CN109557675B - Laser beam homogenization optical system with long focal depth based on aspheric mirror aberration effect - Google Patents
Laser beam homogenization optical system with long focal depth based on aspheric mirror aberration effect Download PDFInfo
- Publication number
- CN109557675B CN109557675B CN201811575955.4A CN201811575955A CN109557675B CN 109557675 B CN109557675 B CN 109557675B CN 201811575955 A CN201811575955 A CN 201811575955A CN 109557675 B CN109557675 B CN 109557675B
- Authority
- CN
- China
- Prior art keywords
- lens
- refractive power
- meniscus
- concave
- convex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 27
- 230000000694 effects Effects 0.000 title claims abstract description 17
- 230000004075 alteration Effects 0.000 title claims abstract description 13
- 238000000265 homogenisation Methods 0.000 title claims 5
- 230000005499 meniscus Effects 0.000 claims abstract description 78
- 239000000463 material Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 abstract description 21
- 238000002485 combustion reaction Methods 0.000 abstract description 15
- 238000003745 diagnosis Methods 0.000 abstract description 8
- 238000005498 polishing Methods 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000011161 development Methods 0.000 abstract description 4
- 230000001737 promoting effect Effects 0.000 abstract 1
- 238000009827 uniform distribution Methods 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 13
- 238000011160 research Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 241001270131 Agaricus moelleri Species 0.000 description 3
- 238000004372 laser cladding Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011158 quantitative evaluation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001499 laser induced fluorescence spectroscopy Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Abstract
本发明公开了一种基于非球面镜像差效应的长焦深激光光束均匀化光学系统，所述光学系统包括光束均匀化非球面镜组和长焦深球面准直镜组，其中：所述光束均匀化非球面镜组包括负光焦度弯月凹透镜、第一正光焦度弯月凸透镜、含有非球面的负光焦度弯月凹透镜、负光焦度双凹透镜、第二正光焦度弯月凸透镜；所述长焦深球面准直镜组包括第三正光焦度弯月凸透镜、负光焦度凹透镜、正光焦度凸透镜、负光焦度弯月凹透镜；各透镜在光的传播方向上依次同轴排列。该光学系统能够将高斯光束转换成分布均匀的平顶高斯光束，为强激光损伤测量、激光清洗、激光抛光及激光燃烧诊断提供优质、高效的激光光束，促进这些领域的深入发展。
The invention discloses an optical system for homogenizing a laser beam with a long focal depth based on aspheric mirror aberration effect. The optical system includes a beam homogenizing aspheric lens group and a spherical collimating lens group with a long focal depth. The aspherical lens group includes a meniscus concave lens with negative refractive power, a first meniscus convex lens with positive refractive power, a concave meniscus lens with negative refractive power, a biconcave lens with negative refractive power, and a second meniscus convex lens with positive refractive power; The telephoto depth spherical collimating lens group includes a third meniscus convex lens with positive refractive power, a concave lens with negative refractive power, a convex lens with positive refractive power, and a concave meniscus lens with negative refractive power; each lens is coaxial in turn in the direction of light propagation arrangement. The optical system can convert Gaussian beams into flat-topped Gaussian beams with uniform distribution, providing high-quality and efficient laser beams for intense laser damage measurement, laser cleaning, laser polishing and laser combustion diagnosis, and promoting the in-depth development of these fields.
Description
Technical Field
The invention belongs to the field of laser application optics, and relates to a uniformization optical system for Gaussian beam energy spatial distribution of continuous laser and pulse laser.
Background
The interaction of strong laser and materials, laser cleaning, laser polishing, laser cladding and laser combustion diagnosis are the hot research fields of the development of laser application technology in recent years. The interaction between strong laser and material inevitably damages or destroys the surface and the inside of the material, and currently, the damage threshold (i.e. the average laser power density or energy density acting on the surface of the material to cause damage) is usually used internationally to quantitatively evaluate the extent of the damage effect. However, the light beams output by the laser are generally gaussian or gaussian-like distributed light spots, the light spots have the characteristic of energy distribution with a high middle part and weak two sides, and when the light beams are applied to the material, the energy distribution of each point in space is not uniform when the material and the laser interact with each other, so that the average laser power density or the average energy density is adopted to represent the laser damage threshold value, and the unified specification and standard are not provided. Even if the average power/energy density is the same for different laser manufacturers, the peak power/energy density of the laser is not always completely consistent due to different laser parameters (such as laser pulse width, beam quality, etc.). These problems will cause the research using different lasers to have no comparability and reference, and bring great trouble to the establishment of the quantitative evaluation laser damage standard.
Laser cleaning, laser polishing and laser cladding are also important research fields of the current laser application technology. Compared with the traditional chemical cleaning, the laser cleaning method can effectively reduce the damage degree to the environment. Compare in manual cleaning, can greatly promote abluent efficiency. Therefore, laser cleaning is known as a green cleaning mode in the 21 st century, and is expected to be applied to important engineering fields of aerospace, high-speed rail, ocean, nuclear power and the like in the future. However, at present, most of laser cleaning adopts a galvanometer scanning type cleaning mode, and the oscillating mirror inside the laser cleaning head is utilized to rotate rapidly, so that laser spots act on the surface of a workpiece to be cleaned point by point, and the cleaning is completed. One of the disadvantages of this method is that the light spot distribution is not uniform during cleaning, which results in high efficiency of the center position of the light spot during cleaning and low two sides of the light spot, i.e. the cleaning efficiency is not high enough. When the cleaning is often carried out once, the center of the light spot is thoroughly cleaned, and the two sides are leaked or not cleaned completely.
Laser combustion diagnosis is an advantageous means for studying large and medium-sized combustion devices such as aircraft engines and gas turbines. The laser combustion diagnosis can obtain information such as temperature and component distribution inside a combustion field through laser in a non-contact manner, so as to guide optimization and improvement of an actual combustion device. Planar laser induced fluorescence is a laser measurement technology for diagnosing a combustion field by using a sheet beam, and the laser sheet beam shaping system is used for shaping a beam output by a laser and further injecting the shaped beam into a measured combustion area. However, the output of the existing laser is not a beam with uniform energy distribution, and the output line spot is also non-uniformly distributed after passing through the shaping system, and if the beam is used for measuring the combustion field, the signal-to-noise ratio of the detected signal is also inconsistent (the signal-to-noise ratio of some regions is high, and the signal-to-noise ratio of some regions is low), which greatly affects the final measurement accuracy.
Disclosure of Invention
The invention aims to provide a long-focus deep laser beam homogenizing optical system based on an aspherical mirror aberration effect, which can convert a Gaussian beam into a flat-top Gaussian beam with uniform energy distribution, provide a high-quality and high-efficiency laser beam for strong laser damage measurement, laser cleaning, laser polishing and laser combustion diagnosis, and promote the deep development of the fields.
The purpose of the invention is realized by the following technical scheme:
the utility model provides a long focus depth laser beam uniformization optical system based on aspherical mirror aberration effect, includes beam uniformization aspherical mirror group and long focus depth spherical collimating mirror group, wherein:
the light beam homogenizing aspheric lens group comprises a negative focal power meniscus concave lens, a first positive focal power meniscus convex lens, a negative focal power meniscus concave lens containing an aspheric surface, a negative focal power biconcave lens and a second positive focal power meniscus convex lens;
the long-focal-depth spherical collimating lens group comprises a third positive focal power meniscus convex lens, a negative focal power concave lens, a positive focal power convex lens and a negative focal power meniscus concave lens;
the negative focal power meniscus concave lens, the first positive focal power meniscus convex lens, the negative focal power meniscus concave lens containing the aspheric surface, the negative focal power biconcave lens, the second positive focal power meniscus convex lens, the third positive focal power meniscus convex lens, the negative focal power concave lens, the positive focal power convex lens and the negative focal power meniscus concave lens are sequentially and coaxially arranged in the light transmission direction.
Compared with the prior art, the invention has the following advantages:
1. the optical system of the invention utilizes the aberration effect of the aspherical mirror to project the region with stronger energy distribution in the middle of the Gaussian beam to the edge region through the aberration effect so as to achieve the purpose of uniform beam energy distribution.
2. The optical system can promote the problem that the damage standards of strong laser are not uniform, not only can improve the efficiency of the application fields of laser cleaning and laser polishing engineering, but also can improve the signal to noise ratio and the measurement precision of the laser combustion diagnosis field, and provides important technical support for the development of the fields.
3. Compared with the common laser beam homogenizing method, the optical system has the advantages of simple structure, easiness in processing, low cost and good beam homogenizing effect (the highest beam homogenizing effect can reach more than 98%).
4. The invention can be widely applied to the research fields of laser cleaning, laser polishing, laser cladding, quantitative evaluation of laser damage threshold, laser combustion field measurement and the like, can provide uniform and high-beam-quality flat-topped Gaussian laser beams for laser cleaning, laser polishing, strong laser and material damage mechanisms, application research and laser combustion diagnosis technology, can greatly improve the laser cleaning and laser polishing efficiency, promote the establishment of unified and standard laser on material damage threshold evaluation standards, and improve the signal-to-noise ratio and measurement accuracy of signals in laser combustion diagnosis.
Drawings
FIG. 1 is a schematic structural diagram of a long-focus-depth laser beam uniformization optical system according to the present invention;
FIG. 2 shows the spot energy distribution at the focus (beam uniformity 98%);
FIG. 3 shows the spot energy distribution at 100mm from the focal point (98% beam uniformity);
figure 4 shows the spot energy distribution at-100 mm from the focal point (95% beam uniformity).
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention shall be covered by the protection scope of the present invention.
As shown in fig. 1, the long-focus deep laser beam uniformization optical system based on the aspherical mirror aberration effect provided by the present invention is composed of a beam uniformization aspherical mirror group and a long-focus deep spherical collimating mirror group, wherein:
the light beam homogenizing aspheric lens group consists of a negative focal power meniscus concave lens 1, a first positive focal power meniscus convex lens 2, a negative focal power meniscus concave lens 3 containing an aspheric surface, a negative focal power biconcave lens 4 and a second positive focal power meniscus convex lens 5;
the long focal depth spherical collimating lens group consists of a third positive focal power meniscus convex lens 6, a negative focal power concave lens 7, a positive focal power convex lens 8 and a negative focal power meniscus concave lens 9;
the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing an aspheric surface, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8 and the negative focal power meniscus concave lens 9 are coaxially arranged in sequence in the light transmission direction.
In the invention, the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing aspheric surfaces, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8 and the negative focal power meniscus concave lens 9 are all made of F _ SILICA (fused SILICA) and coated with antireflection coatings, and the transmittance of each lens is ensured to be 99.9%.
In the present invention, the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing an aspheric surface, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8, and the negative focal power meniscus concave lens 9 are sequentially arranged along the light propagation direction, and the surface shape, the curvature radius and the interval of 18 mirror surfaces (the interval refers to the physical distance from the center position of the mirror surface to the center of the next adjacent mirror surface, and so on) are respectively: convex spherical surface, 10.55mm, 4.062 mm; the concave spherical surface is 7.809mm and 6.069 mm; concave spherical surface, -26.507mm, 4.606 mm; convex spherical surface, -11.379mm, 10.620 mm; aspherical concave, -13.422mm, 3.065 mm; convex spherical surface, -32.824mm, 2.003 mm; concave spherical surface, -51.004mm, 3.072 mm; the concave spherical surface is 19.7mm and 21.834 mm; concave spherical surface, -39.519mm, 6.768; convex spherical surface, -24.834mm, 2.001 mm; a convex spherical surface, 27.599mm and 8.845 mm; the concave spherical surface is 251.38mm and 10.716 mm; concave spherical surface, -22.763mm, 4.61 mm; convex spherical surface, -170.08mm, 6.04 mm; concave spherical surface, -600.036mm, 6.621 mm; convex spherical surface, -43.026mm, 7.231 mm; concave spherical surface, -30.851mm, 5.018 mm; convex spherical surface, -41.139 mm.
In the invention, the spacing medium among the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing the aspheric surface, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8 and the negative focal power meniscus concave lens 9 is air.
In the invention, the working wavelength of the optical system is 1064nm and 1080nm, the focal depth is +/-100 mm, and the focal length is 1000 mm.
In the invention, the optical system homogenizes the Gaussian beam to no less than 95%.
In the present invention, specific technical features of the optical system are shown in table 1, and data units in the table are mm.
TABLE 1
The data for the front concave aspherical surface lens having the negative aspherical power meniscus concave lens 3 of the order 5 are shown in Table 2, where k is the coefficient of the quadratic surface and a2、a4、a6、a8Are high-order aspheric coefficients.
TABLE 2
| Serial number | k | a2 | a4 | a6 | a8 |
| 5 | -3.74 | 0 | 0 | 0 | 0 |
In the present invention, the results of the actual spot uniformity simulation of the optical system at the focal point and ± 100mm from the focal point are shown in fig. 2, 3 and 4. As can be seen from fig. 2 to 4, the initial gaussian beam is shaped into a flat-top gaussian beam with uniform energy distribution after passing through the optical system of the present invention, and the energy uniformity of the shaped flat-top gaussian beam at a distance of ± 100mm from the focal point is 95% at the minimum and 98% at the maximum. The optical system has the advantages of long focal depth (+/-100 mm) and good energy uniformity (not less than 95%), and has the characteristics of simple structure, easy processing, low cost, long focal depth and good light beam uniformity effect compared with other laser beam uniformity methods.
Claims (5)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811565046 | 2018-12-20 | ||
| CN2018115650462 | 2018-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109557675A CN109557675A (en) | 2019-04-02 |
| CN109557675B true CN109557675B (en) | 2021-01-12 |
Family
ID=65870892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811575955.4A Active CN109557675B (en) | 2018-12-20 | 2018-12-22 | Laser beam homogenization optical system with long focal depth based on aspheric mirror aberration effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109557675B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110471144B (en) * | 2019-08-07 | 2020-11-03 | 北京工业大学 | Aberration-eliminating myriawatt-level optical fiber connector |
| CN114236859B (en) * | 2021-12-17 | 2023-09-29 | 哈尔滨工业大学 | Sheet light energy homogenizing optical shaping system based on total reflection integral cavity |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4460877B2 (en) * | 2003-11-14 | 2010-05-12 | 昭和オプトロニクス株式会社 | Laser light intensity distribution conversion optical system |
| EP1998215A1 (en) * | 2007-05-31 | 2008-12-03 | Molecular Technology (MolTech) Gmbh | Achromatic optical system for beam shaping |
| US8742288B2 (en) * | 2011-06-15 | 2014-06-03 | Asm Technology Singapore Pte Ltd | Laser apparatus for singulation, and a method of singulation |
| CN103513426A (en) * | 2013-10-11 | 2014-01-15 | 江苏大学 | Method of improving laser processing efficiency by optimizing light beam quality |
-
2018
- 2018-12-22 CN CN201811575955.4A patent/CN109557675B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109557675A (en) | 2019-04-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109557675B (en) | Laser beam homogenization optical system with long focal depth based on aspheric mirror aberration effect | |
| CN108873322B (en) | Method and system for determining curved surface structure of long-focal-depth aspheric reflector | |
| CN107065155A (en) | A kind of laser cleaning varifocal optical unit and laser cleaner | |
| CN102175429B (en) | Method for measuring thermal focus length of laser | |
| CN106180080A (en) | A kind of laser cleaner of antisitic defect | |
| CN105215007A (en) | The light path system of body surface pollutant cleaning | |
| CN102621694A (en) | Strip-shaped astigmatic beam shaping and collimating device | |
| CN110842360A (en) | Method for improving boiling heat exchange performance of surface pool based on femtosecond laser splicing processing technology | |
| CN110596879A (en) | A Thermal Aperture Applicable to Ring Solar Telescope | |
| CN110471144B (en) | Aberration-eliminating myriawatt-level optical fiber connector | |
| CN113126201A (en) | Single crystal optical fiber based on space shaping and processing method and system thereof | |
| CN106312303A (en) | Device and method for reducing outgoing mode field diameter based on femtosecond laser direct-writing transparent material optical waveguide | |
| CN103885186B (en) | A kind of based on prism to and cylindrical mirror disappear astigmatic bundle orthopedic systems | |
| CN102721529B (en) | Multi-wavelength integration method for scanning and measuring high reflectivity of large-caliber reflective optical element | |
| CN114488555B (en) | Beam collimation apparatus, method, apparatus, storage medium and electronic apparatus | |
| CN111897127B (en) | An Optimal Design Method of Free-form Surface Lens for Beam Shaping of Pump Laser System | |
| CN203838413U (en) | An Astigmatic Beam Shaping System Based on Prism Pair and Cylindrical Mirror | |
| CN109683283B (en) | Finite far conjugate optical system with equidistant object and image | |
| CN110986836B (en) | High-precision roughness measuring device based on annular core optical fiber | |
| CN1584647A (en) | Hollow circular truncated cone laser optical fibre coupler | |
| CN108422111A (en) | The processing unit (plant) and processing method of big depth structure are carried out inside transparent material using femtosecond laser | |
| CN204824967U (en) | Laser hardening processing head | |
| CN102455467B (en) | Sub-wavelength focusing lens integrated on optical fiber end face | |
| CN100419482C (en) | Waveguide-fiber automatic core adjustment method and its device based on genetic algorithm | |
| CN114236859B (en) | Sheet light energy homogenizing optical shaping system based on total reflection integral cavity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230413 Address after: 200000 building 10, No. 860, Xinyang Road, Lingang New District, China (Shanghai) pilot Free Trade Zone, Fengxian District, Shanghai Patentee after: Shanghai Jinze Biotechnology Co.,Ltd. Address before: 150000 No. 92, West Da Zhi street, Nangang District, Harbin, Heilongjiang. Patentee before: HARBIN INSTITUTE OF TECHNOLOGY |
|
| TR01 | Transfer of patent right |