrate; an N-type confinement layer, On top of N-type substrate; Perfect 1D photonic crystal on top of N-type confinement layer; Active region on perfect 1D photonic crystal; P-type confinement layer on top of active region; P-type contact layer , located on the P-type confinement layer; and a tapered structure, arranged on the P surface of the epitaxial layer, the tapered structure comprising: a ridge waveguide portion; and a tapered waveguide portion connected with the ridge waveguide portion to achieve gain; Wherein, the perfect one-dimensional photonic crystal further includes a defect layer that destroys the periodicity of the perfect one-dimensional photonic crystal, and the active region is located in the defect layer.
在本公开的一些实施例中,完美一维光子晶体由一个以上的周期构成。In some embodiments of the present disclosure, a perfect one-dimensional photonic crystal consists of more than one period.
在本公开的一些实施例中,完美一维光子晶体的各个周期层中包含折射率交替变化的两种材料,并且任意两个周期层中的完美一维光子晶体具有相同的折射率分布和厚度分布。In some embodiments of the present disclosure, each periodic layer of a perfect one-dimensional photonic crystal contains two materials with alternating refractive indices, and the perfect one-dimensional photonic crystal in any two periodic layers has the same refractive index distribution and thickness distributed.
在本公开的一些实施例中,完美一维光子晶体的各个周期层通过改变多元材料中某种元素组分来实现折射率交替变化,对于不同波长的锥形光子晶体激光器,材料体系不同,所改变组分的元素也不同。In some embodiments of the present disclosure, each periodic layer of a perfect one-dimensional photonic crystal realizes the alternating change of refractive index by changing a certain element composition in the multi-component material. For tapered photonic crystal lasers with different wavelengths, the material system is different, so The elements that change the composition are also different.
在本公开的一些实施例中,缺陷层是在完美一维光子晶体之上通过改变厚度或者折射率来破坏所述一维光子晶体周期结构而形成的。In some embodiments of the present disclosure, the defect layer is formed on top of a perfect one-dimensional photonic crystal by changing the thickness or refractive index to disrupt the periodic structure of the one-dimensional photonic crystal.
在本公开的一些实施例中,位于缺陷区的有源层包括:单个、多个量子阱或者量子点结构。In some embodiments of the present disclosure, the active layer located in the defect region includes: single, multiple quantum well or quantum dot structures.
在本公开的一些实施例中,脊形波导部分的宽度不大于锥形波导部分突变处产生基模的截止宽度;In some embodiments of the present disclosure, the width of the ridge waveguide portion is not greater than the cut-off width of the fundamental mode generated at the abrupt change of the tapered waveguide portion;
优选的,脊形波导部分形成折射率导引的结构;Preferably, the ridge waveguide portion forms an index-guided structure;
优选的,锥形波导部分两侧的接触层被刻蚀掉形成增益导引,或者锥形波导部分与脊形波导部分刻蚀同样深度形成折射率导引结构。Preferably, the contact layers on both sides of the tapered waveguide portion are etched away to form the gain guide, or the tapered waveguide portion is etched to the same depth as the ridge waveguide portion to form the refractive index guide structure.
在本公开的一些实施例中,锥形波导部分的设计与脊形波导部分的设计要匹配,且锥形结构的锥角小于基模衍射角。In some embodiments of the present disclosure, the design of the tapered waveguide portion is matched with the design of the ridge waveguide portion, and the taper angle of the tapered structure is smaller than the fundamental mode diffraction angle.
在本公开的一些实施例中,锥形波导部分和脊形波导部分的长度根据器件设计需要选择,确保获得足够的侧向模式过滤特性和足够的增益体积。In some embodiments of the present disclosure, the lengths of the tapered waveguide portion and the ridged waveguide portion are selected according to device design requirements to ensure that sufficient lateral mode filtering characteristics and sufficient gain volume are obtained.
在本公开的一些实施例中,完美一维光子晶体为周期结构,其中每一周期中两种折射率不同的材料之间的折射率差大于温度或者载流子分布变化引起的折射率改变。In some embodiments of the present disclosure, the perfect one-dimensional photonic crystal is a periodic structure, wherein the refractive index difference between two materials with different refractive indices in each period is greater than the refractive index change caused by temperature or carrier distribution changes.
(三)有益效果(3) Beneficial effects
从上述技术方案可以看出,本公开提供的基于光子晶体缺陷态模式控制的锥形光子晶体激光器,至少具有以下有益效果:It can be seen from the above technical solutions that the tapered photonic crystal laser based on photonic crystal defect state mode control provided by the present disclosure has at least the following beneficial effects:
(1)光子晶体是由两种以上不同折射率的材料在空间按照一定的周期顺序排列所形成的有序结构材料,能够对光子进行调控,在外延方向上,将一维光子晶体结构应用于半导体激光器中,形成光子晶体激光器,其结构包括一个周期以上的完美一维光子晶体结构和破坏一维光子晶体周期性的缺陷层,有源区位于缺陷层中。基于光子晶体缺陷态对垂直模式进行调控,基模被限制在缺陷层内,在缺陷层外的完美一维光子晶体中迅速衰减;高阶模扩展至整个完美一维光子晶体结构中,与有源区具有较小的重叠。因此,基模限制因子远大于高阶模限制因子,从而实现更强的模式差别。通过缺陷层内有源区的增益作用,基模光场得到放大,获得垂直方向的单模输出。这种结构能够降低垂直方向发散角,获得10°左右甚至低于5°的垂直发散角,改善激光输出远场的椭圆斑输出,提高激光器的亮度。另外由于完美一维光子晶体结构对折射率的周期性调制,其折射率差通常大于由于温度引起的折射率变化,进而实现稳定的垂直模式输出。(1) Photonic crystal is an ordered structure material formed by two or more materials with different refractive indices arranged in a certain periodic order in space, which can control photons. In the epitaxial direction, the one-dimensional photonic crystal structure is applied to In the semiconductor laser, a photonic crystal laser is formed, and its structure includes a perfect one-dimensional photonic crystal structure with more than one period and a defect layer that destroys the periodicity of the one-dimensional photonic crystal, and the active region is located in the defect layer. The vertical mode is controlled based on the defect state of the photonic crystal. The fundamental mode is confined in the defect layer and decays rapidly in the perfect one-dimensional photonic crystal outside the defect layer. with little overlap. Therefore, the fundamental mode confinement factor is much larger than the higher-order mode confinement factor, enabling stronger mode differentiation. Through the gain effect of the active region in the defect layer, the fundamental mode light field is amplified, and a single-mode output in the vertical direction is obtained. This structure can reduce the vertical divergence angle, obtain a vertical divergence angle of about 10° or even less than 5°, improve the elliptical spot output in the far field of the laser output, and improve the brightness of the laser. In addition, due to the periodic modulation of the refractive index by the perfect one-dimensional photonic crystal structure, the refractive index difference is usually larger than the refractive index change due to temperature, thereby achieving a stable vertical mode output.
(2)在外延层的P面,设计的锥形结构包括锥形增益部分和脊形波导部分,合理设计的二者的结构参数使之匹配,形成锥形光子晶体激光器。合理设计脊形波导部分的结构参数使得只有基模耦合进锥形增益区,高阶模得到抑制;锥形增益部分的作用是实现侧向基模放大,同时输出端面由于增加了侧向近场尺寸,能够提高灾变性光学腔面损伤阈值。最终能够获得高功率近衍射极限光束输出。(2) On the P surface of the epitaxial layer, the designed tapered structure includes a tapered gain part and a ridge waveguide part, and the structural parameters of the two are reasonably designed to match them to form a tapered photonic crystal laser. Reasonable design of the structural parameters of the ridge waveguide part makes only the fundamental mode coupled into the tapered gain region, and the high-order modes are suppressed; the function of the tapered gain part is to realize the lateral fundamental mode amplification, and the output end face increases the lateral near-field size, It can improve the damage threshold of catastrophic optical cavity surface. Finally, a high-power near-diffraction-limited beam output can be obtained.
附图说明Description of drawings
图1为根据本公开一实施例所示的基于光子晶体缺陷态模式控制的锥形光子晶体激光器外延方向上的结构示意图。FIG. 1 is a schematic structural diagram in the epitaxial direction of a tapered photonic crystal laser based on photonic crystal defect state mode control according to an embodiment of the present disclosure.
图2为根据本公开一实施例所示的锥形光子晶体激光器的垂直方向基模分布示意图。FIG. 2 is a schematic diagram of fundamental mode distribution in a vertical direction of a tapered photonic crystal laser according to an embodiment of the present disclosure.
图3为如图2所示的锥形光子晶体激光器的垂直远场分布示意图。FIG. 3 is a schematic diagram of the vertical far-field distribution of the tapered photonic crystal laser shown in FIG. 2 .
图4为根据本公开一实施例所示的锥形光子晶体激光器的锥形结构示意图。4 is a schematic diagram of a tapered structure of a tapered photonic crystal laser according to an embodiment of the present disclosure.
图5为根据本公开一实施例所示的锥形光子晶体激光器的输出远场示意图。FIG. 5 is a schematic diagram of the output far field of the tapered photonic crystal laser according to an embodiment of the present disclosure.
图6为根据本公开一实施例所示的锥形光子晶体激光器光束准直之后的束腰处光强分布示意图。FIG. 6 is a schematic diagram of the light intensity distribution at the beam waist of the tapered photonic crystal laser beam after collimation according to an embodiment of the present disclosure.
图7根据本公开一实施例所示的基于光子晶体缺陷态模式控制的锥形光子晶体激光器的三维结构及输出光束示意图。7 is a schematic diagram of a three-dimensional structure and an output beam of a tapered photonic crystal laser based on photonic crystal defect state mode control according to an embodiment of the present disclosure.
【符号说明】【Symbol Description】
11-P型电极; 12-P型接触层;11-P type electrode; 12-P type contact layer;
13-绝缘层; 14-P型限制层;13-insulation layer; 14-P type confinement layer;
15,43-有源区; 16,44-完美一维光子晶体;15,43-active region; 16,44-perfect one-dimensional photonic crystal;
17-N型限制层; 18-N型衬底;17-N type confinement layer; 18-N type substrate;
19-N型电极;19-N type electrode;
31,41-脊形波导部分; 32,42-锥形波导部分。31, 41 - ridge waveguide section; 32, 42 - tapered waveguide section.
具体实施方式Detailed ways
本公开提供了一种基于光子晶体缺陷态模式控制的锥形光子晶体激光器,将一维光子晶体结构应用于半导体激光器中,形成光子晶体激光器,其结构包括一个周期以上的完美一维光子晶体结构和破坏一维光子晶体周期性的缺陷层,有源区位于缺陷层中,基于光子晶体缺陷态对垂直模式可以进行调控,能够改善半导体激光器光束质量,提高输出功率,减小垂直方向发散角,实现稳定的垂直模式输出。The present disclosure provides a tapered photonic crystal laser based on photonic crystal defect state mode control. A one-dimensional photonic crystal structure is applied to a semiconductor laser to form a photonic crystal laser, and its structure includes a perfect one-dimensional photonic crystal structure with more than one period. And the defect layer that destroys the periodicity of one-dimensional photonic crystal, the active region is located in the defect layer, and the vertical mode can be regulated based on the defect state of the photonic crystal, which can improve the beam quality of the semiconductor laser, increase the output power, and reduce the divergence angle in the vertical direction. Achieve stable vertical mode output.
为使本公开的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本公开进一步详细说明。本公开中,“锥形波导部分”和“锥形增益部分”含义相同。本公开中,“完美一维光子晶体”的结构包含周期性结构和缺陷层。本公开中,“外延结构的P面”表示外延结构中含有P型电极的一面。In order to make the objectives, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below with reference to the specific embodiments and the accompanying drawings. In the present disclosure, "tapered waveguide portion" and "tapered gain portion" have the same meaning. In the present disclosure, the structure of the "perfect one-dimensional photonic crystal" includes periodic structures and defect layers. In the present disclosure, "the P-side of the epitaxial structure" refers to the side including the P-type electrode in the epitaxial structure.
为实现图面整洁的目的,一些习知惯用的结构与组件在附图可能会以简单示意的方式绘示之。另外,本案的附图中部分的特征可能会略为放大或改变其比例或尺寸,以达到便于理解与观看本发明的技术特征的目的,但这并非用于限定本发明。依照本发明所公开的内容所制造的产品的实际尺寸与规格应是可依据生产时的需求、产品本身的特性、及搭配本发明如下所公开的内容据以调整,于此先进行声明。For the purpose of neatness of the drawings, some conventional structures and components may be shown in a simple and schematic manner in the accompanying drawings. In addition, some features in the drawings of the present application may be slightly enlarged or their proportions or dimensions are changed to achieve the purpose of facilitating the understanding and viewing of the technical features of the present invention, but this is not intended to limit the present invention. The actual size and specification of the product manufactured according to the disclosed content of the present invention should be adjusted according to the requirements during production, the characteristics of the product itself, and the content of the present invention as disclosed below.
图1为根据本公开一实施例所示的基于光子晶体缺陷态模式控制的锥形光子晶体激光器外延方向上的结构示意图。FIG. 1 is a schematic structural diagram in the epitaxial direction of a tapered photonic crystal laser based on photonic crystal defect state mode control according to an embodiment of the present disclosure.
本公开的第一个示例性实施例中,提供了一种基于光子晶体缺陷态模式控制的锥形光子晶体激光器,包括:一外延层的结构,该外延层的结构包含:N型衬底18;N型限制层17,位于N型衬底18之上;完美一维光子晶体16,位于N型限制层17之上;有源区15,位于完美一维光子晶体16之上;P型限制层14,位于有源区15之上;P型接触层12,位于P型限制层14之上;P型电极11,位于P型接触层12之上;绝缘层13,位于P型接触层12(下面也称接触层,用于实现欧姆接触)和P型电极11的两侧;以及锥形结构,设置于该外延层的P面,通过接触层12和P型电极11的刻蚀制作而成,该锥形结构包含:脊形波导部分;以及锥形波导部分,与脊形波导部分相连,实现增益;其中,该完美一维光子晶体中还包含破坏该完美一维光子晶体周期性的缺陷层,有源区位于该缺陷层中。In the first exemplary embodiment of the present disclosure, a tapered photonic crystal laser based on photonic crystal defect state mode control is provided, including: a structure of an epitaxial layer, and the structure of the epitaxial layer includes: an N-
其中,完美一维光子晶体由一个以上的周期构成。完美一维光子晶体的各个周期层中包含折射率交替变化的两种材料,并且任意两个周期层中的完美一维光子晶体具有相同的折射率分布和厚度分布。Among them, a perfect one-dimensional photonic crystal consists of more than one period. Each periodic layer of a perfect one-dimensional photonic crystal contains two materials with alternating refractive indices, and the perfect one-dimensional photonic crystal in any two periodic layers has the same refractive index distribution and thickness distribution.
本实施例中,完美一维光子晶体包含N个周期,单周期的完美一维光子晶体中两层材料的厚度及折射率根据需要选择合适的参数。完美一维光子晶体由折射率不同的两种材料交替组成,不同折射率材料通过改变某种元素组分来实现,例如对于AlGaAs材料可以改变Al的含量。In this embodiment, the perfect one-dimensional photonic crystal includes N periods, and the thickness and refractive index of the two layers of materials in the single-period perfect one-dimensional photonic crystal are selected according to the needs. Perfect one-dimensional photonic crystals are alternately composed of two materials with different refractive indices. The different refractive index materials are realized by changing the composition of a certain element. For example, for AlGaAs materials, the content of Al can be changed.
本公开中,完美一维光子晶体周期结构折射率差通常大于温度或者载流子分布变化引起的折射率改变。这种强折射率调制作用,使得锥形光子晶体激光器在垂直方向能够获得稳定的模式特性。In the present disclosure, the refractive index difference of a perfect one-dimensional photonic crystal periodic structure is generally larger than the refractive index change caused by temperature or carrier distribution changes. This strong refractive index modulation enables the tapered photonic crystal laser to obtain stable mode characteristics in the vertical direction.
本公开中,缺陷层是在完美一维光子晶体之上通过改变厚度或者折射率来破坏所述一维光子晶体周期结构而形成的,有源区位于缺陷层中。In the present disclosure, the defect layer is formed on the perfect one-dimensional photonic crystal by changing the thickness or the refractive index to destroy the periodic structure of the one-dimensional photonic crystal, and the active region is located in the defect layer.
本公开中,有源区包含不少于一个量子阱或者量子点结构。In the present disclosure, the active region contains no less than one quantum well or quantum dot structure.
本公开中,基于光子晶体缺陷态调控垂直模式。合理设计完美一维光子晶体和缺陷层的结构参数,使得基模被限制在缺陷层中,在远离缺陷层的完美一维光子晶体周期结构内基模逐渐衰减;而高阶模扩展到整个完美一维光子晶体结构中,与有源区有较小的重叠。最终基模限制因子大于高阶模限制因子,实现比较强的模式差别,获得垂直方向单模特性。有源区位于光学缺陷层中,这样只有基模获得增益输出。In the present disclosure, the vertical mode is regulated based on photonic crystal defect states. The structural parameters of the perfect one-dimensional photonic crystal and the defect layer are rationally designed, so that the fundamental mode is confined in the defect layer, and the fundamental mode gradually decays in the perfect one-dimensional photonic crystal periodic structure far from the defect layer; In the photonic crystal structure, there is a small overlap with the active region. The final fundamental mode limiting factor is larger than the higher-order mode limiting factor, which achieves relatively strong mode differences and obtains vertical single-mode characteristics. The active region is located in the optical defect layer so that only the fundamental mode obtains the gain output.
本公开中,P型限制层的折射率低于完美一维光子晶体结构的折射率,实现对光场的限制。In the present disclosure, the refractive index of the P-type confinement layer is lower than that of a perfect one-dimensional photonic crystal structure, so as to achieve confinement of the light field.
本公开中,锥形光子晶体激光器外延层的不同层之间设计一个组分渐变层作为缓冲层,以此来减小晶格失配。In the present disclosure, a composition graded layer is designed between different layers of the epitaxial layer of the tapered photonic crystal laser as a buffer layer, so as to reduce the lattice mismatch.
本公开中可以合理设计N型限制层的厚度,使高阶模能够渗透到N型衬底,而基模不会泄露到衬底,进而使高阶模有远大于基模的损耗。也可以在外延层中引入吸收层,使高阶模被吸收而基模不受影响。进一步增强模式差别。In the present disclosure, the thickness of the N-type confinement layer can be reasonably designed, so that the high-order mode can penetrate into the N-type substrate, while the fundamental mode will not leak to the substrate, so that the high-order mode has a much larger loss than the fundamental mode. It is also possible to introduce an absorber layer in the epitaxial layer, so that the higher order modes are absorbed while the fundamental mode is not affected. To further enhance the mode difference.
图2为根据本公开一实施例所示的锥形光子晶体激光器的垂直方向基模分布示意图。FIG. 2 is a schematic diagram of fundamental mode distribution in a vertical direction of a tapered photonic crystal laser according to an embodiment of the present disclosure.
如图2所示,基于光子晶体缺陷态的模式调控还表现在基模被扩展的很宽,不同的一维光子晶体周期数目能够获得不同尺寸的模式扩展。模式扩展增加了输出端面的光斑尺寸。这样可以减小垂直发散角至10°甚至5°以下。模式尺寸的增加能够减小输出腔面的光功率密度,提高锥形光子晶体激光器灾变性光学损伤阈值,进而可以提高输出功率。As shown in Figure 2, the mode control based on photonic crystal defect states is also manifested in that the fundamental mode is expanded very widely, and different 1D photonic crystal period numbers can obtain mode expansion of different sizes. Mode expansion increases the spot size at the output end face. This can reduce the vertical divergence angle to below 10° or even 5°. The increase of the mode size can reduce the optical power density of the output cavity surface, improve the catastrophic optical damage threshold of the tapered photonic crystal laser, and then increase the output power.
图3为如图2所示的锥形光子晶体激光器的垂直远场分布示意图。如图3所示,在基模被展宽至6.7μm左右时,远场发散角半高全宽为9.4°。进一步对垂直模式进行调控,可以获得更小的垂直发散角,而水平发散角通常在10°以内,这样能够获得近圆形的输出光斑。FIG. 3 is a schematic diagram of the vertical far-field distribution of the tapered photonic crystal laser shown in FIG. 2 . As shown in Fig. 3, when the fundamental mode is widened to about 6.7 μm, the full width at half maximum of the far-field divergence angle is 9.4°. By further adjusting the vertical mode, a smaller vertical divergence angle can be obtained, while the horizontal divergence angle is usually within 10°, so that a nearly circular output spot can be obtained.
优选的,脊形波导部分两侧有一部分覆盖层或者波导层被刻蚀掉,形成折射率导引的结构;Preferably, a part of the covering layer or the waveguide layer on both sides of the ridge waveguide portion is etched away to form a refractive index-guided structure;
优选的,锥形波导部分两侧的接触层被刻蚀掉形成增益导引,或者锥形波导部分与脊形波导部分刻蚀同样深度形成折射率导引结构。Preferably, the contact layers on both sides of the tapered waveguide portion are etched away to form the gain guide, or the tapered waveguide portion is etched to the same depth as the ridge waveguide portion to form the refractive index guide structure.
图4为根据本公开一实施例所示的锥形光子晶体激光器的锥形结构示意图。如图4所示,其中31是脊形波导部分(下面有时候也称脊形部分、脊形波导),32是锥形波导部分,下面为了突出其作用,也将其描述为锥形增益部分。其中脊形部分通过深刻蚀形成具有模式选择作用的脊形波导。锥形增益部分的制作可以通过将锥形两边的区域的接触层刻蚀掉,避免注入载流子的横向扩散,形成增益导引的结构;也可以将锥形增益部分与脊形波导部分刻蚀同样的深度,形成折射率导引,这样能简化工艺过程。4 is a schematic diagram of a tapered structure of a tapered photonic crystal laser according to an embodiment of the present disclosure. As shown in FIG. 4 , 31 is a ridge waveguide part (sometimes also called ridge part and ridge waveguide below), 32 is a tapered waveguide part, which is also described as a tapered gain part in order to highlight its function below. . The ridge portion is formed by deep etching to form a ridge waveguide with mode selection. The tapered gain part can be fabricated by etching away the contact layer on both sides of the tapered region to avoid lateral diffusion of injected carriers and form a gain-guided structure; the tapered gain part and the ridge waveguide part can also be etched. Etch the same depth to form index guides, which simplifies the process.
本公开中为保证侧向基模工作,脊形波导的宽度可以通过计算基模截止宽度与剩余覆盖层的厚度得到,条宽不能大于基模的截止宽度。为了保证低损耗传输,锥形增益区的角度要小于基模衍射角。这样可以有效避免光束传输中基模能量耦合进高阶模或者辐射模。In the present disclosure, in order to ensure the lateral fundamental mode operation, the width of the ridge waveguide can be obtained by calculating the fundamental mode cut-off width and the thickness of the remaining cladding layer, and the strip width cannot be greater than the fundamental mode cut-off width. To ensure low-loss transmission, the angle of the tapered gain region should be smaller than the fundamental mode diffraction angle. This can effectively avoid the coupling of fundamental mode energy into higher-order modes or radiation modes during beam transmission.
本公开中在锥形部分和脊形部分的长度设计上,脊形波导部分与锥形部分的长度设计要保证足够的模式过滤特性,以获得侧向单模输出,同时也要使器件具有尽可能大的增益体积以获得更高的功率。In the present disclosure, in terms of the length design of the tapered portion and the ridge portion, the lengths of the ridge waveguide portion and the tapered portion should be designed to ensure sufficient mode filtering characteristics to obtain lateral single-mode output, and at the same time, the device should have the best possible output. Possibly larger gain volume for higher power.
在本公开的一些实施例中,锥形波导部分的设计与脊形波导部分的设计要匹配,且锥形结构的锥角小于基模衍射角。In some embodiments of the present disclosure, the design of the tapered waveguide portion is matched with the design of the ridge waveguide portion, and the taper angle of the tapered structure is smaller than the fundamental mode diffraction angle.
在本公开的一些实施例中,锥形波导部分和脊形波导部分的长度根据器件设计需要选择,确保获得足够的侧向模式过滤特性和足够的增益体积。In some embodiments of the present disclosure, the lengths of the tapered waveguide portion and the ridged waveguide portion are selected according to device design requirements to ensure that sufficient lateral mode filtering characteristics and sufficient gain volume are obtained.
在本公开的一些实施例中,外延层的不同层之间还包括一组分渐变层作为缓冲层,以此来减小晶格失配。In some embodiments of the present disclosure, a group of graded layers is further included between different layers of the epitaxial layer as a buffer layer, so as to reduce lattice mismatch.
图5为根据本公开一实施例所示的锥形光子晶体激光器的输出远场示意图。如图5所示,水平方向和垂直方向分别对应锥形光子晶体激光器输出端面的侧向和垂直方向。垂直发散角减小到一定的程度,和水平发散角接近时,即能够获得图示的近圆形光斑输出。这种小发散角近圆形的输出远场能够减小应用中光束整形的成本和复杂性。FIG. 5 is a schematic diagram of the output far field of the tapered photonic crystal laser according to an embodiment of the present disclosure. As shown in Figure 5, the horizontal and vertical directions correspond to the lateral and vertical directions of the output end face of the tapered photonic crystal laser, respectively. When the vertical divergence angle is reduced to a certain extent and is close to the horizontal divergence angle, the near-circular light spot output shown in the figure can be obtained. This small divergence angle near circular output far field can reduce the cost and complexity of beam shaping in the application.
图6为根据本公开一实施例所示的锥形光子晶体激光器光束准直之后的束腰处光强分布示意图。如图6所示,水平方向和垂直方向分别对应锥形光子晶体激光器输出端面的侧向和垂直方向。侧向和垂直方向束腰处的光强都呈近高斯型单瓣分布,表明锥形光子晶体激光器在垂直方向和水平方向都具有近衍射极限光束质量。FIG. 6 is a schematic diagram of the light intensity distribution at the beam waist of the tapered photonic crystal laser beam after collimation according to an embodiment of the present disclosure. As shown in Fig. 6, the horizontal and vertical directions correspond to the lateral and vertical directions of the output end face of the tapered photonic crystal laser, respectively. The light intensity at the beam waist in both the lateral and vertical directions exhibits a near-Gaussian single-lobe distribution, indicating that the tapered photonic crystal laser has near-diffraction-limited beam quality in both the vertical and horizontal directions.
图7根据本公开一实施例所示的基于光子晶体缺陷态模式控制的锥形光子晶体激光器的三维结构及输出光束示意图。如图7所示,41和42分别是面上脊形波导部分和锥形增益部分,43是有源区,44是完美一维光子晶体的周期结构。在垂直方向和侧向的发散角相当时,激光器能够获得近圆形的光束输出,侧向和垂直方向都是单模输出。一维光子晶体周期结构通过调控垂直模式,减小发散角,获得稳定的单模输出。此外本公开锥形光子晶体结构在垂直方向和水平方向出光孔径大,减小了腔面光功率密度,提高锥形光子晶体激光器的腔面损伤阈值。最终从芯片的光束质量和输出功率两个方面提高激光器的亮度。7 is a schematic diagram of a three-dimensional structure and an output beam of a tapered photonic crystal laser based on photonic crystal defect state mode control according to an embodiment of the present disclosure. As shown in FIG. 7 , 41 and 42 are the surface ridge waveguide part and the tapered gain part, respectively, 43 is the active region, and 44 is the periodic structure of a perfect one-dimensional photonic crystal. When the divergence angles in the vertical and lateral directions are equivalent, the laser can obtain a nearly circular beam output, and the lateral and vertical directions are both single-mode outputs. The one-dimensional photonic crystal periodic structure can achieve stable single-mode output by adjusting the vertical mode and reducing the divergence angle. In addition, the tapered photonic crystal structure of the present disclosure has large light exit apertures in the vertical and horizontal directions, which reduces the optical power density of the cavity surface and improves the cavity surface damage threshold of the tapered photonic crystal laser. Finally, the brightness of the laser is improved from the two aspects of the chip's beam quality and output power.
综上所述,本公开提供了一种基于光子晶体缺陷态模式控制的锥形光子晶体激光器,将一维光子晶体结构应用于半导体激光器中,形成光子晶体激光器,其结构包括一个周期以上的完美一维光子晶体结构和破坏一维光子晶体周期性的缺陷层,有源区位于缺陷层中,基于光子晶体缺陷态对垂直模式可以进行调控,能够改善半导体激光器光束质量,提高输出功率,减小垂直方向发散角,实现稳定的垂直模式输出。To sum up, the present disclosure provides a tapered photonic crystal laser based on photonic crystal defect state mode control, applying a one-dimensional photonic crystal structure to a semiconductor laser to form a photonic crystal laser, the structure of which includes a perfect cycle of more than one period. The one-dimensional photonic crystal structure and the defect layer that destroys the periodicity of the one-dimensional photonic crystal, the active region is located in the defect layer, and the vertical mode can be regulated based on the defect state of the photonic crystal, which can improve the beam quality of the semiconductor laser, increase the output power, reduce the Divergence angle in the vertical direction to achieve stable vertical mode output.
需要说明的是,在附图或说明书描述中,相似或相同的部分都使用相同的图号。附图中未绘示或描述的实现方式,为所属技术领域中普通技术人员所知的形式。另外,虽然本文可提供包含特定值的参数的示范,但应了解,参数无需确切等于相应的值,而是可在可接受的误差容限或设计约束内近似于相应的值。实施例中提到的方向用语,例如“上”、“下”、“前”、“后”、“左”、“右”等,仅是参考附图的方向。因此,使用的方向用语是用来说明并非用来限制本发明的保护范围。It should be noted that, in the drawings or descriptions in the specification, the same drawing numbers are used for similar or identical parts. Implementations not shown or described in the drawings are forms known to those of ordinary skill in the art. Additionally, although examples of parameters including specific values may be provided herein, it should be understood that the parameters need not be exactly equal to the corresponding values, but may be approximated within acceptable error tolerances or design constraints. Directional terms mentioned in the embodiments, such as "up", "down", "front", "rear", "left", "right", etc., only refer to the directions of the drawings. Therefore, the directional terms used are used to illustrate and not to limit the scope of protection of the present invention.
在本公开的上下文中,当将一层/元件称作位于另一层/元件“上”时,该层/元件可以直接位于该另一层/元件上,或者它们之间可以存在居中层/元件。另外,如果在一种朝向中一层/元件位于另一层/元件“上”,那么当调转朝向时,该层/元件可以位于该另一层/元件“下”。In the context of this disclosure, when a layer/element is referred to as being "on" another layer/element, it can be directly on the other layer/element or intervening layers/elements may be present therebetween. element. In addition, if a layer/element is "on" another layer/element in one orientation, then when the orientation is reversed, the layer/element can be "under" the other layer/element.
再者,单词“包含”不排除存在未列在权利要求中的元件或步骤。位于元件之前的单词“一”或“一个”不排除存在多个这样的元件。Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
以上所述的具体实施例,对本公开的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本公开的具体实施例而已,并不用于限制本公开,凡在本公开的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本公开的保护范围之内。The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present disclosure in detail. It should be understood that the above-mentioned specific embodiments are only specific embodiments of the present disclosure, and are not intended to limit the present disclosure. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure should be included within the protection scope of the present disclosure.
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811413063.4A CN109599743B (en) | 2018-11-23 | 2018-11-23 | Conical Photonic Crystal Laser Based on Mode Control of Photonic Crystal Defect States |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811413063.4A CN109599743B (en) | 2018-11-23 | 2018-11-23 | Conical Photonic Crystal Laser Based on Mode Control of Photonic Crystal Defect States |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109599743A CN109599743A (en) | 2019-04-09 |
CN109599743B true CN109599743B (en) | 2022-04-29 |
Family
ID=65958845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811413063.4A Active CN109599743B (en) | 2018-11-23 | 2018-11-23 | Conical Photonic Crystal Laser Based on Mode Control of Photonic Crystal Defect States |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109599743B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110323671B (en) * | 2019-04-19 | 2021-05-11 | 中国科学院半导体研究所 | Single-mode semiconductor laser epitaxial structure based on photonic crystal control |
CN112557771B (en) * | 2020-12-02 | 2021-10-08 | 清华大学 | A Temperature Stable High Sensitivity Micro Electric Field Sensor |
CN115000808A (en) * | 2022-05-25 | 2022-09-02 | 北京工业大学 | A gain-guided VCSEL coherent array chip |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1897375A (en) * | 2005-07-15 | 2007-01-17 | 中国科学院半导体研究所 | 2.5-dimensional photon crystal-face transmitting laser |
CN104409965A (en) * | 2014-07-18 | 2015-03-11 | 中国科学院长春光学精密机械与物理研究所 | A Bragg reflection waveguide GaSb base semiconductor laser |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4533041B2 (en) * | 2003-08-28 | 2010-08-25 | キヤノン株式会社 | Manufacturing method of optical element |
CN102055135B (en) * | 2009-11-04 | 2013-09-04 | 中国科学院半导体研究所 | Tapered photonic crystal quantum cascade laser and manufacture method thereof |
CN101859983B (en) * | 2010-05-12 | 2012-01-25 | 中国科学院半导体研究所 | Quantum cascade laser with photonic quasi-crystal waveguide and manufacture method thereof |
CN102324696B (en) * | 2011-09-15 | 2012-11-07 | 中国科学院长春光学精密机械与物理研究所 | Bragg refractive waveguide edge transmitting semiconductor laser with low horizontal divergence angle |
CN103219650B (en) * | 2013-03-29 | 2014-11-26 | 中国科学院半导体研究所 | Low divergence angle near diffraction limit output chirp photonic crystal edge-emitting laser array |
CN105098595A (en) * | 2015-09-23 | 2015-11-25 | 中国科学院半导体研究所 | Fabrication method for integrated semiconductor laser |
-
2018
- 2018-11-23 CN CN201811413063.4A patent/CN109599743B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1897375A (en) * | 2005-07-15 | 2007-01-17 | 中国科学院半导体研究所 | 2.5-dimensional photon crystal-face transmitting laser |
CN104409965A (en) * | 2014-07-18 | 2015-03-11 | 中国科学院长春光学精密机械与物理研究所 | A Bragg reflection waveguide GaSb base semiconductor laser |
Also Published As
Publication number | Publication date |
---|---|
CN109599743A (en) | 2019-04-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103219650B (en) | Low divergence angle near diffraction limit output chirp photonic crystal edge-emitting laser array | |
CN109244828B (en) | A high-power semiconductor laser based on PT Bragg reflection waveguide and its preparation method | |
CN103259188B (en) | Low-divergence-angle and single-longitudinal-mode edge-emitting photonic crystal laser | |
CN103904556B (en) | A kind of tiltedly sidewall slope wave guide photon crystal semiconductor laser | |
JPH08116124A (en) | Semiconductor optical device | |
US9966734B2 (en) | High speed semiconductor laser with a beam expanding structure | |
CN109599743B (en) | Conical Photonic Crystal Laser Based on Mode Control of Photonic Crystal Defect States | |
JP2009295680A (en) | Semiconductor laser device | |
US5815521A (en) | Semiconductor laser with low beam divergence | |
CN106848836A (en) | A kind of high order surfaces grating face emitting semiconductor laser | |
CN114759429A (en) | Single spatial mode low divergence angle narrow linewidth composite photon crystal laser | |
JP2002124733A (en) | Semiconductor laser diode | |
CN103326243A (en) | Basic transverse mode low-horizontal-divergence-angle one-dimensional chirp photonic crystal edge-emitting laser array | |
CN105914580A (en) | Semiconductor laser with lateral grating and longitudinal bragg reflector structure | |
CN103166108A (en) | Circular spot output low divergence angle edge-emitting photonic crystal laser and composite waveguide device | |
JPH08330671A (en) | Semiconductor optical device | |
CN113794104B (en) | Photonic crystal laser | |
CN101841124A (en) | High-power fundamental transverse mode flat plate coupling optical waveguide semiconductor laser structure | |
CN113937620B (en) | High-power single transverse mode semiconductor laser and control method thereof | |
CN112514183B (en) | Large optical cavity (LOC) laser diode with quantum well offset and efficient single-mode lasing along the fast axis | |
CN104901159B (en) | More waveguides integrate resonance semiconductor laser | |
CN102163804A (en) | Narrow waveguide structure for reducing angle of divergence of high-power semiconductor laser | |
CN114006261B (en) | Vertical cavity surface emitting laser with circular light spot | |
JP2846668B2 (en) | Broad area laser | |
LU502263B1 (en) | Tapered semiconductor laser modulated with a periodic layer structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |