CN109546986A - For reducing the RF-MEMS resonator support construction of energy loss - Google Patents
For reducing the RF-MEMS resonator support construction of energy loss Download PDFInfo
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- CN109546986A CN109546986A CN201811450759.4A CN201811450759A CN109546986A CN 109546986 A CN109546986 A CN 109546986A CN 201811450759 A CN201811450759 A CN 201811450759A CN 109546986 A CN109546986 A CN 109546986A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
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Abstract
本公开提供一种用于降低能量损耗的RF‑MEMS谐振器支撑结构，包括：支撑梁、后端支撑结构以及至少两级能量阻断结构；支撑梁与谐振器连接；后端支撑结构设置于支撑梁和基座之间，用于减小支撑梁与基座间的连接刚度，增大固‑气界面，反射向后端支撑结构两侧传输的弹性波；能量阻断结构设置在支撑梁和后端支撑结构的连接处、后端支撑结构和/或基座上，用于阻断弹性波在谐振器支撑结构中的扩散路径。本公开提供的用于降低能量损耗的RF‑MEMS谐振器支撑结构针对开发高频率高Q值谐振器的技术瓶颈，提出一种低损耗的支撑结构设计方案，在不增加工艺难度的前提下显著改善器件性能，实现高性能谐振器的批量化生产，在无线通信系统中具有更广阔的应用前景。
The present disclosure provides an RF-MEMS resonator support structure for reducing energy loss, comprising: a support beam, a back-end support structure, and at least two-stage energy blocking structures; the support beam is connected to the resonator; the back-end support structure is disposed on the Between the support beam and the base, it is used to reduce the connection stiffness between the support beam and the base, increase the solid-air interface, and reflect the elastic waves transmitted to both sides of the rear support structure; the energy blocking structure is arranged on the support beam and the rear The connection of the end support structure, the back end support structure and/or the base is used to block the diffusion path of elastic waves in the resonator support structure. The RF-MEMS resonator support structure for reducing energy loss provided by the present disclosure aims at the technical bottleneck of developing high-frequency and high-Q resonators, and proposes a low-loss support structure design scheme, which can significantly reduce the difficulty of the process. Improve device performance, realize mass production of high-performance resonators, and have broader application prospects in wireless communication systems.
Description
Technical field
This disclosure relates to radio-frequency micro electromechanical system (RF-MEMS) technical field, more particularly to it is a kind of for reducing energy damage
The RF-MEMS resonator support construction of consumption.
Background technique
Next-Generation Wireless Communication Systems show integrated, miniaturization, low-power consumption, high-frequency, the development trend of multi-mode,
Compared to traditional resonator, RF-MEMS resonator by anti seismic efficiency is good, high-frequency and high-Q-value, low-power consumption, small size, can integrate,
The advantages such as low cost are considered as the ideal radio-frequency devices of future broadband wireless communication systems, have broad application prospects.
MEMS resonator can be divided mainly into two major classes type: out-of-plane vibration mode, such as out-of-plane bending mode, torsion mode, thickness
Degree stretches mode, etc.；In plane vibration mode, such as radial contour mode, rectangular flexible mode, plane shear mode, etc..Compared to
The resonance frequency of out-of-plane vibration mode, in plane vibration mode is defined by planar dimension, and a variety of rulers can be realized on same wafer
It is very little, a variety of resonance frequencies are obtained, the multi-mode demand of wireless communication system is met.
However, in implementing the present disclosure, present inventor's discovery, supporting beam is adopted extensively in MEMS resonator
A kind of support construction, under normal circumstances, supporting beam size should reduce support loss much smaller than resonator dimensions.However,
With the raising of resonance frequency, resonator dimensions reduce, and are limited by lithographic accuracy, and supporting beam size is difficult to equal proportion contracting therewith
It is small.Therefore, relative rigidity of the supporting beam in entire device architecture improves；And due to joint face between supporting beam and resonance structure
Product increases, and the energy coupling in more large amplitude regions enters supporting beam.Above-mentioned factor causes supporting beam elastic potential energy to increase, defeated
Enter energy it is certain in the case where, support loss aggravation, Q value decaying, and along with resonator mode distort.Therefore, there is an urgent need to
Optimize support construction, reduces support loss.
Disclosure
(1) technical problems to be solved
Based on above-mentioned technical problem, the disclosure provides a kind of RF-MEMS resonator support knot for reducing energy loss
Structure is increased with alleviating resonator supporting beam elastic potential energy in the prior art, support loss aggravation, the decaying of Q value, and along with humorous
The technical issues of device mode of shaking distortion.
(2) technical solution
The disclosure provides a kind of RF-MEMS resonator support construction for reducing energy loss, comprising: supporting beam,
One end is connect along the edge of resonator with resonator, and the other end is connect with rear end support construction；Rear end support construction is set to institute
It states between supporting beam and pedestal, for reducing the coupling stiffness between the supporting beam and pedestal, increases solid-air interface, be reflected towards
The elastic wave of rear end support construction two sides transmission；At least two-stage energy block structure, setting is in the supporting beam and described
On the junction of rear end support construction, the rear end support construction and/or pedestal, tied for blocking elastic wave to support in resonator
Diffusion path in structure.
It include multiple turnovers and/or curved shape in the supporting beam, for reducing in some embodiments of the present disclosure
Rigidity and amplitude extend acoustic transmission path, increase solid-air interface.
In some embodiments of the present disclosure, the shape of the supporting beam includes: S-shaped, circular ring shape, square frame-shaped, comb teeth shape
Or in which at least two shape combination.
In some embodiments of the present disclosure, the supporting beam include: straight beam, folded beam, Vierendeel girder, Curved beam or in which
The combination of at least two structures；It wherein, include described at least one between the resonator and each rear end support construction
Supporting beam.
In some embodiments of the present disclosure, the shape of the supporting beam is axial symmetry, central symmetry or rotational symmetry.
In some embodiments of the present disclosure, in which: the connection of the supporting beam and the rear end support construction is set
The energy block structure at place is single or array arrangement multiple hole configurationss；The shape of the hole includes: triangle, ladder
The combination of shape, arc, rectangle or in which at least two shapes；Filler in the described hole of the energy block structure is air
Or the solid material that acoustic impedance is different from the rear end support construction.
In some embodiments of the present disclosure, in which: the rear end support construction and/or the second level on pedestal and/or two
Grade or more the energy block structure be single or array arrangement multiple hole configurationss；The shape of the hole include: rectangle,
The combination of fan-shaped, ellipse or in which at least two shapes；Filler in the described hole of the energy block structure is air
Or the solid material that acoustic impedance is different from the rear end support construction.
In some embodiments of the present disclosure, in which: the shape of the rear end support construction include: rectangular beam, folded beam,
The combination of Curved beam or in which at least two shapes；The company of the rear end support construction and the supporting beam and/or the pedestal
The place of connecing is provided with the energy block structure.
In some embodiments of the present disclosure, in which: the resonator works are in face or under out-of-plane vibration mode, packet
It includes: Lam é mode, goblet shape mode, Echo Wall mode, out-of-plane bending mode；The shape of the resonator includes: rectangular, circle
Shape, annular；The material of the resonator includes: silicon substrate, diamond, Group III-V semiconductor, piezoelectric material.
In some embodiments of the present disclosure, the supporting beam, the rear end support construction and the pedestal include 4
It is a.
(3) beneficial effect
It can be seen from the above technical proposal that the RF-MEMS resonator branch for reducing energy loss that the disclosure provides
Support structure one of has the advantages that or in which a part:
(1) the RF-MEMS resonator support construction for reducing energy loss that the disclosure provides is for exploitation high-frequency
The technical bottleneck of high q-factor resonator proposes a kind of low-loss support structure designs scheme, in the premise for not increasing technology difficulty
Under significantly improve device performance, realize the mass production of high-performance resonator, make RF-MEMS resonator in wireless communication system
In have broader practice prospect；
(2) what the disclosure provided can be widely used in for reducing the RF-MEMS resonator support construction of energy loss
In all kinds of faces based on support beam structure or out-of-plane vibration modal resonance device, there is wide applicability and good expansion,
Shorten the R&D cycle while significantly improving device performance, improves the market competitiveness of RF-MEMS device.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the RF-MEMS resonator support construction for reducing energy loss that the disclosure provides.
Fig. 2 is another structure for the RF-MEMS resonator support construction for reducing energy loss that the disclosure provides
Schematic diagram.
Fig. 3 is the yet another construction for the RF-MEMS resonator support construction for reducing energy loss that the disclosure provides
Schematic diagram.
[embodiment of the present disclosure main element symbol description in attached drawing]
1- resonator；
10- supporting beam；
11- straight beam；
12- Curved beam；
The rear end 20- support construction；
30- energy block structure；
40- pedestal；
50- plane wineglass mode；
60- displacement node；
70- square contour mode.
Specific embodiment
The disclosure provide the RF-MEMS resonator support construction for reducing energy loss by setting supporting beam, after
End support construction and the energy block structure being arranged under the premise of capable of not increasing technology difficulty and cost, reduce
The amplitude and rigidity of high-frequency reonsator support construction, reduce the distortion distortion of mode, and propose high q-factor.
For the purposes, technical schemes and advantages of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference
The disclosure is further described in attached drawing.
The embodiment of the present disclosure provides a kind of RF-MEMS resonator support construction for reducing energy loss, such as Fig. 1 to figure
Shown in 3, comprising: supporting beam 10, rear end support construction 20 and energy block structure 30.
In some embodiments of the present disclosure, as shown in Figure 1 to Figure 3, one end of supporting beam 10 along resonator 1 edge with
Resonator 1 (such as vibration displacement node 60 of resonator 1) connection, the other end are connect with rear end support construction 20；Rear end support
Structure 20 is set between supporting beam 10 and pedestal 40, for reducing the coupling stiffness between supporting beam 10 and pedestal 40, increase it is solid-
Vapor interface, the elastic wave of reflection 20 two sides of rear end support construction transmission；At least setting of two-stage energy block structure 30 is supporting
On the junction of beam 10 and rear end support construction 20, rear end support construction 20 and/or pedestal 40, for blocking elastic wave in resonance
Diffusion path in device support construction；Wherein, the energy block of the junction of supporting beam 10 and rear end support construction 20 is set
Structure 30 is based on acoustic impedance mismatch principle, reflects elastic wave, realizes energy block, for blocking elastic wave to support to tie in rear end
Energy is reflected back in resonator 1 by the diffusion path in structure 20, reduces the support loss of beam root；Setting is supported in rear end and is tied
Energy block structure 30 on structure 20 and/or pedestal 40 is not reflected by the energy block structure 30 in preceding setting for blocking, after
Continue the elastic wave transmitted to pedestal 40, reduce the energy for being coupled into pedestal 40, reduces loss.
It include multiple turnovers and/or bending in supporting beam 10 as shown in Figure 1 to Figure 3 in some embodiments of the present disclosure
Shape extends acoustic transmission path, increases solid-air interface, enhance the reflection to elastic vibration and make for reducing rigidity and amplitude
With, reduction energy loss, while acoustic reflection effect can be enhanced, increase buffering effect.
In some embodiments of the present disclosure, as shown in Figure 1 to Figure 3, the shape of supporting beam 10 include: S-shaped, circular ring shape,
The combination of square frame-shaped, comb teeth shape or in which at least two shapes.
In some embodiments of the present disclosure, as shown in Figure 1 to Figure 3, supporting beam 10 includes: straight beam 11, folded beam, frame
The combination of beam, Curved beam 12 or in which at least two structures, forming Low rigidity, small amplitude structure being capable of shape using such setting
At multi-buffer, Low rigidity, small amplitude composite construction are formed, extends the transmission path of sound wave, increase and air contact area, adds
Reflection effect of the strong sound wave in solid-air interface.
It include that at least one supports between some embodiments of the present disclosure, resonator 1 and each rear end support construction 20
Beam 10.
In some embodiments of the present disclosure, as shown in Figure 1 to Figure 3, the shape of supporting beam 10 is axial symmetry, central symmetry
Or rotational symmetry.
In some embodiments of the present disclosure, the material of supporting beam 10 can be identical or different with resonator.
In some embodiments of the present disclosure, as shown in Figure 1 to Figure 3, in which: setting is in supporting beam 10 and rear end support knot
The energy block structure 30 of the junction of structure 20 is single or array arrangement multiple hole configurationss；The shape of the hole includes:
The combination of triangle, trapezoidal, arc, rectangle or in which at least two shapes；Filling in the hole of the energy block structure 30
Object is air or the acoustic impedance solid material different from rear end support construction 20.
In some embodiments of the present disclosure, as shown in Figure 1 to Figure 3, in which: rear end support construction 20 and/or pedestal 40
On second level and/or second level more than energy block structure 30 be single or array arrangement multiple hole configurationss；Rear end support
The shape of energy block structure 30 in structure 20 and/or pedestal 40 includes: rectangle, sector, ellipse or in which at least two
The combination of shape；Filler in the hole of the energy block structure 30 be air or acoustic impedance and rear end support construction 20 not
Same solid material.
In some embodiments of the present disclosure, as shown in Figure 1 to Figure 3, in which: rear end support construction 20 is maximum according to realizing
The demand of energy reflection, shape includes: the combination of rectangular beam, folded beam, Curved beam or in which at least two shapes；Rear end branch
The junction of support structure 20 and supporting beam 10 and/or pedestal 40 is provided with energy block structure 30.
In some embodiments of the present disclosure, the material and resonator of rear end support construction 20 are identical or different.
In some embodiments of the present disclosure, in which: resonator works are in face or under out-of-plane vibration mode, comprising: Lam
é mode, goblet shape mode, Echo Wall mode, out-of-plane bending mode；The shape of resonator includes: rectangular, round, annular；Resonance
The material of device includes: silicon substrate, diamond, Group III-V semiconductor, piezoelectric material.
In some embodiments of the present disclosure, supporting beam 10, rear end support construction 20 and pedestal 40 include 4.
Below with multiple specific embodiments, the RF-MEMS for reducing energy loss that the embodiment of the present disclosure provides is verified
The validity of resonator support construction:
Embodiment one
Referring to Fig. 2, the present embodiment provides a kind of RF- for reducing energy loss with " convex shape " supporting beam 10
MEMS resonator support construction.
Resonator is work in the disk resonator of plane wineglass mode 50, and displacement node 60 is located on circumference, such as Fig. 2
(b)。
Supporting beam 10 is the composite beam of Low rigidity, is in " convex shape ", is axially symmetric structure, double folding girder construction is to drop
Low composite beam rigidity simultaneously works as a buffer shear stress suffered by supporting beam, reduces amplitude；Meanwhile foldable structure increases and sky
The contact area of gas enhances the reflecting effect to coupling energy；
The energy block structure 30 that the junction of supporting beam 10 and rear end support construction 20 is arranged in uses inverted triangle hole
Structure, filler SiO2；
Energy block structure 30 in rear end support construction 20 uses rectangle hole configurations, filler SiO2；
Rear end support construction 20 uses simple string configuration, connection supporting beam 10 and pedestal 40.
Embodiment two
Referring to Fig. 3, the present embodiment provides a kind of RF- for reducing energy loss with cyclic structure supporting beam 10
MEMS resonator support construction.
Resonator is square resonator of the work in square contour mode 70, as shown in Fig. 3 (b).
Supporting beam 10 is the composite beam of Low rigidity, in a ring, is axially symmetric structure, including straight beam 11 and Curved beam 12, uses
To mitigate the rigidity of composite beam and work as a buffer to tensile stress suffered by composite beam, reduce amplitude；Meanwhile arcuate structure increases
Contact area with air enhances the reflecting effect to coupling energy；
The energy block structure 30 that the junction of supporting beam 10 and rear end support construction 20 is arranged in is poroid using inverted trapezoidal
Structure, filler are air；
For energy block structure 30 in rear end support construction 20 using fan-shaped cavernous structure, filler is air；
Rear end support construction 20 uses simple string configuration, connection supporting beam 10 and pedestal 40, the company with pedestal 40
Connect the energy block structure 30 that rectangle cavernous structure is nearby also distributed in position.
According to above description, those skilled in the art the embodiment of the present disclosure should be provided for reducing energy loss
RF-MEMS resonator support construction has clear understanding.
In conclusion the RF-MEMS resonator support construction for reducing energy loss that the disclosure provides is directed to high frequency
The supporting beam of resonator is limited by technique, it is difficult to which scaled down develops so that the problem of energy loss is excessive, and Q value decays
Novel Low rigidity, small amplitude composite support beam can reduce dissipation of the energy to pedestal, greatly by reducing support end elastic potential energy
Width reduces support loss, significantly improves Q value.
It should also be noted that, the direction term mentioned in embodiment, for example, "upper", "lower", "front", "rear", " left side ",
" right side " etc. is only the direction with reference to attached drawing, not is used to limit the protection scope of the disclosure.Through attached drawing, identical element by
Same or similar appended drawing reference indicates.When may cause understanding of this disclosure and cause to obscure, conventional structure will be omitted
Or construction.
And the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate the embodiment of the present disclosure
Content.In addition, in the claims, any reference symbol between parentheses should not be configured to the limit to claim
System.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of each open aspect,
Above in the description of the exemplary embodiment of the disclosure, each feature of the disclosure is grouped together into single implementation sometimes
In example, figure or descriptions thereof.However, the disclosed method should not be interpreted as reflecting the following intention: i.e. required to protect
The disclosure of shield requires features more more than feature expressly recited in each claim.More precisely, such as front
Claims reflect as, open aspect is all features less than single embodiment disclosed above.Therefore,
Thus the claims for following specific embodiment are expressly incorporated in the specific embodiment, wherein each claim itself
All as the separate embodiments of the disclosure.
Particular embodiments described above has carried out further in detail the purpose of the disclosure, technical scheme and beneficial effects
Describe in detail it is bright, it is all it should be understood that be not limited to the disclosure the foregoing is merely the specific embodiment of the disclosure
Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure
Within the scope of shield.
Claims (10)
1. a kind of RF-MEMS resonator support construction for reducing energy loss, comprising:
Supporting beam, one end are connect along the edge of resonator with resonator, and the other end is connect with rear end support construction；
Rear end support construction is set between the supporting beam and pedestal, for reducing the connection between the supporting beam and pedestal
Rigidity increases solid-air interface, is reflected towards the elastic wave of rear end support construction two sides transmission；
Junction, the rear end of the supporting beam and the rear end support construction is arranged at least two-stage energy block structure
In support construction and/or pedestal, for blocking diffusion path of the elastic wave in resonator support construction.
2. the RF-MEMS resonator support construction according to claim 1 for reducing energy loss, in the supporting beam
Extend acoustic transmission path for reducing rigidity and amplitude comprising multiple turnovers and/or curved shape, increase solid-air interface.
3. the RF-MEMS resonator support construction according to claim 2 for reducing energy loss, the supporting beam
Shape includes: the combination of S-shaped, circular ring shape, square frame-shaped, comb teeth shape or in which at least two shapes.
4. the RF-MEMS resonator support construction according to claim 2 for reducing energy loss, the supporting beam packet
It includes: the combination of straight beam, folded beam, Vierendeel girder, Curved beam or in which at least two structures；
It wherein, include supporting beam described at least one between the resonator and each rear end support construction.
5. the RF-MEMS resonator support construction according to claim 2 for reducing energy loss, the supporting beam
Shape is axial symmetry, central symmetry or rotational symmetry.
6. the RF-MEMS resonator support construction according to claim 1 for reducing energy loss, in which:
The energy block structure that the junction of the supporting beam and the rear end support construction is arranged in is single or array
Multiple hole configurationss of arrangement；
The shape of the hole includes: the combination of triangle, trapezoidal, arc, rectangle or in which at least two shapes；
Filler in the described hole of the energy block structure is that air or acoustic impedance are different from the rear end support construction
Solid material.
7. the RF-MEMS resonator support construction according to claim 1 for reducing energy loss, in which:
The energy block structure more than the rear end support construction and/or second level and/or second level on the pedestal is single
A or array arrangement multiple hole configurationss；
The shape of the hole includes: the combination of rectangle, sector, ellipse or in which at least two shapes；
Filler in the described hole of the energy block structure is that air or acoustic impedance are different from the rear end support construction
Solid material.
8. the RF-MEMS resonator support construction according to claim 1 for reducing energy loss, in which:
The shape of the rear end support construction includes: the combination of rectangular beam, folded beam, Curved beam or in which at least two shapes；
The junction of the rear end support construction and the supporting beam and/or the pedestal is provided with the energy block structure.
9. the RF-MEMS resonator support construction according to claim 1 for reducing energy loss, in which:
The resonator works are in face or under out-of-plane vibration mode, comprising: Lam é mode, goblet shape mode, Echo Wall mode,
Out-of-plane bending mode；
The shape of the resonator includes: rectangular, round, annular；
The material of the resonator includes: silicon substrate, diamond, Group III-V semiconductor, piezoelectric material.
10. the RF-MEMS resonator support construction according to any one of claim 1 to 9 for reducing energy loss,
The supporting beam, the rear end support construction and the pedestal include 4.
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| CN110661506A (en) * | 2019-09-20 | 2020-01-07 | 中国科学院半导体研究所 | RF-MEMS resonator based on bulk acoustic wave vibration mode coupling |
| CN110661506B (en) * | 2019-09-20 | 2021-09-10 | 中国科学院半导体研究所 | RF-MEMS resonator based on bulk acoustic wave vibration mode coupling |
| CN110775936A (en) * | 2019-11-18 | 2020-02-11 | 中国电子科技集团公司第二十六研究所 | Miniature three-dimensional stacked MEMS (micro-electromechanical systems) resonance device |
| CN112187006A (en) * | 2020-11-30 | 2021-01-05 | 中国电力科学研究院有限公司 | Power sensor and MEMS-based power equipment vibration micro-energy acquisition device thereof |
| CN112187006B (en) * | 2020-11-30 | 2021-03-09 | 中国电力科学研究院有限公司 | Power sensor and its MEMS-based vibration micro-energy acquisition device for power equipment |
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